CN208872648U - A kind of minimal feeding device based on parametric excitation and synchro-resonance - Google Patents
A kind of minimal feeding device based on parametric excitation and synchro-resonance Download PDFInfo
- Publication number
- CN208872648U CN208872648U CN201821467951.XU CN201821467951U CN208872648U CN 208872648 U CN208872648 U CN 208872648U CN 201821467951 U CN201821467951 U CN 201821467951U CN 208872648 U CN208872648 U CN 208872648U
- Authority
- CN
- China
- Prior art keywords
- electrode
- excitation
- piezoelectric
- synchro
- pick
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
- 230000005284 excitation Effects 0.000 title claims abstract description 60
- 230000001360 synchronised effect Effects 0.000 claims abstract description 40
- 230000006698 induction Effects 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 241000208340 Araliaceae Species 0.000 claims abstract description 19
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 claims abstract description 19
- 235000003140 Panax quinquefolius Nutrition 0.000 claims abstract description 19
- 235000008434 ginseng Nutrition 0.000 claims abstract description 19
- 239000012528 membrane Substances 0.000 claims description 8
- 238000010276 construction Methods 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000003321 amplification Effects 0.000 claims description 3
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 2
- 230000008859 change Effects 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 5
- 239000000463 material Substances 0.000 abstract description 4
- 230000021715 photosynthesis, light harvesting Effects 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 3
- 230000001939 inductive effect Effects 0.000 abstract 1
- 239000000126 substance Substances 0.000 description 10
- 238000001514 detection method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 238000012360 testing method Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 3
- 238000011160 research Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000035772 mutation Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000010408 sweeping Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The utility model relates to a kind of minimal feeding device based on parametric excitation and synchro-resonance, belongs to minimal feeding device and method.Join including at least one and swashs beam, with reference to beam, pick-up beam, two substrates, two synchronous coupled beams, piezoelectric excitation electrode, piezoelectricity induction electrode, piezoelectric excitation induction electrode and sensitive layer.Pick-up beam is cantilever beam, joining sharp beam and reference beam is fixed beam, joins sharp beam for receiving outside stimulus, itself intrinsic frequency is made to change through the excitation of electrode and frequency sweep realization triggering and inducing function, beam is swashed with ginseng when being used for Trigger Function with reference to beam and generates synchro-resonance, inhibits energy loss.Advantage is structure novel, saves material, perfect in shape and function, beam and reference beam generation synchro-resonance are swashed by joining, and are joined and are swashed beam and the generation synchro-resonance of pick-up beam and parametric excitation principle is used to realize triggering and sensing function respectively, realize frequency multiplication, the sensitivity of device is improved, energy dissipation is inhibited.
Description
Technical field
The utility model belongs to minimal feeding device, more particularly to a kind of achievable triggering, senses two functions
Device based on parametric excitation and synchronization, the resonance principle that desynchronizes.
Background technique
Synchro-resonance principle based on nonlinear vibration mechanics is, it can be achieved that the frequency multiplication of low frequency exciting high frequency pick-up is imitated
It answers.When two harmonic oscillator intrinsic frequencies are there are when certain integer ratio relationship, i.e. generation synchro-resonance.Two harmonic oscillator vibration frequencies
The phenomenon that keeping certain multiple relationship referred to as PGC demodulation, also known as locking phase.Team, northeastern Japan university passes through to synchro-resonance shape
The research of two coupled beams under state, it is determined that PGC demodulation phenomenon determines the width in synchro-resonance region, finds girder construction
Synchro-resonance facilitate reduce phase noise；Team, university, California Institute of Technology is believed by the output of circuit control piezoelectric excitation
Number, coupled structure is simulated, analyzes the relationship of synchro-resonance regional scope and driving voltage, and observed in experimental phenomena
The inhibition of phase noise.The studies above the result shows that, the synchro-resonance of harmonic oscillator can realize the inhibition of phase noise, be conducive to humorous
Vibration formula mass sensor resolution ratio further increases.
Using parametric excitation exciting mode, it can be achieved that girder construction amplitude transition, improve the resolution ratio of sensor.Japan
NTT basic research laboratories are research shows that the quality factor of harmonic oscillator, the highly sensitive detection of realization can be improved in parametric excitation.On
Extra large university of communications Zhang Wenming team, under different driving signal input condition (Gaussian noise, sine wave), using Method of Multiple Scales,
Lenard-Jones energy models and Volterra series method have studied the change of press-filming damping, cube rigidity, D/C voltage
Influence to parametric excitation nonlinear vibration characteristics (mainly soft or hard spring performance and resonance frequency change), swashs for design parameter
Sensor under encouraging is laid a good foundation.The above result shows that parametric excitation can be realized higher resolution ratio, but by sweeping steps
Limitation, bifurcation point detection inaccuracy.
Resonant transducer is the sensor using resonant element tested parameter transform for frequency signal, also known as frequency type
Sensor.In recent years, due to its small in size, light-weight, compact-sized, high resolution, precision height and convenient for data transmission, place
Reason and storage the features such as and be widely used in safety detection, environmental monitoring, biology detection etc. fields.By synchro-resonance principle
Apply to resonant transducer, vibration frequency will obtain into the increase of multiple.Compared to conventional resonance formula sensor, with same
The resonant transducer of step resonance principle has the characteristics that high sensitivity, phase noise be low, fast response time, to small signal
Detection is advantageously.
Summary of the invention
The utility model provides a kind of minimal feeding device based on parametric excitation and synchro-resonance, it is therefore intended that mentions
The sensitivity of high device inhibits energy dissipation；Shorten detection time.
The technical scheme adopted by the utility model is that: join including at least one and swashs beam, at least one with reference to beam, at least one
Pick-up beam, wherein pick-up beam is stretcher, one end of which is fixed in substrate two, join swash beam, with reference to beam both ends respectively with substrate
One is fixedly connected with substrate two, and synchronous coupled beams one are fixedly connected with substrate one and also swash beam with reference beam, ginseng respectively and connect,
Synchronous coupled beams two are fixedly connected with substrate two and also connect respectively with reference beam, the sharp beam of ginseng and pick-up beam, pick-up beam upper surface
It is close to have piezoelectric excitation induction electrode with synchronous two joint of coupled beams, connect with synchronous coupled beams one with reference to beam upper surface is close
There is a piezoelectric excitation electrode one at place, joins and swashs that beam upper surface is close piezoelectric excitation electrode two, close with synchronous one joint of coupled beams
There is piezoelectricity induction electrode with synchronous two joint of coupled beams；With reference to beam, joins and swash beam, pick-up beam, synchronous coupled beams one and synchronous coupling
It closes beam two and collectively constitutes synchro-resonance structure；Join to swash beam, pick-up beam and synchronize coupled beams two and collectively constitute sensing arrangement, refers to
Beam, ginseng swash beam and synchronous coupled beams one, synchronous coupled beams two collectively constitute trigger architecture, and sensitive layer is coated on ginseng and swashs in the middle part of beam.
It is described to be with reference to girder construction: piezoelectric excitation electrode one interconnected, upper insulating layer one, substrate beam one from top to bottom
With lower insulating layer two；Wherein the structure of piezoelectric excitation electrode one is: piezoelectric layer top electrode one interconnected, piezoelectricity from top to bottom
Electrode one under film one and piezoelectric layer.
The structure for joining sharp beam is: upper insulating layer two interconnected, substrate beam two and lower insulating layer two from top to bottom,
Piezoelectric excitation electrode two, piezoelectricity induction electrode are connected to the both ends of two upper surface of insulating layer, and sensitive layer is connected to absolutely
The middle part of two upper surface of edge layer.
The structure of the piezoelectric excitation electrode two is: piezoelectric layer top electrode two interconnected, piezoelectric membrane from top to bottom
Two and piezoelectric layer under electrode two.
The structure of the piezoelectricity induction electrode is: piezoelectric layer top electrode three interconnected, piezoelectric membrane three from top to bottom
With electrode three under piezoelectric layer.
The structure of the pick-up beam is；Piezoelectric excitation induction electrode interconnected, upper insulating layer three, substrate from top to bottom
Insulating layer three under Liang Sanhe.
The structure of the piezoelectric excitation induction electrode is: piezoelectric layer top electrode four interconnected, piezoelectricity are thin from top to bottom
Electrode four under film four and piezoelectric layer.
Pick-up beam is high frequency beam, and swashing beam with ginseng with reference to beam is low frequency beam, and it is equal with reference beam resonant frequency to join sharp beam；When low
Frequency beam intrinsic frequency is f1, high frequency beam intrinsic frequency is f2, intrinsic frequency meets following formula:
a1f1=b1f2
Wherein, a1、b1It is positive integer, and a1>b1, a1/b1For the amplification factor of frequency.
The utility model has the advantages that:
(1) synchro-resonance principle is applied to the more boom devices of resonant mode, it can be achieved that frequency multiplication, improves the sensitive of device
Degree inhibits energy dissipation；
(2) resonance principle that will desynchronize is applied to the more boom devices of resonant mode, when sensing and the conversion of Trigger Function can be changed
The combination of resonant beam reduces energy dissipation；
(3) when realizing Trigger Function, with parametric excitation and synchro-resonance principle, the mutation of vibration signal amplitude is made
For trigger condition, susceptibility is high, and it is low that energy dissipates consumption；
(4) by sensitive layer design join swash beam on, realize exciting, pick-up separate design, eliminate sensitive layer and the factor absorption,
The influence that pick-up beam surface energy is lost in desorption process improves the quality factor of pick-up beam；
(5) beam will be swashed with reference to beam, pick-up beam, ginseng to be integrated in a structure with synchronous coupled beams, structure novel saves material
Material, perfect in shape and function.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of the utility model pick-up beam；
Fig. 3 is that the utility model joins the structural schematic diagram for swashing beam；
Fig. 4 is the structural schematic diagram that the utility model refers to beam；
Fig. 5 is the top view of the utility model；
Fig. 6 is one schematic diagram of application of the utility model；
Fig. 7 is two schematic diagrames of application of the utility model；
Fig. 8 is three schematic diagrames of application of the utility model；
Fig. 9 is four schematic diagrames of application of the utility model.
Specific embodiment
Referring to Fig. 1, including at least one joins sharp beam 2, at least one refers to beam 1, at least one pick-up beam 3, wherein pick-up
Beam 3 is stretcher, one end of which is fixed in substrate 25, join swash beam 2, with reference to 1 both ends of beam respectively with substrate 1 and substrate 25
It is fixedly connected, synchronous coupled beams 1 are fixedly connected with substrate 1 and also swash beam 2 with reference beam 1, ginseng respectively and connect, synchronous coupling
Beam 27 is closed to be fixedly connected and also connect with reference beam 1, the sharp beam 2 of ginseng and pick-up beam 3 respectively, 3 upper surface of pick-up beam with substrate 25
It is close to have piezoelectric excitation induction electrode 301 with synchronous 27 joint of coupled beams, it is close with synchronous coupled beams with reference to 1 upper surface of beam
There are a piezoelectric excitation electrode 1 in one 6 joints, and ginseng swashs that 2 upper surface of beam is close to have piezoelectric excitation with synchronous one 6 joint of coupled beams
Electrode 2 201 close has piezoelectricity induction electrode 202 with synchronous 27 joint of coupled beams；With reference to beam 1, join swash beam 2, pick-up beam 3,
Synchronous coupled beams 1 and synchronous coupled beams 27 collectively constitute synchro-resonance structure；Join and swashs beam 2, pick-up beam 3 and synchronous coupled beams
27 collectively constitute sensing arrangement, swash beam 2 with reference to beam 1, ginseng and synchronous coupled beams 1, synchronous coupled beams 27 collectively constitute triggering
Structure, sensitive layer 203, which is coated on to join, swashs 2 middle part of beam.
Referring to fig. 4, described to be with reference to 1 structure of beam: piezoelectric excitation electrode 1 interconnected, upper insulation from top to bottom
Layer 1, substrate beam 1 and lower insulating layer 2 104；Wherein the structure of piezoelectric excitation electrode 1 is: from top to bottom mutually
Electrode 1 under the piezoelectric layer top electrode 1 of connection, piezoelectric membrane 1 and piezoelectric layer.
Referring to Fig. 3, the structure for joining sharp beam 2 is: upper insulating layer 2 204 interconnected, substrate beam two from top to bottom
205 and lower insulating layer 2 206, piezoelectric excitation electrode 2 201, piezoelectricity induction electrode 202 be connected on insulating layer 2 204
The both ends on surface, sensitive layer 203 are connected to the middle part of 2 204 upper surface of insulating layer；
The structure of the piezoelectric excitation electrode 2 201 is: from top to bottom piezoelectric layer top electrode 2 20101 interconnected,
Electrode 2 20103 under piezoelectric membrane 2 20102 and piezoelectric layer；
The structure of the piezoelectricity induction electrode 202 is: piezoelectric layer top electrode 3 20201 interconnected, pressure from top to bottom
Electrode 3 20203 under conductive film 3 20202 and piezoelectric layer.
Referring to fig. 2, the structure of the pick-up beam 3 is；From top to bottom piezoelectric excitation induction electrode 301 interconnected, on
Insulating layer 3 302, substrate beam 3 303 and lower insulating layer 3 304；
The structure of the piezoelectric excitation induction electrode 301 is: piezoelectric layer top electrode four interconnected from top to bottom
30101, electrode 4 30103 under piezoelectric membrane 4 30101 and piezoelectric layer.
Pick-up beam 3 is high frequency beam, and swashing beam 2 with reference to beam 1 and ginseng is low frequency beam, joins and swashs beam 2 and with reference to 1 resonant frequency phase of beam
Deng；When low frequency beam intrinsic frequency is f1, high frequency beam intrinsic frequency is f2, intrinsic frequency meets following formula:
a1f1=b1f2
Wherein, a1、b1It is positive integer, and a1>b1, a1/b1For the amplification factor of frequency.
As shown in Figure 6, Figure 7, if joining the sharp direction of beam 2 with reference to 1 direction of beam increase n (n >=1) root beam knot with reference to 1 quantity of beam
Structure, then the structure phase noise is down to 2/ (n+2) of original structure；If 3 quantity of pick-up beam is joining the sharp direction of beam 21 direction of pick-up beam
Increase m (m >=1) root girder construction, then the structure phase noise is down to 2/ (m+2) of original structure.
As shown in Figure 8, Figure 9, as pick-up beam 3 is changed to fixed beam, then joins and swash beam 2 and middle font, song need to be designed as with reference to beam 3
Line style etc. meets required frequency ratio.
Working principle:
(1), according to the property of measured matter, corresponding sensitive layer 203 is coated on beam 2 joining to swash, for adsorbing this by micrometer
Quantity of material, adsorbance are directly proportional to measured matter concentration；A when determining synchro-resonance1、b1Exact value and detection before refer to
Beam 1 joins the intrinsic frequency f for swashing beam 20And mass M1, two beam quality and intrinsic frequency are identical under original state；According to requiring to formulate
Adsorbed measured matter alarm mass M0；It is different according to specific measured matter property, be classified as: as content excessively if to tested
The harmful A substance of environment, the B substance harmful to test environment if content is too low, A substance large amount of adsorption is in M0Then
To environment nocuousness, B substance adsorbance is less than M0Then to environment nocuousness；
(2), the device is placed in test environment, is sufficiently reacted to the measured matter in test environment with sensitive layer 203
Afterwards, join the quality for swashing beam 2 by M1Become M1', to the piezoelectric excitation induced electricity for joining the piezoelectric excitation electrode 201, pick-up beam 3 that swash beam 2
It is f that pole 301 applies frequency respectivelyb、fcExcitation alternating current, and synchronize two beams by the effect of synchronous coupled beams 27
Resonance constantly changes the frequency f of two excitation alternating currentsb、fc, stop changing excitation when two beams vibrate under respective intrinsic frequency
The frequency of alternating current simultaneously stops being powered to pick-up beam 3.Pick-up beam continues to keep former frequency under the action of synchronous couples beam 27
Rate vibration, output is at this time to the frequency f of the excitation alternating current on the piezoelectric excitation pick-up electrode 301 of pick-up beam 3cIt is equal to pick-up
The intrinsic frequency f of beam 3 at this time2, join the intrinsic frequency f for swashing beam 2 at this time1With the intrinsic frequency f of pick-up beam 32There are following relationshipsIt can be calculated by the formula and join the intrinsic frequency f for swashing beam 2 at this time1, then calculate the intrinsic frequency joined swash beam 2 at this time
Offset △ f1=f1-f0, △ M1=M1'-M1, due to its mass shift amount △ M1It is very small, and then can be by formulaIt acquires to join at this time and swashs 2 mass shift amount △ M of beam1Numerical value, △ M at this time1It is exactly that sensitive layer 203 is depended on
Measured matter quality, then whether contain in available test environment, containing how many measured matter, realize to test environment
The detection of middle measured matter；
(3), after completing to the detection of measured matter in test environment, by the matter of the absorption measured matter of sensitive layer 203 at this time
Measure △ M1With alarm mass M0Compare:
When measured matter type is A class, △ M1-M0The amount of the substance is to environment nocuousness when > 0；
When measured matter type is B class, △ M1-M0The amount of the substance is to environment nocuousness when < 0；
1) it when measured matter is to environment nocuousness, directs out boundary and issues the environmentally harmful associated alarm of the substance and defeated
The related concentrations information of the substance out；
2) when measured matter environmental sound, which is kept in test environment；Piezoelectricity swashs on pick-up beam 3
It encourages induction electrode 301 and applies direct current, the effective rigidity of induction pick-up beam 3 changes, and so that pick-up beam 3 and ginseng is swashed beam 2 and goes together
It is that pick-up beam 3 no longer swashs 2 synchro-resonance of beam with ginseng that step, which resonates, and pick-up beam 3 can taper off vibration but join sharp beam 2 and still shake at this time
Dynamic, pick-up beam 3 stops stopping after vibration the piezoelectric excitation induction electrode 301 on pick-up beam 3 and applies direct current, then to reference beam
It is f that 1 piezoelectric excitation electrode 101, which applies frequency,aMotivate alternating current, faSize is with reference to 1 intrinsic frequency f of beam0, pass through synchronous coupling
The effect for closing beam 27, synchronous coupled beams 1 makes to join sharp beam 2 with reference to the generation synchro-resonance of beam 1, stops after two beam synchro-resonances
Only to reference beam indirect current, in the case where synchronous coupled beams 27, synchronous coupled beams 1 act on, primary frequency vibration is kept with reference to beam 1；
Due to joining sharp 2 mass M of beam at this time1' and with reference to 1 mass M of beam1Very little is differed, soChange the frequency of excitation alternating current
fb, two beams no longer vibrate under intrinsic frequency and vibration frequency is fb, and makeThe intrinsic of beam 2 is swashed if joining
Frequency reaches fbThen the adsorbed measured matter quality of sensitive layer 203 is M0, and 2 vibration amplitude A of beam is swashed by joining0Beam 2 is swashed by joining
Piezoelectricity induction electrode 202 exports, if measured matter concentration changes in environment, the measured matter matter adsorbed on sensitive layer 203
Amount is also with its variation, this, which will change to join, swashs the quality of beam 2 and then change its intrinsic frequency, i.e., M at this time1' change, when ginseng swashs
The intrinsic frequency of beam 2 is changed to fbWhen by parametric excitation principle, from the vibration width joining the piezoelectricity induction electrode 202 for swashing beam 2 and exporting
Value A0A will be increased to suddenly within the extremely short time1, A1>>A0, when the vibration amplitude for joining the output of piezoelectricity induction electrode 202 for swashing beam 2
A0A will be increased to suddenly1When, the device warning function is triggered, sending measured matter concentration, which arrived the environment, can bear this kind of substance
It has been alarm mass M that critical value, that is, sensitive layer 203, which adsorbs measured matter quality,0, to realize to this kind of substance in the environment
Real time monitoring.
Claims (8)
1. a kind of minimal feeding device based on parametric excitation and synchro-resonance, it is characterised in that: join including at least one
Swash beam, at least one refers to beam, at least one pick-up beam, wherein pick-up beam is stretcher, one end of which is fixed in substrate two,
Join and swash beam, be fixedly connected respectively with substrate one and substrate two with reference to beam both ends, synchronous coupled beams one be fixedly connected with substrate one and
Also swash beam with reference beam, ginseng respectively to connect, synchronous coupled beams two are fixedly connected with substrate two and also swash with reference beam, ginseng respectively
Beam is connected with pick-up beam, and pick-up beam upper surface is close to have piezoelectric excitation induction electrode with synchronous two joint of coupled beams, with reference to beam
Upper surface is close piezoelectric excitation electrode one with synchronous one joint of coupled beams, joins that swash beam upper surface close with synchronous coupled beams one
There is piezoelectric excitation electrode two in joint, close has piezoelectricity induction electrode with synchronous two joint of coupled beams；With reference to beam, join swash beam,
Pick-up beam, synchronous coupled beams one and synchronous coupled beams two collectively constitute synchro-resonance structure；Join and swashs beam, pick-up beam and synchronous coupling
It closes beam two and collectively constitutes sensing arrangement, swash beam with reference to beam, ginseng and synchronous coupled beams one, synchronous coupled beams two collectively constitute triggering and tie
Structure, sensitive layer, which is coated on to join, to swash in the middle part of beam.
2. a kind of minimal feeding device based on parametric excitation and synchro-resonance according to claim 1, feature
It is: described to be with reference to girder construction: piezoelectric excitation electrode one interconnected, upper insulating layer one, one and of substrate beam from top to bottom
Lower insulating layer two；Wherein the structure of piezoelectric excitation electrode one is: piezoelectric layer top electrode one interconnected, piezoelectricity are thin from top to bottom
Electrode one under film one and piezoelectric layer.
3. a kind of minimal feeding device based on parametric excitation and synchro-resonance according to claim 1, feature
Be: the structure for joining sharp beam is: upper insulating layer two interconnected, substrate beam two and lower insulating layer two from top to bottom, pressure
Electric excitation electrode two, piezoelectricity induction electrode are connected to the both ends of two upper surface of insulating layer, and sensitive layer is connected to insulation
The middle part of two upper surface of layer.
4. a kind of minimal feeding device based on parametric excitation and synchro-resonance according to claim 3, feature
Be: the structure of the piezoelectric excitation electrode two is: piezoelectric layer top electrode two interconnected, two and of piezoelectric membrane from top to bottom
Electrode two under piezoelectric layer.
5. a kind of minimal feeding device based on parametric excitation and synchro-resonance according to claim 3, feature
Be: the structure of the piezoelectricity induction electrode is: piezoelectric layer top electrode three interconnected, piezoelectric membrane three and pressure from top to bottom
Electrode three under electric layer.
6. a kind of minimal feeding device based on parametric excitation and synchro-resonance according to claim 1, feature
Be: the structure of the pick-up beam is；Piezoelectric excitation induction electrode interconnected, upper insulating layer three, substrate beam from top to bottom
Three and lower insulating layer three.
7. a kind of minimal feeding device based on parametric excitation and synchro-resonance according to claim 6, feature
Be: the structure of the piezoelectric excitation induction electrode is: piezoelectric layer top electrode four interconnected, piezoelectric membrane four from top to bottom
With electrode four under piezoelectric layer.
8. a kind of minimal feeding device based on parametric excitation and synchro-resonance according to claim 1, feature
Be: pick-up beam is high frequency beam, and swashing beam with ginseng with reference to beam is low frequency beam, and it is equal with reference beam resonant frequency to join sharp beam；Work as low frequency
Beam intrinsic frequency is f1, high frequency beam intrinsic frequency is f2, intrinsic frequency meets following formula:
a1f1=b1f2
Wherein, a1、b1It is positive integer, and a1>b1, a1/b1For the amplification factor of frequency.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821467951.XU CN208872648U (en) | 2018-09-07 | 2018-09-07 | A kind of minimal feeding device based on parametric excitation and synchro-resonance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821467951.XU CN208872648U (en) | 2018-09-07 | 2018-09-07 | A kind of minimal feeding device based on parametric excitation and synchro-resonance |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208872648U true CN208872648U (en) | 2019-05-17 |
Family
ID=66467125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821467951.XU Withdrawn - After Issue CN208872648U (en) | 2018-09-07 | 2018-09-07 | A kind of minimal feeding device based on parametric excitation and synchro-resonance |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208872648U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108872063A (en) * | 2018-09-07 | 2018-11-23 | 吉林大学 | A kind of minimal feeding device and method based on parametric excitation and synchro-resonance |
| CN112325998A (en) * | 2020-11-05 | 2021-02-05 | 吉林大学 | Trace substance sensor and method based on internal resonance |
| CN112697239A (en) * | 2020-12-21 | 2021-04-23 | 吉林大学 | Micro substance and driving force synchronous sensor and method based on internal resonance |
| CN113433213A (en) * | 2021-07-05 | 2021-09-24 | 吉林大学 | Multi-trace high-sensitivity synchronous sensing device and method based on multi-modal internal resonance |
-
2018
- 2018-09-07 CN CN201821467951.XU patent/CN208872648U/en not_active Withdrawn - After Issue
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108872063A (en) * | 2018-09-07 | 2018-11-23 | 吉林大学 | A kind of minimal feeding device and method based on parametric excitation and synchro-resonance |
| CN108872063B (en) * | 2018-09-07 | 2023-11-07 | 吉林大学 | Trace substance detection device and method based on parameter excitation and synchronous resonance |
| CN112325998A (en) * | 2020-11-05 | 2021-02-05 | 吉林大学 | Trace substance sensor and method based on internal resonance |
| CN112697239A (en) * | 2020-12-21 | 2021-04-23 | 吉林大学 | Micro substance and driving force synchronous sensor and method based on internal resonance |
| CN113433213A (en) * | 2021-07-05 | 2021-09-24 | 吉林大学 | Multi-trace high-sensitivity synchronous sensing device and method based on multi-modal internal resonance |
| CN113433213B (en) * | 2021-07-05 | 2022-07-19 | 吉林大学 | Multi-trace high-sensitivity synchronous sensing device and method based on multi-modal internal resonance |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208872648U (en) | A kind of minimal feeding device based on parametric excitation and synchro-resonance | |
| CN108872063A (en) | A kind of minimal feeding device and method based on parametric excitation and synchro-resonance | |
| Zou et al. | The multi-mode resonance in AlN Lamb wave resonators | |
| CN106556803B (en) | A kind of mode of resonance Magnetic Sensor | |
| CN100570347C (en) | A kind of sensor for self-testing self-oscillation of resonant-type tiny cantilever beam | |
| CN102305827B (en) | Love wave sensor testing system based on frequency sweeping technology, and a testing method thereof | |
| Dal Bo et al. | Energy harvesting with electromagnetic and piezoelectric seismic transducers: Unified theory and experimental validation | |
| Wang et al. | A packaged piezoelectric vibration energy harvester with high power and broadband characteristics | |
| Fan et al. | Optimization of sensitivity induced by surface conductivity and sorbed mass in surface acoustic wave gas sensors | |
| CN109891748A (en) | The surface acoustic wave RFID sensor sensed for material and structure | |
| CN106842079A (en) | Magnetic field sensor noise copped wave based on electric field regulation and control magnetic suppresses measuring method | |
| CN107015048B (en) | A kind of surface acoustic wave current sensor based on magnetostrictive effect | |
| Chen et al. | Self-powered semi-passive piezoelectric structural damping based on zero-velocity crossing detection | |
| Kim et al. | Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection | |
| Hara et al. | Experimental study of highly sensitive sensor using a surface acoustic wave resonator for wireless strain detection | |
| TW201237374A (en) | Vibration detecting device | |
| EP3533051B1 (en) | Magnetic field sensor using acoustically driven ferromagnetic resonance | |
| CN107449491B (en) | A kind of disturbance location of weak coupling resonant transducer determines method | |
| Takasaki et al. | Resonance frequency tracing system for Langevin type ultrasonic transducers | |
| Saha et al. | A novel langasite crystal microbalance instrumentation for UV sensing application | |
| CN105841683B (en) | A kind of piezolectric gyroscope equivalent circuit considering energy loss | |
| CN207197535U (en) | Nanometer grating micromechanical gyro | |
| CN205647458U (en) | High sensitivity's bi -polar is to resonant mode surface acoustic wave detector | |
| JP2008058211A (en) | Density sensor | |
| CN108933579A (en) | A kind of surface acoustic wave one-port resonator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20190517 Effective date of abandoning: 20231107 |
|
| AV01 | Patent right actively abandoned |
Granted publication date: 20190517 Effective date of abandoning: 20231107 |