CN103901227B - Silicon micro-resonance type accelerometer - Google Patents
Silicon micro-resonance type accelerometer Download PDFInfo
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- CN103901227B CN103901227B CN201410129567.9A CN201410129567A CN103901227B CN 103901227 B CN103901227 B CN 103901227B CN 201410129567 A CN201410129567 A CN 201410129567A CN 103901227 B CN103901227 B CN 103901227B
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Abstract
The invention provides a kind of silicon micro-resonance type accelerometer, comprising: a substrate of glass; One silicon micro mechanical movable structure is bonded in glass basic surface, described silicon micro mechanical movable structure comprises one first mass, one second mass is that specular is arranged, described first mass and the second mass are suspended in described glass basic surface respectively by two brace summers, and with two brace summers for axle rotates; One first two ends shaking beam are connected with the first mass and the second mass respectively, and one first drives and determines comb and one first and detect and determine comb and be relatively arranged on described first and shake beam both sides; One second two ends shaking beam are connected with described first mass and the second mass respectively, one second drives and determine comb and one second and detects and determine comb and be relatively arranged on described second and shake beam both sides, and described first beam and second that shakes shakes beam perpendicular to the direction of glass basic surface being Z-direction has different height.
Description
Technical field
The invention belongs to the micro-inertia measuring field of microelectromechanical systems, be specifically related to a kind of silicon micro-resonance type accelerometer of the measurement Z axis acceleration based on the not contour beam that shakes.
Background technology
Along with the deep development of micromachining technology, micromachined process plays more and more important effect in navigation field.Just progressively the conventional inertia instrument such as quartz flexible accelerometer are replaced at present in the application of middle low performance.Mems accelerometer has started in navigation and the application of tactical weapon field in the world.Part high precision field also will be substituted by Micro-electro-mechanaccelerometer accelerometer simultaneously.
For meeting high precision, miniaturization strategic arms equipment Requirement, design realizes the integrated silicon micro-resonance type accelerometer of multiaxis, and sensitive axes becomes single-chip multiaxis integrated silicone micro-resonance type accelerometer design focal point perpendicular to the Z axis silicon micro-resonance type accelerometer of processing plane.
But the design about Z axis silicon micro-resonance type accelerometer is less, general adopt the design of electrostatic stiffness formula silicon micro-resonance type accelerometer, complex structure and design difficulty is large, have impact on the application of described Z axis silicon micro-resonance type accelerometer.
Summary of the invention
In sum, necessaryly a kind of Z axis silicon micro-resonance type accelerometer that can overcome the problems referred to above is provided.
A kind of silicon micro-resonance type accelerometer, comprising: a substrate of glass; One silicon micro mechanical movable structure is bonded in glass basic surface, described silicon micro mechanical movable structure comprises one first mass, one second mass is that specular is arranged, described first mass and the second mass are suspended in described glass basic surface respectively by two brace summers, and with two brace summers for axle rotates; One first beam and one second beam that shakes that shakes is set in parallel between described first mass and the second mass, described first two ends shaking beam are connected with the first mass and the second mass respectively, and one first drives and determines comb and one first and detect and determine comb and be relatively arranged on described first and shake beam both sides; Described second two ends shaking beam are connected with described first mass and the second mass respectively, one second drives and determine comb and one second and detects and determine comb and be relatively arranged on described second and shake beam both sides, and described first beam and second that shakes shakes beam perpendicular to the direction of glass basic surface being Z-direction has different height.
A kind of silicon micro-resonance type accelerometer, comprising: a substrate of glass; One silicon micro mechanical movable structure is bonded in glass basic surface, and described silicon micro mechanical movable structure comprises one first mass, one second mass is that specular is arranged; One central supporting anchor district is arranged between described first mass and the second mass, described first mass and the second mass are that specular is arranged about described central supporting anchor district, described first mass is connected with described central supporting anchor district by one first brace summer, described second mass is connected with described central supporting anchor district by one second brace summer, and is suspended in described glass basic surface; One first two ends shaking beam are connected with described central supporting anchor district and the second mass respectively; One second two ends shaking beam are connected with described central supporting anchor district and the second mass respectively, and are symmetrically distributed in both sides, described central supporting anchor district with described first beam that shakes; One first drives and determines comb and one first and detect and determine comb and be relatively arranged on described first and shake beam both sides; One second drives and determine comb and one second and detects and determine comb and be relatively arranged on described second and shake beam both sides, and described first beam and second that shakes shakes beam perpendicular to the direction of glass basic surface being Z-direction has different height.
Relative to prior art, silicon micro-resonance type accelerometer provided by the invention, plane is adopted to rock structure sensitive Z-axis acceleration, structure is simple, further, by adopting not contour girder construction of shaking to detect inertial force change, comb structure is adopted to carry out static excitation and capacitance detecting, effective compatible plane structure design parameter and electrical specification, improve accuracy of detection.
Accompanying drawing explanation
Fig. 1 is the plan view of the Z axis silicon micro-resonance type accelerometer that first embodiment of the invention provides.
Fig. 2 is the axis side views such as the three-dimensional of the Z axis silicon micro-resonance type accelerometer that first embodiment of the invention provides.
Fig. 3 is the not contour axis side views such as beam partial 3 d that shake that first embodiment of the invention provides.
Fig. 4 is the axis side views such as the three-dimensional of the not contour beam Z axis silicon micro-resonance type accelerometer that shakes that second embodiment of the invention provides.
Main element symbol description
Substrate of glass 12
Mass 1a, 1b
First shakes beam 2a
Second shakes beam 2b
Comb 3a is determined in first driving
Comb 3b is determined in second driving
Comb 4a is determined in first detection
Comb 4b is determined in second detection
Central supporting anchor district 5
First bonding platform 5a, 5b
Second bonding platform 6a, 6b
First brace summer 7a, 8a
Second brace summer 7b, 8b
Lead-in wire electrode 9a, 9b, 9c, 9d, 10
Peripheral bonding region 11
Following specific embodiment will further illustrate the present invention in conjunction with above-mentioned accompanying drawing.
Embodiment
Silicon micro-resonance type accelerometer provided by the invention is described in detail below with reference to accompanying drawing.
The invention provides a kind of Z axis silicon resonance type accelerometer, described Z axis silicon resonance type accelerometer comprises a substrate of glass, a silicon micro mechanical movable structure and a peripheral bonding region.Described silicon mechanical movable structure and described peripheral bonding region are arranged at described glass baseplate surface.Described silicon micro mechanical movable structure is arranged in peripheral bonding region, and is bonded in substrate of glass one on the surface by bonding platform, to sense the acceleration perpendicular to glass basic surface Z-direction.
Described silicon micro mechanical movable structure comprises and rocks mass block structure, at least two brace summers and one and described at least two beams that shake rocking mass block structure not equal thickness form.The described mass that rocks suspends setting on the glass substrate by brace summer, produces twisting when being subject to the acceleration action of Z-direction.Described two beams that shake are positioned at the differing heights of Z-direction, the described beam one end that shakes is connected with mass, one end is arranged at a driving be oppositely arranged and determines comb and detect to determine between comb, passes to described driving and determines comb and detect to determine comb, and be converted into electric signal output with degree of will speed up.When Z axis has acceleration to input, the described mass block structure that rocks reverses around brace summer, with rock the beam that shakes that mass block structure is connected and be subject to mass and reverse the pulling force or pressure that produce and produce natural frequency and change, change Z-direction inertial force into beam axial force of shaking, and pass to detect with the change of resonance frequency by electric signal and determine comb and detect.
Preferably, described in rock mass block structure for two eccentric mass block structures, thus increase sensitivity.The described mass block structure that rocks comprises one first mass and the second mass and is planar mirror image distribution and interval is arranged along an axis of symmetry, and the eccentric direction of the eccentric direction of described first mass and described second mass is mirror image distributes.Described first mass and the second mass are connected by first beam and second beam that shakes that shakes be arranged between the two.
Described first beam and second that shakes shakes the thickness of beam (perpendicular to the direction of glass basic surface, i.e. Z-direction) to be less than described mass block structure thickness different, and described first beam and second beam that shakes that shakes is positioned at perpendicular to the Different Plane on glass baseplate surface direction.
Described first shake beam both sides be provided with drive determine comb and detect determine comb, be used for respectively load driver power and detection resonance frequency change; Equally, described second shake beam both sides be provided with drive determine comb and detect determine comb, be used for respectively load driver power and detection resonance frequency change.Described driving is determined comb and detects to determine comb by bonding platform bonding on the glass substrate, is connected with output electrode point by plain conductor.The driving being positioned at the first resonance beam both sides is determined comb and is detected that to determine comb height identical with the first resonance beam height.The driving being positioned at the second resonance beam both sides is determined comb and is detected that to determine comb height identical with the second resonance beam height.
When Z axis acceleration inputs, there is rightabout deflection in described first mass and the second mass sensitive acceleration, and first of the differing heights beam and second that shakes that is positioned at making to be connected with the first mass and the second mass shakes beam under tension and pressure respectively.Because the first shake beam and the second axial force of shaking on beam changes, first beam and second that shakes shakes the resonance frequency change of beam.The beam resonance frequency of shaking of tension increases, and the beam resonance frequency of shaking of pressurized reduces.Described driving is determined comb and detects to determine the acceleration that comb exports the input of differential frequency detection Z axis.
Silicon micro-resonance type accelerometer provided by the invention is described in detail below with reference to drawings and the specific embodiments.
See also Fig. 1 to Fig. 3, first embodiment of the invention provides a kind of Z axis silicon resonance type accelerometer, and described silicon resonance type accelerometer comprises silicon micro mechanical movable structure, peripheral bonding region (11) are arranged at glass substrate (12) surface.Described silicon micro mechanical movable structure comprises one first mass (1a), one second mass (1b), one first shakes beam (2a), one second shakes beam (2b), comb (3a) is determined in first driving, comb (4a) is determined in first detection, comb (3b) is determined in second driving, comb (4b) is determined in second detection, two first brace summer (7a, 7b), two second brace summer (8a, 8b), two the first bonding platform (5a, 5b), two the second bonding platform (6a, 6b), six lead-in wire electrode (9a, 9b, 9c, 10a, 10b, 10c).Described peripheral bonding region (11) is around described silicon micro mechanical movable structure.Be appreciated that described peripheral bonding region (11) is an alternate configurations.Described peripheral bonding region (11) has an opening, exposes the surface of described substrate of glass (12), and described silicon micro mechanical movable structure is arranged at substrate of glass (12) surface in described opening.
Described first mass (1a) and the second mass (1b) distribute in specular, and spaced setting.The shape of described first mass (1a) and the second mass (1b) is concave shape, have a recess respectively and be positioned at the fin of recess both sides, the recess of described first mass (1a) and the second mass (1b) is oppositely arranged.Described first mass (1a) and the second mass (1b) itself are a symmetrical structure, all have the axis of symmetry along a first direction (as X-direction); Described first mass (1a) and the second mass (1b) are arranged about a second direction (as Y direction) specular.Described first mass (1a) and the second mass (1b) can be 30 microns to 100 microns perpendicular to the thickness on described substrate of glass (12) direction (i.e. Z axis).In the present embodiment, the thickness of described first mass (1a) and the second mass (1b) is 60 microns.
Described first mass (1a) is supported by symmetrically arranged two the first brace summers (7a, 8a), be suspended in described substrate of glass (12) surface, namely described first mass (1a) is arranged with described substrate of glass (12) spaced surface relatively.Described two the first brace summers (7a, 8a) are symmetrically distributed in described first mass (1a) edge in a second direction perpendicular to the first direction, and support described first mass (1a).Described first brace summer (7a, 8a) is arranged near the axis of symmetry between described first mass (1a) and the second mass (2a), thus makes described first mass (1a) be right avertence core structure.One end of described first brace summer (7a) is connected with described first mass (1a), and the other end is connected with the one first bonding platform (5a) be arranged in described substrate of glass (12); One end of described first brace summer (8a) is connected with described first mass (1a), and the other end is connected with the first bonding platform (6a) be arranged in described substrate of glass (12).Described first bonding platform (5a) and the first bonding platform (6a) are all arranged at the marginal position of described glass substrate (12), and are symmetrically distributed in described first mass (1a) axis of symmetry both sides in the X direction.
Same, described second mass (1b) is supported by symmetrically arranged second brace summer (7b, 8b), is suspended in described substrate of glass (12) surface.Described two second brace summers (7b, 8b) are symmetrically distributed in described second mass (1b) edge in a first direction, and support described second mass (1b).Described two second brace summers (7b, 8b) are arranged near the axis of symmetry between described first mass (1a) and the second mass (1b), thus make described second mass (1b) be a left avertence core structure.Described second brace summer (7b) one end is connected with the second mass (1b), and the other end is connected with the second bonding platform (5b); Described second brace summer (8b) one end is connected with the second mass (1b), and the other end is connected with the second bonding platform (6b).Further, described first brace summer (7a, 8a) and the second brace summer (7b, 8b) are that specular is arranged relative to the axis of symmetry between described first mass (1a) and the second mass (2a).
Described first beam (2a) and second beam (2b) that shakes that shakes extends in X direction, and connect described first mass (1a) and the second mass (1b), described first beam (2a) and second beam (2b) that shakes that shakes is symmetrical arranged at the axis of symmetry of X-direction about the first mass (1a) and the second mass (1b).Concrete, described first beam (2a) and second beam (2b) that shakes that shakes is parallel and be arranged at intervals in the recess of described first mass (1a) and the second mass (1b), and described first the shake two ends of beam (2b) of beam (2a) and second that shake are connected described first mass (1a) and the second mass (1b) respectively.Described first the shake length of beam (2b) of beam (2a) and second of shaking can be 500 microns to 2000 microns, in the present embodiment, and described length is 1000 microns.Described first beam (2a) and second beam (2b) that shakes that shakes is identical at the thickness of Z-direction (direction perpendicular to X, Y), but be less than the thickness of described first mass (1a) and the second mass (1b), 20 microns can be.Described first beam (2a) and second beam (2b) that shakes that shakes can be suspended in the surface of described substrate of glass (12), and arranges with the spaced surface of described substrate of glass (12).
Further, described first beam (2a) and second beam (2b) that shakes that shakes is positioned at differing heights in Z-direction.In the present embodiment, described first shakes beam (2a) near described substrate of glass (12) setting, and is connected with described first mass (1a) and the second mass (1b); Described first shakes the surface co-planar of beam (2a) near the close described substrate of glass (12) of surface and described first mass (1a) of described substrate of glass (12).Relative, described second beam (2b) that shakes relatively is arranged away from described substrate of glass (12), and described second shakes beam (2b) away from the surface of described substrate of glass (12) and described first mass (1a) surface co-planar away from described substrate of glass (12).
Described first drives and determine comb (3a) and the first detection and determines comb (4a) and be relatively arranged on described first in the mode that comb is relative and shake the both sides of beam (2a) along Y-direction, be respectively used to the change of load driver power and detection resonance frequency, realize static excitation and capacitance detecting.Described first drives and determine comb (3a) and the first detection is determined comb (4a) and is connected to the lead-in wire electrode (9a, 9c) be arranged in substrate of glass (12) by metal wire.
Similar, described second drives and determine comb (3b) and the second detection and determines comb (4b) and be relatively arranged on described second in the mode that comb is relative and shake beam (2b) both sides, be respectively used to the change of load driver power and detection resonance frequency, realize static excitation and capacitance detecting.Described second drives and determine comb (3b) and the second detection is determined comb (4b) and is connected to the electrode points (10a, 10c) be arranged in substrate of glass (12) by metal wire.Further, comb (3a) is determined in described first driving, comb (4a) is determined in the first detection, comb (3b) is determined in the second driving and the second detection determines comb (4b) all along the axis of symmetry distribution between described first mass (1a) and the second mass (1b).
The principle of work of Z axis silicon micro-resonance type accelerometer of the present invention is as follows, and when Z axis acceleration inputs, described first mass (1a) and the second mass (1b) deflect due to eccentric mass effect.When the Z negative acceleration perpendicular to plane inputs, because the position of the first brace summer (7a, 8a) is arranged near the axis of symmetry between the first mass (1a) and the second mass (1b), second brace summer (7b, 8b) is arranged in XZ plane near the axis of symmetry between the first mass (1a) and the second mass (1b), first mass (1a) deflects counterclockwise relative to the first brace summer (7a, 8a), and the second mass (1b) deflects clockwise relative to the second brace summer (7b, 8b).First beam (2a) that shakes be connected with the first mass (1a) and the second mass (1b) bottom is subject to two mass pressure generation crimps, and be connected with the first mass (1a) and the second mass (1b) second beam (2b) that shakes is subject to two mass pulling force generation stretcher strains.Therefore two beams that shake change due to axial force, cause resonance frequency to change.Drive by first and determine comb (3a) and first and detect and determine comb (4a) and comb (3b) is determined in the second driving and comb (4b) is determined in the second detection, and accordingly resonance closed loop circuit system makes two beams that shake be operated in respectively in respective resonance frequency.Z axis input acceleration is obtained by the resonance frequency change exported.
See also Fig. 4, second embodiment of the invention provides a kind of Z axis silicon micro-resonance type accelerometer, comprise silicon micro mechanical movable structure, peripheral bonding region (11) be arranged at glass substrate (12) surface.Described silicon micro mechanical movable structure comprises the first mass (1a), the second mass (1b), first shakes beam (2a), second shakes beam (2b), first drives determine comb (3a), second drive determine comb (3b), first detect determine comb (4a), comb (4b), central supporting anchor district (5), two the first brace summers (7a, 8a), two the second brace summers (7b, 8b) are determined in the second detection, five go between electrode (9a, 9b, 9c, 9d, 10), peripheral bonding region (11) and substrate of glass (12).
The silicon micro-resonance type accelerometer that second embodiment of the invention provides is substantially identical with the first example structure, its difference is, silicon micro-resonance type accelerometer described in described second embodiment comprises a central supporting anchor district (5) further and is arranged between described first mass (1a) and the second mass (1b), and described first mass (1a) and the second mass (1b) are arranged in specular about described central supporting anchor district (5).
The length direction of described central supporting anchor district (5) is extended along Y-direction, described first beam (2a) and second beam (2b) that shakes that shakes extends along described first mass (1a) and the second mass (1b) at the axis of symmetry of X-direction, and described first beam (2a) and second beam (2b) that shakes that shakes is symmetrical arranged about described central supporting anchor district (5).Described first beam (2a) that shakes comprises relative two ends, and one end is connected with the recess of described first mass (1a), and the other end is connected with described central supporting anchor district (5).Same, described second beam (2b) one end that shakes is connected with the recess of described second mass (1b), and the other end is connected with described central supporting anchor district (5).Further, described first beam (2a) and described second beam (2b) that shakes that shakes is positioned at differing heights in Z-direction.In the present embodiment, described first beam (2a) that shakes relatively is arranged away from described substrate of glass (12), and described second beam (2b) that shakes is arranged near described substrate of glass (12) relatively.
Described central supporting anchor district (5) is connected with described first mass (1a) by two first brace summers (7a, 8a).Described two first brace summers (7a, 8a) are symmetrically distributed in the axis of symmetry both sides of described first mass (1a), one end of described two first brace summers (7a, 8a) is connected with the fin of described first mass (1a) recess both sides, and the other end is connected with described central supporting anchor district (5).Further, described two first brace summers (7a, 8a) and described first beam (2a) that shakes is positioned at the differing heights of Z-direction.In the present embodiment, described two first brace summers (7a, 8a) relatively described first shake beam (2a) near described substrate of glass (12) setting.Thus the top of described first mass (1a) and described first beam (2a) that shakes is connected, the bottom of described first mass (1a) is connected with described two first brace summers (7a, 8a).Described two first brace summers (7a, 8a) thickness in the Z-axis direction can be 20 microns.Described first brace summer (7a, 8a) is thinner, and it is more that Z-direction inertial force is converted into beam axial force of shaking, and resonance frequency variable quantity is larger, and resolution is higher.
Similar, described second brace summer (7b, 8b) is connected with described second mass (1b) and central supporting anchor district (5), and symmetrical about central supporting anchor district (5) with described first brace summer (7a, 8a).Described second brace summer (7b, 8b) and described second beam (2b) that shakes is positioned at the differing heights of Z-direction, and the beam (2b) that shakes relative to described second is arranged near described substrate of glass (12).Described second brace summer (7b, 8b) thickness is in the Z-axis direction 20 microns.Equally, described second brace summer (7b, 8b) is thinner, and it is more that Z-direction inertial force is converted into beam axial force of shaking, and resonance frequency variable quantity is larger, and resolution is higher.
Comb (3a) is determined in described first driving, comb (3b) is determined in the second driving, comb (4a) is determined in the first detection, the second detection determines comb (4b) by bonding platform bonding on the glass substrate, is connected with lead-in wire electrode (9a, 9b, 9c, 9d) by splash-proofing sputtering metal line.
Described in second embodiment of the invention, the principle of work of Z axis silicon micro-resonance type accelerometer is as follows: when Z axis acceleration inputs, first mass (1a), the second mass (1b) deflect under flexible brace summer supports, stretch or extrude first beam and second that shakes be connected with mass and to shake beam, therefore two beams that shake change due to axial force, cause resonance frequency to change.Determine comb (3a) by the first driving, comb (3b) is determined in the second driving and comb (4a) is determined in the first detection, comb (4b) is determined in the second detection and corresponding resonance closed loop circuit system makes two beams that shake be operated in respectively in respective resonance frequency.Z axis input acceleration is detected by the resonance frequency change exported.
In addition, those skilled in the art also can do other change in spirit of the present invention, and these changes done according to the present invention's spirit, all should be included in the present invention's scope required for protection certainly.
Claims (9)
1. a silicon micro-resonance type accelerometer, comprising:
One substrate of glass;
One silicon micro mechanical movable structure is bonded in glass basic surface, described silicon micro mechanical movable structure comprises one first mass, one second mass is that specular is arranged, described first mass and the second mass are suspended in described glass basic surface respectively by two brace summers, and with two brace summers for axle rotates; One first beam and one second beam that shakes that shakes is set in parallel between described first mass and the second mass, described first two ends shaking beam are connected with the first mass and the second mass respectively, and one first drives and determines comb and one first and detect and determine comb and be relatively arranged on described first and shake beam both sides; Described second two ends shaking beam are connected with described first mass and the second mass respectively, one second drives and determine comb and one second and detects and determine comb and be relatively arranged on described second and shake beam both sides, and described first beam and second that shakes shakes beam perpendicular to the direction of glass basic surface being Z-direction has different height.
2. silicon micro-resonance type accelerometer as claimed in claim 1, it is characterized in that, described first mass and the second mass are planar mirror image distribution and interval is arranged along an axis of symmetry, and the eccentric direction of the eccentric direction of described first mass and described second mass is mirror image distributes.
3. silicon micro-resonance type accelerometer as claimed in claim 2, it is characterized in that, described first beam and second beam that shakes that shakes is different from the thickness of described first mass and the second mass in z-direction, described first beam and second beam that shakes that shakes is parallel to each other, and two ends are connected with described first mass and the second mass respectively.
4. silicon micro-resonance type accelerometer as claimed in claim 3, it is characterized in that, described first mass has the axis of symmetry that is parallel to glass basic surface, and described first beam and second beam that shakes that shakes is symmetrically distributed in the both sides of described axis of symmetry.
5. silicon micro-resonance type accelerometer as claimed in claim 1, is characterized in that, described first shakes beam near the surface of described substrate of glass and the described first mass surface co-planar near described substrate of glass; Described second beam that shakes is arranged away from described substrate of glass relatively, and described second shakes the surface of beam away from described substrate of glass, with the surface co-planar of described first mass away from described substrate of glass.
6. silicon micro-resonance type accelerometer as claimed in claim 1, it is characterized in that, comprise a peripheral bonding region and be arranged at described glass substrate surface, and arrange around the micro-resonance movable structure of described silicon, described silicon micro-resonance movable structure is fixed on described glass basic surface by multiple bonding platform.
7. silicon micro-resonance type accelerometer as claimed in claim 1, is characterized in that, described first beam and the second beam thickness in the Z-axis direction that shakes that shakes is less than the thickness of described first mass and the second mass.
8. a silicon micro-resonance type accelerometer, comprising:
One substrate of glass;
One silicon micro mechanical movable structure is bonded in glass basic surface, and described silicon micro mechanical movable structure comprises one first mass, one second mass is that specular is arranged; One central supporting anchor district is arranged between described first mass and the second mass, described first mass and the second mass are that specular is arranged about described central supporting anchor district, described first mass is connected with described central supporting anchor district by one first brace summer, described second mass is connected with described central supporting anchor district by one second brace summer, and is suspended in described glass basic surface; One first two ends shaking beam are connected with described central supporting anchor district and the second mass respectively; One second two ends shaking beam are connected with described central supporting anchor district and the second mass respectively, and are symmetrically distributed in both sides, described central supporting anchor district with described first beam that shakes; One first drives and determines comb and one first and detect and determine comb and be relatively arranged on described first and shake beam both sides; One second drives and determine comb and one second and detects and determine comb and be relatively arranged on described second and shake beam both sides, and described first beam and second that shakes shakes beam perpendicular to the direction of glass basic surface being Z-direction has different height
, describedone brace summer and the second brace summer are positioned at different height in z-direction, one end of described first brace summer is connected near the bottom of described substrate of glass with described first mass, and one end of described second brace summer is connected with the top of described second mass away from described substrate of glass.
9. silicon micro-resonance type accelerometer as claimed in claim 8, is characterized in that, described first brace summer and described first beam that shakes is positioned at different height in z-direction, and described first beam that shakes is connected with the top of described first mass away from described substrate of glass; Described second brace summer and described second beam that shakes to be positioned at described in different height second beam that shakes in z-direction and to be connected near the bottom of described substrate of glass with described second mass.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11892467B2 (en) | 2020-12-18 | 2024-02-06 | Analog Devices, Inc. | Accelerometer with translational motion of masses |
Families Citing this family (7)
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| JP6655281B2 (en) * | 2014-08-19 | 2020-02-26 | セイコーエプソン株式会社 | Physical quantity sensors, electronic devices and moving objects |
| CN105607249B (en) * | 2015-12-21 | 2018-06-26 | 西安励德微系统科技有限公司 | A kind of torsional micro-mirror of the not contour pivotal quantity in unilateral side |
| CN106199070B (en) * | 2016-06-24 | 2019-10-11 | 东南大学 | Single anchor points support formula silicon micro-resonance type accelerometer |
| CN107688103A (en) * | 2017-07-31 | 2018-02-13 | 北京航空航天大学 | A kind of single-axis accelerometer based on graphene resonance characteristic |
| IT201700097531A1 (en) * | 2017-08-30 | 2019-03-02 | St Microelectronics Srl | INERTIAL FM SENSOR AND FUNCTIONING METHOD OF THE INERTIAL FM SENSOR |
| CN109239400B (en) * | 2018-11-12 | 2024-02-09 | 中国工程物理研究院电子工程研究所 | Integrated quartz double-vibration beam accelerometer and preparation method thereof |
| CN113419080B (en) * | 2021-06-18 | 2022-03-29 | 东南大学 | Design method of electrostatic stiffness resonant accelerometer based on differential evolution algorithm |
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| CN2729731Y (en) * | 2004-09-30 | 2005-09-28 | 中北大学 | Minimechanical digital difference friquency acceleration gauge |
| CN1844931A (en) * | 2006-05-23 | 2006-10-11 | 北京航空航天大学 | Resonance type micromechanical accelerometer |
| CN101266259B (en) * | 2008-05-08 | 2010-12-08 | 南京理工大学 | Silicon micro-resonance type accelerometer |
| CN102062604A (en) * | 2009-11-17 | 2011-05-18 | 北京大学 | Capacitive micromachined tuning fork gyroscope |
| CN101858931A (en) * | 2010-05-28 | 2010-10-13 | 南京理工大学 | Frame type capacitive silicon micromechanical accelerometer |
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| US11892467B2 (en) | 2020-12-18 | 2024-02-06 | Analog Devices, Inc. | Accelerometer with translational motion of masses |
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