CN103256927B - A kind of manufacture method of quartz tuning-fork stop configurations - Google Patents
A kind of manufacture method of quartz tuning-fork stop configurations Download PDFInfo
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- CN103256927B CN103256927B CN201210041591.8A CN201210041591A CN103256927B CN 103256927 B CN103256927 B CN 103256927B CN 201210041591 A CN201210041591 A CN 201210041591A CN 103256927 B CN103256927 B CN 103256927B
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Abstract
The invention belongs to manufacture method, be specifically related to a kind of manufacture method of quartz tuning-fork stop configurations.It comprises: the first step, location; Second step, carries out the bonding of quartz tuning-fork and base; 3rd step, carries out the location of upper cover; 4th step carries out the bonding of upper cover and carriage; 5th step, carries out the assembling of base, carriage and upper cover.Remarkable result of the present invention is: (1) improves quartz tuning-fork shock resistance; (2) whole backstop is full quartz construction, and its processing technology is mutually compatible with existing quartz tuning-fork micro fabrication, is easy to mass and realizes; (3) homogeneity of fit-up gap when ensureing bonding; (4) the accurate control (within ± 2 μm) to backstop gap uniformity error is realized; (5) introduce assembly tooling, and determine positioning datum in conjunction with the crystal orientation of stop configurations, realize the accurate control (within ± 20 μm) to plane positioning error.
Description
Technical field
The invention belongs to manufacture method, be specifically related to a kind of manufacture method of quartz tuning-fork stop configurations.
Background technology
Quartz tuning-fork gyro is a kind of micromechanical gyro, and have the features such as volume is little, cost is low, reliability is high, environment resistant interference performance is strong, its performance can reach medium accuracy, can meet the requirement of a large amount of tactical weapon.A typical apply of quartz tuning-fork gyro is applied to guided cartridge (this type of guided cartridge thermobattery after transmitting is activated, and gyro starts the work of being energized, and gyro does not work in emission process) as the ingredient of MEMS inertial navigation system.
At present, large impact survival and the precision after impacting become field application penetrated by restriction quartz tuning-fork gyro two main factors at big gun, and the key factor affecting quartz tuning-fork gyro impact resistance to be its sensitive element quartz tuning-fork resist destruction (fracture) that large impact input causes or remarkable ability of being out of shape.
The sensitive element quartz tuning-fork of quartz tuning-fork gyro is H-shaped, and as shown in Figure 1, quartz tuning-fork 10 mainly comprises driving mass 11, drives beam 12, middle frame 13, thinning beam 14, middle anchor point 15, detects beam 16, Detection job block 17 etc.The matrix of quartz tuning-fork is the quartz crystal that Z cuts, and be anisotropic material, electrode thin layer is contained in the surface of tuning fork and side, and material is chromium/gold, and interdigital end is electroplating quality block, and material is gold.The thickness of quartz tuning-fork is 200 ~ 450 μm.
The failure mechanism relative complex of quartz tuning-fork under large impact input, view general is at present that the stress that large impact causes has exceeded the ultimate stress of quartz tuning-fork, and then causes the rupture failure of tuning fork.It is relatively long that the environment large impact input action time penetrated by big gun, is equivalent to a static overload input process.The driving of quartz tuning-fork is interdigital and detection is interdigital is cantilever design, easily occur bending and deformation under the large impact effect that environment penetrated by big gun, and then cause quartz tuning-fork weak part (being generally positioned at interdigital the most carefully place and thinning beam root etc.) to occur that stress is concentrated, the rupture failure of tuning fork is caused when maximum stress value exceedes the ultimate stress of quartz tuning-fork.Simulated the stress distribution of quartz tuning-fork under large impact effect and deformation by technological means such as finite element simulations, the ability that the anti-Y-direction of result display quartz tuning-fork is impacted is the strongest, and anti-X takes second place to the ability of impacting, and the ability that anti-Z-direction is impacted is the most weak.Quartz tuning-fork is carried out to the centrifugal test of Z-direction, result shows, and when centrifugal acceleration increases to 6000g, quartz tuning-fork generally occurs phenomenon of rupture.Therefore, when not taking defense of resistance to impact measure, quartz tuning-fork is survived cannot penetrate the large impact initial conditions in environment at big gun under.
Under normal circumstances, the structural strength of quartz tuning-fork can be improved by the mode strengthening thinning cantilever thickness, and then improve quartz tuning-fork impact resistance, but strengthen the frequency difference that thinning cantilever thickness can increase quartz tuning-fork driven-mode and sensed-mode, make the sensitivity decrease of gyro, can affect stability and the resistance to shock of gyro, the method is limited for the action effect improving quartz tuning-fork impact resistance in addition simultaneously.
If the method not by strengthening thinning cantilever thickness increases the impact resistance of quartz tuning-fork, just need to increase protective device (stop configurations) outward at quartz tuning-fork, but there is again following difficulty in this:
1) plane positioning accuracy requirement
Quartz tuning-fork is totally about 10mm, wide about 3mm, highly about 0.36mm, and its position corresponding with stop configurations the most carefully locates only there are 200 μm; The base of stop configurations is always about 5mm, wide about 3.5mm, highly about 0.8mm; Carriage be always about 5mm, wide about 0.4mm, highly about 0.30mm; Upper cover be always about 5mm, wide about 3.5mm, highly about 0.6mm; Base and the typical sizes of backstop positive stop lug boss above covered are 0.5mm*0.1mm.For ensureing shock resistance, the plane positioning error of whole stop configurations needs to control within ± 20 μm.Because stop configurations is the microstructure realized by micro Process skill, under the condition without supplementary structure and frock, carry out assembling manufacturing to it, difficulty is comparatively large, very easily causes larger plane positioning deviation.
2) backstop gap uniformity control errors
Desirable backstop gap is generally within 10 μm, in order to ensure shock resistance, the spacing gap uniformity error of backstop of whole stop configurations needs to control within ± 2 μm, two, left and right parts for playing the carriage of transition supporting role between base and upper cover do not connect mutually, independent separately, easily produce larger assembling manufacturing error time bonding, and then cause larger backstop gap uniformity error.
Summary of the invention
The object of the invention is the defect for prior art, a kind of quartz tuning-fork stop configurations is provided.
The present invention is achieved in that a kind of manufacture method of quartz tuning-fork stop configurations, it is characterized in that, comprises the following steps:
The first step, realizes the location of base by base frock, positioning datum is respectively base location X to reference field, base location Y-direction reference field;
Second step, carries out the bonding of quartz tuning-fork 10 and base by base frock, and positioning datum is respectively base and the bonding X of quartz tuning-fork to the bonding Y-direction reference field of reference field, base and quartz tuning-fork, ensures bonding strength and bonding gap by briquetting;
3rd step, carries out the location of upper cover by upper cover frock, positioning datum is respectively upper cover location X to reference field, upper cover location Y-direction reference field;
4th step, carries out the bonding of upper cover and carriage by upper cover frock, and positioning datum is respectively upper cover and the bonding X of carriage after improving to the bonding Y-direction reference field of the carriage after reference field, upper cover and improvement, ensures bonding strength and bonding gap by briquetting.Bonding complete after sliver point place, carriage end after improvement carry out sliver, remove end process supplementary structure, the upper cover after sliver and carriage;
5th step, carries out the assembling of base, carriage and upper cover by base frock, positioning datum is respectively stop configurations assembling X to reference field, stop configurations assembling Y-direction reference field, ensures bonding strength and bonding gap by briquetting.Bonding complete after carriage circumference sliver point place carry out sliver, remove remaining circumferential supplementary structure, realize the assembling manufacturing of whole stop configurations.
The manufacture method of a kind of quartz tuning-fork stop configurations as above, wherein, first manufacture the carriage after improving before the first step, its structure is: at the top of left and right two parts carriage and bottom adding technology supplementary structure respectively, realize the connection of left and right two parts supporting frame, form the carriage after an integrated process modification, end sliver point and circumferential sliver point are set between technique supplementary structure and carriage.
Remarkable result of the present invention is: (1) is not changing the structural parameters of tuning fork own, when ensureing the original performance of tuning fork, is realized spacing by stop configurations, improves quartz tuning-fork shock resistance; (2) whole backstop is full quartz construction, and its processing technology is mutually compatible with existing quartz tuning-fork micro fabrication, is easy to mass and realizes; (3) three-decker of whole backstop is all designed with and moves back glue groove, the homogeneity of fit-up gap when can ensure bonding; (4) to original carriage adding technology supplementary structure, the accurate control (within ± 2 μm) to backstop gap uniformity error is realized; (5) introduce assembly tooling, and determine positioning datum in conjunction with the crystal orientation of stop configurations, realize the accurate control (within ± 20 μm) to plane positioning error.
Accompanying drawing explanation
Fig. 1 is H-shaped quartz tuning-fork sensitive structure figure corresponding to the present invention;
Fig. 2 is the schematic diagram of stop configurations;
Fig. 3 is understructure schematic diagram;
Fig. 4 is carriage structural representation;
Fig. 5 is superstructure schematic diagram;
Fig. 6 is the partial enlarged drawing at A place in Fig. 3;
Fig. 7 is the carriage structural representation after process modification;
Fig. 8 is briquetting schematic diagram;
Fig. 9 is base frock schematic diagram;
Figure 10 is upper cover frock schematic diagram;
Figure 11 is base location schematic diagram;
Figure 12 is base and the bonding schematic diagram of quartz tuning-fork;
Figure 13 is upper cover location schematic diagram;
Figure 14 is upper cover and the bonding schematic diagram of carriage;
Figure 15 is upper cover after the sliver of end and carriage combination schematic diagram;
Figure 16 is the assembling schematic diagram of stop configurations.
In figure: 10. quartz tuning-fork, 11. drive mass, 12. drive beam, 13. middle frames, 14. thinning beams, 15. middle anchor points, 16. detect beam, 17. Detection job blocks, 20. stop configurations, 21. bases, 22. carriages, 23. upper covers, 211. base frame mating surfaces, 212. bases move back glue groove, 213. base backstop positive stop lug boss, 215. base center mating surfaces, 216. base backstop limit bottom surface, 221. carriage mating surfaces, 222. carriages move back glue groove, 231. upper cover rim fits faces, 232. upper covers move back glue groove, 233. upper cover backstop positive stop lug boss, 234. upper cover cavitys, 235. upper cover backstop limit bottom surface, carriage structure after 24. improvement, 243. end sliver points, 244. circumferential sliver points, 245. technique supplementary structures, carriage circumference technique supplementary structure after 246. improvement, 30. briquettings, 301. briquetting central boss, 302. briquetting pedestals, 31. base frocks, 311. base bottom cavitys, 312 base upper chamber, 32. upper cover frocks, 321. upper cover bottom cavities, 322. upper cover upper chamber, 411. base location X are to reference field, 412. base location Y-direction reference fields, 421. bases and the bonding X of quartz tuning-fork are to reference field, 422. bases and the bonding Y-direction reference field of quartz tuning-fork, 431. upper cover location X are to reference field, 432. upper cover location Y-direction reference fields, 441. upper covers and the bonding X of carriage after improving are to reference field, 442. upper covers and the bonding Y-direction reference field of carriage after improving, 461. stop configurations assembling X are to reference field, 462. stop configurations assembling Y-direction reference fields.
Embodiment
Be further described below in conjunction with the assembling manufacturing method of drawings and Examples to a kind of quartz tuning-fork stop configurations of the present invention.
A kind of quartz tuning-fork stop configurations as shown in Figure 2, is made up of base 21 (Fig. 3), carriage 22 (Fig. 4) and upper cover 23 (Fig. 5) three part.Quartz tuning-fork 10 is positioned at the inside cavity of base 21, carriage 22 and upper cover 23 composition.
As shown in Figure 3, base 21 is rectangular parallelepiped part, is provided with three layers of not contour structure in the front of base 21, wherein arranges in the both sides in base 21 front respectively to arrange a carriage mating surface 211 as the highest one deck.This carriage mating surface 211 is the assembling contact position of base 21 and carriage 22.Arrange rectangular base center mating surface 215 in the center in base 21 front also as the highest one deck, this base center mating surface 215 is the assembling contact position of base 21 and quartz tuning-fork 10.Carriage mating surface 211 is contour with base center mating surface 215.The base backstop limit bottom surface 216 (minimum one deck) of base 21 is distributed with four base backstop positive stop lug boss 213 as second high one deck, wherein two base backstop positive stop lug boss 213 are arranged on the top of base backstop limit bottom surface 216, and another two base backstop positive stop lug boss 213 are arranged on the bottom of base backstop limit bottom surface 216.Corresponding quartz tuning-fork drives the base backstop positive stop lug boss 213 of interdigital end apart from driving the length of beam 12 reference position and driving the ratio of beam 12 total length to be about 1/5 ~ 1/3, corresponding quartz tuning-fork detects interdigital base backstop positive stop lug boss 213 and is generally positioned near the interdigital reference position of detection, and backstop gap (height of the upper surface distance mating surface of backstop positive stop lug boss) is general within 10 μm.In order to improve assembly precision, base frame mating surface 211 is provided with base and moves back glue groove 212, and base moves back the degree of depth of glue groove 212 relative to mating surface generally within 10 μm.
As shown in Figure 4, carriage 22 is two-layer not contour structure, equal with the thickness of quartz tuning-fork 10, and for playing a supportive role between base 21 and upper cover 23, carriage mating surface 221 is the assembling contact position of carriage 22 and base 21/ upper cover 23.In order to improve assembly precision, the matching surface up and down of carriage 22, all containing moving back glue groove 222, moves back the degree of depth of glue groove relative to mating surface generally within 10 μm.
As shown in Figure 5, upper cover 23 is three layers of not contour structure, and the both sides of upper cover 23 respectively arrange a upper cover rim fits face 231, and this upper cover rim fits face 231 is the assembling contact position of upper cover 23 and carriage 22.The upper cover backstop limit bottom surface 235 of upper cover 23 is distributed with a upper cover cavity 234 and four upper cover backstop positive stop lug boss 233, wherein two upper cover backstop positive stop lug boss 233 are arranged on the top of upper cover backstop limit bottom surface 235, and another two upper cover backstop positive stop lug boss 233 are arranged on the bottom of upper cover backstop limit bottom surface 235.Corresponding quartz tuning-fork drives the upper cover backstop positive stop lug boss 233 of interdigital end apart from driving the length of beam 12 reference position and driving the ratio of beam 12 total length to be about 1/5 ~ 1/3, the upper cover backstop positive stop lug boss 233 that corresponding quartz tuning-fork detects interdigital end is generally positioned at and detects near interdigital reference position, and backstop gap (height of the upper surface distance mating surface of backstop positive stop lug boss) is general within 10 μm.In order to improve assembly precision, upper cover mating surface moving back glue groove 232 containing upper cover, moves back the degree of depth of glue groove relative to mating surface generally within 10 μm.
As shown in Figure 7, the carriage 22 of original quartz tuning-fork stop configurations is improved, by adding technology supplementary structure 245, realize the connection of left and right two parts supporting frame, form the carriage 24 after an integrated process modification, and in assembling process, remove technique supplementary structure 245 by end sliver point 243 and circumferential sliver point 244 successively, thus under the condition not changing stop configurations feature, realize the accurate control to backstop gap uniformity error.
In order to realize the control to rigging error, designing a kind of assembly tooling, comprising briquetting 30, base frock 31 and upper cover frock 32 3 part.As shown in Figure 8, briquetting is made up of briquetting central boss 301 and pressing plate pedestal 302, is mainly used in controlling bonding strength and bonding gap.As shown in Figure 9, base frock 31 mainly comprises two cavitys, and bottom cavity 311 is mainly used in the location of backstop base, and upper chamber 312 is mainly used in the location of quartz tuning-fork and carriage.As shown in Figure 10, upper cover frock 32 mainly comprises two cavitys, and bottom cavity 321 is mainly used in the location of upper cover, and upper chamber 322 is mainly used in the location of carriage.
A manufacture method for quartz tuning-fork stop configurations, comprises the following steps:
The first step, as Figure 11, realizes the location of base 21 by base frock 31, positioning datum is respectively base location X to reference field 411, base location Y-direction reference field 412;
Second step, as Figure 12, carry out the bonding of quartz tuning-fork 10 and base 21 by base frock 31, positioning datum is respectively base and the bonding X of quartz tuning-fork to the bonding Y-direction reference field 422 of reference field 421, base and quartz tuning-fork, ensures bonding strength and bonding gap by briquetting 30;
3rd step, as Figure 13, carries out the location of upper cover 23 by upper cover frock 32, positioning datum is respectively upper cover location X to reference field 431, upper cover location Y-direction reference field 432;
4th step, as Figure 14, carry out the bonding of upper cover 23 and carriage 24 by upper cover frock 32, positioning datum is respectively upper cover and the bonding X of carriage after improving to the bonding Y-direction reference field 442 of the carriage after reference field 441, upper cover and improvement, ensures bonding strength and bonding gap by briquetting 30.Bonding complete after sliver point 243 place, carriage end after improving shown in Fig. 7 carry out sliver, remove end process supplementary structure 245, the upper cover after sliver and carriage are as shown in figure 15;
5th step, as Figure 16, carry out the assembling of base 21, carriage 24 and upper cover 23 by base frock 31, positioning datum is respectively stop configurations assembling X to reference field 461, stop configurations assembling Y-direction reference field 462, ensures bonding strength and bonding gap by briquetting 30.Bonding complete after shown in Fig. 7 carriage circumference sliver point 244 place carry out sliver, remove remaining circumferential supplementary structure 246, realize the assembling manufacturing of whole stop configurations.
More than describing a kind of assembling manufacturing method of quartz tuning-fork shock resistance backstop in detail, not departing from essential scope of the present invention, can make certain distortion or amendment to the present invention, its manufacture method is also not limited to content disclosed in example.
Claims (2)
1. a manufacture method for quartz tuning-fork stop configurations, is characterized in that, comprises the following steps:
The first step, realizes the location of base (21) by base frock (31), positioning datum is respectively base location X to reference field (411), base location Y-direction reference field (412);
Second step, the bonding of quartz tuning-fork 10 and base (21) is carried out by base frock (31), positioning datum is respectively base and the bonding X of quartz tuning-fork to the bonding Y-direction reference field (422) of reference field (421), base and quartz tuning-fork, ensures bonding strength and bonding gap by briquetting (30);
3rd step, carries out the location of upper cover (23) by upper cover frock (32), positioning datum is respectively upper cover location X to reference field (431), upper cover location Y-direction reference field (432);
4th step, the bonding of upper cover (23) and carriage (24) is carried out by upper cover frock (32), positioning datum is respectively the bonding X of carriage after upper cover and improvement to the bonding Y-direction reference field (442) of the carriage after reference field (441), upper cover and improvement, bonding strength and bonding gap is ensured by briquetting (30), bonding complete after sliver point (243) place, carriage end after improvement carry out sliver, remove end process supplementary structure (245);
5th step, the assembling of base (21), carriage (24) and upper cover (23) is carried out by base frock (31), positioning datum is respectively stop configurations assembling X to reference field (461), stop configurations assembling Y-direction reference field (462), bonding strength and bonding gap is ensured by briquetting (30), bonding complete after carriage circumference sliver point (244) place carry out sliver, remove remaining circumferential supplementary structure (246), realize the assembling manufacturing of whole stop configurations.
2. the manufacture method of a kind of quartz tuning-fork stop configurations as claimed in claim 1, it is characterized in that: first manufacture the carriage after improving before the first step, its structure is: at top and bottom adding technology supplementary structure (245) respectively of left and right two parts carriage (22), realize the connection of left and right two parts supporting frame, form the carriage (24) after an integrated process modification, end sliver point (243) and circumferential sliver point (244) are set between technique supplementary structure (245) and carriage (22).
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| CN111707250B (en) * | 2020-06-03 | 2022-09-09 | 北京自动化控制设备研究所 | Quartz tuning fork gyroscope vibration damper |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1587358A1 (en) * | 1988-04-21 | 1990-08-23 | Отраслевая Научно-Исследовательская Лаборатория "Дистанционная Диагностика" Института Общей Физики - Института Геохимии И Аналитической Химии Ан Ссср При Наманганском Педагогическом Институте Им.Хамзы | Tuning fork bed for dynamic tests of articles |
| CN1195229A (en) * | 1997-03-31 | 1998-10-07 | 日本电波工业株式会社 | Quartz crystal element and method for manufacturing same |
| EP1091189A1 (en) * | 1998-06-26 | 2001-04-11 | Fujitsu Limited | Tuning fork type vibrational gyroscope |
| CN1388645A (en) * | 2001-05-24 | 2003-01-01 | 三星电机株式会社 | Method for producing quartz crystal oscillator and quartz crystal oscillator produced with the same method |
| CN1844931A (en) * | 2006-05-23 | 2006-10-11 | 北京航空航天大学 | Resonance type micromechanical accelerometer |
| CN101261126A (en) * | 2008-04-10 | 2008-09-10 | 上海交通大学 | Micro- solid mode gyroscope |
| CN101316097A (en) * | 2007-05-30 | 2008-12-03 | 爱普生拓优科梦株式会社 | Tuning fork resonator element and turning fork resonator |
| CN100583627C (en) * | 2005-04-27 | 2010-01-20 | 精工爱普生株式会社 | Piezoelectric vibrating plate and piezoelectric component |
| CN101666646A (en) * | 2009-10-16 | 2010-03-10 | 中国人民解放军国防科学技术大学 | Inclined double-end tuning-fork type silica micromechanical gyroscope and making method thereof |
| CN102055429A (en) * | 2010-12-31 | 2011-05-11 | 苏州市东元光电科技有限公司 | Tuning fork type crystal oscillator |
-
2012
- 2012-02-21 CN CN201210041591.8A patent/CN103256927B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SU1587358A1 (en) * | 1988-04-21 | 1990-08-23 | Отраслевая Научно-Исследовательская Лаборатория "Дистанционная Диагностика" Института Общей Физики - Института Геохимии И Аналитической Химии Ан Ссср При Наманганском Педагогическом Институте Им.Хамзы | Tuning fork bed for dynamic tests of articles |
| CN1195229A (en) * | 1997-03-31 | 1998-10-07 | 日本电波工业株式会社 | Quartz crystal element and method for manufacturing same |
| EP1091189A1 (en) * | 1998-06-26 | 2001-04-11 | Fujitsu Limited | Tuning fork type vibrational gyroscope |
| CN1388645A (en) * | 2001-05-24 | 2003-01-01 | 三星电机株式会社 | Method for producing quartz crystal oscillator and quartz crystal oscillator produced with the same method |
| CN100583627C (en) * | 2005-04-27 | 2010-01-20 | 精工爱普生株式会社 | Piezoelectric vibrating plate and piezoelectric component |
| CN1844931A (en) * | 2006-05-23 | 2006-10-11 | 北京航空航天大学 | Resonance type micromechanical accelerometer |
| CN101316097A (en) * | 2007-05-30 | 2008-12-03 | 爱普生拓优科梦株式会社 | Tuning fork resonator element and turning fork resonator |
| CN101261126A (en) * | 2008-04-10 | 2008-09-10 | 上海交通大学 | Micro- solid mode gyroscope |
| CN101666646A (en) * | 2009-10-16 | 2010-03-10 | 中国人民解放军国防科学技术大学 | Inclined double-end tuning-fork type silica micromechanical gyroscope and making method thereof |
| CN102055429A (en) * | 2010-12-31 | 2011-05-11 | 苏州市东元光电科技有限公司 | Tuning fork type crystal oscillator |
Non-Patent Citations (1)
| Title |
|---|
| 《石英音叉细微加工若干问题探讨》;唐琼等;《微细加工技术》;20040630(第2期);66-71 * |
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