CN113433213B - Multi-trace high-sensitivity synchronous sensing device and method based on multi-modal internal resonance - Google Patents

Multi-trace high-sensitivity synchronous sensing device and method based on multi-modal internal resonance Download PDF

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CN113433213B
CN113433213B CN202110756296.XA CN202110756296A CN113433213B CN 113433213 B CN113433213 B CN 113433213B CN 202110756296 A CN202110756296 A CN 202110756296A CN 113433213 B CN113433213 B CN 113433213B
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王东方
丛谱原
夏操
王荣
肖明凯
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Jilin University
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Abstract

The invention belongs to the technical field of trace substance identification and detection, and particularly relates to a multi-trace high-sensitivity synchronous sensing device and method based on multi-modal internal resonance; the device comprises a low-frequency sensing beam, a high-frequency detection beam, a coupling unit, a multi-order modal frequency adjusting and matching theory and a multi-order modal adjusting and matching theory, wherein two ends of the low-frequency sensing beam are respectively fixed on a substrate, the high-frequency detection beam is a cantilever beam, one end of the high-frequency detection beam is fixed on the substrate I and is arranged side by side with the low-frequency sensing beam, the rear end of the coupling unit is fixed on the substrate I, the left end and the right end of the coupling unit are respectively connected with the low-frequency sensing beam and the high-frequency detection beam, the upper surface of the low-frequency sensing beam is provided with a sensitive layer, the high-frequency detection beam is provided with a local hole and a local bulge, and the required modal frequency of each order is adjusted by adjusting the width of the high-frequency detection beam at different positions in the length direction, namely along the axial direction.

Description

Multi-trace high-sensitivity synchronous sensing device and method based on multi-modal internal resonance
Technical Field
The invention belongs to the technical field of trace substance identification and detection, and particularly relates to a multi-trace high-sensitivity synchronous sensing device and method based on multi-mode internal resonance.
Background
With the development of science and technology, the quality of life is continuously improved, and the requirements of people on substance detection are gradually enhanced. Application scenes such as virus and pollen detection, indoor air detection, outdoor pollution detection, special engineering detection and the like put urgent demands on multi-substance detection, and the multi-substance detection has great practical significance for guaranteeing human health and production safety. At present, substance detection means mainly comprise spectral analysis, mass spectrometry, gas chromatography, ion mobility spectrometry, electrochemical methods and the like, but aiming at detection objects needing real-time monitoring and risk early warning such as viruses, pollen, dust, gas and the like, the technical advantages of the detection means cannot be fully embodied, and urgent requirements of quick response, synchronous identification and detection, portability and the like in different application scenes cannot be met. A resonant sensor is a sensor that converts a measured parameter into a frequency signal. When the measured parameter changes, the natural frequency of the vibration element changes, and an electric signal which has a certain relation with the measured parameter is obtained through a corresponding measuring circuit, so that the sensing is realized. The resonant sensor does not need a complex loop, auxiliary equipment or a vacuum environment, has the advantages of high sensitivity, quick response, good stability, easiness in integration, miniaturization and the like, and has great advantages in material detection, particularly multi-material synchronous identification and detection. At present, the resonant sensor breaks through the lower limit of detection of a single substance through mechanisms such as synchronous resonance, modal localization, internal resonance and the like, but still faces challenges in high-sensitivity synchronous identification and detection of multiple substances. Compared with other non-linear sensitivity enhancement schemes, the internal resonance does not have the limitation of multi-output and detection range of modal localization, a complex synchronous resonance phase-locked feedback loop does not need to be constructed, and the method is more suitable for single-input single-output multi-trace substance identification and detection. However, the sensing mechanism and method applied to substance identification and detection at present have the problems of limited sensitivity, narrow detection range, multiple output channels, difficulty in miniaturization, incapability of realizing synchronous identification and detection of multiple substances and the like.
Disclosure of Invention
In order to overcome the problems, the invention provides a multi-trace high-sensitivity synchronous sensing device and method based on multi-modal internal resonance, which establish a multi-order modal regulation matching theory, realize the identification and detection of multiple trace substances with single input and single output, and improve the sensitivity and the detection resolution of the device.
The technical scheme adopted by the invention is as follows:
a multi-trace high-sensitivity synchronous sensing device based on multi-modal internal resonance comprises a low-frequency sensing beam 1, a high-frequency detection beam 2, a substrate and a coupling unit 5, wherein, the low-frequency sensing beam 1 is a fixed beam, two ends of the low-frequency sensing beam are respectively fixed on the first base 3 and the second base 4, the high-frequency detecting beam 2 is a cantilever beam, one end of the high-frequency detecting beam is fixed on the first base 3, the coupling unit 5 is arranged side by side with the low-frequency sensing beam 1, the rear end of the coupling unit 5 is fixed on the first substrate 3, the left end and the right end of the coupling unit 5 are respectively connected with the low-frequency sensing beam 1 and the high-frequency detection beam 2, the upper surface of the low-frequency sensing beam 1 is provided with a plurality of sensitive layers 102, the high-frequency detection beam 2 is provided with a local hole 202 and a local bulge 203, and the required modal frequency of each order is adjusted by adjusting the width of the high-frequency detection beam 2 in the length direction, namely, in different positions along the axial direction, and the low-frequency sensing beam 1, the high-frequency detection beam 2 and the coupling unit 5 jointly form a coupling beam structure.
The low-frequency sensing beam 1 comprises a piezoelectric driving electrode 101, an upper insulation layer I103, a substrate beam I104 and a lower insulation layer I105 which are sequentially arranged from top to bottom and connected, and a sensitive layer 102 is connected to the upper surface of the upper insulation layer I103 of the low-frequency sensing beam 1; the piezoelectric driving electrode 101 comprises a piezoelectric layer upper electrode I10101, a piezoelectric film I10102 and a piezoelectric layer lower electrode I10103 which are sequentially arranged from top to bottom and connected.
The high-frequency detection beam 2 comprises a piezoelectric output electrode 201, an upper insulating layer II 204, a substrate beam II 205 and a lower insulating layer II 206 which are sequentially arranged from top to bottom and connected; the piezoelectric output electrode 201 comprises a piezoelectric layer upper electrode II 20101, a piezoelectric film II 20102 and a piezoelectric layer lower electrode II 20103 which are sequentially arranged from top to bottom and connected.
The coupling means of the coupling unit 5 is mechanical coupling, magnetic coupling or electrostatic coupling.
The number of the sensitive layers 102 is a positive integer which is greater than or equal to 1 and is equal to the number of the types of the substances to be detected, one sensitive layer 102 only adsorbs one substance to be detected, and the positions of the different sensitive layers 102 correspond to the positions with the maximum modal shape displacement of the low-frequency sensing beam 1 in different modes.
The shape of the local dug hole 202 of the high-frequency detection beam 2 is a circle, a polygon, an ellipse or other closed figures; the shape of the local protrusion 203 is a cube, a cylinder, or an elliptic cylinder.
The j-th order modal frequency of the low-frequency sensing beam 1 is omega1jCorresponding to the j-th order modal frequency of the high-frequency detection beam 2 being ω2jAnd the frequency satisfies the following formula: a is a1ω1j＝a2ω2jWherein a is1、a2Are all positive integers, and a1＞a2，a1/a2Is a magnification of the frequency.
A multi-trace high-sensitivity synchronous sensing method based on multi-modal internal resonance comprises the following steps:
step one, calibrating modal frequencies of each order of a low-frequency sensing beam 1 and a high-frequency detection beam 2 which do not adsorb substances to be detected:
the j-th order modal frequency omega corresponding to the low-frequency sensing beam 1 and the high-frequency detection beam 2 respectively1jAnd ω2jNearby, a sweep signal is input through the piezoelectric driving electrode 101 at 0.8 ω1jTo 1.2 omega1jAnd a modal frequency range of 0.8 omega2jTo 1.2 omega2jThe modal frequency range of (A) is subjected to two times of cycle forward frequency sweep excitation, and the excitation acceleration is adcos(Ωt)；
Under the action of nonlinear coupling, the low-frequency sensing beam 1 and the high-frequency detection beam 2 generate internal resonance with a fixed proportion, voltage signals containing vibration information are output through the piezoelectric output electrode 201, amplitude-frequency characteristic curves of amplitudes of various orders of modes of the low-frequency sensing beam 1 and the high-frequency detection beam 2 about excitation frequency are respectively obtained through the output voltage signals, and various orders of modal frequencies of the low-frequency sensing beam 1 and the high-frequency detection beam 2 when a substance to be detected is not adsorbed are obtained through Fourier transform calculation;
placing the synchronous sensing device in a tested environment, and adsorbing a substance to be tested by using the sensitive layer 102 on the low-frequency sensing beam 1;
step three, respectively at 0.8 omega1jTo 1.2 omega1jIn the frequency range of (2), a forward sweep frequency signal is circularly input to the low-frequency sensing beam 1 through the piezoelectric driving electrode 101, and a voltage containing vibration information is output through the piezoelectric output electrode 201Obtaining signals, further obtaining an amplitude-frequency characteristic curve of each order of mode of the high-frequency detection beam 2 changing along with the mass of the substance to be detected, calculating the frequency corresponding to each order of mode resonance peak of the high-frequency detection beam 2 through Fourier transform, observing the change condition of the frequency, when the frequency corresponding to the resonance peak is not changed, the corresponding mode frequency is not changed any more, showing that the corresponding substance to be detected is adsorbed to reach an equilibrium state, and at the moment, the frequency corresponding to each order of mode resonance peak is the mode frequency omega 'of each order of the high-frequency detection beam 2 after the substance to be detected is adsorbed'2j(ii) a Because the internal resonance phenomenon occurs under the action of nonlinear coupling, the modal frequencies of each order of the low-frequency sensing beam 1 and the high-frequency detection beam 2 form a certain proportional relationship, namely: a is1ω′1j＝a2ω′2jCalculating to obtain modal frequency omega of each order of the low-frequency perception beam 1 after adsorbing the substance to be measured'1j；
Step four, analyzing n-order modal frequency omega 'through comparison'1jThe type of the substance to be detected is identified by the value change, and the mass delta m of the substance to be detected is calculated by using the following formulaiAnd further realizing the detection of the quality of the adsorbed substance to be detected:
Figure BDA0003147652660000041
wherein n is the first n-order mode number, and is also equal to the number of species to be detected, and is Delta miAs the mass of the adsorbed ith substance to be measured,
Figure BDA0003147652660000042
in order to adsorb the position of the sensitive layer 102 of the ith substance to be measured,
Figure BDA0003147652660000043
the displacement of the position of the sensitive layer 102 for correspondingly adsorbing the ith substance to be detected under the j-th order mode vibration mode of the low-frequency sensing beam 1 is obtained.
The invention has the beneficial effects that:
1. the internal resonance principle is applied to the coupling beam structure, so that the deviation of modal frequencies of all orders is amplified, and the sensitivity of the device is improved.
2. The positions of the maximum displacement positions of the low-frequency sensing beams under different modes are different, and different sensitive layers are respectively arranged to adsorb different substances to be detected, so that the frequency deviation of one mode uniquely corresponds to one substance to be detected, the identification and detection of various substances to be detected can be synchronously realized, the structural design is ingenious, and the method is novel.
3. The method has the characteristics of high speed, good stability, low cost, low power consumption, wide range, single output and the like.
Drawings
FIG. 1 is a schematic structural view of example 1 of the present invention;
FIG. 2 is a top view of example 1 of the present invention;
FIG. 3 is a side view of a low frequency sensing beam according to embodiment 1 of the present invention;
FIG. 4 is a side view of a high-frequency detecting beam according to embodiment 1 of the present invention;
FIG. 5 is a schematic structural diagram of example 2 of the present invention, in which the number of sensitive layers is 2;
FIG. 6 is a schematic view of a structure of embodiment 3 of the present invention in which the partial hole is rectangular;
FIG. 7 is a schematic structural view of a case where a partial protrusion is a cylinder in embodiment 3 of the present invention;
FIG. 8 is a schematic structural diagram of a low frequency sensing beam in a ladder-shaped beam structure according to embodiment 4 of the present invention;
fig. 9 is a schematic structural view of a trapezoidal cross beam of a low-frequency sensing beam of embodiment 5 of the present invention being a variable cross-section elongated structure;
FIG. 10 is a structural diagram of a low frequency sensing beam according to embodiment 5 of the present invention, in which the trapezoidal beam is curved;
fig. 11 is a schematic structural view of a low-frequency sensing beam of embodiment 6 of the present invention, which is a rectangular cantilever beam;
fig. 12 is a schematic structural view of a low-frequency sensing beam of the present invention in which the low-frequency sensing beam is a trapezoidal cantilever beam;
FIG. 13 is a schematic diagram of a structure in which the coupling units are magnetically coupled according to embodiment 7 of the present invention;
FIG. 14 is a side view of embodiment 7 of the present invention in which the coupling units are magnetically coupled;
FIG. 15 is a side view of the coupling unit of embodiment 8 of the present invention in an electrostatic coupling mode;
Detailed Description
As shown in FIGS. 1-4, the multi-trace high-sensitivity synchronous sensing device based on multi-modal internal resonance comprises a low-frequency sensing beam 1, a high-frequency detecting beam 2, a substrate and a coupling unit 5, wherein the low-frequency sensing beam 1 is a fixed beam, two ends of the fixed beam are respectively fixed on a first fixed substrate 3 and a second fixed substrate 4, the high-frequency detecting beam 2 is a cantilever beam, one end of the high-frequency detecting beam is fixed on the first substrate 3 and is arranged side by side with the low-frequency sensing beam 1, the rear end of the coupling unit 5 is fixed on the first substrate 3, the left end and the right end of the coupling unit 5 are respectively connected with the low-frequency sensing beam 1 and the high-frequency detecting beam 2, the upper surface of the low-frequency sensing beam 1 is provided with a plurality of sensitive layers 102, the high-frequency detecting beam 2 is provided with local holes 202 and local protrusions 203, the required modal frequencies of each step are adjusted by adjusting the widths of the high-frequency detecting beam 2 in the length direction, namely along different axial positions, the low-frequency sensing beam 1, The high-frequency detection beam 2 and the coupling unit 5 jointly form a coupling beam structure.
The low-frequency sensing beam 1 comprises a piezoelectric driving electrode 101, an upper insulating layer I103, a base beam I104 and a lower insulating layer I105 which are sequentially arranged from top to bottom and are mutually connected, and a sensitive layer 102 is connected to the upper surface of the upper insulating layer I103 of the low-frequency sensing beam 1; the piezoelectric driving electrode 101 comprises a piezoelectric layer upper electrode one 10101, a piezoelectric film one 10102 and a piezoelectric layer lower electrode one 10103 which are arranged from top to bottom and connected with one another. Wherein the upper surface of the low-frequency sensing beam 1 is close to the piezoelectric driving electrode 101 connected with the coupling unit 5.
The high-frequency detection beam 2 comprises a piezoelectric output electrode 201, an upper insulating layer II 204, a substrate beam II 205 and a lower insulating layer II 206 which are sequentially arranged from top to bottom and are mutually connected; the piezoelectric output electrode 201 comprises a piezoelectric layer upper electrode II 20101, a piezoelectric film II 20102 and a piezoelectric layer lower electrode II 20103 which are sequentially arranged from top to bottom and are mutually connected. Wherein the upper surface of the high-frequency detection beam 2 is close to the piezoelectric output electrode 201 connected with the coupling unit 5.
The coupling means of the coupling unit 5 is mechanical coupling, magnetic coupling or electrostatic coupling.
The number of the sensitive layers 102 is a positive integer which is greater than or equal to 1 and is equal to the number of the types of the substances to be detected, one sensitive layer 102 only adsorbs one substance to be detected, and the positions of the different sensitive layers 102 correspond to the positions with the maximum modal shape displacement of the low-frequency sensing beam 1 in different modes.
The shape of the local dug hole 202 of the high-frequency detection beam 2 is a circle, a polygon, an ellipse or other closed figures; the shape of the local protrusion 203 is a cube, cylinder, elliptic cylinder or other geometric body.
The j-th order modal frequency of the low-frequency sensing beam 1 is omega1jThe j-th order modal frequency corresponding to the high-frequency detection beam 2 is omega2jAnd the frequency satisfies the following formula: a is1ω1j＝a2ω2jWherein a is1、a2Are all positive integers, and a1＞a2，a1/a2Is a magnification of the frequency.
A multi-trace high-sensitivity synchronous sensing method based on multi-modal internal resonance comprises the following steps:
step one, calibrating modal frequencies of each order of a low-frequency sensing beam 1 and a high-frequency detection beam 2 which do not adsorb substances to be detected:
the j-th order modal frequency omega corresponding to the low-frequency sensing beam 1 and the high-frequency detection beam 2 respectively1jAnd omega2jNearby, a sweep signal is input through the piezoelectric driving electrode 101 at 0.8 ω1jTo 1.2 omega1jAnd a modal frequency range of 0.8 omega2jTo 1.2 omega2jThe modal frequency range of (A) is subjected to two times of cycle forward frequency sweep excitation, and the excitation acceleration is adcos(Ωt)；
Performing frequency sweeping twice in a mode, wherein the frequency sweeping near the frequency of the low-frequency sensing beam 1 is used for measuring the frequency of the low-frequency sensing beam 1, and the frequency sweeping near the frequency of the high-frequency detection beam 2 is used for measuring the frequency of the high-frequency detection beam 2;
the system motion equations of the low-frequency sensing beam 1 and the high-frequency detecting beam 2 are respectively as follows:
Figure BDA0003147652660000061
Figure BDA0003147652660000062
wherein the content of the first and second substances,
Figure BDA0003147652660000063
is partial differential sign, t is time, x and y are respectively the displacement of the low-frequency sensing beam 1 and the high-frequency detecting beam 2, m1j、k1jRespectively, the equivalent mass and the linear stiffness m of the j-th order mode of the low-frequency sensing beam 12j、k2jEquivalent mass and linear stiffness of j-th order mode of the high-frequency detection beam 2, c1、c2Linear damping, k, of low frequency sensing beam 1 and high frequency sensing beam 2, respectivelyc、kγRespectively, the linear coupling coefficient and the nonlinear coupling coefficient of the system, adIs the amplitude of the excitation signal, omega is the frequency of the excitation signal;
under the action of nonlinear coupling, for the condition of mechanical coupling, the low-frequency sensing beam 1 and the high-frequency detection beam 2 generate 1: 3 internal resonance, and in order to research and solve the generalized internal resonance phenomenon which is not limited by scale, two new time scales T are introduced0＝t、T1Epsilon t, where epsilon is a tiny perturbation parameter, performs non-dimensionalization on the equation:
Figure BDA0003147652660000071
Figure BDA0003147652660000072
wherein the content of the first and second substances,
Figure BDA0003147652660000073
Figure BDA0003147652660000074
dimensionless transport by multi-scale methodAnd (3) deducing the kinetic equation to obtain a steady state equation set:
Figure BDA0003147652660000075
Figure BDA0003147652660000076
Figure BDA0003147652660000077
Figure BDA0003147652660000078
wherein, ax、ay、
Figure BDA0003147652660000079
Respectively the displacement and the phase position of the low-frequency sensing beam 1 and the high-frequency detecting beam 2,
Figure BDA00031476526600000710
Figure BDA00031476526600000711
and drawing amplitude-frequency characteristic curves of front 3-order modes of the low-frequency sensing beam 1 and the high-frequency detection beam 2 by using the equation system, and obtaining the relation between the modal frequencies of the front 3-order modes of the low-frequency sensing beam 1 and the high-frequency detection beam 2 by using Fourier transform analysis.
Outputting a voltage signal containing vibration information through a piezoelectric output electrode 201, analyzing the output voltage signal to respectively obtain amplitude-frequency characteristic curves of amplitudes of each order of modes of a low-frequency sensing beam 1 and a high-frequency detecting beam 2 about excitation frequency, and calculating through Fourier transform to obtain each order of mode frequency of the low-frequency sensing beam 1 and the high-frequency detecting beam 2 when a substance to be detected is not adsorbed;
placing the synchronous sensing device in a tested environment, and adsorbing a to-be-tested substance by using the sensitive layer 102 on the low-frequency sensing beam 1;
step three, respectively sensing each order mode omega of the beam 1 in low frequency1jNear frequency, i.e. 0.8 omega1jTo 1.2 omega1jWithin the frequency range of (1), a forward sweep frequency signal is circularly input to the low-frequency sensing beam 1 through the piezoelectric driving electrode 101, a voltage signal containing vibration information is output through the piezoelectric output electrode 201, an amplitude-frequency characteristic curve of each order of mode of the high-frequency detection beam 2 changing along with the mass of a substance to be detected is further analyzed and obtained, the frequency corresponding to each order of mode resonance peak of the high-frequency detection beam 2 is obtained through Fourier transform calculation, the change condition of the frequency is observed, when the frequency of the resonance peak is not changed, the corresponding mode frequency is not changed any more, the corresponding substance to be detected is indicated to be adsorbed to reach a balanced state, and at the moment, each order of mode resonance peak frequency is the mode frequency omega of each order of the high-frequency detection beam 2 after the substance to be detected is adsorbed'2j(ii) a The internal resonance phenomenon occurs under the action of nonlinear coupling, and the modal frequencies of each order of the low-frequency sensing beam 1 and the high-frequency detection beam 2 form a certain proportional relationship: a is1ω′1j＝a2ω′2jCalculating to obtain modal frequency omega of each stage of the low-frequency perception beam 1 after adsorbing the substance to be detected'1j(ii) a A herein1And a2The frequency ratio is reflected, and different frequency ratios can be designed when the structure is designed according to different coupling modes;
step four, because the mass of the adsorbed substances to be detected is far less than that of the low-frequency sensing beam 1, the mode shapes of various orders of the low-frequency sensing beam 1 are almost unchanged, and a relational expression can be obtained by utilizing the energy conservation principle:
Figure BDA0003147652660000087
wherein E isstrainIs the average strain energy of the low frequency sensing beam 1, EkinIs the average kinetic energy of the low frequency sensing beam 1,
Figure BDA0003147652660000088
is the sum of the average kinetic energy of a plurality of substances to be detected adsorbed on the sensitive layer 102; due to low frequency perceptionThe mode shape of each order of the beam 1 is almost unchanged, and the average strain energy E of the beam 1 is sensed at low frequencystrainApproximately equal to the average kinetic energy when the substance to be measured is not adsorbed, as calculated by the following equation:
Figure BDA0003147652660000081
wherein m is1Is the equivalent mass of the low frequency sensing beam 1, ajModal amplitude, ω, of the j-th order mode of the low frequency sensing beam 11jThe modal frequencies of the orders of the low-frequency sensing beam 1 are provided. Average kinetic energy E of low frequency sensing beam 1kinCalculated as follows:
Figure BDA0003147652660000082
the sum of the average kinetic energies of the multiple substances to be detected adsorbed on the sensitive layer 102
Figure BDA0003147652660000083
Calculated as follows:
Figure BDA0003147652660000084
wherein n is the first n-order mode number, and is also equal to the number of species to be detected, and is Delta miAs the mass of the adsorbed ith substance to be measured,
Figure BDA0003147652660000085
in order to adsorb the position of the sensitive layer 102 of the ith substance to be detected,
Figure BDA0003147652660000086
the displacement of the position of the sensitive layer 102 for correspondingly adsorbing the ith substance to be detected under the j-th order modal shape of the low-frequency sensing beam 1 is measured; after the substance to be detected is fully adsorbed, the j-th order modal frequency of the low-frequency sensing beam 1 shifts from omega1jBecomes ω'1jFrom the above analysis, the relationship satisfies the following formula:
Figure BDA0003147652660000091
taking the identification and detection of three substances to be detected as an example, the number of the sensitive layers 102 is 3, and the following relation can be obtained:
Figure BDA0003147652660000092
wherein the content of the first and second substances,
Figure BDA0003147652660000093
respectively the 1 st order, 2 nd order and 3 rd order modal frequencies, Delta m, of the low-frequency sensing beam 1 after fully adsorbing the substance to be detected1、Δm2、Δm3The mass of the adsorbed 1 st, 2 nd and 3 rd substances to be measured,
Figure BDA0003147652660000094
Figure BDA0003147652660000095
three positions of the sensitive layer 102 for adsorbing the 1 st, 2 nd and 3 rd substances to be detected respectively,
Figure BDA0003147652660000096
the displacement of the position of the sensitive layer 102 for correspondingly adsorbing the 1 st, 2 nd and 3 rd substances to be detected under the 1 st order modal shape of the low-frequency sensing beam 1 is respectively, and other parameters are the same;
after the substance to be detected is adsorbed, the displacement of the position of the sensitive layer 102 adsorbing only the 1 st substance to be detected is large under the 1 st order modal shape, and similarly, the displacement of the position of the sensitive layer 102 adsorbing only the 2 nd and 3 rd substances to be detected is large under the 2 nd order and 3 rd order modes, so that the adsorption quality of the 1 st, 2 nd and 3 rd substances to be detected only affects the 1 st order, 2 nd order and 3 rd order modal frequency deviation of the low-frequency sensing beam 1, so that one substance uniquely corresponds to one modal frequency, and one substance to be detected uniquely corresponds to one modal frequency, and therefore after one frequency is changed, the substance is definitely the substance. The positions of the different sensitive layers 102 are designed according to the types of different substances, that is, firstly, the substance to be detected is known, then, the position of the sensitive layer 102 is designed according to the type of the substance, and then, in the actual detection, which substance has a large frequency change, indicates that the substance exists in the detection environment.
Analysis of 3 modal frequencies by comparison
Figure BDA0003147652660000097
The category of the adsorbed substances to be detected can be identified by the numerical value change, and the mass delta m of the adsorbed 3 substances to be detected is obtained by utilizing the formula1、Δm2、Δm3And further realize the detection of the quality of the adsorbed substance to be detected.
The piezoelectric output electrode 201 is used for outputting a voltage signal to obtain an amplitude-frequency characteristic curve of the vibration of the high-frequency detection beam 2, and Fourier transform analysis is carried out to obtain the first 3-order modal frequency of the high-frequency detection beam 2 after the substances to be detected are adsorbed
Figure BDA0003147652660000098
The internal resonance phenomenon occurs under the action of nonlinear coupling, the modal frequencies of the low-frequency sensing beam 1 and the high-frequency detection beam 2 are in a certain proportion, and the relation is satisfied: a is1ω′1j＝a2ω′2jThe frequency offset caused by the adsorption of the substance to be detected is amplified, so that the amplification of the sensitivity is realized, and the amplification factor of the sensitivity is a1/a2。
Example 2
As shown in fig. 5, the same as in embodiment 1 except that the number of the sensitive layers 102 is 2.
Example 3
As shown in fig. 6 and 7, the same as embodiment 1, except that the partial hole 202 is rectangular and the partial protrusion 203 is cylindrical.
Example 4
As shown in fig. 8, the same as embodiment 1, except that in order to increase the area of the sensitive layer 102, the shape of the low frequency sensing beam 1 is changed to be a ladder-shaped structure, that is, the shape is like a ladder, and the low frequency sensing beam comprises two vertical beams, a plurality of step beams, a piezoelectric driving electrode 101, an upper insulating layer one 103, a base beam one 104 and a lower insulating layer one 105, wherein the step beams are sequentially fixed between the two vertical beams at intervals from front to back, two ends of the low frequency sensing beam 1 are respectively fixed on a fixed base one 3 and a fixed base two 4, one end of the high frequency detecting beam 2 is fixed on the base one 3, and the left and right ends of the high frequency detecting beam 2 are respectively provided with one coupling unit 5, and the upper surfaces of the two vertical beams outside the two coupling units 5 are respectively provided with one piezoelectric driving electrode 101; an upper insulating layer I103, a substrate beam I104 and a lower insulating layer I105 are sequentially connected below each piezoelectric driving electrode 101, and a sensitive layer 102 is coated on the upper surface of the step beam.
Example 5
The difference is that the shape of the stepped beam on the low frequency sensing beam 1 is a strip, or the variable cross section of the stepped beam is a strip, a curve or a V shape, as in embodiment 4. Fig. 9 and 10 are schematic structural diagrams respectively showing the structure that the variable cross section, namely the cross section, of the step beam is long and curved.
Example 6
As shown in fig. 11 and fig. 12, the same as embodiment 1 or embodiment 4, except that the low frequency sensing beam 1 is a cantilever beam with one end fixed, that is, one end of the low frequency sensing beam 1 is fixed on the first substrate 3, and the other end is suspended.
Example 7
As shown in fig. 13 and fig. 14, the same as embodiment 1, except that the coupling unit 5 is a magnetic coupling, wherein the rear end of the low frequency sensing beam 1 is fixed on the second substrate 4, the rear end of the high frequency detecting beam 2 is fixed on the first substrate 3, and two parts of the coupling unit 5 are respectively fixed at the bottom of the low frequency sensing beam 1 and the high frequency detecting beam 2, and the mechanical coupling of the original fixed ends is changed into the magnetic coupling of the free ends opposite to each other.
Example 8
As shown in fig. 15, the same as embodiment 1, except that the coupling unit 5 is electrostatic coupling, the coupling unit 5 includes a first coupling electrode 501, a second coupling electrode 502, a third coupling electrode 503, and a fourth coupling electrode 504, wherein the first coupling electrode 501 and the second coupling electrode 502 are disposed opposite to each other and are respectively fixed on the lower end of the high-frequency sensing beam 2 and the upper end of the low-frequency sensing beam 1, the third coupling electrode 503 is fixed on the lower end of the low-frequency sensing beam 1 and is disposed opposite to the fourth coupling electrode 504, the first fixed end electrode 6 is fixed on the lower surface of the fourth coupling electrode 504, the second fixed end electrode 7 and the third fixed end electrode 8 are respectively fixed on a substrate connected to two ends of the low-frequency sensing beam 1, and the fourth fixed end electrode 9 and the fifth fixed end electrode 10 are respectively fixed on a substrate connected to two ends of the high-frequency sensing beam 2.
The driving mode and the vibration signal output mode adopt a piezoresistive mode, and voltage V is loaded on a second fixed end electrode 7 and a third fixed end electrode 81and-V1And a vibration signal is generated by utilizing the piezoresistive effect, processed by a differential circuit, input through a first fixed end electrode 6 by a closed loop feedback circuit, and continuously vibrate by driving the low-frequency sensing beam 1 through the interaction of a third coupling electrode 503 and a fourth coupling electrode 504. Voltage is loaded on the fixed end electrode IV 9 and the fixed end electrode V10 to enable the coupling electrode I501 to be electrified, the high-frequency detection beam 2 vibrates under the electrostatic coupling effect between the coupling electrode I501 and the coupling electrode II 502, and voltage signals containing vibration information of the high-frequency detection beam 2 are output from the fixed end electrode IV 9 and the fixed end electrode 10 through the piezoresistive effect.

Claims (8)

1. A multi-trace high-sensitivity synchronous sensing device based on multi-mode internal resonance is characterized by comprising a low-frequency sensing beam (1), a high-frequency detecting beam (2), a substrate and a coupling unit (5), wherein the low-frequency sensing beam (1) is a fixed beam, two ends of the low-frequency sensing beam are respectively fixed on a first substrate (3) and a second substrate (4), the high-frequency detecting beam (2) is a cantilever beam, one end of the high-frequency detecting beam is fixed on the first substrate (3) and is arranged side by side with the low-frequency sensing beam (1), the rear end of the coupling unit (5) is fixed on the first substrate (3), the left end and the right end of the coupling unit (5) are respectively connected with the low-frequency sensing beam (1) and the high-frequency detecting beam (2), a plurality of sensitive layers (102) are arranged on the upper surface of the low-frequency sensing beam (1), a local hole (202) and a local bulge (203) are arranged on the high-frequency detecting beam (2), and the required frequency modal frequency is adjusted by adjusting the widths of different positions of the high-frequency detecting beam (2) in the length direction, the low-frequency sensing beam (1), the high-frequency detection beam (2) and the coupling unit (5) jointly form a coupling beam structure.
2. The multi-trace high-sensitivity synchronous sensing device based on multi-modal internal resonance is characterized in that the low-frequency sensing beam (1) comprises a piezoelectric driving electrode (101), an upper insulating layer I (103), a substrate beam I (104) and a lower insulating layer I (105) which are sequentially arranged from top to bottom and connected, and the sensing layer (102) is connected to the upper surface of the upper insulating layer I (103) of the low-frequency sensing beam (1); the piezoelectric driving electrode (101) comprises a first piezoelectric layer upper electrode (10101), a first piezoelectric film (10102) and a first piezoelectric layer lower electrode (10103) which are sequentially arranged from top to bottom and connected.
3. The multi-trace highly sensitive synchronous sensing device based on multi-modal internal resonance according to claim 2, wherein the high frequency detection beam (2) comprises a piezoelectric output electrode (201), an upper insulation layer two (204), a substrate beam two (205) and a lower insulation layer two (206) which are sequentially arranged and connected from top to bottom; the piezoelectric output electrode (201) comprises a second piezoelectric layer upper electrode (20101), a second piezoelectric film (20102) and a second piezoelectric layer lower electrode (20103) which are sequentially arranged from top to bottom and connected.
4. The multi-trace highly sensitive synchronous sensing device based on multi-modal intra-resonance according to claim 3, characterized in that the coupling manner of the coupling unit (5) is mechanical coupling, magnetic coupling or electrostatic coupling.
5. The multi-trace high-sensitivity synchronous sensing device based on multi-modal internal resonance according to claim 4, wherein the number of the sensitive layers (102) is a positive integer greater than or equal to (1) and equal to the number of the species of the substance to be detected, one sensitive layer (102) adsorbs only one substance to be detected, and the positions of the different sensitive layers (102) correspond to the positions of the low-frequency sensing beams (1) with the largest modal shape displacement under different modes.
6. The multi-trace highly sensitive synchronous sensing device based on multi-modal internal resonance according to claim 5, characterized in that the shape of the local dug hole (202) of the high frequency detection beam (2) is a circle, a polygon, an ellipse or other closed figure; the shape of the local protrusion (203) is a cube, a cylinder or an elliptic cylinder.
7. The multi-trace highly sensitive synchronous sensing device based on multi-modal internal resonance according to claim 6, characterized in that the j-th order modal frequency of the low frequency sensing beam (1) is ω1jThe j-th order modal frequency corresponding to the high-frequency detection beam (2) is omega2jAnd the frequency satisfies the following formula: a is1ω1j＝a2ω2jWherein a is1、a2Are all positive integers, and a1＞a2，a1/a2Is a magnification of the frequency.
8. A method for realizing multi-trace high-sensitivity synchronous sensing based on multi-modal internal resonance by using the multi-trace high-sensitivity synchronous sensing device of any one of claims 1 to 7, which is characterized by comprising the following steps:
step one, calibrating modal frequencies of each order of a low-frequency sensing beam (1) and a high-frequency detection beam (2) which do not adsorb substances to be detected:
the j-th order modal frequency omega corresponding to the low-frequency sensing beam (1) and the high-frequency detection beam (2) respectively1jAnd ω2jNearby, a sweep frequency signal is input through a piezoelectric driving electrode (101) and is 0.8 omega1jTo 1.2 omega1jAnd a modal frequency range of 0.8 omega2jTo 1.2 omega2jThe modal frequency range of (A) is subjected to two times of cycle forward frequency sweep excitation, and the excitation acceleration is adcos(Ωt)；
Under the action of nonlinear coupling, internal resonance with a fixed proportion occurs between the low-frequency sensing beam (1) and the high-frequency detection beam (2), a voltage signal containing vibration information is output through the piezoelectric output electrode (201), amplitude-frequency characteristic curves of amplitudes of various orders of modes of the low-frequency sensing beam (1) and the high-frequency detection beam (2) about excitation frequency are respectively obtained through the output voltage signal, and various orders of modal frequencies of the low-frequency sensing beam (1) and the high-frequency detection beam (2) when a substance to be detected is not adsorbed are obtained through Fourier transform calculation;
placing the synchronous sensing device in a tested environment, and adsorbing a substance to be tested by using a sensitive layer (102) on a low-frequency sensing beam (1);
step three, respectively at 0.8 omega1jTo 1.2 omega1jIn the frequency range, a forward sweep frequency signal is circularly input to the low-frequency sensing beam (1) through the piezoelectric driving electrode (101), a voltage signal containing vibration information is output through the piezoelectric output electrode (201), an amplitude-frequency characteristic curve of each order mode of the high-frequency detection beam (2) changing along with the mass of the substance to be detected is further obtained, the frequency corresponding to each order mode resonance peak of the high-frequency detection beam (2) is obtained through Fourier transform calculation, the change condition of the frequency is observed, when the frequency corresponding to the resonance peak is not changed, the corresponding mode frequency does not change, the corresponding substance to be detected is adsorbed, the condition that the adsorbed corresponding substance to be detected reaches the equilibrium state is obtained, and the frequency corresponding to each order mode resonance peak is the modal frequency omega of each order of the high-frequency detection beam (2) after the substance to be detected is adsorbed'2j(ii) a Because the internal resonance phenomenon occurs under the action of nonlinear coupling, the modal frequencies of each order of the low-frequency sensing beam (1) and the high-frequency detection beam (2) are in a certain proportional relation, namely: a is1ω′1j＝a2ω′2jCalculating modal frequency omega 'of each order of the low-frequency perception beam (1) after adsorbing the substance to be measured'1j；
Step four, analyzing n-order modal frequency omega 'through comparison'1jThe type of the substance to be detected is identified by the value change, and the mass delta m of the substance to be detected is calculated by using the following formulaiAnd further realizing the detection of the quality of the adsorbed substance to be detected:
Figure FDA0003664941690000031
wherein n is the first n-order mode number, and is also equal to the number of species to be detected, and is Delta miAs the mass of the adsorbed ith substance to be measured,
Figure FDA0003664941690000032
in order to adsorb the position of the sensitive layer (102) of the ith substance to be detected,
Figure FDA0003664941690000033
the displacement of the position of a sensitive layer (102) for correspondingly adsorbing the ith substance to be detected under the j-th order modal shape of the low-frequency sensing beam (1) is obtained.
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