CN203929902U - A kind of MEMS resonant mode charge sensor with flexible lever - Google Patents
A kind of MEMS resonant mode charge sensor with flexible lever Download PDFInfo
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- CN203929902U CN203929902U CN201420237034.8U CN201420237034U CN203929902U CN 203929902 U CN203929902 U CN 203929902U CN 201420237034 U CN201420237034 U CN 201420237034U CN 203929902 U CN203929902 U CN 203929902U
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Abstract
The utility model discloses a kind of MEMS resonant mode charge sensor with flexible lever.It comprises anchor point, double-ended tuning fork resonant element, drive electrode, induction electrode, two flexible levers, electric charge input end, one end of double-ended tuning fork resonant element is connected with anchor point, the other end is connected with two flexible levers, described flexible lever comprises interconnective flexible lever fulcrum, flexible lever input end, flexible lever output terminal, double-ended tuning fork resonant element and drive electrode, induction electrode are coupled, and flexible lever and electric charge input end are coupled.Adopt double-ended tuning fork as resonant element, energy loss when resonance is little; Amplify the electrostatic force being caused by input charge by flexible lever, increase the change amount of resonance frequency, obtain higher resolution, can record the small quantity of electric charge; Device simple in structure can be worked under room temperature environment, is easy to realize batch production.
Description
Technical field
The utility model belongs to the sensor field in MEMS (micro electro mechanical system) (MEMS) technical field, particularly relates to a kind of MEMS resonant mode charge sensor with flexible lever.
Background technology
Charge sensor based on MEMS can detect small electric charge, has high-resolution, and can under room temperature environment, use, and the field that therefore has a wide range of applications, comprises biomedicine, space probation, mass spectrophotometry and airborne detection of particulates etc.
MEMS resonator refers to by the additional frequency values driving signal identical with its natural frequency, and device is vibrated under resonance frequency, and its resonant frequency value is relevant with device material therefor and geometry.Resonator based on MEMS has been widely used in the measurement of physical quantity, comprises pressure, quality, temperature and acceleration etc., and MEMS resonator is also widely used as wave filter simultaneously.
MEMS resonator can be measured tiny signal, has higher stability, and MEMS technique and IC technical compatibility, and the same chip that can realize MEMS device and IC circuit is integrated, and therefore, MEMS resonator more and more receives people's concern.
Due to the deficiency of mounting technology in the manufacture of MEMS device fabrication, the lever in MEMS device cannot reach the structure identical with macroscopical lever, therefore in MEMS, conventionally adopts flexible structure to realize the amplification of lever.
At present, in the world the research of MEMS charge sensor is obtained to greater advance, the people such as the Patrick S. Riehl of Univ California-Berkeley have designed the charge detection meter [1] based on time-modulation electric capacity, there is higher resolution, but it realizes comparatively complicated, and test result is subject to the impact of noise and stray capacitance obvious.The people such as the Joshua E.-Y. Lee of univ cambridge uk have designed the charge detection sensor [2] based on resonance frequency output, and it is simple in structure, has effectively avoided stray capacitance, but its resolution is lower.
Therefore, be necessary to provide a kind of stable output signal, be easy to realize and the high MEMS charge sensor of resolution.
Citing document:
【1】P.S. Riehl, K.L. Scott, R.S. Muller, R.T. Howe, J.A. Yasaitis, Electrostatic charge and field sensors based on micromechanical resonators, J. Microelectromech. Syst. Vol. 12, pp. 557-589, 2003
【2】J. E.-Y. Lee, B. Bahreyni, A. A. Seshia, An axial strain modulated double ended tuning fork electrometer, Sens. Actuators A, vol. 148, pp.395-400, 2008。
Summary of the invention
For overcome the output of existing MEMS charge sensor or signal unstable, realize complexity or the low deficiency of resolution, the utility model provides a kind of MEMS resonant mode charge sensor with flexible lever, this charge sensor not only has high resolution, and simple in structure, easily detect output signal.
The utility model solves the technical scheme that its technical matters adopts:
Comprise anchor point, double-ended tuning fork resonant element, drive electrode, induction electrode, two flexible levers, electric charge input end with the MEMS resonant mode charge sensor of flexible lever, one end of double-ended tuning fork resonant element is connected with anchor point, the other end is connected with two flexible levers, described flexible lever comprises interconnective flexible lever fulcrum, flexible lever input end, flexible lever output terminal, double-ended tuning fork resonant element and drive electrode, induction electrode are coupled, and flexible lever and electric charge input end are coupled.
Described two flexible levers are arranged symmetrically with, the power of cancelling out each other and producing along flexible lever arm direction, and the power arm of flexible lever is greater than resistance arm, and flexible lever is for amplifying the electrostatic force being caused by electric charge input.
The structured material of the described MEMS resonant mode charge sensor with flexible lever is monocrystalline silicon or polysilicon.
The described layout with drive electrode, anchor point and two flexible lever fulcrums in the MEMS resonant mode charge sensor of flexible lever has ensured planar anti-phase motion of double-ended tuning fork resonant element two teeth, has avoided out-of-plane motion.
The input end of electric charge and the input end of flexible lever form electric capacity, while having electric charge input, produce electrostatic force, attract the input end of lever, and according to the amplification principle of lever, output terminal obtains the power output of an amplification, causes the variation of resonance frequency.The variable quantity of resonance frequency and input charge amount are certain relation.
Can find out from above-mentioned technical scheme, the beneficial effects of the utility model are: adopt double-ended tuning fork as resonant element, have higher resonance frequency, energy loss when resonance is little, can ensure higher quality factor; Amplify the electrostatic force being caused by input charge by flexible lever, increase the change amount of resonance frequency, obtain higher resolution, can record the small quantity of electric charge; Device simple in structure can be worked under room temperature environment, working stability; Structured material can adopt monocrystalline silicon or polysilicon.
brief description of the drawings
Fig. 1 is the structural representation with the MEMS resonant mode charge sensor of flexible lever;
Fig. 2 is circuit connection diagram of the present utility model;
Fig. 3 is the structural representation of flexible lever in the utility model;
Fig. 4 is system block diagrams of the present utility model;
Fig. 5 is the input charge amount that obtains of ANSYS emulation and the graph of a relation of resonance frequency variable quantity;
In figure: anchor point 1, double-ended tuning fork resonant element 2, drive electrode 3, induction electrode 4, flexible lever fulcrum 5, flexible lever input end 6, flexible lever output terminal 7, electric charge input end 8.
Embodiment
For making the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with accompanying drawing, the utility model is further described, wherein:
In Fig. 1, comprise anchor point 1, double-ended tuning fork resonant element 2, drive electrode 3, induction electrode 4, two flexible levers, electric charge input end 8 with the MEMS resonant mode charge sensor of flexible lever, one end of double-ended tuning fork resonant element 2 is connected with anchor point 1, the other end is connected with two flexible levers, described flexible lever comprises interconnective flexible lever fulcrum 5, flexible lever input end 6, flexible lever output terminal 7, double-ended tuning fork resonant element 2 is coupled with drive electrode 3, induction electrode 4, and flexible lever and electric charge input end 8 are coupled.
Described two flexible levers are arranged symmetrically with, cancel out each other along the power of flexible lever arm direction generation, flexible lever is for amplifying the electrostatic force being caused by electric charge input, and the suffered axial tension of double-ended tuning fork resonant element 2 is the vector of two flexible lever power outputs.
In Fig. 2, the detection method of the described MEMS resonant mode charge sensor with flexible lever comprises the steps:
1) by anchor point 1, flexible lever fulcrum 5 ground connection are also fixed in substrate, apply bias voltage and sinusoidal ac signal to drive electrode 3, make double-ended tuning fork resonant element 2 resonance, apply the bias voltage identical with drive electrode 3 to induction electrode 4, distance between induction electrode 4 and double-ended tuning fork resonant element 2 changes, be the quantity of electric charge on battery lead plate according to the relational expression Q=CV(Q of electric charge on electric capacity and its pole plate, C is electric capacity between pole plate, V is voltage between pole plate), and the definition I=dQ/dt(I of electric current is exchange current, t is the time), obtain the current signal of alternation,
2) electric charge that will detect is inputted by electric charge input end 8, the charge generation electrostatic force of input attracts flexible lever input end 6, power arm due to flexible lever in Fig. 3 is greater than resistance arm, make flexible lever output terminal 7 obtain the power output of an amplification, this power output meeting produces axial tension to double-ended tuning fork resonant element 2, changes its resonance frequency;
3), when double-ended tuning fork resonant element 2 resonance frequencies change, there is corresponding change in the frequency of the current signal of alternation;
In Fig. 4, MEMS charge sensor is conventionally placed under vacuum environment and measures, and can pass through Vacuum Package, or be positioned in vacuum chamber, and object is air-damped impact while eliminating resonance, reduces energy loss, improves the quality factor of resonator.After electric charge input, cause exchange current, exchange current changes into alternating voltage by trans-impedance amplifier, then carries out filtering output signal by wave filter.
In Fig. 5, obtain the relation of input charge amount and resonator resonance frequency variable quantity by ANSYS finite element simulation.Apply static-mechanical couplings unit at the input end of flexible lever, the electrostatic force that simulation is produced by the input of electric charge, obtains the natural frequency under different input charges by model analysis.
The structured material of the described MEMS resonant mode charge sensor with flexible lever is monocrystalline silicon or polysilicon, can be based on multiple processing technology, as utilizing SOI(silicon on insulator) wafer is as substrate, in a wafer, complete the structural sheet of charge sensor, reduce production costs, making flow process is simple.
Claims (3)
1. the MEMS resonant mode charge sensor with flexible lever, it is characterized in that comprising anchor point (1), double-ended tuning fork resonant element (2), drive electrode (3), induction electrode (4), two flexible levers, electric charge input end (8), one end of double-ended tuning fork resonant element (2) is connected with anchor point (1), the other end is connected with two flexible levers, described flexible lever comprises interconnective flexible lever fulcrum (5), flexible lever input end (6), flexible lever output terminal (7), double-ended tuning fork resonant element (2) and drive electrode (3), induction electrode (4) is coupled, flexible lever and electric charge input end (8) are coupled.
2. the MEMS resonant mode charge sensor with flexible lever according to claim 1, it is characterized in that described two flexible levers are arranged symmetrically with, cancel out each other along the power of flexible lever arm direction generation, the power arm of flexible lever is greater than resistance arm, and flexible lever is for amplifying the electrostatic force being caused by electric charge input.
3. the MEMS resonant mode charge sensor with flexible lever according to claim 1, is characterized in that the structured material of the described MEMS resonant mode charge sensor with flexible lever is monocrystalline silicon or polysilicon.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420237034.8U CN203929902U (en) | 2014-05-09 | 2014-05-09 | A kind of MEMS resonant mode charge sensor with flexible lever |
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| CN201420237034.8U CN203929902U (en) | 2014-05-09 | 2014-05-09 | A kind of MEMS resonant mode charge sensor with flexible lever |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954305A (en) * | 2014-05-09 | 2014-07-30 | 浙江大学 | MEMS resonant mode charge sensor with flexible levers and detection method thereof |
| CN107064657A (en) * | 2017-04-01 | 2017-08-18 | 浙江大学 | Miniature resonance type charge sensor and its method based on electrostatic stiffness modulation mechanism |
-
2014
- 2014-05-09 CN CN201420237034.8U patent/CN203929902U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954305A (en) * | 2014-05-09 | 2014-07-30 | 浙江大学 | MEMS resonant mode charge sensor with flexible levers and detection method thereof |
| CN107064657A (en) * | 2017-04-01 | 2017-08-18 | 浙江大学 | Miniature resonance type charge sensor and its method based on electrostatic stiffness modulation mechanism |
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Granted publication date: 20141105 Effective date of abandoning: 20160127 |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |