CN107037237A - A kind of three axle capacitive accelerometers and electronic installation - Google Patents
A kind of three axle capacitive accelerometers and electronic installation Download PDFInfo
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- CN107037237A CN107037237A CN201710333977.9A CN201710333977A CN107037237A CN 107037237 A CN107037237 A CN 107037237A CN 201710333977 A CN201710333977 A CN 201710333977A CN 107037237 A CN107037237 A CN 107037237A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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Abstract
The invention discloses a kind of three axles capacitive accelerometer and electronic installation, including：The first mass and the second mass that symmetrical configuration is set, coupled and be connected by elastic construction between first mass and the second mass, and mass is movably disposed in substrate by least one its corresponding fixed anchor point, for when applying an acceleration to three axle capacitive accelerometers, producing move corresponding with the acceleration；Multiple detection zones in the range of any one mass, any one detection zone includes the detection electric capacity that fixed structure and movable structure are constituted, and mass multiplexing movable structure, fixed structure is fixed in substrate, for when applying an acceleration to three axle capacitive accelerometers, producing the specific capacitor value changes with the acceleration.The technical scheme that the present invention is provided, beneficial to the lightening trend of three axle capacitive accelerometers, and, effectively reduce the zero deviation and sensitivity variations of accelerometer.
Description
Technical field
The present invention relates to three axle capacitive accelerometer technical fields, more specifically, it is related to a kind of three axles condenser type
Accelerometer and electronic installation.
Background technology
Miniature based on MEMS (MEMS, Micro-Electro-Mechanical-System) processing and fabricating plus
Speed meter because its small volume, cost is low, integration is good, function admirable many advantages, such as in industry, medical treatment, civilian, military affairs etc. are non-
Often extensive field has obtained increasing application.At present, produced in all kinds of mobile terminals, camera, game paddle, navigator etc.
In the application of product, to a certain extent, standard configuration is had become.In development process, condenser type, resistance-type, piezoelectric type is made
To detect that the mode of acceleration is the mechanism mainly applied, wherein, capacitive accelerometer is simple in construction because of its, with low cost,
And the advantages such as higher sensitivity and the linearity can be possessed in low-frequency range, as a class accelerometer the most popular.But
It is that existing three axles capacitive accelerometer typically all sets different quality respectively for axially different capacitance detecting region
Block, and the area occupied of mass and weight are all larger, are unfavorable for the lightening trend of three axle capacitive accelerometers.
The content of the invention
In view of this, the invention provides a kind of three axles capacitive accelerometer and electronic installation, its capacitance detecting region
The first mass and the second mass are shared, to reduce the quantity of mass, beneficial to the frivolous of three axle capacitive accelerometers
Change trend.
To achieve the above object, the technical scheme that the present invention is provided is as follows：
A kind of three axle capacitive accelerometers, including：
The first mass and the second mass that symmetrical configuration is set, wherein, first mass and the second mass
Between coupled and be connected by elastic construction, and the mass movably set by least one its corresponding fixed anchor point
In substrate, for when applying an acceleration to the three axles capacitive accelerometer, producing transport corresponding with the acceleration
It is dynamic；
And, multiple detection zones in the range of any one mass, wherein, any one detection zone includes solid
Determine the detection electric capacity of structure and movable structure composition, and the mass is multiplexed the movable structure, and, the fixed structure
It is fixed in the substrate, for when applying an acceleration to the three axles capacitive accelerometer, producing and the acceleration
Specific capacitor value changes.
Optionally, the mass includes the first Z axis capacitance detecting region, the second capacitance detecting set in the first direction
Partly, the 3rd capacitance detecting part and the second Z axis capacitance detecting region, wherein, the second capacitance detecting part is along second party
To being provided with the first X-axis capacitance detecting region, the first Y-axis capacitance detecting region and the second X-axis capacitance detecting region, and, institute
State the 3rd capacitance detecting part and be disposed with the 3rd X-axis capacitance detecting region, the second Y-axis capacitance detecting along the second direction
Region and the 4th X-axis capacitance detecting region；
Wherein, the first direction be the-the second quality of the first mass Block direction, and the second direction with it is described
First direction intersects.
Optionally, mass correspondence the first X-axis capacitance detecting region, the second X-axis capacitance detecting region, the 3rd
X-axis capacitance detecting region and the 4th X-axis capacitance detecting region are void region；
And, the X-axis capacitance detecting region includes the first movable structure, the first fixation arranged along the first direction
Structure, the second movable structure and the second fixed structure, wherein, first movable structure and first fixed structure constitute the first X
Shaft detection electric capacity, second movable structure and the second fixed structure constitute the second X-axis detection electric capacity；
Wherein, when applying the acceleration of X axis to the three axles capacitive accelerometer, the first X-axis detection electricity
Hold and detect that the volume change of electric capacity is opposite with the second X-axis.
Optionally, mass correspondence the first Y-axis capacitance detecting region and the second Y-axis capacitance detecting region are
Void region；
And, the Y-axis capacitance detecting region includes the first movable structure, the first fixation arranged along the first direction
Structure, the second movable structure and the second fixed structure, wherein, first movable structure and first fixed structure constitute the first Y
Shaft detection electric capacity, second movable structure and the second fixed structure constitute the second Y-axis detection electric capacity；
Wherein, when applying the acceleration of Y-axis to the three axles capacitive accelerometer, the first Y-axis detection electricity
Hold and detect that the volume change of electric capacity is opposite with the second Y-axis.
Optionally, mass correspondence the first Z axis capacitance detecting region and the second Z axis capacitance detecting region are
Void region；
And, the Z axis capacitance detecting region includes the fixed structure and around the described movable of the fixed structure
Structure, wherein, the fixed structure and movable structure in the first Z axis capacitance detecting region constitute the first Z axis detection electric capacity, and institute
The fixed structure and movable structure for stating the second Z axis capacitance detecting region constitute the second Z axis detection electric capacity；
Wherein, the three axles capacitive accelerometer is applied Z axis to acceleration when, first Z axis detection electricity
Hold and detect that the volume change of electric capacity is opposite with the second Z axis.
Optionally, there is difference in height between the movable structure and fixed structure in any one Z axis capacitance detecting region.
Optionally, mass correspondence the first Z axis capacitance detecting region is corresponding with the second Z axis capacitance detecting region
It is set to the movable structure；
And, it is fixed in the substrate and the correspondence movable structure is provided with the fixed structure, wherein, it is described
The fixed structure and movable structure in the first Z axis capacitance detecting region constitute the first Z axis detection electric capacity, and the second Z axis electric capacity
The fixed structure and movable structure of detection zone constitute the second Z axis detection electric capacity；
Wherein, the three axles capacitive accelerometer is applied Z axis to acceleration when, first Z axis detection electricity
Hold and detect that the volume change of electric capacity is opposite with the second Z axis.
Optionally, it is provided with bullet between the second capacitance detecting part of the mass and the 3rd capacitance detecting part
Property connecting portion, the elastic joint part is provided with least one described fixed anchor point and the mass elastic connection.
Optionally, the mass correspondence elastic joint part is provided with the first elasticity arranged along the second direction
Void region and the second elastic void region；
The elastic void region is provided with fixed anchor point described in one, and the fixed anchor point passes through one along described
First spring beam of two directions extension is connected with the mass, wherein, the described first elastic void region and the second elasticity are engraved
First spring beam of dummy section is oppositely arranged.
Optionally, the elastic construction includes elastic along the first elastic structure of first direction setting and second
Structure, and the buckstay between the described first elastic structure and the second elastic structure；
The first elastic structure includes two the second spring beams set along the second direction, two described second
The opposite end of spring beam is connected with the buckstay, and two second spring beams the other end with first mass
It is connected；
And, the second elastic structure includes two the 3rd spring beams set along the second direction, two institutes
The opposite end for stating the 3rd spring beam is connected with the buckstay, and two the 3rd spring beams the other end with described second
Mass is connected.
Accordingly, present invention also offers a kind of electronic installation, including three above-mentioned axle capacitive accelerometers.
Compared to prior art, the technical scheme that the present invention is provided at least has advantages below：
The invention provides a kind of three axles capacitive accelerometer and electronic installation, including：The first of symmetrical configuration setting
Mass and the second mass, wherein, coupled and be connected by elastic construction between first mass and the second mass, and
The mass is movably disposed in substrate by least one its corresponding fixed anchor point, for three axle electricity
When appearance formula accelerometer applies an acceleration, move corresponding with the acceleration is produced；And, positioned at any one mass scope
Interior multiple detection zones, wherein, any one detection zone includes the detection electric capacity that fixed structure and movable structure are constituted, and
The mass is multiplexed the movable structure, and, the fixed structure is fixed in the substrate, for three axle
When capacitive accelerometer applies an acceleration, the specific capacitor value changes with the acceleration are produced.As shown in the above, originally
The technical scheme provided is invented, the capacitance detecting region of three axle capacitive accelerometers shares the first mass and the second mass
Block, to reduce the quantity of mass, beneficial to the lightening trend of three axle capacitive accelerometers；In addition, two be of coupled connections
Mass helps to eliminate accelerometer with welded encapsulation, or the stress produced during temperature change etc. influence, effective drop
The zero deviation and sensitivity variations of low accelerometer.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the accompanying drawing used required in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
The embodiment of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can also basis
The accompanying drawing of offer obtains other accompanying drawings.
A kind of structural representation for three axles capacitive accelerometer that Fig. 1 provides for the embodiment of the present application；
A kind of movable structure and the structure of fixed structure in the Z axis capacitance detecting region that Fig. 2 provides for the embodiment of the present application
Schematic diagram；
The structural representation for another three axles capacitive accelerometer that Fig. 3 provides for the embodiment of the present application；
Another movable structure and the knot of fixed structure in the Z axis capacitance detecting region that Fig. 4 provides for the embodiment of the present application
Structure schematic diagram；
The structural representation that Fig. 5 detects for the three axle capacitive accelerometers that the embodiment of the present application is provided in X-axis；
The structural representation that Fig. 6 detects for the three axle capacitive accelerometers that the embodiment of the present application is provided in Y-axis；
The structural representation that Fig. 7 detects for the three axle capacitive accelerometers that the embodiment of the present application is provided in Z axis；
The structural representation for another three axle capacitive accelerometer that Fig. 8 provides for the embodiment of the present application；
The structural representation for another three axle capacitive accelerometer that Fig. 9 provides for the embodiment of the present application.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation is described, it is clear that described embodiment is only a part of embodiment of the invention, rather than whole embodiments.It is based on
Embodiment in the present invention, it is every other that those of ordinary skill in the art are obtained under the premise of creative work is not made
Embodiment, belongs to the scope of protection of the invention.
As described in background, capacitive accelerometer is with low cost because its is simple in construction, and can be in low-frequency range
Possess the advantages such as higher sensitivity and the linearity, as a class accelerometer the most popular.But, existing three axles electric capacity
Formula accelerometer typically all sets different masses respectively for axially different capacitance detecting region, and the occupancy of mass
Area and weight are all larger, are unfavorable for the lightening trend of three axle capacitive accelerometers.
Based on this, the embodiment of the present application provides a kind of three axles capacitive accelerometer and electronic installation, its capacitance detecting
Region shares the first mass and the second mass, to reduce the quantity of mass, beneficial to three axle capacitive accelerometers
Lightening trend.To achieve the above object, the technical scheme that the embodiment of the present application is provided is as follows, specific to combine Fig. 1 to Fig. 9 institutes
Show, the technical scheme that the embodiment of the present application is provided is described in detail.
With reference to shown in Fig. 1, a kind of structural representation of the three axles capacitive accelerometer provided for the embodiment of the present application, its
In, three axle capacitive accelerometers include：
The first mass M1 and the second mass M2 that symmetrical configuration is set, wherein, the first mass M1 and second
Coupled and be connected by elastic construction between mass M2, and the mass can by least one its corresponding fixed anchor point
It is arranged on dynamicly in substrate, for when applying an acceleration to the three axles capacitive accelerometer, producing and the acceleration
Corresponding motion；
And, multiple detection zones in the range of any one mass, wherein, any one detection zone includes solid
Determine the detection electric capacity of structure and movable structure composition, and the mass is multiplexed the movable structure, and, the fixed structure
It is fixed in the substrate, for when applying an acceleration to the three axles capacitive accelerometer, producing and the acceleration
Specific capacitor value changes.
In the embodiment of the application one, with reference to shown in Fig. 1, the mass includes the set along the first direction Y
One Z axis capacitance detecting region Cz1, the second capacitance detecting part, the 3rd capacitance detecting part and the second Z axis capacitance detecting region
Cz2, wherein, the second capacitance detecting part is provided with the first X-axis capacitance detecting region Cx1, first along the second direction X
Y-axis capacitance detecting region Cy1 and the second X-axis capacitance detecting region Cx2, and, the 3rd capacitance detecting part is along described
Two directions are disposed with the 3rd X-axis capacitance detecting region Cx3, the second Y-axis capacitance detecting region Cy2 and the inspection of the 4th X-axis electric capacity
Survey region Cx4；Wherein, any one detection zone includes the detection electric capacity that fixed structure and movable structure are constituted, and the matter
Gauge block is multiplexed the movable structure, and, the fixed structure is fixed in the substrate；
Wherein, the first direction Y is the first mass M1- the second mass M2 directions, and the second direction X
Intersected with the first direction Y.Optionally, the first direction and second direction are mutually perpendicular to.That is, any one mass model
Multiple detection zones in enclosing include the first Z axis capacitance detecting region Cz1, the second Z axis capacitance detecting region Cz2, the first X-axis electricity
Hold detection zone Cx1, the first Y-axis capacitance detecting region Cy1, the second X-axis capacitance detecting region Cx2, the 3rd X-axis capacitance detecting area
Domain Cx3, the second Y-axis capacitance detecting region Cy2 and the 4th X-axis capacitance detecting region Cx4.
It should be noted that in the embodiment of the application one, first direction Y and during second direction X vertical, three axle condenser types
The X axis of accelerometer is identical with second direction, and its Y-axis is identical with first direction, and its Z axis to X-axis and Y-axis composition
Plane is vertical.
As shown in figure 1, in the embodiment of the application one, mass correspondence the first X-axis capacitance detecting region
Cx1, the second X-axis capacitance detecting region Cx2, the 3rd X-axis capacitance detecting region Cx3 and the 4th X-axis capacitance detecting region Cx4 are
Void region；
And, the X-axis capacitance detecting region is consolidated including the first movable structure along first direction Y arrangements, first
Determine structure, the second movable structure and the second fixed structure, wherein, the first movable structure and the first fixed structure composition first
X-axis detects electric capacity 101, and second movable structure and the second fixed structure constitute the second X-axis detection electric capacity 102；
Wherein, when applying the acceleration of X axis to the three axles capacitive accelerometer, the first X-axis detection electricity
The volume change of the X-axis detection electric capacity 102 of appearance 101 and second is opposite.
As shown in figure 1, in the embodiment of the application one, the mass correspondence the first Y-axis capacitance detecting region Cy1
It is void region with the second Y-axis capacitance detecting region Cy2；
And, the Y-axis capacitance detecting region is consolidated including the first movable structure along first direction Y arrangements, first
Determine structure, the second movable structure and the second fixed structure, wherein, the first movable structure and the first fixed structure composition first
Y-axis detects electric capacity 201, and second movable structure and the second fixed structure constitute the second Y-axis detection electric capacity 202；
Wherein, when applying the acceleration of Y-axis to the three axles capacitive accelerometer, the first Y-axis detection electricity
The volume change of the Y-axis detection electric capacity 202 of appearance 201 and second is opposite.
And, with reference to shown in Fig. 1 and Fig. 2, the one kind in the Z axis capacitance detecting region that Fig. 2 provides for the embodiment of the present application can
The structural representation of dynamic structure and fixed structure, wherein, the mass correspondence the first Z axis capacitance detecting region Cz1 and
Second Z axis capacitance detecting region Cz2 is void region；
And, the Z axis capacitance detecting region includes fixed structure and the movable structure around the fixed structure, its
In, the fixed structure and movable structure in the first Z axis capacitance detecting region constitute the first Z axis detection electric capacity 301, and described the
The fixed structure and movable structure in two Z axis capacitance detecting regions constitute the second Z axis detection electric capacity 302；
Wherein, the three axles capacitive accelerometer is applied Z axis to acceleration when, first Z axis detection electricity
The volume change of the Z axis detection electric capacity 302 of appearance 301 and second is opposite.
As shown in Fig. 2 the embodiment of the present application provide Z axis capacitance detecting region movable structure Z1 and fixed structure Z2 it
Between have difference in height.Wherein, the embodiment of the present application is not limited for the design parameter of the difference in height of offer, and it is needed according to reality
Border application carries out specific design, wherein, movable structure Z1 and fixed structure Z2 can have difference of height at both any ends in the same direction,
This application is not particularly limited.And, in the embodiment of the application one, the movable knot in any one Z axis capacitance detecting region
Structure Z1 and fixed structure Z2 have difference of height in same direction end.
In another embodiment of the application, Z axis capacitance detecting regional structure can also be other structures form.With reference to Fig. 3
With shown in Fig. 4, the structural representation for another three axles capacitive accelerometer that Fig. 3 provides for the embodiment of the present application, Fig. 4 is this
Apply for another movable structure and the structural representation of fixed structure in the Z axis capacitance detecting region that embodiment is provided.Wherein, institute
Mass correspondence the first Z axis capacitance detecting region Cz1 and the second Z axis capacitance detecting region Cz2 is stated to be correspondingly arranged to be described
Movable structure；
And, it is fixed in the substrate and the correspondence movable structure is provided with the fixed structure, wherein, it is described
The fixed structure and movable structure in the first Z axis capacitance detecting region constitute the first Z axis detection electric capacity 301, and second Z axis electricity
The fixed structure and movable structure for holding detection zone constitute the second Z axis detection electric capacity 302；
Wherein, the three axles capacitive accelerometer is applied Z axis to acceleration when, first Z axis detection electricity
The volume change of the Z axis detection electric capacity 302 of appearance 301 and second is opposite.
It is as shown in Figure 4 in figure 3 along along the tangent plane schematic diagram in AA ' directions, on substrate-quality Block direction, Z axis electric capacity
Overlap and set between the movable structure Z1 and fixed structure Z2 of detection zone, and have between movable structure Z1 and fixed structure Z2
Gap, to form Z axis detection electric capacity.
It should be noted that above-mentioned movable structure and the concrete mode of fixed structure on Z axis capacitance detecting region
The two of which in the numerous structures of the application, in the application other embodiment the movable structure in Z axis capacitance detecting region and
Fixed structure can also constitute detection electric capacity for other modes, and this application is not particularly limited.
As shown in figure 1, in the embodiment of the application one, positioned at the second capacitance detecting part of the mass and the 3rd electricity
Hold and be provided with elastic joint part between detection part, the elastic joint part be provided with least one described fixed anchor point with it is described
Mass elastic connection.
Wherein, the mass correspondence elastic joint part is provided with the first elasticity arranged along the second direction X
The elastic void region 420 in void region 410 and second；
The elastic void region is provided with fixed anchor point 400 described in one, and the fixed anchor point 400 passes through an edge
First spring beam 430 of the second direction X extensions is connected with the mass, wherein, the described first elastic void region 410
It is oppositely arranged with the first spring beam 430 of the second elastic void region 420.Wherein, the three axle electric capacity that the embodiment of the present application is provided
Formula accelerometer realizes that two masses share detection three axially different using the fixed anchor point not mode of heart position wherein
Acceleration purpose.And, each mass is fixed by two fixed anchor points respectively, is reduced asymmetric caused by process deviation
Property, increase the reliability and stability of three axle capacitive accelerometers.
And, as shown in figure 1, the elastic construction include along the first direction Y set the first elastic structure and
Second elastic structure, and the buckstay 600 between the described first elastic structure and the second elastic structure；
The first elastic structure includes two the second spring beams 510 set along the second direction X, described in two
The opposite end of second spring beam 510 is connected with the buckstay 600, and two second spring beams 510 the other end with
The first mass M1 is connected；
And, the second elastic structure includes two the 3rd spring beams 520 set along the second direction X, two
The opposite end of individual 3rd spring beam 520 is connected with the buckstay 600, and two the 3rd spring beams 520 is another
End is connected with the second mass M2.Wherein, two masses are connected using spring beam coupled structure, makes two masses
Limiting displacement width, it is to avoid the problem of adhesion or fracture are produced due to excessive displacement itself.In addition, the embodiment of the present application is provided
Technical scheme, on two masses, the Differential Detection of electric capacity is carried out respectively, process deviation and encapsulation is reduced, welding or
The influence that the stress that the processes such as variation of ambient temperature are caused is produced to single mass.
The detection process of the three axle capacitive accelerometers provided for the embodiment of the present application, with reference to Fig. 5 to Fig. 7 institutes
Show that schematic diagram is described in detail.
With reference to shown in Fig. 5, the structural representation detected for the three axle capacitive accelerometers that the embodiment of the present application is provided in X-axis
Figure, wherein, when three axle capacitive accelerometers have acceleration in X axis, due to the first mass M1 and the second mass M2
The position moving displacement meeting of the architecture quality inequality of composition, the first mass M1 and the second mass M2 close to buckstay 600
More than the position moving displacement away from the both sides of buckstay 600.By taking the direction that Fig. 3 is identified as an example, thus, the inspection of the first X-axis electric capacity
Survey region Cx1 and the 3rd X-axis capacitance detecting region Cx3 the first X detection electric capacity 101, and the second X-axis capacitance detecting region Cx2
The capacitance for detecting electric capacity 102 with the 4th X-axis capacitance detecting region Cx4 the 2nd X reduces；And the first X-axis electricity in contrast
Hold detection zone Cx1 and the 3rd X-axis capacitance detecting region Cx3 the second X-axis detection electric capacity 102, and the second X-axis capacitance detecting area
The capacitance increase of domain Cx2 and the 4th X-axis capacitance detecting region Cx4 the first X-axis detection electric capacity 101.Subsequent detection circuit leads to
Cross X-axis detection electric capacity and eight electric capacity that eight capacitances in the first mass M1 and the second mass M2 altogether reduce
The differential capacitance change of the X-axis detection electric capacity of amount increase, can measure acceleration of the three axle capacitive accelerometers in X-direction
Degree.
With reference to shown in Fig. 6, the structural representation detected for the three axle capacitive accelerometers that the embodiment of the present application is provided in Y-axis
Figure, wherein, when three axle capacitive accelerometers have acceleration in Y-axis, the first mass M1 and the second mass M2 are to Y-axis
Move in direction.By taking the direction that Fig. 4 is identified as an example, thus, the first Y-axis capacitance detecting region Cy1 and the second Y-axis capacitance detecting region
The capacitance of Cy2 the first Y-axis detection electric capacity 201 reduces；And the first Y-axis capacitance detecting region Cy1 and the 2nd Y in contrast
The capacitance increase of axle capacitance detecting region Cy2 the second Y-axis detection electric capacity 202.Subsequent detection circuit passes through the first mass
Y-axis detection electric capacity and the Y-axis of four capacitance increases that four capacitances in M1 and the second mass M2 altogether reduce
The differential capacitance change of electric capacity is detected, acceleration of the three axle capacitive accelerometers in Y direction can be measured.
And, with reference to shown in Fig. 7, the knot detected for the three axle capacitive accelerometers that the embodiment of the present application is provided in Z axis
Structure schematic diagram, wherein, in three axle capacitive accelerometers in Z axis to when having acceleration, due to the first mass M1 and the second matter
The architecture quality of gauge block M2 compositions is unequal, and the first mass M1 and the second mass M2 are moved close to the position of buckstay 600
Displacement can be more than the position moving displacement away from the both sides of buckstay 600.By taking Fig. 5 marks direction as an example, thus, the first Z axis electric capacity
The capacitance of detection zone Cz1 the first Z axis detection electric capacity 301 reduces；And the second Z axis capacitance detecting region in contrast
The capacitance increase of second Z axis detection electric capacity 302.Subsequent detection circuit passes through total in the first mass M1 and the second mass M2
The first Z axis detection electric capacity 301 and the second Z axis detection electric capacity of two capacitance increases that common two capacitances reduce
302 differential capacitance change, can measure acceleration of the three axle capacitive accelerometers in Z-direction.
In the above-mentioned any one embodiment of the application, the fixed structure is fixed polar plate, and the movable structure is movable
Pole plate, wherein, any one detection zone includes the detection electric capacity that the fixed polar plate and the movable plate are constituted, and described
Mass is multiplexed the movable plate, and, the fixed polar plate is fixed in the substrate.
In the three axle capacitive accelerometers that the application is provided, include the first mass of two settings that are of coupled connections
With the second mass, wherein, the motion of the first mass and the second mass in some dimension that is of coupled connections has correlation.
Specific the first mass provided such as the embodiment of the present application and the second mass by a direction acceleration when, the first mass
If block turns clockwise, the second mass is rotate counterclockwise, is of coupled connections and ensure that the first mass and the second mass
The anglec of rotation of block is consistent.
In the three axle capacitive accelerometers that the application is provided, it can be examined by X-axis capacitance detecting region, Y-axis electric capacity
Region and Z axis capacitance detecting region are surveyed, the purpose of the acceleration of detection X-axis, Y-axis and Z-direction is realized respectively, wherein, at this
Apply provide three axle capacitive accelerometers in, it is not limited to above-mentioned Fig. 1 to embodiment shown in Fig. 5 provide on X
The restriction in axle capacitance detecting region, the quantity in Y-axis capacitance detecting region and Z axis capacitance detecting region and position, X-axis capacitance detecting
The quantity in region, Y-axis capacitance detecting region and Z axis capacitance detecting region can increase on the basis of above-described embodiment provides quantity
It is many or reduce, and, the position in X-axis capacitance detecting region, Y-axis capacitance detecting region and Z axis capacitance detecting region can also be
It is changed on the basis of the position that above-described embodiment is provided, as long as three axle capacitive accelerometers ensure the first mass and the
Two masses are of coupled connections and can realized the testing goal of the acceleration of X-axis, Y-axis and Z-direction, i.e. in the first matter
Gauge block and the second mass are of coupled connections and can realized on the basis of the detection of the acceleration of X-axis, Y-axis and Z-direction, to X
The quantity and the deformation of position that axle capacitance detecting region, Y-axis capacitance detecting region and Z axis capacitance detecting region are carried out belong to this
The protected scheme of application.
With reference to shown in Fig. 8 and Fig. 9, the structure of the other two kind of three axle capacitive accelerometer provided the application is said
It is bright.
With reference to shown in Fig. 8, the structural representation of another the three axle capacitive accelerometer provided for the embodiment of the present application,
Wherein, the Y-axis capacitance detecting region and Z axis capacitance detecting region of three axle capacitive accelerometers shown in Fig. 8 and structure shown in Fig. 1
Identical, i.e. the first mass M1 and the second mass M2 include the first Y-axis capacitance detecting region Cy1 and the inspection of the second Y-axis electric capacity
Region Cy2 is surveyed, and, including the first Z axis capacitance detecting region Cz1 and the second Z axis capacitance detecting region Cz2.
Unlike Fig. 1, in three axle capacitive accelerometers shown in the application Fig. 8, the number in X-axis capacitance detecting region
Amount and position change, i.e. each mass only includes two X-axis electric capacity in the first mass M1 and the second mass M2
Detection zone, respectively the first X-axis capacitance detecting region Cx1 and the second X-axis capacitance detecting region Cx2, and the inspection of the first X-axis electric capacity
Survey region Cx1 and the second X-axis capacitance detecting region Cx2 and be separately positioned on opposite sides of the mass on second direction X, with
And, the first X-axis capacitance detecting region Cx1 and the second X-axis capacitance detecting region Cx2 bearing of trend are identical with first direction Y, can
Dynamic structure and fixed structure are oppositely arranged on second direction X, during ensureing to have acceleration in X-axis, and Y extends in the first direction
Movable structure and fixed structure between capacitance change, and then according to the change of the capacitance detect acceleration.
And, with reference to shown in Fig. 9, the structure of another the three axle capacitive accelerometer provided for the embodiment of the present application is shown
It is intended to, wherein, the Z axis capacitance detecting region of three axle capacitive accelerometers is identical with structure shown in Fig. 1 shown in Fig. 8, i.e., and first
Mass M1 and the second mass M2 includes the first Z axis capacitance detecting region Cz1 and the second Z axis capacitance detecting region Cz2.
Unlike Fig. 1, in three axle capacitive accelerometers shown in the application Fig. 9, the position in X-axis capacitance detecting region
Put and change, i.e. each mass includes the first X-axis capacitance detecting region in the first mass M1 and the second mass M2
Cx1, the second X-axis capacitance detecting region Cx2, the 3rd X-axis capacitance detecting region Cx3 and the 4th X-axis capacitance detecting region Cx4, its
In, the first X-axis capacitance detecting region Cx1, the second X-axis capacitance detecting region Cx2, the 3rd X-axis capacitance detecting region Cx3 and the 4th
The X-axis capacitance detecting region Cx4 central area towards place mass is obliquely installed.
And, and unlike another point in Fig. 1, in three axle capacitive accelerometers shown in the application Fig. 9, Y-axis electric capacity
The quantity of detection zone and position change, i.e. each mass includes in the first mass M1 and the second mass M2
First Y-axis capacitance detecting region Cy1, the second Y-axis capacitance detecting region Cy2, the 3rd Y-axis capacitance detecting region Cy3 and the 4th Y-axis
Capacitance detecting region Cy4.Wherein, the first Y-axis capacitance detecting region Cy1 and the second Y-axis capacitance detecting region Cy2 be in a second direction
X orders are arranged in a second direction by X order spread configurations, the 3rd Y-axis capacitance detecting region Cy3 and the 4th Y-axis capacitance detecting region Cy4
Row are set, and the first Y-axis capacitance detecting region Cy1 and the second Y-axis capacitance detecting region Cy2 combination, are examined with the 3rd Y-axis electric capacity
Y is arranged at elastic void region both sides and set in the first direction for survey region Cy3 and the 4th Y-axis capacitance detecting region Cy4 combination
It is placed between the first Z axis capacitance detecting region Cz1 and the second Z axis capacitance detecting region Cz2.
Accordingly, the embodiment of the present application additionally provides a kind of electronic installation, includes the three of above-mentioned any one embodiment offer
Axle capacitive accelerometer.
The embodiment of the present application provides a kind of three axles capacitive accelerometer and electronic installation, including：Symmetrical configuration is set
The first mass and the second mass, wherein, coupled between first mass and the second mass by elastic construction
It is connected, and the mass is movably disposed in substrate by least one its corresponding fixed anchor point, for institute
When stating three axle capacitive accelerometers, one acceleration of application, moves corresponding with the acceleration is produced；And, positioned at any one matter
Multiple detection zones in the range of gauge block, wherein, any one detection zone includes the inspection that fixed structure and movable structure are constituted
Survey electric capacity, and the mass is multiplexed the movable structure, and, the fixed structure is fixed in the substrate, for
When applying an acceleration to the three axles capacitive accelerometer, the specific capacitor value changes with the acceleration are produced.By above-mentioned
Content understands that the technical scheme that the present invention is provided, the capacitance detecting region of three axle capacitive accelerometers shares the first mass
Block and the second mass, to reduce the quantity of mass, beneficial to the lightening trend of three axle capacitive accelerometers；In addition, coupling
Closing two masses of connection helps to eliminate accelerometer with welded encapsulation, or the stress produced during temperature change etc.
The zero deviation and sensitivity variations of influence, effectively reduction accelerometer.
The foregoing description of the disclosed embodiments, enables professional and technical personnel in the field to realize or using the present invention.
A variety of modifications to these embodiments will be apparent for those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention
The embodiments shown herein is not intended to be limited to, and is to fit to and principles disclosed herein and features of novelty phase one
The most wide scope caused.
Claims (11)
1. a kind of three axles capacitive accelerometer, it is characterised in that including：
The first mass and the second mass that symmetrical configuration is set, wherein, between first mass and the second mass
It is connected by elastic construction coupling, and the mass is movably disposed at base by least one its corresponding fixed anchor point
On bottom, for when applying an acceleration to the three axles capacitive accelerometer, producing move corresponding with the acceleration；
And, multiple detection zones in the range of any one mass, wherein, any one detection zone includes fixed knot
The detection electric capacity of structure and movable structure composition, and the mass is multiplexed the movable structure, and, the fixed structure is fixed
In in the substrate, for when applying an acceleration to the three axles capacitive accelerometer, producing the spy with the acceleration
Determine capacitance variation.
2. three axles capacitive accelerometer according to claim 1, it is characterised in that the mass is included along first party
Examined to the first Z axis capacitance detecting region of setting, the second capacitance detecting part, the 3rd capacitance detecting part and the second Z axis electric capacity
Region is surveyed, wherein, the second capacitance detecting part is provided with the first X-axis capacitance detecting region, the first Y-axis electricity in a second direction
Hold detection zone and the second X-axis capacitance detecting region, and, the 3rd capacitance detecting part is set successively along the second direction
It is equipped with the 3rd X-axis capacitance detecting region, the second Y-axis capacitance detecting region and the 4th X-axis capacitance detecting region；
Wherein, the first direction is the-the second quality of the first mass Block direction, and the second direction and described first
Direction intersects.
3. three axles capacitive accelerometer according to claim 2, it is characterised in that the mass correspondence described first
X-axis capacitance detecting region, the second X-axis capacitance detecting region, the 3rd X-axis capacitance detecting region and the 4th X-axis capacitance detecting region
It is void region；
And, the X-axis capacitance detecting region includes the first movable structure, the first fixed knot arranged along the first direction
Structure, the second movable structure and the second fixed structure, wherein, first movable structure and first fixed structure constitute the first X-axis
Electric capacity is detected, second movable structure and the second fixed structure constitute the second X-axis detection electric capacity；
Wherein, when applying the acceleration of X axis to the three axles capacitive accelerometer, first X-axis detection electric capacity and
The volume change of second X-axis detection electric capacity is opposite.
4. three axles capacitive accelerometer according to claim 2, it is characterised in that the mass correspondence described first
Y-axis capacitance detecting region and the second Y-axis capacitance detecting region are void region；
And, the Y-axis capacitance detecting region includes the first movable structure, the first fixed knot arranged along the first direction
Structure, the second movable structure and the second fixed structure, wherein, first movable structure and first fixed structure constitute the first Y-axis
Electric capacity is detected, second movable structure and the second fixed structure constitute the second Y-axis detection electric capacity；
Wherein, when applying the acceleration of Y-axis to the three axles capacitive accelerometer, first Y-axis detection electric capacity and
The volume change of second Y-axis detection electric capacity is opposite.
5. three axles capacitive accelerometer according to claim 2, it is characterised in that the mass correspondence described first
Z axis capacitance detecting region and the second Z axis capacitance detecting region are void region；
And, the Z axis capacitance detecting region includes the fixed structure and the movable structure around the fixed structure,
Wherein, the fixed structure in the first Z axis capacitance detecting region and movable structure constitute the first Z axis detection electric capacity, and described the
The fixed structure and movable structure in two Z axis capacitance detecting regions constitute the second Z axis detection electric capacity；
Wherein, the three axles capacitive accelerometer is applied Z axis to acceleration when, first Z axis detection electric capacity and
The volume change of second Z axis detection electric capacity is opposite.
6. three axles capacitive accelerometer according to claim 5, it is characterised in that any one Z axis capacitance detecting region
The movable structure and fixed structure between have difference in height.
7. three axles capacitive accelerometer according to claim 2, it is characterised in that the mass correspondence described first
Z axis capacitance detecting region and the second Z axis capacitance detecting region are correspondingly arranged as the movable structure；
And, it is fixed in the substrate and the correspondence movable structure is provided with the fixed structure, wherein, the first Z
The fixed structure and movable structure in axle capacitance detecting region constitute the first Z axis detection electric capacity, and the second Z axis capacitance detecting area
The fixed structure and movable structure in domain constitute the second Z axis detection electric capacity；
Wherein, the three axles capacitive accelerometer is applied Z axis to acceleration when, first Z axis detection electric capacity and
The volume change of second Z axis detection electric capacity is opposite.
8. three axles capacitive accelerometer according to claim 2, it is characterised in that positioned at the second electricity of the mass
Hold and be provided with elastic joint part between detection part and the 3rd capacitance detecting part, the elastic joint part is provided with least one
The fixed anchor point and the mass elastic connection.
9. three axles capacitive accelerometer according to claim 8, it is characterised in that the mass correspondence elasticity
Connecting portion is provided with the first elastic void region and the second elastic void region arranged along the second direction；
The elastic void region is provided with fixed anchor point described in one, and the fixed anchor point by one along the second party
It is connected to the first spring beam of extension with the mass, wherein, the described first elastic void region and the second elastic vacancy section
First spring beam in domain is oppositely arranged.
10. three axles capacitive accelerometer according to claim 2, it is characterised in that the elastic construction is included along institute
The the first elastic structure and the second elastic structure of first direction setting are stated, and positioned at the described first elastic structure and second
Buckstay between elastic structure；
The first elastic structure includes two the second spring beams set along the second direction, two second elasticity
The opposite end of beam is connected with the buckstay, and two second spring beams the other end with the first mass phase
Even；
And, the second elastic structure includes two the 3rd spring beams set along the second direction, two described the
The opposite end of three spring beams is connected with the buckstay, and two the 3rd spring beams the other end with second mass
Block is connected.
11. a kind of electronic installation, it is characterised in that including three axle capacitance accelerations described in claim 1~0 any one
Meter.
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