CN100567993C - A kind of dual-axis resonance type micromechanical accelerometer - Google Patents
A kind of dual-axis resonance type micromechanical accelerometer Download PDFInfo
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- CN100567993C CN100567993C CNB2006100119571A CN200610011957A CN100567993C CN 100567993 C CN100567993 C CN 100567993C CN B2006100119571 A CNB2006100119571 A CN B2006100119571A CN 200610011957 A CN200610011957 A CN 200610011957A CN 100567993 C CN100567993 C CN 100567993C
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Abstract
Dual-axis resonance type micromechanical accelerometer comprises substrate, mass, semi-girder, lever enlarger, tuning fork, drive electrode, detecting electrode, tooth pivot and backstop.Structure is a centrosymmetric image, acceleration by responsive two orthogonal directionss of a mass, mass is " returning " font, is semi-girder, lever enlarger, tuning fork, tooth pivot and drive electrode, detecting electrode in the middle of the mass, and the mass periphery is a backstop.The mass design of " returning " font in the invention can make the bigger mass of realization under the element limited bulk; The resiliency supported that 8 semi-girders are formed has realized the decoupling zero of two orthogonal directionss, makes the sensitivity of both direction, resolution all higher; Resonance beam adopts the fixedly form of tuning fork of both-end, and its two ends are connected by thin neck structure and periphery; Realize the differential output of resonance frequency with two tuning forks of symmetric arrangement.Version of the present invention makes micro-mechanical accelerometer at two orthogonal directionss higher sensitivity, resolution be arranged all, is easy to realize high-precision two dimensional acceleration measurement.
Description
Technical field
The invention belongs to the micro mechanical sensor field among the MEMS (MEMS (micro electro mechanical system)), it is widely used in fields such as automotive electronics, Aero-Space, weaponry as little inertia device.
Background technology
MEMS is in developing period, and its technology and market is prematurity still all, but its wide development prospect, huge social, economic benefit that breeds is that common people know altogether, and micro-mechanical accelerometer is one of wherein the most successful representative.The research of micro-mechanical accelerometer starts from early 1970s, and form single shaft micro-mechanical accelerometer product in the eighties, the micro-mechanical accelerometer that the end of the nineties occurred multiaxis, the most representative on the market is the ADXL of U.S. AD company series micro-mechanical accelerometer.
The micro-mechanical accelerometer development is very fast, and various ways such as pressure resistance type, condenser type, piezoelectric type, force balance type, thermal convection formula, resonant mode and tunnel current formula are arranged.With all multi-form comparing, what resonance type micromechanical accelerometer was exported is frequency signal, and this accurate digital signal has very high antijamming capability and stability, is not prone to distortion in the transmission, and signal does not need the conversion through A/D, directly links to each other with digital processing unit.Resonance type micromechanical accelerometer is a kind of high-precision accelerometer, and bright development prospect is arranged.Present micro-mechanical accelerometer product hangs down precision in being mostly, seriously restricts its range of application, is applied in the not high commercial kitchen area of accuracy requirement morely.Mostly the micro-mechanical accelerometer product is single shaft, and usually needs twin shaft or three axis accelerometer to measure acceleration in the practical application, is the research to single-axis accelerometer mostly in the disclosed document, and the research report of multiaxis accelerometer is less.The research direction of micro-mechanical accelerometer mainly concentrates on high precision at present, multiaxis is integrated and the digitizing output facet, and improving the accelerometer performance is exactly the measurement that will realize the high sensitivity of multiaxis, low noise, low drift and great dynamic range.
Summary of the invention
Technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, a kind of high-precision twin shaft resonance micro-mechanical accelerometer is provided, mostly be the not high enough problem of single shaft, sensitivity and resolution to solve existing micro-mechanical accelerometer, realize high-precision two dimensional acceleration measurement.
Technical scheme of the present invention: a kind of dual-axis resonance type micromechanical accelerometer, its characteristics are: comprise substrate, mass, 8 semi-girders, 4 lever enlargers, 4 tuning forks, 4 groups of drive electrodes, detecting electrode, tooth pivot, total is a centrosymmetric image, by the acceleration of responsive two orthogonal directionss of a mass.Mass is " returning " font, is 8 semi-girders, 4 lever enlargers, 4 tuning forks and 4 groups of tooth pivots, drive electrode, detecting electrode in the middle of the mass.The resiliency supported that 8 semi-girders are formed has realized the decoupling zero of two orthogonal directionss dexterously, makes the sensitivity of both direction, resolution all higher.Resonance beam adopts the fixedly form of tuning fork of both-end, and the two ends of each tuning fork are connected with leverage and anchor point respectively by thin neck structure, has reduced the energy coupling of tuning fork and peripheral structure so effectively.The structural parameters high conformity of two tuning forks of symmetric arrangement is realized the differential output of resonance frequency effectively.Symmetria bilateralis is arranged the tooth pivot in the middle of the tuning fork, and tooth pivot both sides are the drive electrode and the detecting electrode of comb structure, to realize static driven and capacitance detecting.
In addition, around the periphery of mass, be furnished with 4 backstops, can realize overload protection effectively, prevent elastic support structure fracture under stronger impact.
The present invention's advantage compared with prior art is: the present invention adopts the acceleration of the responsive both direction of a mass, the resiliency supported that 8 semi-girders are formed has realized the decoupling zero of two orthogonal directionss dexterously, makes the sensitivity of both direction, resolution all higher; Mass adopts the design of " returning " font, and this makes element can realize making acceleration efficiently be converted into inertial force by bigger mass under limited bulk; Resonance beam adopts the fixedly form of tuning fork of both-end, and the tuning fork two ends are connected with leverage and anchor point respectively by thin neck structure, effectively reduces the energy coupling of tuning fork and peripheral structure; The structural parameters high conformity of two tuning forks of symmetric arrangement is realized the differential output of resonance frequency effectively; The static driven of comb-tooth-type, capacitive detecting structure can be realized higher drive strength and detection sensitivity, have good manufacturability simultaneously.
Description of drawings
Fig. 1 is the planar structure synoptic diagram of twin shaft resonance micro-mechanical accelerometer of the present invention.
Embodiment
As shown in Figure 1, the present invention includes substrate 1,18,28,38,48,4 groups of drive electrodes of 12,22,32,42,4 tuning forks of 11,17,21,27,31,37,41,47,4 lever enlargers of 2,8 semi-girders of mass, detecting electrode, tooth pivot and 4 backstops 13,23,33,43, total is a centrosymmetric image, by the acceleration of a mass 2 responsive two orthogonal directionss.Mass 2 is " returning " font, is 18,28,38,48 and 4 groups of tooth pivots of 12,22,32,42,4 tuning forks of 11,17,21,27,31,37,41,47,4 lever enlargers of 8 semi-girders, drive electrode, detecting electrode in the middle of the mass 2.The resiliency supported that 8 semi-girders 11,17,21,27,31,37,41,47 are formed has realized the decoupling zero of two orthogonal directionss dexterously, makes the sensitivity of both direction, resolution all higher; Leverage 12 amplifies rod member by three grades and forms, leverage 12 is connected with the substrate bonding by anchor point 14,15,20,49, one end of leverage 12 is connected with mass 2, and the other end is connected with the thin neck structure 16 of tuning fork, and leverage 22,32,42 and leverage 12 are in like manner.Resonance beam adopts the fixedly form of tuning fork of both-end, and tuning fork 18 two ends are 4 by width, thin neck structure 16,19 and leverage 12 and anchor point 3 be connected, the energy that effectively reduces tuning fork 18 and peripheral structure is coupled, tuning fork 28,38,48 and tuning fork 18 are in like manner; Two tuning forks 18,38 that two tuning forks 28,38 that the y rotational symmetry is arranged and x rotational symmetry are arranged are realized the differential output of resonance frequency; The middle both sides of each tuning fork have the drive electrode of comb structure and detecting electrode to realize static driven and capacitance detecting.
Around mass 2,4 backstops 13,23,33,43 are arranged, can realize overload protection effectively, prevent elastic support structure fracture under stronger impact.
Principle of work of the present invention: be converted into inertial force by responsive quality degree of will speed up and measure, it is axial that inertial force acts on resonance beam, causes that the resonance frequency of resonance beam changes, and extrapolated by measuring acceleration by the resonance frequency that records.As Fig. 1, when the y directional acceleration is imported, mass 2 bears y direction inertial force, semi-girder 21,27,41,47 deforms, the displacement of y direction takes place in mass 2, inertial force amplifies through semi-girder 11,17,31,37 and leverage 12,32, be applied to the axial of tuning fork 18,38,18,38 1 of tuning forks bear tension, one and bear compressive stress, the tuning fork resonance frequency that bears action of pulling stress increases, the tuning fork resonance frequency that bears action of compressive stress reduces, and the difference that detects two resonance frequencies is as output.Utilize the comb structure of tuning fork 18,38 middle both sides to realize static driven and capacitor vibration pick-up, calculate by measuring acceleration by the resonance frequency that records.When x directional acceleration meter is imported, mass 1 bears x direction inertial force, semi-girder 11,17,31,37 deformation takes place, mass 1 generation * direction displacement, inertial force is through semi-girder 21,27,41,47 and leverage 22,42 amplify, be applied to tuning fork 28,48 axially, tuning fork 28,48 1 are born tension, one is born compressive stress, the tuning fork resonance frequency that bears action of pulling stress increases, the tuning fork resonance frequency that bears action of compressive stress reduces, the difference that detects two resonance frequencies is utilized tuning fork 28 as output, the comb structure of both sides is realized static driven and capacitor vibration pick-up in the middle of 48, is calculated by measuring acceleration by the resonance frequency that records.
In sum, the present invention proposes a kind of dual-axis resonance type micromechanical accelerometer of novel structure form, its volume is little, in light weight, can realize high sensitivity, high-resolution two dimensional acceleration measurement, has opened up the application of this class accelerometer in the high precision field.
Claims (3)
1. dual-axis resonance type micromechanical accelerometer, it is characterized in that: comprise substrate, mass, 8 semi-girders, 4 lever enlargers, 4 tuning forks, 4 tooth pivots, 4 drive electrodes, 4 detecting electrodes, total is a centrosymmetric image, by the acceleration of responsive two orthogonal directionss of a mass; Mass is " returning " font, the mass periphery is symmetrically arranged with backstop, in the middle of the mass is 8 semi-girders, 4 lever enlargers, 4 tuning forks, 4 tooth pivots, 4 drive electrodes, 4 detecting electrodes, resonance beam adopts the fixedly form of tuning fork of both-end, the two ends of each tuning fork are connected with lever enlarger and anchor point respectively by thin neck structure, the tuning fork symmetric arrangement, the tuning fork symmetria bilateralis is furnished with tooth pivot, drive electrode, detecting electrode.
2, dual-axis resonance type micromechanical accelerometer according to claim 1, it is characterized in that: described lever enlarger amplifies rod member by three grades and forms, the lever enlarger is connected with the substrate bonding by 4 anchor points, one end of lever enlarger is connected with mass, and the other end is connected with the thin neck structure of tuning fork.
3, dual-axis resonance type micromechanical accelerometer according to claim 1 is characterized in that: the structural parameters of described 4 tuning forks are identical.
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| CNB2006100119571A CN100567993C (en) | 2006-05-23 | 2006-05-23 | A kind of dual-axis resonance type micromechanical accelerometer |
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| CNB2006100119571A CN100567993C (en) | 2006-05-23 | 2006-05-23 | A kind of dual-axis resonance type micromechanical accelerometer |
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| CN100567993C true CN100567993C (en) | 2009-12-09 |
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Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102147423B (en) * | 2011-02-25 | 2012-06-13 | 东南大学 | Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer |
| CN102156194B (en) * | 2011-03-07 | 2012-04-11 | 东南大学 | Stop structure of accelerometer |
| CN102313545A (en) * | 2011-07-21 | 2012-01-11 | 西北工业大学 | Completely-symmetric lever-amplification capacitive micromechanical gyro |
| CN102435779B (en) * | 2011-11-02 | 2012-10-03 | 重庆理工大学 | Silicon micro-capacitive two-dimensional acceleration sensor |
| CN102435777B (en) * | 2011-11-02 | 2012-10-31 | 重庆理工大学 | Silicon microcapacitor type two-dimensional integrated acceleration sensor |
| CN103675345B (en) | 2012-09-21 | 2017-12-01 | 中国科学院地质与地球物理研究所 | A kind of accelerometer and its manufacturing process |
| CN103528577B (en) * | 2013-10-12 | 2016-06-01 | 深迪半导体(上海)有限公司 | A kind of Z axle MEMS capacitive gyroscope |
| CN103901225B (en) * | 2014-04-02 | 2016-04-27 | 清华大学 | Silicon micro-resonance type accelerometer |
| JP6464613B2 (en) * | 2014-08-27 | 2019-02-06 | セイコーエプソン株式会社 | Physical quantity sensor, electronic device and mobile object |
| CN104865406A (en) * | 2015-03-27 | 2015-08-26 | 东南大学 | Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer |
| JP2017020897A (en) * | 2015-07-10 | 2017-01-26 | セイコーエプソン株式会社 | Physical quantity sensor, electronic apparatus and mobile body |
| CN106352862B (en) * | 2016-10-26 | 2019-04-09 | 西安交通大学 | A kind of digital differential relaying type micro-acceleration gauge |
| CN106771359A (en) * | 2016-11-30 | 2017-05-31 | 西安交通大学 | A kind of quartzy integral type Micromachined Accelerometer Based on Resonant Principle |
| CN106771358A (en) * | 2016-11-30 | 2017-05-31 | 西安交通大学 | A kind of full quartz resonance accelerometer of miniature differential formula |
| CN106597011B (en) * | 2016-12-23 | 2018-11-23 | 中北大学 | Biaxial MEMS resonant mode acceleration sensor structure |
| CN107421526B (en) * | 2017-07-04 | 2020-05-05 | 东南大学 | Bionic double-shaft hair sensor device |
| CN111929469B (en) * | 2020-08-03 | 2021-05-07 | 浙江大学 | Adjustable low-rigidity micro-mechanical accelerometer |
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2006
- 2006-05-23 CN CNB2006100119571A patent/CN100567993C/en not_active Expired - Fee Related
Non-Patent Citations (2)
| Title |
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| 新型谐振式硅微机械加速度计. 钟莹，张国雄，李醒飞.纳米技术与精密工程，第1卷第1期. 2003 |
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