CN109655674A - Faint electrostatic field measurement device and method based on weak coupling micromechanical resonator - Google Patents
Faint electrostatic field measurement device and method based on weak coupling micromechanical resonator Download PDFInfo
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Abstract
The present invention relates to a kind of faint electrostatic field measurement device and method based on weak coupling micromechanical resonator, belongs to the field micro-sensor technologies (MEMS).The electric field intensity measuremenrt chip includes the multiple resonators being cascaded by mechanical couplings beam, voltage input electrode, detecting electrode and driving electrodes, weak coupling is carried out to multiple resonators by bridge type beam, the design of the bridge type coupled beams can discharge the axial stress due to generating in process, ensure that device is not influenced by residual stress.The output signal of two resonators is drawn by two groups of detecting electrode detections and carries out difference, enhance the intensity of signal, the feedthrough electric capacity signal interference as caused by potential difference existing between driving electrodes and detecting electrode is eliminated, the stability and accuracy of measuring signal is substantially improved.Resonator two sides devise large-scale comb teeth battle array, are used equally for sensitive electric field to be measured, improve the measurement sensitivity to electric field strength to be measured, and ensure that the electrostatic field measurement of superhigh precision and the restraint to ambient noise.
Description
Fields:
The present invention relates to a kind of high-precision electrostatic field measurement method and devices, belong to electronic measuring instrument field.
Background technique
Electric field meter is a kind of electronic instrument that can measure electric field strength.Electric field strength detection is ground with monitoring in many science
Study carefully and be of great significance with field of engineering technology, especially has in fields such as aerospace, electric system extensive and important
Application demand.
Early stage people focus primarily upon electrical principles for the research of electric field measurement method, the electricity based on electric charge induction principle
The research of field sensor is the most universal, and the measuring instrument that formula electric field instrument is ground in field a kind of referred to as is electric field meter the most typical.?
Mill formula electric field instrument mainly includes the sensitive electrode for being placed in bottom and the shuttle structure two parts being located above, it leads at work
It crosses the shuttle waved constantly periodically to shield sensitive electrode, be exposed in measurement electric field, thus forms one in electrode tip and hand over
Varying signal, then by this signal processing, it is finally completed the measurement to electric field.However this kind of electric field meter volume is larger, universal resolution ratio
About in the level of 50V/m, while its need of work grounded parts, therefore it is easy to produce distortion.Mill formula electric field meter mostly by with
In transient electric fields such as measurement atmospheric electric fields, it is unable to satisfy small range, the work of high-precision electrostatic field measurement.
The rapid development of optical sensing and measuring technique provides a kind of new means for electric field measurement.A kind of common side
Method is the charge signal inductively measured in electric field using probe, is that optical signal receives processing again through circuit conversion, realizes one kind absolutely
Edge measurement；It is another kind of, it is to refer to being prolonged according to electric light phase of the crystal to electric field strength based on crystal Pockels effect
Variation measures late.The latter becomes the main stream approach of optical measurement due to the higher advantage of its precision gradually.This kind of electric field meter
Although resolution ratio compared with above-mentioned electricity Shi Genggao, but be easy influenced by ambient noises such as temperature, do not have stabilization
The property of work.
The advantages that micro field sensor based on MEMS (MEMS) technology is small in size, low in energy consumption because of its, gradually
Become the research hotspot of micromechanics chip in recent years.And mode localization mechanism reflects the change of sensitive amount by Amplitude Ration
Change, rather than amplitude itself, influence of the ambient noise to measurement is so effectively inhibited, while being also proved this kind of device tool
Standby high measurement accuracy.It is inspired by this, the present invention proposes a kind of multiple weak coupling resonators based on mode localization effect
Tandem electric field meter, by devising a kind of extensive comb teeth capacitor array for sensitive electric field to be measured and improving its measurement essence
Degree, and the resonator based on mode localization principle has also had both required job stability simultaneously.With above-mentioned two major classes electricity
Field meter is compared, which can be achieved the high-acruracy survey to small range electrostatic field, and have very strong environment common mode noise rejection
Ability.
Summary of the invention:
The purpose of the present invention is: the mode localization effect based on multiple degrees of freedom weak coupling resonator provides a kind of high-precision
Electrostatic field intensity measuring device and measurement method are spent, it can be realized the measurement to the faint electrostatic field of 0.1V/m rank.
The invention proposes the faint electrostatic field measurement devices based on weak coupling micromechanical resonator, include electric field measurement core
Piece and signal processing circuit；Electric field measurement chip includes at least two identical resonators, specifically includes resonator one
301, resonator array 302 and resonator 2 303, wherein the resonator number in resonator array 302 can be zero, i.e. resonator battle array
Column 302 can be sky；Resonator 1, resonator array 302 and resonator 2 303 are sequence in resonance directions in the horizontal direction
It places, in vertical direction, each resonator two sides pass through one group of resonance beam and are connected with the mechanical couplings beam 304 of horizontal direction
It connects, every group of the resonance beam vertical direction straight beam parallel to each other at least one；304 both ends of mechanical couplings beam pass through one respectively
Root vertical direction short beam is fixed on fixed anchor point 305, and formed shape is like bridge shape, therefore by the mechanical couplings beam 304 and two
The vertical direction short beam at end is collectively referred to as " bridge couplings beam "；The rigidity that weak coupling between resonator is embodied in bridge couplings beam is remote
Less than resonance beam rigidity, to realize weak coupling between resonator；In one 301 left side arrangement of resonator by movable comb array
312 and the comb teeth array 202 that forms of fixed broach array 313, for the sensitive intensity for applying electric field, and to weak coupling resonator
It is disturbed；Upper driving electrodes 308 and lower driving electrodes 309 are arranged in 2 303 right side upper and lower of resonator, drive resonance jointly
Device starting of oscillation；Electrode 314 is adjusted for adjusting resonator vibrational state in 2 303 right side arrangement of resonator；Whole resonators are the bottom of at
Portion is connected with DC driven electrode 315, provides DC voltage by DC driven 315；Whole system using resonator 1,
Resonator 2 303 is used as signal output end, therefore is respectively arranged 306 He of the first detecting electrode up and down on one 301 right side of resonator
Second detecting electrode 307 forms the Differential Detection electrode of resonator 1, is respectively arranged the up and down in the left side of resonator 2 303
Three detecting electrodes 310 and the 4th detecting electrode 311 form the Differential Detection electrode of resonator 2 303.By the first detecting electrode
306, the signal of the second detecting electrode 307, third detecting electrode 310 and the output of the 4th detecting electrode 311 is through signal processing circuit
205 obtain the final output signal of electric field intensity measuremenrt chip.
As a kind of optional mode, each resonator can also pass through the machinery of one group of resonance beam and horizontal direction with side
Coupled beams 304 are connected, and the other side is directly anchored on anchor point 305.
Alternatively, bridge couplings beam 304 can be the horizontal straight beam of multistage disconnected from each other, wherein every section of straight beam
Make the interconnection of two neighboring resonator.
The course of work: DC current is applied to one 301 resonator 2 303 of resonator by DC driven 315, by upper
Driving electrodes 308 apply alternating voltage with lower driving electrodes 309 and carry out exchanging driving to resonator, and weak coupling resonator is in single order
In phase vibration or reverse phase vibration, the at this time vibration of resonator 1 and resonator 2 303 are done at mode or second-order modal resonance frequency
Amplitude ratio is 1 or -1.When electric field to be measured covers movable comb array 312 and fixed broach array 313, movable comb can be changed
Electrostatic negative stiffness between tooth array 312 and resonator 1, the electrostatic negative stiffness will affect the rigidity of resonator 1, lead
It causes the amplitude ratio of one 301 resonator 2 303 of resonator to change, passes through the available electricity to be measured of the variation of detected amplitude ratio
The size of field.
A kind of high precision electro field intensity measurement method proposed by the present invention, includes the following steps:
Step 1: apply known electric field E on movable comb array 312 and fixed broach array 3131, obtain one group
Resonator amplitude ratio ui。
Step 2: amplitude ratio u is obtained by the method for linear fitiTo known electric field E1Matched curve.
Step 3: by unknown electric field E to be measured0It is applied on movable comb array 312 and fixed broach array 313, obtains
To an amplitude ratio u0。
Step 4: by amplitude ratio u0Substitute into amplitude ratio uiTo known electric field E1Matched curve in, obtain corresponding electric field
Intensity value, the electric field intensity value are above-mentioned unknown electric field E to be measured0。
Beneficial effects of the present invention: it provides based on a kind of high-precision electrostatic field by mode localization effect, the electric-field strength
Degree measurement chip includes the multiple resonators being cascaded by mechanical couplings beam, voltage input electrode, detecting electrode and
Driving electrodes.
In the present invention by bridge type beam to multiple resonators carry out weak coupling, the design of the bridge type coupled beams can discharge by
The axial stress generated in process ensure that device is not influenced by residual stress.
The output signal of resonator one and resonator two is drawn by two groups of detecting electrode detections and carries out difference, this inspection
The intensity of signal not only can be enhanced in survey method, it is often more important that can eliminate by existing between driving electrodes and detecting electrode
The stability and accuracy of measuring signal can be substantially improved in feedthrough electric capacity signal interference caused by potential difference.
Resonator two sides devise large-scale comb teeth battle array, sensitive electric field to be measured are used equally for, by making full use of comb
The positive area of tooth capacitor array increases the quantity of electric charge of comb teeth savings, improves the measurement sensitivity to electric field strength to be measured.
When applying above electric field to be measured to device, movable comb array is moved by electrostatic force, is changed between resonator
Electrostatic negative stiffness lead to the acute variation of resonator mode to affect the Energy distribution of weak coupling resonator system, with
The amplitude ratio of output resonator can amplify the sensitivity of electric field intensity measuremenrt chip as output dimension, ensure that superhigh precision
Electrostatic field measurement and restraint to ambient noise.
Measuring device proposed by the present invention includes the two or more weak couplings to be linked together by mechanical beams or electrostatic
Close resonator, multiple groups driving electrodes and detecting electrode, and be arranged in the electrostatic coupling of resonator two sides extensive fixation and
Movable comb structure.The bias voltage for setting device makes to generate charge inducing on movable comb array, when device is placed in electrostatic
When in, charge inducing drives movable comb to move under electrostatic force, changes the electrostatic between comb teeth array and resonator
Negative stiffness, so that the Energy distribution appearance of resonator system is acutely unbalance, therefore the width of two resonators as output
Value is than passing through measurement high resolution measurement of the resonator output amplitude than electric field strength may be implemented for change dramatically.Test electricity
The design on road uses closed loop test scheme: the signal on detecting electrode successively passes through trans-impedance amplifier, subtracter, bandpass filter
Closed loop is formed in driving electrodes with being loaded onto exchange after comparator；The output of two-way subtracter is subjected to rectifying and wave-filtering respectively
And it is divided by and the d. c. voltage signal of No. 1,3 resonator amplitude ratios of reflection can be obtained.Close-loop driven detection circuit can reduce resonance
The influence of noise of device, and significantly promote resolution ratio.
Detailed description of the invention:
Fig. 1 is the equivalent schematic of the weak coupling resonator array based on mode localization effect.
Fig. 2 is the operation schematic diagram of the high-precision electrostatic field meter of mode localization effect of the present invention.
Fig. 3 is the structural schematic diagram based on the high-precision electric field of mode localization effect.
Fig. 4 is to implement detection method schematic diagram of the invention (by taking Three Degree Of Freedom as an example).
Fig. 5 is matched curve figure of the obtained Amplitude Ration of the specific embodiment of the invention to electric field strength.
In figure:
The equivalent quality model of 101- resonator one, 102- resonator array equivalent mass model, 103- resonator two are equivalent
Quality model, one equivalent stiffness model of 104- resonator, the equivalent quality model of 105- connection resonator one and resonator array etc.
Imitate the coupling beam model of quality model, 106- connection resonator array equivalent mass model and the equivalent quality model of resonator two
Couple beam model, the equivalent stiffness model of 107- resonator two.
201- high-precision electrostatic field meter chip of the present invention, 202- comb teeth array, 203- multiple degrees of freedom weak coupling resonator (figure
In illustrated with Three Degree Of Freedom), 204- resonator output signal, 205- signal processing circuit.
301- resonator one, 302- resonator array, 303- resonator two, 304- mechanical couplings beam, 305- fixed anchor point,
The first detecting electrode of 306-, the second detecting electrode of 307-, the upper driving electrodes of 308-, driving electrodes under 309-, the detection of 310- third
Electrode, the 4th detecting electrode of 311-, 312- movable comb array, 313- fixed broach array, 314- adjust electrode, 315- direct current
Driving.
The output of the first detecting electrode of 401-, the output of the second detecting electrode of 402-, the output of 403- third detecting electrode, 404- the
The output of four detecting electrodes, 405- No.1 signal trans-impedance amplifier, No. bis- signal trans-impedance amplifiers of 406-, No. tri- signals of 407- are across resistance
Amplifier, No. tetra- signal trans-impedance amplifiers of 408-, one signal differential amplifier of 409- resonator, 410- resonator binary signal difference
Amplifier, 411- divider.
Specific embodiment:
Electric field measurement chip in the embodiment is implemented and passes through detection circuit to be examined with Three Degree Of Freedom resonator structure
Survey, detailed construction is as follows: the electric field measurement chip includes three points of resonators, and left side is resonator 1, and centre is only containing single
The resonator array 302 of a resonator, right side are resonator 2 303；In the present embodiment, resonance that each resonator passes through two sides
Beam is connected with the mechanical couplings beam 304 of horizontal direction, it can be achieved that weak coupling between resonator；It is by DC driven 315
Resonator provides the positive direct-current voltages signal of a 5V, is that resonator two mentions by upper driving electrodes 308 and lower driving electrodes 309
For the exchange swept-frequency signal of a 10mV, resonator is driven to vibrate by way of electrostatic force at resonance frequency；Movably combing
Apply electric field to be measured in tooth 312 and fixed broach 313；The output 401 of first detecting electrode and the second detecting electrode output 402 pass through
No.1 signal trans-impedance amplifier 405 and No. two signal trans-impedance amplifiers 406 amplify noise reduction, send to one signal differential of resonator
Signal after acquisition difference at amplifier 409；The output 403 of third detecting electrode and the 4th detecting electrode output 404 pass through No. three letters
Number trans-impedance amplifier 407 and No. four signal trans-impedance amplifiers 408 amplify noise reduction, send to resonator binary signal difference amplifier
Signal after acquisition difference at 410；Divider 411 is used to two paths of differential signals progress division arithmetic obtaining amplitude ratio output.
The course of work: the positive direct-current voltages signal of a 5V is provided for resonator by DC driven 315, passes through upper driving
Electrode 308 is that resonator two provides the swept-frequency signal that exchanges of a 10mV with lower driving electrodes 309, and weak coupling resonator is in single order
In phase vibration or reverse phase vibration, the at this time vibration of resonator 1 and resonator 2 303 are done at mode or second-order modal resonance frequency
Amplitude ratio is 1 or -1.When electric field to be measured covers movable comb array 312 and fixed broach array 313, movable comb can be changed
Electrostatic negative stiffness between tooth array 312 and resonator 1 has the electrostatic negative stiffness under electric field covering are as follows:
Wherein A indicates the effective area being overlapped between two capacitor adjacent plates；G0Indicate pole plate spacing；V indicates movable
The voltage applied on comb teeth array；F is the capacitance of entire comb teeth array；ε indicates permittivity of vacuum.Each resonator has
Two resonance peaks, resonator 1:X11With X12；Resonator 2:X21With X22.Select first resonance peak meter of each resonator
Calculate amplitude ratio U=X11/X21, the expression formula of one 301 resonator of resonator, 2 303 amplitude ratio at this time are as follows:
Wherein, k is the rigidity of left side resonator 1 and right side resonator 2 303, k2For the rigidity of intermediate resonator, kc
304 rigidity of coupled beams between resonator.In conclusion the size of electric field to be measured can be found out in conjunction with formula (2) and (3).
Electric field intensity measuremenrt method based on above-mentioned apparatus, resolving are as follows:
The first step, when electric field E to be measured applies, resonator 1 exports two peak value X11With X12, resonator 2 303 is defeated
Two peak value X out21With X22, select first resonance peak calculated amplitude ratio U=X of each resonator11/X21。
Second step brings amplitude ratio U into formula (2), due to K, K2、KCIt is known parameters, it is possible to acquire resonance
The stiffness variation amount Δ k of device.
Third step brings the stiffness variation amount Δ k acquired into formula (1), can acquire the electricity to be measured for causing the stiffness variation
The value of field E.
One of the present embodiment high precision electro field intensity measurement method, includes the following steps:
Step 1: apply 14 electric field intensity values of different sizes on movable comb array 312 and fixed broach array 313
Ei, 10 different resonator amplitude ratio U are obtained from divider 411i。
Step 2: various amplitude ratio U is obtained by the method for linear fitiTo input electric field strength EiMatched curve, such as
Shown in Fig. 5.
Step 3: by unknown electric field E to be measured0It is applied on movable comb array 312 and fixed broach array 313, from removing
Musical instruments used in a Buddhist or Taoist mass 411 obtains an amplitude ratio U0。
Step 4: by amplitude ratio U0It substitutes into and has been obtained in matched curve shown in Fig. 5, obtain corresponding electric field intensity value,
The electric field intensity value is above-mentioned electric field E to be measured0。
Claims (4)
1. the faint electrostatic field measurement device based on weak coupling micromechanical resonator, which is characterized in that include electric field measurement chip
And signal processing circuit；Electric field measurement chip include at least two identical resonators, specifically include resonator 1,
Resonator array 302 and resonator 2 303, wherein the resonator number in resonator array 302 can be zero, i.e. resonator array
302 can be sky；Resonator 1, resonator array 302 and resonator 2 303 are sequentially to put in resonance directions in the horizontal direction
It sets, in vertical direction, each resonator two sides pass through one group of resonance beam and are connected with the mechanical couplings beam 304 of horizontal direction
It connects, every group of the resonance beam vertical direction straight beam parallel to each other at least one；304 both ends of mechanical couplings beam pass through one respectively
Root vertical direction short beam is fixed on fixed anchor point 305, and formed shape is like bridge shape, therefore by the mechanical couplings beam 304 and two
The vertical direction short beam at end is collectively referred to as " bridge couplings beam "；The rigidity that weak coupling between resonator is embodied in bridge couplings beam is remote
Less than resonance beam rigidity, to realize weak coupling between resonator；In one 301 left side arrangement of resonator by movable comb array
312 and the comb teeth array 202 that forms of fixed broach array 313, for the sensitive intensity for applying electric field, and to weak coupling resonator
It is disturbed；Upper driving electrodes 308 and lower driving electrodes 309 are arranged in 2 303 right side upper and lower of resonator, drive resonance jointly
Device starting of oscillation；Electrode 314 is adjusted for adjusting resonator vibrational state in 2 303 right side arrangement of resonator；Whole resonators are the bottom of at
Portion is connected with DC driven electrode 315, provides DC voltage by DC driven 315；Whole system using resonator 1,
Resonator 2 303 is used as signal output end, therefore is respectively arranged 306 He of the first detecting electrode up and down on one 301 right side of resonator
Second detecting electrode 307 forms the Differential Detection electrode of resonator 1, is respectively arranged the up and down in the left side of resonator 2 303
Three detecting electrodes 310 and the 4th detecting electrode 311 form the Differential Detection electrode of resonator 2 303；By the first detecting electrode
306, the signal of the second detecting electrode 307, third detecting electrode 310 and the output of the 4th detecting electrode 311 is through signal processing circuit
205 obtain the final output signal of electric field intensity measuremenrt chip.
2. the faint electrostatic field measurement device based on weak coupling micromechanical resonator as described in claim 1, which is characterized in that
The side of each resonator is connected by one group of resonance beam with the mechanical couplings beam 304 of horizontal direction, and the other side is straight
It connects and is fixed on anchor point 305.
3. the faint electrostatic field measurement device based on weak coupling micromechanical resonator as described in claim 1, which is characterized in that
The bridge couplings beam 304 is the horizontal straight beam of multistage disconnected from each other, wherein every section of straight beam makes the mutual of two neighboring resonator
It is connected.
4. the method that the device based on one of such as claim 1-3 carries out high-precision electric field intensity measuremenrt, which is characterized in that including
Following steps:
Step 1: apply known electric field E on movable comb array 312 and fixed broach array 3131, obtain one group of resonator
Amplitude ratio ui；
Step 2: amplitude ratio u is obtained by the method for linear fitiTo known electric field E1Matched curve；
Step 3: by unknown electric field E to be measured0It is applied on movable comb array 312 and fixed broach array 313, obtains one
Amplitude ratio u0；
Step 4: by amplitude ratio u0Substitute into amplitude ratio uiTo known electric field E1Matched curve in, obtain corresponding electric field strength
Value, which is above-mentioned unknown electric field E to be measured0。
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| CN111487435B (en) * | 2020-05-14 | 2022-03-11 | 东南大学 | Air flow velocity measuring device based on three working modes of weak coupling resonator group |
| CN112163358B (en) * | 2020-09-30 | 2023-09-26 | 中国科学院空天信息创新研究院 | Method and device for realizing reserve pool computing hardware based on coupling MEMS resonator |
| CN112163358A (en) * | 2020-09-30 | 2021-01-01 | 中国科学院空天信息创新研究院 | Implementation method and device of reserve pool computing hardware based on coupling MEMS resonator |
| CN113030515B (en) * | 2021-03-11 | 2022-04-22 | 东南大学 | Device for directly measuring amplitude ratio of weak coupling resonator |
| CN113030515A (en) * | 2021-03-11 | 2021-06-25 | 东南大学 | Device for directly measuring amplitude ratio of weak coupling resonator |
| CN114113814A (en) * | 2021-11-24 | 2022-03-01 | 北京中科飞龙传感技术有限责任公司 | Electrostatic force tuning type MEMS electric field sensor and detection method |
| CN114137325A (en) * | 2021-11-30 | 2022-03-04 | 中国人民解放军陆军工程大学 | Bionic circuit and method for non-contact electrostatic potential distribution test |
| CN114137325B (en) * | 2021-11-30 | 2022-09-27 | 中国人民解放军陆军工程大学 | Bionic circuit, system and method for non-contact electrostatic potential distribution test |
| CN114910714A (en) * | 2022-05-12 | 2022-08-16 | 东南大学 | Singularity-based high-sensitivity charge sensor and application method thereof |
| CN114910714B (en) * | 2022-05-12 | 2024-02-02 | 东南大学 | High-sensitivity charge sensor based on singular point and use method thereof |
| CN117289038A (en) * | 2023-09-27 | 2023-12-26 | 清华大学 | Electric field measuring device, system and method |
| CN117517803A (en) * | 2023-11-13 | 2024-02-06 | 北京信息科技大学 | Vertical modulation resonant electric field sensor and preparation method thereof |
| CN117517803B (en) * | 2023-11-13 | 2024-05-07 | 北京信息科技大学 | Vertical modulation resonant electric field sensor and preparation method thereof |
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