CN108195505A - Micro-resonance type differential pressure pickup and pressure differential detection method with three beam tuning forks - Google Patents
Micro-resonance type differential pressure pickup and pressure differential detection method with three beam tuning forks Download PDFInfo
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- CN108195505A CN108195505A CN201711190656.4A CN201711190656A CN108195505A CN 108195505 A CN108195505 A CN 108195505A CN 201711190656 A CN201711190656 A CN 201711190656A CN 108195505 A CN108195505 A CN 108195505A
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- resonance
- pressure
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- driving electrodes
- differential pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
Abstract
The invention discloses a kind of micro-resonance type differential pressure pickups and pressure differential detection method with three beam tuning forks.Substrate, resonance beam are equipped in sensor, by pressure plare, piezoelectric layer, driving electrodes and induction electrode.Using three beam tuning forks as resonant element, resonance beam one end is connected with substrate, and the other end is connected with by pressure face；Piezoelectric layer and driving electrodes are covered in resonance beam, using the inverse piezoelectric effect of piezoelectric material, driving resonance beam is operated in required mode of oscillation, the measure of the change pressure differential of the resonant frequency according to caused by input air pressure；The present invention proposes the novel resonator design with three beam type tuning forks, and novel pressure induction mechanism is proposed based on flexible deformation mode, makes resonator works in particular resonance mode, the advantage that linearly exports high with energy loss sluggishness；The resonant mode differential pressure pickup influenced by acceleration it is small, it is simple in structure, work at room temperature, without Vacuum Package；Suitable for testing gas pressure, it is easy to accomplish batch production.
Description
Technical field
The invention belongs to the sensor fields in MEMS (MEMS) technical field, have three more particularly to one kind
The micro-resonance type differential pressure pickup and pressure differential detection method of beam tuning fork.
Background technology
Modern MEMS (MEMS) technology provides the thinking based on micro-nano-scale design sensor.Miniature biography
The macroscopical sensor of sensor comparison has small size, low cost and the advantage of low-power consumption.And it is integrated with traditional microelectronic circuit
Process compatible can realize that singualtion integrates entire sensor and peripheral signal processing circuit.Pressure sensor is a kind of boat
The widely applied sensor measured to pressure in the fields such as sky, space flight.In many fields especially aerospace field pair
Device quality and the very strict field of volume requirement, MEMS resonator can measure tiny signal, there is higher stability
And develop MEMS pressure sensor and have become certainty.It is bad there are the linearity in existing MEMS pressure sensor, add
The problem of work technology difficulty is big, and sensitivity is not high.Yutaka Tomimatsu of Japan et al. are devised based on piezoelectric effect
MEMS differential pressure pickups【1】, the tiny signal in positive and negative 20Pa can be detected, but the voltage generated based on deformation has unstability
It is and easily affected by environment.Fabian T.Goericke of Univ California-Berkeley et al. devise three beam tuning fork of band
Resonance type accelerometer【2】, preferable sensitivity can be reached but the linearity is undesirable.
Therefore, it is necessary to provide a kind of output high sensitivity, anti-interference, the micro-resonance type differential pressure pickup of linear convergent rate.
Citation：
【1】Tomimatsu Y,Takahashi H,Kobayashi T,et al.AlN cantilever for
differential pressure sensor[C]//Applications of Ferroelectric and Workshop
on the Piezoresponse Force Microscopy.IEEE,2013:336-339.
【2】Goericke F T,Vigevani G,Pisano A P.Bent-beam sensing with triple-
beam tuning forks[J].Applied Physics Letters,2013,102(25):859.
Invention content
The present invention proposes a kind of micro-resonance type differential pressure pickup with three beam tuning forks, sensitive by the novel pressure of proposition
Element makes sensor have high sensitivity, simple in structure, anti-interference and linear convergent rate advantage.By making resonator works
In flexible deformation mode, low-frequency temperature drift coefficient can effectively drop.
The technical solution adopted by the present invention to solve the technical problems is：
Micro-resonance type differential pressure pickup with three beam tuning forks is equipped with substrate, induction electrode, three beam tuning fork resonant elements
With by pressure plare；It offers to accommodate three beam tuning fork resonant elements and the groove by pressure plare in substrate；Three beam tuning fork resonance
Unit includes resonance beam, piezoelectric layer and driving electrodes；The resonance beam includes two side girders, an intermediate beam and two companies
End is connect, three beams are connected in parallel between two connecting pins, are covered with the piezoelectric layer on three beams, the piezoelectricity on every beam
It is covered with independent driving electrodes on layer respectively, the driving electrodes on intermediate beam are opposite with the driving electrodes connection in two side girders
Driving source；One connecting pin of resonance beam is connected with induction electrode, another connecting pin is connected with by pressure plare；Induction electrode
It is fixed in the groove and is equipped with insulating layer between the two；Resonance beam and between by pressure plare and substrate have gap, from
And make three beam tuning fork resonant elements and in the groove formed cantilever beam structure using induction electrode as hold-down support by pressure plare.
Preferably, the driving electrodes on every beam of resonance beam have three sections, three sections of driving electrodes length ratios are 1:
2:1~1:3:1；It is located at the intermediate driving electrodes driving source opposite with the driving electrodes connection positioned at both ends on every beam；In
Between to be located at intermediate driving electrodes on beam opposite with being located at the driving source that intermediate driving electrodes connect in two side girders.
Preferably, the ratio between the intermediate deck-siding and side deck-siding are 1.5:1~2.5:1.
Preferably, the material by pressure plare, induction electrode, resonance beam and substrate is monocrystalline silicon or polysilicon.
Preferably, the material of the piezoelectric layer is aluminium nitride.
Preferably, the driving electrodes material is metallic conductor.
Preferably, the gap thickness is 5um~50um.
Preferably, the induction electrode is made of silicon structural layer and the metal electrode being set in silicon structural layer, lead to
Cross metal electrode extraction wire.
Another object of the present invention is to provide a kind of pressure differential detection method using above-mentioned micro-resonance type differential pressure pickup,
It includes the following steps：
1) driving electrodes connection driving source, excitation resonance beam realizes elastic resonance mode, and passes through induction electrode and export band
There is the AC signal of resonant frequency；
2) pressure-loaded to be detected generates stress and conducts to one end of three beam tuning fork resonant elements, profit on by pressure plare
The interference of vibration is realized to the elastic resonance mode acting of three beam tuning fork resonant elements with the stress, changes the equivalent firm of its vibration
Degree is so as to change three beam tuning fork resonant element resonant frequencies；
3) it is poor according to the resonant frequency before and after loading measuring pressure to be checked, variable quantity and input by resonance beam resonant frequency
Correspondence between amount of differential pressure obtains the pressure difference by pressure plare top and bottom.
It can be seen from the above technical scheme that the beneficial effects of the invention are as follows：
The present invention proposes a kind of micro-resonance type differential pressure pickup with three beam tuning forks, quick by the pressure for proposing novel
Sensing unit makes sensor have high sensitivity, and output is linear, the advantage of linear convergent rate.By making resonator works specific
Flexible deformation mode can effectively reduce the temperature drift coefficient of frequency and be influenced by acceleration small.The structure of device is simple, can
To work under room temperature environment, without Vacuum Package；Monocrystalline silicon or polysilicon may be used in structural material.
Description of the drawings
Fig. 1 is the structure sheaf schematic diagram of the micro-resonance type differential pressure pickup with three beam tuning forks of the present invention；
Fig. 2 is the measuring principle figure of the micro-resonance type differential pressure pickup with three beam tuning forks of the present invention；
Fig. 3 is the sectional view of the micro-resonance type differential pressure pickup with three beam tuning forks of the present invention；
Fig. 4 is the resonant operational mode of the micro-resonance type differential pressure pickup with three beam tuning forks of the present invention；
Fig. 5 is the input air pressure difference and the relational graph of resonant frequency variable quantity that COMSOL is emulated.
In figure：Substrate 1, three beam tuning fork resonant elements 2, by pressure plare 3, induction electrode 4, piezoelectric layer 5, the first driving electrodes
6, the second driving electrodes 7, third driving electrodes 8, the 4th driving electrodes 9, the 5th driving electrodes 10, the 6th driving electrodes 11, absolutely
Edge layer 12, metal electrode 13, resonance beam 14.
Specific embodiment
The present invention is further elaborated and illustrated with reference to the accompanying drawings and detailed description.Each implementation in the present invention
The technical characteristic of mode can carry out the corresponding combination under the premise of not conflicting with each other.
As shown in Figures 1 to 3, a kind of micro-resonance type differential pressure pickup with three beam tuning forks, equipped with substrate 1, induction electrode
4th, three beam tuning fork resonant elements 2 and by pressure plare 3.Three beam tuning fork resonant elements 2 and advance by the substrate 1 where pressure plare 3
It empties to form a groove, three beam tuning fork resonant elements 2 and be placed in the groove by pressure plare 3.Substrate 1, three beam tuning fork resonance
Unit 2 and by the structures such as pressure plare 3 can be used the conductors such as monocrystalline silicon or polysilicon material carry out monolithic etching technics preparation.
Such as Fig. 2, three beam tuning fork resonant elements 2 are made of resonance beam 14, piezoelectric layer 5 and several driving electrodes.Resonance beam
Three beams (including two side girders, an intermediate beam) are shared in 14 and two connecting pins, three beams are connected in parallel to two companies
Between connecing end, it is covered with piezoelectric layer 5 made of piezoelectric material on three beams, independence is covered with respectively on the piezoelectric layer 5 on every beam
Driving electrodes, driving electrodes on the intermediate beam driving source opposite with the driving electrodes connection in two side girders make centre
Vibration of beam direction is opposite with two side girders.One connecting pin of resonance beam 14 is connected with induction electrode 4, another connecting pin
It is connected with by pressure plare 3.Induction electrode 4 is fixed in groove and is spaced between the two by insulating layer 12.Resonance beam 14 and by
Between pressure plare 3 and substrate 1 have air-flow gap, altitude range 5um~50um, so as to make three beam tuning fork resonant elements 2 and by
Pressure plare 3 forms cantilever beam structure for hold-down support with induction electrode 4 in the groove.For the ease of from the induced electricity of silicon substrate
Extraction wire on pole 4 can also set a metal electrode 13 on induction electrode 4.In the present embodiment, resonance beam 14 uses
Single crystal silicon material, intermediate piezoelectric layer 5 use aluminium nitride material, and top excitation electrode is using aluminium as electrode.
Driving electrodes on every beam can be one section or multistage, as long as can make side girders under the action of driving source
Generate the vibration opposite with intermediate beam.As shown in Fig. 2, in one embodiment, the driving electrodes in side girders and intermediate beam
All it is divided into three sections, three sections of driving electrodes length ratios on every beam from left to right are 1:2.5:1.Exist in view of resonance beam 14
During vibration, the deformation direction of end is different, therefore will be on every beam in the present embodiment from the deformation direction of middle section
The driving source opposite with the driving electrodes connection positioned at both ends positioned at intermediate driving electrodes, and keep being located at centre on intermediate beam
Driving electrodes it is opposite with the driving source for being located at intermediate driving electrodes connection in two side girders.In fig. 2, the side of the top
In side bar, first driving electrodes 6 and third driving electrodes 8 at both ends connect opposite excitation with the second intermediate driving electrodes 7
Source, and intermediate beam, the 4th driving electrodes 9 and the 6th driving electrodes 11 are also connected with the 5th intermediate driving electrodes 10 opposite
Driving source, every beam is thus made to reach optimal resonance mode.But it should be noted that the 5th driving electricity on intermediate beam
Pole 10 needs to keep driving source with the second driving electrodes 7 in side girders on the contrary, similarly the 4th driving electrodes 9 and the first driving are electric
Pole 6, the 6th driving electrodes 11 and third driving electrodes 8 are also required to keep driving source opposite.
In the present embodiment, driving source is sinusoidal ac signal, and it is anti-that sinusoidal ac signal is divided into the two-way that phase difference is 180 °
To signal, the driving source opposite as two encourages black electrodes and white electrode in Fig. 2 respectively.Due to 14 both ends of resonance beam
It is fixed on induction electrode 4 and by pressure plare 3, for resonance beam 14 in flexural deformation, middle section is with both ends part by stress phase
Instead, using inverse piezoelectric effect, apply opposite polarity alternating current with both ends to intermediate, resonance beam 14 is activated to as shown in Figure 4
Resonance mode.At this time intermediate beam and the two side bar directions of motion on the contrary, cancel out each other resonance when the out-of-plane power that generates, reduce
Energy loss improves quality factor, working sensor is made more to stablize, so as to reach optimal arousal effect.
The principle of pressure differential detection is in the present invention：Apply air pressure at pressure panels 3, due to compression panel upper and lower part
The different formation of pressure acts on the pressure difference on compression panel, and the equivalent stiffness that pressure difference can change resonant element vibration is made
Resonant frequency into resonant element changes according to certain rules, and resonant frequency variable signal is exported by induction electrode 4.According to above-mentioned
Testing principle, the resonant frequency variation exported from micro-resonance type differential pressure pickup calculate detected pressure difference, realize pressure difference inspection
Brake.
In the present invention, monocrystalline silicon or polysilicon etc. may be used by pressure plare 3, induction electrode 4, resonance beam 14 and substrate 1
Conductor material can be used and is be prepared by the technique of the conductors such as monocrystalline silicon or polysilicon material progress monolithic etching.As utilized
As substrate, the structure sheaf that differential pressure pickup is completed in a wafer is pressurized SOIsilicon on insulator chips
The preparation of power plate 3, induction electrode 4, resonance beam and substrate 1, reduces production cost, and production process is simple.
As shown in figure 5, input pressure difference and resonator resonant frequency variable quantity are obtained by COMSOL finite element simulations
Relationship.Fixed constraint is applied to substrate 1, well-distributed pressure is applied to stress panel 3, piezoelectricity coupling unit is applied to resonant element 2,
Intrinsic frequency curve under different input pressure differences is obtained by model analysis, in good sensitivity and linear convergent rate.
Using the pressure differential detection method of above-mentioned micro-resonance type differential pressure pickup, its step are as follows：
1 driving electrodes connect driving source, and excitation resonance beam 14 realizes elastic resonance mode, and pass through induction electrode 4 and export
AC signal with resonant frequency；
2 pressure-loadeds to be detected generate stress and conduct to one end of three beam tuning fork resonant elements 2, profit on by pressure plare 3
The interference of vibration is realized to the elastic resonance mode acting of three beam tuning fork resonant elements 2 with the stress, changes the equivalent of its vibration
Rigidity is so as to change three beam tuning fork resonant elements, 2 resonant frequency；
3 is poor according to the resonant frequency loaded before and after measuring pressure to be checked, by the variable quantity of 14 resonant frequency of resonance beam with it is defeated
Enter the correspondence (its frequency curve can be obtained by testing in advance) between amount of differential pressure, obtain by 3 top and bottom of pressure plare
Pressure difference.
Embodiment described above is a kind of preferable scheme of the present invention, and so it is not intended to limiting the invention.Have
The those of ordinary skill of technical field is closed, without departing from the spirit and scope of the present invention, various changes can also be made
Change and modification.Therefore the technical solution that all modes for taking equivalent substitution or equivalent transformation are obtained all falls within the guarantor of the present invention
In the range of shield.
Claims (9)
1. a kind of micro-resonance type differential pressure pickup with three beam tuning forks, which is characterized in that equipped with substrate (1), induction electrode
(4), three beam tuning fork resonant elements (2) and by pressure plare (3)；It offers to accommodate three beam tuning fork resonant elements in substrate (1)
(2) and the groove by pressure plare (3)；Three beam tuning fork resonant elements (2) include resonance beam (14), piezoelectric layer (5) and driving electrodes；
The resonance beam (14) includes two side girders, an intermediate beam and two connecting pins, and three beams are connected in parallel to two companies
Between connecing end, it is covered with the piezoelectric layer (5) on three beams, independent drive is covered with respectively on the piezoelectric layer (5) on every beam
Moving electrode, driving electrodes on the intermediate beam driving source opposite with the driving electrodes connection in two side girders；Resonance beam (14)
A connecting pin be connected with induction electrode (4), another connecting pin is connected with by pressure plare (3)；Induction electrode (4) is fixed on
It is equipped in the groove and between the two insulating layer (12)；Resonance beam (14) and have between by pressure plare (3) and substrate (1)
Gap, so as to make three beam tuning fork resonant elements (2) and by pressure plare (3) with induction electrode (4) for hold-down support in the groove
Middle formation cantilever beam structure.
2. the micro-resonance type differential pressure pickup with three beam tuning forks according to claim 1, which is characterized in that resonance beam
(14) the driving electrodes on every beam have three sections, and three sections of driving electrodes length ratios are 1:2:1~1:3:1；On every beam
The driving source opposite with the driving electrodes connection positioned at both ends positioned at intermediate driving electrodes；It is located at intermediate driving on intermediate beam
Electrode is opposite with the driving source for being located at intermediate driving electrodes connection in two side girders.
3. the micro-resonance type differential pressure pickup with three beam tuning forks according to claim 1, which is characterized in that in described
Between the ratio between deck-siding and side deck-siding be 1.5:1~2.5:1.
4. the micro-resonance type differential pressure pickup with three beam tuning forks according to claim 1, which is characterized in that it is described by
Pressure plare (3), induction electrode (4), resonance beam (14) and substrate (1) material be monocrystalline silicon or polysilicon.
5. the micro-resonance type differential pressure pickup with three beam tuning forks according to claim 1, which is characterized in that the pressure
The material of electric layer is aluminium nitride.
6. the micro-resonance type differential pressure pickup with three beam tuning forks according to claim 1, which is characterized in that the drive
Moving electrode material is metallic conductor.
7. the micro-resonance type differential pressure pickup with three beam tuning forks according to claim 1, which is characterized in that the seam
Gap thickness is 5um~50um.
8. the micro-resonance type differential pressure pickup with three beam tuning forks according to claim 1, which is characterized in that the sense
Electrode (4) is answered to be made of silicon structural layer and the metal electrode (13) being set in silicon structural layer, passes through metal electrode extraction wire.
9. a kind of pressure differential detection method using micro-resonance type differential pressure pickup described in claim 1, it is characterised in that including
Following steps：
1) driving electrodes connection driving source, excitation resonance beam (14) realize elastic resonance mode, and pass through induction electrode (4) output
AC signal with resonant frequency；
2) pressure-loaded to be detected generates stress and conducts to one end of three beam tuning fork resonant elements (2) on by pressure plare (3),
The interference of vibration is realized to the elastic resonance mode acting of three beam tuning fork resonant elements (2) using the stress, changes its vibration
Equivalent stiffness is so as to change three beam tuning fork resonant element (2) resonant frequencies；
3) it is poor according to the resonant frequency before and after loading measuring pressure to be checked, variable quantity and input by resonance beam (14) resonant frequency
Correspondence between amount of differential pressure obtains the pressure difference by pressure plare (3) top and bottom.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109786422A (en) * | 2019-01-23 | 2019-05-21 | 西安交通大学 | Piezoelectric exciting is by micro- resonance pressure sensor chip of pull-type silicon and preparation method thereof |
| CN113405946A (en) * | 2021-06-18 | 2021-09-17 | 机械工业仪器仪表综合技术经济研究所 | Micro-electromechanical resonance type viscosity sensor |
| CN115586380A (en) * | 2022-11-03 | 2023-01-10 | 南方电网数字电网研究院有限公司 | Miniature electric field sensor |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5367217A (en) * | 1992-11-18 | 1994-11-22 | Alliedsignal Inc. | Four bar resonating force transducer |
| JPH0996552A (en) * | 1995-09-29 | 1997-04-08 | Omron Corp | Sensor device |
| JPH11211748A (en) * | 1998-01-20 | 1999-08-06 | Matsushita Electric Ind Co Ltd | Machine-electricity conversion element and its manufacture and acceleration sensor |
| US20060170311A1 (en) * | 2003-02-05 | 2006-08-03 | Jones Edward B | Resonant sensor assembly |
| CN201331399Y (en) * | 2008-11-14 | 2009-10-21 | 浙江大学 | Piezoresistive micro cantilever beam sensor based on stress concentration of slots |
| CN105043422A (en) * | 2015-09-08 | 2015-11-11 | 浙江大学 | MEMS resonant charge sensor with high resolution and wide dynamic range and detection method |
| CN205562087U (en) * | 2016-05-03 | 2016-09-07 | 成都皆为科技有限公司 | Quartzy two roof beam tuning fork resonance sensing element of integral type and dynamometry module |
| CN207649822U (en) * | 2017-11-24 | 2018-07-24 | 浙江大学 | Micro-resonance type differential pressure pickup with three beam tuning forks |
-
2017
- 2017-11-24 CN CN201711190656.4A patent/CN108195505A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5367217A (en) * | 1992-11-18 | 1994-11-22 | Alliedsignal Inc. | Four bar resonating force transducer |
| JPH0996552A (en) * | 1995-09-29 | 1997-04-08 | Omron Corp | Sensor device |
| JPH11211748A (en) * | 1998-01-20 | 1999-08-06 | Matsushita Electric Ind Co Ltd | Machine-electricity conversion element and its manufacture and acceleration sensor |
| US20060170311A1 (en) * | 2003-02-05 | 2006-08-03 | Jones Edward B | Resonant sensor assembly |
| CN201331399Y (en) * | 2008-11-14 | 2009-10-21 | 浙江大学 | Piezoresistive micro cantilever beam sensor based on stress concentration of slots |
| CN105043422A (en) * | 2015-09-08 | 2015-11-11 | 浙江大学 | MEMS resonant charge sensor with high resolution and wide dynamic range and detection method |
| CN205562087U (en) * | 2016-05-03 | 2016-09-07 | 成都皆为科技有限公司 | Quartzy two roof beam tuning fork resonance sensing element of integral type and dynamometry module |
| CN207649822U (en) * | 2017-11-24 | 2018-07-24 | 浙江大学 | Micro-resonance type differential pressure pickup with three beam tuning forks |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109786422A (en) * | 2019-01-23 | 2019-05-21 | 西安交通大学 | Piezoelectric exciting is by micro- resonance pressure sensor chip of pull-type silicon and preparation method thereof |
| CN109786422B (en) * | 2019-01-23 | 2020-11-10 | 西安交通大学 | Piezoelectric excitation tension type silicon micro-resonance pressure sensor chip and preparation method thereof |
| CN113405946A (en) * | 2021-06-18 | 2021-09-17 | 机械工业仪器仪表综合技术经济研究所 | Micro-electromechanical resonance type viscosity sensor |
| CN113405946B (en) * | 2021-06-18 | 2022-08-09 | 机械工业仪器仪表综合技术经济研究所 | Micro-electromechanical resonance type viscosity sensor |
| CN115586380A (en) * | 2022-11-03 | 2023-01-10 | 南方电网数字电网研究院有限公司 | Miniature electric field sensor |
| CN115586380B (en) * | 2022-11-03 | 2024-01-23 | 南方电网数字电网研究院有限公司 | Miniature electric field sensor |
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