A kind of electromagnetic energy self-powered sensor
Technical field
The present invention relates to a kind of transducer, especially relate to a kind of electromagnetic energy self-powered sensor.
Background technology
In recent years, along with making rapid progress of MEMS (micro electro mechanical system) research, various microminiaturizations, intellectuality and networked transducer obtain fast development.The electric energy supply mode of conventional sensor system (by extraneous physical connection or the mode that provides from charged pool) just constantly runs into challenge, even has a strong impact on the application and the development of modern intellectualized sensor, becomes the sensing technology development and one of bottleneck of using.For many application scenarios, necessary embedded material of intelligent miniature transducer or inside configuration, the output of signal and the supply of power supply become serious problem.In some occasion, the line between the replacing of battery and transducer and unit under test or even can't realize, for example, the permanent detection of biological intracorporeal organ and blood vessel state; The parameter measurement of many moving objects: the measurement of measurement, doughnut internal pressure, temperature and the friction of the most advanced and sophisticated acceleration of screw when the parameter testing of rotor, helicopter rotation; The demarcation of sensing in the intellectual material structural system and measurement, particle etc.Therefore, at present domestic and international many research institutions just are being devoted to study a kind of long-term, that can absorb ambient energy, brand-new self-powered sensor and are realizing permanent energy resource supply.
Solar energy and luminous energy are a more satisfactory external energy in the existing self-powered energy, the method that adopts opto-electronic conversion can be the power supply of transducer and instrument effectively, yet, its application is limited by environmental condition, light can not be applied to and many occasions can't be arrived, as, in opaque article inside.
Because the space electromagnetic wave is ubiquitous, and has the advantage that many other self energizing modes do not have, therefore, electromagnetic energy is the very promising self-powered energy of another kind.The electromagnetic excitation transducer is divided into two classes by the energy coupled modes: inductance coil coupled mode and day line style.
The passive sensor of inductance coil coupling energy supply and transponder can be used as sensing amount and identity monitoring, have been widely used in the Item Management and intelligentized traffic system on market, library, airport.Yet adopt electromagnetic coupled modes such as coil, energy mainly concentrates on the very near zone of hub of a spool, and the distance of its sensing is very near, and 1 meter distance has been distant coupling, and long range systems has been very rare more than 1 meter.
It line style transducer adopts the electromagnetic energy of antenna collection space, be converted into the energy of other form then efficiently through SAW (Surface Acoustic Wave) device, the measured size of its energy perception, then, modulated sensing amount is changed into the receiving system that electromagnetic energy sends to far-end efficiently by antenna, realize the sensing and the measurement of passive and wireless.Because the difference of power conversion mode, it has farther measuring distance than the transducer of inductance coupling high.
Abroad the research of passive and wireless transducer is started from eighties of last century the late nineteen eighties, domestic since the nineties middle and later periods in last century just to the exploration of passive and wireless transducer, obtained many progress and achievement in research at present, expand to many applications.At present, Passive Wireless SAW Sensors is as a kind of emerging transducer, show very tempting development potentiality, yet, in present passive and wireless transducer, no matter be mode of resonance or delay line type, energy all is coupled to output interdigital transducer (IDT) by antenna, change surface acoustic wave then, and reflect after same interdigital transducer is converted to electromagnetic wave and is launched by the same antenna through reflecting grating (or reflecting grating array), thereby still there is a problem of following several respects: 1, the piezoelectricity SAW (Surface Acoustic Wave) device itself is a passive device, and it need not the power supply power supply, but it does not have the gathering and the storage of energy, can't guarantee when being configured to the intellectualized sensor unit, the electric energy of work is provided for the semiconductor signal processing circuit, therefore, can not realizes having self diagnosis, from the passive and wireless intellectualized sensor of handling function; 2, the distance sensing of wireless senser is nearer, has only several meters farthest, has limited application; 3, because energy is very weak, the efficient of antenna requires very high, and when frequency was low, antenna size was too big, thereby can't put into structure.
Summary of the invention
At the problem of above-mentioned existence, the invention provides a kind of have energy-storage function, self-powered, self diagnosis, handle certainly, the microminiaturized multifunction electric magnetic energy of subminiaturized intellectuality self-powered sensor.This transducer has the resonant cavity of absorption, accumulation and stored antenna energy with surface acoustic wave unidirectional interdigital transducer group and reflecting grating (array) or unidirectional interdigital transducer (group) structure, be pooled on the SAW (Surface Acoustic Wave) device electromagnetic energy is the most effective, realized the electromagnetism self-powered of sensor strip energy storage, supplied with intelligent semiconductor chip and carry out data processing and signal emission.The present invention is realized by following scheme: a kind of electromagnetic energy self-powered sensor, comprise piezoelectric substrate, antenna, sequentially built unidirectional interdigital transducer from left to right on piezoelectric substrate, output interdigital transducer and reflecting grating, unidirectional interdigital transducer, output interdigital transducer and reflecting grating are each other mutually across a certain distance, between unidirectional interdigital transducer and reflecting grating, form resonant cavity, antenna connects with unidirectional interdigital transducer, the electromagnetic energy that antenna receives is along antenna, unidirectional interdigital transducer, the output interdigital transducer one-way transmission, output interdigital transducer output energy.
Advantage of the present invention is: effectively be pooled to the electromagnetic energy around the piezoelectric transducer on the antenna, and electromagnetic energy carried out the most effective storage and conversion, the external world without any electromagnetic particular surroundings in, also can artificially launch electromagnetic signal is that sensing system is than remote power-feeding.Because the arbitrariness of this sensor unit non-transformer, no line, distribution, use unrestrictedly, particularly be fit to some circumstance complications, the difficult contact and the parameter measurement of large-scale moving object inside.Distance sensing can improve the several number magnitude, thereby enlarges the scope of using.
Description of drawings
Fig. 1 is the structure chart of embodiment one;
Fig. 2 is the structure chart of embodiment two;
Fig. 3 is the structure chart of embodiment three;
Fig. 4 is the structure chart of embodiment three.
Embodiment
Embodiment one: as shown in Figure 1, a kind of electromagnetic energy self-powered sensor, comprise piezoelectric substrate 1, antenna 2, sequentially built unidirectional interdigital transducer 5 from left to right on piezoelectric substrate 1, output interdigital transducer 3 and reflecting grating 4, unidirectional interdigital transducer 5, output interdigital transducer 3 and reflecting grating 4 are each other mutually across a certain distance, between unidirectional interdigital transducer 5 and reflecting grating 4, form resonant cavity, antenna 2 connects with unidirectional interdigital transducer 5, the electromagnetic energy that antenna 2 receives is along antenna 2, unidirectional interdigital transducer 5, output interdigital transducer 3 one-way transmissions, output interdigital transducer 3 output energy.
Embodiment two: as shown in Figure 2, on the basis of embodiment one, unidirectional interdigital transducer 5 during for the interdigital transducer group of cascade effect better.
Embodiment three: as shown in Figure 3, a kind of electromagnetic energy self-powered sensor, comprise piezoelectric substrate 1, antenna 2, on piezoelectric substrate 1, make three unidirectional interdigital transducers 5 side by side, wherein, the certain spacing of being separated by between second and third two interdigital transducers 5 forms resonant cavity therebetween, antenna 2 connects with first unidirectional interdigital transducer 5, and second and third two unidirectional interdigital transducers, 5 parallel connections are also exported energy.
Embodiment four: as shown in Figure 4, on the basis of embodiment three, disconnect the parallel connection between second and third two unidirectional interdigital transducers 5, and increase an output interdigital transducer 3 betwixt, energy is by interdigital transducer 3 outputs.
In said structure, unidirectional interdigital transducer 5 is one of key that realizes above-mentioned functions with resonant cavity.Unidirectional interdigital transducer 5 has the effect of one-way transmission signal and energy, energy can only be from antenna 2 input SAW (Surface Acoustic Wave) device, and surface acoustic wave but can not reverse transfer arrive antenna 2, therefore, the energy that antenna 2 receives is with continuous resonance and accumulate in the resonant cavity, has formed energy storage efficiently.Owing to will organize unidirectional interdigital transducer cascade effect usefulness more, thereby guarantee the energy one-way transmission of antenna 2.
Because adopting absorption space electromagnetic energy is that system constantly powers, energy storage, therefore, under normal conditions, it need not under any power source situation, can for good and all be the intelligence sensor system service.In this sensing system, make full use of piezoelectric to electromagnetic peculiar dynamo-electric conversion characteristic, electromagnetic energy around the piezoelectric transducer effectively is pooled on the antenna, and electromagnetic energy is carried out the most effective storage and conversion, realize the electromagnetism self-powered of transducer.Because adopting absorption space electromagnetic energy mode is that system constantly powers, energy storage, therefore, under normal conditions, it need not any excitation can be the service of intelligence sensor system works chronically.The external world without any electromagnetic particular surroundings in, also can artificially launch electromagnetic signal is that sensing system is than remote power-feeding.
For transducing signal and portion of energy are taken out, in actual use, the utility model can an external control circuit, and this control circuit comprises power conversion, power supply energy storage and management circuit, coupling circuit, signal processing circuit, coding and radiating circuit.The electric energy of output be by the output of transducer with the surface wave vibration mechanical energy is efficient transform after, give electrical power storage, power management, signal processing and the radio transmitter of whole system through output control circuit.Owing to the input and output path separately, thereby realize that intake compiles and signal of telecommunication output is controlled, the surface acoustic wave vibration signal be transformed to the signal of telecommunication.