CN100483136C - Dual-axis capacitance type micromechanical accelerometer - Google Patents
Dual-axis capacitance type micromechanical accelerometer Download PDFInfo
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- CN100483136C CN100483136C CNB2006100119586A CN200610011958A CN100483136C CN 100483136 C CN100483136 C CN 100483136C CN B2006100119586 A CNB2006100119586 A CN B2006100119586A CN 200610011958 A CN200610011958 A CN 200610011958A CN 100483136 C CN100483136 C CN 100483136C
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass
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Abstract
The invention discloses a dual-axle capacitor micro mechanical accelerometer, which comprises a basic plate, a weigh block, a flexible support, a driving electrode, a detecting electrode, a tooth axle and a backstop, while it uses the weight block to sense the accelerators at two orthogonal directions. Wherein, the weight block is at the center of said device, while the flexible support, backstop, driving electrode, and detecting electrode are outside the weight block; the flexible support can realize decouple in two orthogonal directions to improve the sensitivity and resolution in said two directions; the flexible support uses the four corners of square as anchor points, with better structure stability; and it uses comb capacitor to realize differential static driving and capacitor detection, to improve the sensitivity and resolution of accelerator. The invention can easily realize two-dimension accelerator detection with high accuracy.
Description
Technical field
The present invention relates to a kind of capacitance type micromechanical accelerometer, particularly a kind of dual-axis capacitance type micromechanical accelerometer, belong to the micro mechanical sensor field in the micro-electromechanical system (MEMS), it is widely used in fields such as automotive electronics, Aero-Space, weaponry as little inertia device.
Background technology
MEMS is in developing period, and its technology and market is prematurity still all, but its wide development prospect, huge social, economic benefit that breeds is that common people know altogether, and micro-mechanical accelerometer is wherein the most successful representative.The research of micro-mechanical accelerometer starts from early 1970s, and form single shaft micro-mechanical accelerometer product in the eighties, the micro-mechanical accelerometer that the end of the nineties occurred multiaxis, the most representative on the market is the ADXL of U.S. AD company series micro-mechanical accelerometer.The micro-mechanical accelerometer development is very fast, and various ways such as pressure resistance type, condenser type, piezoelectric type, force balance type, thermal convection formula, resonant mode and tunnel current formula are arranged.With all multi-form comparing, capacitive micromachined accelerometer response height, temperature drift are little, good stability, anti-overload ability are strong, be convenient to self check, be easy to realize high-acruracy survey cheaply.Capacitance type micromechanical accelerometer develops comparatively ripe abroad, and successful industrialization, also is in the laboratory model machine stage at home, also has certain distance apart from industrialization.Existing micro-mechanical accelerometer product hangs down precision in mostly being, measuring accuracy can't reach the requirement of inert stage, seriously restricts its range of application, is to be applied in the not high commercial kitchen area of accuracy requirement morely.Mostly the micro-mechanical accelerometer product is single shaft, and usually needs twin shaft or three axis accelerometer to measure acceleration in the practical application, is the research to single-axis accelerometer mostly in the disclosed document, and the research report of multiaxis accelerometer is less.The research direction of micro-mechanical accelerometer mainly concentrates on high precision at present, multiaxis is integrated and the digitizing output facet, and improving the accelerometer performance is exactly the measurement that will realize the high sensitivity of multiaxis, low noise, low drift and great dynamic range.
Summary of the invention
Technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, provide a kind of high-precision twin shaft capacitive micromachined accelerometer, mostly be the not high enough problem of single shaft, sensitivity and resolution to solve existing micro-mechanical accelerometer, realize high-precision two dimensional acceleration measurement.
Technical scheme of the present invention: dual-axis capacitance type micromechanical accelerometer, its characteristics are: comprise substrate, mass, resiliency supported, drive electrode, detecting electrode and tooth pivot, total is a centrosymmetric image, acceleration by responsive two orthogonal directionss of a mass, mass occupy the center of structure, the mass periphery is a resiliency supported, drive electrode and detecting electrode, resiliency supported is made of four two-end fixed beams and four semi-girders, four two-end fixed beams constitute square, foursquare four angles are anchor points, one end and the mass of each semi-girder are connected, and the two-end fixed beam that the other end is corresponding with it is middle to be connected; The movable pole plate and the mass of drive electrode and detecting electrode are connected, and the fixed polar plate of electrode and tooth pivot are connected, and realize differential static driving and capacitance detecting with the broach bias structure.
In addition, around the periphery of mass, be furnished with backstop, can realize overload protection effectively, prevent elastic support structure fracture under stronger impact.
The present invention's advantage compared with prior art is: the present invention adopts the acceleration of the responsive both direction of mass, has realized the decoupling zero of two orthogonal directionss with elastic support structure cleverly, makes the sensitivity of both direction, resolution all higher; Highly stable with the centrosymmetric structure that foursquare four angles are anchor point, have bigger impact resistance; Structure with the broach biasing has realized differential static driving, capacitance detecting, eliminates common mode interference effectively, improves sensitivity, resolution, is easy to realize high-precision two dimensional acceleration measurement.
Description of drawings
Fig. 1 is a dual-axis capacitance type micromechanical accelerometer planar structure synoptic diagram of the present invention.
Embodiment
As shown in Figure 1, the present invention includes substrate 1, mass 2, resiliency supported, drive electrode and detecting electrode, tooth pivot 15,25,35,45, tooth pivot 15,25,35,45, backstop 17,27,37,47, anchor point 16,26,36,46 is connected with substrate 1 by bonding, structure is the center symmetry, by the acceleration of a mass 2 responsive two orthogonal directionss.Mass 2 occupy the center of structure, and mass 2 peripheries are resiliency supported, backstop 17,27,37,47, tooth pivot 15,25,35,45, drive electrode and detecting electrode.Resiliency supported is made of 12,22,32,42 and four semi-girders 11,21,31,41 of four two-end fixed beams, and four two-end fixed beams 12,22,32,42 constitute square, and foursquare four angles are anchor points 16,26,36,46.Each semi-girder 11,21,31,41 1 end and mass 2 are connected, two-end fixed beam 12,22,32,42 middle being connected that the other end is corresponding with it.The movable pole plate 14,24,34,44 and the mass 2 of drive electrode, detecting electrode are connected, the fixed polar plate 13,23,33,43 and the tooth pivot 15,25,35,45 of electrode are connected, drive electrode, detecting electrode all constitute with the broach bias structure, with the form realization static driven and the capacitance detecting of differential capacitor.Backstop 17,27,37,47 can realize overload protection effectively, prevents elastic support structure fracture under stronger impact.
Principle of work of the present invention: be converted into inertial force by responsive mass degree of will speed up, inertial force is subjected to displacement responsive mass, the movable pole plate and the mass of electric capacity are connected, and the displacement of movable pole plate changes the capacitor plate spacing, extrapolate by measuring acceleration by measuring electric capacity.Simultaneously,, adopt electrostatic force feedback to constitute the force balance type closed-loop system, make mass be operated in 0 equilibrium position in order to reduce non-linear, the raising measuring accuracy of accelerometer.When the acceleration of vertical direction is imported, the inertial force that mass 2 produces makes resiliency supported generation deformation, mass 2 is connected with the electrode active movable plate electrode 24,44 of its left and right sides, the displacement of vertical direction takes place in together, movable pole plate 24,44 of electric capacity and spacing between the fixed polar plate 23,43 are changed, by the measurement changes in capacitance know by inference vertical direction by measuring acceleration.Information measured is fed back to the voltage on the drive electrode pole plate, and the electrostatic force of control action on the movable pole plate 24,44 of electric capacity balances each other electrostatic force and inertial force, so mass 2 just is operated in 0 displacement balance position of vertical direction; When the acceleration of horizontal direction is imported, mass 2 produces the inertial force of horizontal direction, resiliency supported deforms, mass 2 and its electrode active movable plate electrode 14,34 on both sides up and down are connected, they are the displacement of occurred level direction together, spacing between movable pole plate 14,34 and the fixed polar plate 13,33 is changed, by measure changes in capacitance know by inference horizontal direction by measuring acceleration.Information measured is fed back to the voltage on the drive electrode pole plate, and the electrostatic force of control action on the movable pole plate 14,34 of electric capacity balances each other electrostatic force and inertial force, so mass 2 just is operated in 0 displacement balance position of horizontal direction.
In sum, the present invention proposes a kind of dual-axis capacitance type micromechanical accelerometer of novel structure form, its volume is little, in light weight, can realize high sensitivity, high-resolution two dimensional acceleration measurement, has opened up the application of this class accelerometer in the high precision field.
Claims (2)
1, dual-axis capacitance type micromechanical accelerometer, its characteristics are: comprise substrate, mass, resiliency supported, drive electrode, detecting electrode and tooth pivot, total is a centrosymmetric image, by the acceleration of responsive two orthogonal directionss of a mass; Mass occupy the center of structure, the mass periphery is resiliency supported, drive electrode and detecting electrode, resiliency supported is made of four two-end fixed beams and four semi-girders, foursquare four angles of four two-end fixed beam formations are anchor points, one end and the mass of each semi-girder are connected, and the two-end fixed beam that the other end is corresponding with it is middle to be connected; Drive electrode and detecting electrode constitute differential capacitor with the broach bias structure, and the movable pole plate of differential capacitor is connected with mass, and the fixed polar plate of differential capacitor is connected with the tooth pivot.
2, dual-axis capacitance type micromechanical accelerometer according to claim 1 is characterized in that: in the periphery of described mass, be provided with two backstops axisymmetrically.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2006100119586A CN100483136C (en) | 2006-05-23 | 2006-05-23 | Dual-axis capacitance type micromechanical accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2006100119586A CN100483136C (en) | 2006-05-23 | 2006-05-23 | Dual-axis capacitance type micromechanical accelerometer |
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| CN1844934A CN1844934A (en) | 2006-10-11 |
| CN100483136C true CN100483136C (en) | 2009-04-29 |
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| CNB2006100119586A Expired - Fee Related CN100483136C (en) | 2006-05-23 | 2006-05-23 | Dual-axis capacitance type micromechanical accelerometer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101871952A (en) * | 2010-06-11 | 2010-10-27 | 瑞声声学科技(深圳)有限公司 | MEMS (Micro Electro Mechanical System) acceleration sensor |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
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| DE102006058747A1 (en) * | 2006-12-12 | 2008-06-19 | Robert Bosch Gmbh | Micromechanical z-sensor |
| DE102008017156A1 (en) * | 2008-04-03 | 2009-10-08 | Continental Teves Ag & Co. Ohg | Micromechanical acceleration sensor |
| CN101504426B (en) * | 2009-02-23 | 2011-01-05 | 中国科学院合肥物质科学研究院 | Comb condenser type dual-spindle accelerometer |
| CN101776696B (en) * | 2010-02-10 | 2012-05-23 | 合肥工业大学 | Three-dimensional flow velocity sensor |
| CN102156194B (en) * | 2011-03-07 | 2012-04-11 | 东南大学 | Stop structure of accelerometer |
| CN103728467B (en) | 2012-10-16 | 2016-03-16 | 无锡华润上华半导体有限公司 | Plane-parallel capacitor |
| WO2014163076A1 (en) * | 2013-04-02 | 2014-10-09 | 富士電機株式会社 | Capacitance type sensor, and method for correcting non-linear output |
| CN103278149B (en) * | 2013-06-19 | 2015-07-08 | 江苏物联网研究发展中心 | Interdigital capacitor accelerometer with uniaxial folding spring beams |
| CN103645343B (en) * | 2013-12-06 | 2016-07-13 | 杭州士兰微电子股份有限公司 | multi-axis capacitive accelerometer |
| CN103777066A (en) * | 2014-01-03 | 2014-05-07 | 南京邮电大学 | Microelectronic mechanical dual channel microwave power detection system and preparation method thereof |
| US11099207B2 (en) * | 2018-10-25 | 2021-08-24 | Analog Devices, Inc. | Low-noise multi-axis accelerometers and related methods |
| CN109444465B (en) * | 2018-12-29 | 2024-09-24 | 深迪半导体(绍兴)有限公司 | Accelerometer |
| CN110455656B (en) * | 2019-08-26 | 2022-05-24 | 吉林大学 | Precision actuation/sensing dual-mode integrated micro-mechanical comb tooth structure and detection method |
| CN113391094A (en) * | 2020-03-12 | 2021-09-14 | 北京微元时代科技有限公司 | Capacitance type micromechanical accelerometer |
| CN113466491B (en) * | 2021-07-01 | 2023-12-05 | 兰州空间技术物理研究所 | Satellite accelerometer sensitive structure |
| CN114609413A (en) * | 2022-05-11 | 2022-06-10 | 绍兴圆方半导体有限公司 | Three-axis accelerometer |
-
2006
- 2006-05-23 CN CNB2006100119586A patent/CN100483136C/en not_active Expired - Fee Related
Non-Patent Citations (2)
| Title |
|---|
| 梳齿式微加速度计闭环系统性能的分析与优化. 吴天准，董景新，刘云峰，赵长德.仪器仪表学报，第27卷第3期. 2006 |
| 梳齿式微加速度计闭环系统性能的分析与优化. 吴天准，董景新，刘云峰，赵长德.仪器仪表学报，第27卷第3期. 2006 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101871952A (en) * | 2010-06-11 | 2010-10-27 | 瑞声声学科技(深圳)有限公司 | MEMS (Micro Electro Mechanical System) acceleration sensor |
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| CN1844934A (en) | 2006-10-11 |
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Granted publication date: 20090429 Termination date: 20120523 |