CN101270988B - Multi-shaft inertial sensor and method for measuring multi-shaft translation and rotation acceleration - Google Patents

Multi-shaft inertial sensor and method for measuring multi-shaft translation and rotation acceleration Download PDF

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Publication number
CN101270988B
CN101270988B CN2008100197724A CN200810019772A CN101270988B CN 101270988 B CN101270988 B CN 101270988B CN 2008100197724 A CN2008100197724 A CN 2008100197724A CN 200810019772 A CN200810019772 A CN 200810019772A CN 101270988 B CN101270988 B CN 101270988B
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mass
barycenter
along
framework
symmetry
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CN2008100197724A
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CN101270988A (en
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何野
徐波
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江苏英特神斯科技有限公司
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Abstract

The invention discloses a multi-axial inertial sensor and a method for measuring multi-axial translatory motion and rotating acceleration. The sensor includes a frame moving along a spindle, one or more pair of inductive mass blocks and an outer elastic structure. Each inductive mass block is hanged on the frame by an inner elastic structure, the symmetric axis of the inner elastic structure is consistent with the symmetric axis of the hanged inductive mass block, the frame is hanged on a sensor platform by the outer elastic structure; the inner elastic structure and the inductive mass block are installed to lead the centers of mass to deviate with each other along the direction of the spindle, and the outer elastic structure and the frame are also installed to lead the centers of mass to deviate with each other along the direction of the spindle. The multi-axial inertial sensor of the invention can measure a plurality of axial acceleration and rotation at the same time, which has high resolution, rather low inter-axle crosstalk sensitivity and strong resistance to environmental noise, and produces with low cost and mass.

Description

The method of multi-shaft inertial sensor and measurement multi-shaft translation and rotation acceleration

Technical field

The present invention relates to sensor technical field, especially be particularly related to a kind of inertial sensor and a kind of method of measuring multi-shaft translation and rotation acceleration simultaneously.

Background technology

Micro-acceleration gauge and gyroscope have widely in fields such as automobile control, the input and output of playing, navigation to be used.The research and development of present this sensor mainly concentrate on the gyroscope of single shaft and the accelerometer of multiaxis.Certainly, integrated multiaxis device is owing to make one chip can measure acceleration and rotation simultaneously, and it all will be widely used in various market segments.High complexity and the cost that the inertial sensor of multiaxis is integrated on the one chip but influenced the integrated development of multi-axial sensor.So, a kind of low cost, one chip, the inertial sensor of multiaxis becomes the micro electro mechanical device that people thirst for very much.

Summary of the invention

The present invention proposes a kind of motion sensor simple in structure, its costliness different from the past and a lot of design of shortcoming, linear acceleration and the rotation that can measure all directions simultaneously.The structure of sensor of the present invention is designed to different masses measuring along the acceleration of different orthogonal direction, has the sensitivity of crosstalking of quite low between centers, and the symmetry of structure makes environmental noise and drift to be compensated easily simultaneously.

In brief, the present invention is a kind of structure with housing quality and one or more pairs of inner core sensing masses.This structure has a vibrating shaft, and the direction of motion of it and driving and sensing overlaps.This structure is set to drive signal with one-period and drives all masses and move along vibrating shaft direction same-phase.When measuring along perpendicular to axial the moving of vibration the time, wherein a pair of sensing mass is because the effect of power will be along vibrating shaft direction anti-phase movement.

The technical solution used in the present invention is as follows:

A kind of multi-shaft inertial sensor comprises:

First mass with first barycenter and first axis of symmetry;

Second mass with second barycenter and second axis of symmetry;

The framework that can move with respect to sensor platform along major axes orientation;

First mass is hung on first elastic construction on the framework, and this first elastic construction has the 3rd barycenter and about first axis of symmetry symmetry;

Second mass is hung on second elastic construction on the framework, and this second elastic construction has the 4th barycenter and about second axis of symmetry symmetry;

Described first barycenter and the 3rd barycenter are along displacement is arranged on the major axes orientation each other; And

Described second barycenter and the 4th barycenter are along displacement is arranged on the major axes orientation each other.

This structure Design, make when the framework in this structure when major axes orientation drives, the motion of induction mass obtains amplification.When the external force edge puts on this structure perpendicular to major axes orientation, a pair of induction mass will move along main shaft respectively in the opposite direction.And when external force when major axes orientation puts on this structure, all induction masses will move to same direction along main shaft.

Described first mass is identical with second mass.

Described frame hanging is in sensor platform, or in the basic unit of device, on the promptly static reference system.The 3rd elastic construction with frame hanging on sensor platform; Described the 3rd elastic construction has the 5th barycenter, and framework has the 6th barycenter, and the 5th barycenter and the 6th barycenter are along having displacement on the major axes orientation each other.

Described first, second all can be made of fine strain of millet arm spring with the 3rd elastic construction.

Described first barycenter and second barycenter align along major axes orientation, and first barycenter and the 5th barycenter are along individual displacement is arranged on the major axes orientation each other.

Described multi-shaft inertial sensor can also comprise many to the induction mass.Be described multi-shaft inertial sensor, also comprise:

The 3rd mass with the 5th barycenter and the 3rd axis of symmetry;

The 4th mass with the 6th barycenter and the 4th axis of symmetry;

The 3rd mass is hung on the 3rd elastic construction on the framework, and the 3rd elastic construction has the 7th barycenter and about the 3rd axis of symmetry symmetry;

The 4th mass is hung on the 4th elastic construction on the framework, and the 4th elastic construction has the 8th barycenter and about the 4th axis of symmetry symmetry;

Described the 5th barycenter and the 7th barycenter are along individual displacement is arranged on the major axes orientation each other; And

Described the 6th barycenter and the 8th barycenter are along individual displacement is arranged on the major axes orientation each other.

The invention provides and a kind ofly can measure the structure of a plurality of axial accelerations and rotation simultaneously.This structure comprises, one have the sensitivity of good string axle can be called framework along the movable platform of main shaft (or driving shaft) motion; By second structural unit that one or more pairs of identical induction masses are formed, each induction mass is all hung on the framework by interior elastic construction; The interior elastic construction of the symmetry that constitutes by single or multiple suspension elastic component, the end and the induction mass that hang elastic component link to each other, the other end links to each other with framework, and make the suspension elastic construction axis of symmetry and to hang the axis of symmetry of responding to mass consistent; The outer elastic construction of one fine strain of millet type, with frame hanging in basic unit or sensor platform, on the promptly static reference system; Elastic construction and induction mass make their barycenter depart from mutually on major axes orientation in being provided with; Outer elastic construction and framework are set equally, make their barycenter on major axes orientation, depart from mutually.

This structure Design makes that the motion of one or more pairs of induction masses obtains amplifying when the motion platform in this structure drives along the major axes orientation that moves.When the external force edge puts on this structure perpendicular to major axes orientation, a pair of induction mass will move in the opposite direction mutually along main shaft.And when external force when major axes orientation puts on this structure, all induction masses will move to same direction along main shaft.

Framework in this structure can be used motoricity, electrostatic force, piezoelectric forces, even magnetic field force or thermal expansion force drive, and promptly the driver drives framework that is comprised in the structure moves along major axes orientation.Driver can be selected from electrostatic actuator, piezoelectric actuator, magnetic driver, electromagnetic driver, microfluid driver, air driver or hot driver.

The motion that is in the induction mass of framework inside can be measured with capacitance variations, piezoelectricity, pressure drag or optical mode.

Structure of the present invention is used the electrostatic force sensing if be used for the condenser type gyrotron, then has very large driving dynamic range.This structure can be used for equally to the measurement of sharp movement and can be as other the similar device easy interference that is subjected to non-maidenliness electricity and stops in addition.Therefore, the resolution of device will be greatly improved.Since excite with motion detection can same axially on, exploring electrode can be arranged at the bottom or the top layer of sustained height, or is referred to as in the basic unit and (also can be arranged in simultaneously on bottom and the top layer).In addition, device also can use semiconductor technology to carry out micromechanics manufacturing processing (being MEMS (micro electro mechanical system) (MEMS) technology) easily, thereby produces in enormous quantities cheaply.

A kind of embodiment of the present invention is the device that can make with photoetching method.With as shown in Figure 5 condenser type motion sensor is example.This device comprises three layers.

Middle one deck is structure as described above (promptly asking the structure of patent protection).Described middle layer, being also referred to as structural sheet can be made by miniature manufacturing and conductor technology.In a specific embodiment, structural sheet can be realized on silicon-on-insulator (SOI) sheet.Wherein interior elastic construction and outer elastic construction are to make on the device layer of SOI sheet, and movable platform and induction mass are made on the combination layer of basalis (assembling device layer and basalis are made) can be at device layer.In another kind of example, structural sheet can be made by little manufacturing of face and LIGA technology respectively with polysilicon or nickel.In typical example, generally have two to (four) induction mass formation.

Top layer and low layer (or being called the top encapsulated layer, end encapsulated layer) useful ceramics, quartz, glass or silicon wafer are made.Can comprise electrode in one or more layers, electrode is made by photoetching or baffle mask technique.Structural sheet is between top layer and low layer, makes basic unit or as the rest frame of reference, by the deposition of thin (thick) material, and photoetching, and bonding techniques (as, anode linkage, Si-Si bonding, viscose glue bonding) be fixed in encapsulated layer, thus form assembly ware.Such assembly ware can low-cost large-scale production.

The bottom (or being placed in top layer and bottom alternatively simultaneously) that drive electrode is positioned in top layer like this electrode just directly on the top of movable platform (or alternatively simultaneously in top and bottom of movable platform). after the assembling process of device, between top layer electrode or low layer electrode and movable platform, formed spaced slot.The space crack can add pad by the sunk structure layer or between encapsulated layer and structural sheet and realizes around here.Electric capacity just forms between the drive electrode of encapsulated layer and movable platform like this---be called as driving electric capacity.The bottom that same a plurality of induction electrode is placed on top layer is positioned on the induction mass and forms inductance capacitance.

Driving voltage loads on the electrode; Form an electrostatic attraction and be used for driving movable platform along major axes orientation move up and down (we are set at the Z axle).

When the device of finishing assembling when X-axis is rotated; Because the effect of Coriolis force, wherein a pair of induction quality will be along Z-axle anti-phase movement.The motion of induction quality can be observed by the variation of inductance capacitance.

Because structure has symmetry, it can rotate duplicate mode with the measured X axle and measure the Y-axis rotation.X or Y to linear acceleration be superimposed on the Coriolis force, and Coriolis force has the vibration frequency same with drive signal.And Z to the linear acceleration effect under, all induction quality will be moved along Z axle same-phase.

According to structure disclosed above, the invention still further relates to a kind of method of measuring multi-shaft translation and rotation acceleration, comprise the steps:

Hang a framework on platform, its middle frame is to hang on the sensor platform with an elastic construction;

Framework is moved along the major axes orientation with respect to sensor platform, its middle frame comprises first dull and stereotyped and second flat board that constitutes two capacitive transducers respectively, first flat board and second flat board produce motion according to the design meeting because of external force, and the capacitance of first capacitive transducer is the function of first treadmill exercise, and the capacitance of second capacitive transducer is the function of second treadmill exercise; And

Gather first output signal, this output signal is based on the relative motion of first flat board and second flat board.

In said method, described first output signal can reflect that based on the not simultaneous movements of first flat board and second flat board sensor platform is along moving on second direction of motion different with major axes orientation.Equally, move first output signal reflection sensor platform moving based on first same-phase dull and stereotyped and second flat board along major axes orientation.

Because structure has symmetry, based on the relative motion of first flat board and second flat board, first output signal can also reflect the rotation of sensor platform.

Method of the present invention is also gathered second output signal, the relative motion of dull and stereotyped based on first equally and second flat board of this second output signal; And first output signal is dull and stereotyped based on first and the same-phase motion of second flat board; The anti-phase movement of second output signal and second flat board dull and stereotyped based on first.

In method of the present invention, can also comprise the 3rd flat board and the 4th flat board that constitutes the 3rd and the 4th capacitive transducer respectively at framework, wherein the 3rd flat board and the 4th flat board produce motion according to the design meeting because of external force, and the capacitance of the 3rd capacitive transducer is the function of the 3rd treadmill exercise, and the capacitance of the 4th capacitive transducer is the function of the 4th treadmill exercise; And first output signal is based on any two relative motion in first, second, third and the 4th flat board.

In sum, the present invention has all or part of following advantage:

I. because structure uses the differential motion of a pair of mass to survey the inertial force of X or Y-axis, resolution can improve; Perhaps

Ii. because structure uses the differential motion of a pair of mass to survey the inertial force of X or Y-axis, the between centers sensitivity of crosstalking can reduce; Perhaps

The iii structure is excited on outside framework, and exciting motion obtains amplifying by the induction quality.When structure used electrostatic force to be used for the condenser type gyrotron, this structure and nothing drive when keeping the original interstice had bigger dynamic range, and the resolution of device is greatly improved like this; Perhaps

Iv. by regulating outer elasticity fine strain of millet arm and interior elasticity fine strain of millet arm, the first natural eigenfrequency can with the second, the three eigenfrequency transfer very close to, can increase the resolution of rotation like this; Perhaps

V is because structure has symmetry, and it has very strong resistibility to neighbourhood noise; Perhaps

Vi is because driving and motion detection can realize that electrode can be arranged in the equal height of top layer and bottom simultaneously, can reduce processing cost like this on same axle; Perhaps

Any i of vii, ii, iii, iv, the combination of v and vi item.

Describe the present invention in detail below in conjunction with embodiment, scope of the present invention is not limited in the described instantiation, but is limited by claim, and any similar mutation and change all belong to the related scope of patent of the present invention.

Description of drawings

The structural representation of a kind of example of Fig. 1 multi-shaft inertial sensor of the present invention

The bottom planar view of sensor shown in Fig. 2 Fig. 1

The structural representation of the another kind of example of Fig. 3 multi-shaft inertial sensor of the present invention

The bottom planar view of sensor shown in Fig. 4 Fig. 3

The sectional view of the corresponding to a kind of multi-axis capacitive inertial sensor of Fig. 5 and the present invention

Embodiment

Embodiment one

First kind and the corresponding to instance graph of the present invention are shown among Fig. 1 and Fig. 2.

The structure of embodiment one has the outside framework 2 of a square annular, and it can be subjected to along the driving (promptly along the Z axle) perpendicular to Fig. 2 paper direction; Hanging frame is played at each outer turning that four outer elasticity fine strain of millet arms 3 are placed on framework 2.Four outer elasticity fine strain of millet arms 3 have identical height and stretch out from the bottom surface of outside framework quality 2.Ring structure is four masses (4-7) in the framework 2, they occupied framework 2 in most of area.The center of four induction masses has occupied the position of four symmetries of 2 li of frameworks.Four induction quality that framework is 2 li have identical level and height.In the structure 1 of having exposed, each induction quality 4 all has four parallel fine strain of millet arms to be attached thereto (41-44), and wherein two fine strain of millet arms (41,44) link to each other with two angles far away of framework and mass 4, and other two fine strain of millet arms (42,43) link to each other with two near side (ns)s of framework and mass 4.For the symmetrical plane of mass 4, fine strain of millet arm 41 and fine strain of millet arm 44 symmetries and fine strain of millet arm 42 and fine strain of millet arm 43 symmetries.Each four fine strain of millet arm of group (41-44) has identical level height with elasticity fine strain of millet arm 3 outside the bottom surface of outside framework quality 2 is outward extending.(3,41-44), the barycenter that detects mass (4-7) has relative displacement with respect to their corresponding elasticity fine strain of millet along Z-direction by laying elasticity fine strain of millet.It is right that four internal induction masses (4-7) form two motion-sensings.Mass 5 and 7 forms a pair of.Mass 4 and 6 forms that another is right.

Described structure has three kinds of natural mode of operations.In first kind of mode of operation, all four induction masses (4-7) all drive along the Z axle.In second kind of mode of operation, wherein a pair of mass (4,6) can move along the reverse mode of complete 180 degree of Z axle with mass 4 and 6.In the third mode of operation, the mass (5,7) that wherein matches can move along the reverse mode of complete 180 degree of Z axle with mass 5 and 7.Because the symmetric form of structure, second is the same with the natural eigenfrequency of the third pattern.And first kind of mode of operation is drive pattern.In order to improve resolution and to reduce the between centers sensitivity of crosstalking, the first natural eigenfrequency that outer fine strain of millet arm 3 is designed to it is very near its second and the 3rd natural eigenfrequency.The Z axle when structure in the outside framework upper edge and be driven, sensing mass (4-7) can amplify motion.When the motion of surveying perpendicular to driving shaft, during for example X-linear acceleration, or Y-rotation acceleration, pairing mass (4,6) will be mutually along Z axle anti-phase motion.When surveying the Y-linear acceleration, or during the X-rotation acceleration, another will be mutually along Z axle anti-phase motion to mass (5,7).When the linear acceleration of surveying along the Z axle, all masses move Z axle same-phase.

Realize said structure with the condenser type motion sensor.This kind vibration detection sensor can be surveyed x-, y-and z-axis accelerometer, and x-and y-Coriolis force (5-axis movement).This sensor has three layers.The middle layer is the structure that embodiment adopts.Top layer and low layer are the packaged glass layers.Outer semi-girder 3 hangs at encapsulated layer.Drive electrode is installed in the top layer bottom on the framework quality 2.Four sensing electrodes all are installed in the top layer bottom (4-7) on the sensing mass (4-7).When add driving voltage on drive electrode after, electrostatic attraction will drive framework 2 and move up and down along the Z-axle.This motion is amplified by the sensing mass (4-7) that links to each other by interior elastic beam with it.The largest benefit of such motion is that the sensing mass initial clearance space state preceding with there not being pulling compared, and has very large dynamic range.When device when the X-axle rotates because the effect of Coriolis force, mass 5 wherein will with mass 7 along Z-axle 180 anti-phase motion.Because the symmetry of structure, device can equally be surveyed the Y-rotation to surveying the X-rotation.The linear acceleration of X-or Y-will be superimposed with the Coriolis force with drive signal same frequency.All sensing masses (4-7) will be along the simultaneous movements up and down of Z-axle if under the effect of Z acceleration.The middle layer can be with popular monocrystalline silicon in semiconductor or the micro-system industry, polysilicon, SOI or other material is processed and device can carry out low-cost large-scale production.

Present embodiment can be described the disclosed method of the present invention equally.

Embodiment two

Fig. 3 and Fig. 4 provide second kind and the corresponding to example of the present invention.

Structure among the embodiment two has the outside framework 101 of annular, it will be along vertical plane in Fig. 4 the direction motion of (that is, along the z-axle); Four outer elastic beams 102 are used for support frame 101.These four outer beams 101 have same height and stretch out from the bottom surface of outer beam mass 101.Four outer fine strain of millet arms evenly distribute along framework.Among Fig. 4, they are along the direction of X and Y.The inner structure of framework 2 has four sensing masses (104-107), and they have different directions but same fan-shaped in framework 101.Framework 101 has identical height and thickness with four interior masses (104-107).It is right that four masses (104-107) form two groups of sensings.Mass 105 and 107 forms a pair of.Mass 104 and 106 forms a pair of in addition.In the disclosed structure of present embodiment, the most proximal end of single sensing mass 104 links to each other with framework by semi-girder 103.The symmetrical plane of the symmetrical plane of beam 103 and sensing quality 104 is harmonious.Really can the most proximal end of framework with mass 104 be linked to each other with a plurality of fine strain of millet arms, but they should have the same plane of symmetry with induction mass 104.In the disclosed structure of present embodiment, the symmetrical plane of the symmetrical plane of beam 103 and housing 101 is harmonious, and can help to reduce the between centers sensitivity of crosstalking like this.Has same height at these structural all elastic beams and induction quality (104-107) bottom surface.According to the arrangement of present elasticity fine strain of millet arm (102,103), induction quality (104-107) center has a displacement with respect to their elastic beam barycenter separately along the Z-direction of principal axis.

Identical with example one, this structure has three mode of operations.In first kind of mode of operation, all four induction masses (104-107) all drive along Z axle same-phase.In second kind of mode of operation, wherein a pair of mass (104,106) can move along the reverse mode of complete 180 degree of Z uranium with mass 104 and 106.In the third mode of operation, the mass (105,107) that wherein matches can move along the reverse mode of complete 180 degree of Z axle with mass 105 and 107.Because the symmetric form of structure, second is the same with the natural eigenfrequency of the third pattern.And first kind of mode of operation is drive pattern.In order to improve resolution and to reduce the between centers sensitivity of crosstalking, the first natural eigenfrequency that outer fine strain of millet arm 102 is designed to it is very near its second and the 3rd natural eigenfrequency.When this structure is driven along the Z axle on outside framework 101, sensing mass (104-107) can amplify motion.When the motion of surveying perpendicular to driving shaft, during for example X-linear acceleration, or Y-rotation acceleration, pairing mass (104,106) will be mutually along Z axle anti-phase motion.When surveying the Y-linear acceleration, or during the X-rotation acceleration, another will be mutually along Z axle anti-phase motion to mass (105,107).When the linear acceleration of surveying along the Z axle, all masses move Z axle same-phase.

Realize said structure with the condenser type motion sensor.The structure that this kind embodiment is adopted can be surveyed x-, y-and z-axis accelerometer, and x-and y-Coriolis force (5-axis movement).This sensor has three layers.The middle layer is the structure that embodiment adopts, and top layer and low layer are the packaged glass layers.Outer semi-girder is suspended on encapsulated layer with this structure.Drive electrode is installed in the top layer bottom on the framework quality 101.Four sensing electrodes all are installed in the top layer bottom on the sensing mass (104-107).When add driving voltage on drive electrode after, electrostatic attraction will drive framework 101 and move up and down along the Z-axle.This motion is amplified by the sensing mass that links to each other by interior elastic beam with it.When device when the X-axle rotates because the effect of Coriolis force, mass 105 wherein will with mass 107 along Z-axle 180 anti-phase motion.Because the symmetry of structure, device can equally be surveyed the Y-rotation to surveying the X-rotation.The linear acceleration of X-or Y-will with have the drive signal same frequency Coriolis force superimposed.All sensing masses (104-107) will be along the simultaneous movements up and down of Z-axle if under the effect of Z acceleration.The middle layer can be with popular monocrystalline silicon in semiconductor or the micro-system industry, polysilicon, SOI or other material is processed and device can carry out low-cost large-scale production.

Present embodiment can be described the disclosed method of the present invention equally.

Embodiment three

Fig. 5 has described to invent therewith the concrete sectional view of corresponding to another kind of condenser type motion sensor.Structural sheet is clipped in and forms the differential expression condenser type between two basic units in this example.

Similar to the example among aforesaid Fig. 1-4, structural sheet has comprised framework and the mass that links to each other by elasticity fine strain of millet arm with it.In fact, remove the basic unit at top, the structure among the structure among Fig. 5 and Fig. 1-4 is closely similar.After adding the basic unit and electrode thereof of upper top, the central authorities that each mass in the structural sheet all constitutes in the differential capacitance structure are dull and stereotyped.When mass was done motion with respect to the electrode in top layer and the low layer, one of them capacitance of differential capacitance can increase, and another will reduce.The result is that example shown in Figure 5 can bring higher sensitivity and the tolerance bigger to temperature variation.

Claims (4)

1. multi-shaft inertial sensor comprises:
First mass with first barycenter and first axis of symmetry;
Second mass with second barycenter and second axis of symmetry;
The 3rd mass with the 5th barycenter and the 3rd axis of symmetry;
The 4th mass with the 6th barycenter and the 4th axis of symmetry;
The framework that can move with respect to sensor platform along major axes orientation;
First mass is hung on first elastic construction on the framework, and this first elastic construction has the 3rd barycenter and about first axis of symmetry symmetry;
Second mass is hung on second elastic construction on the framework, and this second elastic construction has the 4th barycenter and about second axis of symmetry symmetry;
The 3rd mass hung on the 3rd elastic construction on the framework, and the 3rd elastic construction has the 7th barycenter and about the 3rd axis of symmetry symmetry;
The 4th mass hung on the 4th elastic construction on the framework, and the 4th elastic construction has the 8th barycenter and about the 4th axis of symmetry symmetry;
Described first barycenter and the 3rd barycenter are along displacement is arranged on the major axes orientation each other;
Described second barycenter and the 4th barycenter are along displacement is arranged on the major axes orientation each other;
Described the 5th barycenter and the 7th barycenter are along displacement is arranged on the major axes orientation each other; And
Described the 6th barycenter and the 8th barycenter are along displacement is arranged on the major axes orientation each other.
2. multi-shaft inertial sensor according to claim 1 is characterized in that also comprising the 5th elastic construction, the 5th elastic construction with frame hanging on sensor platform; Described the 5th elastic construction has the 9th barycenter, and framework has the tenth barycenter, and nine barycenter and the tenth barycenter are along having displacement on the major axes orientation each other.
3. multi-shaft inertial sensor according to claim 1 is characterized in that described first to fourth mass is identical.
4. multi-shaft inertial sensor according to claim 1 is characterized in that also comprising driver, and this driver drives framework moves along major axes orientation.
CN2008100197724A 2008-03-14 2008-03-14 Multi-shaft inertial sensor and method for measuring multi-shaft translation and rotation acceleration CN101270988B (en)

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