CN203951386U - A kind of broadband micro piezoelectric vibration energy gatherer - Google Patents

A kind of broadband micro piezoelectric vibration energy gatherer Download PDF

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Publication number
CN203951386U
CN203951386U CN201420327611.2U CN201420327611U CN203951386U CN 203951386 U CN203951386 U CN 203951386U CN 201420327611 U CN201420327611 U CN 201420327611U CN 203951386 U CN203951386 U CN 203951386U
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cantilever beam
analysis
upper cantilever
mass
vibration energy
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CN201420327611.2U
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秦利锋
张金惠
张启祥
马盛林
夏雁鸣
周伟
刘海强
凌伟淞
张军鹏
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Xiamen University
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Xiamen University
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Abstract

A kind of broadband micro piezoelectric vibration energy gatherer, comprises upper cantilever beam, upper cantilever beam mass, fixed support, top electrode, piezoelectric patches, bottom electrode, Analysis of A Cantilever Beam Under and Analysis of A Cantilever Beam Under mass; Upper cantilever beam is at least two, is array distribution; One end of upper cantilever beam is connected with fixed support; Upper cantilever beam mass is corresponding one by one with upper cantilever beam, and is fixed on the free end of described upper cantilever beam; Top electrode, piezoelectric patches, bottom electrode are cascadingly set on Analysis of A Cantilever Beam Under upper surface or lower surface; Analysis of A Cantilever Beam Under is at least two, is array distribution, shares a described Analysis of A Cantilever Beam Under mass; Analysis of A Cantilever Beam Under is also positioned at the below of the upper cantilever beam of array distribution, and be fixed on fixed support.According to vibration source frequency scope in actual environment, number and the resonance frequency of design upper cantilever beam, make vibration source frequency in the resonant frequency range overlay environment of array upper cantilever beam, carries out electric energy output.

Description

A kind of broadband micro piezoelectric vibration energy gatherer
Technical field
The utility model relates to a kind of piezoelectric vibration energy gatherer, particularly a kind of piezoelectric vibration energy gatherer of realizing wideband collection of energy.
Background technology
Energy harvester is gather or collect the micro-energy discharging in surrounding environment, comprises light, heat and vibration, and converts it to the device of electric energy.Compare with traditional energy-provision way, as transmission line, battery etc., energy harvester is not subject to the restriction of connecting line, and without frequent replacing, the equipment under rugged environment that efficiently solves brings replacing inconvenience or the high problem of maintenance cost because battery life is limited, have broad application prospects at low power dissipation electron equipment supplier of electricity masks such as radio sensing network, embedded system and MEMS.Wherein piezoelectric type vibrational energy collector have can realize recycle, can with MEMS technology well integrated, energy output density large, without starting power supply and advantages of simple structure and simple, be one of the study hotspot in current micro-collection of energy field.
Piezoelectric vibration energy gatherer adopts the cantilever beam structure with mass mostly at present, utilize the vibrational excitation of surrounding environment to make cantilever beam structure generation resonance, and drive thus the shape of inner piezoelectric to change, produce mechanical strain, due to the piezoelectric effect of material, its strain energy is converted into electric field energy.But in the time of the frequency departure cantilever beam resonance frequency in ambient environment vibrations source, piezoelectric cantilever deformation diminishes, output energy can sharply reduce.In practical application, vibration source all has certain frequency bandwidth conventionally, and the bandwidth of vibrational energy collector is vibration source frequency bandwidth in overlay environment completely, has limited the application of gatherer in wideband vibration environment.Such as, the full width at half maximum (FWHM) (Full width at half maximum) of the MEMS vibrational energy collector power stage of being produced by MicroGen company of the U.S. at present also only has 1Hz.Therefore frequency bandwidth how to widen energy harvester is that the major technique that development energy harvester faces one of is challenged.
On the other hand, along with the development of MEMS technology and low power consumption integrated circuit technology, following micro sensing system will have less volume, lower power consumption and the integrated level of Geng Gao, vibrational energy collector based on MEMS technology processing, by being expected to meet the energy supply of micro sensing system of working alone future, likely integrates with other functional modules simultaneously.Therefore, how to adopt MEMS technique to realize study hotspot, the emphasis that broadband piezoelectric vibration energy gatherer is current micro-collection of energy field.
At present, the problem that can work in wide-band vibration environment for solving piezoelectric vibration energy gatherer, has proposed various solutions both at home and abroad.But still there is larger technological challenge at broadband, microminiaturization, the aspect such as integrated in these technical schemes.For example: the piezoelectric energy collector design based on twin beams crash feature only, in the time that vibration frequency is incremental variations, just can realize wideband collection of energy, still, when vibration frequency is, while successively decreasing variation, to open up yupin effect undesirable; Energy harvester design based on array piezoelectric cantilever, adopts the series-parallel mode of electricity to export electric energy, has the problem that efficiency of energy collection is low; Realize the energy harvester design of opening up frequently by introducing magnet, be unfavorable for device microminiaturization, integrated development.Therefore, have concurrently MEMS microminiaturization, efficiently and the research of the piezoelectric vibration energy gatherer of broadband feature urgently carry out in a deep going way.
Utility model content
Technical problem to be solved in the utility model is to provide one can high efficiencyly in certain frequency bandwidth vibration source environment be converted to electric energy by vibrational energy, easily realizes microminiaturized, integrated broadband piezoelectric vibration energy gatherer.
In order to solve above-mentioned technical problem, the utility model provides a kind of broadband micro piezoelectric vibration energy gatherer, comprises upper cantilever beam, upper cantilever beam mass, fixed support, top electrode, piezoelectric patches, bottom electrode, Analysis of A Cantilever Beam Under and Analysis of A Cantilever Beam Under mass;
Described upper cantilever beam is at least two, is array distribution; One end of described upper cantilever beam is connected with described fixed support; Described upper cantilever beam mass is corresponding one by one with described upper cantilever beam, and is fixed on the free end of described upper cantilever beam; Described top electrode, piezoelectric patches, bottom electrode are cascadingly set on Analysis of A Cantilever Beam Under upper surface or lower surface; Described Analysis of A Cantilever Beam Under is at least two, is array distribution, shares a described Analysis of A Cantilever Beam Under mass; Described Analysis of A Cantilever Beam Under is also positioned at the below of the upper cantilever beam of array distribution, and be fixed on fixed support.
As preferably, the shape that described upper cantilever beam array distributes can be that rectangle is square circular or oval.
As preferably, the shape of described upper cantilever beam can be rectangle, trapezoidal, shaped form.
As preferably, described in to be fixed on the mass quality of upper cantilever beam not identical, concrete quality arranges according to the vibration source frequency scope in actual environment.
As preferably, described in be fixed on the mass of upper cantilever beam shape can be square, rectangle, triangle, trapezoidal, circular.
As preferably, the material of described piezoelectric patches can be selected piezoelectric ceramic or aluminium nitride or zinc oxide or PVDF.
As preferably, described Analysis of A Cantilever Beam Under measure-alike, shape can be rectangle or trapezoidal or shaped form.
As preferably, the shared mass shape of described Analysis of A Cantilever Beam Under can be circle or quadrangle or triangle.
As preferably, the material of described upper and lower cantilever beam can be selected copper or aluminium or silicon.
As preferably, the resonance frequency of described Analysis of A Cantilever Beam Under does not need and ambient vibration frequency match.
A kind of broadband piezoelectric vibration energy gatherer that the utility model provides has the following advantages:
1. adopt the cantilever array of different resonance frequencys, thereby make energy harvester have wider frequency bandwidth, realize wideband collection of energy.
2. transmit mechanical energy by upper cantilever beam and Analysis of A Cantilever Beam Under collision mode, utilize the piezoelectric patches on Analysis of A Cantilever Beam Under to carry out collection of energy, because Analysis of A Cantilever Beam Under shares a mass and deformation occurs simultaneously, can avoid many beams to produce the problem such as coupled interference and internal resistance increase because the connected mode of serial or parallel connection exists phase difference.
3. Analysis of A Cantilever Beam Under can be the array cantilever beam structure of hollow out, and the deformation quantity of piezoelectric patches is increased, and promotes output electric energy efficiency.By adjusting the output effect that size, number and the distribution situation of beam can optimization energy gatherer.
4. the utility model proposes miniature broadband piezoelectric vibration energy gatherer adopt can with the aluminum nitride thin membrane material of integrated circuit compatibility or other piezoelectric membranes.
Brief description of the drawings
Fig. 1 is the structural representation of the utility model preferred embodiment one;
Fig. 2 is the structural representation of the utility model preferred embodiment two.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described further.
Embodiment 1
Shown in Fig. 1, the utility model provides a kind of broadband piezoelectric vibration energy gatherer, comprises upper cantilever beam 2, upper cantilever beam mass 3 and Analysis of A Cantilever Beam Under mass 8, fixed support 1, top electrode 4, piezoelectric patches 5, bottom electrode 6 and Analysis of A Cantilever Beam Under 7.
In the present embodiment, the quantity of described upper cantilever beam 2 is three, is preferably rectangle, rounded array distribution; One end of described upper cantilever beam 2 is connected with described fixed support 1; Described upper cantilever mass 3 is preferably rectangle, corresponding one by one with described upper cantilever beam 2, and is fixed on the free end of described upper cantilever beam 2; Described top electrode 4, piezoelectric patches 5, bottom electrode 6 are cascadingly set on Analysis of A Cantilever Beam Under 7 upper surfaces; The quantity of described Analysis of A Cantilever Beam Under 7, for being three, being preferably rectangle and sharing described Analysis of A Cantilever Beam Under mass 8; Described Analysis of A Cantilever Beam Under 7 is array distribution, and is positioned at the below of the upper cantilever beam 2 of described array distribution, and is fixed on described fixed support 1.
In the present embodiment, described upper cantilever beam mass 3 has different quality, can mate according to vibration source frequency excursion in actual environment, obtains different resonance frequencys.
In the time that cantilever beam is subject to dynamic excitation generation vibration, transmit mechanical energy by collision upper cantilever beam mass 3 to Analysis of A Cantilever Beam Under mass 8, thereby make Analysis of A Cantilever Beam Under mass 8 drive Analysis of A Cantilever Beam Under 7 to vibrate, thereby and then make piezoelectric patches 5 occur deformation produce electric energy, export energy by top electrode 4 and the bottom electrode 6 of piezoelectric patches 5.Owing to being provided with many upper cantilever beams 2, the resonance frequency of every upper cantilever beam 2 is all not identical, so just makes described broadband piezoelectric energy gathering apparatus in a wider frequency range, can ensure to have at least a upper cantilever beam 2 resonance to occur and basad transmission mechanical energy.Avoid the problem because regulating resonance frequency to cause voltage discontinuity to be exported, can obtain the effective voltage of continuous wave output, more can adapt to the fast vibration environment of frequency change.Meanwhile, Analysis of A Cantilever Beam Under adopts engraved structure, and the deformation quantity of piezoelectric patches 5 is increased, thereby has improved the efficiency of output electric energy.
Because each upper cantilever beam mass 2 and the distance of Analysis of A Cantilever Beam Under mass 8 can arrange according to vibration source frequency scope and oscillation intensity in actual environment, reach required output voltage.Such as roughly the same by the deformation that can make each upper cantilever beam 2 in resonance condition bring to piezoelectric patches 5 by upper cantilever beam mass 2 is set, make under different resonance frequencys, the voltage of piezoelectric patches output is roughly the same all the time, has the effect of voltage stabilizing.
Because Analysis of A Cantilever Beam Under 7 shares an Analysis of A Cantilever Beam Under mass 8 and deformation occurs simultaneously, can avoid many beams to produce the problem such as coupled interference and internal resistance increase because the connected mode of serial or parallel connection exists phase difference.
In sum, the broadband piezoelectric energy gathering apparatus the utility model proposes, can collect the energy in environment with certain frequency bandwidth vibration source, effectively widen operating frequency width, improved efficiency of energy collection simultaneously, and easily realize microminiaturization, integrated, and widen the scope of application, strengthen practicality.
Embodiment 2
Shown in Fig. 2, the difference of the present embodiment and embodiment 1 is: the quantity of Analysis of A Cantilever Beam Under 7 is two, is asymmetric array distribution.Remainder is identical with embodiment 1, repeats no more.
The above, it is only the utility model preferred embodiment, therefore can not limit according to this scope that the utility model is implemented, the equivalence of doing according to the utility model the scope of the claims and description changes and modifies, and all should still belong in the scope that the utility model contains.

Claims (10)

1. a broadband micro piezoelectric vibration energy gatherer, comprises upper cantilever beam, upper cantilever beam mass, fixed support, top electrode, piezoelectric patches, bottom electrode, Analysis of A Cantilever Beam Under and Analysis of A Cantilever Beam Under mass;
Described upper cantilever beam is at least two, is array distribution; One end of described upper cantilever beam is connected with described fixed support; Described upper cantilever beam mass is corresponding one by one with described upper cantilever beam, and is fixed on the free end of described upper cantilever beam; Described top electrode, piezoelectric patches, bottom electrode are cascadingly set on Analysis of A Cantilever Beam Under upper surface or lower surface; Described Analysis of A Cantilever Beam Under is at least two, is array distribution, shares a described Analysis of A Cantilever Beam Under mass; Described Analysis of A Cantilever Beam Under is also positioned at the below of the upper cantilever beam of array distribution, and be fixed on fixed support.
2. a kind of broadband micro piezoelectric vibration energy gatherer according to claim 1, is characterized in that, the shape that described upper cantilever beam array distributes can be that rectangle is square circular or oval.
3. a kind of broadband micro piezoelectric vibration energy gatherer according to claim 1, is characterized in that, the shape of described upper cantilever beam can be rectangle or trapezoidal or shaped form.
4. a kind of broadband micro piezoelectric vibration energy gatherer according to claim 1, is characterized in that, described in to be fixed on the mass quality of upper cantilever beam not identical, concrete quality arranges according to the vibration source frequency scope in actual environment.
5. a kind of broadband micro piezoelectric vibration energy gatherer according to claim 1, is characterized in that, described in be fixed on the mass of upper cantilever beam shape can be square, rectangle, triangle, trapezoidal, circular.
6. a kind of broadband micro piezoelectric vibration energy gatherer according to claim 1, is characterized in that, the material of described piezoelectric patches can be selected piezoelectric ceramic or aluminium nitride or zinc oxide or PVDF.
7. a kind of broadband micro piezoelectric vibration energy gatherer according to claim 1, is characterized in that, described Analysis of A Cantilever Beam Under measure-alike, and shape can be rectangle or trapezoidal or shaped form.
8. a kind of broadband micro piezoelectric vibration energy gatherer according to claim 1, is characterized in that, the shared mass shape of described Analysis of A Cantilever Beam Under can be circle or quadrangle or triangle.
9. a kind of broadband micro piezoelectric vibration energy gatherer according to claim 1, is characterized in that, the material of described upper and lower cantilever beam can be selected copper or aluminium or silicon.
10. a kind of broadband micro piezoelectric vibration energy gatherer according to claim 1, is characterized in that, the resonance frequency of described Analysis of A Cantilever Beam Under does not need and ambient vibration frequency match.
CN201420327611.2U 2014-06-18 2014-06-18 A kind of broadband micro piezoelectric vibration energy gatherer Expired - Fee Related CN203951386U (en)

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104485839A (en) * 2014-12-09 2015-04-01 武汉理工大学 Piezoelectric type energy harvester
CN105305882A (en) * 2015-11-30 2016-02-03 湖南科技大学 Multi-direction piezoelectric vibration energy harvester
CN105391343A (en) * 2015-10-15 2016-03-09 上海工程技术大学 Acoustic energy recycling device
CN105406766A (en) * 2015-12-01 2016-03-16 南京邮电大学 Fractal structure-based small broadband vibration transducer and encapsulation method therefor
CN106877740A (en) * 2017-03-22 2017-06-20 武汉理工大学 Combined type energy accumulator
CN108092638A (en) * 2017-11-27 2018-05-29 东南大学 A kind of triangle collapse beam mass block resonator system, detection method and manufacture craft
CN108225544A (en) * 2017-11-27 2018-06-29 东南大学 A kind of bilayer composite triangle collapse beam mass block resonator system and its trace detection method
CN110138272A (en) * 2019-05-16 2019-08-16 安徽理工大学 A kind of non-linear three-dimensional part Whole frequency band piezoelectricity low amplitude vibration energy accumulator
CN110429863A (en) * 2019-08-12 2019-11-08 北京康拓红外技术股份有限公司 A kind of wideband high reliability piezoelectric beam coupling energy collecting device
CN110601599A (en) * 2019-09-30 2019-12-20 南京邮电大学 Broadband piezoelectric energy collector based on cantilever beam
WO2024087648A1 (en) * 2022-10-25 2024-05-02 华为技术有限公司 Piezoelectric accelerometer, piezoelectric sensor, and smart device

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104485839A (en) * 2014-12-09 2015-04-01 武汉理工大学 Piezoelectric type energy harvester
CN105391343A (en) * 2015-10-15 2016-03-09 上海工程技术大学 Acoustic energy recycling device
CN105305882A (en) * 2015-11-30 2016-02-03 湖南科技大学 Multi-direction piezoelectric vibration energy harvester
CN105305882B (en) * 2015-11-30 2018-02-16 湖南科技大学 A kind of multi-direction piezoelectric vibration energy collector
CN105406766A (en) * 2015-12-01 2016-03-16 南京邮电大学 Fractal structure-based small broadband vibration transducer and encapsulation method therefor
CN106877740A (en) * 2017-03-22 2017-06-20 武汉理工大学 Combined type energy accumulator
CN108092638A (en) * 2017-11-27 2018-05-29 东南大学 A kind of triangle collapse beam mass block resonator system, detection method and manufacture craft
CN108225544A (en) * 2017-11-27 2018-06-29 东南大学 A kind of bilayer composite triangle collapse beam mass block resonator system and its trace detection method
CN108225544B (en) * 2017-11-27 2020-02-18 东南大学 Double-layer multiplexing type triangular folded beam mass block resonance system and trace detection method thereof
CN108092638B (en) * 2017-11-27 2021-03-19 东南大学 Resonance system, detection method and manufacturing process of mass block of triangular folding beam
CN110138272A (en) * 2019-05-16 2019-08-16 安徽理工大学 A kind of non-linear three-dimensional part Whole frequency band piezoelectricity low amplitude vibration energy accumulator
CN110429863A (en) * 2019-08-12 2019-11-08 北京康拓红外技术股份有限公司 A kind of wideband high reliability piezoelectric beam coupling energy collecting device
CN110601599A (en) * 2019-09-30 2019-12-20 南京邮电大学 Broadband piezoelectric energy collector based on cantilever beam
WO2024087648A1 (en) * 2022-10-25 2024-05-02 华为技术有限公司 Piezoelectric accelerometer, piezoelectric sensor, and smart device

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