CN102435780B - One-chip triaxial micro mechanical accelerometer - Google Patents
One-chip triaxial micro mechanical accelerometer Download PDFInfo
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- CN102435780B CN102435780B CN 201110373470 CN201110373470A CN102435780B CN 102435780 B CN102435780 B CN 102435780B CN 201110373470 CN201110373470 CN 201110373470 CN 201110373470 A CN201110373470 A CN 201110373470A CN 102435780 B CN102435780 B CN 102435780B
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- mechanical accelerometer
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Abstract
The invention discloses a one-chip triaxial micro mechanical accelerometer which comprises an upper cover, a lower cover and a plurality of sensitive mass block components with a movable capacitance polar plate, and the upper cover and the lower cover are connected into one body. The sensitive mass block components are arranged between the upper cover and the lower cover with a central symmetry structure. Both the upper cover and the lower cover are provided with a plurality of fixed capacitance plates. Fixed capacitance plates of the upper cover and fixed capacitance plates of the lower plates are in one-to-one correspondence and are arranged oppositely. The sensitive mass block components are provided between an upper fixed capacitance plate and a lower fixed capacitance plate to form a plurality of differential capacitors. The one-chip triaxial micro mechanical accelerometer has the advantages of good linearity and sensitivity in a small measuring range scope, simple processing technology, good repeatability, high sensitivity and low cost.
Description
Technical field
The present invention relates to the micro mechanical sensor in the MEMS (micro electro mechanical system), relate in particular to a kind of monolithic tri-axial micro-mechanical accelerometer.
Background technology
Accelerometer is mainly used in measuring the kinematic parameter in moving object relative inertness space, and traditional accelerometer is subjected to the restriction of volume, weight and cost etc., is difficult to apply at civil area.Based on the MEMS(MEMS (micro electro mechanical system)) micro-mechanical accelerometer of technology has that volume is little, in light weight, cost is low, the high outstanding advantage of reliability, and is widely used in fields such as motion state of automobile control system, camera stabilization system, movable machinery control.
At present, the document of introducing accelerometer is a lot, mainly is divided into pressure resistance type, piezoelectric type, condenser type, tunnel type etc., but can only detects one or two axial acceleration usually.Many application scenarios require 3-axis acceleration is detected, and mainly make up to measure by a plurality of single-axis accelerometers at first, but there are some inherent shortcomings in this splicing structure,, consistance difference big as assembling and positioning difficulty, volume etc.
At present, three micro-mechanical accelerometers mainly are divided into two kinds of versions: single mass structure and multimass block structure.The three-axis micro accelerometer size of single mass structure is less, but exists comparatively significantly intersecting axle coupling phenomenon, and three consistance on axially are relatively poor.IMEGO(Imego company) introduced a kind of three-axis micro accelerometer based on how responsive mass block structure, its responsive mass center symmetric arrangement and adopt single cantilever beam to support, but exist torsion phenomenon to influence accuracy of detection to a certain extent when stressed.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, provides a kind of and has in little range ability that better linearity degree and sensitivity, processing technology are simple, good reproducibility, monolithic tri-axial micro-mechanical accelerometer highly sensitive, with low cost.
For solving the problems of the technologies described above, the present invention by the following technical solutions:
A kind of monolithic tri-axial micro-mechanical accelerometer, comprise loam cake, lower cover and a plurality of responsive mass assembly that has movable capacitor plate that bonding connects as one, described a plurality of responsive mass assembly is centrosymmetric structural arrangement between loam cake and lower cover, described loam cake and under cover and be equipped with a plurality of fixed capacity plates, on a plurality of fixed capacity plates of covering and a plurality of fixed capacity plates of covering down corresponding and be oppositely arranged one by one, each responsive mass assembly is located at a plurality of differential capacitances of formation between upper and lower two fixed capacity plates.
Described responsive mass assembly is made up of bonding anchor point, mass and two brace summers, described mass is tabular, described two brace summers are divided into the mass both sides, and described brace summer one end is connected with the bonding anchor point, and the other end is connected with the end of mass away from described bonding anchor point.
The two sides of described brace summer are with respect to upper and lower surface tilt setting.
Described fixed capacity plate is connected with lead-in wire aluminium electrode.
Described loam cake and following covering are provided with the lead-in wire breach corresponding with the aluminium electrode position that goes between.
Described responsive mass assembly is provided with four, described four responsive mass assemblies structural arrangement that is centrosymmetric.
Compared with prior art, the invention has the advantages that:
Monolithic tri-axial micro-mechanical accelerometer of the present invention, adopt a plurality of responsive mass assemblies structural arrangement that is centrosymmetric, carry out acceleration detection by differential capacitance, only need that the data that record are carried out suitable decoupling algorithm and can calculate three axial acceleration, improved the problem of single mass structure three axis accelerometer ubiquitous three axial consistance differences, effectively reduce the intersecting axle coupling phenomenon, guarantee that to greatest extent three of accelerometers are axially gone up dynamically, the unanimity of static characteristics; It is simple in structure simultaneously, and the installation location is convenient, error is little, and good temp characteristic has the very high linearity and sensitivity in little range ability.Mass in the responsive mass assembly is tabular, equating to realize responsive quality maximization under the structural volume, both can improve sensitivity and the resolution of micro-mechanical accelerometer, can reduce the volume that takies of micro-mechanical accelerometer again.Each mass is supported by two brace summers, and torsion phenomenon can be reduced to the influence of accuracy of detection with respect to upper and lower surface tilt setting in the two sides of brace summer simultaneously.
Description of drawings
Fig. 1 is structural representation of the present invention.
Fig. 2 is fractionation structural representation of the present invention.
Fig. 3 is the synoptic diagram of responsive mass assembly among the present invention.
Fig. 4 is the vertical view of responsive mass assembly among the present invention.
Fig. 5 is the A-A section rotation enlarged drawing of Fig. 4.
Fig. 6 is the structural representation of loam cake among the present invention.
Fig. 7 is the structural representation of lower cover among the present invention.
Each label is represented among the figure:
1, loam cake; 2, lower cover; 3, responsive mass assembly; 4, fixed capacity plate; 5, lead-in wire breach; 31, bonding anchor point; 32, brace summer; 33, mass; 41, lead-in wire aluminium electrode.
Embodiment
Fig. 1 to Fig. 7 shows a kind of monolithic tri-axial micro-mechanical accelerometer embodiment of the present invention, this accelerometer comprises the loam cake 1 that bonding connects as one, lower cover 2 and a plurality of responsive mass assembly 3 that has movable capacitor plate, a plurality of responsive mass assemblies 3 are centrosymmetric structural arrangement between loam cake 1 and lower cover 2, be equipped with a plurality of fixed capacity plates 4 on loam cake 1 and the lower cover 2, a plurality of fixed capacity plates 4 on the loam cake 1 are corresponding one by one with a plurality of fixed capacity plates 4 on the lower cover 2, and be oppositely arranged, each responsive mass assembly 3 is located at, form a plurality of differential capacitances between following two fixed capacity plates 4, carry out acceleration detection by differential capacitance, only need that the data that record are carried out suitable decoupling algorithm and can calculate three axial acceleration, improved the problem of existing single mass structure three axis accelerometer ubiquitous three axial consistance differences, effectively reduce the intersecting axle coupling phenomenon, guarantee that to greatest extent three of accelerometers are axially upward dynamic, the unanimity of static characteristics; It is simple in structure simultaneously, and the installation location is convenient, error is little, and good temp characteristic has the very high linearity and sensitivity in little range ability.
In the present embodiment, responsive mass assembly 3 is provided with four, four responsive mass assemblies 3 structural arrangement that is centrosymmetric.Each responsive mass assembly 3 is made up of bonding anchor point 31, mass 33 and two brace summers 32, mass 33 is tabular, equating to realize maximum responsive quality under the structural volume, both can improve sensitivity and the resolution of micro-mechanical accelerometer, can reduce the volume that takies of micro-mechanical accelerometer again; Two brace summers 32 are divided into mass 33 both sides, brace summer 32 1 ends are connected with bonding anchor point 31, the other end is connected with the end of mass 33 away from bonding anchor point 31, and torsion phenomenon can be reduced to the influence of accuracy of detection with respect to upper and lower surface tilt setting in the two sides of brace summer 32.Each fixed capacity plate 4 is connected with lead-in wire aluminium electrode 41, and loam cake 1 and lower cover 2 are provided with and the corresponding lead-in wire breach 5 in aluminium electrode 41 positions that goes between, and are convenient to accelerometer and are connected with external unit.
Monolithic tri-axial micro-mechanical accelerometer of the present invention can adopt following technology to make:
1, silicon structure is made;
Select for use＜silicon chip of 100〉crystal orientation twin polishings is as the making matrix of responsive mass assembly 3, utilizes anisotropic silicon wet etching technology, by dual surface lithography technology obtain being centrosymmetric four responsive mass assemblies 3 of structural arrangement.
2, the lower cover electrode is made;
(a), at first, erode away the groove of certain depth at lower cover 2, for responsive mass assembly 3 provides movement clearance;
(b), in the groove plane of corrosion, make to form detect the fixed capacity plate 4 of electric capacity.
3, the loam cake electrode is made
(a), at first, erode away groove with the lower cover 2 same degree of depth at loam cake 1, for responsive mass assembly 3 provides movement clearance;
(b), in the groove plane of corrosion, make to form detect the fixed capacity plate 4 of electric capacity, make it with lower cover 2 on fixed capacity plate 4 and responsive mass assembly 3 constitute a pair of differential capacitance.
4, " glass-silicon-glass " three layers of bonding
Realize " glass-silicon " bonding by the anode linkage technology, counter-rotating realizes " glass-silicon-glass " three layers of bonding then.
Principle of work of the present invention: by mass 33 acceleration of importing is converted into inertial force, the movable capacitor plate that inertial force drives on it mass 33 is subjected to displacement, and the displacement of movable capacitor plate changes electric capacity.When there is the acceleration input of vertical direction in the external world, the inertial force that corresponding mass 33 produces deforms brace summer 32, when the vertical direction displacement takes place mass 33, the spacing between movable capacitor plate and the fixed capacity plate 4 is changed, thereby change electric capacity; When there is the acceleration input of horizontal direction in the external world, the inertial force that corresponding mass 33 produces deforms brace summer 32, displacement in the mass 33 occurred level faces changes the relative area between movable capacitor plate and the fixed capacity plate 4, thereby changes electric capacity; Calculate three axial acceleration by measuring four changes in capacitance amounts.Simultaneously, in order to reduce the non-linear of accelerometer, improve measuring accuracy, adopt electrostatic force feedback to constitute the force balance type closed-loop system, information measured is fed back to the voltage on the battery lead plate, the electrostatic force of control action on mass 33 balances each other mass 33 electrostatic force and inertial force, so mass just always works in the equilibrium position.
Monolithic tri-axial micro-mechanical accelerometer of the present invention, rational in infrastructure, volume is small, be easy to processing, can in multiple military equipment, civil equipment, use.
Above-mentioned is preferred embodiment of the present invention, is not the present invention is done any pro forma restriction.Though the present invention discloses as above with preferred embodiment, yet is not in order to limit the present invention.Any those of ordinary skill in the art under the situation that does not break away from the technical solution of the present invention scope, can utilize the technology contents of above-mentioned announcement that technical solution of the present invention is made many possible changes and modification, or be revised as the equivalent embodiment of equivalent variations.Therefore, every content that does not break away from technical solution of the present invention, all should drop in the scope of technical solution of the present invention protection any simple modification, equivalent variations and modification that above embodiment does according to the technology of the present invention essence.
Claims (6)
1. monolithic tri-axial micro-mechanical accelerometer, it is characterized in that: comprise the loam cake (1) that bonding connects as one, lower cover (2) and a plurality of responsive mass assembly (3) that has movable capacitor plate, described a plurality of responsive mass assemblies (3) are centrosymmetric structural arrangement between loam cake (1) and lower cover (2), be equipped with a plurality of fixed capacity plates (4) on described loam cake (1) and the lower cover (2), a plurality of fixed capacity plates (4) on the loam cake (1) are corresponding one by one with a plurality of fixed capacity plates (4) on the lower cover (2), and be oppositely arranged, each responsive mass assembly (3) is located at, form a plurality of differential capacitances between following two fixed capacity plates (4), described responsive mass assembly (3) is by bonding anchor point (31), mass (33) and two brace summers (32) are formed, described mass (33) is tabular, described two brace summers (32) are divided into mass (33) both sides, described brace summer (32) one ends are connected with bonding anchor point (31), and the other end is connected with the end of mass (33) away from described bonding anchor point (31).
2. monolithic tri-axial micro-mechanical accelerometer according to claim 1, it is characterized in that: the two sides of described brace summer (32) are with respect to upper and lower surface tilt setting.
3. monolithic tri-axial micro-mechanical accelerometer according to claim 1 and 2 is characterized in that: described fixed capacity plate (4) is connected with lead-in wire aluminium electrode (41).
4. monolithic tri-axial micro-mechanical accelerometer according to claim 3, it is characterized in that: described loam cake (1) and lower cover (2) are provided with and the corresponding lead-in wire breach (5) in aluminium electrode (41) position that goes between.
5. monolithic tri-axial micro-mechanical accelerometer according to claim 1 and 2, it is characterized in that: described responsive mass assembly (3) is provided with four, described four responsive mass assemblies (3) structural arrangement that is centrosymmetric.
6. monolithic tri-axial micro-mechanical accelerometer according to claim 4, it is characterized in that: described responsive mass assembly (3) is provided with four, described four responsive mass assemblies (3) structural arrangement that is centrosymmetric.
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| CN 201110373470 CN102435780B (en) | 2011-11-22 | 2011-11-22 | One-chip triaxial micro mechanical accelerometer |
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| CN102435780B true CN102435780B (en) | 2013-07-17 |
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| CN104502629B (en) * | 2014-12-27 | 2017-05-24 | 中国人民解放军国防科学技术大学 | Folded-beam-type high-sensitivity micro-mechanical accelerometer |
| CN104671189B (en) * | 2015-02-17 | 2016-09-28 | 中国人民解放军国防科学技术大学 | Micro mechanical sensor and processing method thereof with feed-through assembly |
| CN104931728A (en) * | 2015-05-28 | 2015-09-23 | 同济大学 | Triaxial silicon micro-accelerometer |
| CN107782915B (en) * | 2017-09-29 | 2020-07-17 | 中国人民解放军国防科技大学 | Silicon hollow beam, silicon micro-accelerometer based on silicon hollow beam and preparation method of silicon micro-accelerometer |
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| US4930043A (en) * | 1989-02-28 | 1990-05-29 | United Technologies | Closed-loop capacitive accelerometer with spring constraint |
| CN101858928B (en) * | 2009-04-10 | 2012-09-05 | 利顺精密科技股份有限公司 | Capacitance-type triaxial accelerator for micromotor system |
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