CN201965150U - Biax integration full decoupling micro-silicon resonant type accelerometer - Google Patents
Biax integration full decoupling micro-silicon resonant type accelerometer Download PDFInfo
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- CN201965150U CN201965150U CN 201120047949 CN201120047949U CN201965150U CN 201965150 U CN201965150 U CN 201965150U CN 201120047949 CN201120047949 CN 201120047949 CN 201120047949 U CN201120047949 U CN 201120047949U CN 201965150 U CN201965150 U CN 201965150U
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Abstract
The utility model discloses a biax integration full decoupling micro-silicon resonant type accelerometer; the accelerometer comprises an upper layer micro-accelerometer structure and a lower layer glass substrate; the micro-accelerometer structure is bonded on the glass substrate; the glass substrate is provided with a signal wire; an electrode on the micro-accelerometer is connected with the corresponding signal wire; and the micro-accelerometer structure comprises a mass block and four identical resonator substructures. The accelerator adopts frequency detection; as two detection axes are fully decoupled and symmetrically arranged, the accelerometer has simple and compact structure, small volume and high precision.
Description
Technical field
The utility model belongs to microelectromechanical systems and micro-inertia measuring technical field, particularly a kind of silicon micro-resonance type accelerometer.
Background technology
Silicon micro accerometer has that volume is little, in light weight, low-cost, low energy consumption, high reliability, be easy to digitizing, can satisfy characteristics such as severe environment applications, and important military value and wide application prospect are arranged.The most of capacitance detecting mode that adopts of silicon micro accerometer, this detection mode has temperature and floats advantages such as little, highly sensitive, good reliability and stability is better, but along with greatly dwindling of silicon micro accerometer physical dimension, the sensitivity and the resolution of instrument reduce greatly, and the capacitance detecting mode is subjected to the influence of ghost effect, physical construction noise, circuit noise etc. bigger, substantially, reached the limit of detectability, it is very big further to increase substantially the measuring accuracy difficulty.
Silicon micro-resonance type accelerometer is a kind of high-precision micro accelerometer.Be different from general capacitance detecting formula accelerometer, the silicon resonance type accelerometer will be converted to the frequency change of resonator by measuring acceleration, direct output digital signal has advantages such as sensitivity and resolution height, wide dynamic range, antijamming capability are strong, good stability, convenient signal treatment.
From last century end, there is how tame research institution just to begin the research of silicon micro-resonance type accelerometer both at home and abroad.A kind of silicon resonance type accelerometer based on the MEMS system has been researched and developed in U.S. Draper laboratory 2005, and stability has reached the ppm/ug magnitude, can satisfy the demand of inert stage navigational system and strategic missile navigation.But, what present most of mechanism researched and developed is single shaft silicon micro-resonance type accelerometer, minority mechanism has carried out preliminary theory to the twin shaft silicon micro-resonance type accelerometer to be inquired into test, and there are shortcomings such as the intersecting axle coupling is big, two detection axle consistency of performance are relatively poor, volume is big in existing twin shaft silicon micro-resonance type accelerometer.
The utility model content
Utility model purpose: at the problem and shortage of above-mentioned existing existence, the purpose of this utility model provides a kind of employing frequency detecting, two and detects full decoupled, the symmetric arrangement of axle, reaches the integrated full decoupling silicon micro-resonance type accelerometer of twin shaft simple in structure, compact, that volume is little, precision is high.
Technical scheme: for realizing above-mentioned utility model purpose, the technical solution adopted in the utility model is: the integrated full decoupling silicon micro-resonance type accelerometer of a kind of twin shaft comprises upper strata micro-acceleration gauge structure and lower floor's glass pedestal; Described micro-acceleration gauge structural bond is combined on the glass pedestal; Described glass pedestal is provided with signal lead, and the structural electrode of micro-acceleration gauge is connected with corresponding signal lead; Described micro-acceleration gauge structure is made up of mass and four identical resonator minor structures, wherein the first resonator minor structure and lever, vibrating mass that be symmetrically distributed identical by first crossbeam, two formed, first crossbeam is connected with an end of two levers respectively by two short straight beams, the other end of two levers is connected with vibrating mass by two short straight beams, and the fulcrum place of two levers is connected with the 3rd fixed pedestal by two short straight beams; Described mass is connected with four resonator minor structures by the first decoupling zero beam respectively, and the crossbeam end of four resonator minor structures is connected with first fixed pedestal by the second decoupling zero beam, and the stiff end of four resonator minor structures is connected with second fixed pedestal.
Described vibrating mass is made up of two parallel resonance beam and corresponding broach frame and movable broach, fixed fingers, and wherein movable broach is located on the broach frame, and is the symmetria bilateralis layout in resonance beam, and fixed fingers is located on the 4th fixed pedestal.
Described fixed fingers comprises fixed drive broach and fixed drive feedback broach.
The described first decoupling zero beam adopts straight beam structure, and the second decoupling zero beam adopts U type folded beam structure.
Described first crossbeam, the 3rd crossbeam move along Y direction, and second crossbeam, the 4th crossbeam move in the X-axis direction.
Described micro-acceleration gauge structure is produced on the monocrystalline silicon piece, and the material of described glass pedestal is Pyrex.
Beneficial effect: (1) adopts four groups of decoupling zero beams that the motion isolation of two input shafts (X-axis and Y-axis) is opened, and has realized the mobile decoupling of both direction, thereby has reduced the influence of intersecting axle coupling; (2) four resonator minor structure parameters are in full accord, are convenient to two and detect the consistance that axle is realized performances such as mechanical sensitivity, the linearity; (3) two resonator minor structures along the same axis are one group, when input signal is arranged, the resonance frequency of a resonator can increase, the resonance frequency of another resonator can reduce simultaneously, can obtain the size of input acceleration by the differential change of measuring two resonance frequencies, this differential mode can effectively suppress common mode interference, increases the output signal size; (4) the decoupling zero beam that is connected with pedestal adopts the structure of U type beam, not only can effectively discharge the thermal stress that processing produces, suppress quadrature coupling error signal, and reduced the non-linear of motion, thereby increased the sensitivity that Oscillation Amplitude has improved acceleration detection; (5) the movable broach of resonator is arranged on the broach frame, can effectively utilize the space, convenient driving comb and the drive feedback broach arranged.
Description of drawings
Fig. 1 is the structural representation of the integrated full decoupling silicon micro-resonance type accelerometer of the utility model twin shaft;
Fig. 2 is the resonator minor structure synoptic diagram of the integrated full decoupling silicon micro-resonance type accelerometer of the utility model twin shaft;
Fig. 3 is the signal lead synoptic diagram on the integrated full decoupling silicon micro-resonance type accelerometer of the utility model twin shaft lower floor glass pedestal.
Embodiment
Below in conjunction with the drawings and specific embodiments, further illustrate the utility model, should understand these embodiment only be used to the utility model is described and be not used in the restriction scope of the present utility model, after having read the utility model, those skilled in the art all fall within the application's claims institute restricted portion to the modification of the various equivalent form of values of the present utility model.
As shown in Figure 1, the integrated full decoupling silicon micro-resonance type accelerometer of the utility model twin shaft, be used to measure the acceleration of importing along two vertical direction in the same plane, constitute by two-layer up and down, the upper strata is the micro-acceleration gauge structure that is produced on the monocrystalline silicon piece, and lower floor is the signal lead that is produced on the glass pedestal 16.Micro-acceleration gauge upper strata physical construction and resonator minor structure 2a, 2b, 2c, 2d that be symmetrically distributed identical by mass 1 and four form.Mass 1 is respectively by four groups of decoupling zero beam 3a1,3a2,3b1,3b2,3c1,3c2,3d1,3d2 is connected with four resonator minor structures, four resonator minor structure 2a, 2b, 2c, the crossbeam end 7a of 2d, 7b, 7c, 7d is by four groups of decoupling zero beam 4a1,4a2,4b1,4b2,4c1,4c2,4d1,4d2 and fixed pedestal 5a1,5a2,5b1,5b2,5c1,5c2,5d1,5d2 connects, decoupling zero beam 3a1,3a2,3b1,3b2,3c1,3c2,3d1,3d2 adopts straight beam structure, decoupling zero beam 4a1,4a2,4b1,4b2,4c1,4c2,4d1,4d2 adopts U type folded beam structure.Decoupling zero beam 3a1,3a2,3b1,3b2,3c1,3c2,3d1,3d2 and decoupling zero beam 4a1,4a2,4b1,4b2,4c1,4c2,4d1,4d2 isolate the motion of X-axis and Y direction, crossbeam 7a, 7c only can move in Y direction, and crossbeam 7b, 7d only can move in X-direction.Four resonator minor structure 2a, 2b, 2c, stiff end 9a1, the 9b1 of 2d, 9c1,9d1 are connected with fixed pedestal 5a3,5b3,5c3,5d3.Fixed pedestal is installed on the fixed pedestal bonding point on the glass pedestal 16, makes the arrangements of accelerometers part on upper strata unsettled on glass pedestal 16 parts of lower floor.
The resonator minor structure as shown in Figure 2, each resonator minor structure and the lever 8a1, the 8a2 that are symmetrically distributed identical by a crossbeam 7a, two groups and the resonator vibrates parts 9a of band broach form.Crossbeam 7a is connected with the end of two lever 8a1,8a2 respectively by two short straight beam 6a3,6a4, the other end of two lever 8a1,8a2 is connected with the movable end of resonator vibrates parts 9a by short straight beam 6a5,6a6, and two lever 8a1,8a2 fulcrum places are connected with fixed pedestal 5a4,5a5 by short straight beam 6a1,6a2.Resonator vibrates parts 9a is made up of two parallel resonance beam 9a2,9a3 and separately broach frame 9a4,9a5 and movable broach, fixed fingers, movable broach is arranged on broach frame 9a4, the 9a5, and be to arrange that in the symmetria bilateralis of resonance beam 9a2,9a3 fixed fingers directly is arranged on fixed pedestal 5a6,5a7,5a8,5a9,5a10, the 5a11.Fixed fingers is divided into fixed drive broach 10a1,10a2 and fixed drive is fed back broach 11a1,11a2,11a3,11a4.On fixed drive broach 10a1,10a2, apply the alternating voltage of band direct current biasing, adopt monolateral static driven, the working method of monolateral capacitance detecting.
Glass pedestal comprises signal lead and metal silicon/glass bonding point as shown in Figure 3.Signal lead comprises public electrode lead-in wire 13a, 13b, 13c, 13d, drive input lead 14a1,14a2,14b1,14b2,14c1,14c2,14d1,14d2, drive feedback lead-in wire 15a1,15a2,15b1,15b2,15c1,15c2,15d1,15d2; Metal silicon/glass bonding point comprises fixed pedestal bonding point 12a1,12a2,12a3,12a4,12a5,12b1,12b2,12b3,12b4,12b5,12c1,12c2,12c3,12c4,12c5,12d1,12d2,12d3,12d4,12d5, driving comb fixed pedestal bonding point 12a6,12a7,12b6,12b7,12c6,12c7,12d6,12d7, drive feedback broach fixed pedestal bonding point 12a8,12a9,12a10,12a11,12b8,12b9,12b10,12b11,12c8,12c9,12c10,12c11,12d8,12d9,12d10,12d11.Fixed pedestal 5a1,5a2,5a3,5b1,5b2,5b3,5c1,5c2,5c3,5d1,5d2,5d3 link to each other with corresponding keys chalaza 12a2,12a1,12a3,12b1,12b2,12b3,12c1,12c2,12c3,12d2,12d1, the 12d3 of lower floor glass pedestal respectively.Fixed pedestal 5a4, the 5a5 of each resonator minor structure, 5a6,5a7,5a8,5a9,5a10,5a11 link to each other with corresponding keys chalaza 12a4,12a5,12a6,12a7,12a8,12a9,12a10, the 12a11 of lower floor glass pedestal respectively.
The integrated full decoupling silicon micro-resonance type accelerometer of twin shaft of the present utility model, fixed pedestal 5a6,5a7 are called the driving fixed electorde again, fixed pedestal 5a8,5a9,5a10,5a11 are called the feedback fixed electorde again, after the AC drive voltage that applies the band direct current biasing on driving fixed electorde 5a6, the 5a7 of Y direction resonator minor structure, produce the alternation driving force, under the effect of alternation driving force, two parallel resonance beam 9a2, the 9a3 of resonator vibrates parts 9a are along X-axis generation simple harmonic oscillation in opposite directions.By feedback fixed electorde 5a8,5a9,5a10,5a11 this simple harmonic oscillation is extracted, and then signal fed back to driving voltage by certain controlling unit, form closed loop self-excitation control system, the frequency of this closed loop self-excitation control system will be locked in the natural frequency of resonance beam.
As along the input of the acceleration of Y direction the time, mass will move along Y direction, the power F that acceleration causes
GyFor:
F
gy＝Mg
y (1)
In the formula, M is the quality of mass, g
yBe size along the Y-axis input acceleration.F
GyBe delivered to lever by crossbeam and amplified input power, the masterpiece that has been exaggerated is used on the resonance beam, and the resonance frequency of resonance beam changed:
In the formula, f is a resonance frequency,
Be nominal no-load (biasing) resonance frequency, m is a resonator minor structure quality, and L is a resonance beam length, and E is a Young modulus, and I is the resonance beam moment of inertia.
Formula (2) is launched and can be got with Taylor's formula:
f＝f
0+K
1g
y+K
2g
y 2+K
3g
y 3+L+K
ng
y n (3)
K in the formula
n=K
1b
n(K
1/ f
0)
N-1(Hz/g
n), b
n=b
N-1(3-2n)/and n, K
1=f
0L
2/ 2 π
2EI, b
1=1.
Linear scale factor K
1Depend on the resonance beam length L, Young modulus E, the quality m of resonator minor structure and the mass M of mass:
Detect the variable quantity of this frequency by the drive feedback broach, and carry out signal Processing, needing just to obtain the input acceleration signal of measurement.Because two resonator minor structures along Y-axis are symmetrically distributed, therefore, the power that acceleration causes is to stretch to one of the effect of both sides resonator minor structure, and another is compression, to the both sides resonant frequency to influence one be to raise, another is to reduce, and by with the subtracting each other of two resonator minor structure frequency signals, can obtain more exactly along the size of Y direction input acceleration.
Acceleration analysis to X-direction is consistent with the measuring method of Y direction, because the decoupling zero beam action, when X-direction had input acceleration, mass can not exert an influence to the resonator minor structure of Y direction; Equally, when Y direction had input, mass can not exert an influence to the resonator minor structure of X-direction yet.Therefore, the integrated full decoupling silicon micro-resonance type accelerometer of this twin shaft can be isolated two axial cross-couplings influences well, makes the measuring-signal that obtains more accurate.
Claims (6)
1. the integrated full decoupling silicon micro-resonance type accelerometer of twin shaft comprises upper strata micro-acceleration gauge structure and lower floor's glass pedestal (16); Described micro-acceleration gauge structural bond is combined on the glass pedestal (16); Described glass pedestal (16) is provided with signal lead, the structural electrode of micro-acceleration gauge is connected with corresponding signal lead, it is characterized in that: described micro-acceleration gauge structure is by mass (1) and four identical resonator minor structure (2a, 2b, 2c, 2d) form, wherein the first resonator minor structure is by first crossbeam (7a), two identical and be symmetrically distributed lever (8a1,8a2), vibrating mass (9a) is formed, first crossbeam (7a) is by two short straight beam (6a3,6a4) respectively with two lever (8a1, end 8a2) connects, two lever (8a1, other end 8a2) is by two short straight beam (6a5,6a6) be connected two lever (8a1 with vibrating mass (9a), fulcrum place 8a2) is by two short straight beam (6a1,6a2) with the 3rd fixed pedestal (5a4,5a5) connect; Described mass (1) is respectively by the first decoupling zero beam (3a1,3a2,3b1,3b2,3c1,3c2,3d1,3d2) with four resonator minor structure (2a, 2b, 2c, 2d) connect, four resonator minor structure (2a, 2b, 2c, crossbeam end (7a 2d), 7b, 7c, 7d) by the second decoupling zero beam (4a1,4a2,4b1,4b2,4c1,4c2,4d1,4d2) with the first fixed pedestal (5a1,5a2,5b1,5b2,5c1,5c2,5d1,5d2) connect four resonator minor structure (2a, 2b, 2c, stiff end (9a1 2d), 9b1,9c1,9d1) with the second fixed pedestal (5a3,5b3,5c3,5d3) connect.
2. according to the integrated full decoupling silicon micro-resonance type accelerometer of the described twin shaft of claim 1, it is characterized in that: described vibrating mass (9a) is made up of two parallel resonance beam (9a2,9a3) and corresponding broach frame (9a4,9a5) and movable broach, fixed fingers, wherein movable broach is located on the broach frame (9a4,9a5), and be to arrange that in the symmetria bilateralis of resonance beam (9a2,9a3) fixed fingers is located on the 4th fixed pedestal (5a6,5a7,5a8,5a9,5a10,5a11).
3. according to the integrated full decoupling silicon micro-resonance type accelerometer of the described twin shaft of claim 2, it is characterized in that: described fixed fingers comprises fixed drive broach (10a1,10a2) and fixed drive feedback broach (11a1,11a2,11a3,11a4).
4. according to the integrated full decoupling silicon micro-resonance type accelerometer of the described twin shaft of claim 1, it is characterized in that: the described first decoupling zero beam (3a1,3a2,3b1,3b2,3c1,3c2,3d1,3d2) adopts straight beam structure, and the second decoupling zero beam (4a1,4a2,4b1,4b2,4c1,4c2,4d1,4d2) adopts U type folded beam structure.
5. according to the integrated full decoupling silicon micro-resonance type accelerometer of the described twin shaft of claim 1, it is characterized in that: described first crossbeam (7a), the 3rd crossbeam (7c) move along Y direction, and second crossbeam (7b), the 4th crossbeam (7d) move in the X-axis direction.
6. according to the integrated full decoupling silicon micro-resonance type accelerometer of the described twin shaft of claim 1, it is characterized in that: described micro-acceleration gauge structure is produced on the monocrystalline silicon piece, and the material of described glass pedestal (2) is Pyrex.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102147423A (en) * | 2011-02-25 | 2011-08-10 | 东南大学 | Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer |
| CN102749479A (en) * | 2012-06-18 | 2012-10-24 | 东南大学 | Vertical axis silicon micro resonant mode accelerometer based on negative stiffness effect |
| CN103901225A (en) * | 2014-04-02 | 2014-07-02 | 清华大学 | Silicon micro-resonant type accelerometer |
| CN107421526A (en) * | 2017-07-04 | 2017-12-01 | 东南大学 | A kind of bionical twin shaft hair sensor device |
| CN111487435A (en) * | 2020-05-14 | 2020-08-04 | 东南大学 | Air flow velocity measuring device based on three working modes of weak coupling resonator group |
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-
2011
- 2011-02-25 CN CN 201120047949 patent/CN201965150U/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102147423A (en) * | 2011-02-25 | 2011-08-10 | 东南大学 | Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer |
| CN102147423B (en) * | 2011-02-25 | 2012-06-13 | 东南大学 | Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer |
| CN102749479A (en) * | 2012-06-18 | 2012-10-24 | 东南大学 | Vertical axis silicon micro resonant mode accelerometer based on negative stiffness effect |
| CN102749479B (en) * | 2012-06-18 | 2014-04-23 | 东南大学 | Vertical axis silicon micro resonant mode accelerometer based on negative stiffness effect |
| CN103901225A (en) * | 2014-04-02 | 2014-07-02 | 清华大学 | Silicon micro-resonant type accelerometer |
| CN103901225B (en) * | 2014-04-02 | 2016-04-27 | 清华大学 | Silicon micro-resonance type accelerometer |
| CN107421526A (en) * | 2017-07-04 | 2017-12-01 | 东南大学 | A kind of bionical twin shaft hair sensor device |
| CN107421526B (en) * | 2017-07-04 | 2020-05-05 | 东南大学 | Bionic double-shaft hair sensor device |
| CN111679095A (en) * | 2020-04-30 | 2020-09-18 | 东南大学 | Silicon micro-flow velocity meter with adjustable mechanical sensitivity and measuring range |
| CN111679095B (en) * | 2020-04-30 | 2022-03-11 | 东南大学 | Silicon micro-flow velocity meter with adjustable mechanical sensitivity and measuring range |
| CN111487435A (en) * | 2020-05-14 | 2020-08-04 | 东南大学 | Air flow velocity measuring device based on three working modes of weak coupling resonator group |
| CN111487435B (en) * | 2020-05-14 | 2022-03-11 | 东南大学 | Air flow velocity measuring device based on three working modes of weak coupling resonator group |
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|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20110907 Effective date of abandoning: 20120613 |