CN110308308B - In-plane translational accelerometer with compensation electrode - Google Patents
In-plane translational accelerometer with compensation electrode Download PDFInfo
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- CN110308308B CN110308308B CN201910565814.2A CN201910565814A CN110308308B CN 110308308 B CN110308308 B CN 110308308B CN 201910565814 A CN201910565814 A CN 201910565814A CN 110308308 B CN110308308 B CN 110308308B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0868—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using self-test structures integrated into the microstructure
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Abstract
The invention provides a capacitive accelerometer which comprises a substrate, a mass block and a fixed anchor point, wherein the fixed anchor point is fixed between the substrate and the mass block to form an interval between the substrate and the mass block; the mass blocks comprise a first mass block, a second mass block and a third mass block; the third mass block is connected with the fixed anchor point; the second mass block and the third mass block are connected through a first elastic piece, so that the second mass block can rotate in a plane; the first mass block and the second mass block are connected through a second elastic piece, and the second elastic piece is suitable for driving the first mass block to do translation relative to the substrate when the second mass block rotates in the plane.
Description
Technical Field
The invention relates to the field of MEMS, in particular to an in-plane translational accelerometer with a compensation electrode.
Background
Micro-accelerometers manufactured based on Micro-Electro-Mechanical-systems (MEMS) have been increasingly used in a wide variety of fields, such as industry, medical treatment, civilian use, and military use, due to their advantages, such as small size, low cost, good integration, and excellent performance. At present, the mobile terminal is applied to various products such as mobile terminals, cameras, game pads, navigators and the like, and becomes standard configuration to a certain extent. In the development process, a capacitive type accelerometer, a resistive type accelerometer and a piezoelectric type accelerometer are mainly applied mechanisms, wherein the capacitive type accelerometer is the most popular accelerometer due to the advantages of simple structure, low cost, high sensitivity, high linearity and the like in a low-frequency range.
However, the capacitive accelerometer is easy to design, so that the technical threshold for entering the market is low, thereby causing price war. To be able to stand out in such a drastic competition, it is necessary to reduce the product cost as a matter of concern, while not affecting or improving performance, and reducing the area of the accelerometer chip is the most effective method.
For a triaxial accelerometer, a common simplified design is to share three axes of masses. However, the mass is usually twisted in the direction of the out-of-plane motion, which results in that the closer to the center of the shaft, the lower its sensitivity and, conversely, the further away, the higher it is, which has a great influence on the linearity of the sensor sensitivity, and also does not contribute to the reduction of the inertial mass and the corresponding area due to the low sensitivity efficiency.
On the other hand, due to the difference of the thermal expansion coefficients of different materials in the capacitive accelerometer or the difference of the positions of the contact points with the outside, when the outside temperature factor or the stress changes, the facing areas of the structure part and the electrode part are changed differently, so that the zero point and the sensitivity of the accelerometer are deviated to different degrees.
Disclosure of Invention
In view of the problems in the prior art, the present invention provides a capacitive accelerometer, which includes a substrate, a mass block, and a fixed anchor point, wherein the fixed anchor point is fixed between the substrate and the mass block to form a gap therebetween; the mass blocks comprise a first mass block, a second mass block and a third mass block; the third mass block is connected with the fixed anchor point; the second mass block and the third mass block are connected through a first elastic piece, so that the second mass block can rotate in a plane; the first mass block and the second mass block are connected through a second elastic piece, and the second elastic piece is suitable for driving the first mass block to do translation relative to the substrate when the second mass block rotates in the plane.
Further, when a driving item in a first direction is input, the first mass block translates relative to the substrate in the first direction under the cooperation of the second elastic element.
Further, the in-plane rotation is centered on a junction of the second mass and the first elastic member.
Further, when a driving item in a second direction is input, the second mass block rotates in the plane and drives the first mass block to translate relative to the substrate in the second direction.
Further, the capacitive accelerometer further comprises a first fixed comb tooth, the first mass block comprises a first movable comb tooth, and the first movable comb tooth and the first fixed comb tooth cooperate to define a first reference capacitance value.
Further, the third mass block comprises a first compensation comb tooth, the first compensation comb tooth and the first fixed comb tooth cooperate to define a first compensation capacitance value, and when the first fixed comb tooth changes due to external factors, the change trend of the first reference capacitance value is opposite to that of the first compensation capacitance value.
Further, the capacitive accelerometer further comprises a second fixed comb tooth, the first mass block comprises a second movable comb tooth, and the second movable comb tooth and the second fixed comb tooth cooperate to define a second reference capacitance value.
Further, the third mass block comprises a second compensation comb tooth, the second compensation comb tooth and the second fixed comb tooth cooperate to define a second compensation capacitance value, and when the second fixed comb tooth changes due to external factors, the change trend of the second reference capacitance value is opposite to that of the second compensation capacitance value.
Further, when a third direction driving item is input, the second mass block can rotate out of plane by taking the second elastic element as an axis.
Furthermore, the capacitive accelerometer further comprises a fixed detection electrode matched with the second mass block, the fixed detection electrode is fixed on the substrate and located between the substrate and the second mass block, the second mass block is matched with the fixed detection electrode to limit a third reference capacitance value, and when the second mass block rotates out of plane, the distance between the second mass block and the fixed detection electrode changes correspondingly.
Furthermore, the capacitive accelerometer further comprises a fixed compensation electrode matched with the third mass block, the fixed compensation electrode is fixed on the substrate and located between the substrate and the third mass block, the third mass block is matched with the fixed compensation electrode to limit a third compensation capacitance value, when the fixed detection electrode and the fixed compensation electrode change due to external factors, the change trend of the third reference capacitance value is the same as that of the third compensation capacitance value, and the fixed detection electrode and the fixed compensation electrode compensate in a differential mode.
Further, the capacitive accelerometer is provided with a plurality of the fixed detection electrodes and the corresponding fixed compensation electrodes.
Further, the capacitive accelerometer is provided with an even number of same units, and the units are symmetrically distributed on the whole.
Further, when two second masses are adjacently arranged, the two second masses are connected through a fourth elastic element.
Compared with the prior art, the in-plane translational accelerometer with the compensation electrode has the following advantages:
firstly, on the basis of the design of a shared mass block, a combined spring beam is adopted to connect an anchor point and the mass block, and an in-plane rotation mode is converted into a translation mode, so that the mass block is ensured to be translated in two directions in the plane, and the sensitivity of the sensor is greatly improved. Meanwhile, the design can be completely symmetrical in structure so as to reduce the influence of the sensor on the process and packaging stress. Another benefit of the translational design is that it can be combined with the method of sharing the sensing capacitor to further improve performance and reduce the chip area of the accelerometer.
Secondly, the influence generated by external change and the influence generated by acceleration are separated in the scheme by means of the compensation electrode. And adding a group of fixed compensation electrodes which are consistent with the anchor points of the detection electrodes, have the same size and are not influenced by the acceleration outside the original detection electrodes. By fixing the difference between the compensation electrode and the detection electrode, the influence caused by external temperature, stress and other reasons can be eliminated, so that the stability of the zero point and the sensitivity of the accelerometer can be ensured.
The conception, the specific structure and the technical effects of the present invention will be further described with reference to the accompanying drawings to fully understand the objects, the features and the effects of the present invention.
Drawings
FIG. 1 is a schematic structural diagram of a preferred embodiment of the present invention;
FIG. 2 is a schematic diagram of the embodiment of FIG. 1 when there is an acceleration input along the X-axis;
FIG. 3 is a schematic diagram of the embodiment of FIG. 1 when there is an acceleration input along the Y-axis;
FIG. 4 is a schematic diagram of the embodiment of FIG. 1 when there is an acceleration input along the Z-axis;
FIG. 5 is a schematic diagram of the embodiment of FIG. 1 when an in-plane stress variation occurs at a corner of the substrate;
FIG. 6 is a schematic illustration of the embodiment of FIG. 1 when there is a change in out-of-plane stress at a corner of the substrate;
FIG. 7 is a schematic sectional view taken along line L1 in FIG. 6;
fig. 8 is a schematic sectional view taken along the line L2 in fig. 6.
Detailed Description
In the description of the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the invention. The drawings are schematic diagrams or conceptual diagrams, and the relationship between the thickness and the width of each part, the proportional relationship between the parts and the like are not completely consistent with actual values.
As shown in fig. 1 to 4, the capacitive accelerometer of the present embodiment includes a substrate (not shown), masses M1 to M5, fixed anchors a1 to a10, spring beams S1 to S10, and bottom electrodes E1 to E16. The base and the mass are arranged in parallel or substantially parallel, and the anchor points a1, a2 are fixed between the base and the mass (respectively fixed to them) so as to form a space therebetween.
The whole layout of the accelerometer of the embodiment is symmetrically distributed in the horizontal direction and the vertical direction, wherein the masses M2 and M3 are respectively connected with the fixed anchors a1 and a2, that is, the fixed anchors a1 and a2 are respectively fixed below the masses M2 and M3, and are not in contact with the rest of the masses; the mass M1 is a rectangular frame structure and is arranged at the outermost peripheral region of the accelerometer, and the rest of the mass and the fixed anchor points are arranged in the frame region.
The upper part of the mass block M4 is connected with the mass block M2 through a spring beam S5, the lower part of the mass block M4 is connected with the mass block M3 through a spring beam S6, the left part of the mass block M1 is connected with the spring beams S1 and S2, and the right part of the mass block M5 is connected with the main beam block M9 and S10; the mass M5 is connected with the mass M2 through the spring beam S7 at the upper part, is connected with the mass M3 through the spring beam S8 at the lower part, is connected with the mass M4 through the spring beams S9 and S10 at the left part, and is connected with the mass M1 through the spring beams S3 and S4 at the right part. Therefore, the masses M1-M5 are connected into a whole through the spring beams S1-S10 and are arranged above the substrate, and the masses M1-M5, the spring beams S1-S10 and the fixed anchor points A1 and A2 are also communicated on a circuit to jointly form a PM polar plate, which is called as a mass electrode in the following. In this embodiment, the spring beams S5 to S8 have a strip structure, and the spring beams S1 to S4, S9, and S10 have a U-shaped structure.
The fixed anchor points A3-A10 are fixed on the substrate, wherein the fixed anchor points A3-A6 are arranged above the accelerometer, and the fixed anchor points A7-10 and the fixed anchor points A3-A5 are symmetrically arranged below the accelerometer. The edge of partial area of the mass block M1 is provided with movable comb teeth, the edge of partial area of the mass blocks M2 and M3 is provided with compensation comb teeth, and correspondingly, the edge of the fixed anchor points A3-A10 is provided with fixed comb teeth E17-E32 corresponding to the movable comb teeth and the compensation comb teeth. Specifically, the fixed anchor point a3 is provided with fixed comb teeth E17 and E21 which are respectively located on the left side and the right side of the fixed anchor point, the fixed comb teeth E17 are matched with part of movable comb teeth of the mass block M1 to form a detection capacitor, and the fixed comb teeth E21 are matched with part of compensation comb teeth of the mass block M2 to form a compensation capacitor; the fixed anchor point A4 is provided with fixed comb teeth E18 and E22 which are respectively positioned on the right side and the left side of the fixed anchor point A4, the fixed comb teeth E18 are matched with part of movable comb teeth of the mass block M1 to form a detection capacitor, and the fixed comb teeth E22 are matched with part of compensation comb teeth of the mass block M2 to form a compensation capacitor; the fixed anchor point A7 is provided with fixed comb teeth E19 and E23 which are respectively positioned on the left side and the right side of the fixed anchor point A7, the fixed comb teeth E19 are matched with part of movable comb teeth of the mass block M1 to form a detection capacitor, and the fixed comb teeth E23 are matched with part of compensation comb teeth of the mass block M3 to form a compensation capacitor; the fixed anchor point A8 is provided with fixed comb teeth E20 and E24 which are respectively positioned on the right side and the left side of the fixed anchor point A8, the fixed comb teeth E20 are matched with part of movable comb teeth of the mass block M1 to form a detection capacitor, and the fixed comb teeth E24 are matched with part of compensation comb teeth of the mass block M3 to form a compensation capacitor; the fixed anchor point A5 is provided with fixed comb teeth E25 and E29 which are respectively positioned on the upper side and the lower side of the fixed anchor point A5, the fixed comb teeth E25 are matched with part of movable comb teeth of the mass block M1 to form a detection capacitor, and the fixed comb teeth E29 are matched with part of compensation comb teeth of the mass block M2 to form a compensation capacitor; the fixed anchor point A6 is provided with fixed comb teeth E26 and E30 which are respectively positioned on the upper side and the lower side of the fixed anchor point A6, the fixed comb teeth E26 are matched with part of movable comb teeth of the mass block M1 to form a detection capacitor, and the fixed comb teeth E30 are matched with part of compensation comb teeth of the mass block M2 to form a compensation capacitor; the fixed anchor point A9 is provided with fixed comb teeth E27 and E31 which are respectively positioned at the lower side and the upper side of the fixed anchor point A9, the fixed comb teeth E27 are matched with part of movable comb teeth of the mass block M1 to form a detection capacitor, and the fixed comb teeth E31 are matched with part of compensation comb teeth of the mass block M3 to form a compensation capacitor; the fixed anchor point A10 is provided with fixed comb teeth E28 and E32 which are respectively positioned on the lower side and the upper side of the fixed anchor point, the fixed comb teeth E28 are matched with part of movable comb teeth of the mass block M1 to form a detection capacitor, and the fixed comb teeth E32 are matched with part of compensation comb teeth of the mass block M3 to form a compensation capacitor.
The bottom electrodes E1-E16 are fixed on the substrate and positioned between the substrate and the mass blocks M2-M5, wherein the bottom electrodes E1, E2, E5 and E6 are positioned below the mass block M4, so that the bottom electrodes E1-E16 and the mass block M4 are matched to form a detection capacitor; the bottom electrodes E3, E4, E7 and E8 are positioned below the mass block M5, so that the bottom electrodes E3, E4, E7 and E8 are matched to form a detection capacitor; the bottom electrodes E9-E12 are positioned below the mass block M2, so that the bottom electrodes and the mass block cooperate to form a compensation capacitor; the bottom electrodes E13-E16 are located below the mass M3, so that the two cooperate to form a compensation capacitor. The bottom electrodes E1-E16 are all shown in dashed lines because they are all located below the corresponding mass, and are completely blocked in the overall structural view.
As described above, the masses M1, M4, M5 are connected to the fixed anchors a1, a2 via the spring beams S1 to S10, thereby forming a movable structure. The mass block M1 and the fixed anchor points A5, A6, A9 and A10 (specifically, the comb teeth pairs matched between the mass block M1 and the fixed anchor points A5, A6, A9 and A10) form an X-direction detection electrode; the mass M1 and the fixed anchor points A3, A4, A7 and A8 (specifically, the comb teeth pairs matched between the mass M1 and the fixed anchor points A3, A4, A7 and A8) form Y-direction detection electrodes; z-direction detection electrodes are formed between the mass blocks M4 and M5 and the bottom electrodes E1-E8.
The masses M2, M3 are fixed to the substrate by means of fixing anchors a1, a2, thus forming a fixed structure. Wherein, the mass M2 and the fixed anchor points A5 and A6, and the mass M3 and the fixed anchor points A9 and A10 (specifically, the comb teeth pairs matched between the mass M3 and the fixed anchor points A9 and A10) form fixed compensation electrodes in the X direction; the mass M2 and the fixed anchor points A3 and A4, and the mass M3 and the fixed anchor points A7 and A8 (specifically, the comb teeth pairs matched between the mass M3 and the fixed anchor points A7 and A8) form Y-direction fixed compensation electrodes; bottom plate compensation electrodes in the Z direction are formed between the mass M2 and the bottom electrodes E9-E12 and between the mass M3 and the bottom electrodes E13-E16. Because the quality piece M2, M3 are fixed, therefore compensation electrode does not produce the change along with the change of acceleration to the design of activity broach, fixed broach and compensation broach, will make compensation capacitance size change direction opposite with detection capacitance, when external factor leads to the fixed anchor point to take place little displacement promptly, detection capacitance if the grow, compensation capacitance diminishes promptly.
In this embodiment, the sum of the capacitances measured by the mass electrodes and the fixed anchor points a6 and a10 is the output capacitance CX+The capacitance measured by the mass block electrode and the fixed anchor point A6 (or the fixed anchor point A10) is the sum of the detection capacitance (based on the matched movable comb teeth and fixed comb teeth) and the compensation capacitance (based on the matched compensation comb teeth and fixed comb teeth), namely CX+＝CE26+CE30+CE28+CE32In the formula CE26Representing the corresponding capacitance on fixed comb E26, as follows.
The sum of the capacitances measured by the mass electrode and the fixed anchor points A5 and A9 is the output capacitance CX-The capacitance measured by the mass block electrode and the fixed anchor point A5 (or the fixed anchor point A9) is the sum of the detection capacitance (based on the matched movable comb teeth and fixed comb teeth) and the compensation capacitance (based on the matched compensation comb teeth and fixed comb teeth), namely CX-＝CE25+CE29+CE27+CE31。
The sum of the capacitances measured by the mass electrode and the fixed anchor points A7 and A8 is the output capacitance CY+The capacitance measured by the mass block electrode and the fixed anchor point A7 (or the fixed anchor point A8) is the sum of the detection capacitance (based on the matched movable comb teeth and fixed comb teeth) and the compensation capacitance (based on the matched compensation comb teeth and fixed comb teeth), namely CY+＝CE19+CE23+CE20+CE24。
The sum of the capacitances measured by the mass electrode and the fixed anchor points A3 and A4 is the output capacitance CY-The capacitance measured by the mass electrodes and the fixed anchor point A3 (or fixed anchor point A4) is the measured capacitance (based on the matching movable comb)Tooth and fixed comb tooth) and compensation capacitance (based on the matched compensation comb tooth and fixed comb tooth), i.e. CY-＝CE17+CE21+CE18+CE22。
The capacitances measured by the mass block electrodes and the bottom electrodes E2, E3, E6, E7, E9, E12, E13 and E16 respectively comprise detection capacitances formed by the mass block electrodes and the bottom electrodes E2, E3, E6 and E7 and compensation capacitances formed by the mass block electrodes and the bottom electrodes E9, E12, E13 and E16 (the capacitances of the mass block electrodes E9, E12, E13 and E16 are respectively compensated for the capacitances of the mass block electrodes E1, E4, E5 and E8), and the sum of the detection capacitances formed by the mass block electrodes E2, E3, E6 and E7 and the compensation capacitances formed by the mass block electrodes E9, E12, E13 and E16 is used as an output capacitance CZ+I.e. CZ+＝CE2+CE3+CE6+CE7+CE9+CE12+CE13+CE16。
The capacitances measured by the mass block electrodes and the bottom electrodes E1, E4, E5, E8, E10, E11, E14 and E15 respectively comprise detection capacitances formed by the mass block electrodes and the bottom electrodes E1, E4, E5 and E8 and compensation capacitances formed by the mass block electrodes and the bottom electrodes E10, E11, E14 and E15 (the capacitances of the mass block electrodes E10, E11, E14 and E15 are respectively compensated for the capacitances of the mass block electrodes E2, E3, E6 and E7), and the sum of the detection capacitances formed by the mass block electrodes E1, E4, E5 and E8 and the compensation capacitances formed by the mass block electrodes E10, E11, E14 and E15 is used as an output capacitance CZ-I.e. CZ-＝CE1+CE4+CE5+CE8+CE10+CE11+CE14+CE15。
As shown in fig. 2, when acceleration is input along the X-axis, the mass M1 will translate along the X-axis, and the detection capacitors (i.e. the capacitors corresponding to the fixed comb fingers E25-E28) for detecting the acceleration of the X-axis with the same initial value will change slightly while the compensation capacitors (i.e. the capacitors corresponding to the fixed comb fingers E29-E32) will not change. By arranging the directions of the four comb teeth of the detection capacitor, the capacitance values on the fixed comb teeth E26, E28 can be increased and the capacitance values of the fixed comb teeth E25, E27 can be decreased (or vice versa). Their relative change, i.e. ac, can be measured ultimately using capacitance detection and signal processing circuitryX＝ΔCX+-ΔCX-＝ΔCE26-ΔCE25-ΔCE27+ΔCE28And the magnitude of the input X-axis acceleration can be obtained through reverse thrust. The acceleration input along the X-axis is shown in FIG. 2, and the same applies when the acceleration input is reversed along the X-axis, where Δ CE26And Δ CE28Is a negative value, Δ CE25And Δ CE27Positive values.
As shown in fig. 3, the masses M4 and M5 are connected to the mass M1 through the spring beams S1 to S4, respectively, and when acceleration input is performed along the Y axis, the masses M1 and M4 rotate in the plane around the midpoint of the connecting line of the spring beams S5 and S6 (i.e., the position of the reference numeral M4 in fig. 3), that is, the mass M4 rotates clockwise in fig. 3; the masses M1, M5 will rotate in-plane about the midpoint of the line connecting the spring beams S7, S8 (i.e., the position of reference M5 in fig. 3), i.e., mass M5 rotates counterclockwise in fig. 3. Through the coupling action of the spring beams S1-S4, the masses M4 and M5 can drive the mass M1 to horizontally move along the Y direction. At this time, the detection capacitors (i.e., the capacitors corresponding to the fixed comb teeth E17 to E20) for detecting the acceleration of the Y axis with the same initial value will be slightly changed, while the compensation capacitors (i.e., the capacitors corresponding to the fixed comb teeth E21 to E24) will not be changed. By arranging the directions of the four comb teeth of the detection capacitor, the capacitance values on the fixed comb teeth E19, E20 can be increased and the capacitance values of the fixed comb teeth E17, E18 can be decreased (or vice versa). Their relative change, i.e. ac, can be measured ultimately using capacitance detection and signal processing circuitryY＝ΔCY+-ΔCY-＝ΔCE19-ΔCE17-ΔCE18+ΔCE20And the magnitude of the input Y-axis acceleration can be obtained through reverse thrust. The acceleration input is shown in FIG. 3 in the forward direction along the Y-axis, and the same applies when the acceleration input is in the reverse direction along the Y-axis, where Δ CE19And Δ CE20Is a negative value, Δ CE17And Δ CE18Positive values.
Through the design of the spring beam and the mass block, the in-plane translation of the accelerometer detection mass block can be realized, and the mass can be fully utilized.
As shown in fig. 4, when acceleration is inputted along the Z-axisWhen the mass blocks M1 and M4 rotate out of plane along the axes of the spring beams S5 and S6, that is, as shown in fig. 4, the part of the mass block M4 on the left side of the rotating shaft turns outwards, and the part on the right side turns inwards; the mass blocks M1, M5 rotate out of plane along the axis of the spring beams S7, S8, i.e. the part of the mass block M5 located at the left side of the rotating shaft is turned inwards and the part at the right side is turned outwards as shown in fig. 4. At this time, the capacitances for detecting the Z-axis acceleration (i.e., the capacitances on the bottom electrodes E1 to E8) with the same initial value are slightly changed, the capacitance values on the bottom electrodes E2, E3, E6, and E7 are increased, the capacitance values on the bottom electrodes E1, E4, E5, and E8 are decreased, and the capacitance values on the bottom electrodes E9 to E16 are kept unchanged. So that their relative change, i.e. ac, can be measured ultimately using capacitive sensing and signal processing circuitryZ＝ΔCZ+-ΔCZ-＝ΔCE2+ΔCE3+ΔCE6+ΔCE7-ΔCE1-ΔCE4-ΔCE5-ΔCE8And the magnitude of the input Z-axis acceleration can be obtained through reverse thrust. The acceleration input is shown in FIG. 4 in the forward direction along the Z-axis, and the same applies when the acceleration input is in the reverse direction along the Z-axis, where Δ CE2、ΔCE3、ΔCE6、ΔCE7Is a negative value, Δ CE1、ΔCE4、ΔCE5、ΔCE8Positive values.
Through the structural design, the detection in the directions of three different axes of XYZ can be realized, the detection mass blocks are completely and symmetrically distributed, the influence caused by the problems of process deviation and the like can be eliminated, and therefore the deviation of zero point and sensitivity is eliminated.
The masses M2 and M3 are fixed with the substrate through fixed anchor points A1 and A2, and form X-direction fixed compensation electrodes with the fixed anchor points A5, A6, A9 and A10; y-direction fixed compensation electrodes are formed among the fixed anchor points A3, A4, A7 and A8; and also forms fixed compensation electrodes in the Z direction with the bottom electrodes E9-E16.
When factors such as external stress intervene and the fixed anchor point generates deviation, the capacitance of the detection electrode between the fixed anchor point and the movable structure changes, so that the zero point or the sensitivity of the accelerometer is influenced. At this time, due to the intervention of factors such as external stress, the compensation capacitance between the fixed anchor point and the fixed mass blocks M2 and M3 is changed in an opposite manner, that is, the change of the compensation capacitance caused by the outside and the change of the detection capacitance are mutually offset, so that the output capacitance of the detection electrode is not influenced by the external factors.
As shown in FIG. 5, when one corner of the substrate is changed due to stress, the anchor points A3 and A5 are displaced upward (as shown by the arrow at the upper left corner in FIG. 5), and the anchor point A1 is unchanged, at this time, C in the capacitance measured by the mass electrode and the anchor points A3 and A5 is CE17And CE25Increase, the increase being Δ C, and CE21And CE29The capacitance decreases by an amount Δ C, so that the capacitance measured at the fixed anchor point a3 is constant, i.e. CA3＝CE17+ΔC+CE21-ΔC＝CE17+CE21Likewise, the capacitance value measured at the fixed anchor point a5 is also constant, i.e. CA5＝CE25+ΔC+CE29-ΔC＝CE25+CE29Therefore, the problem of offset of zero point and sensitivity of the accelerometer caused by the influence of stress on a certain electrode substrate is solved.
As shown in fig. 6 to 8, when one corner of the substrate is out-of-plane changed due to stress, the bottom electrodes E9 and E1 are displaced upward, and the anchor point a1 is unchanged, and the capacitance C between the mass electrode and the bottom electrodes E9 and E1 is not changed, respectivelyE9And CE1All increase Δ C, before change Δ CZ＝ΔCZ+-ΔCZ-＝ΔCE2+ΔCE3+ΔCE6+ΔCE7+ΔCE9+ΔCE12+ΔCE13+ΔCE16-ΔCE1-ΔCE4-ΔCE5-ΔCE8-ΔCE10-ΔCE11-ΔCE14-ΔCE15After change Δ CZ＝ΔCZ+-ΔCZ-＝ΔCE2+ΔCE3+ΔCE6+ΔCE7+(ΔCE9+ΔC)+ΔCE12+ΔCE13+ΔCE16-(ΔCE1+ΔC)-ΔCE4-ΔCE5-ΔCE8-ΔCE10-ΔCE11-ΔCE14-ΔCE15So that the output in the Z direction can be kept constant, i.e., Δ CZ＝ΔCZ+-ΔCZ-The accelerometer is not influenced by the delta C, so that the problem of offset of zero point and sensitivity of the accelerometer caused by influence of stress on the base electrode is solved.
The scheme of this embodiment is directed at that in the existing triaxial capacitive accelerometer, the mass block adopts a torsional motion mode, which limits the sensitivity of accelerometer measurement and the asymmetric influence of factors such as external temperature, package, stress, etc. on the electrode of the internal accelerometer, thereby causing the zero point and sensitivity of the accelerometer to shift. On the basis of the design of the shared mass block, the combined spring beam is adopted to connect the anchor point and the mass block, the in-plane rotation mode is converted into the translation mode, the mass block is ensured to be in translation in the X and Y directions in the plane, and therefore the sensitivity of the sensor is greatly improved. Meanwhile, the structure is completely symmetrical, the influence of the sensor on the process and packaging stress is favorably reduced, and the performance can be further improved and the chip area of the accelerometer can be reduced by combining a method of sharing the detection capacitor. Besides, a group of fixed compensation electrodes which are consistent with anchor points of the detection electrodes in size and are not influenced by acceleration are additionally arranged outside the original detection electrodes. By fixing the difference between the compensation electrode and the detection electrode, the influence caused by external temperature, stress and other reasons can be eliminated, so that the stability of the zero point and the sensitivity of the accelerometer can be ensured.
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the prior art according to the concept of the present invention should be within the scope of protection defined by the claims.
Claims (9)
1. A capacitive accelerometer, comprising:
a substrate;
anchor A1 and anchor A2, the anchor A1 and the anchor A2 being anchored to the substrate;
a mass M1, the mass M1 is of a frame structure and is arranged at the outermost peripheral region of the capacitive accelerometer;
a mass M2 and a mass M3, wherein the mass M2 and the mass M3 are symmetrically arranged along the X direction, and are respectively fixedly connected to the fixed anchor point A1 and the fixed anchor point A2 and are arranged at intervals with the substrate;
a mass M4 and a mass M5, the mass M4 and the mass M5 are symmetrically arranged along the Y direction and are connected through spring beams in the X direction; two sides of the mass M4 in the Y direction are respectively connected with the mass M2 and the mass M3 through spring beams, and two sides of the mass M5 in the Y direction are respectively connected with the mass M2 and the mass M3 through spring beams, so that the mass M4 and the mass M5 are suitable for in-plane rotation; the mass M4 and the mass M5 are respectively connected to the inner side of the frame structure through spring beams in the X direction, so that when the mass M4 and the mass M5 rotate in the plane, the mass M1 can be driven to make a translation relative to the substrate;
the mass block M1 comprises a first movable comb tooth, the mass block M4 and the mass block M5 comprise a first compensation comb tooth, the first movable comb tooth and the first compensation comb tooth are respectively matched with the first fixed comb tooth to limit a first reference capacitance value and a first compensation capacitance value, and when the first fixed comb tooth is changed due to external factors, the change trend of the first reference capacitance value is opposite to that of the first compensation capacitance value.
2. The capacitive accelerometer of claim 1, wherein the mass M1 translates in the X-direction relative to the base when there is an X-direction drive input.
3. The capacitive accelerometer of claim 1, wherein when there is a Y-direction drive input, the mass M4 and the mass M5 rotate in-plane and cause the mass M1 to translate in the Y-direction relative to the base.
4. The capacitive accelerometer of claim 1, further comprising a second fixed comb, wherein the mass M1 comprises a second movable comb that cooperates with the second fixed comb to define a second reference capacitance value.
5. The capacitive accelerometer of claim 4, wherein the mass M4 and the mass M5 include second compensation fingers that cooperate with the second fixed fingers to define a second compensation capacitance, and wherein the second reference capacitance varies in an opposite direction as the second fixed fingers vary due to external factors.
6. The capacitive accelerometer of claim 1, wherein when there is a Z-direction drive input, the mass M4 rotates out-of-plane about its spring beams connected to the mass M2 and the mass M3, and the mass M5 rotates out-of-plane about its spring beams connected to the mass M2 and the mass M3.
7. The capacitive accelerometer of claim 6, further comprising fixed sense electrodes cooperating with the mass M2 and the mass M3, the fixed sense electrodes being fixed to the base and located between the base and the masses M2 and M3, the masses M2 and M3 cooperating with the fixed sense electrodes defining a third reference capacitance value that varies in response to the out-of-plane rotation of the masses M2 and M3 with respect to the fixed sense electrodes.
8. The capacitive accelerometer according to claim 7, further comprising a fixed compensation electrode coupled to the mass M4 and the mass M5, wherein the fixed compensation electrode is fixed to the substrate and located between the substrate and the masses M4 and M5, and the masses M4 and M5 cooperate with the fixed compensation electrode to define a third compensation capacitance, and when the fixed detection electrode and the fixed compensation electrode change due to external factors, the third reference capacitance and the third compensation capacitance have the same change trend, and are compensated differentially.
9. A capacitive accelerometer according to claim 8, wherein a plurality of the fixed detection electrodes and corresponding fixed compensation electrodes are provided.
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| CN111288909B (en) * | 2020-03-25 | 2022-06-03 | 日立电梯电机（广州）有限公司 | Roundness detection device and method |
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