CN206593664U - A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration - Google Patents
A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration Download PDFInfo
- Publication number
- CN206593664U CN206593664U CN201720240974.6U CN201720240974U CN206593664U CN 206593664 U CN206593664 U CN 206593664U CN 201720240974 U CN201720240974 U CN 201720240974U CN 206593664 U CN206593664 U CN 206593664U
- Authority
- CN
- China
- Prior art keywords
- circuit
- switch
- amplitude
- loop
- frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
The utility model discloses a kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration, feature is：Closed loop is constituted by gyro sensors device, reading circuit, comparator, phaselocked loop, amplitude regulating circuit and switch 2, is responsible for driving gyro sensors device and is vibrated along drive shaft；Amplitude extracts circuit, amplitude regulating circuit and reading circuit, gyro sensors device and constitutes closed loop, is responsible for control gyro sensors device oscillation amplitude constant；Exciting circuit is responsible for the device vibration of excitation gyro sensors, frequency measurement circuit is responsible for reading oscillation signal frequency value, voltage prewired circuit is responsible for frequency values being converted into preset voltage signal, and is applied on the voltage controlled oscillator in phaselocked loop, a vibration frequency for preset voltage controlled oscillator.The advantage of closed-loop driving circuit of the present utility model is：Vibration frequency is played by preset voltage controlled oscillator, using the narrow-band filtering and frequency tracking function of phaselocked loop, electricity vibration generation is prevented effectively from, and available normal pressure integrated circuit technology is realized.
Description
Technical field
The utility model is related to a kind of closed-loop driving circuit of micro-mechanical gyroscope, and it is micro- that especially a kind of anti-electricity vibrates
Mechanical gyroscope closed-loop driving circuit.
Background technology
MEMS (Micro-Electro-Mechanical System, MEMS) is collection microsensor, micro- execution
The micro- energy of device, micro mechanical structure, micro battery, signal transacting and control circuit, high-performance electronic integrated device, interface, communication etc.
In the microdevice or system of one.Micro-mechanical gyroscope is a kind of important inertial MEMS.Typical micromechanical gyro
Instrument is made up of senser element and interface circuit two parts, and its operation principle is to be based on coriolis force (Coriolis Force) effect.
By taking resonant mode capacitor type micro-mechanical gyroscope as an example, as shown in figure 1, closed-loop driving circuit is first by the driven-mode (X of senser element
Direction) driving is to resonant condition, when there is extraneous angular velocity vector ΩzDuring input, size will be produced for 2M in sensed-mode (Y-direction)
Ω v coriolis force Fc, this coriolis force can cause Y-direction to produce frequency and X-direction identical amplitude modulation displacement signal y (t), so as to draw
Detection electrode equivalent capacity C (t) changes are played, by detecting circuit reading C (t) and demodulating filtering, you can obtain reflecting input angle
Rate signal ΩzOutput voltage signal Vout。
Due to the limited precision of micro-mechanical gyroscope senser element processing technology, the driving stage on senser element driving direction
Inevitably there is a parasitic capacitance between plate and drive feedback pole plate, be referred to as parasitic flying capcitor, as shown in Figure 2.
Due to the presence of parasitic flying capcitor, cause drive signal directly can be capacitively coupled to drive feedback end by this, and bring
Many negative effects.Main negative effect includes the generation and initiation " electricity vibration " for preventing " electrical-mechanical " from vibrating.Such as
Shown in Fig. 3, " electrical-mechanical " vibration refers to closed-loop driving circuit and driving pole plate equivalent capacity CdIt is equivalent with drive feedback pole plate
Electric capacity CsThe vibration of formation, is typically determined by gyroscope drive shaft resonant frequency, in several KHzs (kHz) to tens KHzs
(kHz) it is expectation in the range of；And " electricity vibration " refers to closed-loop driving circuit and parasitic flying capcitor CfWhat is formed shakes
Swing, by closed-loop driving circuit structure and parasitic flying capcitor CfSize it is relevant, be not typically more than hundred KHzs (kHz)
Expect what is occurred.But, closed-loop driving circuit and the loop that parasitic flying capcitor is constituted meet gain condition that vibration occurs with
During phase condition, gyroscope be possible to fall into electricity frequency of oscillation point and can not normal work, accordingly, it would be desirable to try every possible means to avoid electricity
Learn vibration.
The reason for parasitic flying capcitor prevents " electrical-mechanical " from vibrating generation is analyzed as follows.As shown in figure 3, being posted when existing
Raw flying capcitor CfWhen, the electric current of closed-loop driving circuit detection is through CfThe electric current i of couplingfWith microthrust test drive feedback plate end
Electric current isSuperposition.Due to ifAnd isThere is 90 degree of phase difference, if ifMuch larger than is, because phase condition can not expire in loop
Foot, desired " electrical-mechanical " vibration will not occur.Oscillator electrical model in Fig. 3 can be expressed as
Wherein, X is the displacement of gyroscope mass, FextFor driving force, mxFor gyroscope mass X-direction weight, ωx
For the intrinsic angular frequency of gyroscope drive shaft, Q is gyroscope drive shaft quality factor, VdcAnd VbRespectively drive end and drive feedback
The DC differential pressure at end, VdrIt is driving voltage, CdFor driving pole plate equivalent capacity, CsFor drive feedback pole plate equivalent capacity, KF/V 2For
Driving voltage turns driving force conversion coefficient, Kc/xIt is displacement-capacitance conversion coefficient.The expression formula of oscillator transconductor can be obtained by formula (1)
For
Make mutual conductance phase in formula (2) be equal to zero, equation can be obtained
Wherein ωdFor driving signal frequency.To cause formula (3) there are Real Number Roots, need to meet
Formula (4) shows, it is to avoid the generation method of electricity vibration mainly has two, and first is from senser element Machine Design angle
Degree, reduces bridging parasitic capacitance C as far as possiblefValue；Second be from circuit design angle, can be by changing each in formula (4)
Variable, such as improve the polarizing voltage V being applied on microthrust test massp, to improve DC differential pressure VbAnd Vdc。
The method for avoiding electricity to vibrate at present includes, in terms of Machine Design, has and changes backing material into glass (ginseng by silicon
See Alper S E, Akin T.Symmetrical and decoupled nickel microgyroscope on
insulating substrate[J].Sensors&Actuators A Physical,2004,115(2–3):336-350.)、
Increase biasing pole plate is (referring to Park H W, Kim Y K, Jeong H G, et between driving pole plate and drive feedback pole plate
al.Feed-through capacitance reduction for a micro-resonator with push–pull
configuration based on electrical characteristic analysis of resonator with
direct drive[J].Sensors&Actuators A Physical,2011,170(1):The method such as 131-138.), but this
A little methods can only substantially reduce parasitic flying capcitor, and completely electricity can not be avoided to vibrate, and can increase senser element
Design complexities.And in terms of circuit design, have bridge compensating electric capacity on trans-impedance amplifier to suppress higher-order of oscillation letter at present
Number method (referring to Alper S E, Sahin K, Akin T.An Analysis to Improve Stability of
Drive-Mode Oscillations in Capacitive Vibratory MEMS Gyroscopes[J].2009,51
(1):817-820.), but the shortcoming of the method is that big compensating electric capacity can introduce big phase shift, cause frequency of oscillation a large amount of
Off-resonance frequency.Another method is to increase the bias voltage on senser element mass, so that when avoiding oscillator starting of oscillation
Electricity oscillation point is fallen into (referring to Wu H M, Yin T, Jiao J W, et al.Analysis of parasitic feed-
through capacitance effect in closed-loop drive circuit design for capacitive
micro-gyroscope[J].Microsystem Technologies,2016,22(9):1-7.), but the shortcoming of the method is
Stable HVB high voltage bias is difficult to realize on the IC chip of conventional voltage technique.
The content of the invention
The purpose of this utility model is to provide a kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration, to solve
There are a large amount of off-resonance frequencies of frequency of oscillation in the current anti-electricity vibration design of closed-loop driving circuit to be difficult to use with HVB high voltage bias
The problem of being realized in custom integrated circuit craft piece, it is to avoid gyroscope drive shaft falls into electricity vibration and causes gyroscope can not be just
Often work.
The utility model solve the technical scheme that is used of above-mentioned technical problem for：
A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration, by gyro sensors device, reading circuit, ratio
Compared with device, phaselocked loop, amplitude extract circuit, amplitude regulating circuit, frequency measurement circuit, voltage prewired circuit, exciting circuit and
Switch 1, switch 2, switch 3 and sequential control circuit composition.The design philosophy of this closed-loop driving circuit, which connects phaselocked loop, to be entered
Closed-loop driving circuit, and the voltage controlled oscillator in phaselocked loop is preset into the startup vibration of gyroscope drive shaft resonant frequency annex,
Utilize the narrow-band filtering and frequency tracking function of phaselocked loop, it is to avoid electricity vibration occurs.
The drive feedback pole plate of described gyro sensors device is connected with reading circuit, reading circuit and comparator phase
Connection, comparator is connected with phaselocked loop, phaselocked loop is connected with amplitude regulating circuit, amplitude regulating circuit by switch 2 with
The driving pole plate of gyro sensors device disconnects or is connected to form closed loop, is responsible for driving gyro sensors device and is shaken along drive shaft
Swing.
Described amplitude is extracted circuit and is connected respectively with reading circuit and amplitude regulating circuit, and and gyro sensor
Part constitutes closed loop feedback control oscillator signal amplitude.
Described exciting circuit is disconnected or is connected with the driving pole plate of gyro sensors device by switch 1, is responsible for swashing
The vibration of gyro sensors device is encouraged, frequency measurement circuit is connected with reading circuit to be responsible for reading oscillation signal frequency value, voltage
Prewired circuit is connected with frequency measurement circuit is converted into preset voltage signal by frequency values, and by switch 3 and phaselocked loop
Voltage controlled oscillator disconnect or be connected, be responsible for preset voltage controlled oscillator rise vibration frequency.
Described sequential control circuit charge control switch 1, the closure of switch 2 and switch 3 and the sequential opened.
The concrete operating principle and work schedule of described closed-loop driving circuit are starting stage switch 1, switch 2, switch 3
Open；Opened rapidly after the closure of first stage switch 1, switch 2 is stayed open with switch 3, " encouraging-declining using oscillator
Subtract " principle, gyro sensors device is encouraged by exciting circuit, then cancels excitation, sensor presses resonant frequency damped oscillation, by
Frequency measurement circuit reads decaying ringing signal frequency values, and calculates VCO in corresponding phaselocked loop by voltage prewired circuit
The preset voltage of device；Second stage switch 1 and switch 2 are stayed open, and switch 3 is closed, and preset voltage is put on into VCO
Device；Phase III switch 1 is stayed open, and switch 3 is opened, and switch 2 is closed, and gyroscope resonant frequency is followed the trail of using phaselocked loop, and
Circuit and amplitude regulating circuit feedback control sensor oscillation amplitude are extracted by amplitude so that gyro sensors device is with resonance frequency
Rate is vibrated by constant amplitude.
The initial oscillation of the voltage controlled oscillator of described phaselocked loop can be carried out pre- by preset input control voltage
Put.
Described voltage prewired circuit will measure obtained frequency values and VCO by the conversion of frequency values to voltage
The corresponding frequency of device sets up mapping relations.
By comparing, amplitude extracts the range signal of circuit output to described amplitude regulating circuit and reference signal obtains poor
Value, and adjust the amplitude that phaselocked loop exports square-wave signal with this difference.
Compared with prior art, phaselocked loop is sealed in into closed-loop the utility model has the advantage of closed-loop driving circuit,
Gyroscope drive shaft resonant frequency is followed the trail of using the phaselocked loop of preset vibration frequency, so that electricity vibration generation is prevented effectively from, and
It can be realized with normal pressure integrated circuit technology.
Brief description of the drawings
Fig. 1 is a kind of operation principle schematic diagram for capacitor type resonant-type micro-mechanical optic fiber gyroscope instrument that the utility model is related to, but
Capacitor type is not limited only to, other types resonance type micromechanical the utility model is equally applicable；
Fig. 2 is present in the schematic diagram of micro-mechanical gyroscope senser element for bridging parasitic capacitance in the prior art；
Fig. 3 is gyro sensors device and shaking that closed-loop driving circuit is constituted in the presence of parasitic flying capcitor in the prior art
Swing the model of device；
The micro-mechanical gyroscope closed-loop driving circuit block diagram that Fig. 4 vibrates for anti-electricity described in the utility model；
Fig. 5 is closed-loop driving circuit working timing figure described in the utility model；
Fig. 6 is that one kind of exciting circuit in Fig. 4 realizes structure, is a kind of relaxation osillator of frequency-adjustable；
Fig. 7 is that one kind of frequency measurement circuit in Fig. 4 realizes structure；
Fig. 8 is that one kind of phaselocked loop in Fig. 4 realizes structure；
Fig. 9 is that one kind of voltage controlled oscillator in Fig. 8 realizes circuit, is level Four loop configuration；
Figure 10 is that one kind of reading circuit in Fig. 4 realizes structure, is the reading circuit across resistance structure for amplifying；
Figure 11 is that one kind of comparator in Fig. 4 realizes structure, is sluggish structure comparator；
Figure 12 is that one kind of amplitude extraction circuit in Fig. 4 realizes structure, is rectifier structure；
Figure 13 is that one kind of amplitude regulating circuit in Fig. 4 realizes structure, for the amplitude based on pi controller structure
Adjust circuit.
Embodiment
The micro-mechanical gyroscope closed-loop driving circuit block diagram and operation principle of a kind of anti-electricity vibration of the present utility model are such as
Shown in Fig. 4, closed-loop driving circuit extracts circuit, amplitude by gyro sensors device, reading circuit, comparator, phaselocked loop, amplitude
Adjust circuit, frequency measurement circuit, voltage prewired circuit, exciting circuit and switch 1, switch 2, switch 3 and SECO electricity
Road is constituted.Gyro sensors device, reading circuit, comparator, phaselocked loop, amplitude regulating circuit constitute closed loop with switch 2, are responsible for
Driving gyro sensors device vibrates along drive shaft.Amplitude extracts circuit, amplitude regulating circuit and reading circuit, gyro sensors
Device constitutes closed loop, is responsible for control gyro sensors device oscillation amplitude constant.Exciting circuit is responsible for encouraging gyro sensor
Part vibrates, and frequency measurement circuit is responsible for reading oscillation signal frequency value, and voltage prewired circuit is responsible for frequency values being converted into preset
Voltage signal, and be applied on the voltage controlled oscillator in phaselocked loop, a vibration frequency for preset voltage controlled oscillator.Sequential control circuit
By the closure of controlling switch 1, switch 2 and switch 3 with opening the sequential that control circuit works.
The initial oscillation of the voltage controlled oscillator of phaselocked loop can be carried out preset by preset input control voltage.
The frequency values that voltage prewired circuit is obtained measurement by the conversion of frequency values to voltage are corresponding with voltage controlled oscillator
Frequency set up mapping relations.
By comparing, amplitude extracts the range signal of circuit output to amplitude regulating circuit and reference signal obtains difference, is used in combination
This difference regulation phaselocked loop exports the amplitude of square-wave signal.
The design philosophy of closed-loop driving circuit is that the voltage controlled oscillator in phaselocked loop is preset into gyroscope drive shaft resonance
Frequency annex starts vibration, utilizes the narrow-band filtering and frequency tracking function of phaselocked loop, it is to avoid electricity vibration occurs.Thus, close
The work schedule of ring drive circuit is segmented into 4 stages, as shown in figure 5, starting stage switch 1, switch 2 and switch 3 are beaten
Open, circuit is awaited orders；First stage switch 1 is closed rapidly after opening, switch 2 and switch 3 are remained turned-off, and utilizes " swashing for oscillator
Encourage-decay " principle, encourages gyro sensors device, sensor presses resonant frequency damped oscillation, then by frequency by exciting circuit
Measuring circuit reads decaying ringing signal frequency values, and calculates voltage controlled oscillator in corresponding phaselocked loop by voltage prewired circuit
Preset voltage；Second stage switch 1 and switch 2 are stayed open, and switch 3 is closed, and preset voltage is put on into voltage controlled oscillator, in advance
Put the initial oscillation of voltage controlled oscillator；Phase III switch 1 is stayed open, and switch 3 is opened, and switch 2 is closed, using locking phase
Ring follows the trail of gyroscope resonant frequency, and extracts circuit and amplitude regulating circuit feedback control sensor oscillation amplitude by amplitude, makes
Gyro sensors device is obtained to vibrate by constant amplitude with resonant frequency.Tell about what is be related to successively below as above-mentioned temporal order
The implementation or structure of circuit module.
" excitation-decay " principle refers to, when gyro sensors device is applied in and cancels excitation after excitation a period of time, pass
Inductor component can be can be expressed as with its resonant frequency damped oscillation
V in formula (5)0For initial voltage, depending on the original state of sensor and circuit, ω0For sensor drive shaft resonance
Frequency, Q is drive shaft quality factor, and t is the time.
Fig. 6 is a kind of implementation of exciting circuit, is the relaxation osillator of a frequency-adjustable, can pass through during work
Adjust off chip resistor RsetBy oscillator output signal frequency tuning into the resonant frequency close to gyro sensors device drive shaft,
Then cancelled after excitation a period of time.The general principle of relaxation osillator in Fig. 6 is described as follows：Reference current IcIt is alternately two
Individual electric capacity Cm1And Cm2Voltage on charging, two electric capacity is through comparator and reference voltage VrefCompare, obtained data signal warp
Cross set-reset flip-floop and produce control signal Vc1And Vc2, it is applied to M2~5Capacitor charge and discharge is controlled on the phase inverter of composition.Due to electric discharge
Speed is far longer than charging, therefore can not consider discharge time when calculating, then control signal Vc2Cycle be represented by
Wherein Δ V is charge voltage range, CmFor charge and discharge capacitance.Output signal fcFrequency be represented by
Charging current IcBig I by off chip resistor RsetIt is adjusted, expression formula is
Wherein, VrefFor reference voltage.Convolution (6), (7) and (8), the centre frequency that can obtain bandpass filter is
Wherein, from formula (9), by adjusting off chip resistor Rset, you can realize the frequency regulation of output signal.
Fig. 6 is only that one kind of exciting circuit realizes structure, but is not limited to such a structure.
Fig. 7 is a kind of structure of realizing of frequency measurement circuit, but not limited to this structure, and comparator is by the input of oscillatory extinction
Signal VinIt is transformed into square-wave signal Vcomp, then by counter pass through clock Clk control output digit signals.
Voltage prewired circuit can be realized by digital analog converter, but not limited to this structure.The digit and frequency of digital analog converter
Measuring circuit output digit is mutually unified, and by controlling the reference voltage of digital analog converter to realize and VCO in phaselocked loop
The frequency correspondence of device.For example, frequency measurement circuit output is 14 position digital signals, then maximum can characterize (214- 1) Hz, i.e.,
About 16.4kHz signal, then digital analog converter select 14；Assuming that the voltage controlled oscillator maximum oscillation frequency in phaselocked loop is
224Hz, if senser element resonant frequency is 2 to the maximum14Hz, then the frequency divider in phaselocked loop be set to 210Frequency dividing, if control voltage
Scope is 1~4V, then digital analog converter reference voltage is arranged to 1.5V, and biasing is set to 2.5V, then digital analog converter output is also 1
~4V, so actually measured frequency can be just transmitted on voltage controlled oscillator by preset voltage.
Fig. 8 is a kind of structure of realizing of charge pump phase lock loop, but not limited to this structure, by phase frequency detector, charge pump, low
Bandpass filter, voltage controlled oscillator and frequency divider composition, preset voltage load on voltage controlled oscillator input.
Fig. 9 is that a kind of voltage controlled oscillator realizes structure, is level Four loop configuration, but not limited to this structure.Gain in figure
Level is using the fully differential structure of wide tuning range, input control voltage VcontChanged by adjusting gain stage tail current source size
To load capacitance CLCharging-discharging cycle, so as to adjust output signal frequency of oscillation.Buffer stage employs the difference of current mirror load
Differential signal is changed into single-ended signal by point gain stage, and by phase inverter integer into square-wave signal.
Figure 10 is that a kind of reading circuit realizes structure, is across resistance structure for amplifying, but not limited to this structure.Amplify in figure
Device is fully differential structure, by fully-differential amplifier, resistance RFWith compensating electric capacity CFConstitute.Fully-differential amplifier is using folding common source
Common gate structure, and ensure that amp DC operating point is normal by input common-mode feedback and output common mode feedback.
Figure 11 is that a kind of comparator realizes structure, is hysteresis comparator structure, but not limited to this structure.Comparator is by preceding
Put big, latch, self biased differential amplifying stage and the part of output driving four is constituted, preferable can must solve input signal noise and draw
The threshold point risen misses turning problem.
Figure 12 is the implementation that a kind of oscillator signal amplitude extracts circuit, is rectifier structure, but not limited to this structure.
Rectifier is used from demodulation structure, and input differential signal produces four tunnel demodulated signals for solving through hysteresis comparator and non-overlapping clock
Tune switch is used.Under the control of demodulated signal, solution tune switch carries out full-wave rectification, the difference letter of output to input differential signal
Number through instrument amplifier change into single-ended signal output.Filter capacitor and buffer before and after solution tune switch are tuned to open to reduce solution
Close influence of the burr produced to front stage.
What it is due to phaselocked loop output is square-wave signal, therefore amplitude regulating circuit can not simply use variable gain amplifier
Realize.A kind of implementation method of amplitude regulating circuit is exported after the signal that amplitude is extracted into circuit acquisition is compared with reference value,
Output signal is used as square wave signal power sources voltage, the i.e. amplitude by adjusting the dominant frequency signal of its in square-wave signal.Realize circuit knot
As shown in figure 13, high-gain cascode structure operational amplifier is accumulated structure with the outer adjustable resistance R of piece, tunable capacitor C proportion of composing
Sub-controller, by the range signal V of inputampWith reference signal VrefCompare rear output control signal Vctr, it is used as the electricity of phase inverter
Source voltage, regulation square wave oscillation signal VinThe amplitude of (pll output signal), exports VoutSignal.Amplitude regulating circuit it is another
A kind of implementation method is that phaselocked loop first exports to square-wave signal turns triangular signal circuit by square wave and triangular wave turns sine wave letter
Number circuit changes into sinusoidal signal output, be shaken while can be adjusted using traditional pi controller with variable gain amplifier
Swing signal amplitude, but because oscillation signal frequency is general in several KHzs or tens KHzs, therefore the shortcoming of this method is
Square wave turns triangular signal circuit and triangular wave turns the filter capacitor of sine wave signal circuit and is required to be placed on outside piece, it is impossible to piece
It is upper integrated.
It is worth noting that, the foregoing is only preferred embodiment of the present utility model, this practicality is not thereby limited new
The scope of patent protection of type, the utility model can also carry out the improvement of material and structure to the construction of above-mentioned various parts,
Either it is replaced using technically equivalent ones.Therefore all equivalent knots made with specification of the present utility model and diagramatic content
Structure changes, or directly or indirectly applies to other correlative technology fields and be similarly all contained in the scope that the utility model is covered
It is interior.
Claims (4)
1. a kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration, it is characterised in that by gyro sensors device, read
Go out circuit, comparator, phaselocked loop, amplitude and extract circuit, amplitude regulating circuit, frequency measurement circuit, voltage prewired circuit, excitation
Circuit and switch 1, switch 2, switch 3 and sequential control circuit composition, the drive feedback pole of described gyro sensors device
Plate is connected with reading circuit, reading circuit is connected with comparator, comparator is connected with phaselocked loop, phaselocked loop and amplitude are adjusted
Economize on electricity road is connected, amplitude regulating circuit is disconnected or is connected to form by the driving pole plate of switch 2 and gyro sensors device
Closed loop, is responsible for driving gyro sensors device and is vibrated along drive shaft；
Amplitude is extracted circuit and is connected respectively with reading circuit and amplitude regulating circuit, and constitutes closed loop with gyro sensors device
Feedback control oscillator signal amplitude；
Exciting circuit is disconnected or is connected with the driving pole plate of gyro sensors device by switch 1, is responsible for excitation gyroscope and is passed
Inductor component vibrate, frequency measurement circuit be connected with reading circuit be responsible for read oscillation signal frequency value, voltage prewired circuit and
Frequency measurement circuit is connected is converted into preset voltage signal by frequency values, and passes through switch 3 and the VCO in phaselocked loop
Device disconnects or is connected, and that is responsible for preset voltage controlled oscillator plays vibration frequency；
The closure of sequential control circuit charge control switch 1, switch 2 and switch 3 and the sequential opened；
The work schedule of closed-loop driving circuit is to switch 1, switch 2, switch 3 starting stage to open；First stage switch 1 is closed
Close, switch 2 is stayed open with switch 3, then exciting circuit excitation gyro sensors device switchs 1 and open, excitation is cancelled, and passes
Sensor presses resonant frequency damped oscillation, and decaying ringing signal frequency values are read by frequency measurement circuit, and by voltage prewired circuit
Export the preset voltage of voltage controlled oscillator in phaselocked loop；Second stage switch 1 and switch 2 are stayed open, and switch 3 is closed, will be pre-
Put voltage and put on voltage controlled oscillator；Phase III switch 1 is stayed open, and switch 3 is opened, and switch 2 is closed, and phaselocked loop follows the trail of top
Spiral shell instrument resonant frequency, and circuit and amplitude regulating circuit feedback control sensor oscillation amplitude, gyro sensors are extracted by amplitude
Device is vibrated with resonant frequency by constant amplitude.
2. a kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration according to claim 1, it is characterised in that
The initial oscillation of the voltage controlled oscillator of described phaselocked loop can be carried out preset by preset input control voltage.
3. a kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration according to claim 1, it is characterised in that
The frequency values that described voltage prewired circuit is obtained measurement by the conversion of frequency values to voltage are corresponding with voltage controlled oscillator
Frequency sets up mapping relations.
4. a kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration according to claim 1, it is characterised in that
By comparing, amplitude extracts the range signal of circuit output to described amplitude regulating circuit and reference signal obtains difference, and uses this
Difference regulation phaselocked loop exports the amplitude of square-wave signal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720240974.6U CN206593664U (en) | 2017-03-14 | 2017-03-14 | A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720240974.6U CN206593664U (en) | 2017-03-14 | 2017-03-14 | A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206593664U true CN206593664U (en) | 2017-10-27 |
Family
ID=60123329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720240974.6U Active CN206593664U (en) | 2017-03-14 | 2017-03-14 | A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206593664U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106885563A (en) * | 2017-03-14 | 2017-06-23 | 宁波大学 | A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration |
| CN109945849A (en) * | 2019-04-02 | 2019-06-28 | 四川知微传感技术有限公司 | A kind of closed loop phase lock driving circuit structure based on MEMS gyroscope |
| CN110470291A (en) * | 2019-09-04 | 2019-11-19 | 中国海洋大学 | A kind of MEMS resonant formula gyroscope interface circuit and TT&C system |
-
2017
- 2017-03-14 CN CN201720240974.6U patent/CN206593664U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106885563A (en) * | 2017-03-14 | 2017-06-23 | 宁波大学 | A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration |
| CN106885563B (en) * | 2017-03-14 | 2023-05-05 | 宁波大学 | Micro-mechanical gyroscope closed-loop driving circuit capable of preventing electric oscillation |
| CN109945849A (en) * | 2019-04-02 | 2019-06-28 | 四川知微传感技术有限公司 | A kind of closed loop phase lock driving circuit structure based on MEMS gyroscope |
| CN109945849B (en) * | 2019-04-02 | 2023-09-26 | 四川知微传感技术有限公司 | Closed-loop phase-locked driving circuit structure based on MEMS gyroscope |
| CN110470291A (en) * | 2019-09-04 | 2019-11-19 | 中国海洋大学 | A kind of MEMS resonant formula gyroscope interface circuit and TT&C system |
| CN110470291B (en) * | 2019-09-04 | 2023-11-24 | 中国海洋大学 | MEMS resonant gyroscope interface circuit and measurement and control system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106885563A (en) | A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration | |
| CN103822623B (en) | A kind of oscillatory type silicon micromechanical gyro quadrature error closed loop compensation circuit | |
| CN102650522B (en) | Signal processing circuit, physical quantity detecting device, and angular speed detecting device | |
| CN108253952B (en) | Zero-bias self-calibration MEMS gyroscope and zero-bias self-calibration method thereof | |
| US7481111B2 (en) | Micro-electro-mechanical sensor with force feedback loop | |
| FI126019B (en) | MEMS resonator drive current circuitry | |
| Antonello et al. | Automatic mode matching in MEMS vibrating gyroscopes using extremum-seeking control | |
| Zaman et al. | High performance matched-mode tuning fork gyroscope | |
| CN206593664U (en) | A kind of micro-mechanical gyroscope closed-loop driving circuit of anti-electricity vibration | |
| CN102538774B (en) | Closed-loop phase lock fixed amplitude drive circuit of micro-solid modal gyroscope | |
| FI125611B (en) | Traction circuit for activating the MEMS resonator | |
| Aaltonen et al. | An analog drive loop for a capacitive MEMS gyroscope | |
| CN102650520B (en) | Driving circuit, physical quantity detection device, and angular velocity detection device | |
| EP1784653A2 (en) | Resonator-based magnetic field sensor | |
| CN107449413A (en) | To the continuous monitoring of the drive amplitude in vibration micro-electro-mechanical gyroscope | |
| CN102650521A (en) | Detecting circuit, physical quantity detecting device, and angular speed detecting device | |
| CN208847194U (en) | Driving circuit and MEMS gyroscope for MEMS gyroscope | |
| CN102692221B (en) | Micro-solid mode gyroscope close-loop driven and coriolis force testing circuit | |
| CN109029409A (en) | Parameter amplification method and its device in a kind of tunable grid structure micromechanical gyro | |
| CN206378139U (en) | A kind of micro-mechanical gyroscope of quadrature bias from elimination | |
| TWI531806B (en) | Dual-functional resonant based magnetic field sensor | |
| Langfelder et al. | Frequency modulated MEMS gyroscopes: Recent developments, challenges and outlook | |
| US6374671B1 (en) | Method of stimulating an oscillator control for capacitive measurement of strength, acceleration and/or rotation speed | |
| CN107979351B (en) | Coupling piezoresistive MEMS oscillator based on high-order synchronization | |
| Guërard et al. | Quartz structures for Coriolis Vibrating Gyroscopes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |