CN108225544B - Double-layer multiplexing type triangular folded beam mass block resonance system and trace detection method thereof - Google Patents
Double-layer multiplexing type triangular folded beam mass block resonance system and trace detection method thereof Download PDFInfo
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Abstract
The invention discloses a double-layer multiplexing type triangular folded beam mass block resonance system and a detection method, wherein the system comprises a substrate, a first resonance test system and a second resonance test system, wherein the first resonance test system and the second resonance test system are symmetrically arranged on the upper surface and the lower surface of the substrate and have the same structure; the first resonance testing system and the second resonance testing system respectively comprise a base positioned on the substrate, an upper polar plate supported on the base and a lower polar plate positioned in the center of the surface of the substrate; the upper polar plate comprises a triangular mass block and at least two strand beams connected with the triangular mass block; a shin-link is added between the triangular mass block and a thigh beam connecting point, and the other end of the thigh beam is respectively diffused with the transverse and longitudinal piezoresistive resistors and connected with the base; an air gap is formed between the lower polar plate and the triangular folding beam mass block; one end of the driving voltage is connected with the lower pole plates of the first resonance testing system and the second resonance testing system, and the other end of the driving voltage is connected with the first triangular folding beam mass block and the second triangular folding beam mass block respectively. The invention uses the external circuit to detect two output signals, eliminates the influence of temperature and humidity changes on frequency detection, and improves the measurement precision.
Description
Technical Field
The invention relates to a technology for testing the resonant frequency of a silicon nano beam by an MEMS (micro-electromechanical system) folded beam mass block structural system manufactured by a silicon micro-machining technology in a micro-electromechanical system, in particular to a double-layer multiplexing type triangular folded beam mass block resonant system and a trace detection method thereof.
Background
A micro-electro-mechanical system (MEMS) refers to a micro device or system that integrates micro mechanisms, such as actuators, sensors, and actuators, that can be manufactured in batches and have a size of 1 μm to 1mm, on a silicon substrate by using micromachining technology. The system has the characteristics of small volume, low cost, easy integration, batch production and the like.
With the continuous development and cooperation of micromechanical system technology, silicon micromechanical sensors have come into play, and in various working modes of silicon micromechanical sensors. Among these, the most promising and attractive is the resonant mode of operation. Microsystem resonators are just the tools that take advantage of this resonanceIn this way, the resonance frequency is detected. By this means of detecting the resonant frequency, when the mass m0When changed, f can be detected0A change in (c).
In recent years, with the progress of microelectronic processing technology and nano-processing technology, people have been able to easily manufacture nano-scale clamped beams, cantilever beams and nano-wires. The silicon nano beam is a typical structure in a micro-electromechanical system, has small mass and low power, and the resonance frequency of a manufactured resonator is up to GHz, and the quality factor can reach 103And has ultrahigh mechanical sensitivity of 10-24 newtons. The excellent performances enable the nano beam to have good application prospects in the aspects of generation and processing of high-frequency oscillation signals, ultra-high sensitive quality detection, ultra-small force, ultra-small displacement detection, biochemical sensing and the like. Because the mass is extremely small, the mass of the mass block connected with the nano beam or the micro change of the external working condition and the environment can cause the great change of the resonant frequency of the beam, which is very beneficial to the detection of weak signals, and the silicon mass resonator becomes a main tool for trace detection. Therefore, the mass block resonator is expected to be used for trace detection of heavy metal mercury ions in a water environment, and high-sensitivity detection and monitoring are realized.
Resonator structures are divided into three categories: the cantilever mass block structure adopts electrostatic excitation piezoresistive detection. And the other is a folding beam mass block structure, and electrostatic driving pressure resistance detection is also adopted. And thirdly, a two-end clamped beam structure is adopted, and electrostatic excitation MOSFET is adopted for detection. The mass block structure of the cantilever beam is generally arranged at the tail end of the cantilever beam, so that the beam is very easy to collapse when trace detection is carried out after the mass block absorbs ions, and the test system is invalid; and the two-end clamped beam structure is not beneficial to trace detection due to the small adsorption area of the beam. A simple and feasible resonance structure is designed, more choices are provided for frequency testing and trace detection methods, and the method is significant.
The existing trace detection mode (1) instrumental analysis method is widely adopted at present. The disadvantage is that the sample is required to be pretreated, and because a large-scale spectrometer is adopted, expensive instrument and equipment and a more complicated sample preparation procedure are required, and the requirement of on-site rapid detection cannot be met. In the pretreatment stage of the sample, mercury atom vapor is usually formed, which easily causes volatilization and leakage of harmful gas, and strict safety protection facilities and measures must be adopted, which undoubtedly makes the test procedure more complicated and increases the test cost. (2) The electrochemical analysis method is a method established on the basis of the electrochemical properties of substances in a solution, the sensitivity and the accuracy of the method are mostly low in the biological detection of mu g/L magnitude (3), some methods can only carry out qualitative detection, the repeatability and the stability of a detection result are not good enough, and the detection sensitivity is also low.
Disclosure of Invention
The purpose of the invention is as follows: in order to solve the defects of the prior art, the resonance system with the double-layer multiplexing type triangular folding beam mass block structure for nano-electromechanical trace detection is provided.
The technical scheme is as follows: a double-layer multiplexing type triangular folded beam mass block resonance system comprises a substrate, a first resonance test system, a second resonance test system, a driving voltage and an external circuit, wherein the first resonance test system and the second resonance test system are symmetrically arranged on the upper surface and the lower surface of the substrate;
the first resonance testing system comprises a first base, a first upper polar plate and a first lower polar plate, wherein the first base is positioned above the substrate, the first upper polar plate is supported on the first base, the first lower polar plate is positioned in the center of the surface of the substrate, the first base is arranged around the surface of the substrate, and the first upper polar plate comprises a first triangular folding beam mass block and three first strand beams connected with the first triangular folding beam mass block; the first triangular folding beam mass block is supported by a first stock beam around the first triangular folding beam mass block, is horizontally arranged, and is additionally provided with a joint shin between the first stock beam and the connection point of the first stock beam mass block and the first stock beam; the other end of the first strand beam is respectively diffused with the transverse piezoresistive resistors and the longitudinal piezoresistive resistors and is connected with the first base; the substrate, the first base, the first triangular folded beam mass block and the first strand form a space, and an air gap exists between the first lower polar plate and the first triangular folded beam mass block positioned in the middle of the first resonance testing system;
the second resonance testing system has the same structure as the first resonance testing system and comprises a second base positioned on the substrate, a second upper polar plate supported on the second base and a second lower polar plate positioned in the center of the surface of the substrate; the second base is arranged around the surface of the substrate, and the second upper polar plate comprises a second triangular folding beam mass block and three strand beams connected with the second triangular folding beam mass block; the second triangular folded beam mass block is supported by the second strand beam around the second triangular folded beam mass block, is horizontally arranged, and is additionally provided with a knuckle shank between the second folded beam mass block and the connection point of the second strand beam mass block and the second strand beam; the other end of the second strand beam is respectively diffused with the transverse piezoresistive resistors and the longitudinal piezoresistive resistors and is connected with the second base; the substrate, the second base, the second triangular folded beam mass block and the second strand beam form a space, and an air gap exists between the second lower polar plate and the second triangular folded beam mass block positioned in the middle of the second resonance testing system;
one end of the driving voltage is connected with a first lower polar plate of the first resonance testing system and a second lower polar plate of the second resonance testing system, and the other end of the driving voltage is connected with a first triangular folding beam mass block of the first resonance testing system and a second triangular folding beam mass block of the second resonance testing system to form two output loops;
the external circuit and the piezoresistive resistors of the first resonance testing system and the second resonance testing system connected with the external circuit form a Wheatstone full bridge.
Preferably, the first lower polar plate and the second lower polar plate are both Al electrodes.
Preferably, the P-type piezoresistive resistor is formed by diffusing boron ions at the connection end of the base and the base, and the base are made of n-type materials to form the PN junction.
In another embodiment, the triangular folded beam mass blocks of the first resonance testing system and the second resonance testing system are made of the same composite material, so that the first resonance testing system and the second resonance testing system have the same natural frequency. When the first resonance test system or the second resonance test system is used for adsorbing specific ions, the opposite second resonance test system or the first resonance test system does not adsorb the specific ions; the mass of the first triangular folding beam mass block or the second triangular folding beam mass block is changed, and the mass of the opposite second triangular folding beam mass block or the first triangular folding beam mass block is not changed; then, the two resonance test systems give the same driving voltage, only one of the two output loops is changed due to the change of the mass of the triangular folding beam mass block, and the other loop of the triangular folding beam mass block is not changed; the thigh beams of the first resonance testing system and the second resonance testing system and the triangular folded beam mass block vibrate under the action of electrostatic force, the thigh beams bend, the maximum elastic force on the outer surface just appears on a thigh beam supporting point, so that the resistivity of a piezoresistive region at the tail end of the thigh beam changes periodically, two output signals are generated oppositely, the periodic change curves of the two output signals are detected by an external circuit and a Wheatstone bridge method, the frequency of the first resonance testing system and the frequency of the second resonance testing system are measured, and the changed mass of the triangular folded beam mass block of the first resonance testing system or the second resonance testing system, namely the mass of adsorbed specific ions, is further measured.
Further, when a small mass reaches the mass block of the triangular folding beam, the mass of the mass block changes, so that the oscillation frequency is shifted, and the calculation formula is as follows:
f0is the natural frequency of the beam, △ f is the variation value of the beam frequency, m0The initial mass of the triangular folded beam mass block is △ m, the mass change value of the triangular folded beam mass block after absorbing specific ions is obtained, and k is a constant;
from equations (1) and (2) we can derive:
simplifying to obtain:
m0f0 2＝m0f0 2+m0△f2+2m0f0△f+△mf0 2+△m△f2+2△m△f×f0(4)；
since the values of △ m and △ f are small, the second order term is removed:
△m△f2+2△m△f×f0＝0 (5)；
further solving the following steps:
the mass change condition of the triangular folding beam mass block can be obtained by the formula (5), and then the concentration of specific ions in water can be detected.
Has the advantages that: compared with the prior art, the mass block structure of the rectangular folding beam is more accurate and stable in the process of high-frequency vibration test and detection compared with the traditional mass block structure of the rectangular folding beam, and has a more favorable piezoelectric effect in the high-frequency vibration process. And only one of the two output loops is changed due to the change of the mass block, and the mass block of the other loop is not changed, so that the output signal is detected by using a Wheatstone bridge method, the influence of the temperature and humidity change on frequency detection is eliminated, and the measurement precision is improved. And when the mass m of the mass block0When the natural frequency f is changed, the resonator system with the triangular folded beam mass block structure can more accurately detect the natural frequency f0I.e. the value of deltaf, and thus better characterize m0The variable quantity of (2) meets the requirements of field testability with low cost and high speed. The structure is simple and easy to implement, the absorption area of the mass block is increased, the collapse of the beam is not easy to cause, and the mass block can be widely applied to trace detection by utilizing the high-frequency vibration characteristic of the nano beam, so that the detection is more convenient and rapid, and the numerical value is more accurate. In addition, compared with the traditional quadrilateral folding beam structure, the Q value of the quality factor of the invention is larger, and the Q value is improved more obviously along with the increase of the vacuum degree (the vacuum degree of the space where the resonance system is located).
Drawings
FIG. 1 is a schematic side view of the present invention;
FIGS. 2a and 2b are schematic top views of two different shapes of beam structures in the present invention;
FIG. 3 is a Wheatstone bridge circuit diagram;
FIG. 4 is a graph of the figure of merit for two triangular folded beam mass structures and a quadrilateral structure;
fig. 5 is a graph comparing output signals generated by a single-layer proof-mass structure and a double-layer proof-mass structure.
Detailed Description
The technical solution of the present invention will be described in detail below with reference to the accompanying drawings and examples.
As shown in fig. 1 and fig. 2, the resonance system of the double-layer multiplexing triangular folded beam mass block structure for nano-electromechanical trace detection of the present invention includes a substrate 1, a first resonance test system and a second resonance test system symmetrically disposed on the upper and lower surfaces of the substrate, a driving voltage 4, and an external circuit 5.
The first resonance testing system comprises three first bases 21 positioned above the substrate, a first upper polar plate supported on the bases and a first lower polar plate positioned in the center of the upper surface of the substrate; the first base is arranged around the upper surface of the substrate, and the first triangular folding beam mass block 22 and the three first strand beams 23 connected with the first triangular folding beam mass block are used as elastic elements and are used as a first upper polar plate; the Al electrode 24 located at the center of the upper surface of the substrate serves as a first lower plate. The first triangular folding beam mass block is supported by three first strand beams around the first triangular folding beam mass block and is horizontally arranged, three corners of the first triangular folding beam mass block are respectively connected with one ends of the three first strand beams, and a shin-saving rod is added between the first triangular folding beam mass block and the first strand beams; the other end of the first strand is connected to the first base, and the lateral and longitudinal piezoresistive resistors 25 are diffused at the other end of the first strand, respectively. The substrate, the first base, the first triangular folded beam mass block and the first strand form a space, and an air gap exists between the Al electrode and the first triangular folded beam mass block located in the middle of the first resonance testing system.
The second resonance testing system comprises three second bases 31 positioned on the lower surface of the substrate, a second upper polar plate supported on the bases and a second lower polar plate positioned in the center of the lower surface of the substrate; the second base is arranged around the lower surface of the substrate, and the second triangular folded beam mass block 32 and the three second strand beams 33 connected with the second triangular folded beam mass block are used as elastic elements and are used as a second upper polar plate; the Al electrode 34 located at the center of the lower surface of the substrate serves as a second lower plate. The second triangular folded beam mass block is supported by the three second strand beams around the second triangular folded beam mass block and is horizontally arranged, three angles of the second triangular folded beam mass block are respectively connected with one ends of the three second strand beams, and a joint shin is added between the second triangular folded beam mass block and the second strand beams; the other end of the second strand is connected to the second base, and the lateral and longitudinal piezoresistive resistors 35 are diffused at the other end of the second strand, respectively. The substrate, the second base, the second triangular folded beam mass block and the second strand beam form a space, and an air gap exists between the Al electrode and the second triangular folded beam mass block located in the middle of the second resonance testing system.
One end of the driving voltage 4 is connected with the Al electrodes of the first resonance testing system and the second resonance testing system, and the other end of the driving voltage is connected with the first triangular folding beam mass block of the first resonance testing system and the second triangular folding beam mass block of the second resonance testing system to form two output loops.
The external circuit 5 is a half-bridge of Wheatstone, and forms a half-bridge with the connected piezoresistive resistors, as shown in FIGS. 1 and 3, and one arm resistor R of the Wheatstone bridge in FIG. 3j1Is piezoresistive resistor 25 in FIG. 1, and the other bridge arm resistor Rj2For the piezoresistive resistor 35 in FIG. 1, the analysis is as follows:
(1) when no driving voltage is applied to the triangular folded beam mass resonator: rj1＝Rj2＝R3＝R4＝Rj0，Rj0(j is 1, 2, 3, 4) is the initial resistance of each arm, so Vm＝0；
(2) When a driving voltage is applied to the triangular folded beam mass resonator:
wherein, △ Rj1Is a piezoresistive resistor Rj1Change value of (A), △ Rj2Is a piezoresistive resistor Rj2Change value of (A), △ Rj1pIs a piezoresistive resistance at Rj1The value of the change of the applied excitation resistance after the mass change of the mass, △ Rj1xAnd △ Rj2xThe change value of the piezoresistive resistance caused by external change is equal to the change value of the piezoresistive resistance caused by external change.
The following can be obtained:
where Es is the input voltage.
Simplifying to obtain:
the connection ends of the base and the base of the first resonance testing system and the second resonance testing system form a P-type piezoresistive resistor by diffusing boron ions, and the base are made of n-type materials to form a PN (positive-negative) node; the triangular folded beam mass block can be made of the same composite material, so that the first resonance testing system or the second resonance testing system has the same natural frequency. When the first resonance test system (or the second resonance test system) is used for adsorbing specific ions, the opposite second resonance test system (or the first resonance test system) does not adsorb the specific ions; the mass of the first triangular folded beam mass block (or the second triangular folded beam mass block) is changed, and the mass of the opposite second triangular folded beam mass block (or the first triangular folded beam mass block) is not changed; then, the two resonance test systems give the same excitation (driving voltage 4), only one of the two output loops is changed due to the change of the mass of the triangular folding beam mass block, and the other loop of the triangular folding beam mass block is not changed; the strand beams of the first resonance testing system and the second resonance testing system and the triangular folded beam mass block vibrate under the action of electrostatic force, the strand beams bend, the maximum elastic force on the outer surface happens to appear on the strand beam supporting points, so that the resistivity of the piezoresistive region at the tail end of the strand beams changes periodically, two output signals are generated oppositely, the periodic change curves of the two output signals (voltage or current) are detected by using a Wheatstone bridge method through an external circuit 5, the frequency of the first resonance testing system and the frequency of the second resonance testing system are measured (the frequency is not influenced by environmental changes such as temperature, humidity, air pressure and the like), and the changed mass of the triangular folded beam mass block of the first resonance testing system (or the second resonance testing system), namely the mass of adsorbing specific ions, are further measured.
When the micro mass reaches the triangular folded beam mass block of the first resonance test system (or the second resonance test system), the mass of the triangular folded beam mass block is changed, so that the oscillation frequency is shifted, the mass of the other triangular folded beam mass block is not changed, and the oscillation frequency is not changed, when the two triangular folded beam mass blocks are given the same excitation voltage, two output signals are generated, the frequency of the first resonance test system and the frequency of the second resonance test system are measured through a Wheatstone bridge formed by an external circuit and a piezoresistive resistor, so that the micro mass reaching the triangular folded beam mass block of the first resonance test system (or the second resonance test system) can be obtained, for the resonator of the triangular folded beam mass block structure, the measured minimum mass △ m can be represented by the formula △ m-2 m, the measured minimum mass △ m is shifted by the frequency △ f of the high-frequency vibration of the first resonance test system (or the second resonance test system) under the condition that the substance to be measured is uniformly distributed on the surface of the triangular folded beam mass block of the first resonance test system (or the second resonance test system)0M is obtained by multiplying by △ f/f0、f0The initial mass and resonant frequency of the first resonant test system (or the second resonant test system), respectively, are determined by the process dimensions and the data are known.
The method plays an important role in trace detection, such as the detection of the concentration of heavy metal ions in water. And is not affected by environmental changes such as temperature, humidity, air pressure and the like. The triangular folded beam mass block can adopt a composite material with adsorbabilityThe material adsorbs the mercury ions of the solution, the mass of the adsorbed mass block changes, and the driving circuit detects f0A value of + △ f, to detect the concentration of mercury ions in the solution.
The specific calculation method is as follows:
f0for the natural frequency of the folded beam, △ f is the variation of the frequency, m0△ m is the change value of the mass after absorbing a specific example, and k is a constant.
From equations (1) and (2) we can derive:
simplifying to obtain:
m0f0 2＝m0f0 2+m0△f2+2m0f0△f+△mf0 2+△m△f2+2△m△f×f0(8)；
since the values of △ m and △ f are small, the second order term is removed:
△m△f2+2△m△f×f0＝0 (9)
further solving the following steps:
that is, the mass change of the mass block can be derived from the formula (5), and the concentration of the specific ions in the water can be detected.
As shown in fig. 4, compared with the existing mass block structure with quadrilateral folding beams, the quality factor Q of the mass block with triangular folding beams measured by experiments is larger than that of the traditional quadrilateral folding beam structure, and the Q value is improved more obviously as the vacuum degree is increased, wherein the quality factor Q of the structure with triangular resonators shown in fig. 2a and 2b is far larger than that of the quadrilateral resonators no matter under any vacuum degree environment, because the volume of the mass block is reduced relative to the quadrilateral, the air damping received during vibration is relatively small, and the energy consumed in the vibration period is low. And secondly, the four vibration beams of the traditional quadrilateral resonator are provided, and the vibration beams of the resonator are only three, so that the internal consumption is smaller when the system vibrates, and the Q value is higher. Another important reason is that the quadrilateral resonator generates vibration in multiple modes in the vibration process, that is, not only up-and-down vibration but also vibration modes deviating from the vertical direction occur, and the multimode vibration mode greatly affects the quality factor of the resonator and the natural vibration frequency. The triangle has natural stability, and the triangular folding beam mass block structure only has a single-mode form in the vibration process, namely only keeps an up-and-down vibration mode, so that the quality factor is greatly improved, the influence of the quadrilateral resonator caused by multimode vibration is overcome, and the frequency detection result is more accurate. In addition, through testing, the piezoresistive effect at the tail end of the triangular resonator vibrating beam is more obvious, and the vibration frequency can be better measured through a peripheral circuit, so that when the mass of the mass block changes, delta f can be more easily measured through the resonant structure, the test result is more accurate and convenient, and the method can be widely applied to trace detection by utilizing the high-frequency vibration characteristic of the nano beam.
Further, as shown in fig. 5, a comparison graph of output signals generated for a single-layer structure (single-layer triangular folded beam mass block structure) and a double-layer structure (double-layer multiplexing triangular folded beam mass block structure) after passing through a filter circuit is displayed by using a two-channel oscilloscope, wherein a sine curve of an upper channel is an output signal of the single-layer structure, a cosine curve of a lower channel is an output signal of the double-layer structure, a peak value of the output signal of the single-layer structure is 217mV, and the peak value of the output signal of the double-layer structure is 318 mV. The method that the output signal obtained by the method that the resonance system of the double-layer triangular folded beam mass block structure is externally connected with the Wheatstone bridge circuit is superior to the method that the resonance system of the single-layer triangular folded beam mass block structure is externally connected with the difference frequency circuit is explained.
Claims (5)
1. The utility model provides a double-deck multiplexing type triangle-shaped folded beam quality piece resonant system which characterized in that: the device comprises a substrate (1), a first resonance test system, a second resonance test system, a driving voltage (4) and an external circuit (5), wherein the first resonance test system and the second resonance test system are symmetrically arranged on the upper surface and the lower surface of the substrate;
the first resonance testing system comprises a first base (21) positioned above the substrate, a first upper polar plate supported on the first base, and a first lower polar plate (24) positioned in the center of the surface of the substrate, wherein the first base is arranged around the surface of the substrate, and the first upper polar plate comprises a first triangular folding beam mass block (22) and three first strand beams (23) connected with the first triangular folding beam mass block; the first triangular folding beam mass block is supported by a first stock beam around the first triangular folding beam mass block, is horizontally arranged, and is additionally provided with a joint shin between the first stock beam and the connection point of the first stock beam mass block and the first stock beam; the other end of the first strand beam is respectively diffused with a transverse piezoresistive resistor (25) and a longitudinal piezoresistive resistor (25) and is connected with the first base; the substrate, the first base, the first triangular folded beam mass block and the first strand form a space, and an air gap exists between the first lower polar plate and the first triangular folded beam mass block positioned in the middle of the first resonance testing system;
the second resonance testing system has the same structure as the first resonance testing system and comprises a second base (31) positioned on the substrate, a second upper polar plate supported on the second base and a second lower polar plate (34) positioned in the center of the surface of the substrate; the second base is arranged around the surface of the substrate, and the second upper polar plate comprises a second triangular folding beam mass block (32) and three second strand beams (33) connected with the second triangular folding beam mass block; the second triangular folded beam mass block is supported by the second strand beam around the second triangular folded beam mass block, is horizontally arranged, and is additionally provided with a knuckle shank between the second folded beam mass block and the connection point of the second strand beam mass block and the second strand beam; the other end of the second strand beam is respectively diffused with a transverse piezoresistive resistor (35) and a longitudinal piezoresistive resistor (35) and is connected with the second base; the substrate, the second base, the second triangular folded beam mass block and the second strand beam form a space, and an air gap exists between the second lower polar plate and the second triangular folded beam mass block positioned in the middle of the second resonance testing system;
one end of a driving voltage (4) is connected with a first lower polar plate of the first resonance testing system and a second lower polar plate of the second resonance testing system, and the other end of the driving voltage is connected with a first triangular folding beam mass block of the first resonance testing system and a second triangular folding beam mass block of the second resonance testing system to form two output loops;
the external circuit (5) and the piezoresistive resistors of the first resonance testing system and the second resonance testing system which are connected with the external circuit form a Wheatstone full bridge.
2. The dual-layer multiplexing-type triangular folded beam mass resonance system of claim 1, wherein: the first lower polar plate and the second lower polar plate are both Al electrodes.
3. The dual-layer multiplexing-type triangular folded beam mass resonance system of claim 1, wherein: the P-type piezoresistive resistor is formed at the connecting end of the base and the strand beam by diffusing boron ions, and the base and the strand beam are made of n-type materials to form a PN node.
4. A trace detection method based on the double-layer multiplexing type triangular folded beam mass resonance system of any one of claims 1 to 3 is characterized in that: the triangular folded beam mass blocks of the first resonance testing system and the second resonance testing system are made of the same composite material, so that the first resonance testing system and the second resonance testing system have the same natural frequency; when the first resonance test system or the second resonance test system is used for adsorbing specific ions, the opposite second resonance test system or the first resonance test system does not adsorb the specific ions; the mass of the first triangular folding beam mass block or the second triangular folding beam mass block is changed, and the mass of the opposite second triangular folding beam mass block or the first triangular folding beam mass block is not changed; then, the two resonance test systems give the same driving voltage, only one of the two output loops is changed due to the change of the mass of the triangular folding beam mass block, and the other loop of the triangular folding beam mass block is not changed; the thigh beams of the first resonance testing system and the second resonance testing system and the triangular folded beam mass block vibrate under the action of electrostatic force, the thigh beams bend, the maximum elastic force on the outer surface just appears on a thigh beam supporting point, so that the resistivity of a piezoresistive region at the tail end of the thigh beam changes periodically, two output signals are generated oppositely, the periodic change curves of the two output signals are detected by an external circuit and a Wheatstone bridge method, the frequency of the first resonance testing system and the frequency of the second resonance testing system are measured, and the changed mass of the triangular folded beam mass block of the first resonance testing system or the second resonance testing system, namely the mass of adsorbed specific ions, is further measured.
5. The trace detection method based on the double-layer multiplexing type triangular folded beam mass block resonance system according to claim 4, characterized in that: when a tiny mass reaches the mass block of the triangular folding beam, the mass of the mass block is changed, so that the oscillation frequency is deviated, and the calculation formula is as follows:
f0is the natural frequency of the beam, △ f is the variation value of the beam frequency, m0The initial mass of the triangular folded beam mass block is △ m, the mass change value of the triangular folded beam mass block after absorbing specific ions is obtained, and k is a constant;
from equations (1) and (2) we can derive:
simplifying to obtain:
m0f0 2＝m0f0 2+m0△f2+2m0f0△f+△mf0 2+△m△f2+2△m△f×f0(4)；
since the values of △ m and △ f are small, the second order term is removed:
△m△f2+2△m△f×f0＝0 (5)；
further solving the following steps:
the mass change condition of the triangular folding beam mass block can be obtained by the formula (5), and then the concentration of specific ions in water can be detected.
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