CN211696425U

CN211696425U - Triaxial microgyroscope device based on tunnel magnetic resistance detection

Info

Publication number: CN211696425U
Application number: CN201922252234.6U
Authority: CN
Inventors: 李孟委; 王旭虎
Original assignee: North University of China
Current assignee: North University of China
Priority date: 2019-12-16
Filing date: 2019-12-16
Publication date: 2020-10-16
Anticipated expiration: 2029-12-16

Abstract

A three-axis micro gyroscope device based on tunnel magnetic resistance detection is composed of a bonding substrate, driving combination comb teeth, a Y-axis mass block and an X-axis mass block; the device comprises a Z-axis detection mass block, a first driving connection combination beam, a second driving connection combination beam, a third driving connection combination beam, a Z-axis detection combination beam assembly, a support anchor point assembly, a detection magnetic resistance assembly and a detection electrode assembly. The beneficial effects of the utility model reside in that, adopt tunnel magnetic resistance detection mode, solved current micromechanical gyroscope detection direction singleness, weak ke shi power is difficult to the problem that detects, and tunnel magnetic resistance component has high sensitive characteristic to weak magnetic field variation, and this device structural design is reasonable, and convenient to use detects the precision height, can realize X, Y, Z triaxial angular velocity's detection. When the magnetic field sensed by the tunnel magnetoresistive element changes, the resistance value of the tunnel magnetoresistive element can change violently under the weak magnetic field change, and the change can improve the detection precision of the micro gyroscope by one to two orders of magnitude.

Description

Triaxial microgyroscope device based on tunnel magnetic resistance detection

Technical Field

The utility model relates to a little top device of triaxial based on tunnel magnetic resistance detects belongs to little inertial navigation's measuring instrument spare part technical field.

Background

The inertia technology works in a completely autonomous mode, is not in contact with the outside, and has the advantages of autonomy, real time and no interference. The gyroscope is a core device of an inertial navigation technology and plays a vital role in the fields of modern aerospace, national defense, military and the like.

The micro-inertial system is mainly provided with a gyroscope, and the MEMS gyroscope is an inertial device manufactured based on a micro-electro-mechanical system technology, is used for measuring the angular velocity of an object, has the characteristics of small volume, high reliability, low cost and suitability for mass production, and thus the MEMS gyroscope is widely used in the micro-inertial system.

In the prior art, the common driving methods of the micro-mechanical gyroscope include electrostatic, piezoelectric, electromagnetic, etc., and the common detection methods of the micro-mechanical gyroscope include piezoresistive, piezoelectric, capacitive, resonant tunneling, electron tunneling, etc. In terms of detection mode, piezoresistive effect detection has low sensitivity and large temperature coefficient, so that the further improvement of detection precision is limited; the sensitivity of the piezoelectric effect detection is easy to drift and slow in zero resetting, and continuous testing is not suitable; the capacitance detection adopts a comb structure, the displacement resolution is higher, but the precision requirement of the comb manufacturing process is extremely high, and the yield is lower; the sensitivity of the resonant tunneling effect is one order of magnitude higher than that of the silicon piezoresistive effect, but the detection sensitivity obtained by testing is lower, and the problem exists that the bias voltage is easy to drift due to gyro driving, so that the gyro cannot stably work; the manufacturing process of the electronic tunnel effect type device is extremely complex, a detection circuit is relatively difficult to realize, the rate of finished products is low, the normal work is difficult, the integration is not facilitated, especially, the distance between the tunnel junction and the tunnel tip and the electrode plate is difficult to control at a nanometer level, and the normal work of the sensor cannot be guaranteed. The tunnel magnetoresistance effect is based on the spin effect of electrons, a non-magnetic layer of an insulator or a semiconductor is arranged between a magnetic pinning layer and a magnetic free layer, when the magnetization direction of the magnetic free layer is changed under the action of an external field, but the magnetization direction of the pinning layer is not changed, and at the moment, the relative orientation of the magnetization of the two magnetic layers is changed, a large resistance change can be observed on a magnetic tunnel junction crossing an insulating layer, the physical effect is based on the tunneling effect of electrons on the insulating layer, so the tunnel magnetoresistance effect is called as the tunnel magnetoresistance effect, and has the advantages of high sensitivity, miniaturization and easiness in detection. The Coriolis force is not a force which exists in reality, the driving direction, the angular velocity direction and the Coriolis force direction are perpendicular to each other, the Coriolis effect causes mass block displacement, and the angular velocity is detected by detecting the displacement. Therefore, the MEMS gyroscope has a complicated structure, and it is also difficult to implement three-axis angular velocity detection on a single chip.

For solving the difficult problem of monolithic triaxial angular velocity signal detection, the utility model discloses the people thinks of being applied to gyro structure with tunnel magnetoresistance effect and detect, can improve one to two orders of magnitude with little top detectivity than capacitanc top, still can integrate XYZ triaxial gyroscope on single structure simultaneously, and relevant product has not appeared yet in this technical field.

In the state of the art, the prior art 1 "a MEMS triaxial gyroscope" (application No. 201510368747.7), the prior art 2 "a MEMS triaxial gyroscope" (application No. 201710606894.2), and the prior art 3 "a tunnel magnetoresistive non-resonant triaxial MEMS gyroscope" (application No. 201721017277.0) were examined.

The prior art 1 adopts a capacitance detection mode, the distance between two capacitor plates changes due to the Coriolis force effect, displacement detection is realized by detecting the capacitance change, and a capacitance structure is suitable for MEMS (micro-electromechanical systems) process machining and has the disadvantages of insufficient detection sensitivity and small output signal; in the prior art 2, a comb capacitance detection mode is adopted, so that the displacement resolution is high, but with further miniaturization, comb voltage is easy to breakdown, attraction failure can be caused during transverse impact, and particularly, the comb manufacturing process has extremely high precision requirement and low yield, so that the development in the direction is restricted; the prior art 3 is a non-resonant structure without driving, and has a simple structure, but has the defects of small detection displacement, low structural sensitivity and the like.

Based on above problem, the utility model provides an adopt little top device of resonance formula of tunnel magnetic resistance detection mode, the utility model provides an advantage lies in that the unipolar drive realizes that triaxial angular velocity detects, detects the micrometric displacement because of the koshidi power produces by the magnetic resistance component that has high sensitive characteristic during the detection, adopts the relative change of difference mode detection magnetic resistance component resistance, and sensitivity is high, easily detects.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a solve above-mentioned problem, provide a little top device of triaxial based on tunnel magnetic resistance detects, improve little top detection precision when realizing that the monolithic detects triaxial angular velocity, adopt the magnetic resistance mode, detect the relative change of two corresponding magnetic resistance component resistances and realize the detection to the little displacement that weak koehler's power produced.

The technical scheme of the utility model as follows:

a three-axis micro gyroscope device based on tunnel magnetic resistance detection is composed of a bonding substrate, driving combination comb teeth, a Y-axis mass block and an X-axis mass block; the device comprises a Z-axis detection mass block, a first driving connection combination beam, a second driving connection combination beam, a third driving connection combination beam, a Z-axis detection combination beam assembly, a support anchor point assembly, a detection magnetic resistance assembly and a detection electrode assembly;

a groove is arranged on the bonding substrate;

the supporting anchor point components are respectively arranged at the center of the groove and at the positions close to the inner side edge of the groove;

one ends of the Y-axis mass block and the X-axis mass block are connected with a support anchor point component at the center of the groove through the third drive connection combination beam; the Y-axis mass block and the X-axis mass block are connected with a support anchor point component close to the inner side edge of the groove through a second drive connection combination beam;

the Y-axis mass blocks are symmetrically arranged in the grooves of the bonding substrate by taking the Y axis as the center, and the X-axis mass blocks are symmetrically arranged in the grooves of the bonding substrate by taking the X axis as the center;

the adjacent Y-axis mass block and the X-axis mass block are connected with each other through a first driving connection combination beam;

the Z-axis detection mass block is respectively arranged at the inner sides of the Y-axis mass block and the X-axis mass block; the Z-axis detection mass block is connected with the Y-axis mass block and the X-axis mass block through a Z-axis detection combined beam assembly respectively;

the drive combined comb teeth are respectively arranged on the inner side edge of the bonded substrate groove and connected with the Y-axis mass block and the X-axis mass block;

the detection magnetic resistance component is respectively arranged on the Y-axis mass block, the X-axis mass block and the Z-axis detection mass block, and is respectively connected with the detection electrode components arranged at the edges of the Y-axis mass block and the X-axis mass block through leads.

Optionally, a detection magnet assembly is disposed in the groove, the detection magnet assembly including: y axle detects the magnet, and X axle detects magnet and Z axle detects the magnet, Y axle detects the magnet and uses the Y axle to set up respectively as central symmetry both sides in the recess, X axle detects the magnet and uses the X axle to set up respectively as the center both sides in the recess, Z axle detects the magnet and corresponds respectively the position setting of Z axle detection quality piece, Z axle detects the magnet and sets up as central symmetry along X, Y axles respectively.

Optionally, the support anchor assembly comprises: support anchor point and central anchor point, central anchor point sets up the recess center, support the anchor point and set up respectively in being close to the position of the inboard side of recess.

Optionally, spaces for mounting the Z-axis detection mass block are formed inside the Y-axis mass block and the X-axis mass block, one end of the Y-axis mass block is connected with the central anchor point through a third driving connection combination beam and symmetrically arranged in the groove of the bonding substrate along the Y-axis, and one end of the X-axis mass block is connected with the central anchor point through a third driving connection combination beam and symmetrically arranged in the groove of the bonding substrate along the X-axis.

Optionally, the third driving connection combination beam is composed of a third driving beam connection block and a third driving beam, two third driving beams are arranged in parallel, the third driving beams are connected with each other through a third driving beam connection block, two ends of one third driving beam are connected with the Y-axis mass block or the X-axis mass block through the third driving beam connection block, and two ends of the other third driving beam are connected with the center anchor point through the third driving beam connection block.

Optionally, the Y-axis mass block or the X-axis mass block is connected to the support anchor point through a second drive connection composite beam, the second drive connection composite beam is composed of a second drive beam connection block and a second drive beam, the three second drive beams are arranged in parallel, the middle of the second drive beam close to the support anchor point is connected to the support anchor point through the second drive beam connection block, two ends of the second drive beam are connected to two ends of the middle second drive beam through the second drive beam connection block, the middle of the middle second drive beam is connected to the middle of the second drive beam far away from the support anchor point through the second drive beam connection block, and two ends of the second drive beam are connected to the Y-axis mass block or the X-axis mass block through the second drive beam connection block.

Optionally, the first driving connection combination beam is composed of a first driving beam and a first driving beam connecting block, the first driving beam is arranged in parallel, the first driving beam connecting block is used for connecting the first driving beam in an end-to-end mode to form a snake-shaped structure, and the first driving beam connecting block located at the end portion is connected with the Y-axis mass block and the X-axis mass block respectively.

Optionally, the Z-axis detection mass block is connected with the Y-axis mass block or the X-axis mass block through a Z-axis detection combination beam assembly, the Z-axis detection combined beam assembly consists of a plurality of detection combined beams, two sides of the Z-axis detection mass block are connected with the Y-axis mass block or the X-axis mass block through the plurality of detection combined beams, the detection combined beam consists of a first detection beam, a second detection beam and a detection beam connecting block, the first detection beam and the second detection beam are respectively positioned at two sides of the detection beam connecting block and are parallel to each other, the detecting beam connecting block is integrally T-shaped, one end of the first detecting beam and one end of the second detecting beam are connected with one end of the detecting beam connecting block, the other ends of the first detection beam and the second detection beam are connected with the Z-axis detection mass block, and the other end of the detection beam connecting block is connected with the Y-axis mass block or the X-axis mass block.

Optionally, the drive combining comb comprises: the comb comprises a first driving comb tooth and a second driving comb tooth, wherein the first driving comb tooth is arranged on the inner side edge of a groove of a bonded substrate, the second driving comb tooth is arranged on a Y-axis mass block and an X-axis mass block, and the first driving comb tooth and the second driving comb tooth are in cross fit together.

Optionally, the detection magnetoresistive component comprises: the Y-axis detection magnetic resistance element, the X-axis detection magnetic resistance element and the Z-axis detection magnetic resistance element are arranged on the Y-axis mass block respectively corresponding to the positions of the Y-axis detection magnets, the X-axis detection magnetic resistance element is arranged on the X-axis mass block respectively corresponding to the positions of the X-axis detection magnets, and the Z-axis detection magnetic resistance element is arranged on the Z-axis detection mass block respectively corresponding to the positions of the Z-axis detection magnets;

the detection electrode assembly includes: z axle detect electrode, Y axle detect electrode and X axle detect electrode, Z axle detect electrode, Y axle detect electrode and X axle detect electrode and set up respectively and be close to the edge of Y axle quality piece and X axle quality piece, Z axle detect the magnetic resistance component through a signal detection wire with Z axle detects the electrode and connects, Y axle detect the magnetic resistance component or X axle detect the magnetic resistance component and be connected with Y axle detect electrode or X axle detect electrode through another signal detection wire.

The beneficial effects of the utility model reside in that:

the utility model discloses an adopt tunnel magnetic resistance detection mode, it is single to have solved current micromechanical gyroscope direction of detection, and weak ke shi power is difficult to the problem that detects, provides a triaxial microgyroscope device based on tunnel magnetic resistance detects. The provided triaxial micro gyroscope device can realize single-axis driving triaxial angular velocity detection. The utility model discloses the difference mode that micromechanical gyroscope adopted detects the change of relative signal, though under drive mode, magnetic resistance component because the magnetic field variation resistance can change, nevertheless because the magnetic field variation that two magnetic resistance component were experienced is the same, so the error influence that brings when can eliminating the drive adopts the tunnel magnetoresistance effect that has high sensitive characteristic to detect simultaneously, improves the little top and detects the precision. The utility model discloses little top deposit high magnetic conductivity soft magnetic material on detecting the magnet, has and gathers the magnetic effect, thereby realizes reinforcing local magnetic field intensity and improves the magnetic field change rate, forms the magnetic field of a stable high change rate, and the magnetic field that feels when tunnel magnetic resistance component changes, tunnel magnetic resistance component's resistance can take place violent change under faint magnetic field change, and this change can improve one to two orders of magnitude with the detection precision of little top. The utility model discloses micromechanical gyroscope structural design is reasonable, interface circuit is simple, the detection precision is high, can solve the difficult problem that angular rate signal detected.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a top view of the overall structure of the present invention;

FIG. 3 is a top view of the bonding substrate of the present invention;

FIG. 4 is a top view of the micro gyroscope mass block of the present invention;

fig. 5 is a top view of the first driving connection combination beam of the present invention;

fig. 6 is a top view of the second driving connection combination beam of the present invention;

fig. 7 is a top view of the third driving connection combination beam of the present invention;

fig. 8 is a top view of the Z-axis proof mass of the present invention;

FIG. 9 is a top view of the detecting composite beam of the present invention;

FIG. 10 is a structural diagram of the detection lead and the electrode of the present invention;

fig. 11 is a top view of the detection lead and the electrode of the present invention.

As shown in the figures, the list of reference numbers is as follows:

1-a bonded substrate; 2. 3, 4, 5-driving the combined comb teeth; 2a, 3a, 4a, 5 a-first drive comb; 2b, 3b, 4b, 5 b-second drive comb; 6. an 8-Y axis detection magnet; 7. 9-X axis detection magnet; 10. 11, 12, 13-Z axis detection magnet; 14. a 16-Y axis proof mass; 15. 17-X axis mass blocks; 18. 19, 20, 21-Z axis detection electrodes; 22. a 24-Y axis detection electrode; 23. 25-X axis detection electrodes; 26. 27, 28, 29-Z axis detection magneto-resistive element; 30. a 32-Y axis detection magnetoresistive element; 31. a 33-X axis detection magneto-resistive element; 34. 35, 36, 37-support anchor points; 38. 39, 40, 41-second drive connection combination beam; 42. 43, 44, 45, connecting the combination beam in a first driving way; 46. detecting mass blocks in 47, 48 and 49-Z axes; 50. Detecting the combined beam assembly on 51, 52 and 53-Z axes; 54. 55, 56, 57-third driving connection combination beam; 58-central anchor point 58; 59. 60, 61, 62, 63-third drive beam connection block; 64. 65-a third drive beam; 66. 67, 68, 69-first drive beam connection block; 70. 71, 72-first drive beam; 73. 74, 75, 76, 77, 78-second drive beam connection block; 79. 80, 81-second drive beam; 82. 83, 84, 85-detecting the composite beam; 86. 87-signal detection leads; 88-a first detection beam; 89-a second detection beam; 90-detecting beam connecting block.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the combination or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. In addition, in the description process of the embodiment of the present invention, the position relationships of the devices such as "up", "down", "front", "back", "left", "right" in all the drawings all use fig. 1 as a standard.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The present invention will be further explained with reference to the accompanying drawings:

as shown in fig. 1 and 2, a three-axis micro gyroscope device based on tunnel magnetoresistance detection is composed of a bonding substrate 1, driving

combination comb teeth

2, 3, 4 and 5, Y-axis quality blocks 14 and 16 and X-axis quality blocks 15 and 17; the device comprises Z-

axis detection masses

46, 47, 48 and 49, first driving connection combination beams 42, 43, 44 and 45, second driving connection combination beams 38, 39, 40 and 41, third driving connection combination beams 54, 55, 56 and 57, Z-axis detection

combination beam assemblies

50, 51, 52 and 53, support anchor point assemblies, detection magnetic resistance assemblies and detection electrode assemblies.

A groove is arranged on the bonding substrate 1;

one ends of the Y-axis mass blocks 14 and 16 and the X-axis mass blocks 15 and 17 are connected with the supporting anchor point component at the center of the groove through the third driving connection combination beams 55, 57, 54 and 56; the Y-axis mass blocks 14 and 16 and the X-axis mass blocks 15 and 17 are connected with the support anchor point components close to the inner side edges of the grooves through second drive connecting combination beams 38, 39, 40 and 41;

the Y-axis quality blocks 14 and 16 are symmetrically arranged in the grooves of the bonding substrate 1 by taking the Y axis as the center, and the X-axis quality blocks 15 and 17 are symmetrically arranged in the grooves of the bonding substrate 1 by taking the X axis as the center;

the adjacent Y-

axis masses

14, 16 and

X-axis masses

15, 17 are connected to each other by first drive connecting

composite beams

42, 43, 44, 45;

the Z-

axis detection masses

46, 47, 48 and 49 are respectively arranged at the inner sides of the Y-

axis masses

14 and 16 and the

X-axis masses

15 and 17; the Z-axis detection mass blocks 46, 47, 48 and 49 are respectively connected with the Y-axis mass blocks 14 and 16 and the X-axis mass blocks 15 and 17 through Z-axis detection combined

beam assemblies

50, 51, 52 and 53;

the driving combined

comb teeth

2, 3, 4 and 5 are respectively arranged on the inner side edge of the groove of the bonding substrate 1 and are connected with the Y-axis mass blocks 14 and 16 and the X-axis mass blocks 15 and 17;

the detection magnetic resistance components are respectively arranged on the Y-axis quality blocks 14 and 16, the X-axis quality blocks 15 and 17 and the Z-axis detection quality blocks 46, 47, 48 and 49, and are respectively connected with detection electrode components arranged at the edges of the Y-axis quality blocks 14 and 16 and the X-axis quality blocks 15 and 17 through leads.

As shown in fig. 3, the bonding substrate 1 is square as a whole, and a square groove is provided on the bonding substrate 1. Be provided with in the recess and detect the magnet subassembly, it includes to detect the magnet subassembly: y axle detects magnet 6, 8, and X axle detects magnet 7, 9 and Z axle and detects

magnet

10, 11, 12, 13, Y axle detects magnet 6, 8 and uses the Y axle to set up respectively as central symmetry both sides in the recess, X axle detects magnet 7, 9 and uses the X axle to set up respectively as the center both sides in the recess, Z axle detects

magnet

10, 11, 12, 13 and corresponds respectively the position setting of Z axle

detection quality piece

46, 47, 48, 49, Z axle detects

magnet

10, 11, 12, 13 and sets up as central symmetry along the X, Y axle respectively. The thicknesses of the Y-axis detection magnets 6 and 8, the X-axis detection magnets 7 and 9 and the Z-

axis detection magnets

10, 11, 12 and 13 are smaller than the depth of the grooves. The Y-axis detection magnets 6 and 8, the X-axis detection magnets 7 and 9, and the Z-

axis detection magnets

10, 11, 12, and 13 may be any device capable of generating a magnetic field, such as a permanent magnet, an electrified coil, and a photo-controlled magnet, and a permanent magnet is used in this embodiment. The Y-axis detection magnets 6 and 8 and the X-axis detection magnets 7 and 9 can be square, and the Z-

axis detection magnets

10, 11, 12 and 13 can be triangular, and are obtained by processing and etching. Magnetic gathering units are deposited above the Y-axis detection magnets 6 and 8, the X-axis detection magnets 7 and 9 and the Z-

axis detection magnets

10, 11, 12 and 13, and the magnetic gathering units can be triangular, square and the like.

The support anchor assembly includes: support anchor points 34, 35, 36, 37 and a central anchor point 58, wherein the central anchor point 58 is arranged in the center of the groove, and the support anchor points 34, 35, 36, 37 are respectively arranged at positions close to the inner side edge of the groove.

Spaces for installing the Z-

axis detection masses

46, 47, 48 and 49 are arranged inside the Y-

axis masses

14 and 16 and the

X-axis masses

15 and 17, one ends of the Y-

axis masses

14 and 16 are connected with the central anchor point 58 through third driving connection combination beams 54 and 56 and symmetrically arranged in the groove of the bonding substrate 1 along the Y axis, and one ends of the

X-axis masses

15 and 17 are connected with the central anchor point 58 through third driving connection combination beams 55 and 57 and symmetrically arranged in the groove of the bonding substrate 1 along the X axis; the Y-axis and

X-axis masses

14 and 16 and 15 and 17 adjacent to each other have a gap therebetween, and the gap is located on a diagonal line of the bonded substrate 1.

As shown in fig. 7, the third driving connection combination beams 54, 55, 56, 57 have the same structural size, the third driving connection combination beams 54, 55, 56, 57 are composed of third driving beam connection blocks 59, 60, 61, 62, 63 and third driving beams 64, 65, two of the third driving beams 64, 65 are arranged in parallel, the third driving beams 64, 65 are connected with each other through a third driving beam connection block 63, two ends of one of the third driving beams 64 are connected with the Y-axis mass blocks 14, 16 or the X-axis mass blocks 15, 17 through the third driving beam connection blocks 59, 62, and two ends of the other of the third driving beams 65 are connected with the central anchor point 58 through the third driving beam connection blocks 60, 61.

As shown in fig. 6, the Y-axis mass blocks 14, 16 or the X-axis mass blocks 15, 17 are connected to the support anchors 34, 35, 36, 37 through the second driving connection combination beams 38, 39, 40, 41, the second driving connection combination beams 38, 39, 40, 41 have the same structural size, the second driving connection combination beams 38, 39, 40, 41 are composed of second driving beam connection blocks 73, 74, 75, 76, 77, 78 and second driving beams 79, 80, 81, three second driving beams 79, 80, 81 are arranged in parallel to each other, the middle of the second driving beam 79 near the support anchors 34, 35, 36, 37 is connected to the support anchors 34, 35, 36, 37 through the second driving beam connection block 73, the two ends of the second driving beam 79 are connected to the two ends of the middle second driving beam 80 through the second driving beam connection blocks 74, 75, respectively, and the middle of the second driving beam 80 is connected to the support anchors 34, 35, 36, 37 through the second driving beam connection blocks 73, and the middle of the second driving beam 80 is connected to the support anchors 34, 75, 35. The middle parts of the second driving beams 81 of 36 and 37 are connected by a second driving beam connecting block 76, and both ends of the second driving beam 81 are connected to the Y-axis mass blocks 14 and 16 or the X-axis mass blocks 15 and 17 by second driving

beam connecting blocks

77 and 78.

As shown in fig. 5, the first driving connection combination beams 42, 43, 44, 45 have the same structural size, and the first driving connection combination beams 42, 43, 44, 45 are composed of three folded beams having the same shape and different sizes, that is, the length of the beam is much greater than the width thereof. The first driving

connection combination beam

42, 43, 44, 45 is composed of a

first driving beam

70, 71, 72 and a first driving

beam connection block

66, 67, 68, 69. The first driving beams 70, 71 and 72 are arranged in parallel, the first driving beams 70, 71 and 72 are connected end to end by first driving

beam connecting blocks

66, 67, 68 and 69 to form a serpentine structure, and the first driving

beam connecting blocks

66 and 69 at the end parts are respectively connected with the Y-axis mass blocks 14 and 16 and the X-axis mass blocks 15 and 17.

As shown in fig. 8 and 9, the Z-

axis proof masses

46, 47, 48, 49 have the same structural dimensions. The Z-axis proof masses 46, 47, 48, 49 are connected to the Y-axis proof masses 14, 16 or the X-axis proof masses 15, 17 through Z-axis proof composite beam assemblies 50, 51, 52, 53, the Z-axis proof composite beam assemblies 50, 51, 52, 53 are composed of a plurality of proof composite beams 82, 83, 84, 85, the two sides of the Z-axis proof masses 46, 47, 48, 49 are connected to the Y-axis proof masses 14, 16 or the X-axis proof masses 15, 17 through a plurality of proof composite beams 82, 83, 84, 85, the proof composite beams 82, 83, 84, 85 are mainly composed of two first proof beams 88, second proof beams 89 with the same structure size and a proof beam connecting block 90, the first proof beams 88 and the second proof beams 89 are respectively located on two sides of the proof beam connecting block 90 and are parallel to each other, the proof beam connecting block 90 is in a "T" shape, first detection roof beam 88, second detection roof beam 89 one end with detection roof beam connecting block 90's one end is connected, first detection roof beam 88, the second detection roof beam 89 other end with Z axle detection quality piece 46, 47, 48, 49 are connected, detection roof beam connecting block 90's the other end with Y axle quality piece 14, 16 or X axle quality piece 15, 17 are connected. The first detection beam 88 and the second detection beam 89 are in a slender beam structure, namely the length of the beam is far larger than the width of the beam, and the thickness of the first detection beam 88 and the thickness of the second detection beam 89 are the same as that of the detection beam connecting block 90.

As shown in fig. 4, the

drive combination comb

2, 3, 4, 5 includes: first drive combs 2a, 3a, 4a, 5a and second drive combs 2b, 3b, 4b, 5b, the first drive combs 2a, 3a, 4a, 5a being disposed on the inner side of the grooves of the bonded substrate 1, the second drive combs 2b, 3b, 4b, 5b being disposed on the Y-

axis masses

14, 16 and the

X-axis masses

15, 17, the first drive combs 2a, 3a, 4a, 5a and the second drive combs 2b, 3b, 4b, 5b being cross-fitted together.

The detection magnetoresistive component comprises: y axle detection

magnetic resistance elements

30, 32, X axle detection

magnetic resistance elements

31, 33 and Z axle detection

magnetic resistance elements

26, 27, 28, 29, Y axle detection

magnetic resistance elements

30, 32 are respectively corresponding the position setting of Y axle detection magnet 6, 8 on Y

axle quality piece

14, 16, X axle detection

magnetic resistance elements

31, 33 are respectively corresponding the position setting of X axle detection magnet 7, 9 on X

axle quality piece

15, 17, Z axle detection

magnetic resistance elements

26, 27, 28, 29 are respectively corresponding the position setting of Z

axle detection magnet

10, 11, 12, 13 on Z axle

detection quality piece

46, 47, 48, 49.

As shown in fig. 10 and 11, the detection electrode assembly includes: the detection device comprises Z-

axis detection electrodes

18, 19, 20, 21, Y-

axis detection electrodes

22, 24 and

X-axis detection electrodes

23, 25, wherein the Z-

axis detection electrodes

18, 19, 20, 21, the Y-

axis detection electrodes

22, 24 and the

X-axis detection electrodes

23, 25 are respectively arranged at the edges close to the Y-axis quality blocks 14, 16 and the X-axis quality blocks 15, 17, Z-axis detection

magnetic resistance elements

26, 27, 28, 29 are connected with the Z-

axis detection electrodes

18, 19, 20, 21 through a signal detection lead 87, and Y-axis detection

magnetic resistance elements

30, 32 or X-axis detection

magnetic resistance elements

31, 33 are connected with the Y-

axis detection electrodes

22, 24 or the

X-axis detection electrodes

23, 25 through another signal detection lead 86.

The utility model discloses the principle:

the utility model discloses a micro gyroscope device is driven by broach electric capacity drive electrode, and Y

axle quality piece

14, 16 are along X axle reciprocating motion and motion opposite direction under the drive mode, and X

axle quality piece

15, 17 are following Y axle direction reciprocating motion and motion opposite direction simultaneously. With reference to the central anchor point 58, the

X-axis masses

15, 17 move away from the central anchor point 58 as the Y-

axis masses

14, 16 approach the central anchor point 58. In-plane driving of the gyro device is realized by applying excitation to comb-tooth capacitance drive electrodes.

After the micro gyroscope device is driven, the X-axis mass blocks 15 and 17 do reciprocating motion along the Y-axis direction, the magnetic resistance elements arranged on the X-axis mass blocks can detect the magnetic field change caused by displacement, but because the corresponding permanent magnets on the substrate adopt a full-symmetric structure, the output signals of the two magnetic resistance elements are the same, the relative output is zero, and no signal is output under the driving mode. When the angular velocity of the X-axis is input, the X-axis mass blocks 15 and 17 will generate displacement in the Z-axis direction according to the Coriolis principle, and the displacement directions generated by the two mass blocks are opposite, so that the magnetic resistance element moves close to or away from the permanent magnet on the substrate. The magnetic resistance elements detect the change of the magnetic field and output corresponding signals, the two magnetic resistance elements have opposite moving directions, so the output signals are different, and the X-axis angular speed is detected by detecting the relative signals. The detection principle of the Y-axis angular velocity signal is the same as that of the X-axis angular velocity signal described above.

After the micro gyroscope device is driven, the X-axis quality blocks 15 and 17 reciprocate along the Y-axis direction, and the Y-axis quality blocks 14 and 16 reciprocate along the X-axis direction. The magnetic resistance elements arranged on the Z-axis detection mass block can detect the magnetic field change caused by displacement, but because the corresponding permanent magnets on the substrate adopt a symmetrical structure, the output signals of the two magnetic resistance elements are the same, so the relative output is zero, and no signal is output under the driving mode. When the Z-axis angular velocity is input, the Z-axis detection mass 46 and the Z-axis detection mass 48 may displace in the X-axis direction, and the Z-axis detection mass 47 and the Z-axis detection mass 49 may displace in the Y-axis direction according to the coriolis principle. The magnetic fields of the corresponding permanent magnets on the substrate are distributed differently in the detection direction, so that two sets of relative output signals can be obtained, and the Z-axis angular velocity can be detected.

The beneficial effects of the utility model reside in that:

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the claims and their equivalents.

Claims

1. A three-axis micro gyroscope device based on tunnel magnetic resistance detection is characterized in that a bonded substrate (1) is used for driving combined comb teeth (2, 3, 4 and 5), Y-axis mass blocks (14 and 16) and X-axis mass blocks (15 and 17); the device comprises Z-axis detection mass blocks (46, 47, 48 and 49), first driving connection combination beams (42, 43, 44 and 45), second driving connection combination beams (38, 39, 40 and 41), third driving connection combination beams (54, 55, 56 and 57), Z-axis detection combination beam components (50, 51, 52 and 53), support anchor point components, detection magnetic resistance components and detection electrode components;

the bonding substrate (1) is provided with a groove;

one ends of the Y-axis mass blocks (14, 16) and the X-axis mass blocks (15, 17) are connected with the supporting anchor point component at the center of the groove through the third driving connection combination beams (55, 57, 54, 56); the Y-axis mass blocks (14, 16) and the X-axis mass blocks (15, 17) are connected with the support anchor point components close to the inner side edges of the grooves through second drive connection combination beams (38, 39, 40, 41);

the Y-axis quality blocks (14, 16) are symmetrically arranged in the grooves of the bonding substrate (1) by taking the Y axis as the center, and the X-axis quality blocks (15, 17) are symmetrically arranged in the grooves of the bonding substrate (1) by taking the X axis as the center;

the adjacent Y-axis mass blocks (14, 16) and the X-axis mass blocks (15, 17) are connected with each other through first driving connection combination beams (42, 43, 44, 45);

the Z-axis detection mass blocks (46, 47, 48, 49) are respectively arranged at the inner sides of the Y-axis mass blocks (14, 16) and the X-axis mass blocks (15, 17); the Z-axis detection mass blocks (46, 47, 48 and 49) are respectively connected with the Y-axis mass blocks (14 and 16) and the X-axis mass blocks (15 and 17) through Z-axis detection combined beam assemblies (50, 51, 52 and 53);

the drive combined comb teeth (2, 3, 4 and 5) are respectively arranged on the inner side edge of the groove of the bonding substrate (1) and are connected with the Y-axis mass blocks (14 and 16) and the X-axis mass blocks (15 and 17);

the detection magnetic resistance components are respectively arranged on the Y-axis mass blocks (14, 16), the X-axis mass blocks (15, 17) and the Z-axis detection mass blocks (46, 47, 48, 49), and are respectively connected with detection electrode components arranged at the edges of the Y-axis mass blocks (14, 16) and the X-axis mass blocks (15, 17) through leads.

2. The tri-axial micro gyroscope apparatus based on tunnel magnetoresistive sensing of claim 1, wherein the recess is provided with a sensing magnet assembly therein, the sensing magnet assembly comprising: y axle detects magnet (6, 8), and X axle detects magnet (7, 9) and Z axle detects magnet (10, 11, 12, 13), Y axle detects magnet (6, 8) and uses the Y axle to set up respectively as central symmetry both sides in the recess, X axle detects magnet (7, 9) and uses the X axle to set up respectively as the center both sides in the recess, Z axle detects magnet (10, 11, 12, 13) and corresponds respectively the position setting of Z axle detection quality piece (46, 47, 48, 49), Z axle detects magnet (10, 11, 12, 13) and sets up as central symmetry along the X, Y axle respectively.

3. The tri-axial micro gyroscope apparatus based on tunneling magnetoresistance detection according to claim 2, wherein the support anchor point assembly comprises: support anchor points (34, 35, 36, 37) and a central anchor point (58), wherein the central anchor point (58) is arranged in the center of the groove, and the support anchor points (34, 35, 36, 37) are respectively arranged at positions close to the inner side edge of the groove.

4. The tunneling magnetoresistance detection-based triaxial micro gyroscope device according to claim 3, wherein the Y-axis mass block (14, 16) and the X-axis mass block (15, 17) have a space inside for mounting the Z-axis detection mass block (46, 47, 48, 49), one end of the Y-axis mass block (14, 16) is connected to the central anchor point (58) through a third driving connection combination beam (54, 55, 56, 57) and symmetrically disposed along the Y-axis in the groove of the bonded substrate (1), and one end of the X-axis mass block (15, 17) is connected to the central anchor point (58) through a third driving connection combination beam (54, 55, 56, 57) and symmetrically disposed along the X-axis in the groove of the bonded substrate (1).

5. The tri-axial micro gyroscope apparatus based on tunneling magneto-resistive sensing according to claim 4, the third driving connection combination beam (54, 55, 56, 57) consists of a third driving beam connecting block (59, 60, 61, 62, 63) and a third driving beam (64, 65), two third driving beams (64, 65) are arranged in parallel, the third driving beams (64, 65) are connected through a third driving beam connecting block (59, 60, 61, 62, 63), two ends of one third driving beam (64, 65) are connected with the Y-axis mass blocks (14, 16) or the X-axis mass blocks (15, 17) through third driving beam connecting blocks (59, 60, 61, 62, 63), and two ends of the other third driving beam are connected with the central anchor point (58) through third driving beam connecting blocks (59, 60, 61, 62, 63).

6. The tunneling magnetoresistance detection-based triaxial micro-gyroscope device according to claim 3, wherein the Y-axis mass block (14, 16) or the X-axis mass block (15, 17) is connected to a support anchor point (34, 35, 36, 37) through a second drive connection combination beam (38, 39, 40, 41), the second drive connection combination beam (38, 39, 40, 41) is composed of a second drive beam connection block (73, 74, 75, 76, 77, 78) and a second drive beam (79, 80, 81), three second drive beams (79, 80, 81) are arranged in parallel with each other, a middle portion of the second drive beam (79, 80, 81) near the support anchor point (34, 35, 36, 37) is connected to the support anchor point (34, 35, 36, 37) through a second drive beam connection block (73, 74, 75, 76, 77, 78), and the second drive beam (79, 80. 81) are respectively connected with two ends of a middle second driving beam (79, 80, 81) through second driving beam connecting blocks (73, 74, 75, 76, 77, 78), the middle part of the middle second driving beam (79, 80, 81) is connected with the middle part of the second driving beam (79, 80, 81) far away from the supporting anchor point (34, 35, 36, 37) through second driving beam connecting blocks (73, 74, 75, 76, 77, 78), and two ends of the second driving beam (79, 80, 81) are connected with the Y-axis mass block (14, 16) or the X-axis mass block (15, 17) through second driving beam connecting blocks (73, 74, 75, 76, 77, 78).

7. The tunneling magnetoresistance detection-based three-axis micro-gyroscope device according to claim 1, wherein the first driving connection combination beam (42, 43, 44, 45) is composed of a plurality of first driving beams (70, 71, 72) and first driving beam connection blocks (66, 67, 68, 69), the first driving beams (70, 71, 72) are arranged in parallel, the first driving beam connection blocks (66, 67, 68, 69) connect the first driving beams (70, 71, 72) end to form a serpentine structure, and the first driving beam connection blocks (66, 67, 68, 69) at the ends are respectively connected with the Y-axis mass blocks (14, 16) and the X-axis mass blocks (15, 17).

8. The tunneling magnetoresistance detection-based triaxial microgyroscope device according to claim 1, wherein the Z-axis proof mass (46, 47, 48, 49) is connected to the Y-axis mass block (14, 16) or the X-axis mass block (15, 17) through a Z-axis proof composite beam assembly (50, 51, 52, 53), the Z-axis proof composite beam assembly (50, 51, 52, 53) is composed of a plurality of the detection composite beams (82, 83, 84, 85), both sides of the Z-axis proof mass (46, 47, 48, 49) are connected to the Y-axis mass block (14, 16) or the X-axis mass block (15, 17) through a plurality of the detection composite beams (82, 83, 84, 85), the detection composite beams (82, 83, 84, 85) are composed of a first detection beam (88), a second detection beam (89) and a detection beam connection block (90), and the first detection beam (88), The second detects roof beam (89) and is located detection roof beam connecting block (90) both sides and parallel to each other respectively, it is whole "T" shape to detect roof beam connecting block (90), first detection roof beam (88), second detection roof beam (89) one end with the one end of detecting roof beam connecting block (90) is connected, first detection roof beam (88), second detection roof beam (89) other end with Z axle detection quality piece (46, 47, 48, 49) are connected, the other end of detecting roof beam connecting block (90) with Y axle quality piece (14, 16) or X axle quality piece (15, 17) are connected.

9. Three-axis micro-gyroscope apparatus based on tunneling magneto-resistive sensing according to claim 1, characterized in that the driving combination comb (2, 3, 4, 5) comprises: first drive combs (2a, 3a, 4a, 5a) and second drive combs (2b, 3b, 4b, 5b), the first drive combs (2a, 3a, 4a, 5a) being arranged on the inner side of the grooves of the bonded substrate (1), the second drive combs (2b, 3b, 4b, 5b) being arranged on the Y-axis mass blocks (14, 16) and the X-axis mass blocks (15, 17), the first drive combs (2a, 3a, 4a, 5a) and the second drive combs (2b, 3b, 4b, 5b) being cross-fitted together.

10. The tunneling magnetoresistance detection-based tri-axial micro gyroscope apparatus of claim 2, wherein the sense magnetoresistance assembly comprises: y-axis detection magneto-resistance elements (30, 32), X-axis detection magneto-resistance elements (31, 33) and Z-axis detection magneto-resistance elements (26, 27, 28, 29), wherein the Y-axis detection magneto-resistance elements (30, 32) are respectively arranged on the Y-axis quality blocks (14, 16) corresponding to the positions of the Y-axis detection magnets (6, 8), the X-axis detection magneto-resistance elements (31, 33) are respectively arranged on the X-axis quality blocks (15, 17) corresponding to the positions of the X-axis detection magnets (7, 9), and the Z-axis detection magneto-resistance elements (26, 27, 28, 29) are respectively arranged on the Z-axis detection quality blocks (46, 47, 48, 49) corresponding to the positions of the Z-axis detection magnets (10, 11, 12, 13);

the detection electrode assembly includes: z-axis detection electrodes (18, 19, 20, 21), Y-axis detection electrodes (22, 24) and X-axis detection electrodes (23, 25), the Z-axis detection electrodes (18, 19, 20, 21), the Y-axis detection electrodes (22, 24) and the X-axis detection electrodes (23, 25) are respectively arranged at the edges close to the Y-axis quality blocks (14, 16) and the X-axis quality blocks (15, 17), the Z-axis detection magnetic resistance elements (26, 27, 28, 29) are connected with the Z-axis detection electrodes (18, 19, 20, 21) through a signal detection lead (87), and the Y-axis detection magnetic resistance elements (30, 32) or the X-axis detection magnetic resistance elements (31, 33) are connected with the Y-axis detection electrodes (22, 24) or the X-axis detection electrodes (23, 25) through another signal detection lead (86).