CN204255978U - A kind of split type difference silicon micro-resonance type accelerometer - Google Patents
A kind of split type difference silicon micro-resonance type accelerometer Download PDFInfo
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- CN204255978U CN204255978U CN201420717557.2U CN201420717557U CN204255978U CN 204255978 U CN204255978 U CN 204255978U CN 201420717557 U CN201420717557 U CN 201420717557U CN 204255978 U CN204255978 U CN 204255978U
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Abstract
The utility model discloses a kind of split type difference silicon micro-resonance type accelerometer, comprise substrate of glass, trace layer, bonded layer and silicon structural layer.Wherein silicon structural layer is made up of the two-part structure of upper and lower full symmetric, and every part-structure comprises the parts such as mass, resonator, lever amplifying mechanism, brace summer, anchor district; Upper and lower two-part structure only shares Liang Gemao district in centre, and all the other structures are separated completely.Each mass is connected with anchor district by folded beam, resonator is positioned at the centre of mass, in lever amplifying mechanism, the output beam of leverage and fulcrum beam are positioned at the same side of lever arm, input beam is positioned at the opposite side of lever arm, the input beam of each lever is connected with mass, exports beam and is connected with resonator.The split type difference silicon micro-resonance type accelerometer that the utility model proposes, not only effectively can suppress common-mode error, and can eliminate the coupling influence of upper and lower resonator completely.
Description
Technical field
The utility model relates to a kind of split type difference silicon micro-resonance type accelerometer, belongs to MEMS (micro electro mechanical system) (MEMS) and micro-inertia measuring technology.
Background technology
Silicon micro accerometer is a kind of typical MEMS (Micro Electromechanical system, MEMS (micro electro mechanical system)) inertial sensor, its processing technology and microelectronic processing technique compatibility, batch production can be realized, have that volume is little, lightweight, cost is low, energy consumption is low, reliability is high, be easy to intelligent and digitizing, can meet the features such as severe environment applications, be one of focus direction of current accelerometer development, has important Military value and civilian prospect widely.
Silicon micro accerometer comprises resonant mode, condenser type, force balance type, piezoelectric type, pressure resistance type, thermal convection and tunnel current formula etc.Resonant silicon micro-acceleration gauge is by mass sensitive acceleration signal, and degree of will speed up is converted to inertial force, and this inertial force acts in resonance beam, causes resonance beam resonance frequency to change, and can obtain the size of acceleration by detecting resonance frequency variable quantity.Resonant silicon micro-acceleration gauge not only has the advantage of general silicon micro accerometer, and export the frequency signal of accurate numeral, thus have be easy to detect, the feature such as anti-interference good, good stability, convenient signal treatment, be a kind of high-precision silicon micro accerometer.
Existing silicon micro-resonance type accelerometer generally adopts integral type differential configuration, comprises a mass and two symmetrical resonators, adopts the mode of difference to detect output signal.Because two resonators share a mass, there is coupling between the two, can blind area be there is in certain measurement range.And do not wait two resonators of fundamental frequency silicon micro-resonance type accelerometer to take asymmetric design, measure blind area although can eliminate within the scope of gamut, reduce the suppression to common-mode error.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the utility model provides a kind of split type difference silicon micro-resonance type accelerometer, effectively can suppress common-mode error, and can eliminate the coupling influence of upper and lower resonator completely.
Technical scheme: for achieving the above object, the technical solution of the utility model is as follows:
A kind of split type difference silicon micro-resonance type accelerometer, comprise substrate of glass, trace layer, bonded layer and silicon structural layer, described substrate of glass is set to bottom, face sputters leaded layer on the glass substrate, described substrate of glass and trace layer are provided with bonded layer, are silicon structural layer above described bonded layer.
Further, described silicon structural layer comprises improve quality block and lower mass, described block of improving quality and horizontal axis of about silicon structural layer identical with lower mass is symmetrical arranged, and described in improve quality to be separated from each other by means of only symmetry mass up and down between block and lower mass on the left of on the right side of public anchor district and upper and lower mass public anchor district link together.
Further, arrange at the described block outer corner place that improves quality and improve quality on the left of block that on the right side of anchor district and block of improving quality anchor district, described block of improving quality is connected with upper left side lever amplifying mechanism and upper right side lever amplifying mechanism outboard end respectively, and described upper left side lever amplifying mechanism is connected with upper resonator respectively with upper right side lever amplifying mechanism medial extremity.
Further, arrange at described lower mass outer corner place on the left of lower mass that on the right side of anchor district and lower mass anchor district, described lower mass is connected with lower left side lever amplifying mechanism and lower right side lever amplifying mechanism outboard end respectively, and described lower left side lever amplifying mechanism is connected with lower resonator respectively with the medial extremity of lower right side lever amplifying mechanism.
Further, on the right side of public anchor district on the left of described upper and lower mass, up and down mass on the left of public anchor district, block of improving quality on the right side of anchor district, block of improving quality on the left of anchor district, lower mass anchor district and anchor district on the right side of lower mass is connected respectively by the brace summer of folded beam form improve quality block and/or lower mass, and limit improve quality block and lower mass and move in the horizontal direction.
Further, described upper left side lever amplifying mechanism comprises the left side upper lever input beam, left side upper lever fulcrum beam and the left side upper lever that are successively set in the upper lever arm of left side by outside to inner side and exports beam, described upper right side lever amplifying mechanism comprises the right side upper lever input beam, right side upper lever fulcrum beam and the right side upper lever that are successively set in the upper lever arm of right side by outside to inner side and exports beam, and the alignment of the medial extremity of described upper left side lever amplifying mechanism and upper right side lever amplifying mechanism is on a straight line; Described left side upper lever input beam and right side upper lever input beam are separately positioned on corresponding left side upper lever arm and the outboard end of right side upper lever arm, and be connected with block of improving quality respectively, the medial extremity of described left side upper lever arm and right side upper lever arm is respectively equipped with left side upper lever and exports beam and right side upper lever output beam, and described left side upper lever is exported beam and is connected with upper resonator by contiguous block with right side upper lever output beam; The left side upper lever fulcrum beam being provided with between beam and being connected to left side upper lever arm is exported at described left side upper lever input beam and left side upper lever, described left side upper lever fulcrum beam is connected with upper lever anchor district, left side, export the right side upper lever fulcrum beam being provided with between beam and being connected in the upper lever arm of right side at described right side upper lever input beam and right side upper lever, described right side upper lever fulcrum beam is connected with upper lever anchor district, right side.
Further, described lower left side lever amplifying mechanism comprises lever under the left side be successively set on by inner side to outside on the lower lever arm in left side and to input under beam, left side lever under balance pivot beam and left side and export beam, described lower right side lever amplifying mechanism comprises lever under the right side be successively set on by inner side to outside on the lower lever arm in right side and to input under beam, right side lever under balance pivot beam and right side and export beam, and lower left side lever amplifying mechanism and the alignment of lower right side lever amplifying mechanism medial extremity are on a straight line; Under described left side, under lever input beam and right side, lever input beam is separately positioned on the outboard end of lever arm under lever arm and right side under corresponding left side, and be connected with lower mass respectively, under described left side under lever arm and right side the medial extremity of lever arm be respectively equipped with the lower lever in left side export beam and right side under lever export beam, under described left side, lever is exported beam and (exports beam with lever under right side to be connected with lower resonator by contiguous block; Under described left side, under lever input beam and left side, lever exports balance pivot beam under the left side being provided with between beam and being connected to lever arm under left side, under described left side, balance pivot beam is connected with lower lever anchor district, left side, under described right side, under lever input beam and right side, lever exports balance pivot beam under the right side being provided with between beam and being connected under right side on lever arm, and under described right side, balance pivot beam is connected with lower lever anchor district, right side.
Further, described upper resonator comprises resonance beam and upper resonator end, described upper resonance beam is two and arranged in parallel, one end of two upper resonance beam is connected with upper left side lever amplifying mechanism and upper right side lever amplifying mechanism respectively by contiguous block, the other end of two upper resonance beam is connected with upper resonator end by another contiguous block, and both sides, described upper resonator end are connected with upper resonator anchor district respectively by upper resonator anchor district tie-beam, on two, the resonance beam interlude left and right sides comprises drive electrode from the inside to the outside respectively, upper driving fixed fingers, upper movable comb, upper comb dent frame, upper detection fixed fingers and upper detecting electrode, on described every root, resonance beam side arranges upper comb dent frame parallel with it, about described every root upper comb dent frame, drive electrode and upper detecting electrode are set respectively, described upper comb dent frame is arranged some upper movable comb vertical with it, described upper drive electrode arranges some upper driving fixed fingers vertical with it, described upper detecting electrode arranges some upper detection fixed fingers vertical with it, described upper movable comb forms multiple unit capacitor with upper driving fixed fingers and upper detection fixed fingers respectively.
Further, described lower resonator comprises lower resonance beam and lower resonator end, described lower resonance beam is two and arranged in parallel, one end of two lower resonance beam is connected with lower left side lever amplifying mechanism and lower right side lever amplifying mechanism respectively by contiguous block, the other end of two lower resonance beam is connected with lower resonator end by another contiguous block, and both sides, described lower resonator end are connected with lower resonator anchor district respectively by lower resonator anchor district tie-beam, lower drive electrode is comprised respectively from the inside to the outside in the left and right sides of two lower resonance beam intermediate stage, lower driving fixed fingers, lower movable comb, lower comb frame, lower detection fixed fingers and lower detecting electrode, under described every root, resonance beam side arranges lower comb frame parallel with it, under described every root, lower drive electrode and lower detecting electrode are set about comb frame respectively, described lower comb frame arranges some lower movable comb vertical with it, described lower drive electrode arranges some lower driving fixed fingers vertical with it, described lower detecting electrode arranges some lower detection fixed fingers vertical with it, described lower movable comb forms multiple unit capacitor with lower driving fixed fingers and lower detection fixed fingers respectively.
Beneficial effect: the utility model advantage:
(1) upper and lower mass adopts separate design, has cut off the interactional passage of upper and lower resonator, thus has eliminated the coupling of upper and lower resonator.
(2) two resonator parameters are identical, have consistance to the response that the factors such as temperature cause, and are conducive to eliminating common-mode error.
(3) static excitation adopts comb capacitance structure, compared with traditional parallel plate capacitor structure, can obtain larger amplitude on the one hand; The damping be subject on the other hand is slide-film damping, can improve quality factor.
(4) under acceleration effect, upper and lower resonant frequency increases respectively and reduces, and by measuring the difference of the frequency change of two resonators, can obtain acceleration magnitude.Difference form can increase resonator output signal, improves sensitivity, more easily detects.
(5) resonator anchor district is not directly connected with resonance beam, is conducive to discharging processing and the thermal stress caused by environment temperature.
Accompanying drawing explanation
Accompanying drawing 1 is the vertical view of the split type difference silicon micro-resonance type accelerometer of the utility model.
Accompanying drawing 2 is the structural representation of resonator on the utility model.
Accompanying drawing 3 is the structural representation of resonator under the utility model.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further described.
As shown in accompanying drawing 1,2 and 3, a kind of split type difference silicon micro-resonance type accelerometer, comprise substrate of glass, trace layer, bonded layer and silicon structural layer, described substrate of glass is set to bottom, face sputtering has metal wiring layer on the glass substrate, described substrate of glass and trace layer are provided with bonded layer, and be silicon structural layer above described bonded layer, namely silicon structural layer is placed on glass-base by bonding technology.
Silicon structural layer is made up of the two-part structure of full symmetric, comprises the block 1a and lower mass 1b that improves quality.The described block 1b that improves quality is identical with lower mass 1b and be symmetrical arranged about the horizontal axis (line of symmetry) in the middle of silicon structural layer, described improve quality to be separated from each other by means of only symmetry mass up and down between block 1b and lower mass 1b on the left of on the right side of public anchor district 11b and upper and lower mass public anchor district 11a link together, such connected mode cuts off the passage of the energy transferring of upper resonator 2a hereinafter described and lower resonator 2b.The anchor district 4b on the left of anchor district 4a and block of improving quality that to improve quality on the right side of block is set at the described block 1a outer corner place that improves quality, the described block 1a that improves quality is connected with upper left side lever amplifying mechanism 5b and upper right side lever amplifying mechanism 5a outboard end respectively, and described upper left side lever amplifying mechanism 5b is connected with upper resonator 2a respectively with upper right side lever amplifying mechanism 5a medial extremity.Anchor district 4d on the right side of anchor district 4c and lower mass is set at described lower mass 1b outer corner place on the left of lower mass, described lower mass 1b is connected with lower left side lever amplifying mechanism 5c and lower right side lever amplifying mechanism 5d outboard end respectively, and described lower left side lever amplifying mechanism 5c is connected with lower resonator 2b respectively with the medial extremity of lower right side lever amplifying mechanism 5d.
On the right side of public anchor district 11b on the left of described upper and lower mass, up and down mass on the left of public anchor district 11a, block of improving quality on the right side of anchor district 4b, block of improving quality on the left of anchor district 4a, lower mass anchor district 4c and anchor district 4d on the right side of lower mass is connected respectively by the brace summer 3 of folded beam form the block 1b and/or lower mass 1b that improves quality, and limit improve quality block 1b and lower mass 1b displacement in the X direction.The brace summer 3 of described folded beam form can limit the block 1a and lower mass 1b that improves quality and move in X-direction, but does not affect its motion in acceleration sensitive direction Y-direction, reduces the cross-couplings of X, Y-direction.Meanwhile, anchor district in the middle of upper and lower mass shares, can reduce the volume shared by anchor district, increases mass, improves constant multiplier.
Described upper left side lever amplifying mechanism 5b comprises the left side upper lever input beam 7b, left side upper lever fulcrum beam 9b and the left side upper lever that are successively set on the upper lever arm 8b of left side by outside to inner side and exports beam 10b; Described upper right side lever amplifying mechanism 5a comprises the right side upper lever input beam 7a, right side upper lever fulcrum beam 9a and the right side upper lever that are successively set on the upper lever arm 8a of right side by outside to inner side and exports beam 10a; And the alignment of the medial extremity of described upper left side lever amplifying mechanism 5b and upper right side lever amplifying mechanism 5a is on a straight line; Described left side upper lever input beam 7b and right side upper lever input beam 7a is separately positioned on corresponding left side upper lever arm 8b and the outboard end of right side upper lever arm 8a, and be connected with the block 1a that improves quality respectively, the medial extremity of described left side upper lever arm 8b and right side upper lever arm 8a is respectively equipped with left side upper lever and exports beam 10b and right side upper lever output beam 10a, and described left side upper lever is exported beam 10b and is connected with upper resonator 2a by contiguous block 14a with right side upper lever output beam 10a.The left side upper lever fulcrum beam 9b being provided with between beam 10b and being connected to left side upper lever arm 8b is exported at described left side upper lever input beam 7b and left side upper lever, described left side upper lever fulcrum beam 9b is connected with left side upper lever anchor district 6b, wherein left side upper lever fulcrum beam 9b is arranged between left side upper lever input beam 7b and left side upper lever output beam 10b, and left side upper lever fulcrum beam 9b distance left side upper lever input beam 7b is comparatively far away, such version meets the requirement of processing conditions more.The right side upper lever fulcrum beam 9a being provided with between beam 10a and being connected on the upper lever arm 8a of right side is exported at described right side upper lever input beam 7a and right side upper lever, described right side upper lever fulcrum beam 9a is connected with right side upper lever anchor district 6a, wherein right side upper lever fulcrum beam 9a is arranged between right side upper lever input beam 7a and right side upper lever output beam 10a, and right side upper lever fulcrum beam 9a distance right side upper lever input beam 7a is comparatively far away, such version meets the requirement of processing conditions more.
Symmetrically arranged lower left side lever amplifying mechanism 5c and lower right side lever amplifying mechanism 5d upper and lower with upper left side lever amplifying mechanism 5b and upper right side lever amplifying mechanism 5a, wherein, described lower left side lever amplifying mechanism 5c comprises lever under the left side be successively set on by inner side to outside on the lower lever arm 8c in left side and to input under beam 7c, left side lever under balance pivot beam 9c and left side and export beam 10c; Described lower right side lever amplifying mechanism 5d comprises lever under the right side be successively set on by inner side to outside on the lower lever arm 8d in right side and to input under beam 7d, right side lever under balance pivot beam 9d and right side and export beam 10d; And lower left side lever amplifying mechanism 5c and the alignment of lower right side lever amplifying mechanism 5d medial extremity are on a straight line; Under described left side, under lever input beam 7c and right side, lever input beam 7d is separately positioned on the outboard end of lever arm 8d under lever arm 8c and right side under corresponding left side, and be connected with lower mass 1b respectively, under described left side under lever arm 8c and right side the medial extremity of lever arm 8d be respectively equipped with the lower lever in left side export beam 10c and right side under lever export beam 10d, under described left side, lever is exported beam 10c and exports beam 10d with lever under right side and be connected with lower resonator 2b by contiguous block 14c.Under described left side, under lever input beam 7c and left side, lever exports balance pivot beam 9c under the left side being provided with between beam 10c and being connected to lever arm 8c under left side, under wherein the lower balance pivot beam 9c in left side is arranged on the lower lever input beam 7c in left side and left side, lever exports between beam 10c, and balance pivot beam 9c is far away apart from lever input beam 7c under left side under left side, under described left side, balance pivot beam 9c is connected with the lower lever anchor district 6c in left side, and such version meets the requirement of processing conditions more.Under described right side, under lever input beam 7d and right side, lever exports balance pivot beam 9d under the right side being provided with between beam 10d and being connected under right side on lever arm 8d, under wherein the lower balance pivot beam 9d in right side is arranged on the lower lever input beam 7d in right side and right side, lever exports between beam 10d, and balance pivot beam 9d is far away apart from lever input beam 7d under right side under right side, under described right side, balance pivot beam 9d is connected with the lower lever anchor district 6d in right side, and such version meets the requirement of processing conditions more.
Described upper resonator 2a comprises resonance beam 21a and upper resonator end 13a, described upper resonance beam 21a is two and arranged in parallel, one end of two upper resonance beam 21a is connected with upper left side lever amplifying mechanism 5b (right side upper lever exports beam 10a) and upper right side lever amplifying mechanism 5a (left side upper lever exports beam 10b) respectively by contiguous block 14a, the other end of two upper resonance beam 21a is connected with upper resonator end 13a by another contiguous block 14b, 13a both sides, described upper resonator end are connected with upper resonator anchor district 22a respectively by upper resonator anchor district tie-beam 12a, on described every root, resonance beam 21a side arranges upper comb dent frame 20a parallel with it, described every root upper comb dent frame about 20a arranges drive electrode 16a and upper detecting electrode 18a respectively, described upper comb dent frame 20a arranges some upper movable comb 19a vertical with it, described upper drive electrode 16a arranges some upper driving fixed fingers 15a vertical with it, described upper detecting electrode 18a arranges some upper detection fixed fingers 17a vertical with it, and described upper movable comb 19a forms multiple unit capacitor with upper driving fixed fingers 15a and upper detection fixed fingers 17a respectively.
Lower resonator 2b symmetrically arranged with upper resonator 2a, described lower resonator 2b comprises lower resonance beam 21b and lower resonator end 13b, described lower resonance beam 21b is two and arranged in parallel, one end of two lower resonance beam 21b is connected with lower left side lever amplifying mechanism 5c (under left side, lever exports beam 10c) and lower right side lever amplifying mechanism 5d (under right side, lever exports beam 10d) respectively by contiguous block 14c, the other end of two lower resonance beam 21b is connected with lower resonator end 13b by another contiguous block 14d, 13b both sides, described lower resonator end are connected with lower resonator anchor district 22b respectively by lower resonator anchor district tie-beam 12b, under described every root, resonance beam 21b side arranges lower comb frame 20b parallel with it, under described every root, comb frame about 20b arranges lower drive electrode 16b and lower detecting electrode 18b respectively, described lower comb frame 20b arranges some lower movable comb 19b vertical with it, described lower drive electrode 16b arranges some lower driving fixed fingers 15b vertical with it, described lower detecting electrode 18b arranges some lower detection fixed fingers 17b vertical with it, and described lower movable comb 19b forms multiple unit capacitor with lower driving fixed fingers 15b and lower detection fixed fingers 17b respectively.When applying the signal of alternating current-direct current superposition on drive electrode, movable comb is subject to electrostatic forcing, and resonance beam can be driven with natural frequency vibration.When there being outer acceleration, inertial force is produced by mass sensitive acceleration, and amplify through lever amplifying mechanism, act on the axis of resonance beam, resonance beam vibration frequency changes, there is corresponding change in the condenser capacitance change frequency that movable comb and detection fixed fingers are formed, this signal is converted into the change of voltage, can be obtained the change of acceleration by the change of detection voltage.
Principle of work: the utility model becomes inertial force with lower mass 1b acceleration load transfer by the block 1a that improves quality, inertial force is applied to lever amplifying mechanism, be applied on upper resonator 2a and lower resonator 2b after amplifying, two resonators under tension, another is under pressure, resonance frequency increases respectively and reduces, and obtains the size of acceleration load according to frequency difference.
The above is only preferred implementation of the present utility model; be noted that for those skilled in the art; under the prerequisite not departing from the utility model principle; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.
Claims (9)
1. a split type difference silicon micro-resonance type accelerometer, it is characterized in that: comprise substrate of glass, trace layer, bonded layer and silicon structural layer, described substrate of glass is set to bottom, face sputters leaded layer on the glass substrate, described substrate of glass and trace layer are provided with bonded layer, are silicon structural layer above described bonded layer.
2. a kind of split type difference silicon micro-resonance type accelerometer according to claim 1, it is characterized in that: described silicon structural layer comprises block of improving quality (1a) and lower mass (1b), described block of improving quality (1b) and horizontal axis of about silicon structural layer identical with lower mass (1b) is symmetrical arranged, and described in improve quality to be separated from each other by means of only symmetry mass up and down between block (1b) and lower mass (1b) on the left of on the right side of public anchor district (11b) and upper and lower mass public anchor district (11a) link together.
3. a kind of split type difference silicon micro-resonance type accelerometer according to claim 2, it is characterized in that: arrange at described block of improving quality (1a) outer corner place on the right side of block of improving quality that on the left of anchor district (4a) and block of improving quality anchor district (4b), described block of improving quality (1a) is connected with upper left side lever amplifying mechanism (5b) and upper right side lever amplifying mechanism (5a) outboard end respectively, and described upper left side lever amplifying mechanism (5b) is connected with upper resonator (2a) respectively with upper right side lever amplifying mechanism (5a) medial extremity.
4. a kind of split type difference silicon micro-resonance type accelerometer according to claim 2, it is characterized in that: anchor district (4d) on the right side of anchor district (4c) and lower mass is set at described lower mass (1b) outer corner place on the left of lower mass, described lower mass (1b) is connected with lower left side lever amplifying mechanism (5c) and lower right side lever amplifying mechanism (5d) outboard end respectively, and described lower left side lever amplifying mechanism (5c) is connected with lower resonator (2b) respectively with the medial extremity on lower right side lever amplifying mechanism (5d).
5. a kind of split type difference silicon micro-resonance type accelerometer according to claim 3 or 4, it is characterized in that: public anchor district (11b) on the left of described upper and lower mass, public anchor district (11a) on the right side of upper and lower mass, improve quality anchor district (4b) on the left of block, improve quality anchor district (4a) on the right side of block, on the left of lower mass on the right side of anchor district (4c) and lower mass anchor district (4d) respectively by the brace summer (3a1 of folded beam form, 3b1, 3c1, 3d1, 3a2, 3b2, 3c2, 3d2) connect improve quality block (1b) and/or lower mass (1b), block (1b) and lower mass (1b) motion in the X direction and restriction is improved quality.
6. a kind of split type difference silicon micro-resonance type accelerometer according to claim 3, it is characterized in that: described upper left side lever amplifying mechanism (5b) comprises the left side upper lever be successively set on left side upper lever arm (8b) by outside to inner side and inputs beam (7b), left side upper lever fulcrum beam (9b) and left side upper lever export beam (10b), described upper right side lever amplifying mechanism (5a) comprises the right side upper lever be successively set on right side upper lever arm (8a) by outside to inner side and inputs beam (7a), right side upper lever fulcrum beam (9a) and right side upper lever export beam (10a), and the alignment of the medial extremity on described upper left side lever amplifying mechanism (5b) and upper right side lever amplifying mechanism (5a) is on a straight line, described left side upper lever input beam (7b) and right side upper lever input beam (7a) are separately positioned on corresponding left side upper lever arm (8b) and the outboard end of right side upper lever arm (8a), and be connected with block of improving quality (1a) respectively, the medial extremity of described left side upper lever arm (8b) and right side upper lever arm (8a) is respectively equipped with left side upper lever and exports beam (10b) and right side upper lever output beam (10a), described left side upper lever is exported beam (10b) and is connected with upper resonator (2a) by contiguous block (14a) with right side upper lever output beam (10a), left side upper lever fulcrum beam (9b) being provided with between beam (10b) and being connected to left side upper lever arm (8b) is exported at described left side upper lever input beam (7b) and left side upper lever, described left side upper lever fulcrum beam (9b) is connected with upper lever anchor district, left side (6b), right side upper lever fulcrum beam (9a) being provided with between beam (10a) and being connected on right side upper lever arm (8a) is exported at described right side upper lever input beam (7a) and right side upper lever, described right side upper lever fulcrum beam (9a) is connected with upper lever anchor district, right side (6a).
7. a kind of split type difference silicon micro-resonance type accelerometer according to claim 4, it is characterized in that: under described lower left side lever amplifying mechanism (5c) comprises the left side be successively set on by inner side to outside on the lower lever arm (8c) in left side, lever inputs beam (7c), the lower balance pivot beam (9c) in left side, beam (10c) is exported with lever under left side, under described lower right side lever amplifying mechanism (5d) comprises the right side be successively set on by inner side to outside on the lower lever arm (8d) in right side, lever inputs beam (7d), under balance pivot beam (9d) and right side are descended in right side, lever exports beam (10d), and lower left side lever amplifying mechanism (5c) and the alignment of lower right side lever amplifying mechanism (5d) medial extremity are on a straight line, under described left side, under lever input beam (7c) and right side, lever input beam (7d) is separately positioned on the outboard end of lever arm (8d) under lever arm (8c) and right side under the left side of correspondence, and be connected with lower mass (1b) respectively, under described left side, under lever arm (8c) and right side, the medial extremity of lever arm (8d) is respectively equipped with the lower lever in left side and exports lever output beam (10d) under beam (10c) and right side, under described left side lever export beam (10c) and under right side lever output beam (10d) be connected with lower resonator (2b) by contiguous block (14c), under described left side under lever input beam (7c) and left side lever export to be provided with between beam (10c) be connected on the left of under lever arm (8c) left side under balance pivot beam (9c), under described left side, balance pivot beam (9c) is connected with lower lever anchor district (6c), left side, under described right side under lever input beam (7d) and right side lever export to be provided with between beam (10d) be connected on the right side of under balance pivot beam (9d) under right side on lever arm (8d), under described right side, balance pivot beam (9d) is connected with lower lever anchor district (6d), right side.
8. a kind of split type difference silicon micro-resonance type accelerometer according to claim 6, it is characterized in that: described upper resonator (2a) comprises resonance beam (21a) and upper resonator end (13a), described upper resonance beam (21a) is two and arranged in parallel, one end of two upper resonance beam (21a) is connected with upper left side lever amplifying mechanism (5b) and upper right side lever amplifying mechanism (5a) respectively by contiguous block, the other end of two upper resonance beam (21a) is connected with upper resonator end (13a) by another contiguous block (14b), described upper resonator end (13a) both sides are connected with upper resonator anchor district (22a) respectively by upper resonator anchor district tie-beam (12a), on described every root, resonance beam (21a) side arranges upper comb dent frame (20a) parallel with it, described every root upper comb dent frame (20a) left and right arranges drive electrode (16a) and upper detecting electrode (18a) respectively, described upper comb dent frame (20a) is upper arranges some upper movable comb (19a) vertical with it, described upper drive electrode (16a) arranges some upper driving fixed fingers (15a) vertical with it, described upper detecting electrode (18a) arranges some upper detection fixed fingers (17a) vertical with it, described upper movable comb (19a) forms multiple unit capacitor with upper driving fixed fingers (15a) and upper detection fixed fingers (17a) respectively.
9. a kind of split type difference silicon micro-resonance type accelerometer according to claim 7, it is characterized in that: described lower resonator (2b) comprises lower resonance beam (21b) and lower resonator end (13b), described lower resonance beam (21b) is two and arranged in parallel, one end of two lower resonance beam (21b) is connected with lower left side lever amplifying mechanism (5c) and lower right side lever amplifying mechanism (5d) respectively by contiguous block, the other end of two lower resonance beam (21b) is connected with lower resonator end (13b) by another contiguous block, described lower resonator end (13b) both sides are connected with lower resonator anchor district (22b) respectively by lower resonator anchor district tie-beam (12b), under described every root, resonance beam (21b) side arranges lower comb frame (20b) parallel with it, under described every root, comb frame (20b) left and right arranges lower drive electrode (16b) and lower detecting electrode (18b) respectively, described lower comb frame (20b) is upper arranges some lower movable comb (19b) vertical with it, described lower drive electrode (16b) arranges some lower driving fixed fingers (15b) vertical with it, described lower detecting electrode (18b) arranges some lower detection fixed fingers (17b) vertical with it, described lower movable comb (19b) forms multiple unit capacitor with lower driving fixed fingers (15b) and lower detection fixed fingers (17b) respectively.
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| CN201420717557.2U CN204255978U (en) | 2014-11-25 | 2014-11-25 | A kind of split type difference silicon micro-resonance type accelerometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104374953A (en) * | 2014-11-25 | 2015-02-25 | 东南大学 | Split type differential silicon micro resonant accelerometer |
| CN107037237A (en) * | 2017-05-12 | 2017-08-11 | 深迪半导体(上海)有限公司 | A kind of three axle capacitive accelerometers and electronic installation |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104374953A (en) * | 2014-11-25 | 2015-02-25 | 东南大学 | Split type differential silicon micro resonant accelerometer |
| CN107037237A (en) * | 2017-05-12 | 2017-08-11 | 深迪半导体(上海)有限公司 | A kind of three axle capacitive accelerometers and electronic installation |
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