CN104729938B - A kind of portable hardness determination structure and its detection method based on dynamo-electric impedance method - Google Patents
A kind of portable hardness determination structure and its detection method based on dynamo-electric impedance method Download PDFInfo
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- CN104729938B CN104729938B CN201510137062.1A CN201510137062A CN104729938B CN 104729938 B CN104729938 B CN 104729938B CN 201510137062 A CN201510137062 A CN 201510137062A CN 104729938 B CN104729938 B CN 104729938B
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Abstract
The invention discloses a kind of portable hardness determination structure and its detection method based on dynamo-electric impedance method.The hardness determination structure of the present invention includes:Hollow cylinder, support block, position-limiting tube, piezoelectric bimorph beam, needle point and penetrator;Pass through position-limiting tube so that the deformation of piezoelectric bimorph beam is given value, and then can obtain contact force known to a stabilization.The present invention is without using foil gauge and the strain measurement system of response, it is only necessary to a simple impedance analysis chip, therefore accelerates measurement efficiency and improve measurement stability;And the present invention solves existing method can not ensure to cause the unstable weakness of contact force because of interference in contact measurement;High efficient and reliable of the present invention, and it is simple to operate, by being minimized instrumentation, make portable hardness measurement system, it would be possible to which applied to the hardness test of outdoor or industry spot, therefore the present invention has certain market application foreground.
Description
Technical field
The invention belongs to material gauge check field, and in particular to a kind of portable hardness determination based on dynamo-electric impedance method
Structure and its detection method.
Background technology
The mechanical property of material refers to the mechanical behavior that material is presented when bearing various external force with deformation, these mechanics
Behavior can be described with the mechanical model set up by various mechanical parameters.Conventional material mechanical performance include hardness, modulus,
Poisson's ratio and yield strength etc..Wherein, hardness is the index that industrial quarters is widely used for weighing the soft or hard degree of material, and it represents solid
The local elastoplasticity invasion of body material resistance and the ability of destruction.
The hardness performance of Accurate Determining material is significant:First, the hardness performance progress accurate characterization of material is helped
In the mechanical behavior of accurately description material, help to carry out structure design;Produced in addition, the hardness parameter of material can be used for examining
The mechanical property of product, and rational processing technology is determined according to this;It is closely related in view of the health degree of hardness performance and structure,
Therefore the mechanical property of material can also be regard as an evaluation index, the health status and degree of injury of evaluation structure.
Propose to weigh the soft or hard journey of different materials based on the scarification of 10 kinds of mineral from Friedrich Mohs in 1822
After degree, a variety of different hardness measurement methods based on impression are also successively proposed, and are had been widely recognized and applied.
Three major types can be roughly divided into according to the applying mode of load based on the scleroscopic method of impression:Static load identation hardness is surveyed
Amount, the measurement of dynamic load identation hardness and scratch hardness measurement.
In static indentations hardness measurement, the power load applied is fixed value.Generally by the hard pressure head of special shape with
Certain pressure press-in detected materials surface, material occurs local elastic-plastic deformation, the remnants of rear material is recalled by measuring pressure head
Deformation geometry size, you can obtain corresponding hardness number.The measuring method is simple, and instrument is installed and test specimen is less demanding, because
This has also obtained widest application.Static indentations method survey hardness mode it is varied, load change scope can comprising 0.1N~
100kN, wherein the measuring method suitable for block materials has Brinell hardness HB and Rockwell hardness HR, it is adaptable to coating or film
The measuring method of sample has Webster HV, Bo Shi HT and superficial Rockwell (Superficial Rockwell).Between these hardness numbers
It typically can not mutually convert, also be difficult the relation set up between hardness number and strength of materials value.In the measurement of dynamic identation hardness,
It is dynamic change to put on the load of sample.A kind of typical metal dynamic stiffness measuring method is used to drop from eminence
Standard indenter impact test piece surface, and determine hardness number by measuring rebound height.Scratch hardness measurement is usually using hard
Matter pressure head is laterally delineated along surface of test piece, and records normal load and scratch width, it is possible thereby to measure material it is anti-zoned enter
Etc. performance, thin-film material adhesion can also be measured.
But, the problem of these existing hardness measurement methods have certain:First, needed existing hardness measurement method more
Optics or dimensional measurement system is used to go the residual deformation (Vickers hardness etc.) or rebound height of measurement material (dynamic hard
Degree), these measuring methods can not exclude material due to the error produced by " sinking " and " extrusion ", can not also eliminate load mould fillet
The error brought;Secondly, dimensional measurement system cost is expensive, and quality and volume are larger, therefore is not easy to commercial introduction and uses;
In addition, existing hardness measurement method is required to manually measure operation, the automation for being hardly formed hardness at present is caused to be surveyed
Examination so that current hardness test efficiency is difficult to improve.
The content of the invention
In order to solve above problems of the prior art, the present invention proposes a kind of based on the portable of dynamo-electric impedance method
Formula hardness determination structure and its measuring method, by the structure of particular design, this method is needed only to using impedance chip with regard to energy
Complete the measurement to hardness.
It is an object of the present invention to propose a kind of portable hardness determination structure based on dynamo-electric impedance method.
The portable hardness determination structure based on dynamo-electric impedance method of the present invention includes:Hollow cylinder, support block, position-limiting tube,
Piezoelectric bimorph beam, needle point and penetrator;Wherein, one end of hollow cylinder is to be set on solid support block, the side wall of the other end
Limited location pipe, the axis of position-limiting tube is vertical with the axis of hollow cylinder;One end of piezoelectric bimorph beam is fixed on hollow by support block
In cylinder, the other end is free end, and provided with needle point, the axis of needle point passes through position-limiting tube perpendicular to the surface of piezoelectric bimorph beam
Stretch out hollow cylinder;The top of needle point is provided with penetrator;Under free state, the lower edge of penetrator and position-limiting tube away from
From for d;When being detected to sample, the surface of sample engages the lower edge of position-limiting tube, so that sample is contacted with penetrator,
And the deformation for causing the free end of piezoelectric bimorph beam is d.
Piezoelectric bimorph beam is the three-layer composite structure of " piezoelectric chip-elasticity steel layer-piezoelectric chip ", and piezoelectric chip is set respectively
Put the upper and lower surface in elastic steel layer.Piezoelectric bimorph beam, needle point and penetrator constitute piezoelectric bimorph beam hardness and visited
Geodesic structure.
The portable hardness determination structure of the present invention, under free state, needle point stretches out position-limiting tube, penetrator with it is spacing
The distance of the lower edge of pipe is d;When being detected to sample, the surface of sample is located at the lower edge of position-limiting tube, thus sample with
Penetrator is contacted, and causes the deformation of the free end of piezoelectric bimorph beam to remain d, and then can guarantee that constant contact force
F, contact force F value can be by formula F=KcD is calculated, KcFor the rigidity of piezoelectric bimorph beam hardness detecting structure, by universal testing machine
Demarcation.The distance of the lower edge of penetrator and position-limiting tube is that d can be adjusted, therefore the structure can be by adjusting d size
To change contact force F size.The present invention passes through position-limiting tube so that the deformation of piezoelectric bimorph beam is given value, and then can be obtained
Contact force known to one stabilization.
It is another object of the present invention to propose a kind of portable hardometer based on dynamo-electric impedance method.
The portable hardometer based on dynamo-electric impedance method of the present invention includes:Portable hardness determination structure, impedance analysis
Chip, computing chip and result display;Wherein, portable hardness determination structure includes hollow cylinder, support block, position-limiting tube, pressure
Electrical twining beam, needle point and penetrator;One end of hollow cylinder is solid support block, and the side wall of the other end is provided with spacing
Pipe, the axis of position-limiting tube is vertical with the axis of hollow cylinder;One end of piezoelectric bimorph beam is fixed in hollow cylinder by support block, separately
One end is free end, and provided with needle point, the axis of needle point stretches out hollow perpendicular to the surface of piezoelectric bimorph beam, and by position-limiting tube
Cylinder;The top of needle point is provided with penetrator;Under free state, the distance of the lower edge of penetrator and position-limiting tube is d;It is right
When sample is detected, the surface of sample is located at the lower edge of position-limiting tube, so that sample is contacted with penetrator, and causes
The deformation of the free end of piezoelectric bimorph beam is d;Piezoelectric bimorph beam is connected to impedance analysis chip, and impedance analysis chip measurement is obtained
Impedance spectrum characteristic, is transmitted to computing chip;Computing chip obtains hardometer according to twin crystal beam electro-mechanical equivalent circuit theoretical calculation
Contact area between pressure head and sample, and further calculate the hardness number of sample;Transmit to result display and provide.
Penetrator can use Vickers hardness penetrator, Brinell hardnell penetrator or exert formula hardness penetrator, and according to corresponding
Vickers, Bu Shi or the calculation formula for exerting formula, obtain the Vickers hardness number of material, ball hardness number or exert formula hardness number.
A further object of the present invention is to propose a kind of detection method of the portable hardometer based on dynamo-electric impedance method.
The detection method of the portable hardometer based on dynamo-electric impedance method of the present invention, comprises the following steps:
1) stiffness K for obtaining piezoelectric bimorph beam hardness detecting structure is demarcated by universal testing machinec, and measurement obtains free shape
Under state the lower edge of penetrator and position-limiting tube apart from d so that by formula F=KcD is calculated and is obtained contact force F;
2) sample is detected, the surface of sample is engaged well with the lower edge of position-limiting tube, so that sample and hardometer
Pressure head contact, and cause piezoelectric bimorph beam free end deformation be d;
3) piezoelectric bimorph beam is connected to impedance analysis chip, and impedance analysis chip measurement obtains impedance spectrum characteristic;
4) computing chip is obtained firmly according to the impedance spectrum characteristic obtained according to twin crystal beam electro-mechanical equivalent circuit theoretical calculation
Contact area between degree meter pressure head and sample, further calculates the hardness number of sample by contact force F and contact area;
5) hardness number is transmitted to result display and provided by computing chip.
Advantages of the present invention
Compared with the existing material tests method based on piezoelectric beam, the present invention is made by this special structure design
The deformation for obtaining core parts is given value, and then can obtain contact force known to a stabilization, and this design is without using strain
Piece and the strain measurement system of response, it is only necessary to a simple impedance analysis chip, therefore accelerate measurement efficiency and raising
Measurement stability;And the present invention solves existing method can not ensure to cause contact force because of interference in contact measurement
Unstable weakness.
It is of the invention to be distinguished with existing vibration hardness in respect of obvious:1) existing vibration hardometer is to be based on mechanical impedance
Method, and the design of the present invention is to be based on dynamo-electric impedance method, both principles are different;2) the scleroscopic probe of existing vibration is straight
Bar, vibration is carried out in bar in the form of one-dimensional fluctuation, and the probe of the present invention is piezoelectric bimorph cantilever beam, is vibrated in beam
Carried out in the way of flexural deformation;3) existing vibration hardometer is to apply pressing-in force by mass or spring, and this hair
Bright design is directly to apply pressing-in force using deflection of beam.
The present invention proposes the portable ultraphonic material hardness detection structure of a particular design, and this method can be fast and reliable
Obtain the hardness number of material.Compared to existing material tests method, detection used in the present invention is simple in construction and can guarantee that
Stable known loading force, is not required to extra strain measurement system or power sensor-based system.High efficient and reliable of the present invention, and operation letter
It is single, by being minimized instrumentation, make portable hardness measurement system, it would be possible to applied to outdoor or industry
The hardness test at scene, therefore the present invention has certain market application foreground.
Brief description of the drawings
Fig. 1 is the profile of the portable hardness determination structure based on dynamo-electric impedance method of the present invention;
Fig. 2 is the axonometric drawing of the portable hardness determination structure based on dynamo-electric impedance method of the present invention;
Fig. 3 is the schematic diagram of the piezoelectric bimorph beam of the present invention;
The schematic diagram that Fig. 4 deforms for the piezoelectric bimorph beam of the present invention, wherein, (a) is the schematic diagram of free state, and (b) is
Contact sample causes the schematic diagram of deformation;
Fig. 5 is the structured flowchart of the portable hardometer based on dynamo-electric impedance method of the present invention;
The schematic diagram for the Vickers hardness penetrator that Fig. 6 uses for the portable hardometer based on dynamo-electric impedance method of the present invention;
Fig. 7 is the contact vibration model of the piezoelectric bimorph beam hardness detecting structure of the present invention;
Fig. 8 is the equivalent circuit diagram of the contact vibration model shown in Fig. 7.
Embodiment
Below in conjunction with the accompanying drawings, by specific embodiment, the present invention is expanded on further.
As shown in figure 1, the portable hardness determination structure based on dynamo-electric impedance method of the present embodiment includes:Hollow cylinder 11,
Piezoelectric bimorph beam 12, support block 13, position-limiting tube 14, needle point 15 and penetrator 16;Wherein, one end of hollow cylinder 11 is solid
Support block 13, the side wall of the other end is provided with position-limiting tube 14, and the axis of position-limiting tube 14 is vertical with the axis of hollow cylinder 11;Piezoelectricity
One end of twin crystal beam 12 is fixed in hollow cylinder 11 by support block 13, and the other end is free end, provided with needle point 15, needle point 15
Axis stretches out hollow cylinder 11 perpendicular to the surface of piezoelectric bimorph beam 12, and by position-limiting tube 14;The top of needle point is provided with hardness
Count pressure head 16.Fig. 2 is the axonometric drawing of the portable hardness determination structure based on dynamo-electric impedance method of the present invention.
As shown in figure 3, piezoelectric bimorph beam is the three-layer composite structure of " piezoelectric chip-elasticity steel layer-piezoelectric chip ", piezoelectricity
Chip 21 is separately positioned on the upper and lower surface of elastic steel layer 22.Piezoelectric bimorph beam 12, needle point 15 and the structure of penetrator 16
Into piezoelectric bimorph beam hardness detecting structure.
As shown in Fig. 4 (a), under free state, the distance of the lower edge of penetrator and position-limiting tube is d;Such as Fig. 4 (b)
Shown, when being detected to sample 0, the surface of sample 0 engages the lower edge of position-limiting tube, so that sample connects with penetrator
Touch, and cause piezoelectric bimorph beam free end deformation be d.
As shown in figure 5, the portable hardometer based on dynamo-electric impedance method of the present embodiment includes:Portable hardness determination knot
Structure 1, impedance analysis chip 2, computing chip 3 and result display 4;Wherein, the piezoelectric chip 21 of portable hardness determination structure 1
Impedance analysis chip 2 is connected to, the measurement of impedance analysis chip 2 obtains impedance spectrum characteristic, transmitted to computing chip 3;Calculate core
Piece 3 obtains the contact area between penetrator and sample according to twin crystal beam electro-mechanical equivalent circuit theoretical calculation, and further
Calculate the hardness number of sample;Transmit to result display 4 and provide.
In the present embodiment, penetrator 16 uses Vickers hardness penetrator, and Vickers hardness penetrator is in contact with sample, connects
Contacting surface product is relevant with impression catercorner length l, as shown in Figure 6.The depth of impression can be neglected much smaller than deformation d.
Hardness detection method proposed by the invention is come according to dynamo-electric impedance method using twin crystal beam electro-mechanical equivalent circuit theory
Calculate the electric resonance frequency f of piezoelectric bimorph beam hardness detecting structure0With the relation between sample hardness HV, next explain in detail
State the general principle and calculating process of the present invention.
For piezoelectric bimorph beam hardness detecting structure proposed by the present invention, as shown in figure 3, its contact with testing sample is shaken
When dynamic, it happens is that flexural vibrations, and its model of vibration can use connecing for piezoelectric bimorph beam hardness detector as shown in Figure 7
Tactile model of vibration is described, wherein, L is the length of piezoelectric bimorph beam, mtFor the quality sum of needle point and penetrator, hsFor
One half thickness of elastic steel layer, hpFor the thickness of piezoelectric chip.In Fig. 7, the hardometer pressure of piezoelectric bimorph beam hardness detecting structure
Head contact between sample is k using a rigiditytSpring simulate, ktAlso it is firm for contact of the penetrator with sample
Degree, the hardness information of sample can be obtained by contact stiffness.
The resonant frequency f of piezoelectric bimorph beam hardness detecting structure0With the elastic property k of sampletBetween relation can be by such as scheming
Equivalent circuit shown in 8 is obtained, and the impedance matrix of the equivalent circuit is:
Wherein, F1For clamped end shear boundary condition, F2For clamped end moment of flexure boundary condition, F3For free end shear border
Condition, F4For free end moment of flexure boundary condition, U1For clamped end velocity boundary conditions, U2For clamped end angular speed boundary condition, U3
For free end velocity boundary conditions, U4For free end angular speed boundary condition, V and I are respectively that Piezoelectric Impedance tester is carried in
Voltage and current on piezoelectric chip.Symm shows that matrix is that each impedance element in symmetrical matrix, matrix is represented by:
Z15=Z35=0 (2)
Wherein, ω is vibration angular frequency and has ω=2 π f, f to be vibration frequency, equivalent depth
d31WithPoint
Other material parameter, effective wavelengthρpAnd ρsIt is piezoelectric chip and bullet respectively
The density of property steel layer, c=cos λbL, s=sin λbL, m=cosh λbL, n=sinh λbL, the electric capacity of piezoelectric bimorph beamp33The dielectric constant of piezoelectric chip, N is conversion coefficient, and in Fig. 8 each impedance element implication
For:
Zc=Z11+Z12+Z13-Z14
Zd=Z12+Z14+Z22+Z24Ze=-Z14-Z24Zf=-Z12+Z14 (3)
Zg=Z12Zh=-Z12-Z14Zi=-Z13+Z14
Cm=-Cc/N2
Theoretical according to equivalent circuit, the admittance Y in Fig. 6 is represented by with vibrating the relation of angular frequency:
Wherein,
Concussion frequency as resonant frequencies of the admittance Y when taking maximum in circuit, i.e., (4) formula is in ω0=2 π f0When take most
Big value, f0 is resonant frequency, and now β meets 1+cm-sm β+cn β=0, therefore can obtain:
Wherein,Further, Vickers hardness needle point and sample can be obtained by being pressed into theoretical calculation
Between contact stiffness ktRelation between impression catercorner length l is:
kt=1.32lE* (6)
Wherein, E*Decrement Young's modulus for the needle point sample contact system and value is given value.Therefore can calculate pair
Diagonal length l expression formula:
Finally, by the definition of Vickers hardness, the hardness number HV expression formulas of material can be obtained:
F is contact force in formula, and contact force F value can be by formula F=KcD is calculated and obtained, KcDetected for piezoelectric bimorph beam hardness
The rigidity of structure, its numerical value can be demarcated by universal testing machine after detecting structure completes and obtained.Thus following the trail of
To the electric resonance frequency f of piezoelectric bimorph beam hardness detecting structure0Afterwards, therefore the cornerwise length of impression is calculated according to formula (7),
And the Vickers hardness number of material is calculated by formula (8).Vickers hardness penetrator can be changed into Brinell hardnell penetrator or Knoop hardness
Pressure head, and change corresponding calculation formula, you can obtain ball hardness number or Knoop number of material etc..
The detection method of the portable hardometer based on dynamo-electric impedance method of the present embodiment, comprises the following steps:
1) stiffness K for obtaining piezoelectric bimorph beam hardness detecting structure is demarcated by universal testing machinec, and measurement obtains free shape
Under state the lower edge of penetrator and position-limiting tube apart from d so that by formula F=KcD is calculated and is obtained contact force F;
2) sample is detected, the surface of sample is engaged well with the lower edge of position-limiting tube, so that sample is hard with Vickers
Spend pressure head contact, and cause piezoelectric bimorph beam free end deformation be d;
3) piezoelectric bimorph beam is connected to impedance analysis chip, and impedance analysis chip measurement obtains impedance spectrum characteristic;
4) computing chip is tieed up according to the impedance spectrum characteristic obtained according to twin crystal beam electro-mechanical equivalent circuit theoretical calculation
Family name counts the contact stiffness k between pressure head and sample firmlytWith the relation between impression diagonal l, so as to obtain catercorner length l,
Eventually through the definition of Vickers hardness, the Vickers hardness of sample is obtained
5) hardness number is transmitted to result display and provided by computing chip.
It is finally noted that, the purpose for publicizing and implementing example is that help further understands the present invention, but this area
Technical staff be appreciated that:Without departing from the spirit and scope of the invention and the appended claims, it is various to replace and repair
It is all possible for changing.Therefore, the present invention should not be limited to embodiment disclosure of that, and the scope of protection of present invention is to weigh
The scope that sharp claim is defined is defined.
Claims (6)
1. a kind of portable hardness determination structure based on dynamo-electric impedance method, it is characterised in that the hardness determination structure includes:
Hollow cylinder, support block, position-limiting tube, piezoelectric bimorph beam, needle point and penetrator;Wherein, one end of hollow cylinder is solid branch
Bracer, the side wall of the other end is provided with position-limiting tube, and the axis of position-limiting tube is vertical with the axis of hollow cylinder;One end of piezoelectric bimorph beam
It is fixed on by support block in hollow cylinder, the other end is free end, provided with needle point, the axis of needle point is perpendicular to piezoelectric bimorph beam
Surface, and hollow cylinder is stretched out by position-limiting tube;The top of needle point is provided with penetrator;Under free state, penetrator
Distance with the lower edge of position-limiting tube is d;When being detected to sample, the surface of sample engages the lower edge of position-limiting tube, so that
Sample is contacted with penetrator, and cause piezoelectric bimorph beam free end deformation be d.
2. hardness determination structure as claimed in claim 1, it is characterised in that the piezoelectric bimorph beam is " piezoelectric chip-elasticity
The three-layer composite structure of steel layer-piezoelectric chip ", piezoelectric chip is separately positioned on the upper and lower surface of elastic steel layer.
3. a kind of portable hardometer based on dynamo-electric impedance method, it is characterised in that the portable hardometer includes:It is portable
Hardness determination structure, impedance analysis chip, computing chip and result display;Wherein, portable hardness determination structure includes sky
Heart cylinder, support block, position-limiting tube, piezoelectric bimorph beam, needle point and penetrator;One end of hollow cylinder is solid support block, separately
The side wall of one end is provided with position-limiting tube, and the axis of position-limiting tube is vertical with the axis of hollow cylinder;One end of piezoelectric bimorph beam passes through branch
Bracer is fixed in hollow cylinder, and the other end is free end, provided with needle point, the axis of needle point perpendicular to the surface of piezoelectric bimorph beam,
And hollow cylinder is stretched out by position-limiting tube;The top of needle point is provided with penetrator;Under free state, penetrator with it is spacing
The distance of the lower edge of pipe is d;When being detected to sample, the surface of sample is located at the lower edge of position-limiting tube, thus sample with
Penetrator contact, and cause piezoelectric bimorph beam free end deformation be d;Piezoelectric bimorph beam is connected to impedance analysis core
Piece, impedance analysis chip measurement obtains impedance spectrum characteristic, transmits to computing chip;Computing chip is equivalent according to twin crystal beam electromechanics
Circuit theory calculates the contact area obtained between penetrator and sample, and further calculates the hardness number of sample;Transmission
Provided to result display.
4. portable hardometer as claimed in claim 3, it is characterised in that the penetrator uses Vickers hardness pressure
Head, Brinell hardnell penetrator exert formula hardness penetrator.
5. a kind of detection method of the portable hardometer based on dynamo-electric impedance method, it is characterised in that the detection method, including
Following steps:
1) stiffness K of piezoelectric bimorph beam hardness detecting structure is demarcatedc, and measure obtain under free state penetrator with it is spacing
The lower edge of pipe apart from d so that by formula F=KcD is calculated and is obtained contact force F;
2) sample is detected, the surface of sample is engaged well with the lower edge of position-limiting tube, so that sample and penetrator
Contact, and cause piezoelectric bimorph beam free end deformation be d;
3) piezoelectric bimorph beam is connected to impedance analysis chip, and impedance analysis chip measurement obtains impedance spectrum characteristic;
4) computing chip obtains hardometer according to the impedance spectrum characteristic obtained according to twin crystal beam electro-mechanical equivalent circuit theoretical calculation
Contact area between pressure head and sample, further calculates the hardness number of sample by contact force F and contact area;
5) hardness number is transmitted to result display and provided by computing chip;
The portable hardometer includes:Portable hardness determination structure, impedance analysis chip, computing chip and result are shown
Device;
Wherein, portable hardness determination structure includes hollow cylinder, support block, position-limiting tube, piezoelectric bimorph beam, needle point and hardometer pressure
Head;One end of hollow cylinder is solid support block, and the side wall of the other end is provided with position-limiting tube, the axis of position-limiting tube and hollow cylinder
Axis is vertical;One end of piezoelectric bimorph beam is fixed in hollow cylinder by support block, and the other end is free end, provided with needle point, pin
The axis of point stretches out hollow cylinder perpendicular to the surface of piezoelectric bimorph beam, and by position-limiting tube;The top of needle point is provided with hardometer
Pressure head;Under free state, the distance of the lower edge of penetrator and position-limiting tube is d;When being detected to sample, the table of sample
Face is located at the lower edge of position-limiting tube, so that sample is contacted with penetrator, and causes the change of the free end of piezoelectric bimorph beam
Shape is d;Piezoelectric bimorph beam is connected to impedance analysis chip, and impedance analysis chip measurement obtains impedance spectrum characteristic, transmitted to meter
Calculate chip.
6. detection method as claimed in claim 5, it is characterised in that penetrator is hard using Vickers hardness penetrator, Bu Shi
Degree pressure head exerts formula hardness penetrator, and according to corresponding Vickers, Bu Shi or the calculation formula for exerting formula, obtains the Vickers hardness of material
Value, ball hardness number exert formula hardness number.
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