CN201382956Y - Integrated optical waveguide accelerometer - Google Patents
Integrated optical waveguide accelerometer Download PDFInfo
- Publication number
- CN201382956Y CN201382956Y CN200920036711U CN200920036711U CN201382956Y CN 201382956 Y CN201382956 Y CN 201382956Y CN 200920036711 U CN200920036711 U CN 200920036711U CN 200920036711 U CN200920036711 U CN 200920036711U CN 201382956 Y CN201382956 Y CN 201382956Y
- Authority
- CN
- China
- Prior art keywords
- waveguide
- organic polymer
- accelerometer
- micro
- coupling mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Landscapes
- Optical Integrated Circuits (AREA)
Abstract
An integrated optical waveguide accelerometer relates to a resonant integrated optical waveguide accelerometer with a cantilever beam structure, more precisely, a one-chip integrated highly-sensitive accelerometer. The accelerometer comprises an input waveguide, a Mach-Zehnder interferometer with an asymmetric structure, a micro-mechanical vibrating cantilever beam, a bent waveguide, and output waveguide, wherein the input waveguide (1), the Mach-Zehnder interferometer (2) with the asymmetric structure, the micro-mechanical vibrating cantilever beam (3), the short bent waveguide (4), and the output waveguide (5) comprise organic polymer substrates (12), organic polymer waveguide core layers (13) and organic polymer waveguide claddings (14); the micro-mechanical vibrating cantilever beam (3) adopts a dual-beam structure, and is formed by two micro-cantilever beams (16) which are symmetrically distributed in parallel and a mass block (17); one end of each micro-cantilever beam is fixed on a base (11), and the other end thereof is connected with the mass block (17); and the mass block (17) is suspended freely.
Description
Technical field
The utility model belongs to integrated optics and field of sensing technologies, and particularly a kind of resonance type integrated light guide accelerometer of cantilever beam structure more precisely is a kind of single chip integrated highly sensitive accelerometer.
Background technology
Accelerometer is the important testing element of inertial navigation, inertial guidance and control detection equipment.Be that inertial navigation or inertial guidance all are the acceleration of motion of utilizing this characteristic of accelerometer sensitive to come test carrier.At present, accelerometer is to be widely used in aviation, navigation, aerospace, earthquake detection, precise guidance and control.The kind of accelerometer is numerous, comprises pendulous accelerometer, flexure accelerometers, electromagnetic accelerometer, micro electronmechanical (MEMS) accelerometer, optical accelerometer etc.
Optical accelerometer has anti-electromagnetic interference (EMI), high sensitivity and high s/n ratio, and the high numerous advantages of stability are one of mains direction of studying of accelerometer research field in recent years.The detection principle of optical accelerometer is as follows: because the light signal in the sensitive element (mass) is subjected to by the modulation of measuring acceleration, after transmission, reflection or the interference of optical circuit, the pairing optical property of the light signal that photo-detector receives such as light intensity, phase place or resonance frequency change, send into photodetector again, by corresponding demodulation techniques to obtain measurand.The more optical accelerometer of research mainly comprises phase modulation-type and frequency (wavelength) modulation type at present.The phase modulation-type optical accelerometer is the sensing optical element, is subjected to the effect of inertial force to cause transmitting light phase as optical fiber etc. and changes, by phase changing capacity sense acceleration value.This class accelerometer generally adopts Michelson, Mach-Zehnder or method to spread out-optical textures such as Perot cavity, the light intensity change-detection acceleration after interfering by detection signal light and reference light.Its main shortcoming be when the two-beam phase difference between signals hour, light intensity changes not obvious, so its detection sensitivity is not high.Frequency modulation (PFM) type optical accelerometer is development and come on the basis of phase modulation-type, employing has the particular device structure of periodic frequency selection function, as grating, fiber grating, resonant ring etc., utilize the sense acceleration that concerns between resonance frequency and the inertial force, when tested sensitive element produces inertial force or displacement owing to accelerated motion, cause the change in displacement of light path system resonance frequency, obtain accekeration by the horizontal displacement that detects resonance frequency.Further be exaggerated because the subtle change of flashlight phase differential strengthens through multiple-beam interference, so its detection sensitivity is higher.But because resonance line horizontal shift and asymmetric distribution that the influence of factors such as environment temperature disturbance and waveguide birefringence causes can cause the device detection sensitivity obviously to descend.
Constitute from the system of components and parts, the optical sensitive device of present optical accelerometer constitutes mainly to be become by discrete set of devices such as optical fiber, grating, fiber grating, catoptrons with the system of transmission light path, device volume is bigger, technology preparation cost height, and system stability is relatively poor.In addition, optical fibre device is to the temperature variation sensitivity, and the splicing loss between the optical fibre device, polarization effect etc. all can cause tangible influence to the stability and the detection sensitivity of accelerometer.
The optical sensor that develops into of integrated optical device technology provides new developing direction, by micro-nano retrofit technology, various optical components are integrated on the same substrate, connect each discrete function element, can realize further reducing of optical sensor system volume by optical waveguide.In addition, integrated optical device also has numerous advantages such as high stability, high reliability, preparation technology are simplified, optional material is abundanter, meets the Technology Need of development high-precision optical acceleration sensor device.Recent years, the research direction that is called hot topic by organic polymer material as the all-polymer fiber waveguide device of substrate, covering, sandwich layer, the optical waveguide of this structure has the characteristic of temperature-insensitive, simultaneously, because the substrate of device is an organic polymer material, compare with traditional silicon chip, quartz substrate, organic polymer material has that elastic modulus is littler, and the susceptibility of counter stress, strain is higher, and toughness is stronger, advantage such as easy fracture not can be applicable to develop high-precision mechanics sensor.
Summary of the invention
Technical matters: the purpose of this utility model is in order to overcome the weak point of prior art, a kind of integrated light guide accelerometer is proposed, adopt organic polymer optical waveguide to constitute cantilever beam structure, and utilize a kind of brand-new waveguiding structure and detect principle, realize a kind of high-precision monolithic integrated optics accelerometer chip, have the accuracy of detection height, device volume is little, preparation technology is simple, easily realize advantages such as batch process.
Technical scheme: the technical solution of the utility model is achieved in that on structure, the accelerometer that the utility model proposed is to be made of the Mach-Zehnder interferometer of input waveguide, dissymmetrical structure, micro mechanical vibration semi-girder, short curved waveguide, output waveguide, it is characterized in that: the Mach-Zehnder interferometer of input waveguide, dissymmetrical structure, micro mechanical vibration semi-girder, short curved waveguide, output waveguide are formed by organic polymer substrate, organic polymer waveguide sandwich layer, organic polymer waveguide covering; The inner of the one 2 * 2 port direction coupling mechanism connects first shortwave respectively and leads a end with curved waveguide, the inner of the 22 * 2 port direction coupling mechanism connects second shortwave respectively and leads the other end with curved waveguide, lead and second shortwave is connected with phase-modulator between leading at first shortwave, form the Mach one Ceng Deer interferometer of dissymmetrical structure; Input waveguide, short curved waveguide, output waveguide, the one 2 * 2 port direction coupling mechanism, first shortwave are led, phase-modulator, second shortwave is led and the 22 * 2 port direction coupling mechanism all is fixed on the pedestal; The outer end of the one 2 * 2 port direction coupling mechanism connects an end of input waveguide and long curved waveguide respectively, the outer end of the 22 * 2 port direction coupling mechanism connects the other end of output waveguide and long curved waveguide respectively, and long curved waveguide is integrated on the micro mechanical vibration semi-girder; The micro mechanical vibration semi-girder is a twin-spar construction, and micro-cantilever and mass that be symmetrically distributed parallel by two connect and compose, one end of micro-cantilever is fixed on the pedestal, other end quality of connection piece, the mass freedom is unsettled, and plane, organic polymer waveguide sandwich layer place is positioned at the neutral surface top of micro-cantilever.
The micro-cantilever of the accelerometer that the utility model proposed is made up of organic polymer substrate, organic polymer waveguide sandwich layer, organic polymer waveguide covering, wherein the organic polymer waveguide sandwich layer is a rectangular configuration, thickness and width are several micron dimensions, organic polymer waveguide covering and organic polymer substrate width equate, all between 20 to 1000 microns, the organic polymer waveguide cladding thickness is between 10 to 20 microns, and the organic polymer substrate thickness is between 20 microns to 1000 microns.
The detection principle of the accelerometer that the utility model proposed is as follows: the optical signals input waveguide enters the closed optical circuit that is made of the Mach-Zehnder interferometer of dissymmetrical structure and short curved waveguide, and formation multiple-beam interference, optical signals output waveguide after the interference outputs to photo-detector and peripheral testing circuit, light signal is carried out demodulation, change by detecting the resonance frequency light intensity, measure the light signal phase differential that acceleration causes, realize the detection of acceleration.
Beneficial effect: the utility model has following advantage compared with prior art:
1, the accelerometer that the utility model proposed utilizes the integrated optical device process technology, adopt the organic polymer optical waveguide structure of temperature-insensitive to prepare all sensing arrangements such as fiber waveguide device, substrate and micro mechanical vibration semi-girder, can realize that the monolithic of device is integrated.Compare with traditional Fibre Optical Sensor, inorganic integrated optical sensor etc., key technical index such as its elasticity coefficient, detection sensitivity, dynamic range can realize large-scale adjustment, device volume is little, light weight, stable high, preparation technology is simple, and can realize producing obvious reduced device cost in batches.
2, detecting on the principle, compare with present existing phase modulation-type, frequency modulation (PFM) type optical accelerometer, the accelerometer that the present invention proposes changes by detecting the resonance frequency light intensity, measure the light signal phase differential that acceleration causes, realize the detection of acceleration, flashlight is in resonance frequency in the beginning in the test process, has significantly improved detection sensitivity, and has had the advantage that is not subjected to the environment temperature disturbance, not influenced by waveguide birefringence.
Description of drawings
Fig. 1 is the structure vertical view of integrated light guide accelerometer.
The structural representation of Fig. 2 micro mechanical vibration semi-girder.
Fig. 3 is the structural representation of micro-cantilever.
Fig. 4 is the structural representation of micro-cantilever perpendicular to waveguide direction cross section.
Fig. 5 is the structural representation that micro-cantilever is parallel to waveguide direction cross section.
Fig. 6 causes the corresponding output spectrum curve synoptic diagram of out of phase difference by acceleration.
Fig. 7 is the detection sensitivity contrast synoptic diagram of accelerometer.
Embodiment
Below in conjunction with accompanying drawing the technical solution of the utility model is further described.
The structure of the resonance type integrated light guide accelerometer of the cantilever beam structure that the utility model proposed as shown in Figure 1.The passage that constitutes light signal comprises: the Mach-Zehnder interferometer 2 of input waveguide 1, dissymmetrical structure, short curved waveguide 4, output waveguide 5, the Mach-Zehnder interferometer 2 of dissymmetrical structure and short curved waveguide 4, wherein the Mach-Zehnder interferometer 2 of dissymmetrical structure by the one 2 * 2 port direction coupling mechanism 6, shortwave lead 71, phase-modulator 9, shortwave lead 72, long curved waveguide 8 and the 22 * 2 port direction coupling mechanism 10 are formed.Input waveguide 1 in the accelerometer chip, short curved waveguide 4, output waveguide the 5, the one 2 * 2 port direction coupling mechanism 6, shortwave lead 71, phase-modulator 9, shortwave are led the 72 and the 22 * 2 port direction coupling mechanism 10 and all be fixed on the pedestal 11.
Utilize Micrometer-Nanometer Processing Technology that long curved waveguide 8 place area are handled, remove part organic polymer substrate and covering, make micro-cantilever 16 and mass 17, constitute the sensitive element of accelerometer---micro mechanical vibration semi-girder 3 jointly.The structure of micro mechanical vibration semi-girder 3 is as shown in Figure 2: micro mechanical vibration semi-girder 3 is a twin-spar construction, and micro-cantilever 16 and mass 17 that be symmetrically distributed parallel by two constitute, one end of micro mechanical vibration semi-girder 3 is fixed on the pedestal 11, and other end freedom is unsettled.Wherein the structure of micro-cantilever 16 as shown in Figure 3, Figure 4, form by organic polymer substrate 12, organic polymer waveguide sandwich layer 13, organic polymer waveguide covering 14, organic polymer waveguide sandwich layer 13 is a rectangular configuration, thickness and width are several micron dimensions, organic polymer waveguide covering 14 and organic polymer substrate 12 width equate, all between 20 to 1000 microns, organic polymer waveguide covering 14 thickness are between 10 to 20 microns, and organic polymer substrate 12 thickness are between 20 microns to 1000 microns.The plane, waveguide core layer 13 place of long curved waveguide 8 is positioned at neutral surface 15 tops of micro-cantilever 16, as shown in Figure 5.
The transmission path of light signal in accelerometer chip is: input optical signal is the laser signal of single polarization state, enter the Mach-Zehnder interferometer 2 of dissymmetrical structure through input waveguide 1, be divided into the different light signal of two beam powers through the one 2 * 2 port direction coupling mechanism 6, enter shortwave respectively and lead 71 and long curved waveguide 8, the two-beam signal is exported at the 22 * 2 port direction coupling mechanism 10 output terminals, be divided into the two-beam signal once more, enter short curved waveguide 4 and output waveguide 5 respectively.The light signal that enters short curved waveguide 4 forms multiple-beam interference in the closed optical resonator of being made of the Mach-Zehnder interferometer 2 and the short curved waveguide 4 of dissymmetrical structure, the stable output light signal of final formation, the output light signal is through output waveguide 5, enter photo-detector, through photoelectric switching circuit (not marking among the figure) signal is carried out demodulation, change electric signal into, be used for sense acceleration.
The relative light intensity of output waveguide 5 output signals is represented by formula (1):
A＝(1-K)(1-r
0)exp(-2αL) (2)
In the formula,
Be the optical phase difference between 2 liang of arms of Mach-Zehnder interferometer of dissymmetrical structure, k is the coupling ratio of the one 2 * 2 port direction coupling mechanism 6, the 22 * 2 port direction coupling mechanism 10, r
0Be the insertion loss of the Mach-Zehnder interferometer 2 of dissymmetrical structure, α is the loss of resonator cavity waveguide, and L is a cavity length.Fig. 6 is that out of phase is poor
Corresponding chip output spectrum curve.
When system's acceleration was zero, light signal had stable initial phase during by long curved waveguide 8.When there is acceleration in system, the inertial force that mass 17 produces evenly is applied on the micro-cantilever 16, micro-cantilever 16 can produce elastic bending to a certain degree, cause internal stress and strain, cause the effective refractive index of optical waveguide to change, cause transmission phase change in the long curved waveguide 8, thereby cause phase differential
Change, by formula (1)-(3) as can be known, the phase differential that acceleration causes in dynamic range
Linear with the output intensity of resonance frequency.
The design of the accelerometer that the utility model proposes on structural parameters is achieved in that because organic polymer material has negative thermo-optical coeffecient, positive thermal expansivity, therefore can be by selecting the organic polymer material and the waveguiding structure of coupling, realize the optical waveguide of temperature-insensitive, its principle is the known technology in this area, will not repeat at this.Utilize the optical waveguide of temperature-insensitive, utilize this technology to prepare fiber waveguide device and micro mechanical vibration semi-girder 3, can eliminate the detection noise that environmental temperature fluctuation causes.The coupling ratio k parameter designing of the one 2 * 2 port direction coupling mechanism the 6, the 22 * 2 port direction coupling mechanism 10 is 0.1, guarantees that acceleration causes phase differential
During variation, can ignore the resonance frequency drift of resonator cavity.By structural parameters to micro mechanical vibration semi-girder 3, comprise duct width, thickness, the design of substrate width, thickness can make the detection sensitivity of accelerometer and dynamic range adjust on a large scale, satisfies different testing requirements.
When the detection method of the accelerometer that the utility model proposes is achieved in that test, at first resonance frequency is arrived in the frequency modulation (PFM) of input optical signal, and control phase modulator 9, make initial phase difference between 2 liang of arms of Mach-Zehnder interferometer of dissymmetrical structure be positioned at and detect zero point (as shown in Figure 7), when the output terminal relative light intensity is 0.5, be and detect zero point, this moment, acceleration detection sensitivity was the highest.Long curved waveguide 8 sandwich layers are positioned at the top of semi-girder neutral surface 15, produce when being bent downwardly deformation when acceleration causes micro mechanical vibration semi-girder 3 to be subjected to inertial force, and optical waveguide stretches, otherwise shrinks phase differential
Between fluctuation, so this accelerometer testing acceleration size and Orientation simultaneously.
From detecting on the principle and prior art, comprise that phase modulation-type optical accelerometer, frequency modulation (PFM) type optical acceleration compare:
1. cause under the identical situation of phase differential owing to acceleration at elasticity modulus of materials, semi-girder, the detection sensitivity of accelerometer proposed by the invention has improved the several times (see figure 7) than traditional phase modulation-type optical accelerometer (Mach-Zehnder structure).
2. traditional frequency modulation (PFM) type optical acceleration obtains accekeration by the horizontal displacement that detects resonance frequency, and light signal is not to be in resonance frequency all the time, therefore requires resonance line symmetrical fully to guarantee precision.But because resonance line horizontal shift and asymmetric distribution that factors such as environment temperature disturbance and waveguide birefringence cause can cause the device detection sensitivity obviously to descend.The accelerometer that the present invention proposes is when detecting, and light signal is in resonance frequency all the time, and resonance frequency place detection noise is minimum, and not influenced by environment temperature disturbance and waveguide birefringence, remains high sensitivity and high stability.
Claims (2)
1. integrated light guide accelerometer, this accelerometer comprises Mach-Zehnder interferometer (2), micro mechanical vibration semi-girder (3), short curved waveguide (4), the output waveguide (5) of input waveguide (1), dissymmetrical structure, it is characterized in that: the Mach-Zehnder interferometer (2) of input waveguide (1), dissymmetrical structure, micro mechanical vibration semi-girder (3), short curved waveguide (4), output waveguide (5) include organic polymer substrate (12), organic polymer waveguide sandwich layer (13), organic polymer waveguide covering (14); The inner of the one 2 * 2 port direction coupling mechanism (6) connects the end that first shortwave is led (71) and curved waveguide (4) respectively, the inner of the 22 * 2 port direction coupling mechanism (10) connects the other end that second shortwave is led (72) and curved waveguide (4) respectively, lead (71) and second shortwave at first shortwave and lead and be connected with phase-modulator (9) between (72), form the Mach-Zehnder interferometer (2) of dissymmetrical structure; Input waveguide (1), short curved waveguide (4), output waveguide (5), the one 2 * 2 port direction coupling mechanism (6), first shortwave are led (71), phase-modulator (9), second shortwave leads (72) and the 22 * 2 port direction coupling mechanism (10) all is fixed on the pedestal (11); The outer end of the one 2 * 2 port direction coupling mechanism (6) connects an end of input waveguide (1) and long curved waveguide (8) respectively, the outer end of the 22 * 2 port direction coupling mechanism (10) connects the other end of output waveguide (5) and long curved waveguide (8) respectively, and long curved waveguide (8) is integrated on the micro mechanical vibration semi-girder (3); Micro mechanical vibration semi-girder (3) is a twin-spar construction, and micro-cantilever (16) that be symmetrically distributed parallel by two connects and composes with mass (17), one end of micro-cantilever (16) is fixed on the pedestal (11), other end quality of connection piece (17), and mass (17) is free unsettled.
2. integrated light guide accelerometer according to claim 1, it is characterized in that in the micro-cantilever (16), organic polymer waveguide covering (14) is positioned on the organic polymer substrate (12), organic polymer waveguide sandwich layer (13) is arranged in organic polymer waveguide covering (14), wherein organic polymer waveguide sandwich layer (13) is a rectangular configuration, thickness and width are several micron dimensions, organic polymer waveguide covering (14) and organic polymer substrate (12) width equate, all between 20 to 1000 microns, organic polymer waveguide covering (14) thickness is between 10 to 20 microns, and organic polymer substrate (12) thickness is between 20 microns to 1000 microns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920036711U CN201382956Y (en) | 2009-02-23 | 2009-02-23 | Integrated optical waveguide accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200920036711U CN201382956Y (en) | 2009-02-23 | 2009-02-23 | Integrated optical waveguide accelerometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201382956Y true CN201382956Y (en) | 2010-01-13 |
Family
ID=41526428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200920036711U Expired - Fee Related CN201382956Y (en) | 2009-02-23 | 2009-02-23 | Integrated optical waveguide accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201382956Y (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107621674A (en) * | 2017-10-17 | 2018-01-23 | 中北大学 | A kind of flexible optical waveguides of SU 8 applied to accelerometer and preparation method thereof |
| CN108225544A (en) * | 2017-11-27 | 2018-06-29 | 东南大学 | A kind of bilayer composite triangle collapse beam mass block resonator system and its trace detection method |
| CN112240940A (en) * | 2019-07-17 | 2021-01-19 | 霍尼韦尔国际公司 | Opto-mechanical structure with corrugated edge |
| CN113267648A (en) * | 2021-03-26 | 2021-08-17 | 浙江大学 | Hybrid integrated optical accelerometer based on Michelson interference |
| CN113884703A (en) * | 2021-10-22 | 2022-01-04 | 欧梯恩智能科技(苏州)有限公司 | Triaxial fiber accelerometer |
| CN114966110A (en) * | 2022-04-26 | 2022-08-30 | 浙江大学 | non-Hermite singular point optical microcavity acceleration sensor |
-
2009
- 2009-02-23 CN CN200920036711U patent/CN201382956Y/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107621674A (en) * | 2017-10-17 | 2018-01-23 | 中北大学 | A kind of flexible optical waveguides of SU 8 applied to accelerometer and preparation method thereof |
| CN108225544A (en) * | 2017-11-27 | 2018-06-29 | 东南大学 | A kind of bilayer composite triangle collapse beam mass block resonator system and its trace detection method |
| CN108225544B (en) * | 2017-11-27 | 2020-02-18 | 东南大学 | Double-layer multiplexing type triangular folded beam mass block resonance system and trace detection method thereof |
| CN112240940A (en) * | 2019-07-17 | 2021-01-19 | 霍尼韦尔国际公司 | Opto-mechanical structure with corrugated edge |
| CN112240940B (en) * | 2019-07-17 | 2024-05-14 | 霍尼韦尔国际公司 | Opto-mechanical structure with corrugated edges |
| CN113267648A (en) * | 2021-03-26 | 2021-08-17 | 浙江大学 | Hybrid integrated optical accelerometer based on Michelson interference |
| CN113884703A (en) * | 2021-10-22 | 2022-01-04 | 欧梯恩智能科技(苏州)有限公司 | Triaxial fiber accelerometer |
| CN113884703B (en) * | 2021-10-22 | 2024-01-09 | 欧梯恩智能科技(苏州)有限公司 | Triaxial fiber optic accelerometer |
| CN114966110A (en) * | 2022-04-26 | 2022-08-30 | 浙江大学 | non-Hermite singular point optical microcavity acceleration sensor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101482575B (en) | Resonance type integrated light guide accelerometer with cantilever beam structure | |
| Zhang et al. | A review of photonic crystal fiber sensor applications for different physical quantities | |
| CN201382956Y (en) | Integrated optical waveguide accelerometer | |
| Sheikhaleh et al. | An optical MEMS accelerometer based on a two-dimensional photonic crystal add-drop filter | |
| Zhang et al. | Micro-fiber-based FBG sensor for simultaneous measurement of vibration and temperature | |
| Wang et al. | Fabry–Pérot fiber sensor for simultaneous measurement of refractive index and temperature based on an in-fiber ellipsoidal cavity | |
| Sheikhaleh et al. | A proposal for an optical MEMS accelerometer relied on wavelength modulation with one dimensional photonic crystal | |
| Wu et al. | A transverse load sensor with ultra-sensitivity employing Vernier-effect improved parallel-structured fiber-optic Fabry-Perot interferometer | |
| Tabib-Azar et al. | Modern trends in microstructures and integrated optics for communication, sensing, and actuation | |
| Sheikhaleh et al. | Design and analysis of a novel MOEMS gyroscope using an electrostatic comb-drive actuator and an optical sensing system | |
| Dong et al. | High sensitive fiber-optic liquid refractive index tip sensor based on a simple inline hollow glass micro-sphere | |
| Ke et al. | Accelerometer based on all‐fiber Fabry–Pérot interferometer formed by hollow‐core photonic crystal fiber | |
| Wu et al. | MOEMS accelerometer based on microfiber knot resonator | |
| Ran et al. | Design and demonstration of a liquid level fiber sensor based on self-imaging effect | |
| Wang et al. | Wavelength-interrogation Fabry–Perot refractive index sensor based on a sealed in-fiber cavity | |
| CN101403763A (en) | Cantilever beam type accelerometer based on plane annular microcavity | |
| Liu et al. | Ultrasensitive parallel double-FPIs sensor based on Vernier effect and Type II fiber Bragg grating for simultaneous measurement of high temperature and strain | |
| Abbas et al. | Highly sensitive polymer based Fabry-Perot interferometer for temperature sensing | |
| CN115452196A (en) | Device and method for testing high-precision temperature sensitivity coefficient of optical fiber sensing ring | |
| Yang et al. | Highly sensitive micro-opto-electromechanical systems accelerometer based on MIM waveguide wavelength modulation | |
| CN101726628A (en) | Optical micro-mechanics acceleration transducer and method based on optical fiber multiple-mode interference effect | |
| CN104483509B (en) | A kind of multiple-mode interfence optics integrated-type accelerometer | |
| Liu et al. | High-resolution micro force sensing using a microbubble probe resonator | |
| Wang et al. | Femtosecond direct writing of intergrated Mach-Zehnder interferometer with Bragg grating for curvature-temperature discrimination | |
| Balasubramanian et al. | Waveguide bragg grating optical MEMS accelerometer based on circular diaphragm |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100113 Termination date: 20110223 |