CN103472410A - Dual-torsion-pendulum type micro-electro-mechanical magnetic filed sensor - Google Patents

Dual-torsion-pendulum type micro-electro-mechanical magnetic filed sensor Download PDF

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CN103472410A
CN103472410A CN2013104559852A CN201310455985A CN103472410A CN 103472410 A CN103472410 A CN 103472410A CN 2013104559852 A CN2013104559852 A CN 2013104559852A CN 201310455985 A CN201310455985 A CN 201310455985A CN 103472410 A CN103472410 A CN 103472410A
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electric capacity
hole
rocks
pad
wire
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CN103472410B (en
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陈洁
梁秋实
周志浩
薛铭豪
景晟
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Southeast University
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Southeast University
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Abstract

The invention discloses a dual-torsion-pendulum type micro-electro-mechanical magnetic filed sensor. The dual-torsion-pendulum type micro-electro-mechanical magnetic filed sensor comprises a substrate, a bottom electrode layer, a sacrificial layer, a metal layer and a silicon nitride layer, wherein the substrate, the bottom electrode layer, the sacrificial layer, the metal layer and the silicon nitride layer are overlaid from bottom to top in sequence. An anchoring area is arranged on the top face of the silicon nitride layer, a second bonding pad, a fourth bonding pad and two fifth bonding pads are arranged on one side of the anchoring area, and a first bonding pad, a third bonding pad, a tenth bonding pad and two sixth bonding pads are arranged on the other side of the anchoring area; a first torsion pendulum beam is arranged in the middle of the silicon nitride layer, and the first torsion pendulum beam is fixedly connected with the anchoring area through two first supporting beams; a second torsion pendulum beam is arranged on the inner side of the first torsion pendulum beam; first drive metal wires and second drive metal wires are arranged on the edge of the first torsion pendulum beam and the second torsion pendulum beam; a first capacitor and a second capacitor are arranged on the bottom face of the first torsion pendulum beam; a third capacitor and a fourth capacitor are arranged on the bottom face of the second torsion pendulum beam. The dual-torsion-pendulum type micro-electro-mechanical magnetic filed sensor is capable of measuring the amplitude and the angles of magnetic fields, and is simple in structure.

Description

A kind of pair of micro electronmechanical magnetic field sensor of torsional pendulum type
Technical field
The invention belongs to sensor technical field, specifically, relate to a kind of pair of micro electronmechanical magnetic field sensor of torsional pendulum type.
Background technology
Magnetic field sensor has long history, and the invention of compass is to the Modern Traffic navigation, and magnetic field sensor is more and more paid attention to by the people.
Magnetic field sensor and our life are closely bound up, and all there is the relevant information in Huo Yu magnetic field, magnetic field in many places of nature and human society life.Utilize the magnetic field of the artificial permanent magnet generation arranged, can be used as the carrier of many kinds of information.Therefore, survey, gather, store, change, reappear and monitor the task of the various information of carrying in various magnetic field and magnetic field, naturally just drop on it magnetic field sensor.Develop the Magnetic Sensor that utilizes various physics, chemistry and biological effect, and be used widely in the various aspects of scientific research, production and social life, born the task of probing into all information.
Development along with MEMS (micro electro mechanical system) (MEMS) technology, greatly promoted the development of MEMS magnetic field sensor, the structure that some Miniature magnetic field sensors occurred, the MEMS technique of new development simultaneously can utilize the English full name of IC(to be on silicon substrate: integrated circuit, Chinese is: integrated circuit) aftertreatment technology is made various physical construction, for new approach has been opened up in the design of magnetic field sensor, in recent years, the structure of some Miniature magnetic field sensors has been proposed, as French Vincent Beroulle, the MEMS magnetic field sensor that Laurent Latorre proposes, do pressure drag near semi-girder Yu Mao district, by measuring the output detections magnetic field of pressure drag.Torsional pendulum type MEMS magnetic field sensor is proposed by people such as Beverley Eyre the earliest, measures the amplitude that structure is rocked after the magnetic fields lower stress, measures the size in magnetic field.These magnetic field sensors can only be measured the size in magnetic field.Magnetic field is a vector, so very important to magnetic direction information.
Summary of the invention
technical matters:technical matters to be solved by this invention is: a kind of pair of micro electronmechanical magnetic field sensor of torsional pendulum type is provided, and this magnetic field sensor can be measured magnetic field amplitude and angle, and this magnetic field sensor is simple in structure.
technical scheme:for solving the problems of the technologies described above, the technical solution used in the present invention is:
A kind of pair of micro electronmechanical magnetic field sensor of torsional pendulum type, it is characterized in that, this magnetic field sensor comprises substrate, bottom electrode layer, sacrifice layer, metal level and the silicon nitride layer that stack arranges successively from bottom to top, sacrifice layer, metal level and silicon nitride layer are hollow structure, the end face of silicon nitride layer is provided with the anchor district, the anchor district is provided with the second pad, the 4th pad and two the 5th pad ,Mao district another sides on one side and is provided with the first pad, the 3rd pad, the tenth pad and two the 6th pads; The middle part of silicon nitride layer is provided with first and rocks beam, and first rocks beam is fixedly connected with by two the first brace summer Yu Mao districts, and first rocks beam and the first brace summer in vacant state; The first inboard of rocking beam is provided with second and rocks beam, and second rocks beam is fixedly connected with the first inwall that rocks beam by two the second brace summers, and second rocks beam and the second brace summer in vacant state; First rocks beam edge and second rocks the beam edge and is laid with the first driving metal wire and second and drives metal wire; The first bottom surface of rocking beam is provided with the first electric capacity and the second electric capacity, and the first end face that rocks beam is provided with the first capacitance leading wire and the second capacitance leading wire; The second bottom surface of rocking beam is provided with the 3rd electric capacity and the 4th electric capacity, and the second end face and the first end face that rocks beam that rocks beam is provided with the 3rd capacitance leading wire and the 4th capacitance leading wire; First rocks in beam the first through hole of being provided with the containing metal post and the second through hole of containing metal post, and the first electric capacity is connected with an end of the first capacitance leading wire by the first through hole, and the other end of the first capacitance leading wire is connected with the first pad; The second electric capacity is connected with an end of the second capacitance leading wire by the second through hole, and the other end of the second capacitance leading wire is connected with the second pad; Second rocks in beam the third through-hole that is provided with the containing metal post and the fourth hole of containing metal post, and the 3rd electric capacity is connected with an end of the 3rd capacitance leading wire by third through-hole, and the 3rd capacitance leading wire other end is connected with the 3rd pad; The 4th electric capacity is connected with the 4th capacitance leading wire one end by fourth hole, and the 4th capacitance leading wire other end is connected with the 4th pad; First drives the two ends of metal wire to be connected with the 5th pad respectively, first rocks beam is provided with the fifth hole of containing metal post and the 6th through hole of containing metal post, the first intermediate ends of the first driving metal wire is connected with an end of the first connecting line by the metal column of fifth hole, and the second intermediate ends of the first driving metal wire is connected with the first connecting line other end by the metal column of the 6th through hole; Second drives the two ends of metal wire to be connected with the 6th pad respectively, first rocks beam is provided with the 7th through hole of containing metal post and the 8th through hole of containing metal post, the 3rd intermediate ends of the second driving metal wire is connected with an end of the second connecting line by the metal column of the 7th through hole, and the 4th intermediate ends of the second driving metal wire is connected with the other end of the second connecting line by the metal column of the 8th through hole; Be provided with the 9th through hole that contains metal column in sacrifice layer, be provided with the tenth through hole of containing metal post in silicon nitride layer, bottom electrode layer is connected with the 7th pad with the tenth through hole by the 9th through hole, metal level.
Further, described the first electric capacity is positioned at first with the second electric capacity and rocks on two limits that beam is relative, and the first electric capacity and the second electric capacity all are not connected to first with the first brace summer and rock on same one side of beam.
Further, described the first electric capacity and the second electric capacity are positioned at the first bottom edge center of rocking beam, and the first electric capacity and the second electric capacity are on the same straight line, and symmetrical.
Further, described the 3rd electric capacity is positioned at second with the 4th electric capacity and rocks on two limits that beam is relative, and the 3rd electric capacity and the 4th electric capacity all are not connected to second with the second brace summer and rock on same one side of beam.
Further, described the 3rd electric capacity and the 4th electric capacity are positioned at the second bottom edge center of rocking beam, and the 3rd electric capacity and the 4th electric capacity are on the same straight line, and symmetrical.
beneficial effect:compared with prior art, the present invention has following beneficial effect:
1. simple in structure, can realize the measurement of magnetic field amplitude and angle.The micro electronmechanical magnetic field sensor of of the present invention pair of torsional pendulum type, utilize two to rock structure and can respond to respectively orthogonal magnetic fields, can realize that like this two magnetic direction motion amplitudes can compare, thereby, by from the first electric capacity, the second electric capacity, the 3rd electric capacity and the 4th capacitance variations relation, obtaining magnetic direction, can obtain the amplitude in magnetic field simultaneously.
2. little, the dependable performance of power consumption.The present invention utilizes and measures two displacements of rocking beam, measures the direction in magnetic field.In whole measuring process, electric current used is direct current, and in addition, the present invention lays metal wire the counteracting of having avoided interaction force, and under same magnetic field condition, the stressed maximum displacement produced of twisted plate is also maximum, so power consumption is little.In addition, capacitance detecting is affected by the external environment less, the sensor that relatively hot drives, and this magnetic field sensor relatively easily drives with Lorentz force, dependable performance.
The accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Fig. 2 is the a-a sectional view in Fig. 1.
Fig. 3 is the b-b sectional view in Fig. 1.
Fig. 4 is the c-c sectional view in Fig. 1.
Fig. 5 is the d-d sectional view in Fig. 1.
Fig. 6 is the e-e sectional view in Fig. 1.
Fig. 7 is the f-f sectional view in Fig. 1.
In figure, have: first rocks beam 1, the first brace summer 2, second rocks beam 3, the second brace summer 4, the first electric capacity 5, the second electric capacity 6, the 3rd electric capacity 7, the 4th electric capacity 8, first drives metal wire 9, second drives metal wire 10, end electric capacity 11, substrate 12, bottom electrode layer 13, sacrifice layer 14, metal level 15, silicon nitride layer 16, anchor district 17, the 3rd intermediate ends 18, the 4th intermediate ends 19, the first intermediate ends 20, the second intermediate ends 21, the first connecting line 22, the second connecting line 23, the first capacitance leading wire 51, the second capacitance leading wire 61, the 3rd capacitance leading wire 71, the 4th capacitance leading wire 81, the first pad 52, the second pad 62, the 3rd pad 72, the 4th pad 82, the 5th pad 92, the 6th pad 102, the 7th pad 112, the first through hole 53, the second through hole 63, third through-hole 73, fourth hole 83, fifth hole 93, the 6th through hole 94, the 7th through hole 103, the 8th through hole 104, the 7th pad 112, the tenth through hole 113, the 9th through hole 114.
Specific embodiments
Below in conjunction with accompanying drawing, technical scheme of the present invention is described in detail.
As shown in Figures 1 to 7, the micro electronmechanical magnetic field sensor of a kind of pair of torsional pendulum type of the present invention, comprise stack arranges successively from bottom to top substrate 12, bottom electrode layer 13, sacrifice layer 14, metal level 15 and silicon nitride layer 16.Sacrifice layer 14, metal level 15 and silicon nitride layer 16 are hollow structure.The end face of silicon nitride layer 16 is provided with anchor district 17.Being provided with the second pad 62, the 4th pad 82 and two the 5th pad 92,Mao district 17 another sides is provided with the first pad 52, the 3rd pad 72, the tenth pad 112 and two the 6th pads 102 on one side in anchor district 17.The middle part of silicon nitride layer 16 is provided with first and rocks beam 1.First rocks beam 1 is fixedly connected with by two the first brace summer 2 Yu Mao districts 17.First rocks beam 1 and the first brace summer 2 in vacant state.The first inboard of rocking beam 1 is provided with second and rocks beam 3, the second and rock beam 3 and be fixedly connected with the first inwall that rocks beam 1 by two the second brace summers 4.Second rocks beam 3 and the second brace summer 4 in vacant state.First rocks beam 1 edge and second rocks beam 2 edges and is laid with the first driving metal wire 9 and second and drives metal wire 10.The first bottom surface of rocking beam 1 is provided with the first electric capacity 5 and the second electric capacity 6.The first end face that rocks beam 1 is provided with the first capacitance leading wire 51 and the second capacitance leading wire 61.The second bottom surface of rocking beam 3 is provided with end face and the first end face that rocks beam 1 that the 3rd electric capacity 7 and the 4th electric capacity 8, the second rocks beam 3 and is provided with the 3rd capacitance leading wire 71 and the 4th capacitance leading wire 81.The first the second through hole 63, the first electric capacity 5 that rock in beam 1 the first through hole 53 of being provided with the containing metal post and containing metal post are connected with an end of the first capacitance leading wire 51 by the first through hole 53, and the other end of the first capacitance leading wire 51 is connected with the first pad 52.The second electric capacity 6 is connected with an end of the second capacitance leading wire 61 by the second through hole 63, and the other end of the second capacitance leading wire 61 is connected with the second pad 62.The second fourth hole 83, the three electric capacity 7 that rock the third through-hole 73 that is provided with the containing metal post in beam 3 and containing metal post are connected with an end of the 3rd capacitance leading wire 71 by third through-hole 73, and the 3rd capacitance leading wire 71 other ends are connected with the 3rd pad 72.The 4th electric capacity 8 is connected with the 4th capacitance leading wire 81 1 ends by fourth hole 83, and the 4th capacitance leading wire 81 other ends are connected with the 4th pad 82; First drives the two ends of metal wire 9 to be connected with the 5th pad 92 respectively,
First rocks beam 1 is provided with the fifth hole 93 of containing metal post and the 6th through hole 94 of containing metal post, the first intermediate ends 20 of the first driving metal wire 9 is connected with an end of the first connecting line 22 by the metal column of fifth hole 93, and the second intermediate ends 21 of the first driving metal wire 9 is connected with first connecting line 22 other ends by the metal column of the 6th through hole 94.Second drives the two ends of metal wire 10 to be connected with the 6th pad 102 respectively, first rocks beam 1 is provided with the 7th through hole 103 of containing metal post and the 8th through hole 104 of containing metal post, the 3rd intermediate ends 18 of the second driving metal wire 10 is connected with an end of the second connecting line 23 by the metal column of the 7th through hole 103, and the 4th intermediate ends 19 of the second driving metal wire 10 is connected with the other end of the second connecting line 23 by the metal column of the 8th through hole 104.Be provided with the 9th through hole 114 that contains metal column in sacrifice layer 14, be provided with the tenth through hole 113 of containing metal post in silicon nitride layer 16, bottom electrode layer 13 is connected with the 7th pad 112 with the tenth through hole 113 by the 9th through hole 114, metal level 15.
Further, described the first electric capacity 5 is positioned at first with the second electric capacity 6 and rocks on two limits that beam 1 is relative, and the first electric capacity 5 and the second electric capacity 6 all are not connected to first with the first brace summer 2 and rock on same one side of beam 1.Such two capacitance profile, while twisting under the transverse magnetic field effect, the residing position of electric capacity torsional displacement maximum, the variation of electric capacity is also maximum like this, improves the sensitivity that transverse magnetic field is measured.
Further, described the first electric capacity 5 and the second electric capacity 6 are positioned at the first bottom edge center of rocking beam 1, and the first electric capacity 5 and the second electric capacity 6 are on the same straight line, and symmetrical.Such two electric capacity are symmetrical, and while twisting under the transverse magnetic field effect, some same components just can be offset, and stay absolute difference, reduce error.
Further, described the 3rd electric capacity 7 is positioned at second with the 4th electric capacity 8 and rocks on two limits that beam 3 is relative, and the 3rd electric capacity 7 and the 4th electric capacity 8 all are not connected to second with the second brace summer 4 and rock on same one side of beam 3.Such two capacitance profile, while twisting under the longitudinal magnetic field effect, the residing position of electric capacity torsional displacement maximum, the variation of electric capacity is also maximum like this, improves the sensitivity of vertically measuring herein.
Further, described the 3rd electric capacity 7 and the 4th electric capacity 8 are positioned at the second bottom edge center of rocking beam 3, and the 3rd electric capacity 7 and the 4th electric capacity 8 are on the same straight line, and symmetrical.Such two electric capacity are symmetrical, and while twisting under the longitudinal magnetic field effect, some same components just can be offset, and stay absolute difference, reduce error.Further, rock interaction between beam 3 for reducing to drive metal wire to rock beam 1 and second first, described driving metal wire as far as possible in position relatively far away, so just can make the residing position displacement of electric capacity large as far as possible in two are rocked beam, improves sensitivity.
The magnetic field sensor course of work of this structure is: as shown in Figure 1, drive in metal wire 9, the second driving metal wire 10 and apply a DC current arbitrarily at first of magnetic field sensor, under magnetic fields, structure can deform, and measures the capacitance variations of the first electric capacity 5, the second electric capacity 6, the 3rd electric capacity 7 and the 4th electric capacity 8.The first electric capacity 5 and the second electric capacity 6 are positioned at the first bottom edge center of rocking beam 1, and the first electric capacity 5 and the second electric capacity 6 are on the same straight line, and symmetrical.At transverse magnetic field B h(B hcross stream component for magnetic field) under effect, first drives metal wire 9 and second to drive the effect that in metal wire 10, (supposing that electric current is clockwise direction) will be magnetic field force induced, the first electric capacity 5 rocks the residing position of beam 1 first and will be bent downwardly, electric capacity diminishes, the second electric capacity 6 rocks the residing position of beam 1 first and will be bent upwards, and it is large that electric capacity becomes.Rock beam 3 outer side center due to the 3rd electric capacity 7 and the 4th electric capacity 8 in second, electric capacity can not change.Can obtain like this absolute value that the first electric capacity 5 and the second electric capacity 6 changes and equate, by capacitance variations, can obtain amount of bow, and then can rock the coefficient of torsion of beam 1 according to first, thereby obtain the first stressed transverse magnetic field B that obtains that rocks beam 1 hvalue.And, by the capacitance change of the first electric capacity 5 and the second electric capacity 6, can obtain the direction of transverse magnetic field.
Equally, the 3rd electric capacity 7 and the 4th electric capacity 8 are positioned at the second bottom edge center of rocking beam 3, and the 3rd electric capacity 7 and the 4th electric capacity 8 are on the same straight line, and symmetrical.At longitudinal magnetic field B v(B vcross stream component for magnetic field) under effect, first drives metal wire 9 and second to drive the effect that in metal wire 10, (supposing that electric current is clockwise direction) will be magnetic field force induced, the 4th electric capacity 8 rocks the residing position of beam 3 second and will be bent downwardly, electric capacity diminishes, the 3rd electric capacity 7 rocks the residing position of beam 3 second and will be bent upwards, and it is large that electric capacity becomes.Can obtain like this absolute value that the 3rd electric capacity 7 and the 4th electric capacity 8 changes and equate, capacitance variations can obtain amount of bow, and then can rock the coefficient of torsion of beam 3 according to second, thereby obtains the second stressed longitudinal magnetic field B that obtains that rocks beam 3 vvalue.And, by the capacitance change of the 3rd electric capacity 7 and the 4th electric capacity 8, can obtain the direction of longitudinal magnetic field.Can obtain magnetic direction and size like this.

Claims (5)

1. two micro electronmechanical magnetic field sensor of torsional pendulum type, it is characterized in that, this magnetic field sensor comprises substrate (12), bottom electrode layer (13), sacrifice layer (14), metal level (15) and the silicon nitride layer (16) that stack arranges successively from bottom to top, sacrifice layer (14), metal level (15) and silicon nitride layer (16) are hollow structure
The end face of silicon nitride layer (16) is provided with anchor district (17), being provided with the second pad (62), the 4th pad (82) and two the 5th pad (92) ,Mao district (17) another sides is provided with the first pad (52), the 3rd pad (72), the tenth pad (112) and two the 6th pads (102) on one side in anchor district (17); The middle part of silicon nitride layer (16) is provided with first and rocks beam (1), and first rocks beam (1) is fixedly connected with by two the first brace summers (2) Yu Mao districts (17), and first rocks beam (1) and the first brace summer (2) in vacant state; The first inboard of rocking beam (1) is provided with second and rocks beam (3), and second rocks the inwall that beam (3) rocks beam (1) by two the second brace summers (4) and first is fixedly connected with, and second rocks beam (3) and the second brace summer (4) in vacant state; First rocks beam (1) edge and second rocks beam (2) edge and is laid with the first driving metal wire (9) and second and drives metal wire (10); The first bottom surface of rocking beam (1) is provided with the first electric capacity (5) and the second electric capacity (6), and the first end face that rocks beam (1) is provided with the first capacitance leading wire (51) and the second capacitance leading wire (61); The second bottom surface of rocking beam (3) is provided with the 3rd electric capacity (7) and the 4th electric capacity (8), and the end face that the second end face and first that rocks beam (3) rocks beam (1) is provided with the 3rd capacitance leading wire (71) and the 4th capacitance leading wire (81); First rocks the first through hole (53) of being provided with the containing metal post in beam (1) and second through hole (63) of containing metal post, the first electric capacity (5) is connected with an end of the first capacitance leading wire (51) by the first through hole (53), and the other end of the first capacitance leading wire (51) is connected with the first pad (52); The second electric capacity (6) is connected with an end of the second capacitance leading wire (61) by the second through hole (63), and the other end of the second capacitance leading wire (61) is connected with the second pad (62); Second rocks the third through-hole (73) that is provided with the containing metal post in beam (3) and the fourth hole (83) of containing metal post, the 3rd electric capacity (7) is connected with an end of the 3rd capacitance leading wire (71) by third through-hole (73), and the 3rd capacitance leading wire (71) other end is connected with the 3rd pad (72); The 4th electric capacity (8) is connected with the 4th capacitance leading wire (81) one ends by fourth hole (83), and the 4th capacitance leading wire (81) other end is connected with the 4th pad (82); First drives the two ends of metal wire (9) to be connected with the 5th pad (92) respectively,
First rocks beam (1) is provided with the fifth hole (93) of containing metal post and the 6th through hole (94) of containing metal post, first intermediate ends (20) of the first driving metal wire (9) is connected with an end of the first connecting line (22) by the metal column of fifth hole (93), and second intermediate ends (21) of the first driving metal wire (9) is connected with the first connecting line (22) other end by the metal column of the 6th through hole (94); Second drives the two ends of metal wire (10) to be connected with the 6th pad (102) respectively, first rocks beam (1) is provided with the 7th through hole (103) of containing metal post and the 8th through hole (104) of containing metal post, the 3rd intermediate ends (18) of the second driving metal wire (10) is connected with an end of the second connecting line (23) by the metal column of the 7th through hole (103), and the 4th intermediate ends (19) of the second driving metal wire (10) is connected with the other end of the second connecting line (23) by the metal column of the 8th through hole (104); Be provided with the 9th through hole (114) that contains metal column in sacrifice layer (14), be provided with the tenth through hole (113) of containing metal post in silicon nitride layer (16), bottom electrode layer (13) is connected with the 7th pad (112) with the tenth through hole (113) by the 9th through hole (114), metal level (15).
2. according to the claimed in claim 1 pair of micro electronmechanical magnetic field sensor of torsional pendulum type, it is characterized in that, described the first electric capacity (5) is positioned at first with the second electric capacity (6) and rocks on two limits that beam (1) is relative, and the first electric capacity (5) and the second electric capacity (6) all are not connected to first with the first brace summer (2) and rock on same one side of beam (1).
3. according to the claimed in claim 2 pair of micro electronmechanical magnetic field sensor of torsional pendulum type, it is characterized in that, described the first electric capacity (5) and the second electric capacity (6) are positioned at the first bottom edge center of rocking beam (1), the first electric capacity (5) and the second electric capacity (6) are on the same straight line, and symmetrical.
4. according to the claimed in claim 1 pair of micro electronmechanical magnetic field sensor of torsional pendulum type, it is characterized in that, described the 3rd electric capacity (7) is positioned at second with the 4th electric capacity (8) and rocks on two limits that beam (3) is relative, and the 3rd electric capacity (7) and the 4th electric capacity (8) all are not connected to second with the second brace summer (4) and rock on same one side of beam (3).
5. according to the claimed in claim 4 pair of micro electronmechanical magnetic field sensor of torsional pendulum type, it is characterized in that, described the 3rd electric capacity (7) and the 4th electric capacity (8) are positioned at the second bottom edge center of rocking beam (3), the 3rd electric capacity (7) and the 4th electric capacity (8) are on the same straight line, and symmetrical.
CN201310455985.2A 2013-09-30 2013-09-30 A kind of two micro electronmechanical magnetic field sensor of torsional pendulum type Expired - Fee Related CN103472410B (en)

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