CN104698222A - Tri-axial monolithic integration resonant capacitance type micro-accelerometer and machining method thereof - Google Patents
Tri-axial monolithic integration resonant capacitance type micro-accelerometer and machining method thereof Download PDFInfo
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- CN104698222A CN104698222A CN201510083131.5A CN201510083131A CN104698222A CN 104698222 A CN104698222 A CN 104698222A CN 201510083131 A CN201510083131 A CN 201510083131A CN 104698222 A CN104698222 A CN 104698222A
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Abstract
The invention discloses a tri-axial monolithic integration resonant capacitance type micro-accelerometer which comprises a glass substrate and a main structure with a bonding anchor point suspended at the central position of the surface of the glass substrate. The main structure comprises a sensitive mass block frame, two torsional pendulum mass blocks installed at the central position of the sensitive mass block frame, capacitor broach groups and four resonators. The two torsional pendulum mass blocks are arranged longitudinally, each torsional pendulum mass block is composed of two mass pendulums which are connected transversely, and the capacitor broach groups are respectively arranged on the left side and the right side of each torsional pendulum mass block. The four resonators are respectively installed on the outer sides of four top corners of the sensitive mass block frame through lever mechanisms. A signal lead connected with an electrode of the main structure is arranged on the glass substrate. The tri-axial monolithic integration resonant capacitance type micro-accelerometer performs differential output when performing acceleration measurement in the X-direction, Y-direction and Z-direction, detection accuracy is improved, the X-axis and the Y-axis are resonant, the Z-axis is capacitive, the tri-axial monolithic integration resonant capacitance type micro-accelerometer is low in cost, a processing method of the micro-accelerometer is simple, and large-scale production can be performed.
Description
Technical field
The present invention relates to micro electronmechanical and inertial sensor field, be specifically related to a kind of three axle single-chip integration resonant capacitance formula silicon micro accerometer and job operations thereof.
Background technology
Micro-mechanical accelerometer is a kind of important micro-inertial navigation sensor, and along with the development of microelectromechanical systems (MEMS), it is little that the silicon micro accerometer utilizing MEMS to manufacture has volume, lightweight, cost is low, and reliability is high, power consumption is little, the advantage such as to can be mass.In inertial navigation field, silicon micromechanical accelerometer research has been subject to the attention of increasing scientific research institutions and colleges and universities now.
The size of capacitance microaccelerator is less, sensitivity and resolution high, stability and temperature linearity degree good.Silicon micro-resonance type accelerometer is a kind of high-precision micro-acceleration gauge, the change of resonance frequency will be converted into by acceleration signals, direct output digit signals, has very high sensitivity and resolution, and has the advantages such as wide dynamic range, antijamming capability are strong, good stability.The micro-acceleration gauge of condenser type and resonant mode, because its intrinsic characteristics and advantages, has become the Main way of research.
2005, the people such as the Hyeon Cheol Kim of Seoul, South Korea national university have devised a kind of three axis accelerometer, and this accelerometer is integrated on same silicon chip by the Z axis Micromachined Accelerometer Based on Resonant Principle of two isoplanar X, Y-axis Micromachined Accelerometer Based on Resonant Principle and vertical plane.Thus volume is comparatively large, and processing technology is complicated, and alignment error is large.
2008, University of Auckland reported the single chip integrated capacitance detecting formula three axis accelerometer of single mass.2010, the Tsing-Hua University in Taiwan reported a kind of single mass three-shaft mems accelerometer adopting array structure.Within 2011, University of Texas reports a kind of three axle capacitor MEMS acceleration meters adopting surface to make on polyimide flex substrate for Machining Technology.The mass of this accelerometer adopts ultraviolet photolithographic technique and nickel electroplating technology to process.Three above-mentioned three axis accelerometers do not realize each detection side to full decoupled, be therefore difficult to reach higher performance.
At present, main or for single shaft micro-acceleration gauge and the also comparative maturity of micro-acceleration gauge research, but the research of three-axis micro accelerometer is less.Existing three axle micro-mechanical accelerometer major parts be by multiple single shaft or twin-axis accelerometer on a single die integrated, their sensitive axes is mutually vertical, thus realizes the acceleration in measurement three directions.This accelerometer, structure is simple, and processing is simple, technology maturation, but overall dimension is comparatively large, and intersecting axle interference is all relatively more serious, also there is larger alignment error and line-hit, affects development and the use of silicon micro accerometer.Along with the development of science and technology and the further demand in market, in order to more fully understand the movable information of object, need the acceleration information simultaneously measuring three directions, the research and development of 3-axis acceleration become inexorable trend.
Summary of the invention
Goal of the invention: the object of the invention is to solve the deficiencies in the prior art, a kind of three axle single-chip integration resonant capacitance formula silicon micro accerometer and job operations thereof are provided.
Technical scheme: a kind of three axle single-chip integration resonant capacitance formula silicon micro accerometers of the present invention, comprises substrate of glass and bonding anchor point and suspends and be arranged at the main structure of glass basic surface center;
Described main structure comprises sensitive-mass block frame, is installed on two torsional pendulum type masses of sensitive-mass block frame center, electric capacity comb group and four resonators;
Described two torsional pendulum type mass longitudinal arrangements are placed, and each torsional pendulum type mass is formed by two quality pendulum lateral connection, and the left and right sides of each torsional pendulum type mass is respectively arranged with electric capacity comb group;
Described four resonators are installed on the outside of sensitive-mass block frame four drift angles respectively by leverage;
Described substrate of glass is provided with the signal lead be connected with main structure electrode.
Wherein, resonator can measure the acceleration in X-axis and Y direction, and electric capacity comb group can measure the acceleration in Z-direction.
Further, described electric capacity comb group comprises the movable electric capacity comb being connected to torsional pendulum type mass and the fixed capacity comb being bonded to substrate of glass by supporting anchor point, described fixed capacity comb is different with the height of movable electric capacity comb and common form variable area formula capacitance detecting, and the substrate of glass below fixed capacity comb is provided with signal lead.
Further, the movable electric capacity comb of described same torsional pendulum type mass both sides is symmetrical about Y-axis, and the movable electric capacity comb of different torsional pendulum type mass both sides is symmetrical about X-axis; The mutual difference of electric capacity of the electric capacity comb group on two torsional pendulum type masses on diagonal line, can improve accuracy of detection; And connected by torsion bar between two quality of same torsional pendulum type mass pendulum, described torsion bar is fixed on substrate of glass by anchor point, and the moment between two quality pendulum with torsion bar is not etc.
Further, described resonator comprises brace summer, is installed on the shoulder at brace summer both ends and comb frame, described brace summer is made up of the resonance beam of two horizontally sets, the upper end of upper resonance beam and the lower end of lower resonance beam are symmetrically arranged with the movable comb laterally placed, and the two ends of movable comb are respectively equipped with and are bonded to extenal fixation comb in substrate of glass and side fixed fingers by supporting anchor point.
Wherein, the spacing between two resonance beam is less, and extenal fixation comb is drive end, and internal fixtion comb is test side.
Further, in described four resonators, two resonator central on same diagonal line are symmetrical and then form Differential Detection, improve accuracy of detection; The shoulder of side is installed on substrate of glass by supporting anchor point bonding, and the shoulder of opposite side is connected to leverage.
Further, described leverage is comprised lever and is arranged at the U-shaped beam in substrate of glass by fixed anchor point;
Lever in described X-direction is longitudinally placed, and one end of the party's lever upwards is connected to the outside of sensitive-mass block frame by beam column, and the other end is connected to the U-shaped beam longitudinally placed, and then the lever in X-direction can move in the X direction;
The lever cross of described Y direction is placed, and one end of the party's lever upwards is connected to the outside of sensitive-mass block frame by beam column, and the other end is connected to the U-shaped beam laterally placed, and then the lever in Y direction can move in the Y direction.
Wherein, because beam column is very narrow, the rigidity along its width and short transverse is little, with under the acting in conjunction of U-shaped beam, can realize three orthogonal directionss from decoupling zero, improve sensitivity and the resolution of acceleration.
Further, described substrate of glass is made up of borosilicate glass, and described main structure is made by single crystal silicon material.
The invention also discloses a kind of job operation of three axle single-chip integration resonant capacitance formula silicon micro accerometers, comprise the following steps:
(1) using first piece of mask plate photoetching on the glass substrate, coming out there being the place of signal lead;
(2) splash-proofing sputtering metal aluminium is as signal lead, then adopts lift-off technology to remove photoresist;
(3) use at the back side of one piece of monocrystalline silicon piece second piece of mask plate to carry out photoetching, and utilize Bosch technique to etch anchor point, then remove photoresist;
(4) utilize the 3rd piece of mask plate to carry out photoetching at the back side of the silicon structural layer etched by step (3), and utilize Bosch technique to etch the groove of certain depth, then remove photoresist;
(5) the anchor point Direct Bonding in the silicon structural layer that will be etched by step (4) and substrate of glass;
(6) in silicon structural layer, utilize the 4th piece of mask plate part shading to carry out photoetching, and adopt Bosch technique etching deep trouth, the degree of depth of deep trouth is identical with the anchor point thickness etched in step (3);
(7) the 5th piece of mask plate is carried out photoetching, and adopt Bosch technique until logical stopping carved completely by the deep trouth in silicon structural layer, releasing structure, finally removes photoresist.
Beneficial effect: compared with prior art, the present invention has the following advantages:
(1) the present invention has all carried out difference output when the acceleration analysis in X, Y, Z tri-directions, improve precision, and X, Y-axis adopt resonant mode, Z axis adopts condenser type, make the advantage (in X, Y-axis) of the direct output digit signals of the existing resonant mode of accelerometer, have again condenser type to detect at Z axis and be easy to benefit;
(2) main structure of the present invention adopts silicon materials to make, and silicon has the advantage well realizing electric property and mechanical property, and by MEMS (MEMS (micro electro mechanical system)) processes, cost is low, and manufacturing process is simple, can produce in enormous quantities; There is not alignment error, ensure that measuring accuracy.
(3) there is not monolithic integrated tri-axial mechanical accelerometer overall dimension comparatively greatly in the present invention, and intersecting axle interference is all relatively more serious, and also there is not larger alignment error and the shortcoming of line-hit, volume is little, easily contained and transport.
Accompanying drawing explanation
Fig. 1 is structure vertical view of the present invention;
Fig. 2 is the structure vertical view of resonator in the present invention;
Fig. 3 is the process flow diagram of job operation in the present invention;
Fig. 4 is measuring principle figure of the present invention.
Embodiment
Below technical solution of the present invention is described in detail, but protection scope of the present invention is not limited to described embodiment.
As depicted in figs. 1 and 2, a kind of three axle single-chip integration resonant capacitance formula silicon micro accerometers of the present invention, comprise substrate of glass 1 and bonding anchor point and suspend and be arranged at the main structure of substrate of glass 1 centre of surface position; Main structure comprises sensitive-mass block frame 2, is installed on two torsional pendulum type masses 3 of sensitive-mass block frame 2 center, electric capacity comb group 4 and four resonators 5; Two torsional pendulum type mass 3 longitudinal arrangements are placed, and each torsional pendulum type mass 3 puts 31 lateral connection formations by two quality, and the left and right sides of each torsional pendulum type mass 3 is respectively arranged with electric capacity comb group 4; Four resonators 5 are installed on the outside of sensitive-mass block frame 2 four drift angles respectively by leverage 6; Substrate of glass 1 is provided with the signal lead be connected with main structure electrode.
Wherein, resonator 5 can measure the acceleration in X-axis and Y direction, and electric capacity comb group 4 can measure the acceleration in Z-direction.
Electric capacity comb group 4 comprises the movable electric capacity comb 41 being connected to torsional pendulum type mass 3 and the fixed capacity comb 42 being bonded to substrate of glass 1 by supporting anchor point, fixed capacity comb 42 is different with the height of movable electric capacity comb 41 and common form variable area formula capacitance detecting, and the substrate of glass 1 below fixed capacity comb 42 is provided with signal lead.
The movable electric capacity comb 41 of same torsional pendulum type mass 3 both sides is symmetrical about Y-axis, and the movable electric capacity comb 41 of different torsional pendulum type mass 3 both sides is symmetrical about X-axis; The mutual difference of electric capacity of the electric capacity comb group 4 on two torsional pendulum type masses 3 on diagonal line, can improve accuracy of detection; And connected by torsion bar 32 between two quality pendulum 31 of same torsional pendulum type mass 3, described torsion bar 32 is fixed on substrate of glass 1 by anchor point.
Resonator 5 comprises brace summer, is installed on the shoulder 52 at brace summer both ends and comb frame 53, brace summer is made up of the resonance beam 51 of two horizontally sets, the upper end of upper resonance beam 51 and the lower end of lower resonance beam 51 are symmetrically arranged with the movable comb 53 laterally placed, and the two ends up and down of movable comb 53 are respectively equipped with and are bonded to extenal fixation comb 55 in substrate of glass 1 and internal fixtion comb 54 by supporting anchor point.
Further, the spacing between two resonance beam 51 is less, and extenal fixation comb 55 is drive end, and internal fixtion comb 54 is test side.
In four resonators 5, two resonator 5 Central Symmetries on same diagonal line and then formation Differential Detection, improve accuracy of detection; The shoulder 52 of side is installed on substrate of glass 1 by supporting anchor point bonding, and the shoulder 52 of opposite side is connected to lever 61, and lever 61 belongs to Integral lever mechanism 6.
Leverage 6 is comprised lever 61 and is arranged at the U-shaped beam 62 in substrate of glass 1 by fixed anchor point; Lever 61 in X-direction is longitudinally placed, and one end of the party's lever 61 upwards is connected to the outside of sensitive-mass block frame 2 by beam column 8, and the other end is connected to the U-shaped beam 62 longitudinally placed, and then the lever 61 in X-direction can move in the X direction; In like manner, the lever 61 of Y direction is laterally placed, and one end of the party's lever 61 upwards is connected to the outside of sensitive-mass block frame 2 by beam column 8, and the other end is connected to the U-shaped beam 62 laterally placed, and then the lever 61 in Y direction can move in the Y direction.Lever 61 is also provided with pole 7.
Wherein, because beam column 8 is very narrow, the rigidity along its width and short transverse is little, with under the acting in conjunction of U-shaped beam 62, can realize three orthogonal directionss from decoupling zero, improve sensitivity and the resolution of acceleration.
Substrate of glass 1 is made up of borosilicate glass, and main structure is made by single crystal silicon material.
As shown in Figure 3, the job operation of above-mentioned three axle single-chip integration resonant capacitance formula silicon micro accerometers, comprises the following steps:
(1) using first piece of mask plate photoetching in substrate of glass 1, coming out there being the place of signal lead;
(2) splash-proofing sputtering metal aluminium is as signal lead, then adopts lift-off technology to remove photoresist;
(3) use at the back side of one piece of monocrystalline silicon piece second piece of mask plate to carry out photoetching, and utilize Bosch technique to etch anchor point, then remove photoresist;
(4) utilize the 3rd piece of mask plate to carry out photoetching at the back side of the silicon structural layer etched by step (3), and utilize Bosch technique to etch the groove of certain depth, then remove photoresist;
(5) the anchor point Direct Bonding in the silicon structural layer that will be etched by step (4) and substrate of glass 1;
(6) in silicon structural layer, utilize the 4th piece of mask plate part shading to carry out photoetching, and adopt Bosch technique etching deep trouth, the degree of depth of deep trouth is identical with the anchor point thickness etched in step (3);
(7) the 5th piece of mask plate is carried out photoetching, and adopt Bosch technique until logical stopping carved completely by the deep trouth in silicon structural layer, releasing structure, finally removes photoresist.
As shown in Figure 4, the principle of work of three axle single-chip integration resonant capacitance formula silicon micro accerometers in the present invention is:
After driving in the outside of the linear resonator 5 of X-direction AC drive voltage fixed electorde applying band direct current biasing, produce alternation driving force, under the effect of alternation driving force, the simple harmonic oscillation that resonance beam 51 will occur along Y-axis in opposite directions, then by the fixed electorde simple harmonic oscillation input of inner side out, and then by this signal feedback to driving voltage, form closed loop self-oscillating control system, the frequency of this closed loop self-oscillating control system will be locked in the natural frequency f of resonance beam 51
0.
When sensitive-mass block frame 2 is subject to there is acceleration effect along X-direction, move in the X-axis direction, sensitive-mass block frame 2 converts inertial force to acceleration, be delivered to lever construction 6 by beam column 8 and then amplify Input Forces, the input force be exaggerated, in resonance beam 51, makes the resonance frequency f of resonance beam 51
xchange.
Because the resonator 5 of two on diagonal line structure is symmetrical, therefore when resonator 5 under tension, resonance frequency f
x+increase, then another is under pressure certainly, resonance frequency f
x-reduce.By detecting the variable quantity of frequency, and by the frequency signal f of these two resonator 5 structures
x+with f
x-difference obtains f
x, and then can obtain need measure along X-direction input acceleration a
xsize.The structural design of this full symmetric can improve constant multiplier, and can eliminate the impact of the common-mode errors such as temperature.
The measuring principle of the present invention to the measuring principle of the acceleration of Y direction and the acceleration of X-direction is identical.By detecting the variable quantity of frequency, and by the frequency signal f of these two resonator 5 structures
y+with f
y-difference obtains f
y, and then can obtain need measure along Y direction input acceleration a
ysize.
Wherein, because U-shaped beam 62 is connected with lever 61 by beam column 8, when Y direction has input acceleration, torsional pendulum type mass 3 can not have an impact to resonator 5 structure of X-direction.Equally, when X-direction has input acceleration, torsional pendulum type mass 3 can not have an impact to resonator 5 structure of Y direction, therefore the integrated resonance of three axles of this full decoupling, analysis on captive silicon micro-accelerometer can isolate the cross coupling effect of three axis well, make measuring-signal more accurate.
When Z-direction has acceleration, two quality pendulum 31 of symmetrical torsional pendulum type mass 3 rotate around the torsion bar 32 be connected between it, two quality pendulum 31 of asymmetrical torsional pendulum type mass 3 rotate around torsion bar 32, thus cause the variable quantity C1+C2 equal and opposite in direction of the variable quantity C3+C4 and second of two of first and third quadrant electric capacity comb, four-quadrant two electric capacity comb groups 4, direction is contrary, be convenient to difference, by the change V of Detection capacitance
zcarry out sense acceleration a
z.
Claims (8)
1. three axle single-chip integration resonant capacitance formula silicon micro accerometers, is characterized in that: comprise substrate of glass and bonding anchor point and suspend and be arranged at the main structure of glass basic surface center;
Described main structure comprises sensitive-mass block frame, is installed on two torsional pendulum type masses of sensitive-mass block frame center, electric capacity comb group and four resonators;
Described two torsional pendulum type mass longitudinal arrangements are placed, and each torsional pendulum type mass is formed by two quality pendulum lateral connection, and the left and right sides of each torsional pendulum type mass is respectively arranged with electric capacity comb group;
Described four resonators are installed on the outside of sensitive-mass block frame four drift angles respectively by leverage;
Described substrate of glass is provided with the signal lead be connected with main structure electrode.
2. three axle single-chip integration resonant capacitance formula silicon micro accerometers according to claim 1, it is characterized in that: described electric capacity comb group comprises the movable electric capacity comb being connected to torsional pendulum type mass and the fixed capacity comb being bonded to substrate of glass by supporting anchor point, described fixed capacity comb is different with the height of movable electric capacity comb and common form variable area formula capacitance detecting, and the substrate of glass below fixed capacity comb is provided with signal lead.
3. three axle single-chip integration resonant capacitance formula silicon micro accerometers according to claim 2 is characterized in that: the movable electric capacity comb of described same torsional pendulum type mass both sides is symmetrical about Y-axis, and the movable electric capacity comb of different torsional pendulum type mass both sides is symmetrical about X-axis; The mutual difference of electric capacity of the electric capacity comb group on two torsional pendulum type masses on diagonal line, and connected by torsion bar between two quality pendulum of same torsional pendulum type mass, described torsion bar is fixed on substrate of glass by anchor point.
4. three axle single-chip integration resonant capacitance formula silicon micro accerometers according to claim 1, it is characterized in that: described resonator comprises brace summer, is installed on the shoulder at brace summer both ends, described brace summer is made up of the resonance beam of two horizontally sets, the upper end of upper resonance beam and the lower end of lower resonance beam are symmetrically arranged with the movable comb laterally placed, and the two ends of movable comb are respectively equipped with and are bonded to extenal fixation comb in substrate of glass and internal fixtion comb by supporting anchor point.
5. three axle single-chip integration resonant capacitance formula silicon micro accerometers according to claim 4, it is characterized in that: in described four resonators, two resonator central on same diagonal line are symmetrical and then form Differential Detection, the shoulder of side is installed on substrate of glass by supporting anchor point bonding, and the shoulder of opposite side is connected to leverage.
6. three axle single-chip integration resonant capacitance formula silicon micro accerometers according to claim 1, is characterized in that: described leverage is comprised lever and is arranged at the U-shaped beam in substrate of glass by fixed anchor point;
Lever in described X-direction is longitudinally placed, and one end of the party's lever upwards is connected to the outside of sensitive-mass block frame by beam column, and the other end is connected to the U-shaped beam longitudinally placed, and then the lever in X-direction can move in the X direction;
The lever cross of described Y direction is placed, and one end of the party's lever upwards is connected to the outside of sensitive-mass block frame by beam column, and the other end is connected to the U-shaped beam laterally placed, and then the lever in Y direction can move in the Y direction.
7. three axle single-chip integration resonant capacitance formula silicon micro accerometers according to claim 1, it is characterized in that: described substrate of glass is made up of borosilicate glass, described main structure is made by single crystal silicon material.
8. the job operation of three axle single-chip integration resonant capacitance formula silicon micro accerometers according to claim 1 ~ 7 any one, is characterized in that: comprise the following steps:
(1) using first piece of mask plate photoetching on the glass substrate, coming out there being the place of signal lead;
(2) splash-proofing sputtering metal aluminium is as signal lead, then removes photoresist;
(3) use at the back side of one piece of monocrystalline silicon piece second piece of mask plate to carry out photoetching, and utilize Bosch technique to etch anchor point, then remove photoresist;
(4) utilize the 3rd piece of mask plate to carry out photoetching at the back side of the silicon structural layer etched by step (3), and utilize Bosch technique to etch the groove of certain depth, then remove photoresist;
(5) the anchor point Direct Bonding in the silicon structural layer that will be etched by step (4) and substrate of glass;
(6) in silicon structural layer, utilize the 4th piece of mask plate part shading to carry out photoetching, and adopt Bosch technique etching deep trouth, the degree of depth of deep trouth is identical with the anchor point thickness etched in step (3);
(7) the 5th piece of mask plate is carried out photoetching, and adopt Bosch technique until logical stopping carved completely by the deep trouth in silicon structural layer, releasing structure, finally removes photoresist.
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