CN104197922A - Gyroscope two-phase sampling front-end amplifier and gyroscope signal sampling control method - Google Patents

Gyroscope two-phase sampling front-end amplifier and gyroscope signal sampling control method Download PDF

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Publication number
CN104197922A
CN104197922A CN201410373278.3A CN201410373278A CN104197922A CN 104197922 A CN104197922 A CN 104197922A CN 201410373278 A CN201410373278 A CN 201410373278A CN 104197922 A CN104197922 A CN 104197922A
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China
Prior art keywords
gyroscope
switch
operational amplifier
power supply
clock
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CN201410373278.3A
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CN104197922B (en
Inventor
李荣宽
薛晓军
周骏
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JIAXING NAJIE MICROELECTRONIC TECHNOLOGY Co Ltd
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JIAXING NAJIE MICROELECTRONIC TECHNOLOGY Co Ltd
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Priority to CN201410373278.3A priority Critical patent/CN104197922B/en
Publication of CN104197922A publication Critical patent/CN104197922A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719

Abstract

The invention discloses a gyroscope two-phase sampling front-end amplifier. The gyroscope two-phase sampling front-end amplifier comprises an operational amplifier, a power supply, a first switch pair and a second switch pair, a plurality of charging and discharging devices and a clock source, wherein the operational amplifier is connected with the upper pole plate connection end and the lower pole plate connection end of a gyroscope sensor model circuit; the power supply is connected between the gyroscope sensor model circuit and the operational amplifier; the first switch pair and the second switch pair are connected between the power supply and the operational amplifier; the plurality of charging and discharging devices are arranged in the gyroscope sensor model circuit and the operational amplifier, connected with the power supply and used for charging according to the closing of the first switch pair and discharging according to the closing of the second switch pair. By virtue of the gyroscope two-phase sampling front-end amplifier, the problem that the middle polar plate of the existing gyroscope circuit front-end amplifier cannot be directly connected with the ground can be solved; the gyroscope two-phase sampling front-end amplifier is insensitive to the common mode voltage drift; the error caused by mismatching of reference capacitors can be eliminated; the imbalance and low-frequency noise of the circuit can be reduced. The invention also discloses a signal sampling control method integrated with the gyroscope two-phase sampling front-end amplifier.

Description

Gyroscope two-phase sampling front-end amplifier and gyroscope signal sampling control method
Technical field
The present invention relates to gyroscope two-phase sampling front-end amplifier circuit and signal controlling principle thereof.
Background technology
High accuracy gyroscope instrument and accelerometer be due to the widespread use in precise navigation, automotive electronics, intelligent robot, Industry Control and consumption electronic product, and enjoy favor.MEMS gyroscope can be equivalent to a pair of dynamic differential variation electric capacity, and its capacitance variations can reflect the variation of measured physical quantity, capacitance change general 10 -18～10 -12f, sensitivity, resolution and the range of linearity to capacitive readout circuit all proposed comparatively harsh requirement.Existing gyrostatic middle plate all will connect on the spot, but existing gyroscope sensing circuit front end convert of capacitor to voltage module one end access power supply V dd, other end ground connection, its middle plate can not directly connect (as shown in a kind of embodiment of Fig. 1 routine techniques), middle plate access voltage is V dd/ 2 (Vcm), and its great majority are by connecting a super large resistance eutral grounding, cannot realize the real power supply of direct connection and improve system stability.
Summary of the invention
The present invention is intended to solve aforementioned disadvantages, designs a kind of gyroscope two-phase sampling front-end amplifier, can not directly connect problem on the spot to solve existing gyro sensor precircuit front-end amplifier middle plate.Gyroscope front-end amplifier structure of the present invention is by Double-phase switch mode, insensitive to common mode voltage drift, and can eliminate the error that reference capacitance mismatch is introduced, simultaneously in conjunction with Correlated Double Sampling, to reduce imbalance and the low-frequency noise of circuit of the present invention.
In order to solve the problems of the technologies described above, the present invention adopts following technical scheme: gyroscope two-phase sampling front-end amplifier, it is connected in gyro sensor precircuit, comprising: connect the top crown link of described gyro sensor precircuit, the operational amplifier of bottom crown link; Be connected at least one pair of power supply between described gyro sensor precircuit and operational amplifier loop; Be arranged in the first switch between described power supply and operational amplifier loop to, second switch pair; And being arranged at the multiple devices that discharge and recharge in described gyro sensor precircuit and operational amplifier loop, they connect described power supply and charge and discharge according to the right closure of second switch according to the right closure of the first switch.It further comprises clock source, design described clock source with: set second clock T 2, closed the first switch, to charge for discharging and recharging device by power supply, makes operational amplifier gather the first sampled signal at this moment; Set the first clock T 1, closed second switch discharges to operational amplifier to discharging and recharging device described in making at this moment, makes operational amplifier gather the second sampled signal, is processed subsequently by its difference output end output voltage signal to subsequent process circuit.
Further, gyro sensor precircuit preferably comprises top crown link, middle plate link and the bottom crown link be located in gyroscope gauge outfit, and wherein said middle plate link connects on the spot.Wherein top crown link connects the first power supply (V h) or second source (V l), the same link of described bottom crown connects the first power supply or second source.Upper and lower pole plate link becomes symmetrical expression setting according to middle plate, is zero at middle plate place electromotive force.
Wherein, (comprise first at power supply, second source, or two high electronegative potentials that power supply provides, for example high level is made as supply voltage, low level is made as GND Value) and top crown link, between bottom crown link, be provided with switch pair, for in the time of the first power supply, gauge tap is come first closure, the second sensor equivalence capacitor charging, in the time of second source, disconnect a part of switch wherein to and closed another part switch pair, the potential difference (PD) that sensor equivalence electric capacity is provided according to second source discharges electric charge to late-class circuit, the inertial force deflection sensing according to gyroscope self is discharged.
In one embodiment, described in, discharge and recharge device and comprise at least one pair of capacitor.
In one embodiment, described at least one pair of power supply comprises provides the first voltage V hthe first power supply, and provide second voltage V lsecond source, wherein said the first power supply is described gyro sensor precircuit, is discharged and recharged device and charge by the right closure of the first switch; Described second source discharges and recharges device by the right closure access of second switch makes operational amplifier produce control voltage to make it electric discharge.
In one embodiment, further comprise a pair of regulated power supply, described in being used to, discharge and recharge device tertiary voltage V is provided u, V d.
In one embodiment, further comprise the 3rd switch pair, described in being coupled in, discharge and recharge between device and operational amplifier, the 3rd period of time T of setting at clock source 2Ainside be able to closure and operational amplifier output is resetted.
In one embodiment, neutral ground point is set on the link circuit of described at least one pair of power supply and operational amplifier, arranges with the equal ground connection in equipotential position of aforementioned middle plate.
Based on aforementioned schemes, the invention also discloses a kind of signal sampling control method of integrated gyroscope front-end sampling amplifier, comprise step: 1) provide second clock T by clock source 2, now control the first switch to closure, with make the first power supply for discharging and recharging device, gyro sensor precircuit provides the first voltage V hto charge; 2) by clock source at described the first clock T 1after second clock T is provided 2, now control second switch to closure, with make second source for discharging and recharging device, gyro sensor precircuit provides second voltage V ldischarge making it; 3) provide the 3rd clock T 2A, now closed the 3rd switch to and operational amplifier output is resetted; 4) by tunable capacitor, discharge and recharge device and carry out electric charge transfer to operational amplifier, make described operational amplifier that charge signal is converted to voltage control signal and exported.
In one embodiment, described the first clock T 1, second clock T 2with the 3rd clock T 2Adifferent.
In one embodiment, step 1) further comprise step: provide tertiary voltage V by a pair of regulated power supply for the described device that discharges and recharges u, V d.
Brief description of the drawings
Fig. 1 schematically shows a kind of middle plate access V of routine techniques dDthe circuit theory diagrams of the gyroscope front-end amplifier of/2 (Vcm);
Fig. 2 generality shows the circuit theory diagrams of the front-end amplifier of the embodiment of the present invention;
The clock signal schematic diagram that Fig. 3 provides for clock source of the present invention;
Fig. 4 is that front-end amplifier of the present invention is in clock T 2under equivalent circuit diagram;
Fig. 5 is that front-end amplifier of the present invention is in clock T 1under equivalent circuit diagram.
Embodiment
With reference to Fig. 2, the middle plate of a gyro sensor precircuit embodiment connects on the spot and has single power supply, comprises the top crown link S arranging in gyroscope gauge outfit top, middle plate link S ctrwith bottom crown link S bot.Wherein, top crown link S topconnect the first power supply V h(being made as supply voltage) or second source V l(being made as GND Value), bottom crown link S botconnect equally symmetrically the first power supply or second source, wherein at top crown link S topwith middle plate link S ctrbetween.
In Fig. 2, a two-phase sampling front-end amplifier is connected in gyro sensor precircuit further, and it preferably comprises that positive and negative input end connects the top crown link S of described gyro sensor precircuit separately top, bottom crown link S botoperational amplifier A; Be connected in the power supply between described gyro sensor precircuit and operational amplifier A; Be arranged in the first switch between described power supply and operational amplifier A to, second switch pair; And discharge and recharge device, be connected in described power supply, and charge and discharge according to the right closure of second switch according to the right closure of the first switch.In Fig. 2, second switch is to comprising mutually according to the symmetrically arranged S of the transverse center of circuit 2u, S 2d, S 4u, S 4d, S 7u, S 7d, S 9u, S 9d, the first switch is to comprising S 1u, S 1d, S 3u, S 3d, S 5u, S 5d, S 6u, S 6d, S 10u, S 10d.And, discharge and recharge device comprise shown in figure with the symmetrically arranged capacitor of each circuit node.
Wherein, top crown link S topwith switch S 1uconnect switch S 1uthe other end connect DC voltage V h.Switch S 2uone end and top crown link S topconnect other end connecting valve S 3uone end, switch S 4uone end and capacitor C 1uone end.Switch S 3uthe other end connect adjustable voltage V u; Capacitor C 1uthe other end connect on the spot; Switch S 4uother end connecting valve S 5uone end, capacitor C 2uone end, capacitor C 3uone end and capacitor C 4uone end.Switch S 5uthe other end connect on the spot.Capacitor C 2uother end connecting valve S 6uone end and switch S 7uone end, switch S 6uthe other end connect voltage V h, switch S 7uthe other end connect voltage V l.Capacitor C 3ureverse input end and the switch S of other end concatenation operation amplifier A 8uone end.Switch S 8uother end connecting valve S 9uone end and the forward output terminal V of operational amplifier A outp.Capacitor C 4uother end connecting valve S 9uthe other end and switch S 10uone end.Switch S 10uother end connecting analog ground.
In one embodiment, middle plate link S ctrconnect power supply on the spot.Accordingly, at power supply V h, V lon the link circuit of operational amplifier A, i.e. S 1uwith S 1d, S 5uwith S 5dbetween earth point is set accordingly, arrange with the equal ground connection in the equipotential position of aforementioned middle plate.
In another embodiment, bottom crown link S botwith switch S 1dconnect switch S 1dthe other end connect voltage V h.Switch S 2done end and bottom crown link S botconnect other end connecting valve S 3done end, switch S 4done end and capacitor C 1done end.Switch S 3dthe other end connect adjustable voltage V d; Capacitor C 1dthe other end connect on the spot; Switch S 4dother end connecting valve S 5done end, capacitor C 2done end, capacitor C 3done end and capacitor C 4done end.Switch S 5dthe other end connect on the spot.Capacitor C 2dother end connecting valve S 6done end and switch S 7done end, switch S 6dthe other end connect voltage V h, switch S 7dthe other end connect voltage V l.Capacitor C 3dpositive input and the switch S of other end concatenation operation amplifier A 8done end.Switch S 8dother end connecting valve S 9done end and the inverse output terminal V of operational amplifier A outn.Capacitor C 4dother end connecting valve S 9dthe other end and switch S 10done end.Switch S 10dother end connecting analog ground.
In one embodiment, switch S 2u, S 2d, S 4u, S 4d, S 7u, S 7d, S 9u, S 9dby a clock source (unnecessary showing in Fig. 2) clock signal T 1control switch S 1u, S 1d, S 3u, S 3d, S 5u, S 5d, S 6u, S 6d, S 10u, S 10dby clock signal T 2control.And in another embodiment, wherein switch S 8u, S 8dby clock signal T 2Acontrol.
Fig. 3 is clock input signal sequential chart of the present invention.Sequential chart from Fig. 3 can be found out, second clock T 2negative edge when high level and the first clock T 1rising edge there is non-overlapped time I, the 3rd clock T 2Awith second clock T 2there is non-overlapped time II at negative edge, the first clock T 1, second clock T 2with the 3rd clock T 2Alength is different, is determined by the characteristic of analog device.
As second clock signal T 2during for high level, gauge tap S 1u, S 1d, S 3u, S 3d, S 5u, S 5d, S 6u, S 6d, S 10u, S 10d, S 8uand S 8din conducting state, circuit working state is now equivalent electrical circuit as shown in Figure 4.Now capacitor C s1, C s2, C 2u, C 2dconnect V h, start to gather electric charge; Capacitor C 1u, C 1dconnect respectively adjustable voltage V u, V d, start to gather electric charge; Capacitor C 4u, C 4dconnecting analog ground end, starts to gather electric charge; Thereby capacitor C 3u, C 3dthe quantity of electric charge remain unchanged; Operational amplifier A is in reset mode.
As the first clock signal T 1during for high level, gauge tap S 2u, S 2d, S 4u, S 4d, S 7u, S 7d, S 9u, S 9din conducting state, circuit working state is now equivalent electrical circuit as shown in Figure 5.Now, second voltage V lfor 0V, access capacitor, makes capacitor C s1, C s2, C 2u, C 2d, C 1u, C 1d, C 4u, C 4dthe quantity of electric charge of upper gathering is all in electric discharge, to capacitor C 3u, C 3dupper transfer charge.Operational amplifier A is converted to voltage signal by difference output end V by charge signal outp, V outnoutput.
The embodiment of the present invention is only schematic description technique effect, and its scope required for protection is limited by appended claims.

Claims (9)

1. a gyroscope two-phase sampling front-end amplifier, is connected in gyro sensor precircuit, it is characterized in that comprising: connect the top crown link of described gyro sensor precircuit, the operational amplifier of bottom crown link;
Be connected at least one pair of power supply between described gyro sensor precircuit and operational amplifier loop;
Be arranged in the first switch between described power supply and operational amplifier loop to, second switch pair;
And be arranged at the multiple devices that discharge and recharge in described gyro sensor precircuit and operational amplifier loop, discharge and recharge device and connect described power supply and charge and discharge according to the right closure of second switch according to the right closure of the first switch;
Also comprise clock source, design described clock source with: set second clock T 2, closed the first switch, to charge for discharging and recharging device by power supply, makes operational amplifier gather the first sampled signal at this moment; Set the first clock T 1, closed second switch discharges to operational amplifier to discharging and recharging device described in making at this moment, makes operational amplifier gather the second sampled signal, is processed subsequently by its difference output end output voltage signal to post processing electric circuit.
2. gyroscope two-phase sampling front-end amplifier according to claim 1, it is characterized in that: described gyro sensor precircuit comprises top crown link, middle plate link and the bottom crown link be located in gyroscope gauge outfit, wherein said middle plate link connects on the spot, described top crown link and bottom crown link are connected to respectively power supply, and become symmetrical expression setting according to middle plate.
3. gyroscope two-phase sampling front-end amplifier according to claim 1, is characterized in that: described at least one pair of power supply comprises provides the first voltage V hthe first power supply, and provide second voltage V lsecond source, wherein said the first power supply is described gyro sensor precircuit, is discharged and recharged device and charge by the right closure of the first switch; Described second source discharges and recharges device by the right closure access of second switch makes operational amplifier produce control voltage to make it electric discharge.
4. gyroscope two-phase sampling front-end amplifier according to claim 3, is characterized in that: further comprise a pair of regulated power supply, discharge and recharge device tertiary voltage V is provided described in being used to u, V d.
5. gyroscope two-phase sampling front-end amplifier according to claim 1, is characterized in that: neutral ground point is set on the link circuit of described at least one pair of power supply and operational amplifier, arranges with the equal ground connection in equipotential position of aforementioned middle plate.
6. gyroscope two-phase sampling front-end amplifier according to claim 1, is characterized in that: further comprise the 3rd switch pair, discharge and recharge between device and operational amplifier described in being coupled in, the 3rd period of time T of setting at clock source 2Ainside be able to closure and operational amplifier is resetted.
7. a gyroscope signal sampling control method for the sampling of the gyroscope two-phase based on claim 1 front-end amplifier, is characterized in that comprising step:
1) provide second clock T by clock source 2, now control the first switch to closure, with make the first power supply for discharging and recharging device, gyro sensor precircuit provides the first voltage V hto charge;
2) by clock source at described the first clock T 1after second clock T is provided 2, now control second switch to closure, with make second source for discharging and recharging device, gyro sensor precircuit provides second voltage V ldischarge making it;
3) provide the 3rd clock T 2A, now closed the 3rd switch to and operational amplifier is resetted;
4) by gyro sensor precircuit, discharge and recharge device and carry out electric charge transfer to operational amplifier, make described operational amplifier that charge signal is converted to voltage control signal and exported.
8. gyroscope signal sampling control method according to claim 7, is characterized in that in step 1) further comprise: provide tertiary voltage V by a pair of regulated power supply for the described device that discharges and recharges u, V d.
9. gyroscope signal sampling control method according to claim 7, is characterized in that: described the first clock T 1, second clock T 2with the 3rd clock T 2Aduration is different.
CN201410373278.3A 2014-07-31 2014-07-31 Gyroscope two-phase sampling front-end amplifier and gyroscope signal sampling control method Active CN104197922B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111510143A (en) * 2020-04-03 2020-08-07 四川知微传感技术有限公司 Front-end circuit for direct conversion from capacitance to digital quantity
CN116545428A (en) * 2023-07-05 2023-08-04 成都市晶蓉微电子有限公司 High-precision capacitance-to-voltage conversion error trimming circuit and method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101271125A (en) * 2008-05-12 2008-09-24 清华大学 Capacitance type micro-accelerometer
US20100308935A1 (en) * 2009-06-05 2010-12-09 Stmicroelectronics S.R.L. Switched-capacitor band-pass filter of a discrete-time type, in particular for cancelling offset and low-frequency noise of switched-capacitor stages
CN102297688A (en) * 2010-06-25 2011-12-28 中国科学院电子学研究所 Full-differential capacitance reading circuit for crosswise sampling secondary charge summation
EP2428774B1 (en) * 2010-09-14 2013-05-29 Stichting IMEC Nederland Readout system for MEMs-based capacitive accelerometers and strain sensors, and method for reading
CN204007638U (en) * 2014-07-31 2014-12-10 嘉兴市纳杰微电子技术有限公司 Gyroscope two-phase sampling front-end amplifier

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101271125A (en) * 2008-05-12 2008-09-24 清华大学 Capacitance type micro-accelerometer
US20100308935A1 (en) * 2009-06-05 2010-12-09 Stmicroelectronics S.R.L. Switched-capacitor band-pass filter of a discrete-time type, in particular for cancelling offset and low-frequency noise of switched-capacitor stages
CN102297688A (en) * 2010-06-25 2011-12-28 中国科学院电子学研究所 Full-differential capacitance reading circuit for crosswise sampling secondary charge summation
EP2428774B1 (en) * 2010-09-14 2013-05-29 Stichting IMEC Nederland Readout system for MEMs-based capacitive accelerometers and strain sensors, and method for reading
CN204007638U (en) * 2014-07-31 2014-12-10 嘉兴市纳杰微电子技术有限公司 Gyroscope two-phase sampling front-end amplifier

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
HYUNHO KIM 等: "A Digitally Trimmable Continuous-Time Capacitive Readout ASIC for MEMS vibratory gyroscope", 《INTERNATIONAL JOURNAL OF ADVANCEMENTS IN COMPUTING TECHNOLOGY(IJACT)》 *
ZHANG CHONG 等: "Noise and mismatch optimization for capacitive MEMS readout", 《JOURNAL OF SEMICONDUCTORS》 *
吴其松 等: "一种适用于MEMS陀螺仪的高性能电容读出电路", 《仪器仪表学报》 *
尹韬 等: "一种用于电容型体硅微陀螺的低噪声读出电路芯片", 《电子与信息学报》 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111510143A (en) * 2020-04-03 2020-08-07 四川知微传感技术有限公司 Front-end circuit for direct conversion from capacitance to digital quantity
CN116545428A (en) * 2023-07-05 2023-08-04 成都市晶蓉微电子有限公司 High-precision capacitance-to-voltage conversion error trimming circuit and method
CN116545428B (en) * 2023-07-05 2023-09-26 成都市晶蓉微电子有限公司 High-precision capacitance-to-voltage conversion error trimming circuit and method

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