CN104048633B - A kind of device and method of the micro hole hole wall re cast layer thickness detecting thermal source molding - Google Patents
A kind of device and method of the micro hole hole wall re cast layer thickness detecting thermal source molding Download PDFInfo
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- CN104048633B CN104048633B CN201410283579.7A CN201410283579A CN104048633B CN 104048633 B CN104048633 B CN 104048633B CN 201410283579 A CN201410283579 A CN 201410283579A CN 104048633 B CN104048633 B CN 104048633B
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Abstract
The present invention provides the device and method of a kind of micro hole hole wall re cast layer thickness detecting thermal source molding, present invention mechanical attribute based on different materials re cast layer and the relation of its thickness, propose to utilize layering exemplar to test and detect, the measurement of micro hole hole wall re cast layer thickness after just can being rapidly completed experiment after determining re cast layer mechanics parameter.Re cast layer Thickness sensitivity, according to the difference in institute's dynamometry direction, can be divided into the detecting system that two sets are different, determine re cast layer thickness by test interlayer re cast layer tension or shearing stress respectively, and the present invention can be effectively improved the efficiency of Related Experimental Study.
Description
Technical field
The present invention relates to micro hole hole wall re cast layer Thickness sensitivity field, be specifically related to utilizing heat
During processing (laser, electric spark, the electron beam etc.) micro hole of source, the re cast layer that hole wall is formed
The device for fast detecting of thickness and method.
Background technology
In aero-engine with the manufacture field of large-scale energy source and power equipment, combustion all can be related to
The processing of the hot-end component surface magnanimity film cooling holes such as gas-turbine turbo blade, and the most domestic
Commonly used method is spark machined or Laser Processing, and both approaches broadly falls into thermal source and adds
Work, is the most all to make material that fusing and gasification occur by the way of local is heated, reaches material
The purpose in hole.But, thermal source processing micro hole the most still has an an open question, it is simply that
Can produce re cast layer at hole wall in the course of processing, the existence of re cast layer destroys matrix material character
Concordance, and micro-crack is wherein distributed, greatly reduces the service life of hot-end component,
Constitute integral installation for the potential threat of safety.
Launch to remove the re cast layer of hole wall, domestic each institute and colleges and universities in thermal source processing
The work of substantial amounts of Related Experimental Study.In traditional experiment detection method, in order to detect hole
The thickness of wall re cast layer, needs to carry out laboratory sample the process of following step: 1. print
Cutting；2. inlay sample preparation；3. corase grind；4. fine grinding；5. polishing；6. etching pit；7. utilize gold
Phase microscope carries out observation and the measurement of diverse location, averages；8. record.This detection
The advantage of method is directly perceived, but shortcoming is to waste time and energy, and the single sample detection cycle is oversize, when
When the parameter point of needs detection is too much, profit will have a strong impact on the progress of research in this way.
Summary of the invention
It is an object of the invention to provide a kind of micro hole hole wall re cast layer detecting thermal source molding
The device and method of thickness, it is possible to the quickly micro hole hole wall re cast layer of detection heat source method processing
Thickness.
To achieve these goals, present invention employs techniques below scheme:
The device of a kind of micro hole hole wall re cast layer thickness detecting thermal source molding, including layering
Exemplar and re cast layer thickness detecting system, described layering exemplar include being superimposed with each other up and down two
Layer plate sample workpiece, layering exemplar has several and uses identical thermal source processing method processing
Micro hole, micro hole penetrates the two-layer plate sample workpiece up and down of layering exemplar, upper and lower two-layer flat board sample
Part is connected as an entirety by micro hole hole wall re cast layer；Described re cast layer thickness detecting system bag
Include computer, for applying pulling force or the force application mechanism of shearing force and for examining to layering exemplar
Survey tension that upper and lower two-layer plate sample workpiece intersection micro hole hole wall re cast layer can bear or
The strain gauge of shear stress, strain gauge is connected with computer.
Described thermal source processing method be Laser Processing, spark machined, electron beam process or from
Sub-Shu Jiagong.
Described force application mechanism includes that exemplar clamper, exemplar clamper include mounting platform, set
Be placed on mounting platform for placing the layering object stage of exemplar and being arranged at object stage two
Securing bracket on end, securing bracket is provided with fastening bolt, top, the lower end pressure of fastening bolt
On lower floor's plate sample workpiece of layering exemplar.
Described force application mechanism also includes stayed mast or distance rod, and stayed mast is vertically arranged at loading
Above platform, the lower end of stayed mast is provided with the sample of the upper panel exemplar for connecting layering exemplar
Product grasping device；Distance rod is horizontally disposed with, one end of distance rod and the upper panel sample being layered exemplar
One end of part is relative；Strain gauge is arranged on stayed mast or distance rod.
Described force application mechanism also includes a shape briquetting, the upper end of door shape briquetting and fastening bolt
Lower end is connected, and fastening bolt is pressed on lower floor's plate sample workpiece of layering exemplar by door shape briquetting top
On, distance rod is arranged in a shape briquetting.
Described force application mechanism also includes the jacking block being connected with distance rod, and distance rod is executed by jacking block
Power is in one end of the upper panel exemplar of layering exemplar.
Described object stage includes two load sample platforms, spaced between two load sample platforms, two loads
The upper surface of sample platform is in same level, the lower surface of two load sample platforms and mounting platform phase
Even.
The detection side of the device of the micro hole hole wall re cast layer thickness of above-mentioned detection thermal source molding
Method, comprises the following steps:
1) after completing to be layered exemplar processing, lower floor's plate sample workpiece of layering exemplar is fastened；
2) through step 1) after, by forcing in drawing of the upper panel exemplar of layering exemplar
Power bar or distance rod apply pulling force or shearing force to layering exemplar upper strata；
3) through step 2) after, computer is according to the testing result of strain gauge, layering
On exemplar, the quantity of micro hole and the relation of re cast layer thickness and re cast layer mechanical attribute calculate
And export the average thickness of upper and lower two-layer plate sample workpiece intersection micro hole hole wall re cast layer, the most micro-
The average re cast layer thickness of aperture correspondence hole depth position.
The processing method of described layering exemplar is:
Select two-layer plate sample workpiece and overlap, by the two-layer plate sample workpiece clamping after overlapping
After carry out the processing of micro hole and obtain being layered exemplar, two-layer plate sample workpiece when processing micro hole because of
Generate hole wall re cast layer and link together.
The micro hole hole depth position that the thickness of described two-layer plate sample workpiece detects as required is true
Fixed.
The invention have the benefit that
Compared with existing metallographic detection re cast layer thickness techniques, the present invention utilizes the mechanics of re cast layer
Attribute and the corresponding relation of its thickness, use re cast layer thickness detecting system in layering exemplar
Re cast layer carries out mechanics detection, mechanical attributes based on all kinds of experiment materials in computer and weight
The data base of cast layer relation, can quickly realize the detection of micro hole hole wall re cast layer thickness；This
Invent without obtaining re cast layer thickness by the metallographic observation of complex steps, there is low cost, consumption
Time feature short, simple to operate, can effectively promote work efficiency.
Accompanying drawing explanation
Fig. 1 is sample clamping form schematic diagram during thermal source (laser) processing micro hole；
Fig. 2 is that the Cleaning Principle schematic diagram of test format one described in embodiment (is layered by detection
The tension of exemplar interlayer determines re cast layer thickness)；
Fig. 3 is that the Cleaning Principle schematic diagram of test format two described in embodiment (is layered by detection
The shear stress of exemplar interlayer determines re cast layer thickness)；
In figure: 1 is lens, 2 is laser beam, and 101 is load sample platform, and 102 is sample grasping device,
103 is fastening bolt, and 104 is stayed mast, and 105 is strain gauge, and 106 believe for sensor
Number processor, 107 is computer, and 108 is securing bracket, and 109 is mounting platform, and 201 are
Load sample platform, 202 is fastening bolt, and 203 is door shape briquetting, and 204 is distance rod, and 205 for answering
Force transducer, 206 is sensor signal processor, and 207 is computer, and 208 is fastening
Frame, 209 is mounting platform, and 210 is jacking block, and 3 is re cast layer, and A is exemplar upper strata, B
For exemplar lower floor, F1For pulling force, F2For thrust.
Detailed description of the invention
With embodiment, the present invention is described in detail below in conjunction with the accompanying drawings.
The present invention proposes a kind of micro hole hole wall re cast layer thickness detection apparatus and method.This
Invent and the mechanical attribute of re cast layer and its thickness are set up corresponding relation, by re cast layer power
The measurement learning parameter obtains the thickness data of re cast layer indirectly.The mechanics parameter of re cast layer, bag
Include maximum tension stress or tangential stress that different hole wall positions re cast layer can bear.This inspection
The feature of survey method be efficiency and accuracy the highest, as long as because micro hole machining having been tested
Layering exemplar after one-tenth is placed on the equipment designed by the present invention, it is possible to read from display screen
The long meansigma methods of complete cycle of re cast layer thickness.The premise of this detection method is, has passed through tradition
Detection method the experiment material tested has been systematically carried out mechanical attribute and double teeming thickness
The statistics of degree relation, defines reliable data base.
Described device specifically includes that exemplar clamper and two kinds of forms based on exemplar clamper
Re cast layer thickness detecting system.
As it is shown in figure 1, exemplar clamper include can be by the different-thickness exemplar parallel folder of A, B layer
Tight clamp body and tightening member.Clamp body includes mounting platform and to be respectively arranged at installation flat
On platform, two load sample platforms at two ends, load sample platform is provided with securing bracket, and tightening member is arranged at
On securing bracket, after exemplar is fixed by clamp body, below exemplar, leave certain space (load sample
Interval between platform), in order to the discharge of processing bits and handling exemplar, two ends load sample platform is at same water
Plane；Tightening member be can the bolt of up-down adjustment, bolt is perpendicular to load sample platform, can be to push up pressure
Form exemplar is fixed on load sample platform；Clamp body can be integrally fastened to add by mounting platform
On the motion platform of work experiment.
Re cast layer thickness detecting system form one (detection tension), holds by measuring re cast layer
The maximum normal direction tension being subject to determines its thickness.As in figure 2 it is shown, detecting system specifically includes that
Load sample platform 101, sample grasping device 102, fastening bolt 103, stayed mast 104, stress sensing
Device 105, electronic controlled power mechanism, sensor signal processor 106, computer 107, fastening
Support 108 and mounting platform 109.Two load sample platforms 101 on mounting platform 109 are same
In one plane, exemplar can be placed in parallel on load sample platform.Adjusting fastening bolt 103 can be by difference
The exemplar B layer top of thickness is pressed on corresponding load sample platform.Adjust sample grasping device 102, due to sample
Part A layer is slightly wider than B layer, and sample grasping device lower end can upwards force in exemplar A layer lower surface.
Sample grasping device upper end connects stayed mast 104, and stayed mast 104 is provided with strain gauge
105, stayed mast can be driven up motion by electronic controlled power mechanism.Set institute in a computer
The quantity of micro hole in test sample part material type and exemplar.Strain gauge surveyed signal of telecommunication warp
Cable reaches sensor signal processor 106, then through the incoming computer of cable 107, computer
Calculate through relative analysis, by the average re cast layer thickness of exemplar A, B layer intersection micro hole
Display is on the computer screen.
Re cast layer thickness detecting system form two (detection shearing stress), holds by measuring re cast layer
The maximum shear stress being subject to determines its thickness.As it is shown on figure 3, detecting system specifically includes that load
Sample platform 201, fastening bolt 202, door shape briquetting 203, distance rod 204, strain gauge
205, electronic controlled power mechanism, sensor signal processor 206, computer 207, securing bracket
208, mounting platform 209 and jacking block 210.Two load sample platforms on mounting platform 209 exist
In same plane, exemplar can be placed in parallel on it.Adjust fastening bolt 202, exemplar B layer one
End can directly be fixed by tightened bolt presses, and the other end is compressed by top pressure gate shape briquetting 203.
Strain gauge 205 is arranged on distance rod 204, drives lower thrust rod in electronic controlled power mechanism
Jacking block is driven to execute thrust in exemplar A layer side.Set surveyed sample material in a computer
The quantity of micro hole in type and exemplar.Strain gauge measured signal passes through the incoming sensing of cable
Device signal processor 206, the most incoming computer 207, computer is calculated analytically, will
The average re cast layer thickness of exemplar A, B layer intersection micro hole shows on the computer screen.
Using above-mentioned micro hole hole wall re cast layer thickness detection apparatus to detect, detailed process is such as
Under:
(1) exemplar prepares: in order to data are accurate and convenient test, exemplar is by A layer (exemplar
Upper strata) and B layer (exemplar lower floor) composition, the thickness of two-layer can be measured as required
Different hole depth positions and change (such as, if the thickness of practical work piece is H, vertical on workpiece
Processing micro hole, micro hole be the degree of depth be the through hole of H, when needs measure hole depth be at h micro-
During the thickness of aperture hole wall re cast layer, then the thickness of A layer is set to h, the thickness of B layer is fixed
For H-h), the roughness of the lower surface of A layer and the upper surface of B layer be Ra=6.3 (and statistics
Keep consistent during data acquisition, during statistical data collection, first prepare A layer and B layer and add
Work micro hole, then measures mechanics parameter, then uses traditional metallographic analysing method to measure double teeming
Layer thickness).If surveying tension (form one), the length of A layer need to be less than B layer, but wide
Degree is more than B layer (about 2mm)；If surveying shearing stress (form two), A layer length is less than
B layer, width can be identical；
(2) machining experiment: be placed on exemplar by parallel after ready exemplar A, B stacking conjunction
On the load sample platform of clamper, and the fastening bolt screwing both sides makes exemplar fix (i.e. to clamp exemplar
A, B layer), in order to avoid occurring alice to cause two exemplar (A when exemplar A layer thickness is less
Layer and B layer) can not fit tightly, one side can be placed under fastening bolt long-pending thicker relatively greatly
Briquetting, is loaded on exemplar clamper entirety on the motion platform of machining experiment after fixing, then opens
Begin utilize laser or other thermal source processing method to carry out micro hole machining experiment, after machining from
Exemplar clamper is taken off on the motion platform of machining experiment；As it is shown in figure 1, micro hole machining is complete
Cheng Hou, exemplar A, B two-layer can be bonded in because of the existence of micro hole hole wall re cast layer 3
Together；In single test, the processing quantity of micro hole is the most, then measured re cast layer is the thickest
The accuracy of degree is the highest.
(3) detection
Form one: adjust the fastening side on exemplar clamper of the exemplar after micro hole machining completes
Formula, the fastening bolt 103 i.e. screwing both sides pushes up pressure-like part B layer upper surface two ends, such as Fig. 2
Shown in, then, regulation sample grasping device 102 makes it can clamp exemplar A layer lower surface.
Material type and the micro hole hole count of institute's test sample part are set in computer 107.Then pulling force is made
Bar 104 upwards slow uniform motion, after strain gauge 105 experiences power change, by signal
Through the incoming computer of sensor signal processor 106, finally (first adopt through computer analytical calculation
The re cast layer mechanics parameter of single micro hole is calculated, referring next to mechanics by the mode averaged
Parameter draws re cast layer average thickness with the relation of re cast layer thickness) after, by the deep position of institute's gaging hole
Average re cast layer thickness show on the computer screen, and record, complete detection.
Form two: adjust the fastening side on exemplar clamper of the exemplar after micro hole machining completes
Formula, i.e. screws fastening bolt 202, and the fastening bolt of side directly pushes up one end of pressure-like part B layer,
The fastening bolt of opposite side compresses the other end of exemplar B layer by a shape briquetting 203.As
Shown in Fig. 3, (jacking block is connected with distance rod, and each limit of jacking block is arrived then to adjust jacking block 210 height
Axial line distance is different, can be by rotating the regulation jacking block distance to B layer upper surface) so that it is
Just exemplar A layer side can be withstood on.The material class of institute's test sample part is set in computer 207
Type and micro hole hole count, then the slow uniform motion of distance rod 204 level make jacking block execute thrust in
Exemplar A layer side, after strain gauge 205 experiences power change, by signal through sensor
The incoming computer of signal processor 206, finally after computer analytical calculation, by deep for institute's gaging hole
The average re cast layer thickness of position shows on the computer screen, and record, completes detection.
In a word, micro hole hole wall re cast layer thickness detection apparatus of the present invention, including: point
Layer exemplar (A, B layer) and re cast layer thickness detecting system, exemplar clamper includes can be by
Retaining element (load sample platform, fastening bolt and the door shape briquetting of the parallel clamping of different-thickness exemplar
Deng), exemplar clamper both can be integrally fastened to the motion platform of machining experiment to carry out micro hole
Processing, again as a part for detecting system；Re cast layer thickness detecting system includes two kinds of detections
Form, form one measures the maximum normal direction tension that re cast layer is born, and form two measures re cast layer
The maximum shear stress born.Form one by sample grasping device by exemplar upper strata (A layer) with
Stayed mast connects, and stayed mast is provided with strain gauge, and sensor signal accesses computer,
Through program and experimental data base comparing calculation, by re cast layer thickness results in computer screen
Show；Form two applies thrust by jacking block from side to exemplar upper strata (A layer),
Cause exemplar levels tangential separation eventually, the distance rod being connected with jacking block is provided with stress sensing
Device, sensor signal accesses computer, through program and experimental data base comparing calculation, will weight
Cast layer thickness results shows in computer screen.Thermal source processing involved in the present invention is micro-
The detection device and method of aperture hole wall re cast layer thickness, utilizes layering exemplar to complete experiment, logical
Cross test interlayer re cast layer mechanical parameters to determine micro hole hole wall re cast layer thickness, have
The feature that low cost, efficiency are high, simple to operate, can quickly realize micro hole hole wall re cast layer
Detection, can effectively promote correlational study work efficiency.
Claims (10)
1. detect a device for the micro hole hole wall re cast layer thickness of thermal source molding, its feature
It is: including being layered exemplar and re cast layer thickness detecting system, described layering exemplar includes phase
The two-layer plate sample workpiece up and down of overlapping mutually, layering exemplar has several and uses identical thermal source
The micro hole of processing method processing, micro hole penetrates the two-layer plate sample workpiece up and down of layering exemplar,
Two-layer plate sample workpiece is connected as an entirety by micro hole hole wall re cast layer up and down；Described re cast layer
Thickness detecting system includes computer, for applying pulling force or the force of shearing force to layering exemplar
Upper and lower two-layer plate sample workpiece intersection micro hole hole wall re cast layer institute energy detects in mechanism and being used for
The tension born or the strain gauge of shear stress, strain gauge is connected with computer.
A kind of micro hole hole wall re cast layer detecting thermal source molding
The device of thickness, it is characterised in that: described thermal source processing method is Laser Processing, electrical spark working
Work, electron beam process or ion beam processing.
A kind of micro hole hole wall re cast layer detecting thermal source molding
The device of thickness, it is characterised in that: described force application mechanism includes exemplar clamper, and exemplar clamps
Device include mounting platform, be arranged on mounting platform for place layering exemplar object stage with
And it is arranged at the securing bracket on object stage two ends, securing bracket is provided with fastening bolt, tightly
The top, lower end of fixing bolt is pressed on lower floor's plate sample workpiece of layering exemplar.
A kind of micro hole hole wall re cast layer detecting thermal source molding
The device of thickness, it is characterised in that: described force application mechanism also includes stayed mast (104) or pushes away
Power bar (204), stayed mast is vertically arranged at above object stage, and the lower end of stayed mast is provided with use
Sample grasping device (102) in the upper panel exemplar connecting layering exemplar；Distance rod level sets
Putting, one end of distance rod is relative with one end of the upper panel exemplar of layering exemplar；Stress sensing
Device is arranged on stayed mast or distance rod.
A kind of micro hole hole wall re cast layer detecting thermal source molding
The device of thickness, it is characterised in that: described force application mechanism also includes a shape briquetting (203), door
The upper end of shape briquetting is connected with the lower end of fastening bolt, and fastening bolt is pressed on by door shape briquetting top
On lower floor's plate sample workpiece of layering exemplar, distance rod (204) is arranged in a shape briquetting.
A kind of micro hole hole wall re cast layer detecting thermal source molding
The device of thickness, it is characterised in that: described force application mechanism also includes and distance rod (204) phase
Jacking block (210) even, distance rod forces in the upper panel exemplar of layering exemplar by jacking block
One end.
A kind of micro hole hole wall re cast layer detecting thermal source molding
The device of thickness, it is characterised in that: described object stage includes two load sample platforms, two load sample platforms
Between spaced, the upper surface of two load sample platforms is in same level, two load sample platforms
Lower surface is connected with mounting platform.
8. the micro hole hole wall double teeming thickness of a detection thermal source molding as claimed in claim 1
The detection method of the device of degree, it is characterised in that: comprise the following steps:
1) after completing to be layered exemplar processing, lower floor's plate sample workpiece of layering exemplar is fastened；
2) through step 1) after, by forcing in drawing of the upper panel exemplar of layering exemplar
Power bar or distance rod apply pulling force or shearing force to layering exemplar upper strata；
3) through step 2) after, computer is according to the testing result of strain gauge, layering
On exemplar, the quantity of micro hole and the relation of re cast layer thickness and re cast layer mechanical attribute calculate
And export the average thickness of upper and lower two-layer plate sample workpiece intersection micro hole hole wall re cast layer.
A kind of micro hole hole wall re cast layer detecting thermal source molding
The detection method of the device of thickness, it is characterised in that: the processing method of described layering exemplar is:
Select two-layer plate sample workpiece and overlap, by the two-layer plate sample workpiece clamping after overlapping
After carry out the processing of micro hole and obtain being layered exemplar, two-layer plate sample workpiece when processing micro hole because of
Generate hole wall re cast layer and link together.
A kind of micro hole hole wall double teeming detecting thermal source molding
The detection method of the device of layer thickness, it is characterised in that: the thickness root of described two-layer plate sample workpiece
Determine according to the micro hole hole depth position needing detection.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410283579.7A CN104048633B (en) | 2014-06-23 | 2014-06-23 | A kind of device and method of the micro hole hole wall re cast layer thickness detecting thermal source molding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410283579.7A CN104048633B (en) | 2014-06-23 | 2014-06-23 | A kind of device and method of the micro hole hole wall re cast layer thickness detecting thermal source molding |
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| Publication Number | Publication Date |
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| CN104048633A CN104048633A (en) | 2014-09-17 |
| CN104048633B true CN104048633B (en) | 2016-08-17 |
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| CN201410283579.7A Expired - Fee Related CN104048633B (en) | 2014-06-23 | 2014-06-23 | A kind of device and method of the micro hole hole wall re cast layer thickness detecting thermal source molding |
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| CN105158207B (en) * | 2015-06-03 | 2018-03-30 | 北京理工大学 | The measurement apparatus and method of high aspect ratio micropore re cast layer on a kind of transparent material |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102126087A (en) * | 2011-03-23 | 2011-07-20 | 西安交通大学 | Millisecond laser processing and postprocessing process for no-recasting-layer micro-deep holes |
| CN103611994A (en) * | 2013-11-21 | 2014-03-05 | 南京航空航天大学 | Complex-surface recast-layer-free single/group-hole multi-station electric spark-electrolytic machine tool |
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2014
- 2014-06-23 CN CN201410283579.7A patent/CN104048633B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102126087A (en) * | 2011-03-23 | 2011-07-20 | 西安交通大学 | Millisecond laser processing and postprocessing process for no-recasting-layer micro-deep holes |
| CN103611994A (en) * | 2013-11-21 | 2014-03-05 | 南京航空航天大学 | Complex-surface recast-layer-free single/group-hole multi-station electric spark-electrolytic machine tool |
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| 无再铸层异型孔的电火花-电解组合加工研究;刘发展等;《电加工与模具》;20100228(第2期);第33-37页 * |
| 毫秒激光加工小孔与重铸层的后处理工艺;王恪典等;《西安交通大学学报》;20110731;第45卷(第7期);第45-49页 * |
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