CN100401071C - Flexible vertical column seesaw type double-layer structural micro-accelerometer - Google Patents
Flexible vertical column seesaw type double-layer structural micro-accelerometer Download PDFInfo
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- CN100401071C CN100401071C CNB2006100296913A CN200610029691A CN100401071C CN 100401071 C CN100401071 C CN 100401071C CN B2006100296913 A CNB2006100296913 A CN B2006100296913A CN 200610029691 A CN200610029691 A CN 200610029691A CN 100401071 C CN100401071 C CN 100401071C
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Abstract
Flexibility erect columniation seesaw double deck configuration tiny acceleration meter uses for tiny electromechanical system technology field. It relates to quality test block and stator. The stator is made up of the first flexibility support girder of left, the second flexibility support girder of left, the third flexibility support girder of left, the first flexibility support girder of right, the second flexibility support girder of right, the third flexibility support girder of right. All of the girders are cube columniation and set as a ring. The quality test block is on top of the stator by supported with those flexibility support girders. It test the acceleration signal by difference capacitance method with double deck metal configuration made by incorporate tiny machining technology. It achieves closed loop control according to the force equation principle with well anti-impact character and high precision to be used in navigate, automobile industry, industry automatization and robot field.
Description
Technical field
The present invention relates to a kind of micro-acceleration gauge, specifically is a kind of flexible vertical column seesaw type double-layer structural micro-accelerometer, belongs to micro-electromechanical system field.
Technical background
Along with the development of MEMS (micro electro mechanical system) (Micro Electro Mechanical System) technology, the micro-acceleration gauge manufacturing technology is more and more ripe, both at home and abroad all with the preference of micro-acceleration gauge exploitation as the MEMS (micro electro mechanical system) commercialization.Micro-acceleration gauge is compared with common accelerometer, has lot of advantages: volume is little, in light weight, cost is low, low in energy consumption, good reliability etc.It can apply to fields such as Aero-Space, auto industry, industrial automation and robot widely, has broad application prospects.Common micro-acceleration gauge can be divided into by the difference of responsive principle: pressure resistance type, piezoelectric type, tunnel effect type, condenser type and heat-sensitive type etc.Can be divided into bulk silicon technological micro-acceleration gauge and surface treatment micro-acceleration gauge again according to process.Although the accelerometer kind is a lot, structurally they are mostly formed by picking up mass metering (also claiming sprung mass or oscillating mass), branching carrier (pedestal) and testing circuit three parts.Principle of work is according to Newton second law, when accelerometer moves with measurand, its linear acceleration produces the opposite inertial force of direction qualitatively in detection, the size of linear displacement amount is directly proportional with inertial force, also just be directly proportional, measure this displacement and just can obtain by measuring acceleration with acceleration.
Common capacitive accelerometer adopts sandwich structure, find according to literature search, patent No. WO0241006, authorize day: 2002.05.23, name is called " SILICON CAPACITIVEACCELEROMETER " and discloses a kind of accelerometer, movably the responsive mass of silicon system is unsettled between two electrodes by two beams of metals for it, the vibration of responsive mass causes the change of differential capacitance, thereby output acceleration signal, but this three-decker is complicated, make inconvenience, and adsorb easily between electrode and the responsive mass, reduced reliability.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, propose a kind of flexible vertical column seesaw type double-layer structural micro-accelerometer with close-loop feedback control.The present invention adopts the double-level-metal structure, makes by incorporate micro fabrication, and structure is simple relatively, feasible process; The present invention supports by flexible brace summer and detects mass, and has increased and stop post, has prevented to detect contacting of mass and stator, has avoided the pinning of accelerometer; The present invention adopts FEEDBACK CONTROL, makes responsive mass remain on settling position, has reduced non-linearly, has increased bandwidth, has improved the performance of system.
The present invention is achieved by the following technical solutions, the present invention includes to detect mass and stator.
Stator comprises: substrate, insulation course, following public electrode piece, the right detection of outer shroud adds the square piece, last public electrode piece, an outer shroud left side is detected and is added the square piece, outer shroud stops post right No. one, outer shroud stops post right No. two, outer shroud stops post right No. three, stop post on the outer shroud, outer shroud the first from left number stops post, outer shroud the second from left number stops post, an outer shroud left side stops post No. three, stop post under the outer shroud, interior ring stops post right No. one, interior ring stops post right No. two, in ring the first from left number stop post, in ring the second from left number stop post, the right detection of interior ring adds the square piece, an interior ring left side is detected and is added the square piece, right flexible brace summer, right No. two flexible brace summers, right No. three flexible brace summers, the first from left number flexible brace summer, the second from left number flexible brace summer, No. three flexible brace summers in a left side, following public electrode binding-beam, last public electrode binding-beam, the center public electrode, the center stops post.
The detection mass comprises: the fan-shaped pole plate in left side, following outer shroud detect pole plate, the fan-shaped pole plate in right side, go up outer shroud detection pole plate, the first from left pole plate binding-beam, the second from left pole plate binding-beam, No. three pole plate binding-beams in a left side, the pole plate binding-beam in the right side, right No. two pole plate binding-beams, right No. three pole plate binding-beams, center sensitivity mass, through hole.
Distribution the first from left number flexible brace summer, the second from left number flexible brace summer, No. three flexible brace summers in a left side, a right flexible brace summer, right No. two flexible brace summers, right No. three flexible brace summers on the stator, these flexible brace summers are square cylinders, distribute ringwise, detect mass and place on the stator by these flexible brace summers supports.
The structural relation of stator is: place insulation course in the substrate, on insulation course, place all the other structures of stator, the center public electrode is positioned over the central authorities of stator, the right detection of interior ring adds the square piece, an interior ring left side is detected and is added the periphery that the square piece is positioned over the center public electrode ringwise, following public electrode piece, the right detection of outer shroud adds the square piece, last public electrode piece, an outer shroud left side is detected and is added the edge that the square piece is positioned over stator ringwise, following public electrode binding-beam link center public electrode and following public electrode piece, last public electrode binding-beam link center public electrode and last public electrode piece, right flexible brace summer, right No. two flexible brace summers, the right detection of ring added the square piece and right detection of outer shroud adds between the square piece in right No. three flexible brace summers were positioned over, and exceed outer shroud and stop post right No. one, outer shroud stops post right No. two, outer shroud stops post right No. three, the first from left number flexible brace summer, the second from left number flexible brace summer, a ring left side was detected and is added square piece and an outer shroud left side and detect and add between the square piece in No. three flexible brace summers in a left side were positioned over, and exceed outer shroud the first from left and number stop post, outer shroud the second from left number stops post, an outer shroud left side stops post No. three, an outer shroud left side is detected and is added three through holes that evenly distribute on the square piece, outer shroud the first from left number stops post, outer shroud the second from left number stops post, an outer shroud left side stops that post is positioned among the through hole No. three, and exceed the detection of an outer shroud left side and add the square piece, the right detection of outer shroud adds three through holes that evenly distribute on the square piece, outer shroud stops post right No. one, outer shroud stops post right No. two, outer shroud stops that post is positioned among the through hole right No. three, and exceed right detection of outer shroud and add the square piece, there is a through hole in following public electrode piece central authorities, stop under the outer shroud that post is positioned over wherein, and exceed public electrode piece down, there is a through hole in last public electrode piece central authorities, stop on the outer shroud that post is positioned over wherein, and exceed and go up the public electrode piece, an interior ring left side is detected and is added evenly two through holes of distribution of square piece, in ring the first from left number stop post, in ring the second from left number stop that post is positioned over wherein, and a ring left side is detected and is added the square piece in exceeding, the right detection of interior ring adds evenly two through holes of distribution of square piece, interior ring stops post right No. one, interior ring stops that post is positioned over wherein right No. two, and right detection of ring adds the square piece in exceeding, there is a through hole in center public electrode central authorities, the center stops that post is positioned over wherein, and exceeds the center public electrode.
The structural relation that detects mass is: the fan-shaped pole plate in left side, following outer shroud detects pole plate, the fan-shaped pole plate in right side, last outer shroud detects the periphery that pole plate is positioned over the responsive mass in center ringwise, the fan-shaped pole plate in left side is by the first from left pole plate binding-beam, the second from left pole plate binding-beam, No. three pole plate binding-beams in a left side connect mutually with the responsive mass in center, the fan-shaped pole plate in right side is by right pole plate binding-beam, right No. two pole plate binding-beams, right No. three pole plate binding-beams connect mutually with the responsive mass in center, right flexible brace summer, right No. two flexible brace summers, right No. three flexible brace summers, the first from left number flexible brace summer, the second from left number flexible brace summer, the upper end of No. three flexible brace summers in a left side respectively with right pole plate binding-beam, right No. two pole plate binding-beams, right No. three pole plate binding-beams, the first from left pole plate binding-beam, the second from left pole plate binding-beam, No. three pole plate binding-beams in a left side contact the fan-shaped pole plate in left side, following outer shroud detects pole plate, the fan-shaped pole plate in right side, last outer shroud detects pole plate, several through holes distribute on the responsive mass in center.
When the present invention works, stator is fixed, detect the extraneous acceleration of mass perception, add square piece, an interior ring left side and detect and add the square piece and apply high frequency carrier right detection of interior ring, outer shroud right detect add the square piece, an outer shroud left side is detected to add and is applied a constant amplitude with same frequency and reversed-phase carrier wave on the square piece, following public electrode piece, go up the public electrode piece and be used for output signal.When the responsive mass in the center of detecting mass is subjected to the acceleration of a sensing stator, the outside lateral bending song of flexible brace summer, the responsive mass in center is offset a little displacement to the stator direction, and the fan-shaped pole plate in left side, the perk one little displacement round about of the fan-shaped pole plate in right side, thereby following public electrode piece by stator, last public electrode piece is exported an amplitude by the high frequency carrier of the displacement modulation of the responsive mass in center, by preposition amplification, can obtain a DC component that is directly proportional with the displacement size after the filtering, this DC component is loaded into right detection of outer shroud as feedback adds the square piece, an outer shroud left side is detected and is added on the square piece, closed-loop control can be realized, accekeration can be obtained by feedback signal to accelerometer.When the responsive mass in the center of detecting mass is subjected to one dorsad during the acceleration of stator, the inside lateral bending song of flexible brace summer, the responsive mass in center stator direction dorsad is offset a little displacement, and the fan-shaped pole plate in left side, the perk one little displacement round about of the fan-shaped pole plate in right side, thereby following public electrode piece by stator, last public electrode piece is exported an amplitude by the high frequency carrier of the responsive mass displacement modulation in center, by preposition amplification, can obtain a DC component that is directly proportional with the displacement size after the filtering, this direct current branch is loaded into right detection of interior ring as feedback quantity adds the square piece, an interior ring left side is detected and is added on the square piece, closed-loop control can be realized, accekeration can be obtained by feedback signal to accelerometer.
Among the present invention, substrate is made by glass, and sputter one deck aluminium oxide is as insulation course thereon, and the material of all the other structures is a metallic nickel, can adopt sacrificial layer technology, by mask, and photoetching, fine processes such as plating are made.Whole accelerometer can integratedly be realized, has saved the technologies such as assembling aligning after the processing, has improved precision.
The present invention is simple in structure, and is highly sensitive, strong shock resistance, and cost is low, can be widely used in fields such as Aero-Space, auto industry, industrial automation and robot, has broad application prospects.
Description of drawings
Fig. 1 is a structural representation of the present invention
Fig. 2 is a stator structure stereographic map of the present invention
Fig. 3 is a stator structure cut-open view of the present invention
Fig. 4 is a stator structure front elevation of the present invention
Fig. 5 detects the quality structure stereographic map for the present invention
Fig. 6 detects the quality structure cut-open view for the present invention
Fig. 7 detects the quality structure front elevation for the present invention
Embodiment
As shown in Figure 1, the present invention includes detection mass 1 and stator 2.
Shown in Fig. 2-4, stator comprises: substrate 3, insulation course 4, following public electrode piece 5, the right detection of outer shroud adds square piece 6, last public electrode piece 7, an outer shroud left side is detected and is added square piece 8, outer shroud stops post 9 right No. one, outer shroud stops post 10 right No. two, outer shroud stops post 11 right No. three, stop post 12 on the outer shroud, outer shroud the first from left number stops post 13, outer shroud the second from left number stops post 14, an outer shroud left side stops post 15 No. three, stop post 16 under the outer shroud, interior ring stops post 17 right No. one, interior ring stops post 18 right No. two, in ring the first from left number stop post 19, in ring the second from left number stop post 20, the right detection of interior ring adds square piece 21, an interior ring left side is detected and is added square piece 22, right flexible brace summer 23, right No. two flexible brace summers 24, right No. three flexible brace summers 25, the first from left number flexible brace summer 26, the second from left number flexible brace summer 27, No. three flexible brace summers 28 in a left side, following public electrode binding-beam 29, last public electrode binding-beam 30, center public electrode 31, the center stops post 32.
A right flexible brace summer 23, right No. two flexible brace summers 24, right No. three flexible brace summers 25, the first from left number flexible brace summer 26, the second from left number flexible brace summer 27, No. three flexible brace summers 28 in a left side distribute on stator 2, these flexible brace summers are square cylinders, distribute ringwise, detect mass 1 and place on the stator 2 by these flexible brace summers supports.
The structural relation of stator 2 is: place insulation course 4 in the substrate 3, on insulation course 4, place all the other structures of stator, center public electrode 31 is positioned over the central authorities of stator 2, the right detection of interior ring adds square piece 21, an interior ring left side is detected and is added the periphery that square piece 22 is positioned over center public electrode 31 ringwise, following public electrode piece 5, the right detection of outer shroud adds square piece 6, last public electrode piece 7, an outer shroud left side is detected and is added the edge that square piece 8 is positioned over stator 2 ringwise, following public electrode binding-beam 29 link center public electrode 31 and following public electrode pieces 5, last public electrode binding-beam 30 link center public electrodes 31 and last public electrode piece 7, right flexible brace summer 23, right No. two flexible brace summers 24, the right detection of ring added square piece 21 and right detection of outer shroud adds between the square piece 6 in right No. three flexible brace summers 25 were positioned over, and exceed outer shroud and stop post 9 right No. one, outer shroud stops post 10 right No. two, outer shroud stops post 11 right No. three, the first from left number flexible brace summer 26, the second from left number flexible brace summer 27, a ring left side was detected and is added square piece 22 and an outer shroud left side and detect and add between the square piece 8 in No. three flexible brace summers 28 in a left side were positioned over, and exceed outer shroud the first from left and number stop post 13, outer shroud the second from left number stops post 14, an outer shroud left side stops post 15 No. three, an outer shroud left side is detected and is added three through holes that evenly distribute on the square piece 8, outer shroud the first from left number stops post 13, outer shroud the second from left number stops post 14, an outer shroud left side stops that post 15 is positioned among the through hole No. three, and exceed the detection of an outer shroud left side and add square piece 8, the right detection of outer shroud adds three through holes that evenly distribute on the square piece 6, outer shroud stops post 9 right No. one, outer shroud stops post 10 right No. two, outer shroud stops that post 11 is positioned among the through hole right No. three, and exceed right detection of outer shroud and add square piece 6, there is a through hole in following public electrode piece 5 central authorities, stop under the outer shroud that post 16 is positioned over wherein, and exceed public electrode piece 5 down, there is a through hole in last public electrode piece 7 central authorities, stop on the outer shroud that post 12 is positioned over wherein, and exceed and go up public electrode piece 7, an interior ring left side is detected and is added evenly two through holes of distribution of square piece 22, in ring the first from left number stop post 19, in ring the second from left number stop that post 20 is positioned over wherein, and a ring left side is detected and is added square piece 22 in exceeding, the right detection of interior ring adds evenly two through holes of distribution of square piece 21, interior ring stops post 17 right No. one, interior ring stops that post 18 is positioned over wherein right No. two, and right detection of ring adds square piece 21 in exceeding, there is a through hole in public electrode 31 central authorities in center, the center stops that post 32 is positioned over wherein, and exceeds center public electrode 31.
Shown in Fig. 5-7, detecting mass 1 comprises: the fan-shaped pole plate 33 in left side, following outer shroud detect pole plate 34, the fan-shaped pole plate 35 in right side, go up outer shroud detection pole plate 36, the first from left pole plate binding-beam 37, the second from left pole plate binding-beam 38, No. three pole plate binding-beams 39 in a left side, the pole plate binding-beam 40 in the right side, right No. two pole plate binding-beams 41, right No. three pole plate binding-beams 42, center sensitivity mass 43, through hole 44.
The structural relation that detects mass 1 is: the fan-shaped pole plate 33 in left side, following outer shroud detects pole plate 34, the fan-shaped pole plate 35 in right side, last outer shroud detects pole plate 36 and is the periphery that an annular is positioned over the responsive mass 43 in center, the fan-shaped pole plate 33 in left side is by the first from left pole plate binding-beam 37, the second from left pole plate binding-beam 38, No. three pole plate binding-beams 39 in a left side connect mutually with the responsive mass 43 in center, the fan-shaped pole plate 35 in right side is by right pole plate binding-beam 40, right No. two pole plate binding-beams 41, right No. three pole plate binding-beams 42 connect mutually with the responsive mass 43 in center, right flexible brace summer 23, right No. two flexible brace summers 24, right No. three flexible brace summers 25, the first from left number flexible brace summer 26, the second from left number flexible brace summer 27, the upper end of No. three flexible brace summers 28 in a left side respectively with right pole plate binding-beam 40, right No. two pole plate binding-beams 41, right No. three pole plate binding-beams 42, the first from left pole plate binding-beam 37, the second from left pole plate binding-beam 38, No. three pole plate binding-beams 39 in a left side contact the fan-shaped pole plate 33 in left side, following outer shroud detects pole plate 34, the fan-shaped pole plate 35 in right side, last outer shroud detects pole plate 36, several through holes 44 distribute on the responsive mass 43 in center.
When the present invention works, stator 2 is fixing, detect the extraneous acceleration of mass 1 perception, interior ring right detect add square piece 21, the detection of an interior ring left side adds square piece 22 and applies high frequency carrier, outer shroud right detect add square piece 6, an outer shroud left side is detected to add and is applied a constant amplitude with same frequency and reversed-phase carrier wave on the square piece 8, following public electrode piece 5, go up public electrode piece 7 and be used for output signal.When the responsive mass 43 in the center of detecting mass 1 is subjected to the acceleration of a sensing stator 2, the outside lateral bending song of flexible brace summer, the responsive mass 43 in center is offset a little displacement to stator 2 directions, and the fan-shaped pole plate 33 in left side, the perk one little displacement round about of the fan-shaped pole plate 35 in right side, thereby following public electrode piece 5 by stator 2, last public electrode piece 7 outputs one amplitude is by the high frequency carrier of the displacement modulation of the responsive mass 43 in center, by preposition amplification, can obtain a DC component that is directly proportional with the displacement size after the filtering, this DC component is loaded into right detection of outer shroud as feedback adds square piece 6, an outer shroud left side is detected and is added on the square piece 8, closed-loop control can be realized, accekeration can be obtained by feedback signal to accelerometer.When the responsive mass 43 in the center of detecting mass 1 is subjected to one dorsad during the acceleration of stator 2, the inside lateral bending song of flexible brace summer, the responsive mass 43 in center stator 2 directions dorsad is offset a little displacement, and the fan-shaped pole plate 33 in left side, the perk one little displacement round about of the fan-shaped pole plate 35 in right side, thereby following public electrode piece 5 by stator 2, last public electrode piece 7 outputs one amplitude is by the high frequency carrier of the responsive mass 43 displacements modulation in center, by preposition amplification, can obtain a DC component that is directly proportional with the displacement size after the filtering, this DC component is loaded into right detection of interior ring as feedback adds square piece 21, an interior ring left side is detected and is added on the square piece 22, closed-loop control can be realized, accekeration can be obtained by feedback signal to accelerometer.
Substrate of the present invention is made by glass, and sputter one deck aluminium oxide is as insulation course thereon, and the material of all the other structures is a metallic nickel, can adopt sacrificial layer technology, by mask, and photoetching, fine processes such as plating are made.Whole accelerometer can integratedly be realized, has saved the technologies such as assembling aligning after the processing, has improved precision.
Advantage of the present invention is to adopt double-layer metal structure to detect linear acceleration, and adds by integral process The worker realizes that simple structure is feasible, the reliability height; Adopt differential capacitance method sense acceleration signal, realize linear Output, dynamic range is big; Realize closed-loop control by feedback, make the sensitive-mass piece remain on settling position, increase Big bandwidth has reduced non-linearly, has improved the performance of system; Through hole on sensitive-mass piece and the pole plate reduces Air squeeze film damping, further reduced non-linear; The employing that stops post has prevented sensitive-mass piece and stator Between contact, avoided the pinning of accelerometer.
Claims (10)
1. a flexible vertical column seesaw type double-layer structural micro-accelerometer comprises and detects mass (1) and stator (2), it is characterized in that:
Described stator (2) comprising: substrate (3), insulation course (4), following public electrode piece (5), the right detection of outer shroud adds square piece (6), last public electrode piece (7), an outer shroud left side is detected and is added square piece (8), outer shroud stops post (9) right No. one, outer shroud stops post (10) right No. two, outer shroud stops post (11) right No. three, stop post (12) on the outer shroud, outer shroud the first from left number stops post (13), outer shroud the second from left number stops post (14), an outer shroud left side stops post (15) No. three, stop post (16) under the outer shroud, interior ring stops post (17) right No. one, interior ring stops post (18) right No. two, in ring the first from left number stop post (19), in ring the second from left number stop post (20), the right detection of interior ring adds square piece (21), an interior ring left side is detected and is added square piece (22), a right flexible brace summer (23), right No. two flexible brace summers (24), right No. three flexible brace summers (25), the first from left number flexible brace summer (26), the second from left number flexible brace summer (27), a left side No. three flexible brace summers (28), following public electrode binding-beam (29), last public electrode binding-beam (30), center public electrode (31), the center stops post (32); Described detection mass (1) comprising: the fan-shaped pole plate in left side (33), following outer shroud detect pole plate (34), the fan-shaped pole plate in right side (35), go up outer shroud detection pole plate (36), the first from left pole plate binding-beam (37), the second from left pole plate binding-beam (38), a left side No. three pole plate binding-beams (39), a right side pole plate binding-beam (40), right No. two pole plate binding-beams (41), right No. three pole plate binding-beams (42), center sensitivity mass (43);
Annexation between the above each parts is as follows: substrate (3) is gone up and is placed insulation course (4), on insulation course (4), place all the other structures of stator (2), center public electrode (31) is positioned over the central authorities of stator (2), the right detection of interior ring adds square piece (21), an interior ring left side is detected and is added the periphery that square piece (22) is positioned over center public electrode (31) ringwise, following public electrode piece (5), the right detection of outer shroud adds square piece (6), last public electrode piece (7), an outer shroud left side is detected and is added the edge that square piece (8) is positioned over stator (2) ringwise, following public electrode binding-beam (29) link center public electrode (31) and following public electrode piece (5), last public electrode binding-beam (30) link center public electrode (31) and last public electrode piece (7), a right flexible brace summer (23), right No. two flexible brace summers (24), the right detection of ring added square piece (21) and the right detection of outer shroud adds between the square piece (6) in right No. three flexible brace summers (25) were positioned over, the first from left number flexible brace summer (26), the second from left number flexible brace summer (27), a ring left side was detected and is added square piece (22) and the detection of an outer shroud left side adds between the square piece (8) in No. three flexible brace summers in a left side (28) were positioned over, an outer shroud left side is detected to add and is distributed with outer shroud the first from left on the square piece (8) and number stops post (13), outer shroud the second from left number stops post (14), an outer shroud left side stops post (15) No. three, outer shroud is right to be detected to add and is distributed with outer shroud on the square piece (6) and stops post (9) right No. one, outer shroud stops post (10) right No. two, outer shroud stops post (11) right No. three, stop under the outer shroud that post (16) is arranged on down on the public electrode piece (5), last public electrode piece (7) is provided with and stops post (12) on the outer shroud, in ring the first from left number stop post (19), in ring the second from left number stop post (20) be arranged in a ring left side detect and add on the square piece (22), interior ring stops post (17) right No. one, the interior right side of encircling stops that post (18) is arranged on the right side detection of interior ring and adds on the square piece (21) for No. two, and the center stops that post (32) is arranged on the center public electrode (31); Left side fan-shaped pole plate (33), following outer shroud detects pole plate (34), the fan-shaped pole plate in right side (35), last outer shroud detects pole plate (36) and is the periphery that an annular is positioned over the responsive mass in center (43), the fan-shaped pole plate in left side (33) is by the first from left pole plate binding-beam (37), the second from left pole plate binding-beam (38), No. three pole plate binding-beams in a left side (39) connect mutually with the responsive mass in center (43), the fan-shaped pole plate in right side (35) is by a right pole plate binding-beam (40), right No. two pole plate binding-beams (41), right No. three pole plate binding-beams (42) connect mutually with the responsive mass in center (43), a right flexible brace summer (23), right No. two flexible brace summers (24), right No. three flexible brace summers (25), the first from left number flexible brace summer (26), the second from left number flexible brace summer (27), the upper end of No. three flexible brace summers in a left side (28) respectively with a right pole plate binding-beam (40), right No. two pole plate binding-beams (41), right No. three pole plate binding-beams (42), the first from left pole plate binding-beam (37), the second from left pole plate binding-beam (38), No. three pole plate binding-beams in a left side (39) contact.
2. flexible vertical column seesaw type double-layer structural micro-accelerometer according to claim 1, it is characterized in that: a described right flexible brace summer (23), right No. two flexible brace summers (24), right No. three flexible brace summers (25), the first from left number flexible brace summer (26), the second from left number flexible brace summer (27), a left side No. three flexible brace summers (28), be distributed on the stator (2), these flexible brace summers are square cylinders, distribute ringwise, detect mass (1) and place on the stator (2) by these flexible brace summers supports.
3. according to claim 1 or 2 described flexible vertical column seesaw type double-layer structural micro-accelerometers, it is characterized in that: a right flexible brace summer (23), right No. two flexible brace summers (24), right No. three flexible brace summers (25) exceed outer shroud and stop that post (9), outer shroud stop that post (10), outer shroud stop post (11) right No. three right No. two right No. one; The first from left number flexible brace summer (26), the second from left number flexible brace summer (27), No. three flexible brace summers in a left side (28) exceed outer shroud the first from left and number stop that post (13), outer shroud the second from left number stop that post (14), an outer shroud left side stop post (15) No. three.
4. flexible vertical column seesaw type double-layer structural micro-accelerometer according to claim 1, it is characterized in that: an outer shroud left side is detected and is added upward even three through holes that distribute of square piece (8), outer shroud the first from left number stops that post (13), outer shroud the second from left number stop that post (14), an outer shroud left side stop that post (15) is positioned among the through hole No. three, and exceeds an outer shroud left side and detect and add square piece (8).
5. flexible vertical column seesaw type double-layer structural micro-accelerometer according to claim 1, it is characterized in that: the right detection of outer shroud adds upward even three through holes that distribute of square piece (6), outer shroud stops that post (9), outer shroud stop that post (10), outer shroud stop that post (11) is positioned among the through hole right No. three right No. two right No. one, and exceeds right detection of outer shroud and add square piece (6).
6. flexible vertical column seesaw type double-layer structural micro-accelerometer according to claim 1 is characterized in that: there is a through hole in following public electrode piece (5) central authorities, stop under the outer shroud that post (16) is positioned over wherein, and exceed public electrode piece (5) down; There is a through hole in last public electrode piece (7) central authorities, stop on the outer shroud that post (12) is positioned over wherein, and exceed upward public electrode piece (7).
7. flexible vertical column seesaw type double-layer structural micro-accelerometer according to claim 1, it is characterized in that: interior ring is right to be detected and adds square piece (21) two through holes that evenly distribute, in ring stop that post (17), interior ring stop that post (18) is positioned over wherein right No. two right No. one, and the right detection of ring adds square piece (21) in exceeding.
8. flexible vertical column seesaw type double-layer structural micro-accelerometer according to claim 1, it is characterized in that: an interior ring left side is detected and is added square piece (22) two through holes that evenly distribute, in ring the first from left number stop that post (19), interior ring the second from left number stop that post (20) is positioned over wherein, and a ring left side is detected and is added square piece (22) in exceeding.
9. flexible vertical column seesaw type double-layer structural micro-accelerometer according to claim 1 is characterized in that: there is a through hole in center public electrode (31) central authorities, and the center stops that post (32) is positioned over wherein, and exceeds center public electrode (31).
10. flexible vertical column seesaw type double-layer structural micro-accelerometer according to claim 1 is characterized in that: the responsive mass in center (43) is gone up several through holes (44) that distribute.
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| CNB2006100296913A CN100401071C (en) | 2006-08-03 | 2006-08-03 | Flexible vertical column seesaw type double-layer structural micro-accelerometer |
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| CNB2006100296913A CN100401071C (en) | 2006-08-03 | 2006-08-03 | Flexible vertical column seesaw type double-layer structural micro-accelerometer |
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| US10161956B2 (en) * | 2016-04-25 | 2018-12-25 | Honeywell International Inc. | Reducing bias in an accelerometer via a pole piece |
| CN108710002B (en) * | 2018-05-08 | 2021-02-23 | 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） | Accelerometer reliability testing method and device and accelerometer for testing |
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| US6196067B1 (en) * | 1998-05-05 | 2001-03-06 | California Institute Of Technology | Silicon micromachined accelerometer/seismometer and method of making the same |
| WO2002041006A2 (en) * | 2000-11-16 | 2002-05-23 | Micma Engineering Ltd. | Silicon capacitive accelerometer |
| CN1477374A (en) * | 2003-07-10 | 2004-02-25 | 上海交通大学 | Magnetic suspension rotor azimuth microgyro |
| CN1687791A (en) * | 2005-06-07 | 2005-10-26 | 中国航天时代电子公司 | Anti-impact quartz flexible accelerometer |
| CN1712894A (en) * | 2005-07-14 | 2005-12-28 | 上海交通大学 | Flexible microgyrorotor and electromagnetic drive and dynamic tune |
| CN1731089A (en) * | 2005-08-11 | 2006-02-08 | 上海交通大学 | Disc micromechanical top based on acoustic levitation |
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| US6196067B1 (en) * | 1998-05-05 | 2001-03-06 | California Institute Of Technology | Silicon micromachined accelerometer/seismometer and method of making the same |
| WO2002041006A2 (en) * | 2000-11-16 | 2002-05-23 | Micma Engineering Ltd. | Silicon capacitive accelerometer |
| CN1477374A (en) * | 2003-07-10 | 2004-02-25 | 上海交通大学 | Magnetic suspension rotor azimuth microgyro |
| CN1687791A (en) * | 2005-06-07 | 2005-10-26 | 中国航天时代电子公司 | Anti-impact quartz flexible accelerometer |
| CN1712894A (en) * | 2005-07-14 | 2005-12-28 | 上海交通大学 | Flexible microgyrorotor and electromagnetic drive and dynamic tune |
| CN1731089A (en) * | 2005-08-11 | 2006-02-08 | 上海交通大学 | Disc micromechanical top based on acoustic levitation |
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