CN205066783U - High resolution and wide dynamic range's MEMS resonant mode electric charge sensor - Google Patents
High resolution and wide dynamic range's MEMS resonant mode electric charge sensor Download PDFInfo
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- CN205066783U CN205066783U CN201520690372.1U CN201520690372U CN205066783U CN 205066783 U CN205066783 U CN 205066783U CN 201520690372 U CN201520690372 U CN 201520690372U CN 205066783 U CN205066783 U CN 205066783U
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- electric charge
- microdrive
- pole plate
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- mems resonant
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Abstract
The utility model discloses a high resolution and wide dynamic range's MEMS resonant mode electric charge sensor. It includes micro -resonator unit, flexible little lever, four modules of electric charge input polar plate and microdrive, and micro -resonator unit one end is fixed, and the other end links to each other with the little lever of flexibility, forms the fixed capacity of low -capacitance value between flexible little lever and electric charge input polar plate, forms the control capacittance between microdrive and electric charge input polar plate, the control capacittance removal of passing through the microdrive realize that the removal part of microdrive and micro -resonator unit are altogether. Under the condition of input electric charge amount variation in size, change the worth size of control capacittance through feedback control to make to remain the equitable electrical potential difference of size throughout between electric charge input polar plate and the flexible little lever, when guaranteeing micro -resonator unit output signal intensity, avoided the damage of overtension to the device, realized high resolution and wide dynamic range's charge measurement.
Description
Technical field
The utility model belongs to the sensor and actuator field in MEMS (micro electro mechanical system) (MEMS) technical field, particularly relates to the MEMS resonant formula charge sensor of a kind of high resolving power and wide dynamic range.
Background technology
Charge sensor plays huge effect in scientific research, commercial production and daily life, the such as speed of charge sensor usually for checking biochemical reaction to occur in biomedical sector, in aerospace field, be then usually used to sense radiation intensity, also have in the mobile phone even used every day at us and use charge sensor to information about power obtaining battery etc.In the eurypalynous charge sensor of crowd, MEMS resonant formula charge sensor is little with its volume, precision is high, compatible by force etc. the advantage of CMOS occupies a very important part in market.
The study hotspot of current resonant transducer mainly concentrates on the accuracy of detection how improving device and these the two pieces of fields of sensing range expanding device.Can find according to theoretical research that for the former the resolution of the sensor of the type is mainly determined by the character of material itself and width two factors of input electrode.But consider the practical problems of processing and application aspect, in Realism Design and production run, often adopt the method for the width reducing input electrode to obtain higher resolution.
But resolution also brings problems while improving, such as range ability reduces, voltage across poles raises etc.For this problem, product does not on the market have good solution to this at present, needs a kind of MEMS resonant formula charge sensor with high resolving power and wide dynamic range badly.
Summary of the invention
In order to obtain higher resolution and wider measurement range simultaneously, the utility model provides the MEMS resonant formula charge sensor of a kind of high resolving power and wide dynamic range.
The utility model solves the technical scheme that its technical matters adopts:
A kind of MEMS resonant formula charge sensor with high resolving power and wide dynamic range, double-ended tuning fork resonator one end is connected with resonator stiff end, and be coupled with drive electrode, induction electrode, the other end is connected with flexible lever arm by flexible steel microtube output terminal, flexible lever arm end both-side ends is equipped with flexible steel microtube input end, and flexible steel microtube fulcrum is arranged on flexible lever arm; Electric charge input pole plate side is coupled with flexible steel microtube input end and forms fixed capacity; Microdrive moving part side and electric charge input pole plate and are coupled and form control capacittance, opposite side is provided with fixed electorde, both sides, middle part are equipped with comb teeth-shaped structure, and be coupled with driving comb, driving comb is connected with fixed fingers electrode, the comb both sides of microdrive moving part are equipped with brace summer, and the brace summer near electric charge input pole plate side is provided with brace summer stiff end.
As preferably, double-ended tuning fork resonator is upper and lower two I shape unitized constructions, and described drive electrode (2) is arranged at double-ended tuning fork resonator both sides respectively, and induction electrode is arranged in four cavitys of two I-shaped structures respectively.
As preferably, the C-shaped structure of electric charge input pole plate, its both-side ends is relative with flexible steel microtube input end, and electric charge inputs on pole plate and connects input electrode.
As preferably, it is that comb teeth-shaped is coupled that microdrive moving part side and electric charge input pole plate.
As preferably, MEMS resonant formula charge sensor material is monocrystalline silicon or polysilicon.
The beneficial effects of the utility model are that this sensor is by reducing the method for the width of input electrode, microsensor is made to obtain higher resolution, simultaneously coupling capacitance between micrometric displacement topworks and input electrode, the size adjusting voltage across poles by regulating the size of this electric capacity improves the too high impact of the voltage across poles that brings to make up resolution.Also have structure simple, it is convenient to control, and easily detects the feature of output signal simultaneously.
Accompanying drawing explanation
Fig. 1 is the perspective view of the MEMS resonant formula charge sensor of high resolving power and wide dynamic range;
Fig. 2 is the planar structure schematic diagram of the MEMS resonant formula charge sensor of high resolving power and wide dynamic range;
Fig. 3 is brace summer alternate configurations schematic diagram of the present utility model;
Fig. 4 is electric charge of the present utility model input equivalent circuit theory;
Fig. 5 is circuit connection diagram of the present utility model;
Fig. 6 is control block diagram of the present utility model;
Fig. 7 is measurement procedure figure of the present utility model.
In figure: resonator stiff end 1, drive electrode 2, induction electrode 3, double-ended tuning fork resonator 4, flexible steel microtube output terminal 5, flexible steel microtube fulcrum 6, flexible steel microtube input end 7, fixed capacity 8, electric charge input pole plate 9, control capacittance 10, brace summer 11, fixed fingers electrode 12, microdrive moving part 13, driving comb 14, fixed electorde 15, flexible lever arm 16 and brace summer stiff end 17.
Embodiment
For making the purpose of this utility model, technical scheme and advantage more clear, below in conjunction with accompanying drawing, the utility model is further described.If do not carry out in following preferred implementation limiting or outside conflict, all can combining.
As illustrated in fig. 1 and 2, there is a MEMS resonant formula charge sensor for high resolving power and wide dynamic range, comprising: resonator stiff end 1, drive electrode 2, induction electrode 3, double-ended tuning fork resonator 4, flexible steel microtube output terminal 5, flexible steel microtube fulcrum 6, flexible steel microtube input end 7, fixed capacity 8, electric charge input pole plate 9, control capacittance 10, brace summer 11, fixed fingers electrode 12, microdrive moving part 13, driving comb 14, fixed electorde 15, flexible lever arm 16 and brace summer stiff end 17.Sensor of the present utility model, by applying the driving voltage of certain frequency on drive electrode 2, makes double-ended tuning fork resonator 4 produce the resonance of certain frequency, in order to detect electric charge.
Double-ended tuning fork resonator 4 one end is connected with resonator stiff end 1, and be coupled with drive electrode 2, induction electrode 3, the other end is connected with flexible lever arm 16 by flexible steel microtube output terminal 5, flexible lever arm 16 end both-side ends is equipped with flexible steel microtube input end 7, and flexible steel microtube fulcrum 6 is arranged on flexible lever arm 16; Electric charge input pole plate 9 side is coupled with flexible steel microtube input end 7 and forms fixed capacity 8.Wherein flexible lever arm 16 is arranged symmetrically with, and the power produced along flexible lever arm direction of cancelling out each other, flexible lever is for amplifying the electrostatic force caused by electric charge input.When input charge, owing to being subject to the effect of electrostatic force, flexible steel microtube input end 7 place inputs a power, passes to micro-resonator by after the amplification of lever.
Microdrive moving part 13 side and electric charge input pole plate 9 and are coupled and form control capacittance 10, opposite side is provided with fixed electorde 15, both sides, middle part are equipped with comb teeth-shaped structure, and be coupled with driving comb 14, driving comb 14 is connected with fixed fingers electrode 12, the comb both sides of microdrive moving part 13 are equipped with brace summer 11, and the brace summer 11 near electric charge input pole plate 9 side is provided with brace summer stiff end 17.When fixed fingers electrode 12 inputs a certain size voltage, certain electrostatic force can be produced and formed with brace summer 11 between microdrive moving part 13 and driving comb 14 and balance, produce certain displacement, and then change the size of control capacittance 10.Brace summer 11 near electric charge input pole plate 9 side can have multiple implementation, and except the scheme shown in Fig. 1 and Fig. 2, A, B are as shown in Figure 3 another two kinds of modes.
As a kind of preferred implementation of double-ended tuning fork resonator 4, double-ended tuning fork resonator 4 is in upper and lower two I shape unitized constructions, described drive electrode 2 is arranged at double-ended tuning fork resonator 4 both sides respectively, and induction electrode 3 is arranged in four cavitys of two I-shaped structures respectively.
As a kind of preferred implementation of electric charge input pole plate 9, the C-shaped structure of electric charge input pole plate 9, its both-side ends is relative with flexible steel microtube input end 7, and electric charge input pole plate 9 connects input electrode.
As a kind of preferred implementation, microdrive moving part 13 side and electric charge input pole plate 9 and are coupled in comb teeth-shaped.
As a kind of preferred implementation, MEMS resonant formula charge sensor material is monocrystalline silicon or polysilicon.
The equivalent circuit theory of sensor:
As shown in Figure 4, device electric charge input end equivalent electrical circuit port, wherein 8 is fixed capacity, and 10 is control capacittance.The quantity of electric charge one timing accepted when device, can think equivalent capacity 8 with on 10 with electric charge sum be the same, the voltage difference now on adjustment fixed fingers electrode 12, can change the size of control capacittance 10, thus the voltage of change device inside.Because control voltage and capacitance show relation one to one in an experiment, so now the quantity of electric charge can be obtained by certain calculating.
The control method of sensor:
1) according to the connecting circuit of circuit connecting mode shown in Fig. 5.
2) according to block diagram shown in Fig. 6, control system is built.Wherein resonant circuit m can catch and follow the tracks of the natural frequency of device, the current signal exported becomes after voltage signal filters high frequency spurs by wave filter through trans-impedance amplifier e and is input in single-chip microcomputer i by signal, single-chip microcomputer obtains the frequency of input, contrast with standard bands, and control to export scale-of-two rightly and be converted to the fixed fingers electrode 12 of voltage signal by MEMS charge sensor c to adjust the CHARGE DISTRIBUTION of charge sensor inside by DACk, the voltage making sensor produce and the resonance frequency of output are all a suitable level.
3) measurement procedure as shown in Figure 7.The first step: connect according to above-mentioned requirements completion system; Second step: need release electric charge by control capacittance 10 maximal value; 3rd step: add electric charge to be measured, system makes the resonance frequency of intrasystem voltage and output all be in suitable scope by the size of closed-loop control control capacittance 10; 4th step: the frequency export charge sensor and the capacitance of current control capacittance 10 can obtain the required quantity of electric charge measured through converting.
Use a charge detection method for described MEMS resonant formula charge sensor, comprise the steps:
The input of resonator stiff end 1, flexible steel microtube fulcrum 6, electric charge pole plate 9, fixed fingers electrode 12, brace summer stiff end 17 and fixed electorde 15 are fixed on substrate; Resonator stiff end 1 and fixed electorde 15 ground connection; DC offset voltage is connected with drive electrode 2 with alternating current drive signal, vibrates at the resonant frequency fx to drive double-ended tuning fork resonator 4; Electric charge to be measured inputs pole plate 9 by electric charge and inputs; Induced signal is exported by induction electrode 3; Control voltage is inputted by fixed fingers electrode 12, for controlling the position of microdrive moving part 13;
When electric charge is input to electric charge input pole plate 9, between fixed capacity 8 and control capacittance 10, forms electric potential difference, according to formula V=Q/C, change the size of control capacittance 10, flexible steel microtube input end 7 and electric charge can be changed and input electric potential difference between pole plate 9.
The initial stage of measuring inputs maximum voltage at fixed fingers electrode 12 place, control capacittance 10 is made to be in maximal value state, by electric charge input charge input pole plate 9 to be measured, the voltage produced in device is minimum, again by the control voltage at adjustment fixed fingers electrode 12 place, the electric potential difference that flexible steel microtube input end 7 and electric charge are inputted between pole plate 9 is in preset value, thus obtains the induced signal of sufficient intensity.
Sensor innovative point described in the utility model be can the range of dynamic measurement of adjusting device to obtain under equal conditions higher measuring accuracy.The structured material of described charge sensor is monocrystalline silicon or polysilicon, can based on multiple processing technology, as utilized SOI(SilicononInsulator) wafer as substrate, a wafer completes the structural sheet of charge sensor, reduce production cost, Making programme is simple.
Claims (5)
1. the MEMS resonant formula charge sensor of a high resolving power and wide dynamic range, it is characterized in that, double-ended tuning fork resonator (4) one end is connected with resonator stiff end (1), and be coupled with drive electrode (2), induction electrode (3), the other end is connected with flexible lever arm (16) by flexible steel microtube output terminal (5), flexible lever arm (16) end both-side ends is equipped with flexible steel microtube input end (7), and flexible steel microtube fulcrum (6) is arranged on flexible lever arm (16); Electric charge input pole plate (9) side is coupled with flexible steel microtube input end (7) and forms fixed capacity (8); Microdrive moving part (13) side and electric charge input pole plate (9) and are coupled and form control capacittance (10), opposite side is provided with fixed electorde (15), both sides, middle part are equipped with comb teeth-shaped structure, and be coupled with driving comb (14), driving comb (14) is connected with fixed fingers electrode (12), the comb both sides of microdrive moving part (13) are equipped with brace summer (11), and the brace summer (11) near electric charge input pole plate (9) side is provided with brace summer stiff end (17).
2. MEMS resonant formula charge sensor as claimed in claim 1, it is characterized in that, double-ended tuning fork resonator (4) is in upper and lower two I shape unitized constructions, described drive electrode (2) is arranged at double-ended tuning fork resonator (4) both sides respectively, and induction electrode (3) is arranged in four cavitys of two I-shaped structures respectively.
3. MEMS resonant formula charge sensor as claimed in claim 1, is characterized in that, electric charge input pole plate (9) C-shaped structure, its both-side ends is relative with flexible steel microtube input end (7), and electric charge input pole plate (9) connects input electrode.
4. MEMS resonant formula charge sensor as claimed in claim 1, it is characterized in that, microdrive moving part (13) side and electric charge input pole plate (9) and are coupled in comb teeth-shaped.
5. MEMS resonant formula charge sensor as claimed in claim 1, it is characterized in that, MEMS resonant formula charge sensor material is monocrystalline silicon or polysilicon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520690372.1U CN205066783U (en) | 2015-09-08 | 2015-09-08 | High resolution and wide dynamic range's MEMS resonant mode electric charge sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520690372.1U CN205066783U (en) | 2015-09-08 | 2015-09-08 | High resolution and wide dynamic range's MEMS resonant mode electric charge sensor |
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| CN205066783U true CN205066783U (en) | 2016-03-02 |
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| CN201520690372.1U Withdrawn - After Issue CN205066783U (en) | 2015-09-08 | 2015-09-08 | High resolution and wide dynamic range's MEMS resonant mode electric charge sensor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105043422A (en) * | 2015-09-08 | 2015-11-11 | 浙江大学 | MEMS resonant charge sensor with high resolution and wide dynamic range and detection method |
| CN110940866A (en) * | 2019-11-29 | 2020-03-31 | 中国科学院电子学研究所 | Sensitivity adjustable resonance miniature electric field sensor |
-
2015
- 2015-09-08 CN CN201520690372.1U patent/CN205066783U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105043422A (en) * | 2015-09-08 | 2015-11-11 | 浙江大学 | MEMS resonant charge sensor with high resolution and wide dynamic range and detection method |
| CN105043422B (en) * | 2015-09-08 | 2017-10-27 | 浙江大学 | The MEMS resonant formula charge sensor and detection method of high-resolution and wide dynamic range |
| CN110940866A (en) * | 2019-11-29 | 2020-03-31 | 中国科学院电子学研究所 | Sensitivity adjustable resonance miniature electric field sensor |
| CN110940866B (en) * | 2019-11-29 | 2020-11-20 | 中国科学院电子学研究所 | Sensitivity adjustable resonance miniature electric field sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160302 Effective date of abandoning: 20171027 |