CN206321662U - A kind of MEMS twin-axis accelerometers - Google Patents
A kind of MEMS twin-axis accelerometers Download PDFInfo
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- CN206321662U CN206321662U CN201621414236.0U CN201621414236U CN206321662U CN 206321662 U CN206321662 U CN 206321662U CN 201621414236 U CN201621414236 U CN 201621414236U CN 206321662 U CN206321662 U CN 206321662U
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Abstract
The utility model discloses a kind of MEMS twin-axis accelerometers, the accelerometer includes successively from down to up：Substrate, insulating barrier, Sensitive Apparatus layer；Sensitive Apparatus layer includes：Fixed frame, folded beam, sensitive-mass block, broach combination, anchor point；Wherein, fixed frame is fixed on substrate by insulating barrier, and 4 ends angle of sensitive-mass block is respectively equipped with a pair of folded beams, and the center line of each pair folded beam is orthogonal, and one end of folded beam is connected with fixed frame, and the other end of folded beam is connected with sensitive-mass block；Multiple broach combinations are distributed with sensitive-mass block surrounding, and broach combination includes：Fixed broach and movable comb, fixed broach one end are connected with fixed frame, and movable comb one end is connected with sensitive-mass block, realize the technique effect that the sensitivity of capacitive MEMS twin-axis accelerometer is high, quadrature error is small.
Description
Technical field
The utility model is related to mems accelerometer design studies field, in particular it relates to a kind of MEMS two-axis accelerations
Meter.
Background technology
Mems accelerometer is widely used in the numerous areas such as consumer electronics, auto industry, aviation military affairs, and with
The development of microelectric technique and the continuous progress of micro-machining, mems accelerometer wearable device, unmanned plane,
The sensory fields such as Internet of Things (IoT), vibration and navigation have also embodied particularly important value, with wide market prospects.
Accelerometer is mainly used in measuring acceleration of the moving object relative to inertial space, different according to its Cleaning Principle
Pressure resistance type, piezoelectric type, resonant mode, tunnelling current formula and condenser type can be divided into, for the requirement such as temperature coefficient, resolution ratio, precision
Higher low g accelerometers are typically detected using condenser type.
Capacitive accelerometer is broadly divided into comb-tooth-type and flat two kinds, and flat accelerometer is primarily present following several
Individual problem：Dual surface lithography, bonding are needed, difficulty of processing is big, if reduction device thermal noise, improves precision, it is necessary to carry out vacuum
Encapsulation, packaging cost is high, and poor repeatability, device yield is low.Multi-finger microaccelerometer (changed area/change spacing type) is without double
Face photoetching, processing technology is simple, can reduce device thermal noise by making damping hole on mass, can carry out atmospheric packaged,
Batch production can be achieved in low cost of manufacture, technical maturity.
Traditional accelerometer is generally the single-axis sensors of single vector detection, with constantly changing for sensor application environment
Become, single-axis accelerometer can not meet application demand, it is necessary to using the accelerometer of twin shaft, and traditional twin-axis accelerometer
Orthogonally it is encapsulated using by two single-axis accelerometers, this necessarily introduces larger quadrature error, influences sensor accuracy,
Assembling simultaneously is difficult, device volume is big, be more expensive to manufacture；Existing twin-axis accelerometer technical scheme has using broach variable area
Type structure and two-axis acceleration measurement is carried out using orthogonal snakelike support beam comb structure, both schemes are unfortunately：Before
The accelerometer response that person is constituted is relatively low, and resolution ratio is poor, and it is sensitive that the accelerometer that the latter is constituted can produce larger intersection
Degree, stability is poor.
Utility model content
The utility model provides a kind of MEMS twin-axis accelerometers, solves existing twin-axis accelerometer sensitivity
Low, the sensitive big technical problem of intersection, realizes the technology that the sensitivity of capacitive MEMS twin-axis accelerometer is high, quadrature error is small
Effect.
In order to solve the above technical problems, this application provides a kind of MEMS twin-axis accelerometers, the accelerometer is under
Include successively to upper：
Substrate, insulating barrier, Sensitive Apparatus layer；Sensitive Apparatus layer includes：Fixed frame, folded beam, sensitive-mass block, broach
Combination, anchor point；Wherein, fixed frame is fixed on substrate by anchor point, and 4 ends angle of sensitive-mass block is respectively equipped with a doubling
Stoplog, the center line of each pair folded beam is orthogonal, and one end of folded beam is connected with fixed frame, the other end and sensitive-mass of folded beam
Block is connected；Multiple broach combinations are distributed with sensitive-mass block surrounding, and broach combination includes：Fixed broach and movable comb, it is fixed
Broach one end is connected with fixed frame, and movable comb one end is connected with sensitive-mass block.
Wherein, the sensitive-mass block can realize quality adjustment by designing the size and number of change cavity, can root
Needed according to practical application, adjust the sensitive-mass block quality, realize that higher sensitivity is detected.
Wherein, the folded beam is relatively small in sensitive axes directional stiffness, is easily deformed, in non-sensitive direction of principal axis rigidity very
Greatly, it is unlikely to deform, cross sensitivity can be suppressed, prevents that quadrature error from influenceing, can be with while the folded beam is non-linear very small
Discharge structure residual stress, the influence of reduction residual stress and temperature to device.
Wherein, 4 pairs of folded beams are symmetrical on the geometric center of sensitive-mass block, and multiple broach combinations are on sensitive-mass block
Center line it is symmetrical.
Wherein, the accelerometer also includes：Second fixed frame, second fixed frame is located at sensitive-mass block
Interior, the second fixed frame includes：First fix bar, the second fix bar, the first fix bar are in ten with the second fix bar interconnection
Shape, the center superposition of the first fix bar and the second fix bar, the first fix bar both sides and the second fix bar both sides are symmetrically divided
Multiple second broach combinations are furnished with, the combination of the second broach includes：Second fixed broach and the second movable comb, the second fixed broach
One end is connected with fix bar, and second movable comb one end is connected with sensitive-mass block inwall.
Wherein, the two ends of the first fix bar and the two ends of the second fix bar extend towards sensitive-mass block inwall respectively, and first
The two ends of fix bar and the second fix bar are respectively arranged at two ends with position limiting structure.
Wherein, it is uniformly provided with least one cavity in the sensitive-mass block.
Wherein, the insulating barrier is provided with center anchor point, and second fixed frame is fixed on by the central anchor point
On substrate, the insulating barrier is provided with surrounding anchor point, and the fixed frame is fixed on substrate by surrounding anchor point.
Wherein, fixed broach is parallel with movable comb, and both are in the horizontal direction or vertical direction has overlapping region, are
Make accelerometer response sufficiently large, while improving the utilization of chip area, make chip structure compact, the movable comb and phase
Gap ratio between two adjacent fixed broach is 1:4.
Wherein, the fixed broach connection identical electrode of fixed frame surrounding is distributed in, the second fixed frame two is distributed in
The second fixed broach connection identical electrode of side, fixed broach is equal with the second fixed broach quantity, and electric polarity is opposite.
Wherein, the material of substrate is silicon or glass, and Sensitive Apparatus layer is the silicon of heavy doping, and accelerometer is processed by MEMS
Technique is completed.
The utility model provides a kind of single-chip comb-tooth-type and becomes spacing type twin-axis accelerometer, by accelerometer
The innovative design of beam, mass and position limiting structure (stopper), the traditional twin-axis accelerometer sensitivity of solution is low, resolution ratio
Difference, the problems such as cross sensitivity is big, stability is poor, while the utility model effectively inhibits structural quadrature error, noise
Low, small volume, processing technology is simple, low cost, and batch production can be achieved.
Single-chip comb-tooth-type becomes spacing type twin-axis accelerometer：Including substrate, Sensitive Apparatus layer, substrate and Sensitive Apparatus layer
Between have insulating barrier；Sensitive Apparatus layer includes fixed frame, anchor point, folded beam, sensitive-mass block, fixed broach, movable comb
And stopper；Single mass structure combines the design of eight beam Central Symmetries in Sensitive Apparatus layer and broach becomes spacing symmetric configuration
The detection of X, Y two-axis acceleration signal is realized respectively；Make multipair movable using surface silicon process technology on sensitive-mass block
Multipair fixed broach is correspondingly made on broach, fixed frame, to constitute multipair difference sensitization capacitance, when accelerometer is in difference
When there is acceleration signal input in direction, corresponding capacitance variations will occur for difference sensitization capacitance, pass through the detection to changing electric capacity
Realize that two-axis acceleration is measured.
Stopper is designed on central cross chiasma type fixed frame, forms symmetrical structure.Folded beam is in eight beam
Heart symmetric design, axially has four folded beams to be symmetrically distributed in the sensitive axial both sides angle of the mass per sensitive, at the same with it is non-quick
Feel four symmetrical folded beam structure pairwise orthogonals of direction of principal axis, one end of the folded beam is connected to the fixed frame, separately
One end is connected to the sensitive-mass block.
The folded beam is easily deformed on sensitive direction of principal axis, larger in non-sensitive direction of principal axis rigidity.The sensitive-mass
The sensitive-mass of block be can adjust, and the main small mass by four attached cavity structures of the sensitive-mass block is symmetrical to be constituted,
The sensitive-mass block quality can be changed by designing the size and number of cavity.
The anchor point is divided into the anchor point for being distributed in surrounding, and also including devising center anchor point, central cross chiasma type is fixed
Framework is fixed and linked together by central anchor point.The fixed broach is placed in parallel with movable comb dislocation, described
Gap ratio between movable comb and two adjacent fixed broach is 1:4.It is distributed in the fixed frame surrounding position
The fixed broach connection identical electrode put, is centrally located the fixed comb of fixed frame position described in right-angled intersection
Tooth connects identical electrode, and the fixed broach quantity is equal at two positions, and electric polarity is on the contrary, upward in X or Y sensitive axes
When having acceleration signal, surrounding comb structure forms total differential capacitance signal with central cross crossover location comb structure.
The utility model compared with prior art, has the advantages that：
1st, the utility model is designed using eight folded beam pairwise orthogonal Central Symmetries, realizes two sensitive axes (X-axis and Y-axis)
The crossing decoupling in direction, restrained effectively structural quadrature error, with higher twin shaft accuracy of detection.
2nd, the utility model is by the quality design-adjustable of sensitive-mass block, i.e., cavity size and number in mass
It to be adjusted, on the one hand can increase mass quality, realize high sensitivity, the high resolution detection of twin-axis accelerometer；Separately
On the one hand also can be appropriate to reduce mass quality, the range of increased acceleration meter when ensureing sensitivity, resolution requirement.
3rd, the utility model makes electrode metal by the cross fixed frame in design centre position and center anchor point structure
Lead only needs at a Pad Bian Kecong centers anchor point (i.e. at the center superposition of the first fix bar and the second fix bar) to draw, pole
The big difficulty reduced in processing technology, improves product yield, reduces cost.
4th, by designing symmetrical stopper structures on cross fixed frame, it is therefore prevented that overload that is dynamic, determining broach is inhaled
Conjunction, Problem of Failure, add the stability and reliability of twin-axis accelerometer.
5th, by the design with chamber mass, the system damping of twin-axis accelerometer is reduced, accelerometer heat is reduced
Mechanical noise, improves the signal to noise ratio of twin-axis accelerometer.
6th, designed using the fixed broach of surrounding framework, center difference same polarity connection, effectively prevent twin shaft defeated
Enter signal to interfere, twin-axis accelerometer improves the accuracy of detection of accelerometer without cross sensitivity, while and movable comb
Differential type capacitance detecting is formed, suppression common mode can effectively disturb, improve accelerometer combination property.
7th, become spacing type capacitor design using broach, add it is dynamic, determine initial capacitance value between broach, reduce rear end micro-
The design difficulty of small capacitances signal deteching circuit.
8th, the design of single-chip two-axis acceleration, it is to avoid the problem of combination accelerometer package up rightness is poor, while body
Product is small, lightweight, without Vacuum Package, and processing technology is ripe, can batch micro operations, low cost.
Brief description of the drawings
Accompanying drawing described herein is used for providing further understanding the utility model embodiment, constitutes the one of the application
Part, does not constitute the restriction to the utility model embodiment；
Fig. 1 is the structural representation of MEMS twin-axis accelerometers in the application；
Fig. 2 is the structural representation of sensitive-mass block in the application.
Embodiment
The utility model provide a kind of MEMS twin-axis accelerometers, solve existing twin-axis accelerometer sensitivity compared with
The larger technical problem of difference, cross sensitivity, realizes capacitive MEMS twin-axis accelerometer sensitivity height, and quadrature error is small
Technique effect.
In order to be more clearly understood that above-mentioned purpose of the present utility model, feature and advantage, below in conjunction with the accompanying drawings and tool
The utility model is further described in detail body embodiment.It should be noted that in the case where not conflicting mutually,
Feature in embodiments herein and embodiment can be mutually combined.
Many details are elaborated in the following description to fully understand the utility model, still, this practicality
It is new can also be different from being described herein using other in the range of other modes implement, therefore, protection of the present utility model
Scope is not limited by following public specific embodiment.
As shown in figure 1, spacing type twin-axis accelerometer is become according to the single-chip comb-tooth-type of the utility model embodiment, including
There is substrate 1, its material is N-shaped DOPOS doped polycrystalline silicon；There is relatively thin silicon oxide layer on substrate 1, silicon oxide layer, which rises, to be dielectrically separated from and solid
It is set for using, anchor point 3 is fixed on substrate by silicon oxide layer；It is Sensitive Apparatus layer, Sensitive Apparatus layer material above silicon oxide layer
For p-type heavily doped silicon, Sensitive Apparatus layer includes fixed frame 2, folded beam 4, sensitive-mass block 5, movable comb 6,7,8,9,
10th, 11, fixed broach 12,13,14,15,16,17 and stopper18, each structure are completed by MEMS processing technologys；Gu
Determine framework 2 to be fixed on substrate 1 by anchor point 3, eight folded beams 4 of Central Symmetry design pass through pairwise orthogonal mode one
End is connected to four edges of sensitive-mass block 5, and the other end is then connected on corresponding surrounding fixed frame 2；It is fixed
Broach 12,13,14,15,16,17 is designed and produced on cross type fixed frame 2 and surrounding fixed frame 2, with fixed frame
Frame 2 is vertical, and is distributed each other along Central Symmetry, and is distributed in the fixed broach quantity of surrounding fixed frame 2 and is distributed in
The fixed broach quantity of crux of heart chiasma type fixed frame 2 is equal, and each fixed broach 12,13,14,15,16,17 has one
Corresponding movable comb 6,7,8,9,10,11 constitutes a pair of differential capacitance structures therewith, and movable comb 6,7,8,9,10,11 is set
Meter is produced on sensitive-mass block 5, and along Central Symmetry, and vertical distribution is in four sides of sensitive-mass block 5 and inwall, each movable
Gap-ratio between broach 6,7,8,9,10,11 and two adjacent fixed broach is 1:4；Stopper18 is designed and produced in cross
On chiasma type fixed frame 2, there is certain interval with the inwall of sensitive-mass block 5.
The main small mass by four attached cavity structures of sensitive-mass block 5 is symmetrical to be constituted, and is connected by folded beam 4
On fixed frame 2, folded beam 4, sensitive-mass block 5, movable comb 6,7,8,9,10,11 pass through structural cavity body and structure interval
With reference to the release of MEMS etching process directly etching, hanging structure is obtained.
It should be noted that：The mass of sensitive-mass block 5 can adjust, as shown in Fig. 2 can be by changing the size sum of cavity
Amount goes to change the quality of sensitive-mass block 5, and then optimizes the combination property of twin-axis accelerometer.
Utility model works principle：Capacitance change signal will be converted to by sensing element by acceleration signals,
By the analysis of follow-up signal process circuit, the linearity test of acceleration is realized.
Initial capacitance C between the parallel broach of adjacent pair0It is represented by (because comb structure uses fixed tooth bias
Formula, and movable comb is 1 away from both sides fixed tooth gap-ratio:4, therefore ignore side capacitance in larger distance)：
In formula, ε0For permittivity of vacuum, ε1For relative dielectric constant, a, h, d0Respectively move, determine overlapping length between broach
Degree, thickness and spacing.
The variation delta C that a pair of electric capacity when having micro-displacement change between broach are can obtain by formula (1) is：
When utility model works are in one-dimensional case, it might as well assume that accelerometer is only made by along Y-axis negative direction acceleration
With now, due to inertia force effect micro-displacement will occur to Y-axis positive direction for sensitive-mass block 5, and outer movable comb finger 6 is with consolidating
Determining the broach electric capacity of the composition of broach 12 will reduce due to gap increase, meanwhile, internal movable comb 7 is constituted with fixed broach 13
Broach electric capacity will be because gap reduces and increases, two parts constitute inside and outside differential capacitance detection signal, certainly, movable comb 8,
9th, 10,11 now will also occur small translation along Y-axis positive direction, but movable comb 8,9 and 10,11 respectively with fixed broach 14,
15 and 16,17 be same polarity change, and each polar capacitor variable quantity is zero, therefore defeated without differential signal at X axis capacitance detecting end
Go out, the input of Y-axis acceleration is on X axis signal detection without influence；Similarly, when accelerometer is only by along X axis acceleration effect
When, similar change is also can obtain, in X axis external and internal compositionses formation differential capacitance detection signal, while to Y-axis signal detection
End is without influence.Therefore when the twin-axis accelerometer in the utility model is operated in one-dimensional case, individual axis acceleration can be substituted completely
Meter.
When the utility model normal work is in two-dimensional case, i.e., simultaneously by along X, Y-axis acceleration effect (assuming that
Along negative direction), the change in location situation of movable comb 6,7,8,9,10,11 can consider as the case may be, if sensitive-mass block 5
It is respectively Δ x, Δ y along X, Y-axis micro-displacement, then can draws：
The broach capacitance change that a pair of movable combs 6 are constituted with fixed broach 12 is：
The broach capacitance change that a pair of movable combs 7 are constituted with fixed broach 13 is：
The broach capacitance change that a pair of movable combs 8 or 9 are constituted with fixed broach 14 or 15 is：
The broach capacitance change that a pair of movable combs 10 or 11 are constituted with fixed broach 16 or 17 is：
Because movable comb 6,8,9 and fixed broach 12,14,15 are same polarity changes, movable comb 7,10,11 is with fixing
Broach 13,16,17 is same polarity change, and the total cross jamming capacitance change of each polarity is zero, then finally be can obtain along X, Y
Axial direction a pair of Differential Detection capacitance sizes be respectively：
The differential capacitance variable quantity and mass of the sensitive axial direction of twin-axis accelerometer are along quick it can be seen from formula (7), (8)
The micro-displacement component for feeling direction of principal axis is linearly proportional, i.e., with extraneous acceleration input signal two sensitive axial components into
Linear ratio relation, and twin shaft is without cross sensitivity.By the way that total differential capacitance variable signal is accessed after the parallel connection of multipair broach electric capacity
Back-end processing detects circuit, just can realize along the biax acceleration analysis of X, Y.
The utility model compared with prior art, has the advantages that：
1st, the utility model is designed using eight folded beam pairwise orthogonal Central Symmetries, realizes two sensitive axes (X-axis and Y-axis)
The crossing decoupling in direction, restrained effectively structural quadrature error, with higher twin shaft accuracy of detection.
2nd, the utility model is by the quality design-adjustable of sensitive-mass block, i.e., cavity size and number in mass
It to be adjusted, on the one hand can increase mass quality, realize high sensitivity, the high resolution detection of twin-axis accelerometer；Separately
On the one hand also can be appropriate to reduce mass quality, the range of increased acceleration meter when ensureing sensitivity, resolution requirement.
3rd, the utility model makes electrode metal by the cross fixed frame in design centre position and center anchor point structure
Lead only needs at a Pad Bian Kecong centers anchor point (i.e. at the center superposition of the first fix bar and the second fix bar) to draw, pole
The big difficulty reduced in processing technology, improves product yield, reduces cost.
4th, by designing symmetrical stopper structures on cross fixed frame, it is therefore prevented that overload that is dynamic, determining broach is inhaled
Conjunction, Problem of Failure, add the stability and reliability of twin-axis accelerometer.
5th, by the design with chamber mass, the system damping of twin-axis accelerometer is reduced, accelerometer heat is reduced
Mechanical noise, improves the signal to noise ratio of twin-axis accelerometer.
6th, designed using the fixed broach of surrounding framework, center difference same polarity connection, effectively prevent twin shaft defeated
Enter signal to interfere, twin-axis accelerometer improves the accuracy of detection of accelerometer without cross sensitivity, while and movable comb
Differential type capacitance detecting is formed, suppression common mode can effectively disturb, improve accelerometer combination property.
7th, become spacing type capacitor design using broach, add it is dynamic, determine initial capacitance value between broach, reduce rear end micro-
The design difficulty of small capacitances signal deteching circuit.
8th, the design of single-chip two-axis acceleration, it is to avoid the problem of combination accelerometer package up rightness is poor, while body
Product is small, lightweight, without Vacuum Package, and processing technology is ripe, can batch micro operations, low cost.
Although having been described for preferred embodiment of the present utility model, those skilled in the art once know substantially
Creative concept, then can make other change and modification to these embodiments.So, appended claims are intended to be construed to bag
Include preferred embodiment and fall into having altered and changing for the utility model scope.
Obviously, those skilled in the art can carry out various changes to the utility model and deform without departing from this practicality
New spirit and scope.So, if these modification and variation of the present utility model belong to the utility model claim and
Within the scope of its equivalent technologies, then the utility model is also intended to comprising including these changes and deformation.
Claims (10)
1. a kind of MEMS twin-axis accelerometers, it is characterised in that the accelerometer includes successively from down to up：
Substrate, insulating barrier, Sensitive Apparatus layer；Sensitive Apparatus layer includes：Fixed frame, folded beam, sensitive-mass block, comb group
Conjunction, anchor point；Wherein, fixed frame is fixed on substrate by anchor point, and 4 ends angle of sensitive-mass block is respectively equipped with a pair of foldings
Beam, the center line of each pair folded beam is orthogonal, and one end of folded beam is connected with fixed frame, the other end and the sensitive-mass block of folded beam
Connection；Multiple broach combinations are distributed with sensitive-mass block surrounding, and broach combination includes：Fixed broach and movable comb, fixed comb
Tooth one end is connected with fixed frame, and movable comb one end is connected with sensitive-mass block, and the quality of sensitive-mass block is sized to adjust
Section.
2. MEMS twin-axis accelerometers according to claim 1, it is characterised in that 4 pairs of folded beams are on sensitive-mass block
Geometric center it is symmetrical, multiple broach combinations are symmetrical on the center line of sensitive-mass block.
3. MEMS twin-axis accelerometers according to claim 1, it is characterised in that the accelerometer also includes：Second
Fixed frame, second fixed frame is located in sensitive-mass block, and the second fixed frame includes：First fix bar, second are consolidated
Fixed pole, the first fix bar and the center superposition that the second fix bar interconnection is in crosswise, the first fix bar and the second fix bar,
First fix bar both sides and the second fix bar both sides are symmetrically distributed with multiple second broach combinations, and the combination of the second broach includes：
Second fixed broach and the second movable comb, second fixed broach one end are connected with fix bar, second movable comb one end with it is quick
Feel the connection of mass inwall.
4. MEMS twin-axis accelerometers according to claim 3, it is characterised in that the two ends of the first fix bar and second are consolidated
The two ends of fixed pole extend towards sensitive-mass block inwall respectively, and the two ends of the first fix bar and the second fix bar are respectively arranged at two ends with
Position limiting structure.
5. MEMS twin-axis accelerometers according to claim 3, it is characterised in that be uniformly provided with the sensitive-mass block
At least one cavity.
6. MEMS twin-axis accelerometers according to claim 3, it is characterised in that the insulating barrier is provided with central anchor
Point, second fixed frame is selected by the central anchor to be fixed on substrate, and the insulating barrier is provided with surrounding anchor point, described
Fixed frame is fixed on substrate by surrounding anchor point.
7. MEMS twin-axis accelerometers according to claim 1, it is characterised in that fixed broach is parallel with movable comb,
And both are in the horizontal direction or vertical direction has overlapping region, the gap between movable comb and two adjacent fixed broach
Ratio is 1:4.
8. MEMS twin-axis accelerometers according to claim 3, it is characterised in that be distributed in the fixation of fixed frame surrounding
Broach connects identical electrode, is distributed in the second fixed broach connection identical electrode of the second fixed frame both sides, fixed comb
Tooth is equal with the second fixed broach quantity, and electric polarity is opposite.
9. MEMS twin-axis accelerometers according to claim 1, it is characterised in that the material of substrate is silicon or glass, quick
Inductor component layer is the silicon of heavy doping, and accelerometer is completed by MEMS processing technologys.
10. MEMS twin-axis accelerometers according to claim 1, it is characterised in that sensitive-mass block is sensitive by changing
The size and number of mass inner chamber body realizes quality adjustment.
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| CN201621414236.0U CN206321662U (en) | 2016-12-22 | 2016-12-22 | A kind of MEMS twin-axis accelerometers |
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| CN201621414236.0U CN206321662U (en) | 2016-12-22 | 2016-12-22 | A kind of MEMS twin-axis accelerometers |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113391094A (en) * | 2020-03-12 | 2021-09-14 | 北京微元时代科技有限公司 | Capacitance type micromechanical accelerometer |
| CN113419081A (en) * | 2021-08-24 | 2021-09-21 | 杭州麦新敏微科技有限责任公司 | MEMS accelerometer and signal processing method thereof |
| CN114264841A (en) * | 2021-11-26 | 2022-04-01 | 陕西华燕航空仪表有限公司 | High-sensitivity open-loop MEMS accelerometer sensor structure |
| US11686581B2 (en) | 2020-06-08 | 2023-06-27 | Analog Devices, Inc. | Stress-relief MEMS gyroscope |
| US11692825B2 (en) | 2020-06-08 | 2023-07-04 | Analog Devices, Inc. | Drive and sense stress relief apparatus |
| US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
-
2016
- 2016-12-22 CN CN201621414236.0U patent/CN206321662U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113391094A (en) * | 2020-03-12 | 2021-09-14 | 北京微元时代科技有限公司 | Capacitance type micromechanical accelerometer |
| US11686581B2 (en) | 2020-06-08 | 2023-06-27 | Analog Devices, Inc. | Stress-relief MEMS gyroscope |
| US11692825B2 (en) | 2020-06-08 | 2023-07-04 | Analog Devices, Inc. | Drive and sense stress relief apparatus |
| US11698257B2 (en) | 2020-08-24 | 2023-07-11 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
| US11965740B2 (en) | 2020-08-24 | 2024-04-23 | Analog Devices, Inc. | Isotropic attenuated motion gyroscope |
| CN113419081A (en) * | 2021-08-24 | 2021-09-21 | 杭州麦新敏微科技有限责任公司 | MEMS accelerometer and signal processing method thereof |
| CN114264841A (en) * | 2021-11-26 | 2022-04-01 | 陕西华燕航空仪表有限公司 | High-sensitivity open-loop MEMS accelerometer sensor structure |
| CN114264841B (en) * | 2021-11-26 | 2023-11-14 | 陕西华燕航空仪表有限公司 | High-sensitivity open-loop MEMS accelerometer sensor structure |
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Address after: 610000 Sichuan city of Chengdu province high tech Zone (West) Tianchen Road No. 88 4 unit three building 4 layer Patentee after: Sichuan Micro Sensor Technology Co., Ltd. Address before: 610000 Sichuan city of Chengdu province high tech Zone Xinya Street No. 4 of No. 2 layer 3 Patentee before: Sichuan Najie Electronic Technology Co Ltd |