CN105300368B - A kind of direct output frequency oscillation gyro of holohedral symmetry decoupling - Google Patents
A kind of direct output frequency oscillation gyro of holohedral symmetry decoupling Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
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Abstract
A kind of direct output frequency oscillation gyro of holohedral symmetry decoupling, the design feature of this gyro are：(1) direct output frequency is used, considerably reduces the loss of signal, realizes faint coriolis effect frequency modulation modulation.(2) full symmetrical configuration is used so that the resonant frequency of driving and sensed-mode is very easy to matching, while can also realize the damping matching of two mode, can reduce and be drifted about caused by fabrication error and variation of ambient temperature.(3) using double frame type decoupling structures, quadrature error can be reduced, improves the signal to noise ratio of gyro.(4) differential resonance structure is used, sensitivity can be increased, suppress most types of common mode disturbances.(5) plane conceptual design, linear cutter or MEMS related process is readily adapted to accommodate, is easy to minimize.
Description
Technical field
The present invention relates to a kind of directly output frequency oscillation gyro, particularly a kind of direct output frequency of holohedral symmetry decoupling
Oscillation gyro structure, belong to the general structure design direction in resonant mode Gyroscope Design field.
Background technology
In recent years, with the development of micro mechanical technology, the cheap small volume of manufacturing price and micromechanics top of good performance
Spiral shell is just turning into the focus of research.Researcher employs serial of methods, such as designed a kind of to improve the performance of micromechanical gyro
New structure, driving and the optimal control of detection circuit, driven-mode and the side such as sensed-mode resonance frequency matches, Vacuum Package
Method.Although these methods can improve sensitivity to a certain degree, the problem of some are new is also brought along while improvement, is such as driven
When dynamic model state and close sensed-mode resonant frequency, mechanical couplings can cause the decline of gyro performance, particularly craft precision not
In the case of height, process deviation makes mechanical couplings more serious；Although Vacuum Package can improve the quality factor of gyro system,
But also reduce long term device job stability while increase technology difficulty and cost of manufacture.It is crucial that they have one
It is all that capacitance signal is so as to demodulate measured signal using the small capacitance change of capacitance detecting that the characteristics of individual common, which is exactly,
A kind of typical faint analog signal, not only it is not easy accurately to detect but also very big by environmental disturbances.Therefore, how can realize
The matching of driven-mode and sensed-mode resonant frequency, and can reduce the coupling between mode, and it is small that measured signal is disturbed degree
Easily detection is the technological difficulties of micromechanical gyro.Therefore, developing one kind can realize that signal easily detects, high sensitivity, in normal pressure
The micro mechanical vibration formula gyro of lower steady operation, it is current micromechanical gyro sensitive structure problem urgently to be resolved hurrily.
The content of the invention
The technology of the present invention solves problem：A kind of overcome the deficiencies in the prior art, there is provided vibration of directly output frequency
Gyro, to improve the output signal antijamming capability of oscillation gyro；A kind of holohedral symmetry frame type decoupling structure is proposed, is shaken with improving
The sensitivity of dynamic gyro.
The technical solution of the present invention：A kind of direct output frequency oscillation gyro of holohedral symmetry decoupling, the gyro knot
Structure is distributed to be overall in holohedral symmetry, including mass, the first driving spring beam, the second driving spring beam, the 3rd driving spring beam,
4 wheel driven dynamic elasticity beam, the first detection spring beam, the second detection spring beam, the 3rd detection spring beam, the 4th detection spring beam, it is interior
Framework, outer framework, the first resonant tuning fork and the second resonant tuning fork；Mass and first driving spring beam, second driving spring beam,
3rd driving spring beam, 4 wheel driven dynamic elasticity beam, inner frame composition driving resonator system, the first driving spring beam, the second driving
Spring beam, the 3rd driving spring beam, 4 wheel driven dynamic elasticity beam are all horizontal positioned, the first driving elasticity as four resilient support
Beam, the second driving spring beam, mass top center is connected to, the 3rd driving spring beam and 4 wheel driven dynamic elasticity beam are connected to matter
Gauge block bottom centre；Outer framework and the first detection spring beam, the second detection spring beam, the 3rd detection spring beam, the 4th detection bullet
Property beam, the first resonant tuning fork and the second resonant tuning fork composition detection resonator system, first detection spring beam, second detection elasticity
Beam, the 3rd detection spring beam, the 4th detection spring beam as four resilient support be all it is horizontal positioned, first detection spring beam,
Second detection spring beam, it is connected at the top of inner frame, the 3rd detection spring beam and the 4th detection spring beam are connected to inner frame bottom
Portion, the first resonant tuning fork and the second resonant tuning fork are placed horizontally at the center of outer framework and inner frame in the x-direction；First resonance sound
Fork and the second resonant tuning fork experience the Coriolis force from frame mechanism transmission by the change of resonant frequency.
The structure design of the gyro is directed to surface manufacturing process, as wire cutting mechanical processing technique or MEMS
The photoetching of structure, etching process, bulk starting material processing are integrally formed, are an entirety between part, are directly linked together, nothing
Detachable part.
The entirety refers to be in x and y directions holohedral symmetry in holohedral symmetry distribution.
The inner frame and outer framework are inside and outside double framework decoupling-structures.
The mass block structure is in " work " type, and the structure of inner frame is " Lv " type in folded form.
First resonant tuning fork and the second resonant tuning fork form a pair of differential resonant body, in one resonance sound of synchronization
When the resonant frequency of fork increases, another resonant frequency reduces.
Axial force of the present invention using frame mechanism by Coriolis force transmission for resonant tuning fork.First resonant tuning fork and
Two resonant tuning forks are detection resonator system, change the natural angular frequency of resonance beam, by humorous the Coriolis force alternation of alternation
Shake the self oscillatory system of tuning fork, and resonant tuning fork can track the change of own nature angular frequency point.The frequency quantity of output signal
It is exactly the natural angular frequency size of resonant tuning fork itself.Because resonant tuning fork natural angular frequency is linear with Coriolis force size
Relation, the frequency can for detecting output signal calculate the size of angular speed external applied load.
The operation principle of the present invention：Produced when driving resonator system (spring beam mass) to be in resonant condition in y directions
The speed of a raw alternation.When total is by an angular speed load in the z-direction, x directions will produce accordingly
The Corioli's acceleration of one alternation so that detection resonator system produces the vibration of an alternation in x directions.This vibration passes through inspection
Acoustic fork changes the axial stress of two resonant tuning forks periodically, then the corresponding generating period of the resonant frequency of two resonant tuning forks
The change of property.Two resonant tuning forks use differential versions, and the displacement of the difference representation quality block of both resonant frequencies in the x direction is drawn
The size of the resonant tuning fork axial stress risen.The change peak-to-peak value of two resonant tuning fork resonant frequency difference values of detection just detects
The oscillation intensity of mass in the x direction, carried so as to which the rotational angular velocity in z directions can be calculated according to Corioli's acceleration theorem
Lotus size.
The present invention compared with prior art the advantages of：
(1) conventional oscillation gyro belongs to amplitude amount detection scheme.Holohedral symmetry decoupling-structure proposed by the present invention it is straight
Output frequency oscillation gyro is connect, because its detection means thoroughly realizes direct output frequency, it may be said that be a kind of novel, true
Digitlization gyro in positive meaning, realize once sensitive and final sensing unit full rate amount and export, by faint Coriolis
Effect realizes frequency modulation modulation, and FM signal output in a manner of resonance.Due to the stability of FM signal and anti-interference
Ability, stability, sensitivity and the measurement accuracy of sensor are improved, and output signal can also be realized easily with meter
The interface of calculation machine is without extra modulation demodulator circuit.
(2) mass is designed to " work " font, and inner frame is designed to folded form i.e. " Lv " type, both ensures holohedral symmetry, and can
Reduce the overall dimensions of gyro.
(3) full symmetrical configuration is used so that the resonant frequency of driving and sensed-mode is very easy to matching, while also can be real
The damping matching of existing two mode, and reduce and drifted about caused by fabrication error and variation of ambient temperature, improve gyro
Sensitivity.
(4) double frame type decoupling structures, can reduce quadrature error, improve the signal to noise ratio of gyro.
(5) two resonant tuning forks are stretched for one in synchronization, and another is compressed, and the difference of output frequency represents sensing
Device exports.Differential rate-adaptive pacemaker mode makes the antijamming capability of sensor be further strengthened, and having the ability, it is most of to exclude
Acceleration noise and other directions angular speed load disturb, sensitivity can be increased.
Brief description of the drawings
Fig. 1 is a kind of direct output frequency oscillation gyro structural plan schematic diagram of holohedral symmetry decoupling of the present invention；
Fig. 2 is a kind of direct output frequency oscillation gyro structural upright schematic diagram of holohedral symmetry decoupling of the present invention.
Embodiment
The design feature of gyro of the present invention is：(1) direct output frequency is used, considerably reduces the loss of signal, it is real
Existing faint coriolis effect frequency modulation modulation.(2) full symmetrical configuration is used so that the resonant frequency of driving and sensed-mode is held very much
Easily matching, while the damping matching of two mode can be also realized, it can reduce because fabrication error and variation of ambient temperature cause
Drift.(3) using double frame type decoupling structures, quadrature error can be reduced, improves the signal to noise ratio of gyro.(4) using differential
Resonance structure, sensitivity can be increased, suppress most types of common mode disturbances.(5) plane conceptual design, it is readily adapted to accommodate line and cuts
Processing or MEMS related process are cut, is easy to minimize.
It is described in detail below in conjunction with the accompanying drawings.
As shown in figure 1, the oscillation gyro structure of the direct output frequency of the present invention, including mass 1, the first driving elasticity
Beam 2, second drives spring beam the 3, the 3rd to drive spring beam 4,4 wheel driven dynamic elasticity beam 5, first to detect spring beam 6, second and detect
Spring beam the 7, the 3rd detects spring beam the 8, the 4th and detects spring beam 9, inner frame 10, outer framework 11, the first resonant tuning fork 12 and the
Two resonant tuning forks 13；Mass 1 and first drives spring beam 2, second to drive spring beam the 3, the 3rd to drive spring beam 4,4 wheel driven
Dynamic elasticity beam 5, inner frame 10 composition driving resonator system, four resilient support be all it is horizontal positioned, first driving spring beam 2,
Second driving spring beam 3, the top center of mass 1 is connected to, the 3rd driving spring beam 4 and 4 wheel driven dynamic elasticity beam 5 are connected to
The bottom centre of mass 1；Outer framework 11 and first detects spring beam 6, second and detects spring beam 7, the 3rd detection spring beam 8, the
Four detection spring beams 9, the first resonant tuning fork 12 and the second resonant tuning fork 13 composition detection resonator system, four resilient support are all
Horizontal positioned, the first detection spring beam 6, second detects spring beam 7, is connected to the top of inner frame 10, the 3rd detection He of spring beam 8
4th detection spring beam 9 is connected to the bottom of inner frame 10, and level is put in the x-direction for the first resonant tuning fork 12 and the second resonant tuning fork 13
It is placed in the center of outer framework 11 and inner frame 10；Overall structure is distributed in holohedral symmetry；First resonant tuning fork 12 and the second resonance sound
Fork 13 experiences the Coriolis force from frame mechanism transmission by the change of resonant frequency.
Described structure design is directed to surface manufacturing process, as wire cutting mechanical processing technique or MEMS structure
Photoetching, etching process, bulk starting material processing it is integrally formed, be an entirety between part, be directly linked together, without removable
Unload part.
The first driving spring beam 2 and second of the present invention drives spring beam 3 symmetrically and in the x-direction, the 3rd drives spring beam 4
With 4 wheel driven dynamic elasticity beam 5 symmetrically and in the x-direction；Four detection spring beams are in the y-direction；First resonant tuning fork 12 and the second resonance
Tuning fork symmetrical 13 is symmetrical, positioned at the center of inner frame and outer framework, and in the x-direction；Both sides driving is symmetrical with testing agency,
Operation principle is identical.
First resonant tuning fork 12 and the detection resonator system of the second resonant tuning fork 13 its size design cause load-less condition
Under resonant frequency be driving more than 10 times of resonator system resonant frequency.For with ensure resonant tuning fork resonant frequency to drive it is humorous
Alternation axial stress caused by vibrating system realizes good tracking, and the first resonant tuning fork 12 and the second resonant tuning fork 13 are formed a pair
Differential resonant body, when the resonant frequency of one resonant tuning fork of synchronization increases, another resonant frequency reduces, by sensor
Sensitivity substantially increase antijamming capability of the sensor to common mode disturbances while double.
In a word, the present invention uses frequency modulation(PFM) means, considerably reduces the loss of signal, realizes that faint coriolis effect is adjusted
Frequently, antijamming capability is improved；Mass is designed using " work " font, and inner frame is designed using folded form, both ensures holohedral symmetry,
And can reduces the overall dimensions of gyro；Using full symmetrical configuration so that very easy of the resonant frequency of driving and sensed-mode
Match somebody with somebody, while can also realize the damping matching of two mode, and reduce caused by fabrication error and variation of ambient temperature
Drift, improve the sensitivity of gyro；Using double frame type decoupling structure designs, quadrature error can be reduced, improves the letter of gyro
Make an uproar ratio；Two resonant tuning forks use differential resonance structure, can suppress most types of common mode disturbances；Set using plane scheme
Meter, is readily adapted to accommodate linear cutter or MEMS related process, and be easy to minimize.
The content not being described in detail in description of the invention belongs to prior art known to professional and technical personnel in the field.
Described above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (6)
- A kind of 1. direct output frequency oscillation gyro of holohedral symmetry decoupling, it is characterised in that：The structure of the gyro is that entirety is in Holohedral symmetry is distributed；Including mass (1), the first driving spring beam (2), the second driving spring beam (3), the 3rd driving spring beam (4), 4 wheel driven dynamic elasticity beam (5), first detection spring beam (6), second detection spring beam (7), the 3rd detection spring beam (8), 4th detection spring beam (9), inner frame (10), outer framework (11), the first resonant tuning fork (12) and the second resonant tuning fork (13)；Matter Gauge block (1) and the first driving spring beam (2), the second driving spring beam (3), the 3rd driving spring beam (4), 4 wheel driven dynamic elasticity beam (5), inner frame (10) composition driving resonator system, the first driving spring beam (2), the second driving spring beam (3), the 3rd driving bullet Property beam (4) and 4 wheel driven dynamic elasticity beam (5) as four resilient support be all it is horizontal positioned, first driving spring beam (2), second Driving spring beam (3) is connected to mass (1) top center, the 3rd driving spring beam (4) and 4 wheel driven dynamic elasticity beam (5) connection In mass (1) bottom centre；Outer framework (11) and the first detection spring beam (6), the second detection spring beam (7), the 3rd detection Spring beam (8), the 4th detection spring beam (9), the first resonant tuning fork (12) and the second resonant tuning fork (13) composition detection resonance system System, the first detection spring beam (6), the second detection spring beam (7), the 3rd detection spring beam (8), the 4th detection spring beam (9) are made It is all horizontal positioned for four resilient support, the first detection spring beam (6), the second detection spring beam (7) are connected to inner frame (10) top, the 3rd detection spring beam (8) and the 4th detection spring beam (9) are connected to inner frame (10) bottom, the first resonance sound Fork (12) and the second resonant tuning fork (13) are placed horizontally at the center of outer framework (11) and inner frame (10) in the x-direction；First is humorous Shake the Coriolis inertial of tuning fork (12) and the second resonant tuning fork (13) by the change impression of resonant frequency from frame mechanism transmission Power.
- 2. the direct output frequency oscillation gyro of holohedral symmetry decoupling according to claim 1, it is characterised in that：The gyro Structure design be directed to wire cutting mechanical processing technique or MEMS bulk silicon processes, as wire cutting be machined work The photoetching of skill or MEMS structure, etching process, bulk starting material processing are integrally formed, are an entirety between part, directly connect It is connected together, without detachable part.
- 3. the direct output frequency oscillation gyro of holohedral symmetry decoupling according to claim 1, it is characterised in that：The entirety Refer to be in x and y directions holohedral symmetry in holohedral symmetry distribution.
- 4. the direct output frequency oscillation gyro of holohedral symmetry decoupling according to claim 1, it is characterised in that：The inside casing Frame (10) and outer framework (11) are inside and outside double framework decoupling-structures.
- 5. the direct output frequency oscillation gyro of holohedral symmetry decoupling according to claim 1, it is characterised in that：The quality Block (1) structure is in " work " type, and the structure of inner frame (10) is in folded form.
- 6. the direct output frequency oscillation gyro of holohedral symmetry decoupling according to claim 1, it is characterised in that：Described first Resonant tuning fork (12) and the second resonant tuning fork (13) form a pair of differential resonant body, in the resonance of one resonant tuning fork of synchronization When frequency increases, another resonant frequency reduces.
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| CN109374927A (en) * | 2018-11-29 | 2019-02-22 | 中国矿业大学(北京) | A kind of direct output frequency accelerometer of holohedral symmetry decoupling |
| WO2020258176A1 (en) * | 2019-06-27 | 2020-12-30 | 瑞声声学科技(深圳)有限公司 | Differential resonator and mems sensor |
| CN110514188B (en) * | 2019-09-03 | 2021-01-26 | 深迪半导体(上海)有限公司 | Gyroscope and method for correcting quadrature error of gyroscope by process |
| CN112284368A (en) * | 2020-09-21 | 2021-01-29 | 北京航天控制仪器研究所 | Fully-differential high-precision X-axis silicon micro-gyroscope |
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