CN101135563A - Double quality blocks attune output type silicon MEMS gyroscopes - Google Patents

Abstract

The gyroscope comprises: fixed teeth, movable teeth, two mass blocks, two outer frames, two pairs of leavers and two tuning fork resonators. The first mass block and second mass block are respectively connected to the first outer frame and second outer frame through four infolding beams; two outer frames are respectively secured on the anchor point through the outer supporting beam; two outer frames are connected through a pair of folding beams; both right and left sides of the first outer frame are connected to the free end of two tuning fork resonators via the opposite direction force amplifying leaver; the both right and left sides of the outer frame are connected to the free end of two tuning fork resonators via the same direction force amplifying leaver; by testing the resonance frequency of tuning fork resonator at both ends, calculating the rotating speed inputted from outside.

Description

A kind of double quality blocks attune output type silicon MEMS gyroscope

Technical field

The present invention relates to a kind of double quality blocks attune output type silicon MEMS gyroscope, can be applicable to the navigation and the control of mini system, and can be applied to the inertial navigation system of the tactical weapon that the working time is short, cost is low, dynamic range is big.

Background technology

Gyroscope is a kind of inertia speed probe, can be used to measure the motion angular velocity of carrier, utilize three gyroscopes and three IMU (Inertial Measurement Unit that accelerometer is formed, Inertial Measurement Unit) can be widely used in the inertial navigation field for carrier provides position, attitude information.Since late 1980s, along with MEMS (Micro-Electromechanical System, MEMS (micro electro mechanical system)) development of technology, various sensors have been realized microminaturization, based on the gyroscope of MEMS technology for traditional machinery and optical gyroscope, have that cost is low, volume is little, low in energy consumption, can with advantage such as circuit is integrated, be with a wide range of applications, be subjected to the great attention of various countries, successively dropped into huge fund studied.

From detecting on the principle, the MEMS gyroscope generally adopts the capacitance detecting mode at present, comes the indirect Estimation rotating speed by the size that detects coriolis force generation displacement.When the physical dimension of device narrows down to a certain degree, the sensitivity of capacitance detecting reduces greatly, have a strong impact on gyrostatic performance, condenser type detects and must add complicated closed loop circuit simultaneously, design, the difficulty of processing of device have been increased, and be subjected to the influence of certain electricity-machine coupling, the signal to noise ratio (S/N ratio) of instrument compares less.For this reason, people are exploring new structure and detection mode always, and the T.A.W.Roessig in California, USA university Berkeley branch school in 1998 has proposed the attune output type silicon MEMS accelerometer, lay a good foundation for the gyrostatic resonant mode of MEMS detects.2002, the people such as A.A.Seshia in California, USA university Berkeley branch school have proposed attune output type silicon MEMS gyroscopes first, the mass that adopts a dither is as sensing unit, and tuning fork resonator is as detecting unit, and successfully developed principle prototype.This gyroscope converts the coriolis force that responsive angular speed produces to the tuning fork resonator change of resonance frequency, calculate the size of rotating speed by measuring two ends tuning fork resonator resonance frequency difference, gyroscope output is accurate digital signal, it is integrated to be easy to digital circuit, has that dynamic range is big, sensitivity is higher, a good advantage of the output linearity.Yet, increased mechanical loss because the dither of single mass has caused the device interference noise; The only responsive input shaft of desirable gyroscope to angular velocity, yet the not only responsive input shaft of single mass attune output type silicon MEMS gyroscopes to angular velocity, responsive external acceleration has been introduced the acceleration mushing error, thereby has been caused the measuring error of device simultaneously.

Summary of the invention

Technology of the present invention is dealt with problems and is: overcome existing attune output type silicon MEMS gyroscopes vibration noise big, can't eliminate the deficiencies such as error that external acceleration causes, a kind of double quality blocks attune output type silicon MEMS gyroscope is proposed.

Technical solution of the present invention is: a kind of double quality blocks attune output type silicon MEMS gyroscope is characterized in that: mainly be made up of quiet tooth, moving tooth, first mass, second mass, first outside framework, second outside framework, 41,42,51,52 and two tuning fork resonators 81,82 of lever.Quiet tooth and moving tooth have constituted the condenser type pole plate, first mass is connected on first outside framework by four interior folded beams 11,12,13,14, second mass is connected on second outside framework by four interior folded beams 71,72,73,74, first outside framework is connected on the anchor point 21,22 by outer brace summer 31,32, second outside framework is connected on the anchor point 23,24 by outer brace summer 61,62, links to each other by folded beam 361,362 between first outside framework and second outside framework; The first outside framework left and right sides links to each other with tuning fork resonator 81,82 free ends by lever 41,42 respectively, and the second outside framework left and right sides links to each other with tuning fork resonator 81,82 free ends by lever 51,52 respectively; Anchor point 411,421 is respectively the strong point of lever 41,42, anchor point 511,521 is respectively the strong point of lever 51,52, tuning fork resonator 81,82 stiff ends link to each other with anchor point 91,92 respectively, calculate outside input speed by the resonance frequency difference that records the two ends tuning fork resonator.

Described first mass and second mass block structure are identical, the inner moving tooth of pectination that embeds, and first mass and second mass are done with frequency, constant amplitude, vibrate in opposite phase along Y-axis;

The magnification ratio of the lever 41,42 of the described first outside framework left and right sides and the lever 51,52 of the second outside framework left and right sides is provided with by the adjustment (adjusting) lever supporting point position, realize the enlarging function of coriolis force, the magnification ratio of lever 41,42,51,52 is identical;

Described lever 41 is identical with the power amplification direction that lever 42 is realized, lever 51 is identical with the power amplification direction that lever 52 is realized;

Described lever 41,42 is opposite with the power amplification direction that lever 51,52 is realized.

Principle of the present invention as shown in Figure 1, quiet tooth and moving between cog have constituted capacitor plate, apply dc offset voltage and U on quiet tooth ₀With frequency be ω _pEquifrequency, anti-phase alternating voltage, apply 0 volt voltage on the moving tooth, moving tooth and quiet between cog generation static driven power, this static driven power drive first mass and second mass to do frequency along Y-axis are ω _pConstant amplitude, vibrate in opposite phase.When having outside rotating speed Ω to import perpendicular to chip plane (Z) axle, two masses produce the anti-phase coriolis force along X-direction, and be delivered on first outside framework and second outside framework by interior folded beam respectively, after amplifying by lever, the coriolis force of first outside framework carrying affacts the tuning fork resonator free end vertically in the other direction, the anti-phase coriolis force of second outside framework carrying affacts the tuning fork resonator free end after by the equidirectional amplification of lever vertically, has realized difference effect.When coriolis force acts on tuning fork resonator one end, resonance beam is born the compression and the tensile force of sinusoidal variations, thereby modulate the resonance frequency f of tuning fork resonator periodically,, calculate the outside input speed Ω that acts on the device by recording the resonance frequency difference Δ f of two ends tuning fork resonator.

The quiet tooth in each mass of double quality blocks attune output type silicon MEMS gyroscope and the electric capacity of moving between cog are:

$C=2\mathrm{n\ϵ}\frac{{(L-y)}^t}{d_0}+(2n-1)\mathrm{\ϵ}\frac{\mathrm{bt}}{y},---\left(1\right)$

In the formula, n is the quiet number of teeth, and ε is a specific inductive capacity, and L is the length of quiet, moving tooth, d ₀Be space width, t is a transverse tooth thickness, and b is that chi is wide, and y is the spacing between moving (quiet) increment and quiet (moving) tooth root.By the electrostatic field theory as can be known, static driven power with Be directly proportional, formula (1) asked local derviation:

$\frac{\∂C}{\∂y}=-\frac{2\mathrm{n\ϵt}}{d_0}-\frac{(2n-1)\mathrm{\ϵbt}}{y^2},---\left(2\right)$

In the course of the work, the variable quantity of y is relatively very little to the electrostatic force influence, and the electrostatic force of sound between cog can be similar to and be write as:

$F_d=\frac{1}{2}\frac{\∂C}{\∂y}{U}_D^2\≈-\frac{1}{2}\mathrm{\ϵt}(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_D^2,---\left(3\right)$

In the formula, y ₀Spacing when static between moving (quiet) increment and quiet (moving) tooth root.This electrostatic force can be approximately a normal value, U in the formula _DBe illustrated in the dc offset voltage U that applies on the quiet tooth _o, AC drive voltage U _iSum, the suffered electrostatic force of first mass can be expressed as:

${\mathrm{<figure-callout\; id="1"\; label="F\; d"\; filenames="A20071017588600101.png,A20071017588600111.png"\; state="\{\{state\}\}">F</figure-callout>}}_d\&ap;2\mathrm{\&epsiv;t}(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_0{U}_i\sin \left({\mathrm{\&omega;}}_{p}t\right),---\left(4\right)$

In the formula, ω _DLu is the frequency of AC drive voltage.In like manner, the suffered electrostatic force of second mass is:

$F_{d2}\&ap;-2\mathrm{\&epsiv;t}(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_0{U}_i\sin \left({\mathrm{\&omega;}}_{p}t\right),---\left(5\right)$

By formula (4) and formula (5) as can be known, the suffered static driven power of mass size, frequency equate that direction is opposite, and the energy that is coupled to supporting construction is changed counteracting mutually, has reduced the energy loss of the vibration noise and the device of structure, has improved gyrostatic performance.

For reducing the rigidity that gyroscope drives mode, do not strengthen the structural plan size simultaneously, adopt the folded beam structure, this beam can be approximately four semi-girder series connection, and semi-girder rigidity can be expressed as:

$K_c=\frac{3\mathrm{<figure-callout\; id="3"\; label="EI\; L\; b"\; filenames="A20071017588600101.png"\; state="\{\{state\}\}">EI</figure-callout>}}{L_b^{}},---\left(6\right)$

In the formula, E is the elastic modulus of silicon materials; I is beam moment of inertia: L _bLength for beam.Suitable four semi-girders series connection of folded beam, its rigidity can be expressed as:

$K_t=\frac{3\mathrm{EI}}{4{\mathrm{<figure-callout\; id="3"\; label="L\; b"\; filenames="A20071017588600101.png"\; state="\{\{state\}\}">L</figure-callout>}}_b^{}},---\left(7\right)$

Each mass of gyroscope links to each other with outside framework by four identical interior folded beams, and each mass can be expressed as along the global stiffness that drives mode:

$\begin{array}{cc}K=4K,=\frac{3\mathrm{EI}}{L_b^3},& I=\frac{{\mathrm{<figure-callout\; id="3"\; label="hw"\; filenames="A20071017588600101.png"\; state="\{\{state\}\}">hw</figure-callout>}}^3}{12},---\left(8\right)\end{array}$

In the formula, h is a thickness of structure; W is the width of interior folded beam.Driving the mode free-running frequency can be approximately:

$f\&ap;\frac{\sqrt{K/(m+0.375m_l)}}{2\mathrm{\&pi;}}=\frac{1}{4\mathrm{\&pi;}}\sqrt{\frac{E{w}^3}{\mathrm{\&rho;}(S+0.375S_l){\mathrm{<figure-callout\; id="3"\; label="L\; b"\; filenames="A20071017588600101.png"\; state="\{\{state\}\}">L</figure-callout>}}_b^{}}},---\left(9\right)$

In the formula, m is the effective mass of each mass; m _lIt is the gross mass of four interior folded beams; ρ is the density of silicon materials; S is the surface area of each mass; S _lBe the total surface area of four interior folded beams, driving the intrinsic angular speed of mode can be approximately:

${\mathrm{\&omega;}}_d=2\mathrm{\&pi;f}=\frac{1}{2}\sqrt{\frac{\mathrm{<figure-callout\; id="3"\; label="E\; w"\; filenames="A20071017588600101.png"\; state="\{\{state\}\}">E</figure-callout>}{w}^{}{}^3}{\mathrm{\&rho;}(S+0.375S_l){\mathrm{<figure-callout\; id="3"\; label="L\; b"\; filenames="A20071017588600101.png"\; state="\{\{state\}\}">L</figure-callout>}}_b^{}}},---\left(10\right)$

First mass is at electrostatic force F _D1Effect lower edge driving direction is done permanent width of cloth vibration, and modulation drives alternating voltage angular speed ω _pWith the intrinsic angular speed ω of driving mode _dWhen consistent, the first mass amplitude maximum, the oscillating movement equation can be expressed as:

${\mathrm{<figure-callout\; id="1"\; label="y"\; filenames="A20071017588600101.png,A20071017588600111.png"\; state="\{\{state\}\}">y</figure-callout>}}_1=Q\frac{F_{d1}}{K}=\frac{Q}{K}2\mathrm{\&epsiv;t}(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_0{U}_i\sin \left({\mathrm{\&omega;}}_{p}t\right),---\left(11\right)$

In the formula, Q is the system quality factor, and the motion that the expression driving frequency equals the system resonance frequency has been exaggerated Q doubly.In like manner, the oscillating movement equation of second mass can be expressed as:

$y_2=Q\frac{F_{d2}}{K}=-\frac{Q}{K}2\mathrm{\&epsiv;t}(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_0{U}_i\sin \left({\mathrm{\&omega;}}_p\text{t}\right),---\left(12\right)$

By equation (11) as can be known, the movement velocity of first mass is:

${\stackrel{\&CenterDot;}{y}}_1=\frac{{\mathrm{Q\&omega;}}_P}{K}2\mathrm{\&epsiv;t}(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_0{U}_i\sin \left({\mathrm{\&omega;}}_p\text{t}\right),---\left(13\right)$

By equation (12) as can be known, the movement velocity of second mass is:

${\stackrel{\&CenterDot;}{y}}_2=-\frac{Q{\mathrm{\&omega;}}_P}{K}2\mathrm{\&epsiv;t}(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_0{U}_i\cos \left({\mathrm{\&omega;}}_p\text{t}\right),---\left(14\right)$

When the Z on vertical gyro plane axle had angular velocity Ω input, the responsive Ω of two masses produced the coriolis force along X-axis, and the coriolis force that first mass produces is:

${\mathrm{<figure-callout\; id="1"\; label="F\; c"\; filenames="A20071017588600101.png,A20071017588600111.png"\; state="\{\{state\}\}">F</figure-callout>}}_c=2\mathrm{m\&Omega;}{\stackrel{\&CenterDot;}{y}}_1=\frac{4\mathrm{m\&Omega;Q}{\mathrm{\&omega;}}_P\mathrm{\&epsiv;t}}{K}(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_0{U}_i\cos \left({\mathrm{\&omega;}}_{p}t\right),---\left(15\right)$

The coriolis force that second mass produces is:

$F_{c2}=2\mathrm{m\&Omega;}{\stackrel{\&CenterDot;}{y}}_2=-\frac{4\mathrm{m\&Omega;Q}{\mathrm{\&omega;}}_P\mathrm{\&epsiv;t}}{K}(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_0{U}_i\cos \left({\mathrm{\&omega;}}_{p}t\right),---\left(16\right)$

The coriolis force F that two masses produce _C1And F _C2Two tuning fork resonators that are delivered to the outside framework both sides after amplifying by the two pairs of levers respectively axially on.

${\mathrm{<figure-callout\; id="1"\; label="F"\; filenames="A20071017588600101.png,A20071017588600111.png"\; state="\{\{state\}\}">F</figure-callout>}}_1=\frac{1}{2}{C}_1{\mathrm{<figure-callout\; id="1"\; label="F\; c"\; filenames="A20071017588600101.png,A20071017588600111.png"\; state="\{\{state\}\}">F</figure-callout>}}_c,$ $F_2=\frac{1}{2}{C}_2{F}_{c2},$ C ₁＝-C ₂， (17)

In the formula, C ₁Be the amplification coefficient of the first outside framework left and right sides lever, C ₂Be respectively the amplification coefficient of the second outside framework left and right sides lever, two masses affact the axial free-ended coriolis force vector of each tuning fork resonator and are:

$F=F_1+F_2=\frac{1}{2}{C}_1(F_{c1}-F_{c2})=\frac{4{\mathrm{<figure-callout\; id="1"\; label="C"\; filenames="A20071017588600101.png,A20071017588600111.png"\; state="\{\{state\}\}">C</figure-callout>}}_1\mathrm{m\&Omega;Q}{\mathrm{\&omega;}}_P\mathrm{\&epsiv;t}}{K}(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_0{U}_i\cos \left({\mathrm{\&omega;}}_{p}t\right),---\left(18\right)$

Because the coriolis force that two masses produce is imported tuning fork resonator after by the lever difference, has eliminated the error that extraneous acceleration causes, has improved device performance.

Tuning fork resonator is subjected to becoming the coriolis force effect when axial, and elasticity coefficient is modulated thereupon, and the tuning fork equation of motion can be expressed as:

m _rq+c _rq+(k _r+k _lcos(ω _pt))q＝F _r， (19)

In the formula, m _rBe the quality of tuning fork resonator, c _rBe the ratio of damping of tuning fork resonator, k _rFor tuning fork resonator be not subjected to coriolis force to make the elasticity coefficient of time spent system, k _lBe the modulation elasticity coefficient that the cosine axial force produces structure, F _rFor being added to the driving force on the tuning fork resonator.When considering k _lModulating action, and k _l＜＜k _rThe time, the tuning fork resonator resonance frequency is:

${\mathrm{\&omega;}}_r=\sqrt{\frac{k_r+k_l\cos \left({\mathrm{\&omega;}}_{P}t\right)}{m_r}}={\mathrm{\&omega;}}_{r0}+\frac{{\mathrm{\&omega;}}_{r0}}{2}\frac{k_l}{k_r}\cos \left({\mathrm{\&omega;}}_{P}t\right)-\frac{{\mathrm{\&omega;}}_{r0}}{8}{\left(\frac{k_1}{k_r}\cos \left({\mathrm{\&omega;}}_{p}t\right)\right)}^2+\&CenterDot;\&CenterDot;\&CenterDot;,---\left(20\right)$

In the formula, ω _R0Be the initial resonant angle speed of tuning fork resonator, ignore second order and get in a small amount:

${\mathrm{\&omega;}}_r\&ap;{\mathrm{\&omega;}}_{r0}+\frac{{\mathrm{\&omega;}}_{r0}}{2}\frac{k_l}{k_r}\cos \left({\mathrm{\&omega;}}_{p}t\right),---\left(21\right)$

Wherein:

$\frac{k_l}{k_r}=F{S}_r=0.293\frac{F{L}_r^2}{E{t}_{\mathrm{<figure-callout\; id="3"\; label="b\; w\; b"\; filenames="A20071017588600101.png"\; state="\{\{state\}\}">b</figure-callout>}}{w}_b^{}{}_3^{}},---\left(22\right)$

In the formula, L _rBe the length of tuning fork resonator central sill, t _bBe the thickness of tuning fork resonator central sill, w _bBe the width of tuning fork resonator central sill, S _rBe the index of modulation of axial force to tuning fork resonator.F is the coriolis force that affacts on each beam axle of tuning fork resonator.By the theory of frequency modulation technology as can be known, when modulation signal was the single frequency sinusoidal signal, the maximum frequency deviation of frequency-modulated wave was relevant with the amplitude of modulation signal, and with the frequency-independent of modulation signal, the output frequency of each tuning fork resonator is at its resonance frequency f _R0Swing,, constitute difference output because of coriolis force acts on two tuning fork resonators with the anti-phase form of constant amplitude, thus arbitrary instantaneous, left side tuning fork resonator frequency deviation Δ f ₁Size equals right side tuning fork resonator frequency deviation Δ f ₂, direction is opposite, promptly has: Δ f ₁=-Δ f ₂, the resonance frequency of two tuning fork resonators is poor:

$\mathrm{\&delta;f}={\mathrm{\&Delta;<figure-callout\; id="1"\; label="f"\; filenames="A20071017588600101.png,A20071017588600111.png"\; state="\{\{state\}\}">f</figure-callout>}}_1+{\mathrm{\&Delta;f}}_2=\frac{0.586}{\mathrm{\&pi;}}{S}_r{\mathrm{\&omega;}}_{r0}\frac{{\mathrm{<figure-callout\; id="1"\; label="C"\; filenames="A20071017588600101.png,A20071017588600111.png"\; state="\{\{state\}\}">C</figure-callout>}}_1\mathrm{m\&Omega;Q}{\mathrm{\&omega;}}_P\mathrm{\&epsiv;t}}{K}\&CenterDot;(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_0{U}_i\cos \left({\mathrm{\&omega;}}_{p}t\right)\&CenterDot;\mathrm{\&Omega;}---\left(23\right)$

Concern and can be expressed as between outside rotating speed and the two tuning fork resonator resonance frequency differences:

Ω＝S·δf

$S=1/(\frac{0.586}{\mathrm{\&pi;}}{S}_r{\mathrm{\&omega;}}_{r0}\frac{{\mathrm{<figure-callout\; id="1"\; label="C"\; filenames="A20071017588600101.png,A20071017588600111.png"\; state="\{\{state\}\}">C</figure-callout>}}_1\mathrm{m\&Omega;Q}{\mathrm{\&omega;}}_P\mathrm{\&epsiv;t}}{K}\&CenterDot;(\frac{2n}{d_0}+(2n-1)\frac{b}{y_0^2})U_0{U}_i\cos \left({\mathrm{\&omega;}}_{p}t\right))---\left(24\right)$

In the formula, S is the gyrostatic constant multiplier of double quality blocks attune output type silicon MEMS.When vertical gyro plane Z axle has angular velocity Ω input, after amplifying by lever, the coriolis force that two masses produce is input to the free end of tuning fork resonator, compression, tensile force that cycle changes are mediated to the resonance frequency of tuning fork resonator, the resonance frequency of two tuning fork resonators can be measured by the quiet increment of the measurement of tuning fork resonator, calculates outside rotating speed by the resonance frequency extent that records the two ends tuning fork resonator.

The present invention's advantage compared with prior art is: the double quality blocks attune output type silicon MEMS gyroscope adopts the mass of two same frequencies, constant amplitude, vibrate in opposite phase as sensing unit, the energy that two dither masses are coupled to supporting construction is cancelled out each other, and can reduce the vibration noise and the energy loss of device; The lever difference effect has been eliminated the error that extraneous acceleration causes, has improved device performance.

Description of drawings

Fig. 1 is a double quality blocks attune output type silicon MEMS gyroscope principle of work block diagram;

Fig. 2 is double quality blocks attune output type silicon MEMS gyroscope arrangement figure;

Fig. 3 is quiet tooth of double quality blocks attune output type silicon MEMS gyroscope and moving toothing figure.

Embodiment

The concrete enforcement structure of the technology of the present invention solution as shown in Figures 2 and 3, a kind of double quality blocks attune output type silicon MEMS gyroscope mainly is made up of quiet tooth 101, moving tooth 102, first mass 1, second mass 7, first outside framework 3, second outside framework 6,41,42,51,52 and two tuning fork resonators 81,82 of lever.Quiet tooth 101 and moving tooth 102 have constituted the condenser type pole plate, first mass 1 and second mass, the 7 inner moving teeth of pectination that embed, structure is identical, two masses are done with frequently along Y-axis, constant amplitude, vibrate in opposite phase, first mass 1 is by four interior folded beams 11,12,13,14 are connected on first outside framework 3, second mass 7 is by four interior folded beams 71,72,73,74 are connected on second outside framework 6, consider gyroscope power consumption and sensitivity, designing two masses is 1000～10000Hz along the natural frequency of Y-axis, it is 2000Hz along the natural frequency of Y-axis that the present embodiment designs two masses, first outside framework 3 is by outer brace summer 31,32 are connected in anchor point 21, on 22, second outside framework 6 is by outer brace summer 61,62 are connected in anchor point 23, on 24, pass through folded beam 361 between first outside framework 3 and second outside framework 6,362 link to each other.First outside framework, 3 left and right sides are respectively by the lever 41 of power amplification in the other direction, 42 with tuning fork resonator 81,82 free ends link to each other, lever 51 is amplified by equidirectional power respectively in second outside framework, 6 left and right sides, 52 with tuning fork resonator 81,82 free ends link to each other, anchor point 411,421 are respectively lever 41,42 strong points, anchor point 511,521 are respectively lever 51,52 strong points, by regulating the magnification ratio that supporting point position is provided with lever, realize the enlarging function of coriolis force, lever 41,42,51,52 magnification ratios are identical, lever 41,42 with lever 51, the 52 coriolis forces amplification directions that realize are opposite, under the physical dimension constraint, the enlargement factor that designs two levers is 10～100, the enlargement factor that the present embodiment designs two levers is 50, tuning fork resonator 81,82 stiff ends respectively with anchor point 91,92 link to each other.The double quality blocks attune output type silicon MEMS gyroscope adopts the LIGA technology to be prepared from, and is the bulk silicon structure by the preparation of technologies such as sputter, etching.In order to guarantee to produce suitable static driven power, the present embodiment applies equifrequency that 12 volts of dc offset voltages and angular frequency are 2000Hz, anti-phasely exchanges 12 volts of voltages on quiet tooth 101, apply 0 volt voltage on the moving tooth 102, the static driven power of moving tooth and the generation of quiet between cog drives first mass 1 and second mass 7, and to do angular frequency along Y-axis be ω _pAnti-phase, continuous vibration, do not collide in order to guarantee quiet increment with moving tooth root, improve the device functional reliability, to 1/5th to 1/3rd of moving tooth root distance, the present embodiment designing quality piece amplitude arrives 1/5th of moving tooth root distance less than quiet increment to designing quality piece amplitude less than quiet increment.When having outside rotating speed Ω to import perpendicular to chip plane (Z) axle, two masses produce the opposite direction coriolis force along X-direction, first mass 1 is by four interior folded beams 11,12,13,14 are delivered to coriolis force on first outside framework 3, second mass 7 is by four interior folded beams 71,72,73,74 are delivered to coriolis force on second outside framework 6, the coriolis force of first outside framework, 3 carryings is by the lever 41 of power amplification in the other direction, axially affact tuning fork resonator 81 after 42 amplifications, 82 free ends, the coriolis force of second outside framework, 6 carryings amplifies lever 51 by equidirectional power, axially affact tuning fork resonator 81 after 52 amplifications, 82 free ends have been realized difference effect.Detect principle as can be known by harmonic wave, the natural frequency of tuning fork resonator 81,82 should be greater than one of first mass 1 and second mass, 7 vibration frequency more than the order of magnitude, the natural frequency of the tuning fork resonator 81,82 of the present embodiment design is 30000Hz, when coriolis force acts on tuning fork resonator 81,82 1 ends, resonance beam is born the compression and the tensile force of sinusoidal variations, thereby modulate the resonance frequency f of tuning fork resonator 81,82 periodically, by recording the resonance frequency difference Δ f of two ends tuning fork resonator, calculate the outside input speed Ω that acts on the device.

This double quality blocks attune output type silicon MEMS gyroscope has overcome big etc. the deficiency of existing attune output type silicon MEMS gyroscopes vibration noise is big, external acceleration causes measuring error, has the error that little, the no extraneous acceleration of vibration noise and energy loss causes, the precision advantages of higher can be applicable to the navigation and the control of mini system, and can be applied to the inertial navigation system of the tactical weapon that the working time is short, cost is low, dynamic range is big.

The content that is not described in detail in the instructions of the present invention belongs to this area professional and technical personnel's known prior art.

Claims (5)

1. a double quality blocks attune output type silicon MEMS gyroscope is characterized in that: mainly be made up of quiet tooth (101), moving tooth (102), first mass (1), second mass (7), first outside framework (3), second outside framework (6), lever (41), (42), (51), (52) and two tuning fork resonators (81), (82).Quiet tooth (101) and moving tooth (102) have constituted the condenser type pole plate, first mass (1) is by four interior folded beams (11), (12), (13), (14) be connected on first outside framework (3), second mass (7) is by four interior folded beams (71), (72), (73), (74) be connected on second outside framework (6), first outside framework (3) is by outer brace summer (31), (32) be connected in anchor point (21), (22) on, second outside framework (6) is by outer brace summer (61), (62) be connected in anchor point (23), (24) on, pass through folded beam (361) between first outside framework (3) and second outside framework (6), (362) link to each other; First outside framework (3) left and right sides links to each other with tuning fork resonator (81), (82) free end by lever (41), (42) respectively, and second outside framework (6) left and right sides links to each other with tuning fork resonator (81), (82) free end by lever (51), (52) respectively; Anchor point (411), (421) are respectively the strong points of lever (41), (42), anchor point (511), (521) are respectively the strong points of lever (51), (52), tuning fork resonator (81), (82) stiff end link to each other with anchor point (91), (92) respectively, calculate outside input speed by the resonance frequency difference that records the two ends tuning fork resonator;

2. double quality blocks attune output type silicon MEMS gyroscope according to claim 1, it is characterized in that: described first mass (1) and second mass (7) structure are identical, the inner moving tooth of pectination that embeds, first mass (1) and second mass (7) are done with frequency, constant amplitude, vibrate in opposite phase along Y-axis;

3. double quality blocks attune output type silicon MEMS gyroscope according to claim 1, it is characterized in that: the lever (51) of the lever (41) of described first outside framework (3) left and right sides, (42) and second outside framework (6) left and right sides, the magnification ratio of (52) are provided with by the adjustment (adjusting) lever supporting point position, realize the enlarging function of coriolis force, the magnification ratio of lever (41), (42), (51), (52) is identical;

4. according to claim 1 or 3 described double quality blocks attune output type silicon MEMS gyroscopes, it is characterized in that: described lever (41) is identical with the power amplification direction that lever (42) is realized, lever (51) is identical with the power amplification direction that lever (52) is realized;

5. according to claim 1 or 3 described double quality blocks attune output type silicon MEMS gyroscopes, it is characterized in that: it is opposite that described lever (41), (42) and the power that realize lever (51), (52) are amplified direction.

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