CN110799889B - Optical device - Google Patents

Abstract

The optical device includes: a base having a main surface; a movable part having an optical function part; an elastic support portion that supports the movable portion so that the movable portion can move in a predetermined direction perpendicular to the main surface; a fixed comb-tooth electrode having a plurality of fixed comb-teeth; and a movable comb-tooth electrode having a plurality of movable comb-teeth alternately arranged with the plurality of fixed comb-teeth. At least one of the movable portion and the elastic support portion has an electrode support portion that supports the movable comb-tooth electrode. The electrode support portion has a beam portion formed such that the thickness of the electrode support portion in the predetermined direction is thicker than the thickness of the movable comb teeth in the predetermined direction.

Description

Optical device

Technical Field

The present invention relates to an optical device configured as a Micro Electro Mechanical Systems (MEMS) device, for example.

Background

As a MEMS device, there is known an optical device including: a base; a movable part having an optical function part; and an elastic support portion that is connected between the base and the movable portion and supports the movable portion so that the movable portion can move in the moving direction (see, for example, patent document 1). In such an optical device, there are cases where: the disclosed device is provided with: a movable comb-tooth electrode having a plurality of movable comb-teeth; and a fixed comb-tooth electrode having a plurality of fixed comb-teeth alternately arranged with the plurality of movable comb-teeth.

Documents of the prior art

Patent document

Patent document 1: specification of U.S. patent application publication No. 2008/0284078

Disclosure of Invention

Problems to be solved by the invention

The movable comb-tooth electrode and the fixed comb-tooth electrode described above are used as an electrode for driving, an electrode for monitoring, or an electrode for driving and monitoring. When the movable comb-teeth electrode and the fixed comb-teeth electrode are used as the electrodes for driving, a voltage is applied between the movable comb-teeth electrode and the fixed comb-teeth electrode in order to move the movable portion in the moving direction. When the movable comb-teeth electrode and the fixed comb-teeth electrode are used as the monitoring electrodes, the capacitance between the movable comb-teeth electrode and the fixed comb-teeth electrode is detected in order to determine the position of the movable portion moving in the moving direction.

When the movable comb-tooth electrode and the fixed comb-tooth electrode are used for any application, it is preferable that the movable comb-tooth electrode and the movable part move integrally with each other and the interval between the movable comb-tooth and the fixed comb-tooth adjacent to each other is maintained constant when the movable part moves in the moving direction. However, if only the movable comb-teeth electrodes and the fixed comb-teeth electrodes are provided, the movable comb-teeth electrodes may be strained when the movable section moves in the moving direction, which may reduce the reliability of the apparatus.

An object of an aspect of the present invention is to provide an optical device with high reliability.

Means for solving the problems

An optical device according to an aspect of the present invention includes: a base having a main surface; a movable part having an optical function part; an elastic support portion connected between the base and the movable portion, and supporting the movable portion so that the movable portion can move in a predetermined direction perpendicular to the main surface; a fixed comb electrode provided on the base and having a plurality of fixed combs; and a movable comb-tooth electrode provided on at least one of the movable portion and the elastic support portion, and having a plurality of movable comb-teeth alternately arranged with the plurality of fixed comb-teeth; at least one of the movable portion and the elastic support portion has an electrode support portion that supports the movable comb-teeth electrode, and the electrode support portion has a beam portion formed such that the thickness of the electrode support portion in the predetermined direction is thicker than the thickness of the movable comb-teeth in the predetermined direction.

In this optical device, the beam portion is formed so that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb teeth in the predetermined direction, and the movable comb teeth electrode is supported by the electrode support portion. This can suppress the electrode support portion supporting the movable comb-teeth electrode from being strained when the movable portion moves in the predetermined direction. Therefore, the movable comb-teeth electrode and the movable portion can be moved integrally, and variation in the interval between the movable comb-teeth and the fixed comb-teeth adjacent to each other can be suppressed. As a result, reliability can be improved.

In the optical device according to the aspect of the present invention, the elastic support portion may have a rod from which the electrode support portion extends. In this case, the strain of the movable comb-tooth electrode can be suppressed by the electrode support portion extending from the rod.

In the optical device according to the aspect of the present invention, the movable comb-tooth electrode may be located on the opposite side of the movable portion with respect to the center of the rod in the extending direction of the rod. In this case, even if the movable part moves greatly in the predetermined direction, the movable comb teeth are less likely to be displaced from the region between the adjacent fixed comb teeth. Therefore, when the fixed comb-teeth electrode and the movable comb-teeth electrode are used as the driving electrode, electrostatic force can be generated between the fixed comb-teeth electrode and the movable comb-teeth electrode over the entire movable range of the movable portion. In addition, when the fixed comb-tooth electrode and the movable comb-tooth electrode are used as the monitoring electrodes, the change in the electrostatic capacity between the fixed comb-tooth electrode and the movable comb-tooth electrode can be detected over the entire movable range of the movable portion.

In the optical device according to the aspect of the present invention, the movable comb-tooth electrode may be located on the movable portion side with respect to the center of the rod in the extending direction of the rod. In this case, the distance from the connection position with respect to the base in the elastic support portion to the movable comb-tooth electrode can be ensured. Therefore, when the fixed comb-tooth electrode and the movable comb-tooth electrode are used as the driving electrodes, the electrostatic force generated between the fixed comb-tooth electrode and the movable comb-tooth electrode can be efficiently used as the driving force of the movable portion. In addition, when the fixed comb-teeth electrode and the movable comb-teeth electrode are used as the monitoring electrode, the position of the movable portion can be easily and reliably detected because the change in electrostatic capacity between the fixed comb-teeth electrode and the movable comb-teeth electrode is large.

In the optical device according to the aspect of the present invention, the lever may have a beam portion formed such that a thickness of the lever in the predetermined direction is thicker than a thickness of the movable comb teeth in the predetermined direction. In this case, the variation in the interval between the movable comb teeth and the fixed comb teeth adjacent to each other can be further reliably suppressed, and the reliability can be further improved.

In the optical device according to the aspect of the present invention, the elastic support portion may include a plurality of electrode support portions extending from the rod, and the plurality of electrode support portions may be arranged in a row along the extending direction of the rod. In this case, since the plurality of electrode supporting portions are provided, when the fixed comb-tooth electrode and the movable comb-tooth electrode are used as the electrodes for driving, the driving force can be ensured. In addition, when the fixed comb-teeth electrode and the movable comb-teeth electrode are used as the monitoring electrode, the position of the movable portion can be detected easily and reliably. In this optical device, the strain of the electrode supporting portion supporting the movable comb-tooth electrode is suppressed by increasing the thickness of the electrode supporting portion rather than increasing the width, and therefore, the plurality of electrode supporting portions can be arranged so as to be aligned along the extending direction of the rod.

In the optical device according to the aspect of the present invention, the thickness T1 of the electrode supporting part in the predetermined direction and the thickness T2 of the movable comb teeth in the predetermined direction may satisfy the following expression (1).

T1³×W1/C1³≧N×T2³×W2/C2³…(1)

In the above formula (1), W1: width of the electrode support when viewed from a predetermined direction, C1: length of the electrode support when viewed from a predetermined direction, N: number of movable comb teeth, W2: width of movable comb teeth when viewed from a predetermined direction, C2: the length of the movable comb teeth when viewed from a predetermined direction. In this case, the strain of the movable comb-tooth electrode can be suppressed more reliably.

In the optical device according to the aspect of the present invention, the electrode support portion may be provided in the movable portion so as to be arranged along an outer edge of the movable portion. In this case, the distance from the connection position with respect to the base in the elastic support portion to the movable comb-tooth electrode can be ensured. Therefore, when the fixed comb-teeth electrode and the movable comb-teeth electrode are used as the driving electrodes, the electrostatic force generated between the fixed comb-teeth electrode and the movable comb-teeth electrode can be efficiently used as the driving force of the movable portion. In addition, when the fixed comb-teeth electrode and the movable comb-teeth electrode are used as the monitoring electrode, the position of the movable portion can be easily and reliably detected because the change in electrostatic capacity between the fixed comb-teeth electrode and the movable comb-teeth electrode is large.

In the optical device according to the aspect of the present invention, the movable portion may include: a main body portion provided with an optical function portion; and a frame portion surrounding the main body portion when viewed from a predetermined direction; the electrode support portion is constituted by a frame portion. In this case, the frame portion surrounding the main body portion can suppress variation in the interval between the movable comb teeth and the fixed comb teeth adjacent to each other.

In the optical device according to the aspect of the present invention, the movable portion may include: a central portion provided with an optical function portion; and an outer edge portion thicker than the central portion in a predetermined direction; the electrode support portion is constituted by an outer edge portion. In this case, the outer edge portion having a thickness in the predetermined direction larger than that of the central portion suppresses variation in the interval between the movable comb teeth and the fixed comb teeth adjacent to each other.

In the optical device according to the aspect of the present invention, the elastic support portion may include a pair of rods and a link rod disposed between the pair of rods, and the electrode support portion may be formed of the link rod. In this case, the link rod provided between the pair of rods can suppress the variation in the interval between the movable comb teeth and the fixed comb teeth adjacent to each other.

In the optical device according to the aspect of the present invention, the elastic support portion may include a pair of rods and a link rod disposed between the pair of rods, the electrode support portion may be configured by the pair of rods and the link rod, and the movable comb-teeth electrode may be disposed over the pair of rods and the link rod. In this case, the pair of rods and the link can suppress variation in the interval between the movable comb teeth and the fixed comb teeth adjacent to each other.

In the optical device according to the aspect of the present invention, the elastic support portion may include a rod and an extending portion extending between the rod and the movable portion when viewed from the predetermined direction, and the electrode support portion may be constituted by the extending portion. In this case, the extension portion extending between the rod and the movable portion when viewed from the predetermined direction can suppress variation in the interval between the movable comb teeth and the fixed comb teeth adjacent to each other.

In the optical device according to the aspect of the present invention, the elastic support portion may include: a torsion support portion extending along a 2 nd direction perpendicular to the predetermined direction; and a nonlinear relaxation spring connected between the torsion support portion and the movable portion; the nonlinear relaxing spring is configured such that, in a state where the movable portion moves in the predetermined direction, a deformation amount of the nonlinear relaxing spring around the 2 nd direction is smaller than a deformation amount of the torsion support portion around the 2 nd direction, and a deformation amount of the nonlinear relaxing spring in the 3 rd direction perpendicular to the predetermined direction and the 2 nd direction is larger than a deformation amount of the torsion support portion in the 3 rd direction. In this case, the generation of nonlinearity in the torsional deformation of the torsional support portion can be suppressed. In addition, in the configuration in which the nonlinear relaxing spring is provided, the variation in the interval between the movable comb teeth and the fixed comb teeth adjacent to each other can be suppressed.

ADVANTAGEOUS EFFECTS OF INVENTION

According to an aspect of the present invention, an optical device with high reliability can be provided.

Drawings

Fig. 1 is a longitudinal sectional view of an optical module including an optical device according to an embodiment.

Fig. 2 is a top view of the optical device shown in fig. 1.

Fig. 3 is an enlarged plan view of a part of fig. 2.

Fig. 4 is a sectional view taken along line IV-IV of fig. 2.

Fig. 5 is a sectional view taken along line V-V of fig. 2.

Fig. 6 is a sectional view taken along line VI-VI of fig. 2.

Fig. 7 is a plan view showing an optical device according to modification 1.

Fig. 8 is a plan view showing an optical device according to modification 2.

Fig. 9 is a plan view showing an optical device according to modification 3.

Fig. 10 is a plan view showing an optical device according to modification 4.

Fig. 11 is a plan view showing an optical device according to the 5 th modification.

Detailed Description

Embodiments of one aspect of the present invention will be described below in detail with reference to the drawings. In the following description, the same or corresponding elements are denoted by the same reference numerals, and redundant description thereof will be omitted.

[ Structure of optical Module ]

As shown in fig. 1, the optical module 1 includes a mirror unit 2 and a beam splitter unit 3. The mirror unit 2 includes an optical device 10 and a fixed mirror 21. The optical device 10 includes a movable mirror (movable portion) 11. In the optical module 1, the beam splitter unit 3 constitutes an interference optical system for the measurement light L0 by the movable mirror 11 and the fixed mirror 21. The interference optical system is here a michelson interference optical system.

The optical device 10 includes a base 12, a driving unit 13, a 1 st optical function unit 17, and a 2 nd optical function unit 18, in addition to the movable mirror 11. The base 12 has a main surface 12 a. The movable mirror 11 has a mirror surface (optical function portion) 11a along a plane parallel to the main surface 12 a. The movable mirror 11 is supported on the base 12 so as to be movable in a Z-axis direction (a direction parallel to the Z-axis, a predetermined direction) perpendicular to the main surface 12 a. The driving unit 13 moves the movable mirror 11 in the Z-axis direction. The 1 st optical function portion 17 is disposed on one side of the movable mirror 11 in the X-axis direction (direction parallel to the X-axis, 3 rd direction) perpendicular to the Z-axis direction when viewed from the Z-axis direction. The 2 nd optical function portion 18 is disposed on the other side of the movable mirror 11 in the X axis direction when viewed from the Z axis direction. The 1 st optical function portion 17 and the 2 nd optical function portion 18 are light passing openings provided in the base 12, and are opened on one side and the other side in the Z-axis direction, respectively. In the optical module 1, the 2 nd optical function portion 18 does not function as a light passage opening portion. When the optical device 10 is applied to another device, at least one of the 1 st optical functional unit 17 and the 2 nd optical functional unit 18 may be used as the optical functional unit, and both of the 1 st optical functional unit 17 and the 2 nd optical functional unit 18 may not be used as the optical functional unit.

The fixed mirror 21 has a mirror surface 21a extending along a plane parallel to the main surface 12a (a plane perpendicular to the Z-axis direction). The position of the fixed mirror 21 is fixed with respect to the base 12. In the mirror unit 2, the mirror surface 11a of the movable mirror 11 and the mirror surface 21a of the fixed mirror 21 face one side in the Z-axis direction (the spectroscope unit 3 side).

The mirror unit 2 includes a support 22, a submount 23, and a package 24 in addition to the optical device 10 and the fixed mirror 21. The package 24 houses the optical device 10, the fixed mirror 21, the support 22, and the submount 23. The package 24 includes a bottom wall 241, a sidewall 242 and a top wall 243. The package 24 is formed in a rectangular parallelepiped box shape, for example. The package 24 has a size of about 30 × 25 × 10 (thickness) mm, for example. The bottom wall 241 and the side wall 242 are integrally formed with each other. The top wall 243 is opposite to the bottom wall 241 in the Z-axis direction and is fixed to the side wall 242. The top wall 243 is light transmissive to the measurement light L0. In the mirror unit 2, a space S is formed by the package 24. The space S is open to the outside of the mirror unit 2 through, for example, a vent hole or a gap provided in the package 24. In the case where the space S is not an airtight space, it is possible to suppress contamination or stain of the mirror surface 11a or the like due to outgas from a resin material present in the package 24 or moisture present in the package 24. The space S may be an airtight space in which a high degree of vacuum is maintained or an airtight space in which an inert gas such as nitrogen is filled.

A support 22 is fixed to the inner surface of the bottom wall 241 via a sub-base 23. The support body 22 is formed in a rectangular plate shape, for example. The support 22 has light transmittance for the measurement light L0. The susceptor 12 of the optical device 10 is fixed to a surface 22a of the support 22 opposite to the susceptor 23. That is, the susceptor 12 is supported by the support 22. A recess 22b is formed in the surface 22a of the support 22, and a gap (a part of the space S) is formed between the optical device 10 and the top wall 243. This prevents the movable mirror 11 and the driving unit 13 from contacting the support 22 and the ceiling wall 243 when the movable mirror 11 moves in the Z-axis direction.

An opening 23a is formed in the submount 23. The fixed mirror 21 is disposed on the surface 22c of the support 22 on the submount 23 side so as to be positioned in the opening 23 a. That is, the fixed mirror 21 is disposed on a surface 22c of the support 22 opposite to the base 12. The fixed mirror 21 is disposed on one side of the movable mirror 11 in the X-axis direction when viewed from the Z-axis direction. When viewed from the Z-axis direction, the fixed mirror 21 overlaps the 1 st optical function portion 17 of the optical device 10.

The mirror unit 2 further has a plurality of lead pins 25 and a plurality of wires 26. Each lead pin 25 is fixed to the bottom wall 241 in a state of penetrating the bottom wall 241. Each lead pin 25 is electrically connected to the driving portion 13 via a wire 26. In the mirror unit 2, an electrical signal for moving the movable mirror 11 in the Z-axis direction is applied to the driving section 13 via the plurality of lead pins 25 and the plurality of lead wires 26.

The spectroscopic unit 3 is supported by the top wall 243 of the package 24. Specifically, the spectroscope unit 3 is fixed to the surface 243a of the top wall 243 on the side opposite to the optical device 10 by the optical resin 4. The optical resin 4 has optical transparency to the measurement light L0.

The beam splitter unit 3 has a half mirror surface 31, a total reflection mirror surface 32, and a plurality of optical surfaces 33a, 33b, 33c, 33 d. The spectroscope unit 3 is constituted by joining a plurality of optical blocks. The half mirror surface 31 is formed by, for example, a dielectric multilayer film. The total reflection mirror 32 is formed by a metal film, for example.

The optical surface 33a is, for example, a surface perpendicular to the Z-axis direction, and overlaps the 1 st optical function unit 17 of the optical device 10 and the mirror surface 21a of the fixed mirror 21 when viewed from the Z-axis direction. The optical surface 33a transmits the measurement light L0 incident along the Z-axis direction.

The half mirror surface 31 is, for example, a surface inclined at 45 degrees to the optical surface 33a, and overlaps the 1 st optical function portion 17 of the optical device 10 and the mirror surface 21a of the fixed mirror 21 when viewed from the Z-axis direction. The half mirror surface 31 reflects a part of the measurement light L0 incident on the optical surface 33a in the Z-axis direction in the X-axis direction and transmits the remaining part of the measurement light L0 to the fixed mirror 21 side in the Z-axis direction.

The total reflection mirror surface 32 is a surface parallel to the half mirror surface 31, and overlaps the mirror surface 11a of the movable mirror 11 when viewed from the Z-axis direction and overlaps the half mirror surface 31 when viewed from the X-axis direction. The total reflection mirror surface 32 reflects a part of the measurement light L0 reflected by the half mirror surface 31 to the movable mirror 11 side along the Z-axis direction.

The optical surface 33b is a surface parallel to the optical surface 33a, and overlaps the mirror surface 11a of the movable mirror 11 when viewed from the Z-axis direction. The optical surface 33b transmits a part of the measurement light L0 reflected by the total reflection mirror surface 32 to the movable mirror 11 side along the Z-axis direction.

The optical surface 33c is a surface parallel to the optical surface 33a, and overlaps the mirror surface 21a of the fixed mirror 21 when viewed from the Z-axis direction. The optical surface 33c transmits the remaining part of the measurement light L0 transmitted through the half mirror surface 31 to the fixed mirror 21 side along the Z-axis direction.

The optical surface 33d is, for example, a surface perpendicular to the X-axis direction, and overlaps the half mirror surface 31 and the total reflection mirror surface 32 when viewed from the X-axis direction. The optical surface 33d transmits the measurement light L1 in the X-axis direction. The measurement light L1 is interference light of a part of the measurement light L0 that is reflected by the mirror surface 11a of the movable mirror 11 and the total reflection mirror surface 32 in this order and then passes through the half mirror surface 31 and the remaining part of the measurement light L0 that is reflected by the mirror surface 21a of the fixed mirror 21 and the half mirror surface 31 in this order.

In the optical module 1 configured as described above, when the measurement light L0 enters the beam splitter unit 3 from the outside of the optical module 1 through the optical surface 33a, a part of the measurement light L0 is sequentially reflected by the half mirror surface 31 and the total mirror surface 32, and advances toward the mirror surface 11a of the movable mirror 11. Then, part of the measurement light L0 is reflected by the mirror surface 11a of the movable mirror 11, travels in the opposite direction on the same optical path (optical path P1 described below), and passes through the half mirror surface 31 of the beam splitter unit 3.

On the other hand, the remaining part of the measurement light L0 passes through the half mirror surface 31 of the beam splitter unit 3, passes through the 1 st optical function unit 17, passes through the support 22, and advances toward the mirror surface 21a of the fixed mirror 21. The remaining part of the measurement light L0 is reflected by the mirror surface 21a of the fixed mirror 21, travels in the opposite direction on the same optical path (optical path P2 described below), and is reflected by the half mirror surface 31 of the beam splitter unit 3.

A part of the measurement light L0 transmitted through the half mirror surface 31 of the beam splitter unit 3 and the remaining part of the measurement light L0 reflected by the half mirror surface 31 of the beam splitter unit 3 become interference light, i.e., measurement light L1, and the measurement light L1 is emitted from the beam splitter unit 3 to the outside of the optical module 1 via the optical surface 33 d. According to the optical module 1, since the movable mirror 11 can be reciprocated at a high speed in the Z-axis direction, a small-sized and high-precision FTIR (fourier transform infrared spectrometer) can be provided.

The support body 22 corrects an optical path difference between an optical path P1 between the beam splitter unit 3 and the movable mirror 11 and an optical path P2 between the beam splitter unit 3 and the fixed mirror 21. Specifically, the optical path P1 is an optical path from the half mirror surface 31 to the mirror surface 11a of the movable mirror 11 located at the reference position via the total reflection mirror surface 32 and the optical surface 33b in this order, and is an optical path through which a part of the measurement light L0 travels. The optical path P2 is an optical path from the half mirror surface 31 to the mirror surface 21a of the fixed mirror 21 through the optical surface 33c and the 1 st optical function unit 17 in this order, and is an optical path in which the remaining part of the measurement light L0 advances. The support 22 corrects the optical path difference between the optical path P1 and the optical path P2 so that the difference between the optical path length of the optical path P1 (the optical path length in consideration of the refractive index of each medium through which the optical path P1 passes) and the optical path length of the optical path P2 (the optical path length in consideration of the refractive index of each medium through which the optical path P2 passes) becomes small (e.g., disappears). The support 22 may be formed of the same light-transmitting material as that of each optical block constituting the spectroscopic unit 3, for example. In this case, the thickness (length in the Z-axis direction) of the support 22 may be the same as the distance between the half mirror surface 31 and the total mirror surface 32 in the X-axis direction.

[ Structure of optical device ]

As shown in fig. 2 to 6, the movable mirror 11, the base 12, the driving unit 13, the 1 st optical function unit 17, and the 2 nd optical function unit 18, which are portions other than the mirror surface 11a, are formed by an SOI (Silicon On Insulator) substrate 50. That is, the optical device 10 is configured by the SOI substrate 50. The optical device 10 is formed in a rectangular plate shape, for example. The optical device 10 has a size of about 15 × 10 × 0.3 (thickness) mm, for example. The SOI substrate 50 includes a support layer 51, a device layer 52, and an intermediate layer 53. The support layer 51 is a 1 st silicon layer. The device layer 52 is a 2 nd silicon layer. The intermediate layer 53 is an insulating layer disposed between the support layer 51 and the device layer 52.

The base 12 is formed by a part of the support layer 51, the device layer 52, and the intermediate layer 53. The main surface 12a of the susceptor 12 is the surface of the device layer 52 opposite to the intermediate layer 53. The main surface 12b of the susceptor 12 opposite to the main surface 12a is a surface of the support layer 51 opposite to the intermediate layer 53. In the optical module 1, the main surface 12a of the base 12 and the surface 22a of the support 22 are bonded to each other (see fig. 1).

The movable mirror 11 is disposed with an intersection of the axis R1 and the axis R2 as a center position (center of gravity position). The axis R1 is a straight line extending in the X-axis direction. The axis R2 is a straight line extending in the Y-axis direction (direction parallel to the Y-axis, direction 2) perpendicular to the X-axis direction and the Z-axis direction. The optical device 10 has a shape that is line-symmetric with respect to the axis R1 and line-symmetric with respect to the axis R2 when viewed from the Z-axis direction.

The movable mirror 11 includes a main body 111, a frame 112 (electrode support portion), and a pair of connection portions 113. The body 111 has a circular shape when viewed from the Z-axis direction. The body 111 has a central portion 114 and an outer edge portion 115. On the surface of the central portion 114 on the main surface 12b side, for example, a metal film is formed, thereby providing a circular mirror surface 11 a. The central portion 114 is formed by a portion of the device layer 52. The outer edge portion 115 surrounds the central portion 114 when viewed from the Z-axis direction. The outer edge portion 115 includes a 1 st body portion 115a and a 1 st beam portion 115 b. The 1 st main body portion 115a is formed by a part of the device layer 52.

The 1 st beam portion 115b is formed by the support layer 51 and a part of the intermediate layer 53. The 1 st beam portion 115b is provided on the surface of the 1 st main body portion 115a on the main surface 12b side. The 1 st beam portion 115b is formed such that the thickness of the outer edge portion 115 in the Z-axis direction is thicker than the thickness of the central portion 114 in the Z-axis direction. The 1 st beam portion 115b has an annular shape when viewed from the Z-axis direction, and surrounds the mirror surface 11 a. The 1 st beam portion 115b extends along the outer edge of the main body 111 when viewed from the Z-axis direction. In the present embodiment, the outer edge of the 1 st beam portion 115b extends along the outer edge of the main body portion 111 with a predetermined distance from the outer edge of the main body portion 111 when viewed from the Z-axis direction. The inner edge of the 1 st beam portion 115b extends along the outer edge of the mirror surface 11a at a predetermined interval from the outer edge of the mirror surface 11a when viewed from the Z-axis direction.

The frame portion 112 surrounds the main body portion 111 with a predetermined space from the main body portion 111 when viewed from the Z-axis direction. The frame 112 has an annular shape when viewed from the Z-axis direction. The frame portion 112 is disposed along the outer edge of the movable mirror 11 (so as to constitute the outer edge of the movable mirror 11). The frame 112 has a 2 nd main body portion 112a and a 2 nd beam portion 112 b. The 2 nd main body portion 112a is formed by a part of the device layer 52.

The 2 nd beam portion 112b is formed by the support layer 51 and a part of the intermediate layer 53. The 2 nd beam portion 112b is provided on the surface of the 2 nd main body portion 112a on the main surface 12b side. The 2 nd beam portion 112b is formed such that the thickness of the frame portion 112 in the Z-axis direction is thicker than the thickness of the central portion 114 in the Z-axis direction. The 2 nd beam portion 112b has an annular shape when viewed from the Z-axis direction. The outer edge of the 2 nd beam portion 112b extends along the outer edge of the frame portion 112 with a predetermined space from the outer edge of the frame portion 112 when viewed from the Z-axis direction. The inner edge of the 2 nd beam portion 112b extends along the inner edge of the frame portion 112 with a predetermined gap from the inner edge of the frame portion 112 when viewed from the Z-axis direction.

The thickness of the 2 nd beam portion 112b in the Z-axis direction is equal to the thickness of the 1 st beam portion 115b in the Z-axis direction. The width of the 2 nd beam portion 112b is wider than the width of the 1 st beam portion 115b when viewed from the Z-axis direction. The width of the 1 st beam portion 115b when viewed from the Z-axis direction is the length of the 1 st beam portion 115b in the direction perpendicular to the extending direction of the 1 st beam portion 115b, and in the present embodiment, is the length of the 1 st beam portion 115b in the radial direction of the 1 st beam portion 115 b. This aspect is also the same for the width of the 2 nd beam portion 112b when viewed from the Z-axis direction.

The pair of coupling portions 113 couple the main body portion 111 and the frame portion 112 to each other. The pair of coupling portions 113 are disposed on one side and the other side in the Y axis direction with respect to the body portion 111. Each connecting portion 113 includes a 3 rd body portion 113a and a 3 rd beam portion 113 b. The 3 rd body portion 113a is formed by a part of the device layer 52. The 3 rd body portion 113a is connected to the 1 st body portion 115a and the 2 nd body portion 112 a.

The 3 rd beam portion 113b is formed by the support layer 51 and a part of the intermediate layer 53. The 3 rd beam portion 113b is connected to the 1 st beam portion 115b and the 2 nd beam portion 112 b. The 3 rd beam portion 113b is provided on the surface of the 3 rd main body portion 113a on the main surface 12b side. The 3 rd beam portion 113b is formed such that the thickness of the connection portion 113 in the Z-axis direction is greater than the thickness of the central portion 114 in the Z-axis direction. The thickness of the 3 rd beam portion 113b in the Z-axis direction is equal to the thickness of each of the 1 st and 2 nd beam portions 115b and 112b in the Z-axis direction. The width of the 3 rd beam portion 113b is greater than the respective widths of the 1 st and 2 nd beam portions 115b and 112 b. The width of the 3 rd beam portion 113b refers to the length of the 3 rd beam portion 113b along the extending direction of the 1 st beam portion 115 b.

The movable mirror 11 also has a pair of brackets 116 and a pair of brackets 117. Each of the supports 116 and 117 is formed by a part of the device layer 52. Each of the holders 116 extends in the Y-axis direction, and has a rectangular shape when viewed from the Z-axis direction. One of the brackets 116 protrudes from the side surface of the frame 112 toward one side in the Y-axis direction, and the other bracket 116 protrudes from the side surface of the frame 112 toward the other side in the Y-axis direction. The pair of brackets 116 are disposed on the same center line parallel to the Y-axis direction. Each of the brackets 116 is disposed on the 1 st optical function portion 17 side with respect to the center of the main body portion 111.

Each of the holders 117 extends in the Y-axis direction, and has a rectangular shape when viewed from the Z-axis direction. One bracket 117 protrudes from the side surface of the frame portion 112 toward one side in the Y-axis direction, and the other bracket 117 protrudes from the side surface of the frame portion 112 toward the other side in the Y-axis direction. The pair of holders 117 are disposed on the same center line parallel to the Y-axis direction. Each of the holders 117 is disposed on the 2 nd optical function portion 18 side with respect to the center of the main body portion 111.

The driving unit 13 includes a 1 st elastic support portion 14, a 2 nd elastic support portion 15, and an actuator portion 16. In the 1 st elastic support portion 14, the 2 nd elastic support portion 15, and the actuator portion 16, portions other than the following 4 th beam portion 141e, 5 th beam portion 147b, 6 th beam portion 151e, and 7 th beam portion 157b are formed by a part of the device layer 52.

The 1 st elastic support portion 14 and the 2 nd elastic support portion 15 are connected between the base 12 and the movable mirror 11, respectively. The 1 st elastic support portion 14 and the 2 nd elastic support portion 15 support the movable mirror 11 so that the movable mirror 11 can move in the Z-axis direction.

The 1 st elastic support portion 14 has a pair of rods 141, a link 142, a link 143, a pair of 1 st torsion bars (torsion support portions) 145, a pair of 2 nd torsion bars (torsion support portions) 146, and a pair of electrode support portions 147. The pair of levers 141 are disposed on both sides of the 1 st optical function portion 17 in the Y-axis direction. Each rod 141 has a plate shape extending along a plane perpendicular to the Z-axis direction. In the present embodiment, each rod 141 extends in the X-axis direction.

The link 142 is bridged between the ends 141a of the pair of levers 141 on the movable mirror 11 side. The link 142 has a plate shape extending along a plane perpendicular to the Z-axis direction. Both end portions of the link 142 extend in the Y-axis direction. The intermediate portion of the link 142 extends along the frame portion 112 and is curved in a convex shape toward the side opposite to the movable mirror 11. The link 143 is bridged between the end portions 141b of the pair of levers 141 on the opposite side to the movable mirror 11. The link 143 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the Y-axis direction. In the present embodiment, the 1 st optical function portion 17 is an opening defined by the pair of levers 141, the link 142, and the link 143. The 1 st optical functional portion 17 has a rectangular shape when viewed from the Z-axis direction. The 1 st optical function portion 17 is, for example, a cavity. Alternatively, a material having translucency to the measurement light L0 may be disposed in the opening portion constituting the 1 st optical functional portion 17.

The pair of 1 st torsion bars 145 are respectively bridged between the front end portion and the one end portion 141a of the one bracket 116 and between the front end portion and the other end portion 141a of the other bracket 116. That is, the pair of 1 st torsion bars 145 are connected between the pair of rods 141 and the movable mirror 11, respectively. Each 1 st torsion bar 145 extends in the Y-axis direction. The pair of 1 st torsion bars 145 are disposed on the same center line parallel to the Y-axis direction.

The pair of 2 nd torsion bars 146 are respectively bridged between the base 12 and the end 141b of one rod 141 on the side opposite to the movable mirror 11, and between the base 12 and the end 141b of the other rod 141 on the side opposite to the movable mirror 11. That is, the pair of 2 nd torsion bars 146 are connected between the pair of rods 141 and the base 12, respectively. Each 2 nd torsion bar 146 extends in the Y-axis direction. The pair of 2 nd torsion bars 146 are disposed on the same center line parallel to the Y-axis direction. A projection 141c projecting outward in the Y-axis direction is provided at an end 141b of each rod 141, and the 2 nd torsion bar 146 is connected to the projection 141 c.

Each electrode support portion 147 extends in the Y-axis direction, and has a rectangular shape when viewed from the Z-axis direction. The one electrode supporting portion 147 extends from the middle portion of the one rod 141 toward the side opposite to the 1 st optical function portion 17. The other electrode supporting portion 147 protrudes from the middle portion of the other rod 141 toward the side opposite to the 1 st optical function portion 17. The pair of electrode supporting portions 147 is arranged on the same center line parallel to the Y-axis direction when viewed from the Z-axis direction.

The 2 nd elastic support portion 15 has a pair of rods 151, a link 152, a link 153, a pair of 1 st torsion bars (torsion support portions) 155, a pair of 2 nd torsion bars (torsion support portions) 156, and a pair of electrode support portions 157. The pair of rods 151 are disposed on both sides of the 2 nd optical function portion 18 in the Y-axis direction. Each rod 151 has a plate shape extending along a plane perpendicular to the Z-axis direction. In the present embodiment, each rod 151 extends along the X-axis direction.

The link 152 is bridged between the ends 151a of the pair of levers 151 on the movable mirror 11 side. The link 152 has a plate shape extending along a plane perpendicular to the Z-axis direction. Both end portions of the link 152 extend in the Y-axis direction. The intermediate portion of the link 152 extends along the frame portion 112 and is curved in a convex shape toward the side opposite to the movable mirror 11. The link 153 is bridged between the end portions 151b of the pair of levers 151 on the opposite side to the movable mirror 11. The link 153 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the Y-axis direction. In the present embodiment, the 2 nd optical function portion 18 is an opening defined by the pair of levers 151, the link 152, and the link 153. The 2 nd optical functional portion 18 has a rectangular shape when viewed from the Z-axis direction. The 2 nd optical function portion 18 is, for example, a cavity. Alternatively, a material having translucency to the measurement light L0 may be disposed in the opening portion constituting the 2 nd optical functional portion 18.

The pair of 1 st torsion bars 155 are respectively bridged between the front end portion of one bracket 117 and one end portion 151a, and between the front end portion of the other bracket 117 and the other end portion 151 a. That is, the pair of 1 st torsion bars 155 are connected between the pair of rods 151 and the movable mirror 11, respectively. Each 1 st torsion bar 155 extends in the Y-axis direction. The pair of 1 st torsion bars 155 are disposed on the same center line parallel to the Y-axis direction.

The pair of 2 nd torsion bars 156 are respectively bridged between the base 12 and an end 151b of one of the rods 151 on the side opposite to the movable mirror 11, and between the base 12 and an end 151b of the other rod 151 on the side opposite to the movable mirror 11. That is, the pair of 2 nd torsion bars 156 are connected between the pair of rods 151 and the base 12, respectively. Each 2 nd torsion bar 156 extends in the Y-axis direction. The pair of 2 nd torsion bars 156 are disposed on the same center line parallel to the Y-axis direction. A projecting portion 151c projecting outward in the Y-axis direction is provided at an end portion 151b of each rod 151, and the 2 nd torsion bar 156 is connected to the projecting portion 151 c.

Each electrode support portion 157 extends in the Y-axis direction, and has a rectangular shape when viewed from the Z-axis direction. One electrode supporting portion 157 extends from the middle portion of one rod 151 toward the opposite side to the 2 nd optical function portion 18. The other electrode supporting portion 157 protrudes from the middle portion of the other rod 151 to the side opposite to the 2 nd optical function portion 18. The pair of electrode supporting portions 157 are disposed on the same center line parallel to the Y-axis direction when viewed from the Z-axis direction.

The actuator portion 16 moves the movable mirror 11 in the Z-axis direction. The actuator unit 16 includes a pair of 1 st fixed comb-teeth electrodes 161, a pair of 1 st movable comb-teeth electrodes 162, a pair of 1 st fixed comb-teeth electrodes 163, a pair of 1 st movable comb-teeth electrodes 164, a pair of 2 nd fixed comb-teeth electrodes 165, and a pair of 2 nd movable comb-teeth electrodes 166. The 1 st fixed comb- tooth electrodes 161 and 163 and the 2 nd fixed comb-tooth electrode 165 are fixed in position. The 1 st movable comb- tooth electrodes 162 and 164 and the 2 nd movable comb-tooth electrode 166 move in accordance with the movement of the movable mirror 11.

One 1 st fixed comb-tooth electrode 161 is provided on the surface opposite to one electrode support 147 in the device layer 52 of the base 12. The other 1 st fixed comb-tooth electrode 161 is provided on the surface of the device layer 52 opposite to the other electrode support portion 147. Each 1 st fixed comb-tooth electrode 161 has a plurality of 1 st fixed comb-teeth 161a extending along a plane perpendicular to the Y-axis direction. These 1 st fixed comb teeth 161a are arranged at predetermined intervals in the Y axis direction.

One 1 st movable comb-tooth electrode 162 is provided on the surface of the other side (electrode support portion 157 side) in the X-axis direction in one electrode support portion 147. The other 1 st movable comb-tooth electrode 162 is provided on the surface on the other side in the X-axis direction in the other electrode support portion 147. That is, the pair of 1 st movable comb-tooth electrodes 162 are supported by the pair of electrode supporting portions 147, respectively. Each of the 1 st movable comb-tooth electrodes 162 has a plurality of 1 st movable comb-teeth 162a extending along a plane perpendicular to the Y-axis direction. These 1 st movable comb teeth 162a are arranged at predetermined intervals in the Y axis direction.

In the one 1 st fixed comb-tooth electrode 161 and the one 1 st movable comb-tooth electrode 162, the plurality of 1 st fixed comb-teeth 161a and the plurality of 1 st movable comb-teeth 162a are alternately arranged. That is, the 1 st fixed comb-tooth 161a of one 1 st fixed comb-tooth electrode 161 is positioned between the 1 st movable comb-tooth 162a of one 1 st movable comb-tooth electrode 162. In the other 1 st fixed comb-tooth electrode 161 and the other 1 st movable comb-tooth electrode 162, the plurality of 1 st fixed comb-teeth 161a and the plurality of 1 st movable comb-teeth 162a are alternately arranged. That is, the 1 st fixed comb-tooth 161a of the other 1 st fixed comb-tooth electrode 161 is positioned between the 1 st movable comb-tooth 162a of the other 1 st movable comb-tooth electrode 162. In the pair of 1 st fixed comb-tooth electrodes 161 and the pair of 1 st movable comb-tooth electrodes 162, the 1 st fixed comb-tooth 161a and the 1 st movable comb-tooth 162a adjacent to each other face each other in the Y axis direction. The distance between the 1 st fixed comb tooth 161a and the 1 st movable comb tooth 162a adjacent to each other is, for example, about several μm.

One 1 st fixed comb-tooth electrode 163 is provided on the surface opposite to one electrode support portion 157 in the device layer 52 of the susceptor 12. Another 1 st fixed comb-tooth electrode 163 is provided on the surface of the device layer 52 opposite to the other electrode support 157. Each of the 1 st fixed comb-tooth electrodes 163 has a plurality of 1 st fixed comb-teeth 163a extending along a plane perpendicular to the Y-axis direction. These 1 st fixed comb teeth 163a are arranged at predetermined intervals in the Y axis direction.

One 1 st movable comb-tooth electrode 164 is provided on the surface of one side (electrode support portion 147 side) in the X-axis direction in one electrode support portion 157. The other 1 st movable comb-tooth electrode 164 is provided on the surface on one side in the X-axis direction in the other electrode support portion 157. That is, the pair of 1 st movable comb-tooth electrodes 164 are supported by the pair of electrode supporting portions 157, respectively. Each of the 1 st movable comb-tooth electrodes 164 has a plurality of 1 st movable comb-teeth 164a extending along a plane perpendicular to the Y-axis direction. These 1 st movable comb teeth 164a are arranged at predetermined intervals in the Y axis direction.

In the one 1 st fixed comb-tooth electrode 163 and the one 1 st movable comb-tooth electrode 164, the plurality of 1 st fixed comb-teeth 163a and the plurality of 1 st movable comb-teeth 164a are alternately arranged. That is, the 1 st fixed comb tooth 163a of the one 1 st fixed comb tooth electrode 163 is positioned between the 1 st movable comb teeth 164a of the one 1 st movable comb tooth electrode 164. In the other 1 st fixed comb-tooth electrode 163 and the other 1 st movable comb-tooth electrode 164, the plurality of 1 st fixed comb-teeth 163a and the plurality of 1 st movable comb-teeth 164a are alternately arranged. That is, the 1 st fixed comb teeth 163a of the other 1 st fixed comb-tooth electrode 163 are positioned between the 1 st movable comb teeth 164a of the other 1 st movable comb-tooth electrode 164. In the pair of 1 st fixed comb-tooth electrodes 163 and the pair of 1 st movable comb-tooth electrodes 164, the adjacent 1 st fixed comb-tooth 163a and 1 st movable comb-tooth 164a face each other in the Y axis direction. The distance between the 1 st fixed comb tooth 163a and the 1 st movable comb tooth 164a adjacent to each other is, for example, about several μm.

The pair of 2 nd fixed comb-tooth electrodes 165 are arranged along the outer edge of the movable mirror 11. The pair of 2 nd fixed comb electrodes 165 are provided on the surface of the device layer 52 of the base 12, which faces the outer surface of the frame 112 in the Y axis direction. Each of the 2 nd fixed comb electrodes 165 has a plurality of 2 nd fixed comb teeth 165a extending along a plane perpendicular to the X-axis direction. These 2 nd fixed comb teeth 165a are arranged at predetermined intervals in the X axis direction.

The pair of 2 nd movable comb electrodes 166 are arranged along the outer edge of the movable mirror 11. The pair of 2 nd movable comb electrodes 166 are provided on the outer surfaces of the frame 112 in the Y axis direction, respectively. That is, the frame portion 112 constitutes an electrode support portion that supports each 2 nd movable comb-tooth electrode 166. Each of the 2 nd movable comb-tooth electrodes 166 has a plurality of 2 nd movable comb-teeth 166a extending along a plane perpendicular to the X-axis direction. These 2 nd movable comb teeth 166a are arranged at a predetermined interval in the X axis direction.

In the single 2 nd fixed comb-tooth electrode 165 and the single 2 nd movable comb-tooth electrode 166, the plurality of 2 nd fixed comb-teeth 165a and the plurality of 2 nd movable comb-teeth 166a are alternately arranged. That is, the 2 nd fixed comb teeth 165a of one 2 nd fixed comb-tooth electrode 165 are positioned between the 2 nd movable comb teeth 166a of one 2 nd movable comb-tooth electrode 166. In the other 2 nd fixed comb-tooth electrode 165 and the other 2 nd movable comb-tooth electrode 166, the plurality of 2 nd fixed comb-teeth 165a and the plurality of 2 nd movable comb-teeth 166a are alternately arranged. That is, the 2 nd fixed comb teeth 165a of the other 2 nd fixed comb-tooth electrode 165 are positioned between the 2 nd movable comb teeth 166a of the other 2 nd movable comb-tooth electrode 166. Of the pair of 2 nd fixed comb electrodes 165 and the pair of 2 nd movable comb electrodes 166, the adjacent 2 nd fixed comb 165a and the 2 nd movable comb 166a face each other in the X axis direction. The distance between the adjacent 2 nd fixed comb tooth 165a and the 2 nd movable comb tooth 166a is, for example, about several μm.

The susceptor 12 is provided with a plurality of electrode pads 121 and 122. The electrode pads 121 and 122 are formed on the surface of the device layer 52 in the opening 12c formed in the main surface 12b of the susceptor 12 so as to reach the device layer 52. Each electrode pad 121 is electrically connected to the 1 st fixed comb-tooth electrode 161, the 1 st fixed comb-tooth electrode 163, or the 2 nd fixed comb-tooth electrode 165 via the device layer 52. Several electrode pads 122 are electrically connected to the 1 st movable comb-tooth electrode 162 or the 1 st movable comb-tooth electrode 164 via the 1 st elastic support portion 14 or the 2 nd elastic support portion 15. The other electrode pad 122 is electrically connected to the 2 nd movable comb-tooth electrode 166 via the 1 st elastic support portion 14 and the frame 112 of the movable mirror 11, or via the 2 nd elastic support portion 15 and the frame 112 of the movable mirror 11. The lead 26 is disposed between each of the electrode pads 121 and 122 and each of the lead pins 25.

The 1 st fixed comb- tooth electrodes 161 and 163 and the 1 st movable comb- tooth electrodes 162 and 164 are used as electrodes for driving. Specifically, when a voltage is applied between the plurality of electrode pads 121 and the plurality of electrode pads 122 via the plurality of lead pins 25 and the plurality of lead wires 26, electrostatic forces are generated between the 1 st fixed comb-tooth electrode 161 and the 1 st movable comb-tooth electrode 162 facing each other, and between the 1 st fixed comb-tooth electrode 163 and the 1 st movable comb-tooth electrode 164 facing each other, for example, so as to move the movable mirror 11 to one side in the Z-axis direction. At this time, the 1 st torsion bars 145 and 155 and the 2 nd torsion bars 146 and 156 twist in the 1 st elastic support portion 14 and the 2 nd elastic support portion 15, and an elastic force is generated in the 1 st elastic support portion 14 and the 2 nd elastic support portion 15. In the optical device 10, the movable mirror 11 can be reciprocated horizontally in the Z-axis direction at the resonance frequency thereof by applying a periodic electric signal to the 1 st fixed comb electrodes 161 and 163 and the 1 st movable comb electrodes 162 and 164 via the plurality of lead pins 25 and the plurality of lead wires 26. In this way, the driving unit 13 functions as an electrostatic actuator.

The 2 nd fixed comb-tooth electrode 165 and the 2 nd movable comb-tooth electrode 166 are used as electrodes for monitoring. Specifically, the electrostatic capacity between the 2 nd fixed comb-tooth electrode 165 and the 2 nd movable comb-tooth electrode 166 is detected via the plurality of lead pins 25 and the plurality of leads 26, and the plurality of electrode pads 121 and the plurality of electrode pads 122. The capacitance changes according to the position of the movable mirror 11 in the Z-axis direction. Therefore, the position of the movable mirror 11 can be feedback-controlled by adjusting the drive vibration (the magnitude, the period, and the like of the applied voltage) in accordance with the detected capacitance.

[ detailed Structure of each part ]

The structure of the frame 112, the rods 141 and 151, and the electrode supporting portions 147 and 157 will be further described with reference to fig. 2 to 6.

As described above, the frame portion 112 constitutes an electrode support portion that supports each 2 nd movable comb-tooth electrode 166. As described above, the frame portion 112 has the second beam portion 112b formed such that the thickness of the frame portion 112 in the Z-axis direction is greater than the thickness of the center portion 114 in the Z-axis direction. Here, the thickness of the frame portion 112 in the Z-axis direction is thicker than the thickness of the 2 nd movable comb 166a in the Z-axis direction (see fig. 5). That is, the 2 nd beam portion 112b is formed such that the thickness of the frame portion 112 in the Z-axis direction is thicker than the thickness of the 2 nd movable comb 166a in the Z-axis direction.

Each rod 141 has a 4 th body portion 141d and a 4 th beam portion 141 e. The 4 th body portion 141d is formed by a part of the device layer 52. The 4 th beam portion 141e is formed by the support layer 51 and a part of the intermediate layer 53. The 4 th beam portion 141e is provided on the surface of the 4 th main body portion 141d on the main surface 12b side. The 4 th beam portion 141e has an elongated rectangular shape when viewed from the Z-axis direction.

The 4 th beam portion 141e is formed in each rod 141 as follows. The 4 th beam portion 141e is formed such that the thickness of the rod 141 in the Z-axis direction is thicker than the thickness of the 1 st movable comb 162a in the Z-axis direction. The 4 th beam portion 141e extends in the X-axis direction between both end portions 141a and 141b of the rod 141. That is, the 4 th beam portion 141e extends between a position connected to the 1 st torsion bar 145 and a position connected to the link 143 in the rod 141. The outer edge of the 4 th beam portion 141e in the Y axis direction (the edge on the opposite side from the 1 st optical function portion 17) extends along the outer edge of the rod 141 in the Y axis direction with a predetermined gap therebetween when viewed from the Z axis direction. The inner edge (edge on the 1 st optical function portion 17 side) of the 4 th beam portion 141e in the Y axis direction extends along the inner edge of the rod 141 in the Y axis direction with a predetermined gap therebetween when viewed from the Z axis direction.

Each electrode support portion 147 has a 5 th main body portion 147a and a 5 th beam portion 147 b. The 5 th body portion 147a is formed by a part of the device layer 52. The 5 th body portion 147a is connected to the 4 th body portion 141 d. The 1 st movable comb-tooth electrode 162 extends from the 5 th main body portion 147 a. The 5 th beam portion 147b is formed by the support layer 51 and a part of the intermediate layer 53. The 5 th beam portion 147b is provided on the surface of the 5 th main body portion 147a on the main surface 12b side. The 5 th beam portion 147b is connected to the 4 th beam portion 141 e. The 5 th beam portion 147b has a rectangular shape when viewed from the Z-axis direction.

The 5 th beam portion 147b is formed in each electrode supporting portion 147 as follows. The 5 th beam portion 147b is formed such that the thickness of the electrode supporting portion 147 in the Z-axis direction is thicker than the thickness of the 1 st movable comb teeth 162a in the Z-axis direction. The 5 th beam portion 147b extends in the Y-axis direction between both ends of the electrode supporting portion 147. When viewed from the Z-axis direction, the edge of the 5 th beam portion 147b on one side in the X-axis direction extends along the edge of the electrode support portion 147 at a predetermined interval from the edge on one side in the X-axis direction. When viewed from the Z-axis direction, the edge of the second beam portion 147b on the X-axis direction extends along the edge of the electrode support portion 147 on the other side in the X-axis direction with a predetermined gap.

The thickness of the 4 th beam portion 141e in the Z-axis direction is equal to the thickness of the 1 st beam portion 115b in the Z-axis direction. The width (length in the Y-axis direction) of the 4 th beam portion 141e is wider than the width of the 1 st beam portion 115b and is substantially equal to the width of the 2 nd beam portion 112 b. The thickness of the 5 th beam portion 147b is substantially equal to the thickness of the 4 th beam portion 141 e. The width (length in the X-axis direction) of the 5 th beam portion 147b is substantially equal to the width of the 4 th beam portion 141e, or slightly smaller than the width of the 4 th beam portion 141 e. The thickness of each of the 1 st, 4 th, and 5 th beam portions 115b, 141e, and 147b in the Z-axis direction is greater than the thickness of the 1 st and 2 nd torsion bars 145 and 146 in the Z-axis direction.

In order to suppress strain of the electrode supporting portion 147 supporting the 1 st movable comb-tooth electrode 162 when the movable mirror 11 moves in the Z-axis direction, the thickness T1 of the electrode supporting portion 147 in the Z-axis direction and the thickness T2 of the 1 st movable comb-tooth 162a in the Z-axis direction may satisfy the following expression (2).

T1³×W1/C1³≧N1×T2³×W2/C2³…(2)

In the above equation (1), W1 is the width (length in the X axis direction) of the electrode support portion 147, C1 is the length (length in the Y axis direction) of the electrode support portion 147, N1 is the number of 1 st movable comb teeth 162a included in 1 movable comb-tooth electrode 162, W2 is the width (length in the Y axis direction) of the 1 st movable comb-tooth 162a, and C2 is the length (length in the X axis direction) of the 1 st movable comb-tooth 162a when viewed from the Z axis direction. This makes it possible to make the electrode supporting portion 147 less likely to be strained than the 1 st movable comb-tooth electrode 162.

In the present embodiment, in order to secure the distance between the 1 st fixed comb-tooth electrode 161 and the 1 st movable comb-tooth electrode 162 and the movable mirror 11, the electrode support portions 147 and the 1 st movable comb-tooth electrode 162 are disposed so as to be located on the opposite side of the movable mirror 11 with respect to the center a of the rod 141 in the X-axis direction (extending direction of the rod 141) (see fig. 2).

Each rod 151 has a 6 th body portion 151d and a 6 th beam portion 151 e. The 6 th body portion 151d is formed by a part of the device layer 52. The 6 th beam portion 151e is formed by the support layer 51 and a part of the intermediate layer 53. The 6 th beam portion 151e is provided on the surface of the 6 th body portion 151d on the main surface 12b side. The 6 th beam portion 151e has an elongated rectangular shape when viewed from the Z-axis direction.

The 6 th beam portion 151e is formed in each rod 151 as follows. The 6 th beam portion 151e is formed such that the thickness of the rod 151 in the Z-axis direction is thicker than the thickness of the 1 st movable comb tooth 164a in the Z-axis direction. The 6 th beam portion 151e extends in the X-axis direction between both end portions 151a and 151b of the rod 151. That is, the 6 th beam portion 151e extends between a position of connection with the 1 st torsion bar 155 and a position of connection with the link 153 in the rod 151. The outer edge of the 6 th beam portion 151e in the Y-axis direction (the edge on the opposite side from the 2 nd optical function portion 18) extends along the outer edge of the rod 151 in the Y-axis direction with a predetermined gap therebetween when viewed from the Z-axis direction. The inner edge of the 6 th beam portion 151e in the Y axis direction (the edge on the 2 nd optical function portion 18 side) extends along the inner edge of the rod 151 in the Y axis direction with a predetermined interval therebetween when viewed from the Z axis direction. The 6 th beam portion 151e is formed in the same shape as the 4 th beam portion 141e, for example.

Each electrode supporting portion 157 has a 7 th body portion 157a and a 7 th beam portion 157 b. The 7 th body portion 157a is formed by a part of the device layer 52. The 7 th body 157a is connected to the 6 th body 151 d. The 1 st movable comb-tooth electrode 164 extends from the 7 th main body portion 157 a. The 7 th beam portion 157b is formed by the support layer 51 and a part of the intermediate layer 53. The 7 th beam portion 157b is provided on the surface of the 7 th body portion 157a on the main surface 12b side. The 7 th beam portion 157b is connected to the 6 th beam portion 151 e. The 7 th beam portion 157b has a rectangular shape when viewed from the Z-axis direction.

The 7 th beam portion 157b is formed in each electrode support portion 157 as follows. The 7 th beam portion 157b is formed such that the thickness of the electrode support portion 157 in the Z-axis direction is thicker than the thickness of the 1 st movable comb tooth 164a in the Z-axis direction. The 7 th beam portion 157b extends in the Y-axis direction between both ends of the electrode supporting portion 157. When viewed from the Z-axis direction, the edge of the 7 th beam portion 157b on one side in the X-axis direction extends along the edge of the electrode support portion 157 at a predetermined interval from the edge on one side in the X-axis direction. When viewed from the Z-axis direction, the edge of the 7 th beam portion 157b on the other side in the X-axis direction extends along the edge of the electrode support portion 157 at a predetermined interval from the edge on the other side in the X-axis direction. The 7 th beam portion 157b is formed in the same shape as the 5 th beam portion 147b, for example.

In order to suppress strain of the electrode supporting portion 157 supporting the 1 st movable comb-tooth electrode 164 when the movable mirror 11 moves in the Z-axis direction, the thickness T3 of the electrode supporting portion 157 in the Z-axis direction and the thickness T4 of the 1 st movable comb-tooth 164a in the Z-axis direction may also satisfy the following expression (3).

T3³×W3/C3³≧N2×T4³×W4/C4³…(3)

In the above equation (3), W3 is the width (length in the X axis direction) of the electrode support section 157, C1 is the length (length in the Y axis direction) of the electrode support section 157, N2 is the number of 1 st movable comb-teeth 164a included in 1 st movable comb-tooth electrode 164, W4 is the width (length in the Y axis direction) of the 1 st movable comb-tooth 164a, and C4 is the length (length in the X axis direction) of the 1 st movable comb-tooth 164 a. This makes it possible to make the electrode supporting portion 157 less likely to be strained than the 1 st movable comb-tooth electrode 164.

In the present embodiment, in order to secure the distance from the 1 st fixed comb-tooth electrode 163 and the 1 st movable comb-tooth electrode 164 to the movable mirror 11, the electrode supporting portions 157 and the 1 st movable comb-tooth electrode 164 are disposed so as to be located on the opposite side of the movable mirror 11 with respect to the center B of the rod 151 in the X-axis direction (extending direction of the rod 151) (see fig. 2).

[ Effect and Effect ]

In the optical device 10 described above, by forming the 5 th beam portion 147b, the thickness of the electrode supporting portion 147 in the Z-axis direction is thicker than the thickness of the 1 st movable comb-tooth 162a in the Z-axis direction, and the 1 st movable comb-tooth electrode 162 is supported by the electrode supporting portion 147. Further, by forming the 7 th beam portion 157b, the thickness of the electrode support portion 157 in the Z-axis direction is thicker than the thickness of the 1 st movable comb-tooth 164a in the Z-axis direction, and the 1 st movable comb-tooth electrode 164 is supported by this electrode support portion 157. Further, by forming the 2 nd beam portion 112b, the thickness of the frame portion 112 in the Z-axis direction is thicker than the thickness of the 2 nd movable comb 166a in the Z-axis direction, and the 2 nd movable comb electrode 166 is supported by the frame portion 112. This can suppress strain in the electrode support portions 147, 157 and the frame portion 112 that support the 1 st movable comb- tooth electrodes 162, 164 and the 2 nd movable comb-tooth electrode 166 when the movable mirror 11 moves in the Z-axis direction. Therefore, the 1 st movable comb- tooth electrodes 162, 164 and the 2 nd movable comb-tooth electrode 166 can be moved integrally with the movable mirror 11, and variations in the interval between the 1 st movable comb-tooth 162a and the 1 st fixed comb-tooth 161a adjacent to each other, the interval between the 1 st movable comb-tooth 164a and the 1 st fixed comb-tooth 163a adjacent to each other, and the interval between the 2 nd movable comb-tooth 166a and the 2 nd fixed comb-tooth 165a adjacent to each other can be suppressed. As a result, reliability can be improved.

In the optical device 10, the electrode support portion 147 extending from the rod 141 and the electrode support portion 157 extending from the rod 151 suppress variation in the interval between the 1 st movable comb- tooth electrodes 162 and 164 and the 1 st fixed comb- tooth electrodes 161 and 163.

In the optical device 10, the 1 st movable comb-tooth electrode 162 is located on the opposite side of the movable mirror 11 with respect to the center a of the rod 141 in the X-axis direction. Accordingly, even if the movable mirror 11 is moved largely in the Z-axis direction, the 1 st movable comb tooth 162a is less likely to be displaced from the region between the 1 st fixed comb teeth 161a adjacent to each other. Further, the 1 st movable comb-tooth electrode 164 is located on the opposite side of the movable mirror 11 with respect to the center B of the rod 151 in the X-axis direction. Accordingly, even if the movable mirror 11 is moved largely in the Z-axis direction, the 1 st movable comb tooth 164a is less likely to be displaced from the region between the 1 st fixed comb teeth 163a adjacent to each other. Accordingly, electrostatic forces can be generated between the 1 st fixed comb-tooth electrode 161 and the 1 st movable comb-tooth electrode 162, and between the 1 st fixed comb-tooth electrode 163 and the 1 st movable comb-tooth electrode 164 over the entire movable range of the movable mirror 11.

In the optical device 10, as shown in fig. 2, each electrode support 147 and each 1 st movable comb-tooth electrode 162 are located between points C, C that trisect the rod 141 in the X-axis direction. Further, each electrode support 157 and each 1 st movable comb-tooth electrode 164 are located between points D, D that trisect the rod 151 in the X-axis direction. Accordingly, it is possible to generate electrostatic forces between the 1 st fixed comb-tooth electrode 161 and the 1 st movable comb-tooth electrode 162 and between the 1 st fixed comb-tooth electrode 163 and the 1 st movable comb-tooth electrode 164, and to efficiently use the electrostatic forces as the driving force of the movable mirror 11, simultaneously, over the entire movable range of the movable mirror 11.

In the optical device 10, the lever 141 has the 4 th beam portion 141e formed such that the thickness of the lever 141 in the Z-axis direction is thicker than the thickness of the 1 st movable comb 162a in the Z-axis direction. The rod 151 has a 6 th beam portion 151e formed such that the thickness of the rod 151 in the Z-axis direction is thicker than the thickness of the 1 st movable comb tooth 164a in the Z-axis direction. This can further reliably suppress variation in the interval between the 1 st movable comb- tooth electrodes 162 and 164 and the 1 st fixed comb- tooth electrodes 161 and 163, and can further improve reliability.

In the optical device 10, the thickness T1 of the electrode supporting portion 147 in the Z-axis direction and the thickness T2 of the 1 st movable comb tooth 162a in the Z-axis direction satisfy the above expression (2). Further, the thickness T3 of the electrode supporting portion 157 in the Z-axis direction and the thickness T4 of the 1 st movable comb tooth 164a in the Z-axis direction satisfy the above expression (3). This can more reliably suppress variation in the interval between the 1 st movable comb- tooth electrodes 162, 164 and the 1 st fixed comb- tooth electrodes 161, 163.

In the optical device 10, the electrode support portion (frame portion 112) is provided on the movable mirror 11 so as to be arranged along the outer edge of the movable mirror 11. This ensures a distance from the connection position of the 1 st elastic support portion 14 and the 2 nd elastic support portion 15 to the 2 nd movable comb-tooth electrode 166 with respect to the base 12. As a result, since the change in capacitance between the 2 nd fixed comb-tooth electrode 165 and the 2 nd movable comb-tooth electrode 166 is large, the position of the movable mirror 11 can be detected easily and reliably.

In the optical device 10, the frame 112 constitutes an electrode support portion. This can suppress variation in the interval between the 2 nd movable comb-tooth electrode 166 and the 2 nd fixed comb-tooth electrode 165 by surrounding the frame portion 112 of the main body portion 111. In the optical device 10, the movable mirror 11 includes: a main body portion 111; a frame portion 112 surrounding the main body portion 111 with a predetermined space therebetween when viewed from the Z-axis direction; and a coupling portion 113 that couples the main body portion 111 and the frame portion 112 to each other. Accordingly, the sectional force (bending moment) from the 1 st torsion bars 145, 155 is not easily transmitted to the body 111, and the body 111 is suppressed from being strained when the movable mirror 11 moves in the Z-axis direction.

In addition, in the optical device 10, by forming the 1 st beam portion 115b, the thickness of the outer edge portion 115 in the Z-axis direction is thicker than the thickness of the central portion 114 in the Z-axis direction. This can suppress the body 111 from being strained when the movable mirror 11 moves in the Z-axis direction. In addition, by forming the 2 nd beam portion 112b, the thickness of the frame portion 112 in the Z-axis direction is thicker than the thickness of the central portion 114 in the Z-axis direction. This can suppress the frame portion 112 from being strained when the movable mirror 11 moves in the Z-axis direction, and can suppress the strain of the main body portion 111 caused by the strain of the frame portion 112.

[ modified examples ]

While one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment. The optical device 10 may be configured as in modification 1 shown in fig. 7. In modification 1, a pair of electrode supporting portions 147 is provided on each rod 141. The 1 st movable comb-tooth electrode 162 is provided on each electrode support portion 147. The pair of electrode supporting portions 147 is formed in each of the rods 141 as follows. The pair of electrode supporting portions 147 is arranged in line in the X-axis direction. One electrode supporting portion 147 is disposed at the same position as the electrode supporting portion 147 of the above embodiment. The other electrode supporting portion 147 and the 1 st movable comb-tooth electrode 162 supported by the other electrode supporting portion 147 are located on the movable mirror 11 side with respect to the center a of the rod 141 in the X-axis direction. More specifically, the other electrode support 147 and the 1 st movable comb-tooth electrode 162 supported by the other electrode support 147 are located closer to the movable mirror 11 than a point C, C bisecting the rod 141 in the X-axis direction.

In modification 1, a pair of electrode supporting portions 157 are provided on each rod 151. The 1 st movable comb-tooth electrode 164 is provided on each electrode support portion 157. The pair of electrode supporting portions 157 are formed in the respective rods 151 as follows. The pair of electrode supporting portions 157 are arranged in line along the X-axis direction. One electrode support portion 157 is disposed at the same position as the electrode support portion 157 of the above embodiment. The other electrode supporting portion 157 and the 1 st movable comb-tooth electrode 164 supported by the other electrode supporting portion 157 are located on the movable mirror 11 side with respect to the center a of the rod 151 in the X-axis direction. More specifically, the other electrode supporting portion 157 and the 1 st movable comb-tooth electrode 164 supported by the other electrode supporting portion 157 are located closer to the movable mirror 11 than a point D, D bisecting the rod 151 in the X-axis direction.

According to this modification 1 as well, as in the above embodiment, the electrode supporting portions 147, 157 that support the 1 st movable comb- tooth electrodes 162, 164 can be suppressed from being strained, and reliability can be improved. In addition, in modification 1, the other 1 st movable comb-tooth electrode 162 is located on the movable mirror 11 side with respect to the center a of the rod 141 in the X-axis direction. Thereby, a distance from the connection position of the 1 st elastic support portion 14 with respect to the base 12 to the other 1 st movable comb-tooth electrode 162 can be ensured. The other 1 st movable comb-tooth electrode 164 is located on the movable mirror 11 side with respect to the center B of the rod 151 in the X-axis direction. Thereby, a distance from the connection position of the 2 nd elastic support portion 15 with respect to the base 12 to the other 1 st movable comb-tooth electrode 164 can be secured. As a result, the electrostatic forces generated between the 1 st fixed comb-tooth electrode 161 and the 1 st movable comb-tooth electrode 162, and between the 1 st fixed comb-tooth electrode 163 and the 1 st movable comb-tooth electrode 164 can be efficiently used as the driving force of the movable mirror 11.

In addition, in modification 1, the pair of electrode supporting portions 147 and the pair of electrode supporting portions 157 are arranged in line along the X-axis direction. Thus, since the plurality of electrode supporting portions 147 and 157 are provided, the driving force can be ensured. In the modification 1, the strain of the electrode supporting portions 147, 157 that support the 1 st movable comb- tooth electrodes 162, 164 is suppressed by increasing the thickness of the electrode supporting portions 147, 157 instead of increasing the width, and thus the plurality of electrode supporting portions 147, 157 can be arranged so as to be aligned along the X-axis direction. Further, 3 or more electrode support portions may be provided in one rod 141. The same is true for the rod 151.

The optical device 10 may be configured as in modification 2 shown in fig. 8. In modification 2, the 1 st elastic support portion 14 includes a pair of rods 141, a link 142, a link 143, a pair of 1 st torsion bars 145, a pair of 2 nd torsion bars 146, a pair of 2 nd rods 171, a link 172, and a pair of 3 rd torsion bars 173. Each rod 141 has a shape in which an end portion 141b is bent toward the 1 st optical function portion 17. The pair of 2 nd levers 171 are disposed on both sides of the lever 141 in the Y-axis direction. Each of the 2 nd rods 171 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the rod 141.

The link 172 is bridged between the end portions 171a of the pair of 2 nd rods 171 on the opposite side to the movable mirror 11. The link 172 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the Y-axis direction. The link 172 is disposed on the opposite side of the link 143 from the 1 st optical function portion 17, and extends along the link 143. The pair of 2 nd torsion bars 146 are respectively bridged between the end portion 141b of one rod 141 and the end portion 171a of one 2 nd rod 171, and between the end portion 141b of the other rod 141 and the end portion 171a of the other 2 nd rod 171. The pair of 3 rd torsion bars 173 are bridged between the end 171b of one 2 nd rod 171 on the movable mirror 11 side and the base 12, and between the end 171b of the other 2 nd rod 171 on the movable mirror 11 side and the base 12.

On the surface of the link 172 opposite to the 1 st optical function portion 17, a 1 st movable comb-tooth electrode 162 having a plurality of 1 st movable comb-teeth 162a is provided. That is, the link 172 constitutes an electrode supporting portion that supports the 1 st movable comb-tooth electrode 162. Each link 172 has a 8 th main body portion 172a and a 8 th beam portion 172 b. The 8 th body portion 172a is formed by a part of the device layer 52. The 1 st movable comb-tooth electrode 162 extends from the 8 th main body portion 172 a. The 8 th beam portion 172b is formed by the support layer 51 and a part of the intermediate layer 53. The 8 th beam portion 172b is provided on the surface of the 8 th body portion 172a on the main surface 12b side.

The 8 th beam portion 172b is formed such that the thickness of the link 172 in the Z-axis direction is thicker than the thickness of the 1 st movable comb 162a in the Z-axis direction. The 8 th beam portion 172b extends in the Y-axis direction between both end portions of the link 172. The edge of the 8 th beam portion 172b on one side in the X axis direction extends along the edge of the link 172 with a predetermined gap therebetween when viewed from the Z axis direction. The edge of the 8 th beam portion 172b on the other side in the X axis direction extends along the edge of the link 172 on the other side in the X axis direction with a predetermined gap therebetween when viewed from the Z axis direction.

The 2 nd elastic support portion 15 has a pair of rods 151, a link 152, a link 153, a pair of 1 st torsion bars 155, a pair of 2 nd torsion bars 156, a pair of 2 nd rods 181, a link 182, and a pair of 3 rd torsion bars 183. Each rod 151 has a shape in which an end 151b is bent toward the 2 nd optical function portion 18. The pair of 2 nd levers 181 are disposed on both sides of the lever 151 in the Y-axis direction. Each 2 nd rod 181 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the rod 151.

The link 182 is bridged between the end portions 181a of the pair of 2 nd levers 181 on the opposite side to the movable mirror 11. The link 182 has a plate shape extending along a plane perpendicular to the Z-axis direction, and extends along the Y-axis direction. The link 182 is disposed on the opposite side of the 2 nd optical function portion 18 from the link 153, and extends along the link 153. The pair of 2 nd torsion bars 156 are respectively bridged between the end 151b of one rod 151 and the end 181a of one 2 nd rod 181, and between the end 151b of the other rod 151 and the end 181a of the other 2 nd rod 181. The pair of 3 rd torsion bars 183 are bridged between the end 181b on the movable mirror 11 side of the one 2 nd rod 181 and the base 12, and between the end 181b on the movable mirror 11 side of the other 2 nd rod 181 and the base 12.

On the surface of the link 182 opposite to the 2 nd optical function portion 18, the 1 st movable comb-tooth electrode 164 having a plurality of 1 st movable comb-teeth 164a is provided. That is, the link 182 constitutes an electrode supporting portion that supports the 1 st movable comb-tooth electrode 164. Each link 182 has a 9 th body portion 182a and a 9 th beam portion 182 b. The 9 th main body portion 182a is formed by a part of the device layer 52. The 1 st movable comb-tooth electrode 164 extends from the 9 th main body portion 182 a. The 9 th beam portion 182b is formed by the support layer 51 and a part of the intermediate layer 53. The 9 th beam portion 182b is provided on the surface of the 9 th body portion 182a on the main surface 12b side.

The 9 th beam part 182b is formed such that the thickness of the link 182 in the Z-axis direction is thicker than the thickness of the 1 st movable comb 164a in the Z-axis direction. The 9 th beam part 182b extends in the Y-axis direction between both ends of the link 182. The edge of the 9 th beam 182b on one side in the X-axis direction extends along the edge of the link 182 on one side in the X-axis direction with a predetermined gap therebetween when viewed from the Z-axis direction. The edge of the second side of the 9 th beam 182b in the X-axis direction extends along the edge of the second side of the link 182 in the X-axis direction with a predetermined gap therebetween when viewed in the Z-axis direction.

According to this 2 nd modification as well, similarly to the above-described embodiment, it is possible to suppress variation in the intervals between the 1 st movable comb- tooth electrodes 162 and 164 and the 2 nd movable comb-tooth electrode 166 and the 1 st fixed comb- tooth electrodes 161 and 163 and the 2 nd fixed comb-tooth electrode 165, and to improve reliability. In particular, in modification 2, the link 172 provided between the pair of 2 nd rods 171 and the link 182 provided between the pair of 2 nd rods 181 suppress variation in the interval between the 1 st movable comb- teeth electrodes 162 and 164 and the 1 st fixed comb- teeth electrodes 161 and 163.

The optical device 10 may be configured as in modification 3 shown in fig. 9. In modification 3, the 2 nd fixed comb-tooth electrode 165 and the 2 nd movable comb-tooth electrode 166 are not provided. The frame portion 112 has an octagonal ring shape when viewed from the Z-axis direction, and the 2 nd beam portion 112b has an octagonal ring shape when viewed from the Z-axis direction. The movable mirror 11 has one holder 116 and one holder 117, respectively. The bracket 116 is provided on the surface of the frame 112 on the 1 st optical function unit 17 side so as to protrude toward the 1 st optical function unit 17 side. The holder 117 is provided on the surface of the frame 112 on the 2 nd optical function unit 18 side so as to protrude toward the 2 nd optical function unit 18 side.

The 1 st elastic support portion 14 includes a pair of rods 141, a link 142, a pair of 1 st torsion bars 145, a pair of 2 nd torsion bars 146, a pair of brackets 174, a pair of extensions 175, a pair of brackets 176, a link 177, and a pair of non-linear relaxation springs 178. The pair of levers 141 extend from the movable mirror 11 side to both sides of the 1 st optical function portion 17 in the Y-axis direction along a plane perpendicular to the Z-axis direction.

Each lever 141 has a 1 st portion 141f disposed on the movable mirror 11 side, and a 2 nd portion 141g disposed on the opposite side of the movable mirror 11 from the 1 st portion 141 f. In the pair of rods 141, the 1 st portions 141f extend obliquely so as to be spaced apart from each other as they are farther from the movable mirror 11. Each 2 nd portion 141g extends in the X-axis direction. The pair of brackets 174 is provided on the surface of the 1 st portion 141f on the movable mirror 11 side so as to protrude toward the movable mirror 11 side. Each bracket 174 has a crank-like shape bent to the same side when viewed from the Z-axis direction.

Each of the extending portions 175 has a rectangular shape when viewed from the Z-axis direction. One extending portion 175 extends between the one lever 141 and the movable mirror 11, and protrudes further outward than the movable mirror 11 in the Y-axis direction. The other extending portion 175 extends between the other lever 141 and the movable mirror 11 and protrudes outward in the Y axis direction from the movable mirror 11. The pair of extending portions 175 are disposed on the same center line parallel to the Y-axis direction when viewed from the Z-axis direction.

On both surfaces of the extension 175 in the X axis direction, the 1 st movable comb-tooth electrode 162 having a plurality of 1 st movable comb-teeth 162a is provided. That is, the extension portion 175 constitutes an electrode supporting portion that supports the 1 st movable comb-tooth electrode 162. Each extension 175 has a 10 th main body portion 175a and a 10 th beam portion 175 b. The 10 th main body portion 175a is formed by a part of the device layer 52. The 1 st movable comb-tooth electrode 162 extends from the 10 th main body portion 175 a. The 10 th beam portion 175b is formed by the support layer 51 and a part of the intermediate layer 53. The 10 th beam portion 175b is provided on the surface of the 10 th main body portion 175a on the main surface 12b side.

The 10 th beam portion 175b is formed such that the thickness of the extending portion 175 in the Z-axis direction is thicker than the thickness of the 1 st movable comb teeth 162a in the Z-axis direction. The 10 th beam part 175b extends along the Y-axis direction between both ends of the extension part 175. The edge of the 10 th beam portion 175b on one side in the X-axis direction extends along the edge of the extending portion 175 on one side in the X-axis direction with a predetermined gap therebetween when viewed from the Z-axis direction. The edge of the 10 th beam portion 175b on the other side in the X-axis direction extends along the edge of the extending portion 175 on the other side in the X-axis direction with a predetermined gap therebetween when viewed from the Z-axis direction.

The pair of brackets 176 are provided on the 1 st optical function unit 17 side surface of the extension portion 175 so as to protrude toward the 1 st optical function unit 17 side. Each bracket 176 has a shape that is bent in a crank shape toward the same side (i.e., the side opposite to each bracket 174) when viewed from the Z-axis direction. The front end portion of one bracket 176 is opposed to the front end portion of one bracket 174 in the Y-axis direction. The front end portion of the other bracket 176 is opposed to the front end portion of the other bracket 174 in the Y-axis direction.

The link 177 is bridged between the inner ends of the pair of extensions 175. The link 177 has a substantially U-shape that opens toward the movable mirror 11 when viewed from the Z-axis direction. The link 177 is opposed to the bracket 116 of the movable mirror 11 in the Y-axis direction. More specifically, the link 177 includes a pair of side portions 177a extending in the X-axis direction and facing each other in the Y-axis direction, and the holder 116 is disposed between the pair of side portions 177 a.

The pair of 1 st torsion bars 145 are respectively bridged between the front end portion of one bracket 174 and the front end portion of one bracket 176, and between the front end portion of the other bracket 174 and the front end portion of the other bracket 176. The pair of 2 nd torsion bars 146 are respectively bridged between the end portion 141b of one rod 141 and the base 12, and between the end portion 141b of the other rod 141 and the base 12.

The pair of nonlinear relaxing springs 178 are disposed on one side and the other side in the Y axis direction with respect to the holder 116. Each nonlinear relaxing spring 178 is connected to the movable mirror 11 via the bracket 116, and is connected to the 1 st torsion bar 145 via the link 177, the extension 175, and the bracket 176. That is, each nonlinear relaxing spring 178 is connected between the movable mirror 11 and the 1 st torsion bar 145. Each of the nonlinear relaxing springs 178 includes a pair of plate-like portions 178a that are bridged between the bracket 116 and a pair of side portions 177a of the link 177.

Each plate-like portion 178a has a flat plate shape perpendicular to the X-axis direction. In one nonlinear relaxing spring 178, a pair of plate-like portions 178a are opposed to each other in the X-axis direction. In the pair of nonlinear relaxing springs 178, the plate-like portion 178a positioned on one side in the X-axis direction is arranged along one plane perpendicular to the X-axis direction, and the plate-like portion 178a positioned on the other side in the X-axis direction is arranged along the other plane perpendicular to the X-axis direction.

The length (length in the Y-axis direction) of each plate-shaped portion 178a is longer than each of the length of 1 st torsion bar 145 and the length of 2 nd torsion bar 146. The width (length in the X-axis direction) of each plate-shaped portion 178a is narrower than each of the width of 1 st torsion bar 145 and the width of 2 nd torsion bar 146. The nonlinear relaxing spring 178 is constituted as follows: in a state where the movable mirror 11 moves in the Z-axis direction, the amount of deformation of the nonlinearity relief spring 178 in the Y-axis direction is smaller than the amounts of deformation of the 1 st torsion bar 145 and the 2 nd torsion bar 146 in the Y-axis direction, and the amount of deformation of the nonlinearity relief spring 178 in the X-axis direction is larger than the amounts of deformation of the 1 st torsion bar 145 and the 2 nd torsion bar 146 in the X-axis direction. The deformation amounts of the 1 st torsion bar 145, the 2 nd torsion bar 146, and the nonlinear relaxing spring 178 around the Y-axis direction refer to, for example, absolute values of torsion amounts (torsion angles). The deformation amounts of the 1 st torsion bar 145, the 2 nd torsion bar 146, and the nonlinearity relief spring 178 in the X-axis direction are, for example, absolute values of deflection amounts. In the case where a widened portion having a width that is wider as it approaches an end portion of at least one of the bracket 116 side and the side portion 177a side of the plate-shaped portion 178a, the length of the plate-shaped portion 178a refers to the length of the plate-shaped portion 178a excluding the widened portion, and the width of the plate-shaped portion 178a refers to the width of the plate-shaped portion 178a excluding the widened portion. These aspects are also the same for the 1 st and 2 nd torsion bars 145, 155, 146, 156, and the plate-like portion 188a described below.

The 2 nd elastic support portion 15 includes a pair of rods 151, a link 152, a pair of 1 st torsion bars 155, a pair of 2 nd torsion bars 156, a pair of brackets 184, a pair of extension portions 185, a pair of brackets 186, a link 187, and a pair of non-linearity relaxing springs 188. The pair of rods 151 extend from the movable mirror 11 side to both sides of the 2 nd optical function portion 18 in the Y-axis direction along a plane perpendicular to the Z-axis direction.

Each of the rods 151 has a 1 st portion 151f disposed on the movable mirror 11 side, and a 2 nd portion 151g disposed on the opposite side of the movable mirror 11 from the 1 st portion 151 f. In the pair of rods 151, the 1 st portions 151f extend obliquely so as to be spaced apart from each other as they become farther from the movable mirror 11. Each 2 nd portion 151g extends along the X-axis direction. The pair of brackets 184 is provided on the surface of the 1 st portion 151f on the movable mirror 11 side so as to protrude toward the movable mirror 11 side. Each bracket 184 has a crank-like shape that is bent toward the same side (i.e., the side opposite to each bracket 174) when viewed from the Z-axis direction.

Each of the extending portions 185 has a rectangular shape when viewed from the Z-axis direction. One extending portion 185 extends between the one rod 151 and the movable mirror 11 to protrude further outward than the movable mirror 11 in the Y-axis direction. The other extending portion 185 extends between the other rod 151 and the movable mirror 11 and protrudes further outward than the movable mirror 11 in the Y-axis direction. The pair of extending portions 185 are arranged on the same center line parallel to the Y-axis direction when viewed from the Z-axis direction.

On both surfaces of the extension portion 185 in the X axis direction, the 1 st movable comb-tooth electrode 164 having a plurality of 1 st movable comb-teeth 164a is provided. That is, the extension portion 185 constitutes an electrode supporting portion that supports the 1 st movable comb-tooth electrode 164. Each extension portion 185 has an 11 th main body portion 185a and an 11 th beam portion 185 b. The 11 th main body portion 185a is formed by a part of the device layer 52. The 1 st movable comb-tooth electrode 164 extends from the 11 th main body portion 185 a. The 11 th beam portion 185b is formed by the support layer 51 and a part of the intermediate layer 53. The 11 th beam portion 185b is provided on the surface of the 11 th main body portion 185a on the main surface 12b side.

The 11 th beam portion 185b is formed such that the thickness of the extending portion 185 in the Z-axis direction is thicker than the thickness of the 1 st movable comb 164a in the Z-axis direction. The 11 th beam portion 185b extends in the Y-axis direction between both ends of the extension portion 185. When viewed from the Z-axis direction, the edge of the 11 th beam portion 185b on one side in the X-axis direction extends along the edge of the extending portion 185 on one side in the X-axis direction with a predetermined gap. When viewed from the Z-axis direction, the other edge of the 11 th beam portion 185b in the X-axis direction extends along the other edge of the extending portion 185 in the X-axis direction with a predetermined gap.

The pair of brackets 186 are provided on the 2 nd optical function unit 18 side surface of the extension portion 185 so as to protrude toward the 2 nd optical function unit 18 side. Each bracket 186 has a shape that is bent in a crank shape toward the same side (i.e., the side opposite to each bracket 184) when viewed from the Z-axis direction. The front end portion of one bracket 186 is opposed to the front end portion of one bracket 184 in the Y-axis direction. The front end portion of the other bracket 186 is opposed to the front end portion of the other bracket 184 in the Y-axis direction.

The link 187 is bridged between the inner ends of the pair of extensions 185. The link 187 has a substantially U shape that opens toward the movable mirror 11 when viewed from the Z-axis direction. The link 187 is opposed to the bracket 117 of the movable mirror 11 in the Y-axis direction. More specifically, the link 187 includes a pair of side portions 187a extending in the X-axis direction and facing each other in the Y-axis direction, and the holder 117 is disposed between the pair of side portions 187 a.

The pair of 1 st torsion bars 155 are respectively bridged between the front end portion of one bracket 184 and the front end portion of one bracket 186, and between the front end portion of the other bracket 184 and the front end portion of the other bracket 186. The pair of 2 nd torsion bars 156 are respectively bridged between the end 151b of one rod 151 and the base 12, and between the end 151b of the other rod 151 and the base 12.

The pair of nonlinear relaxing springs 188 are disposed on one side and the other side in the Y axis direction with respect to the holder 117. Each nonlinear relaxing spring 188 is connected to the movable mirror 11 via the bracket 117, and is connected to the 1 st torsion bar 155 via the link 187, the extension portion 185, and the bracket 186. That is, each nonlinear relaxing spring 188 is connected between the movable mirror 11 and the 1 st torsion bar 155. Each of the nonlinear relaxing springs 188 has a pair of plate-like portions 188a that are bridged between the bracket 117 and a pair of side portions 187a of the link 187.

Each plate-like portion 188a has a flat plate shape perpendicular to the X-axis direction. In one nonlinear relief spring 188, a pair of plate-shaped portions 188a are opposed to each other in the X-axis direction. In the pair of nonlinear relaxing springs 188, the plate-like portion 188a positioned on one side in the X-axis direction is arranged along one plane perpendicular to the X-axis direction, and the plate-like portion 188a positioned on the other side in the X-axis direction is arranged along the other plane perpendicular to the X-axis direction.

Each plate-like portion 188a is formed in the same shape as the plate-like portion 178a, for example. The length of each plate-like portion 188a is longer than each of the length of the 1 st torsion bar 155 and the length of the 2 nd torsion bar 156. The width of each plate-like portion 188a is narrower than each of the width of the 1 st torsion bar 155 and the width of the 2 nd torsion bar 156. The nonlinear relaxing spring 188 is configured as follows: in a state where the movable mirror 11 moves in the Z-axis direction, the amount of deformation of the non-linear relaxation spring 188 around the Y-axis direction is smaller than the respective amounts of deformation of the 1 st torsion bar 155 and the 2 nd torsion bar 156 around the Y-axis direction, and the amount of deformation of the non-linear relaxation spring 188 in the X-axis direction is larger than the respective amounts of deformation of the 1 st torsion bar 155 and the 2 nd torsion bar 156 in the X-axis direction.

The 1 st optical functional portion 17 and the 2 nd optical functional portion 18 are light passing openings formed in the SOI substrate 50, respectively. The 1 st optical function portion 17 and the 2 nd optical function portion 18 each have a circular shape when viewed from the Z-axis direction.

According to such a 3 rd modification, as in the above-described embodiment, the variation in the interval between the 1 st movable comb- tooth electrodes 162 and 164 and the 1 st fixed comb- tooth electrodes 161 and 163 can be suppressed, and the reliability can be improved. In particular, in modification 3, the variation in the interval between the 1 st movable comb- tooth electrodes 162 and 164 and the 1 st fixed comb- tooth electrodes 161 and 163 can be suppressed by the extending portion 175 extending between the rod 141 and the movable mirror 11 when viewed from the Z-axis direction and the extending portion 185 extending between the rod 151 and the movable mirror 11 when viewed from the Z-axis direction. Further, since the 1 st elastic support portion 14 has the nonlinear relaxing spring 178 and the 2 nd elastic support portion 15 has the nonlinear relaxing spring 188, the occurrence of nonlinearity in the torsional deformation of the 1 st torsion bars 145, 155 and the 2 nd torsion bars 146, 156 can be suppressed. In the configuration in which the nonlinearity relief springs 178 and 188 are provided in this manner, the variation in the interval between the 1 st movable comb- tooth electrodes 162 and 164 and the 1 st fixed comb- tooth electrodes 161 and 163 can be suppressed.

The optical device 10 may be configured as in modification 4 shown in fig. 10. The 4 th modification differs from the 3 rd modification in the following respects. In the 4 th modification, the 1 st movable comb-tooth electrode 162 is disposed over the 1 st portion 141f of the pair of rods 141 and the link 142. That is, the pair of rods 141 and the link 142 constitute an electrode supporting portion that supports the 1 st movable comb-tooth electrode 162. Hereinafter, the pair of rods 141 and the connecting rod 142 may be referred to as electrode supporting portions 179. The 1 st movable comb-tooth electrode 164 is disposed over the 1 st portion 151f of the pair of rods 151 and the link 152. That is, the pair of rods 151 and the link 152 constitute an electrode supporting portion that supports the 1 st movable comb-tooth electrode 164. Hereinafter, the pair of levers 141 and the link 142 may be referred to as electrode support portions 189.

Instead of the pair of extending portions 175, a pair of intermediate portions 175A are provided. Each intermediate portion 175A is connected to the rod 141 via the brackets 174 and 176 and the 1 st torsion bar 145, and is connected to the bracket 116 via the link 177 and the nonlinear relaxing spring 178. Instead of the pair of extending portions 185, a pair of intermediate portions 185A are provided. Each intermediate portion 185A is connected to the rod 151 via the brackets 184 and 186 and the 1 st torsion bar 155, and is connected to the bracket 117 via the link 187 and the nonlinear relaxing spring 188. When viewed from the Z-axis direction, the 1 st optical function portion 17 is disposed on one side of the movable mirror 11 in the Y-axis direction, and the 2 nd optical function portion 18 is disposed on the other side of the movable mirror 11 in the Y-axis direction.

On the surface of the electrode support portion 179 opposite to the movable mirror 11, a 1 st movable comb-tooth electrode 162 having a plurality of 1 st movable comb-teeth 162a is provided. Each electrode support portion 179 has a 12 th main body portion 179a and a 12 th beam portion 179 b. The 12 th body portion 179a is formed by a part of the device layer 52. The 1 st movable comb-tooth electrode 162 extends from the 12 th main body portion 179 a. The 12 th beam portion 179b is formed by the support layer 51 and a part of the intermediate layer 53. The 12 th beam portion 179b is provided on the surface of the 12 th main body portion 179a on the main surface 12b side.

The 12 th beam portion 179b is formed such that the thickness of the electrode support portion 179 in the Z-axis direction is thicker than the thickness of the 1 st movable comb tooth 162a in the Z-axis direction. The 12 th beam portion 179b extends between both ends of the electrode support portion 179. When viewed from the Z-axis direction, the edge of the 12 th beam portion 179b on one side in the X-axis direction extends along the edge of the electrode support portion 179 with a predetermined gap therebetween. When viewed from the Z-axis direction, the other edge of the 12 th beam portion 179b in the X-axis direction extends along the other edge of the electrode support portion 179 with a predetermined gap therebetween.

On the surface of the electrode support 189 opposite to the movable mirror 11, a 1 st movable comb-tooth electrode 164 having a plurality of 1 st movable comb-teeth 164a is provided. Each electrode support portion 189 has a 13 th main portion 189a and a 13 th beam portion 189 b. The 13 th body portion 189a is formed by a part of the device layer 52. The 1 st movable comb-tooth electrode 164 extends from the 13 th main body portion 189 a. The 13 th beam portion 189b is formed by the support layer 51 and a part of the intermediate layer 53. The 13 th beam portion 189b is provided on the surface of the 13 th main body portion 189a on the main surface 12b side.

The 13 th beam part 189b is formed such that the thickness of the electrode support part 189 in the Z-axis direction is thicker than the thickness of the 1 st movable comb tooth 164a in the Z-axis direction. The 13 th beam 189b extends between both ends of the electrode support 189. When viewed from the Z-axis direction, the edge of the 13 th beam portion 189b on one side in the X-axis direction extends along the edge of the electrode support portion 189 on one side in the X-axis direction with a predetermined gap therebetween. When viewed from the Z-axis direction, the edge of the 13 th beam portion 189b on the other side in the X-axis direction extends along the edge of the electrode support portion 189 on the other side in the X-axis direction with a predetermined gap therebetween.

According to this 4 th modification as well, similarly to the above-described embodiment, the variation in the interval between the 1 st movable comb- tooth electrodes 162 and 164 and the 1 st fixed comb- tooth electrodes 161 and 163 can be suppressed, and the reliability can be improved. In particular, in the 4 th modification example, the electrode support portions 179 and 189 can suppress the variation in the interval between the 1 st movable comb- tooth electrodes 162 and 164 and the 1 st fixed comb- tooth electrodes 161 and 163.

The optical device 10 may be configured as in modification 5 shown in fig. 11. In modification 5, frame 112 and connection portion 113 are not provided, and brackets 116 and 117 are directly connected to main body portion 111. The pair of 2 nd movable comb electrodes 166 are provided on the outer surface of the outer edge portion 115 of the main body 111 in the Y axis direction. That is, in the 5 th modification, the outer edge portion 115 constitutes an electrode supporting portion that supports each of the 2 nd movable comb-tooth electrodes 166. As described above, the outer edge portion 115 has the 1 st beam portion 115b formed such that the thickness of the outer edge portion 115 in the Z-axis direction is thicker than the thickness of the central portion 114 in the Z-axis direction.

According to this 5 th modification as well, similarly to the above-described embodiment, it is possible to suppress variation in the intervals between the 1 st movable comb- tooth electrodes 162 and 164 and the 2 nd movable comb-tooth electrode 166 and the 1 st fixed comb- tooth electrodes 161 and 163 and the 2 nd fixed comb-tooth electrode 165, and to improve reliability. In particular, in the 5 th modification, the outer edge portion 115 having a thickness in the Z-axis direction larger than that of the central portion 114 suppresses variation in the interval between the 2 nd movable comb-tooth electrode 166 and the 2 nd fixed comb-tooth electrode 165.

In the above-described embodiment and the modifications, the 1 st fixed comb- teeth electrodes 161 and 163 and the 1 st movable comb-teeth electrodes 162 and 164 (hereinafter, referred to as the 1 st electrode) are used as the electrodes for driving, and the 2 nd fixed comb-teeth electrode 165 and the 2 nd movable comb-teeth electrode 166 (hereinafter, referred to as the 2 nd electrode) are used as the electrodes for monitoring, but the 1 st electrode may be used as the electrode for monitoring, and the 2 nd electrode may be used as the electrode for driving. The 2 nd electrode may be omitted and only the 1 st electrode may be provided. In this case, the 1 st electrode may be used as an electrode for driving, or may be used as an electrode for driving and monitoring. The 1 st electrode may be omitted and only the 2 nd electrode may be provided. In this case, the 2 nd electrode may be used as an electrode for driving, or may be used as an electrode for driving and monitoring.

In the above-described embodiment and the modifications, the material and shape of each component are not limited to the above-described material and shape, and various materials and shapes can be used. For example, the main body 111 and the mirror surface 11a may have any shape such as a rectangular shape or an octagonal shape when viewed from the Z-axis direction. The frame portion 112 may have any ring shape such as a rectangular ring shape or an octagonal ring shape when viewed from the Z-axis direction.

The 1 st, 2 nd, 3 rd, 4 th, 5 th, 6 th, and 7 th beam portions 115b, 112b, 113b, 141e, 147b, 151e, 157b may be formed in any shape. For example, the beam portion may extend obliquely to the X-axis direction or the Y-axis direction, or may extend in a zigzag manner. The arrangement, number, length, width, and thickness of each beam portion can be arbitrarily set. At least 1 of these beam portions may also be omitted. In the above embodiment, the 1 st beam portion 115b is provided on the surface of the 1 st main body portion 115a on the main surface 12b side, but the 1 st beam portion 115b may be provided on the surface of the 1 st main body portion 115a on the main surface 12a side. This aspect is also the same for other beam portions. The shape of the 1 st and 2 nd torsion bars 145, 155, 146, 156 is not limited, and may be any shape such as a rod.

The 1 st optical function portion 17 and the 2 nd optical function portion 18 may have any shape such as a circular shape or an octagonal shape when viewed from the Z-axis direction. The optical device 10 may include a movable portion provided with an optical functional portion other than the mirror surface 11a, instead of the movable mirror 11. Examples of the other optical functional portion include a lens. The actuator unit 16 is not limited to an electrostatic actuator, and may be, for example, a piezoelectric actuator, an electromagnetic actuator, or the like. The optical module 1 is not limited to the optical module constituting FTIR, and may be an optical module constituting another optical system.

Description of the symbols

10 … optical device, 11 … movable mirror (movable portion), 11a … mirror surface (optical function portion), 12 … base, 12a … main surface, 14 … st elastic support portion 1, 15 … nd 2 elastic support portion, 111 … main body portion, 112 … frame portion, 112b … nd 2 beam portion, 113 … linking portion, 114 … central portion, 115 … outer edge portion, 115b … st 1 beam portion, 141, 151 … th rod, 141e … th 4 beam portion, 151e … th 6 beam portion, 145, 155 … th 1 st torsion bar (torsion support portion), 146, 156 … nd 2 torsion bar (torsion support portion), 147, 157 … electrode support portion, 147b … th 5 th beam portion, 157b … th 7 th, 161, 163 4 st fixed comb teeth electrode, 161a, 163a … th 1 fixed comb teeth, 162, … th movable comb teeth electrode 164, 685162 a, … th 1 st movable comb teeth electrode 165, … th fixed comb teeth electrode, … th 2 th fixed comb teeth electrode, … th 165, … th 2b, 166 … 2 nd movable comb electrode, 166a … 2 nd movable comb, 171, 181 … nd 2 nd bar, 172, 182 … link, 172b … 8 th beam section, 182b … th 9 th beam section, 175, 185 … extension, 175b … th 10 th beam section, 185b … 11 th beam section, 178, 188 … nonlinear relaxing spring, 179, 189 … electrode support section, 179b … th 12 beam section, 189b … th 13 th beam section.

Claims (32)

1. An optical device, characterized in that,

the disclosed device is provided with:

a base having a main surface;

a movable part having an optical function part;

an elastic support portion connected between the base and the movable portion, and supporting the movable portion so that the movable portion can move in a predetermined direction perpendicular to the main surface;

a fixed comb electrode provided on the base and having a plurality of fixed combs; and

a movable comb-tooth electrode provided on at least one of the movable portion and the elastic support portion, and having a plurality of movable comb-teeth alternately arranged with the plurality of fixed comb-teeth,

the at least one of the movable part and the elastic support part has an electrode support part that supports the movable comb-tooth electrode,

the electrode support portion has a beam portion formed such that a thickness of the electrode support portion in the predetermined direction is thicker than a thickness of the movable comb teeth in the predetermined direction,

the optical device is composed of a substrate having a support layer, a device layer, and an intermediate layer disposed between the support layer and the device layer,

both the fixed comb-tooth electrode and the movable comb-tooth electrode are provided on the device layer.

2. The optical device of claim 1,

the elastic support part is provided with a rod,

the electrode support extends from the rod.

3. The optical device of claim 2,

the movable comb-tooth electrode is located on the opposite side of the movable part with respect to the center of the rod in the extending direction of the rod.

4. The optical device of claim 2,

the movable comb-tooth electrode is located on the movable portion side with respect to the center of the rod in the extending direction of the rod.

5. The optical device of claim 2,

the lever has a beam portion formed such that the thickness of the lever in the predetermined direction is thicker than the thickness of the movable comb teeth in the predetermined direction.

6. The optical device of claim 3,

the lever has a beam portion formed such that the thickness of the lever in the predetermined direction is thicker than the thickness of the movable comb teeth in the predetermined direction.

7. The optical device of claim 4,

the lever has a beam portion formed such that the thickness of the lever in the predetermined direction is thicker than the thickness of the movable comb teeth in the predetermined direction.

8. The optical device of claim 2,

the elastic support portion has a plurality of the electrode support portions extending from the rod,

the plurality of electrode supports are arranged in a row along the extending direction of the rod.

9. The optical device of claim 3,

the elastic support portion has a plurality of the electrode support portions extending from the rod,

the plurality of electrode supports are arranged in a row along the extending direction of the rod.

10. The optical device of claim 4,

the elastic support portion has a plurality of the electrode support portions extending from the rod,

the plurality of electrode support portions are arranged in a row along the extending direction of the rod.

11. The optical device of claim 5,

the elastic support portion has a plurality of the electrode support portions extending from the rod,

the plurality of electrode supports are arranged in a row along the extending direction of the rod.

12. The optical device of claim 6,

the elastic support portion has a plurality of the electrode support portions extending from the rod,

the plurality of electrode support portions are arranged in a row along the extending direction of the rod.

13. The optical device of claim 7,

the elastic support portion has a plurality of the electrode support portions extending from the rod,

the plurality of electrode supports are arranged in a row along the extending direction of the rod.

14. The optical device of claim 2,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode supporting portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is the same as that of the movable comb teeth,

w2: the width of the movable comb teeth when viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

15. The optical device of claim 3,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode supporting portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is the same as that of the movable comb teeth,

w2: a width of the movable comb teeth as viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

16. The optical device of claim 4,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode supporting portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is the same as that of the movable comb teeth,

w2: a width of the movable comb teeth as viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

17. The optical device of claim 5,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode support portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is the same as that of the movable comb teeth,

w2: a width of the movable comb teeth as viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

18. The optical device of claim 6,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode supporting portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is the same as that of the movable comb teeth,

w2: a width of the movable comb teeth as viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

19. The optical device of claim 7,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode supporting portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is the same as that of the movable comb teeth,

w2: a width of the movable comb teeth as viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

20. The optical device of claim 8,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode supporting portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is the same as that of the movable comb teeth,

w2: a width of the movable comb teeth as viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

21. The optical device of claim 9,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode supporting portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is the same as that of the movable comb teeth,

w2: a width of the movable comb teeth as viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

22. The optical device of claim 10,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode supporting portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is equal to that of the movable comb teeth,

w2: a width of the movable comb teeth as viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

23. The optical device of claim 11,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode supporting portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is the same as that of the movable comb teeth,

w2: a width of the movable comb teeth as viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

24. The optical device of claim 12,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode supporting portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is equal to that of the movable comb teeth,

w2: a width of the movable comb teeth as viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

25. The optical device of claim 13,

a thickness T1 of the electrode support part in the predetermined direction and a thickness T2 of the movable comb teeth in the predetermined direction satisfy the following formula (1):

T1³×W1/C1³≧N×T2³×W2/C2³…（1）

in the formula (1), the reaction mixture is,

w1: a width of the electrode supporting portion when viewed from the predetermined direction,

c1: a length of the electrode support portion when viewed from the predetermined direction,

n: the number of the movable comb teeth is the same as that of the movable comb teeth,

w2: a width of the movable comb teeth as viewed from the predetermined direction,

c2: a length of the movable comb teeth when viewed from the predetermined direction.

26. The optical device of claim 1,

the electrode support portion is provided to the movable portion so as to be arranged along an outer edge of the movable portion.

27. The optical device of claim 26,

the movable part has: a main body portion provided with the optical function portion; a frame portion that surrounds the main body portion when viewed from the predetermined direction; and a coupling portion that couples the main body portion and the frame portion to each other,

the electrode support portion is constituted by the frame portion.

28. The optical device of claim 26,

the movable part has a main body part including a central part and an outer edge part, the optical function part is provided in the central part,

the electrode support portion is constituted by the outer edge portion,

the beam portion is formed such that the thickness of the outer edge portion in the predetermined direction is thicker than the thickness of the central portion in the predetermined direction.

29. The optical device of claim 1,

the elastic supporting part is provided with a pair of rods and a connecting rod arranged between the rods,

the electrode support is constituted by the link.

30. The optical device of claim 1,

the elastic supporting part is provided with a pair of rods and a connecting rod arranged between the rods,

the electrode supporting part is composed of the pair of rods and the connecting rod,

the movable comb-tooth electrode is disposed over the pair of rods and the link.

31. The optical device of claim 1,

the elastic support portion has a rod and an extending portion extending between the rod and the movable portion when viewed from the predetermined direction,

the electrode support portion is constituted by the extension portion.

32. The optical device according to any one of claims 1 to 31,

the elastic support portion has: a 1 st torsion support portion extending along a 2 nd direction perpendicular to the predetermined direction; a nonlinear relaxation spring connected between the 1 st torsion support portion and the movable portion; a 2 nd torsion support portion; and a rod, which is connected with the rod,

the lever is connected to the movable part via the 1 st torsion support part and is connected to the base via the 2 nd torsion support part,

the nonlinear relaxing spring is configured such that, in a state where the movable portion moves in the predetermined direction, a deformation amount of the nonlinear relaxing spring around the 2 nd direction is smaller than a deformation amount of the 1 st torsion support portion around the 2 nd direction, and a deformation amount of the nonlinear relaxing spring in a 3 rd direction perpendicular to the predetermined direction and the 2 nd direction is larger than a deformation amount of the 1 st torsion support portion in the 3 rd direction.

Images