CN107576610B - Multi-physical-quantity detection device and detection method based on surface friction - Google Patents
Multi-physical-quantity detection device and detection method based on surface friction Download PDFInfo
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Abstract
The invention relates to a multi-physical-quantity detection device and a detection method based on surface friction, belonging to the multi-physical-quantity detection device and the detection method. Comprises Gao Pinliang, a synchronous coupling beam, a low-frequency beam, a friction block, a supporting and positioning structure, a piezoelectric excitation structure, a transverse piezoelectric large-displacement driving structure, a longitudinal piezoelectric large-displacement driving structure, an L-shaped supporting structure and the like. The vibration pickup structure of the low frequency beam picks up the frictional vibration signal to detect surface roughness and hardness. The low-frequency beam, gao Pinliang and the synchronous coupling beam form a synchronous resonance structure together and are used for detecting dynamic friction coefficients and multiplying output frequencies to improve sensitivity. The invention realizes the detection of dynamic friction coefficient, surface roughness and hardness by using a simpler structure, and has wide application prospect in the fields of surface detection and material identification.
Description
Technical Field
The invention relates to a multi-physical-quantity detection device and a detection method capable of realizing compound sensing of dynamic friction coefficient, surface roughness and hardness.
Background
At present, with the rapid development of intelligent precision machining technology, the surface quality and precision of machined parts are increasingly high. When the parts are inspected and screened, it is important to judge whether the surface mechanical property parameters of the processed parts can meet the use requirements. In the aspect of detecting single surface physical quantity, the existing theory and technology at home and abroad can basically meet the use requirement. The design of a sensor capable of realizing surface multi-physical quantity detection is a key problem of domestic and foreign scientists.
Related research institutions currently explore and design the mechanism and structure of sensors to obtain multiple physical quantities of the object surface. The swedish university utilizes the principle of friction vibration to realize the detection of surface texture and hardness by a self-organizing mapping unsupervised method according to the frequency attribute of vibration signals generated by friction. The university of California, through disposing acceleration sensor on robot hand, record the signal that the knocking produced and discern hardness, elasticity, the rigidity of unknown surface to this classification object, classification correct rate reaches 85%. Methods reflecting fiber types are explored by standard technical service company (Shanghai) and the like using contact friction vibration signals. Jessica DacleuNdengue et al realize that different materials with similar wood grain are distinguished by frictional vibration parameters. Zhu Nan-Nan et al use 650nm,1310nm and 1550nm wavelength lasers to achieve higher accuracy detection of surface roughness and surface scattering features using multi-wavelength fiber sensors. Sriram Sundar et al uses the frictional vibrations generated by a rolling contact to achieve an estimation of the coefficient of friction of the mechanical system. Finally, an Atomic Force Microscope (AFM) is used as a comprehensive measuring tool, and can detect various physical quantities such as surface roughness, elastic modulus and the like. However, AFM has a slow detection speed, is greatly affected by a probe, and can only detect a surface with nano-scale roughness, and cannot be used as a conventional detection means.
Disclosure of Invention
The invention provides a device and a method for detecting multiple physical quantities based on surface friction, which are used for detecting the multiple physical quantities of dynamic friction coefficient, surface roughness and hardness, and the dynamic friction coefficient and the surface roughness can be mutually verified, so that the detection accuracy is improved.
The technical scheme adopted by the invention is as follows: gao Pinliang the root parts of the synchronous coupling beam and the low-frequency beam are connected with the supporting and positioning structure, the inner side of the low-frequency beam is connected with the synchronous coupling beam, the inner side of the high-frequency beam is also connected with the synchronous coupling beam, the low-frequency beam adopts a cantilever beam or double-end clamped beam structure, the piezoelectric vibration pickup structure comprises a high-frequency beam piezoelectric vibration pickup structure and a low-frequency beam piezoelectric vibration pickup structure, and the Gao Pinliang piezoelectric vibration pickup structure and the low-frequency beam piezoelectric vibration pickup structure are respectively fixedly connected with the upper parts of the Gao Pinliang and the low-frequency beam; when the low-frequency beam adopts a cantilever beam, the friction block is fixed at the free end of the low-frequency beam and forms a friction pair with the surface to be tested, and when the low-frequency beam adopts a double-end clamped beam, the friction block is fixed at the middle part of the low-frequency beam and forms a friction pair with the surface to be tested; the piezoelectric excitation structure is fixed on the outer side of the closed end of the supporting and positioning structure, one end of the longitudinal piezoelectric large-displacement driving structure is fixed on the outer side of the piezoelectric excitation structure, the other end of the longitudinal piezoelectric large-displacement driving structure is connected with the L-shaped supporting structure, one end of the transverse piezoelectric large-displacement driving structure is fixed on the right side of the longitudinal piezoelectric large-displacement driving structure through the L-shaped supporting structure, the other end of the transverse piezoelectric large-displacement driving structure is fixedly connected with the base, the lower surfaces of the free ends of the high-frequency beam and the low-frequency beam are respectively provided with an electrode I and an electrode III, and the electrode I and the electrode IV respectively form a capacitance vibration picking structure I and a capacitance vibration picking structure II with the surface electrode II of the supporting and positioning structure.
The Gao Pinliang and the synchronous coupling beams and the low-frequency beams form a synchronous resonance structure together, and according to the synchronous resonance principle, when the natural frequency of the low-frequency beams is omega 1 Natural frequency of high-frequency beam is omega 2 The natural frequency thereof satisfies the following formula:
mω 1 ＝nω 2
wherein m and n are integers, m/n is the amplification factor of frequency, and the low-frequency beams and Gao Pinliang are rectangular beams.
The friction block is an annular friction block rotating around a central shaft.
The friction blocks have different surface roughness along the annular circumferential surface to match the roughness level of the surface being measured.
The Gao Pinliang piezoelectric vibration pickup structure is the same as the low-frequency beam piezoelectric vibration pickup structure.
The Gao Pinliang piezoelectric vibration pickup structure comprises the following structures: the upper and lower parts of the piezoelectric layer are respectively connected with the upper electrode and the lower electrode of the piezoelectric layer.
The piezoelectric excitation structure comprises the following structures: the upper and lower parts of the piezoelectric layer are respectively connected with the upper electrode and the lower electrode of the piezoelectric layer.
A method for detecting multiple physical quantities based on surface friction comprises the following steps:
the method for detecting the dynamic friction coefficient comprises the following steps:
(1) Connecting the fixed end of the device with a driving device, enabling the whole device to move above the surface to be measured and enabling the boss positioning structure of the whole device to be in contact with the surface to be measured, and enabling the friction block to compress the surface to be measured under a certain pressure because the bottom of the boss positioning structure is lower than the bottom of the friction block;
(2) The piezoelectric excitation structure is excited by sweep frequency, the excitation frequency approaches to the first-order natural frequency of the low-frequency beam, the amplitude multiplication is generated by the low-frequency beam and the Gao Pinliang beam, synchronous resonance is generated, at the moment, the resonance frequency of the low-frequency beam is shifted under the action of friction force according to the synchronous resonance principle, and the resonance frequency offset of the high-frequency beam is doubled;
△ω 2 ＝ω' 2 -ω 2 ＝2(ω' 1 -ω 1 )
wherein omega 1 And omega 1 ' is the resonant frequency, omega of the low-frequency beam before and after friction force 2 And omega' 2 Respectively the resonant frequencies of the high-frequency beam before and after the friction force is appliedRate, Δω 2 An offset of Gao Pinliang resonant frequency;
(3) The magnitude of the friction force can be obtained according to the resonance frequency offset of the low-frequency beam, so that the dynamic friction coefficient can be determined by the frequency offset of the low-frequency beam, and the formula is as follows:
f d ＝μF N
wherein L is the length of the low frequency beam, phi 1 (x F ) And xi 1 The low frequency beams are respectively at x F First order natural mode and damping ratio at phi 1 (x F )>1，x F Is a positive pressure F N Distance from fixed end, M 1 And A 1 Generalized mass and modal amplitude, f, of the low frequency beam, respectively d And μ is the friction and dynamic coefficient of friction, respectively;
(4) Due to the synchronous resonance, the shift of the resonance frequency of the high frequency beam is doubled relative to the low frequency beam, so that a mathematical relationship between the dynamic friction coefficient and the shift of the resonance frequency of Gao Pinliang can be established:
(5) Picking up alternating electric signals overlapped by the piezoelectric vibration pickup structure and the capacitance vibration pickup structure of Gao Pinliang at the moment to determine the resonant frequency omega of the high-frequency beam under the action of friction force 2 ' realizing the detection of dynamic friction coefficient;
the detection method of the surface roughness and the hardness is carried out according to the following steps:
(1) Connecting the fixed end of the device with a driving device, enabling the whole device to move above the surface to be measured and enabling the boss positioning structure of the whole device to be in contact with the surface to be measured, and enabling the friction block to compress the surface to be measured under a certain pressure because the bottom of the boss positioning structure is lower than the bottom of the friction block;
(2) The longitudinal piezoelectric large-displacement driving structure is driven to do uniform linear motion, the annular friction block and the surface to be measured generate relative motion, and a friction vibration phenomenon occurs; picking up alternating electric signals overlapped by the piezoelectric vibration pickup structure and the capacitance vibration pickup structure on the low-frequency beam;
(3) According to the frequency and amplitude of the electric signal, roughly estimating the surface roughness grade of the measured surface;
(4) The transverse piezoelectric large-displacement driving structure is driven to do uniform linear motion, so that the annular friction block is driven to rotate, the surface of the annular friction block forming the friction pair has the same or similar surface roughness grade with the surface to be measured, and roughness grade matching is realized;
(5) Driving a longitudinal piezoelectric large-displacement driving structure, and picking up alternating electric signals overlapped by a piezoelectric vibration pickup structure and a capacitance vibration pickup structure on a low-frequency beam;
(6) Respectively realizing detection of the amplitude and the period of the surface roughness based on the amplitude and the frequency of the alternating electric signal;
(7) Hardness detection can be achieved by a self-organizing mapping non-supervision method based on the frequency attribute of the alternating electric signal.
The invention has the beneficial effects that: the synchronous resonance physical principle is applied to the resonance cantilever beam sensing structure to detect the dynamic friction coefficient, so that the frequency multiplication can be realized, and the sensitivity of the detection device is improved; the friction vibration principle is applied to surface roughness and hardness detection, and the surface roughness information and the hardness information are converted into friction vibration signals, so that the structure of the detection device can be greatly simplified, and the sensing efficiency of the detection device can be improved; the friction block is designed as an annular friction block rotatable about a central axis. The friction block has different surface roughness along the annular circumferential surface, so that the surface roughness grade of the friction block is matched with that of the surface to be measured, and the surface roughness range of the device can be greatly enlarged; when the device detects friction coefficient, the low-frequency beam is used for friction coefficient sensing, and the high-frequency beam is used for detection, so that sensing and detection separation are realized, and noise influence is reduced.
The application detection range of the invention depends on the size of the self dimension, has strong applicability, can realize the detection of the dynamic friction coefficient, the surface roughness and the hardness of the ultra-precise surface, and can also realize the detection of the dynamic friction coefficient, the surface roughness and the hardness of the rough surface. The boss positioning structure is adopted to be in contact with and positioned on the surface to be measured, so that the contact area between the positioning part of the device and the surface to be measured can be reduced, and the error caused by additional friction is reduced. The surface roughness and the dynamic friction coefficient have a positive correlation (in the case of dry friction) or a negative correlation (in the case of wet friction), and mutual verification of the two can improve the detection accuracy.
The invention applies the friction vibration principle and the synchronous resonance principle to the design of the multi-physical-quantity detection device, and realizes the high-precision detection of the dynamic friction coefficient, the surface roughness and the hardness by using a simpler structure.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
FIG. 2 is a front view of the present invention;
FIG. 3 is a top view of FIG. 2;
FIG. 4 is a schematic diagram of the structure of the synchronous resonant structure and friction block of the present invention;
FIG. 5 is a surface roughness profile of a friction block;
FIG. 6 is a schematic view of the structure of the support positioning structure of the present invention;
FIG. 7 is a schematic view of the structure of the L-shaped support structure of the present invention;
fig. 8 is a schematic structural view of a piezoelectric vibration pickup structure according to the present invention Gao Pinliang;
FIG. 9 is a schematic diagram of a piezoelectric excitation structure according to the present invention;
FIG. 10 is a diagram showing the operation state of the boss positioning structure of the present invention, in which: a surface 14 to be measured;
FIG. 11 is a flow chart of a method for detecting dynamic friction coefficient according to the present invention;
FIG. 12 is a flow chart of a method for detecting surface roughness and hardness in accordance with the present invention;
FIG. 13 is an overall schematic of an embodiment of the low frequency beam as a double clamped beam;
fig. 14 is an elevation view of the low frequency beam as a double clamped beam.
Detailed Description
Gao Pinliang 2, the root parts of the synchronous coupling beam 3 and the low-frequency beam 4 are connected with the supporting and positioning structure 1, the inner side of the low-frequency beam 4 is connected with the synchronous coupling beam 3, the inner side of the high-frequency beam 2 is also connected with the synchronous coupling beam 3, the low-frequency beam 4 adopts a cantilever beam or double-end clamped beam structure, the piezoelectric vibration pickup structure 6 comprises a high-frequency beam piezoelectric vibration pickup structure 601 and a low-frequency beam piezoelectric vibration pickup structure 602, and the Gao Pinliang piezoelectric vibration pickup structure 601 and the low-frequency beam piezoelectric vibration pickup structure 602 are respectively fixedly connected with the upper parts of the Gao Pinliang and the low-frequency beam 4; when the low-frequency beam 4 adopts a cantilever beam, the friction block 5 is fixed at the free end of the low-frequency beam 4 and forms a friction pair with the surface 14 to be measured, and when the low-frequency beam 4 adopts a double-end clamped beam, the friction block 5 is fixed at the middle part of the low-frequency beam 4 and forms a friction pair with the surface 14 to be measured; the piezoelectric excitation structure 7 is fixed on the outer side of the closed end of the supporting and positioning structure 1, one end of the longitudinal piezoelectric large-displacement driving structure 8 is fixed on the outer side of the piezoelectric excitation structure 7, the other end of the longitudinal piezoelectric large-displacement driving structure 8 is connected with the L-shaped supporting structure 9, one end of the transverse piezoelectric large-displacement driving structure 10 is fixed on the right side of the longitudinal piezoelectric large-displacement driving structure 8 through the L-shaped supporting structure 9, the other end of the transverse piezoelectric large-displacement driving structure is fixedly connected with the base 13, the base 13 is used for connecting other devices and determining the space positions of the devices, and an electrode I1101 and an electrode III 1201 are respectively deposited on the lower surfaces of the Gao Pinliang and the free end of the low-frequency beam 4, and form a capacitor vibration pickup structure I11 and a capacitor vibration pickup structure II 12 with a surface electrode II 1102 and an electrode IV 1202 of the supporting and positioning structure 1 respectively.
mω 1 ＝nω 2
wherein m and n are integers, m/n is the amplification factor of frequency, and the low-frequency beams and Gao Pinliang are rectangular beams.
The beam structure has a certain natural frequency before the friction coefficient is detected, and the natural frequency can be determined through experiments or calculation. In the embodiment, it is assumed that the first-order natural frequency of the low-frequency beam 4 is ω 1 The first-order natural frequency of the high-frequency beam 2 is omega 2 The natural frequency ratio of the low frequency beam 4 to Gao Pinliang 2 is 1:2, i.e. [ omega ] 2 ＝2ω 1 。
The friction block 5 is an annular friction block rotating around a central shaft 501.
The pads have different surface roughness along the annular circumferential surface to match the roughness level of the surface 14 being measured.
The Gao Pinliang piezoelectric vibration pickup structure 601 has the same structure as the low-frequency beam piezoelectric vibration pickup structure 602.
The structure of the Gao Pinliang piezoelectric vibration pickup structure 601 is as follows: the upper and lower portions of the piezoelectric layer 6011 are connected to the piezoelectric layer upper electrode 6012 and the piezoelectric layer lower electrode 6013, respectively.
The piezoelectric excitation structure 7 has the following structure: the upper and lower portions of the piezoelectric layer 702 are connected to the piezoelectric layer upper electrode 701 and the piezoelectric layer lower electrode 703, respectively.
The upper surfaces of the low-frequency beam 4 and the high-frequency beam 2 are designed with upper insulating layers through oxidization or other processes; similarly, the lower surface is designed with a lower insulating layer by oxidation or other processes.
Furthermore, the Gao Pinliang and low-frequency beams can also adopt various beam structures besides rectangular beam structures, such as symmetrical beam structures of U-shaped beams, T-shaped beams, triangular beams and the like.
A method for detecting multiple physical quantities based on surface friction comprises the following steps:
the method for detecting the dynamic friction coefficient comprises the following steps:
(1) Connecting the fixed end 13 of the device with a driving device, enabling the whole device to move above the surface 14 to be tested and enabling the boss positioning structure 102 to be in contact with the surface 14 to be tested, and pressing the surface 14 to be tested by the friction block 5 under a certain pressure because the bottom of the boss positioning structure 102 is lower than the bottom of the friction block 5;
(2) The sweep frequency excites the piezoelectric excitation structure 7, under a certain excitation frequency, the first order natural frequency of the low-frequency beam 4 is approached, the low-frequency beam 4 and the high-frequency beam 2 generate amplitude multiplication, synchronous resonance occurs, at this time, according to the synchronous resonance principle, the resonance frequency of the low-frequency beam shifts under the action of friction force, and the resonance frequency shift of the high-frequency beam is doubled;
△ω 2 ＝ω' 2 -ω 2 ＝2(ω' 1 -ω 1 )
wherein omega 1 And omega 1 ' is the resonant frequency, omega of the low-frequency beam before and after friction force 2 And omega' 2 Respectively the resonant frequencies of the high-frequency beam 2 before and after the friction force is applied, delta omega 2 An offset of Gao Pinliang 2 resonant frequency;
(3) The magnitude of the friction force can be obtained according to the resonance frequency offset of the low-frequency beam, so that the dynamic friction coefficient can be determined by the frequency offset of the low-frequency beam, and the formula is as follows:
f d ＝μF N
wherein L is the length of the low frequency beam, phi 1 (x F ) And xi 1 The low frequency beams are respectively at x F First order natural mode and damping ratio at phi 1 (x F )>1，x F Is a positive pressure F N Distance from fixed end, M 1 And A 1 Generalized mass and modal amplitude, f, of the low frequency beam, respectively d And μ is the friction and dynamic coefficient of friction, respectively;
(4) Due to the synchronous resonance, the shift of the resonance frequency of the high frequency beam 2 is doubled with respect to the low frequency beam 4, so that a mathematical relationship between the dynamic friction coefficient and the shift of the resonance frequency of Gao Pinliang can be established:
(5) The alternating electric signals overlapped by the piezoelectric vibration pickup structure 601 and the capacitance vibration pickup structure 11 of Gao Pinliang at the moment are picked up to determine the resonant frequency omega of the high-frequency beam 2 under the action of friction force 2 ' realizing the detection of dynamic friction coefficient.
The detection method of the surface roughness and the hardness is carried out according to the following steps:
(1) Connecting the fixed end 13 of the device with a certain driving device, so that the whole device moves above the surface 14 to be tested and the boss positioning structure 102 contacts with the surface 14 to be tested, and the friction block 5 presses the surface 14 to be tested with a certain pressure because the bottom of the boss positioning structure 102 is lower than the bottom of the friction block 5;
(2) The longitudinal piezoelectric large-displacement driving structure 8 is driven to do uniform linear motion, the annular friction block 5 and the surface 14 to be tested generate relative motion, and the phenomenon of friction vibration occurs; picking up alternating electric signals overlapped by the piezoelectric vibration pickup structure 602 and the capacitance vibration pickup structure 12 on the low-frequency beam 4;
(3) Roughly estimating the surface roughness level of the measured surface 14 according to the frequency and amplitude of the electric signal;
(4) The transverse piezoelectric large-displacement driving structure 10 is driven to do uniform linear motion, so that the annular friction block is driven to rotate. The surface of the annular friction block 5 forming the friction pair and the surface 14 to be tested have the same or similar surface roughness grade, so that roughness grade matching is realized;
(5) Driving a longitudinal piezoelectric large-displacement driving structure 8, and picking up alternating electric signals of a piezoelectric vibration pickup structure 602 and a capacitance vibration pickup structure 12 on the low-frequency beam 4;
(6) Respectively realizing detection of the amplitude and the period of the surface roughness based on the amplitude and the frequency of the alternating electric signal;
(7) Hardness detection can be achieved by a self-organizing mapping non-supervision method based on the frequency attribute of the alternating electric signal. The amount of charge that the piezoelectric vibration pickup structure 6 can generate can be expressed by the following formula:
wherein d 31 For transverse piezoelectric constant, E p Young's modulus, Z of piezoelectric layer P For the distance from the piezoelectric layer to the neutral axis, L is the length of the piezoelectric structure, L is the length w of the beam E For the width of the monolithic piezoelectric structure, I i For the i-th layer material to have a neutral axis moment of inertia, A i Is the firsti layer material cross section area, Q piezoelectricity vibration pickup structure output electric charge;
the output voltage of the piezoelectric vibration pickup structure 6 can be expressed by the following formula:
wherein V is total In order to output the total voltage, Q is the charge quantity of the piezoelectric vibration pickup structure, and C is the capacitance of the piezoelectric vibration pickup structure 6;
in addition, the capacitance of the capacitive vibration pickup structure in this embodiment can be expressed by the following formula:
where ε is a constant, S is the facing area of the capacitive plates, d is the distance of the capacitive plates, and k is the electrostatic force constant.
Claims (8)
1. A multi-physical quantity detection device based on surface friction is characterized in that: gao Pinliang the root parts of the synchronous coupling beam and the low-frequency beam are connected with the supporting and positioning structure, the inner side of the low-frequency beam is connected with the synchronous coupling beam, the inner side of the high-frequency beam is also connected with the synchronous coupling beam, the low-frequency beam adopts a cantilever beam or double-end clamped beam structure, the piezoelectric vibration pickup structure comprises a high-frequency beam piezoelectric vibration pickup structure and a low-frequency beam piezoelectric vibration pickup structure, and the Gao Pinliang piezoelectric vibration pickup structure and the low-frequency beam piezoelectric vibration pickup structure are respectively and fixedly connected with the upper parts of the Gao Pinliang and the low-frequency beam; when the low-frequency beam adopts a cantilever beam, the friction block is fixed at the free end of the low-frequency beam and forms a friction pair with the surface to be tested, and when the low-frequency beam adopts a double-end clamped beam, the friction block is fixed at the middle part of the low-frequency beam and forms a friction pair with the surface to be tested; the piezoelectric excitation structure is fixed on the outer side of the closed end of the supporting and positioning structure, one end of the longitudinal piezoelectric large-displacement driving structure is fixed on the outer side of the piezoelectric excitation structure, the other end of the longitudinal piezoelectric large-displacement driving structure is connected with the L-shaped supporting structure, one end of the transverse piezoelectric large-displacement driving structure is fixed on the right side of the longitudinal piezoelectric large-displacement driving structure through the L-shaped supporting structure, the other end of the transverse piezoelectric large-displacement driving structure is fixedly connected with the base, the lower surfaces of the free ends of the high-frequency beam and the low-frequency beam are respectively provided with an electrode I and an electrode III, and the electrode I and the electrode IV respectively form a capacitance vibration picking structure I and a capacitance vibration picking structure II with the surface electrode II of the supporting and positioning structure.
2. The surface friction-based multi-physical quantity detecting apparatus according to claim 1, wherein: the Gao Pinliang and the synchronous coupling beams and the low-frequency beams form a synchronous resonance structure together, and according to the synchronous resonance principle, when the natural frequency of the low-frequency beams is omega 1 Natural frequency of high-frequency beam is omega 2 The natural frequency thereof satisfies the following formula:
mω 1 ＝nω 2
wherein m and n are integers, m/n is the amplification factor of frequency, and the low-frequency beams and Gao Pinliang are rectangular beams.
3. The surface friction-based multi-physical quantity detecting apparatus according to claim 1, wherein: the friction block is an annular friction block rotating around a central shaft.
4. A surface friction-based multiphysics detection apparatus as set forth in claim 3, wherein: the friction blocks have different surface roughness along the annular circumferential surface to match the roughness level of the surface being measured.
5. The surface friction-based multi-physical quantity detecting apparatus according to claim 1, wherein: the Gao Pinliang piezoelectric vibration pickup structure is the same as the low-frequency beam piezoelectric vibration pickup structure.
6. The surface friction-based multi-physical quantity detecting apparatus according to claim 5, wherein: the Gao Pinliang piezoelectric vibration pickup structure comprises the following structures: the upper and lower parts of the piezoelectric layer are respectively connected with the upper electrode and the lower electrode of the piezoelectric layer.
7. The surface friction-based multi-physical quantity detecting apparatus according to claim 1, wherein: the piezoelectric excitation structure comprises the following structures: the upper and lower parts of the piezoelectric layer are respectively connected with the upper electrode and the lower electrode of the piezoelectric layer.
8. A detection method using a multi-physical-quantity detection device based on surface friction as defined in claim 1, characterized in that: the method comprises a detection method of dynamic friction coefficient and a detection method of surface roughness and hardness, wherein:
the method for detecting the dynamic friction coefficient comprises the following steps:
(1) Connecting the fixed end of the device with a driving device, enabling the whole device to move above the surface to be measured and enabling the boss positioning structure of the whole device to be in contact with the surface to be measured, and enabling the friction block to compress the surface to be measured under a certain pressure because the bottom of the boss positioning structure is lower than the bottom of the friction block;
(2) The piezoelectric excitation structure is excited by sweep frequency, the excitation frequency approaches to the first-order natural frequency of the low-frequency beam, the amplitude multiplication is generated by the low-frequency beam and the Gao Pinliang beam, synchronous resonance is generated, at the moment, the resonance frequency of the low-frequency beam is shifted under the action of friction force according to the synchronous resonance principle, and the resonance frequency offset of the high-frequency beam is doubled;
△ω 2 ＝ω' 2 -ω 2 ＝2(ω' 1 -ω 1 )
wherein omega 1 And omega 1 ' is the resonant frequency, omega of the low-frequency beam before and after friction force 2 And omega' 2 Respectively the resonant frequencies of the high-frequency beam before and after the friction force is applied, delta omega 2 An offset of Gao Pinliang resonant frequency;
(3) The magnitude of the friction force can be obtained according to the resonance frequency offset of the low-frequency beam, so that the dynamic friction coefficient can be determined by the frequency offset of the low-frequency beam, and the formula is as follows:
f d ＝μF N
wherein L is the length of the low frequency beam, phi 1 (x F ) And xi 1 The low frequency beams are respectively at x F First order natural mode and damping ratio at phi 1 (x F )>1，x F Is a positive pressure F N Distance from fixed end, M 1 And A 1 Generalized mass and modal amplitude, f, of the low frequency beam, respectively d And μ is the friction and dynamic coefficient of friction, respectively;
(4) Due to the synchronous resonance, the shift of the resonance frequency of the high frequency beam is doubled relative to the low frequency beam, so that a mathematical relationship between the dynamic friction coefficient and the shift of the resonance frequency of Gao Pinliang can be established:
(5) Picking up alternating electric signals overlapped by the piezoelectric vibration pickup structure and the capacitance vibration pickup structure of Gao Pinliang at the moment to determine the resonant frequency omega of the high-frequency beam under the action of friction force 2 ' realizing the detection of dynamic friction coefficient;
the detection method of the surface roughness and the hardness is carried out according to the following steps:
(1) Connecting the fixed end of the device with a driving device, enabling the whole device to move above the surface to be measured and enabling the boss positioning structure of the whole device to be in contact with the surface to be measured, and enabling the friction block to compress the surface to be measured under a certain pressure because the bottom of the boss positioning structure is lower than the bottom of the friction block;
(2) The longitudinal piezoelectric large-displacement driving structure is driven to do uniform linear motion, the annular friction block and the surface to be measured generate relative motion, and a friction vibration phenomenon occurs; picking up alternating electric signals overlapped by the piezoelectric vibration pickup structure and the capacitance vibration pickup structure on the low-frequency beam;
(3) According to the frequency and amplitude of the electric signal, roughly estimating the surface roughness grade of the measured surface;
(4) The transverse piezoelectric large-displacement driving structure is driven to do uniform linear motion, so that the annular friction block is driven to rotate, the surface of the annular friction block forming the friction pair has the same or similar surface roughness grade with the surface to be measured, and roughness grade matching is realized;
(5) Driving a longitudinal piezoelectric large-displacement driving structure, and picking up alternating electric signals overlapped by a piezoelectric vibration pickup structure and a capacitance vibration pickup structure on a low-frequency beam;
(6) Respectively realizing detection of the amplitude and the period of the surface roughness based on the amplitude and the frequency of the alternating electric signal;
(7) Hardness detection can be achieved by a self-organizing mapping non-supervision method based on the frequency attribute of the alternating electric signal.
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| CN109457827B (en) * | 2018-10-30 | 2020-10-20 | 郑州轻工业学院 | Friction-induced deformation mode damping method and device |
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