CN107271332B - A kind of MEMS fluid viscosity sensor chip and preparation method thereof based on face interior resonance - Google Patents
A kind of MEMS fluid viscosity sensor chip and preparation method thereof based on face interior resonance Download PDFInfo
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- CN107271332B CN107271332B CN201710538627.6A CN201710538627A CN107271332B CN 107271332 B CN107271332 B CN 107271332B CN 201710538627 A CN201710538627 A CN 201710538627A CN 107271332 B CN107271332 B CN 107271332B
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- G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
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Abstract
The invention discloses a kind of MEMS fluid viscosity sensor chip and preparation method thereof based on face interior resonance, the oscillator including silicon base, four elastic clamped beams and centre, two conducting wires are arranged on the clamped beam of oscillator two sides.The additional magnet of chip bottom is for providing stationary magnetic field, magnetic induction line direction is perpendicular to chip plane, a wherein conducting wire is passed through to the sinusoidal alternating current of certain frequency, then the clamped beam where this root conducting wire is used as in plane vibration by alternation Lorentz force work, to driving oscillator and other side clamped beam to do forced vibration, then an other conducting wire cutting magnetic induction line and generate induced electromotive force.The micro- two-end fixed beam structure of H-type silicon is immersed in detected fluid, the frequency for changing sinusoidal alternating current makes clamped beam that resonance occur, and can get resonance frequency of the clamped beam in detected fluid according to the output amplitude size of induced electromotive force.The measurement of fluid viscosity is realized according to the change of the H-type two-end fixed beam resonance frequency in different fluid and quality factor.
Description
Technical field
The present invention relates to MEMS (Micro Electromechanical Systems, micromachine electronic system) sensings
Device field, more specifically to a kind of MEMS fluid viscosity sensor chip and preparation method thereof based on face interior resonance.
Background technique
MEMS viscosity resonant transducer is the pasting parameter based on resonance principle detection fluid, small with MEMS sensor
The features such as type, integrated, multifunction, before the fields such as aerospace, oil exploration, biomedicine have a wide range of applications
Scape.But current MEMS viscosity resonant transducer still has deficiency, and when measuring to viscous fluid, viscosity of fluid gets over ambassador's sensing
Damping force suffered by resonator is bigger in device chip, and the quality factor of viscosity transducer is substantially reduced, and reduces the measurement essence of sensor
Degree and sensitivity, limit extensive use of the MEMS viscosity transducer in the diversity fluid such as high viscosity, macromolecular.In recent years
Come, domestic and international scientific research institution optimizes the structural principle and processing technology of viscosity transducer chip, establishes optimization resonator
Mathematical model, structure design etc. is carried out to sensor chip, to improve the quality factor of viscosity transducer, but most researchs
It is big that the resonating device of middle sensor is placed in fluid suffered damping force, makes viscosity transducer to the measurement accuracy of High-Sr granite
Difference, sensitivity are low, are not able to satisfy the measurement request to High-Sr granite.
It is still at present using the cantilever beam based on resonance principle as main study subject to the measurement of fluid viscosity.Utilize resonance
Principle measures fluid viscosity, i.e., the vibration characteristics of resonator is determined by the viscosity of fluid in sensor chip, therefore passes through measurement
The resonance frequency and quality factor of resonator can find out the viscosity of fluid to be measured, and on-line continuous measurement may be implemented, and have steady
The advantages that qualitative good, measurement accuracy is higher.But using cantilever beam as resonating device, according to the design feature of its own and vibration side
To, the damping area contacted with fluid is big, and is press-filming damping between fluid, thus because of quality factor in High-Sr granite
Substantially reduce affect viscosity measurement range and precision, for common high viscosity, non-newtonian fluid viscosity measure model
Enclose that small, precision is low.
Summary of the invention
The purpose of the present invention is to provide a kind of based on the MEMS fluid viscosity sensor chip of face interior resonance and its preparation
Press-filming damping between fluid is replaced by synovial membrane resistance by realizing the in plane vibration of the micro- two-end fixed beam structure of H-type silicon by method
Buddhist nun significantly reduces viscosity transducer chip suffered damping force in the fluid environment, improves viscosity transducer to fluid viscosity
Measurement accuracy, sensitivity and stability；With effective solution exist in the prior art fluid damping suffered by MEMS viscosity transducer it is big,
The work problem low to High-Sr granite measurement accuracy.
To achieve the goals above, the present invention adopts the following technical scheme that:
A kind of MEMS fluid viscosity sensor chip based on face interior resonance, including the micro- two-end fixed beam structure of H-type silicon and
In silicon base；The micro- two-end fixed beam structure of H-type silicon includes oscillator, the four elastic clamped beams and conducting wire for being set to oscillator two sides；
Four elastic clamped beams include the first elastic clamped beam, the second elastic clamped beam, third elasticity clamped beam and the 4th
Elastic clamped beam；First elastic clamped beam and the second elastic clamped beam are arranged in parallel in the oscillator side of rectangle, and third elasticity is solid
Strutbeam and the 4th elastic clamped beam are arranged in parallel in the oscillator other side of rectangle；First elastic clamped beam and the 4th elastic clamped beam
It is located along the same line；Second elastic clamped beam and third elasticity clamped beam are located at on straight line；Oscillator and four elasticity are clamped
Beam is in H-type；Conducting wire includes two, and one article is set on the first elastic clamped beam and the 4th elastic clamped beam, and another is set to
On second elastic clamped beam and third elasticity clamped beam；
The elastic clamped beam of four of the micro- two-end fixed beam structure of H-type silicon end is fixed in the cavity of silicon base；
When measuring fluid viscosity, the MEMS fluid density sensor chip based on face interior resonance is completely immersed in detected fluid
In, the direction of vibration of oscillator is the direction y in the micro- two-end fixed beam structure of H-type silicon, and the direction z is perpendicular to oscillator (1) upper surface, the side x
To the length direction for being parallel to elastic clamped beam；The direction x, the direction y and the direction z are mutually perpendicular to form right angle coordinate system；
The viscosity η of detected fluidfAre as follows:
Wherein, ηfWith ρfRespectively the measurement viscosity of fluid to be measured and measurement density, C is constant, ffIt is clamped for H-type both-end
The resonance frequency of beam in a fluid, QfAnd QvacRespectively quality of the H-type two-end fixed beam in detected fluid and vacuum environment because
Son；
The density p of detected fluidfAre as follows:
Wherein, f is the eigenfrequency of the micro- two-end fixed beam structure of H-type silicon, h, l and ρcThe respectively micro- both-end of H-type silicon is clamped
Thickness, length and the density of girder construction, w are the width of elastic clamped beam, and E is the Young mould of the micro- two-end fixed beam structure of H-type silicon
Amount, ffluidFor resonance frequency of the micro- two-end fixed beam structure of H-type silicon in detected fluid.
Further, by η in formula (1)fWith ρfThe reference value of testing liquid is replaced with, other parameters substitute into test value, meter
Calculate constant C.
Further, the additional magnet in silicon base bottom, for providing extraneous stationary magnetic field, magnetic field for sensor chip
Direction is perpendicular to sensor core plate plane.
Further, the MEMS fluid viscosity sensor chip based on face interior resonance can be realized in plane vibration, and
It is slide-film damping between detected fluid.
Further, the oscillator is rectangular section mass block, and when measurement carries out in plane vibration, direction of vibration in a fluid
It is parallel to sensor core plate plane.
Further, a conducting wire is passed through sinusoidal alternating current in two conducting wires, then the elastic clamped beam at place is constant
In plane vibration is done by alternation Lorentz force in magnetic field, direction of vibration is parallel to sensor core plate plane, and drives oscillator and another
Side clamped beam generates forced vibration；Another conducting wire cutting magnetic induction line in magnetic field generates induced electromotive force.
Further, the end of two conducting wires is equipped with pad, and pad is arranged in silicon base, for external circuits
Connection.
Further, the micro- two-end fixed beam structure of H-type silicon and silicon base upper surface cover one layer of insulating silicon nitride protective layer.
Further, oscillator is made with four elastic clamped beams for being set to oscillator two sides of monocrystalline silicon.
A kind of preparation method of the MEMS fluid viscosity sensor chip based on face interior resonance, comprising the following steps:
1) p-type (100) crystal face SOI piece is cleaned up；SOI piece is divided into three layers from top to bottom: upper layer monocrystalline silicon, titanium dioxide
Silicon buried layer and underlying monocrystalline silicon；
2) two-sided oxidation is carried out to SOI piece at 900 DEG C~1200 DEG C, obtains silicon dioxide layer；
3) it using the part of silica layer of RIE plasma etching technology removal SOI piece top layer, exposes and wire shape
Then identical section top monocrystalline silicon sputters production metal layer in SOI piece topsheet surface, then forms sensing using stripping technology
The plain conductor of device chip；
4) DRIE deep reaction ion etching technology is used, forms structure sheaf in SOI piece front；
5) using KOH wet processing etching back chamber to self-stopping technology layer；
6) HF buffer solution wet etching is used, H-shaped two-end fixed beam is discharged；Obtain the MEMS fluid based on face interior resonance
Viscosity transducer chip.
A kind of MEMS fluid viscosity sensor chip based on face interior resonance of the present invention has at least the following advantages: the present invention
MEMS fluid viscosity sensor chip use in plane vibration mode, the damper type between H-type two-end fixed beam and fluid is
Slide-film damping, compared to the press-filming damping between traditional resonator and fluid, fluid damping forces are substantially reduced, and it is glutinous to be conducive to raising MEMS
The quality factor for spending sensor, realizes the accurate measurement of High-Sr granite, viscosity measurement range is up to 1mPas~100mPa
s；It can be used for the viscosity measurement of non-newtonian fluid, and have good measurement accuracy and sensitivity.The fluid viscosity sensor chip
It can be realized the viscosity measurement of face interior resonance and High-Sr granite, measurement accuracy is better than ± 1%FS.
Detailed description of the invention
Fig. 1 is a kind of principle schematic diagram of the MEMS fluid viscosity sensor chip based on face interior resonance of the present invention.
Fig. 2 is the in plane vibration schematic diagram of H-type two-end fixed beam structure of the present invention.
Fig. 3 is a kind of preparation technology flow chart of the MEMS fluid viscosity sensor chip based on face interior resonance of the present invention.
Figure label is as follows:
Specific embodiment
Below in conjunction with attached drawing, and by example, preferred implementation of the invention is described in further detail.
Fig. 1 is principle schematic diagram of the invention.As shown in Figure 1, a kind of MEMS stream based on face interior resonance of the present invention
Body viscosity transducer chip, including the micro- two-end fixed beam structure of H-type silicon and silicon base 6 based on vibration principle, the micro- both-end of H-type silicon
Fixed beam structure includes oscillator 1, elastic clamped beam 2~5, conducting wire 7~8 and pad 9~12, which can
It realizes between in plane vibration, with detected fluid to be slide-film damping, is substantially reduced fluid damping active force, improves viscosity transducer
Quality factor and measurement accuracy.
The additional magnet in 6 bottom of silicon base, for providing extraneous stationary magnetic field for sensor chip, magnetic direction is vertical
In chip plane；Two conducting wires 7~8 are arranged on the elastic clamped beam 2~5 of 1 two sides of oscillator, will wherein a conducting wire be led to
Enter the sinusoidal alternating current of certain frequency, then the clamped beam at place is acted on by alternation Lorentz force in stationary magnetic field and done in face
Vibration, direction of vibration are parallel to chip plane, and oscillator 1 and other side clamped beam is driven to generate forced vibration, then lead for another
Line in magnetic field cutting magnetic induction line to generating induced electromotive force；The frequency that change is passed through sinusoidal alternating current to immerse tested
Resonance occurs for the H-type clamped beam in fluid, can be obtained clamped beam in measured stream according to the output amplitude size of induced electromotive force
Resonance frequency in body；Fluid viscosity is realized according to the change of beam resonant frequency clamped in different fluid and quality factor
Measurement.
In conjunction with Fig. 2, it is further known that, the direction of vibration of oscillator is the direction y in the micro- two-end fixed beam structure of H-type silicon, realizes H
The in plane vibration of the micro- two-end fixed beam structure of type silicon, and be slide-film damping between fluid, it is effectively reduced between detected fluid
Resonance damping；Using COMSOL finite element simulation obtain quality of the micro- two-end fixed beam structure of H-type silicon in normal heptane fluid because
Son has the higher quality factor, is conducive to the accurate measurement to High-Sr granite up to 277.28.
Half-power method determines quality factor q are as follows:
Wherein, f is the resonance frequency of the micro- two-end fixed beam structure of H-type silicon, and Δ f is that half-power peak width (can be by H-type silicon
The resonance curve of micro- two-end fixed beam structure is fitted to obtain).
The measurement working strategy of MEMS fluid viscosity sensor chip based on face interior resonance meets:
Wherein, ηfWith ρfRespectively the measurement viscosity of fluid to be measured and measurement density, C is constant, ffIt is clamped for H-type both-end
The resonance frequency of beam in a fluid, QfAnd QvacRespectively quality factor of the H-type two-end fixed beam in fluid and vacuum environment.
In above formula, by ηfWith ρfThe reference value of testing liquid is replaced with, other parameters substitute into test value, can calculate constant C.
The density p of detected fluidfAre as follows:
Wherein, f is the eigenfrequency of the micro- two-end fixed beam structure of H-type silicon, h, l and ρcThe respectively micro- both-end of H-type silicon is clamped
Thickness, length and the density of girder construction, w are the width of elastic clamped beam, and E is the Young mould of the micro- two-end fixed beam structure of H-type silicon
Amount, ffluidFor resonance frequency of the micro- two-end fixed beam structure of H-type silicon in detected fluid.
The design size parameter of the micro- two-end fixed beam structure of H-type silicon are as follows:
Wherein, w1For the micro- two-end fixed beam structure width of H-type silicon；w2For the width of elastic clamped beam；L1For elastic clamped beam
Length；L2For the length of oscillator；W=w2；L1+L1+L2=l.
Fluid structurecoupling simulation model is established to H-type two-end fixed beam using COMSOL finite element emulation software, uses pressure
Fluid environment is simulated in sound physical properties field, and H-type two-end fixed beam is single crystal silicon material, and fluid parameter selects common alcohols and alkane
Class: ethyl alcohol, normal heptane, n-hexane, normal octane.Simulation result are as follows:
| Fluid | Resonance frequency f (kHz) | Quality factor q |
| Ethyl alcohol | 15.75 | 196.88 |
| Normal heptane | 16.37 | 277.28 |
| N-hexane | 16.81 | 240.14 |
| Normal octane | 16.43 | 273.83 |
A kind of MEMS fluid viscosity sensor core based on face interior resonance proposed by the present invention it can be seen from simulation result
Piece quality factor with higher is conducive to the measurement range and measurement accuracy that improve fluid viscosity, realizes High-Sr granite
Viscosity measurement.
In conjunction with Fig. 3, illustrate a kind of preparation process flow of MEMS fluid viscosity sensor chip based on face interior resonance:
1) referring to a in Fig. 3, the soi wafer cleaned using HF solution, soi wafer is p-type (100) crystal face；The SOI silicon
Piece is divided into three layers from top to bottom: upper layer monocrystalline silicon 13, buried layer of silicon dioxide 14 and underlying monocrystalline silicon 15；
2) referring to b in Fig. 3, two-sided oxidized silicon chip is carried out at 900 DEG C~1200 DEG C, obtains two on soi wafer two sides
The thickness of silicon oxide layer 16 is about 0.3 μm；
3) it is exposed referring to c in Fig. 3 using the partial oxidation silicon layer 16 of RIE plasma etching technology removal silicon wafer top layer
Section top monocrystalline silicon 13 identical with conducting wire, bond pad shapes, then in monocrystalline silicon surface sputtering production with a thickness of the Al of 500nm
Metal layer or the metal layer of other structures 17, then the plain conductor 7 using removing (lift-off) technique formation sensor chip
~8 and pad 9~12；
4) as shown in d in Fig. 3, using DRIE deep reaction ion etching technology, structure sheaf is formed in front side of silicon wafer；
5) as shown in e in Fig. 3, back chamber is etched to self-stopping technology layer (buried layer of silicon dioxide 14) using KOH wet processing；
6) as shown in f in Fig. 3, using HF buffer solution wet etching, H-shaped two-end fixed beam is discharged；
7) upper deposited silicon nitride 17 carries out insulation protection on the front side of the chip, to realize the complicated stream such as conduction, corrosivity
The viscosity of body measures, and corresponding silicon nitride is etched away at pad 9~12, realizes electrical connection.
The key technical indexes of the invention is as follows:
1, measuring medium: newton and non-newtonian fluid；
2, viscosity measurement range: 1mPas~100mPas；
3, measurement accuracy: it is better than ± 1%FS；
4, operating temperature: -25 DEG C~120 DEG C；
5, environmental pressure :≤100MPa.
The foregoing is merely one embodiment of the present invention, it is not all of or unique embodiment, this field is common
Any equivalent transformation that technical staff takes technical solution of the present invention by reading description of the invention, is the present invention
Claim covered.
Claims (8)
1. a kind of MEMS fluid viscosity sensor chip based on face interior resonance, which is characterized in that clamped including the micro- both-end of H-type silicon
Girder construction and silicon base (6)；The micro- two-end fixed beam structure of H-type silicon includes oscillator (1), four bullets for being set to oscillator (1) two sides
Property clamped beam and conducting wire (7~8)；
Four elastic clamped beams include the first elastic clamped beam (2), the second elastic clamped beam (3), third elasticity clamped beam (4) and
4th elastic clamped beam (5)；First elastic clamped beam (2) and the second elastic clamped beam (3) are arranged in parallel in the oscillator (1) of rectangle
Side, third elasticity clamped beam (3) and the 4th elastic clamped beam (4) are arranged in parallel in oscillator (1) other side of rectangle；First bullet
Property clamped beam (2) and the 4th elastic clamped beam (5) be located along the same line；Second elastic clamped beam (3) and third elasticity are clamped
Beam (4) is located at on straight line；Oscillator (1) and four elastic clamped beams are in H-type；Conducting wire (7~8) includes two, and one is set to
On first elastic clamped beam (2) and the 4th elastic clamped beam (5), another is set to the second elastic clamped beam (3) and third bullet
On property clamped beam (4)；
The elastic clamped beam of four of the micro- two-end fixed beam structure of H-type silicon end is fixed in the cavity of silicon base (6)；
When measuring fluid viscosity, the MEMS fluid viscosity sensor chip based on face interior resonance immerses in detected fluid, and H-type silicon is micro-
The direction of vibration of oscillator (1) is the direction y in two-end fixed beam structure, and the direction z is oriented parallel to perpendicular to oscillator (1) upper surface, x
The length direction of elastic clamped beam；The direction x, the direction y and the direction z are mutually perpendicular to form right angle coordinate system；
The viscosity η of detected fluidfAre as follows:
Wherein, ηfWith ρfRespectively the measurement viscosity of fluid to be measured and measurement density, C is constant, ffExist for H-type two-end fixed beam
Resonance frequency in fluid, QfAnd QvacRespectively quality factor of the H-type two-end fixed beam in detected fluid and vacuum environment；
The density p of detected fluidfAre as follows:
Wherein, f is the eigenfrequency of the micro- two-end fixed beam structure of H-type silicon, h, l and ρcThe respectively micro- two-end fixed beam structure of H-type silicon
Thickness, length and density, w is the width of elastic clamped beam, and E is the Young's modulus of the micro- two-end fixed beam structure of H-type silicon, ffluid
For resonance frequency of the micro- two-end fixed beam structure of H-type silicon in detected fluid；
By η in formula (1)fWith ρfThe reference value of testing liquid is replaced with, other parameters substitute into test value, calculate constant C；
The MEMS fluid viscosity sensor chip based on face interior resonance can be realized in plane vibration, and between detected fluid
For slide-film damping.
2. a kind of MEMS fluid viscosity sensor chip based on face interior resonance according to claim 1, which is characterized in that
The additional magnet in silicon base (6) bottom, for providing extraneous stationary magnetic field for sensor chip, magnetic direction is perpendicular to sensing
Device chip plane.
3. a kind of MEMS fluid viscosity sensor chip based on face interior resonance according to claim 1, it is characterised in that:
The oscillator (1) is rectangular section mass block, and when measurement carries out in plane vibration in a fluid, and direction of vibration is parallel to sensor core
Plate plane.
4. a kind of MEMS fluid viscosity sensor chip based on face interior resonance according to claim 1, which is characterized in that
A conducting wire is passed through sinusoidal alternating current in two conducting wires, then the elastic clamped beam at place is in stationary magnetic field by alternation Lorentz
Power does in plane vibration, and direction of vibration is parallel to sensor core plate plane, and oscillator and other side clamped beam is driven to generate forced oscillation
It is dynamic；Another conducting wire cutting magnetic induction line in magnetic field generates induced electromotive force.
5. a kind of MEMS fluid viscosity sensor chip based on face interior resonance according to claim 1, which is characterized in that
The end of two conducting wires is equipped with pad, and pad is arranged on silicon base (6), for the connection with external circuits.
6. a kind of MEMS fluid viscosity sensor chip based on face interior resonance according to claim 1, which is characterized in that
The micro- two-end fixed beam structure of H-type silicon and silicon base (6) upper surface cover one layer of insulating silicon nitride protective layer.
7. a kind of MEMS fluid viscosity sensor chip based on face interior resonance according to claim 1, which is characterized in that
Oscillator (1) and four elastic clamped beams for being set to oscillator (1) two sides are made of monocrystalline silicon.
8. a kind of system of the MEMS fluid viscosity sensor chip based on face interior resonance described in any one of claims 1 to 7
Preparation Method, which comprises the following steps:
1) p-type (100) crystal face SOI piece is cleaned up；SOI piece is divided into three layers from top to bottom: upper layer monocrystalline silicon (13), titanium dioxide
Silicon buried layer (14) and underlying monocrystalline silicon (15)；
2) two-sided oxidation is carried out to SOI piece at 900 DEG C~1200 DEG C, obtains silicon dioxide layer (16)；
3) using RIE plasma etching technology removal SOI piece top layer part of silica layer (16), expose with conducting wire (7~
8) then the identical section top monocrystalline silicon (13) of shape sputters production metal layer (17) in SOI piece topsheet surface, then using stripping
The plain conductor of separating process formation sensor chip；
4) DRIE deep reaction ion etching technology is used, forms structure sheaf in SOI piece front；
5) using KOH wet processing etching back chamber to self-stopping technology layer；
6) HF buffer solution wet etching is used, H-shaped two-end fixed beam is discharged；Obtain the MEMS fluid viscosity based on face interior resonance
Sensor chip.
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| CN107817045B (en) * | 2017-11-28 | 2023-06-23 | 吉林大学 | Magnetic coupling resonant frequency detection device and frequency detection method |
| CN107976274B (en) * | 2018-01-18 | 2023-05-23 | 吉林大学 | Pressure detection device and method based on synchronous resonance |
| CN111537396B (en) * | 2020-04-24 | 2021-02-19 | 西安交通大学 | Multi-operation-mode piezoelectric viscosity sensor chip and working method and preparation method thereof |
| CN115479867B (en) * | 2022-08-02 | 2024-05-28 | 广东工业大学 | Method for rapidly distinguishing non-Newtonian fluid |
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|---|
| A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes;Libo Zhao等;《sensors》;20160606;第16卷;全文 * |
| A Novel Piezoresistive Accelerometer with SPBs to Improve the Tradeoff between the Sensitivity and the Resonant Frequency;Yu Xu等;《Sensors》;20160206;第16卷;全文 * |
| A Novel Slope Method for Measurement of Fluid Density with a Micro-cantilever under Flexural and Torsional Vibrations;Libo Zhao等;《sensors》;20160911;第16卷;全文 * |
| Density measurement sensitivity of micro-cantilevers influenced byshape dimensions and operation modes;Libo Zhao等;《Sensors and Actuators B》;20170201(第245期);全文 * |
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