CN109682364A - Piezoelectric mems decoupling-structure and MEMS gyroscope - Google Patents
Piezoelectric mems decoupling-structure and MEMS gyroscope Download PDFInfo
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- CN109682364A CN109682364A CN201811529259.XA CN201811529259A CN109682364A CN 109682364 A CN109682364 A CN 109682364A CN 201811529259 A CN201811529259 A CN 201811529259A CN 109682364 A CN109682364 A CN 109682364A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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Abstract
The invention discloses a kind of piezoelectric mems decoupling-structure and MEMS gyroscopes, the piezoelectric mems decoupling-structure, it include: a T-type girder construction, including integrated crossbeam and stringer, which successively includes: substrate, lower electrode layer and piezoelectric material layer from bottom to top；Second top electrode, it is T-shaped as detecting electrode, it is located on T-type girder construction, it is symmetrical about stringer center line；And first top electrode and third top electrode be located on stringer as driving electrodes, be symmetrically distributed in stringer center line two sides, it is mutually indepedent to be located at the part on stringer with the second top electrode.The decoupling-structure is by setting a T-type girder construction comprising integrated crossbeam and stringer for its global shape, and it is arranged in the T-type girder construction about the symmetrical T-type detecting electrode in stringer center and symmetrical two driving electrodes on stringer, it realizes full decoupled, the detection accuracy of gyroscope can be effectively improved.
Description
Technical field
The disclosure belongs to microelectronics technology, is related to a kind of piezoelectric mems decoupling-structure and MEMS gyroscope.
Background technique
MEMS (MEMS, Micro-electro Mechanical Systems) device due to it is small in size,
It is low in energy consumption, at low cost, the advantages such as be easily integrated, and be widely used in consumer electronics field.MEMS gyroscope is inertial navigation
In core devices, according to coriolis effect principle can detect rotary body angular speed.According to the basic principle of MEMS gyroscope,
MEMS gyroscope includes two mutually orthogonal resonance modes, it may be assumed that driven-mode and sensed-mode.In the excitation of driving signal
Under, resonance can occur for gyroscope arrangement.When there is angular speed, due to coriolis effect, under the action of Coriolis force, detecting
Detection signal output is had on electrode.
However due to the coupling effect in structure, when gyroscope work is in driven-mode, in no extraneous angular speed work
In the case where, gyroscope arrangement also has change in displacement in detection direction, and signal output is still suffered from detecting electrode, should
Phenomenon is the orthogonal coupling effect of MEMS gyroscope.The orthogonal coupling phenomenon of gyroscope can seriously affect the detection essence of gyroscope
The characteristics such as degree, it is therefore desirable to inhibit orthogonal coupling in structure design.The method of the common orthogonal coupling of inhibition has: electrostatic tune
Humorous, driven-mode single-degree-of-freedom design, the design of sensed-mode single-degree-of-freedom etc..But due to the gyroscope sheet based on coriolis effect
Body is exactly the angular velocity detection realized by coupling, and therefore, it is difficult to realize complete decoupling.
Summary of the invention
(1) technical problems to be solved
Present disclose provides a kind of piezoelectric mems decoupling-structure and MEMS gyroscopes, set forth above at least partly to solve
The technical issues of.
(2) technical solution
According to one aspect of the disclosure, a kind of piezoelectric mems decoupling-structure is provided, comprising: a T-type girder construction 1, packet
Integrated crossbeam 11 and stringer 12 are included, which successively includes: substrate 101, lower electrode layer 102 and pressure from bottom to top
Material layer 103；Second top electrode 142, it is T-shaped as detecting electrode, it is located on T-type girder construction 1, about stringer center
Line 120 is symmetrical；And first top electrode 141 and third top electrode 143 be located on stringer 12 as driving electrodes, symmetrical point
120 two sides of stringer center line are distributed in, it is mutually indepedent to be located at the part on stringer 12 with the second top electrode 142.
In some embodiments of the present disclosure, stringer 12 is used as driving beam, and crossbeam 11 is as detection beam.
In some embodiments of the present disclosure, under driven-mode, the first top electrode 141 and third top electrode 143 are connected
To a pair of of differential driving signal, to drive the T-type girder construction 1 that in plane vibration occurs.
In some embodiments of the present disclosure, the first top electrode 141 is identical with shape, the size of third top electrode 143.
In some embodiments of the present disclosure, part of second top electrode 142 on crossbeam be in long strip, serpentine shape or
A combination thereof.
In some embodiments of the present disclosure, the material of substrate 101 includes the one or more of following material: silicon, dioxy
SiClx and SOI.
In some embodiments of the present disclosure, the material of piezoelectric material layer 103 includes the one or more of following material: pressure
Electric monocrystal, piezoelectricity polycrystal film, polycrystal piezoelectric ceramics, high polymer piezoelectric material and polymer-piezoelectric ceramics composite wood
Material.
In some embodiments of the present disclosure, piezoelectric mems decoupling-structure, further includes: anchor point 15, positioned at the end of stringer 12
At point.
A kind of MEMS gyroscope another aspect of the present disclosure provides, the pressure mentioned including any one of disclosure
Electric MEMS decoupling-structure.
In some embodiments of the present disclosure, MEMS gyroscope a, further includes: mass block 2 includes one in the mass block 2
Accommodating space, the accommodating space are used to place the crossbeam 11 and stringer 12 of piezoelectric mems decoupling-structure.
(3) beneficial effect
It can be seen from the above technical proposal that piezoelectric mems decoupling-structure and MEMS gyroscope that the disclosure provides, have
Below the utility model has the advantages that
The global shape of the decoupling-structure is set as a T-type girder construction comprising integrated crossbeam and stringer, and first powers on
Pole and third top electrode are symmetrically distributed in stringer center line two sides, and as driving electrodes, second powers on extremely one about in stringer
The symmetrical T-type electrode of heart line, as detecting electrode；Under driven-mode, the piezoelectric effect based on piezoelectric material, by
Apply voltage on upper/lower electrode, the resonance in total generating surface can be driven, stringer is as driving beam, and crossbeam is as detection
Beam still suffers from displacement deformation due to structure Coupling on the crossbeam of T-type beam, i.e. the vibration of driven-mode can be coupled to detection
Liang Shang, cause detect beam be subjected to displacement deformation, due to the second top electrode opposing side rails center line be it is symmetrical, because of corss coupling
Beam deformation is detected caused by conjunction can polarize out the heterocharge of equivalent at the second top electrode, and the heterocharge of these equivalent exists
Second top electrode is realized and is mutually neutralized, therefore the setting of T-type girder construction and the second top electrode is so that the structure overall performance is inspection
It surveys on electrode and is exported without coupled signal, that is, realize full decoupled, the detection accuracy of gyroscope can be effectively improved.
Detailed description of the invention
Fig. 1 is the schematic diagram of the piezoelectric mems decoupling-structure according to shown in one embodiment of the disclosure.
Fig. 2 is that there are two the knots of the MEMS gyroscope of piezoelectric mems decoupling-structure for the band according to shown in one embodiment of the disclosure
Structure schematic diagram.
Fig. 3 is the signal that the driven-mode lower piezoelectric MEMS decoupling-structure according to shown in one embodiment of the disclosure realizes decoupling
Figure, wherein (a) is that charge detection position A, B, F, C, D signal are corresponded in detecting electrode, is (b) positive and negative charge on detecting electrode
Distribution schematic diagram.
[symbol description]
1-T type girder construction；
11- crossbeam；12- stringer；
101- substrate；102- lower electrode layer；
103- piezoelectric material layer；
The first top electrode of 141-；The second top electrode of 142-；
143- third top electrode；
120- stringer center line；15- anchor point；
2- mass block.
Specific embodiment
Decline to solve the detection accuracy of gyroscope caused by orthogonal coupling phenomenon, the existing side for inhibiting orthogonal coupling
Method can not achieve full decoupled problem, and the disclosure proposes a kind of piezoelectric mems decoupling-structure and MEMS gyroscope, by that will solve
The global shape of coupling structure is set as a T-type girder construction comprising integrated crossbeam and stringer, and is arranged in the T-type girder construction
About the symmetrical T-type detecting electrode in stringer center and symmetrical two driving electrodes on stringer, to realize solution completely
Coupling can effectively improve the detection accuracy of gyroscope.
For the purposes, technical schemes and advantages of the disclosure are more clearly understood, below in conjunction with specific embodiment, and reference
The disclosure is further described in attached drawing.In the disclosure, " T-shaped " indicates that the shape includes that the one of intersection laterally indulges with one
To.
In first exemplary embodiment of the disclosure, a kind of piezoelectric mems decoupling-structure is provided.
Fig. 1 is the schematic diagram of the piezoelectric mems decoupling-structure according to shown in one embodiment of the disclosure.
Shown in referring to Fig.1, the piezoelectric mems decoupling-structure of the disclosure, comprising:
One T-type girder construction 1, including integrated crossbeam 11 and stringer 12, the T-type girder construction 1 successively include: from bottom to top
Substrate 101, lower electrode layer 102 and piezoelectric material layer 103；
Second top electrode 142, it is T-shaped as detecting electrode, it is located on T-type girder construction 1, about stringer center line 120
Symmetrically；And
First top electrode 141 and third top electrode 143 are located on stringer 12, are symmetrically distributed in vertical as driving electrodes
It is mutually indepedent to be located at the part on stringer 12 with the second top electrode 142 for 120 two sides of beam center line.
In the present embodiment, the piezoelectric mems decoupling-structure, further includes: anchor point 15, at the endpoint of stringer 12, to carry out
The fixation of the piezoelectric mems decoupling-structure.
In the present embodiment, the shape of substrate 101, lower electrode layer 102 and piezoelectric material layer 103 is T-type, collectively forms T
Type girder construction 1, T-type girder construction 1 and 3 independent the-the first top electrodes of top electrode 141 being located on the T-type girder construction 1, the
Piezoelectric mems decoupling-structure is integrally formed in two top electrodes 142 and third top electrode 143, under driven-mode, is based on piezoelectric material
Piezoelectric effect the resonance in total generating surface can be driven by applying voltage on upper/lower electrode.
Below come be discussed in detail the present embodiment piezoelectric mems decoupling-structure various pieces.
In the present embodiment, the material of substrate 101 includes the one or more of following material: silicon, silica and SOI
(silicon-on-insulator includes a buried oxide layer between top layer silicon and insulating substrate).
In the present embodiment, the material of piezoelectric material layer 103 includes the one or more of following material: piezoelectric single crystal, pressure
Electric polycrystal film, polycrystal piezoelectric ceramics, high polymer piezoelectric material and polymer-piezo-electric ceramic composite material, such as: nitrogen
Change aluminium, quartz, piezoelectric ceramics etc..
In the present embodiment, the first top electrode 141 and third top electrode 143 are located on stringer 12 as driving electrodes,
It is symmetrically distributed in 120 two sides of stringer center line.Under driven-mode, it is connected in the first top electrode 141 and third top electrode 143
A pair of of differential driving signal can drive the T-type girder construction 1 that in plane vibration occurs.
In the present embodiment, corresponding stringer 12 is used as driving beam, and crossbeam 11 is as detection beam.Second top electrode 142, as inspection
Electrode is surveyed, it is T-shaped, it is located on T-type girder construction 1, it is symmetrical about stringer center line 120.
In some embodiments of the present disclosure, the first top electrode 141 is identical with shape, the size of third top electrode 143.
For example, in the present embodiment, the first top electrode 141 and third top electrode 143 are rectangle, and the first top electrode 141
With the equal length of third top electrode 143, width is also equal.Certainly, in other embodiments, the first top electrode 141 and third
Top electrode 143 can also be other shapes.
In some embodiments of the present disclosure, part of second top electrode 142 on crossbeam be in long strip, serpentine shape or
A combination thereof.
For example, part of second top electrode 142 on crossbeam is in meandering shape in the present embodiment.
In second exemplary embodiment of the disclosure, provide a kind of comprising above-mentioned piezoelectric mems decoupling-structure
MEMS gyroscope.
Fig. 2 is that there are two the knots of the MEMS gyroscope of piezoelectric mems decoupling-structure for the band according to shown in one embodiment of the disclosure
Structure schematic diagram.
Referring to shown in Fig. 2, the MEMS gyroscope of the present embodiment, comprising: two piezoelectric mems decoupling-structures and a mass
Block 2, includes an accommodating space in the mass block 2, which is used to place the crossbeam 11 of two piezoelectric mems decoupling-structures
With stringer 12.
In the present embodiment, as shown in Fig. 2, the anchor point 15 of two piezoelectric mems decoupling-structures, positioned at the endpoint of stringer 12
Place.
For convenience of the decoupling principle and characteristic for describing the piezoelectric mems decoupling-structure, completely tied below with reference to specific gyroscope
Structure is illustrated.
In the present embodiment, the MEMS gyroscope in Fig. 2 includes two piezoelectric mems decoupling-structures and one mass block 2,2
Anchor point 15 is separately positioned at the endpoint of stringer 12 of 2 T-type girder constructions 1.First top electrode 141 and third top electrode 143 are made
For a pair of of differential driving electrode, the vibration in total generating surface, the as driven-mode of the MEMS gyroscope are driven, it should
MEMS gyroscope (hereinafter referred to as gyroscope) is used to detect the angular speed of z-axis direction (i.e. perpendicular to gyroscope in-plane).When
Coriolis force can be generated when having the angular speed of z-axis to act on gyroscope, the knot of gyroscope under the action of Coriolis force
Structure can be vibrated in x-axis direction, this mode of oscillation is sensed-mode, and the signal of the sensed-mode can be by the second top electrode
142 detections.It is above the basic principle of gyroscope work.
Orthogonal coupling is referred in no extraneous angular speed effect, is coupled to detection knot by the driven-mode of gyroscope
Signal magnitude on structure.In the MEMS gyroscope comprising piezoelectric mems decoupling-structure shown in the disclosure, sensing unit is T-type
Girder construction 1, the stringer 12 of the T-type girder construction 1 are used as driving beam, and crossbeam 11 is as detection beam.When gyroscope work is in driving mould
When state, due to structure Coupling, displacement deformation is still suffered from the crossbeam 11 of T-type girder construction 1, i.e. the vibration of driven-mode can coupling
It closes on detection beam, detection beam is caused to be subjected to displacement deformation.And the second top electrode 142 in the disclosure is about stringer center line
120 is symmetrical, can polarize out at the second top electrode 142 contrary sign of equivalent because detecting beam deformation caused by orthogonal coupling
Charge, the heterocharge of these equivalent in the second top electrode 142 can mutually in and, therefore T-type girder construction and the second top electrode
Setting so that the structure overall performance be the-the second top electrode of detecting electrode 142 on without coupled signal export, that is, realize completely
Decoupling.
Fig. 3 is the signal that the driven-mode lower piezoelectric MEMS decoupling-structure according to shown in one embodiment of the disclosure realizes decoupling
Figure, wherein (a) is corresponding detection Charge sites A, B, F, C, D signal in detecting electrode, is (b) positive and negative charge on detecting electrode
Distribution schematic diagram.
In one example, as shown in (a) in Fig. 3, under driven-mode, detecting electrode (the second top electrode 142) is located at cross
Several symmetrical charge detection position A, B, F (being located at center), C (symmetrical with A), D is arranged (with B pairs in part on beam 11
Claim), distribution of charges situation is corresponding as shown in (b) in Fig. 3, and the second top electrode 142 is located at the part on crossbeam about in stringer
120 bilateral symmetry of heart line, different amounts of positive charge is presented in corresponding A, B point on the left of central point F, corresponding in A, B point symmetry point
The negative electrical charge with A, B point equivalent respectively is presented in position C (symmetrical with A), the D of cloth point (symmetrical with B), in this way, which equivalent is different
Number charge can occur on detecting electrode in mutually and.
In conclusion present disclose provides a kind of piezoelectric mems decoupling-structure and MEMS gyroscope, by by decoupling-structure
Global shape be set as a T-type girder construction comprising integrated crossbeam and stringer, and in the T-type girder construction setting about vertical
The symmetrical T-type detecting electrode in beam center and symmetrical two driving electrodes on stringer, in the first top electrode and third
Electrode is symmetrically distributed in stringer center line two sides, and as driving electrodes, second powers on extremely one about stringer center line or so pair
The T-type electrode of title, as detecting electrode；Under driven-mode, the piezoelectric effect based on piezoelectric material, by upper/lower electrode
Apply voltage, the resonance in total generating surface can be driven, stringer is as driving beam, and crossbeam is as detection beam, due to knot
Structure coupling still suffers from displacement deformation on the crossbeam of T-type beam, i.e. the vibration of driven-mode can be coupled on detection beam, causes
Detection beam is subjected to displacement deformation, due to the second top electrode opposing side rails center line be it is symmetrical, cause due to orthogonal coupling
The deformation of detection beam can polarize out at the second top electrode the heterocharge of equivalent, the heterocharge of these equivalent is powered on second
Pole is realized and is mutually neutralized, therefore the setting of T-type girder construction and the second top electrode is so that the structure overall performance is on detecting electrode
The output of no coupled signal, that is, realize full decoupled, can effectively improve the detection accuracy of gyroscope.
It should be understood that when element (such as layer, film, region or substrate) is described as at another element "upper", this yuan
Part can be directly on another element, or intermediary element also may be present.Moreover, in specification and claims, when
When description has element " connected " to another element, which " can be directly connected to " to another element, or pass through third element
" electrical connection " is to another element.And the shape and size of each component do not reflect actual size and ratio in figure, and only illustrate
The content of the embodiment of the present disclosure.In addition, in the claims, any reference symbol between parentheses should not be configured to pair
The limitation of claim.
Furthermore word "comprising" or " comprising " do not exclude the presence of element or step not listed in the claims.Positioned at member
Word "a" or "an" before part does not exclude the presence of multiple such elements.
The word of ordinal number such as " first ", " second ", " third " etc. used in specification and claim, with modification
Corresponding element, itself is not meant to that the element has any ordinal number, does not also represent the suitable of a certain element and another element
Sequence in sequence or manufacturing method, the use of those ordinal numbers are only used to enable an element and another tool with certain name
Clear differentiation can be made by having the element of identical name.
Particular embodiments described above has carried out further in detail the purpose of the disclosure, technical scheme and beneficial effects
Describe in detail it is bright, it is all it should be understood that be not limited to the disclosure the foregoing is merely the specific embodiment of the disclosure
Within the spirit and principle of the disclosure, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the disclosure
Within the scope of shield.
Claims (10)
1. a kind of piezoelectric mems decoupling-structure characterized by comprising
One T-type girder construction (1), including integrated crossbeam (11) and stringer (12), the T-type girder construction (1) is from bottom to top successively
It include: substrate (101), lower electrode layer (102) and piezoelectric material layer (103)；
Second top electrode (142), it is T-shaped as detecting electrode, it is located on the T-type girder construction (1), about stringer center
Line (120) is symmetrical；And
First top electrode (141) and third top electrode (143) are located on the stringer (12) as driving electrodes, and symmetrical point
Stringer center line (120) two sides are distributed in, the part being located on stringer (12) with second top electrode (142) is mutually indepedent.
2. piezoelectric mems decoupling-structure according to claim 1, wherein the stringer (12) is used as driving beam, crossbeam
(11) as detection beam.
3. the piezoelectric mems decoupling-structure according to claim 1, wherein under driven-mode, on described first
Electrode (141) and third top electrode (143) are connected to a pair of of differential driving signal, to drive in T-type girder construction (1) generating surface
Vibration.
4. the piezoelectric mems decoupling-structure according to claim 1, wherein first top electrode (141) and the
Shape, the size of three top electrodes (143) are identical.
5. piezoelectric mems decoupling-structure according to claim 1, wherein second top electrode (142) is on crossbeam
Part is in long strip, serpentine shape, or combinations thereof.
6. piezoelectric mems decoupling-structure according to claim 1, wherein the material of the substrate (101) includes following material
The one or more of material: silicon, silica and SOI.
7. piezoelectric mems decoupling-structure according to claim 1, wherein the material of the piezoelectric material layer (103) includes
The one or more of following material: piezoelectric single crystal, piezoelectricity polycrystal film, polycrystal piezoelectric ceramics, high polymer piezoelectric material, with
And polymer-piezo-electric ceramic composite material.
8. piezoelectric mems decoupling-structure according to claim 1, further includes:
Anchor point (15) is located at the endpoint of the stringer (12).
9. a kind of MEMS gyroscope, which is characterized in that decouple and tie including piezoelectric mems described in any item of the claim 1 to 8
Structure.
10. MEMS gyroscope according to claim 9, further includes: a mass block (2) holds comprising one in the mass block (2)
Between emptying, which is used to place the crossbeam (11) and stringer (12) of the piezoelectric mems decoupling-structure.
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Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10288525A (en) * | 1997-04-14 | 1998-10-27 | Denso Corp | Angular velocity sensor |
| US20100107760A1 (en) * | 2006-05-12 | 2010-05-06 | Seiko Epson Corporation | Detection device, gyrosensor, and electronic instrument |
| CN101759136A (en) * | 2009-12-25 | 2010-06-30 | 紫光股份有限公司 | Fully-decoupled vibrating micromechanical gyroscope |
| CN102062604A (en) * | 2009-11-17 | 2011-05-18 | 北京大学 | Capacitive micromachined tuning fork gyroscope |
| CN102175236A (en) * | 2011-02-14 | 2011-09-07 | 厦门大学 | Micro gyroscope capable of regulating and reducing quadrature errors |
| CN102947675A (en) * | 2010-04-30 | 2013-02-27 | 高通Mems科技公司 | Micromachined piezoelectric X-axis gyroscope |
| CN104089612A (en) * | 2014-07-28 | 2014-10-08 | 东南大学 | Dual-tuning fork effect-based symmetric full-decoupling dual-mass block silicon micro-gyroscope |
| CN104807452A (en) * | 2015-04-29 | 2015-07-29 | 东南大学 | Honeycomb MEMS (Micro-electromechanical System) resonance silicon micromachined gyroscope and machining method thereof |
| US20150243878A1 (en) * | 2014-02-26 | 2015-08-27 | Panasonic Corporation | Nbt-bt crystal piezoelectric film and piezoelectric stacking structure comprising the same |
| CN107702704A (en) * | 2017-09-28 | 2018-02-16 | 中国电子科技集团公司第二十六研究所 | A kind of quartzy micro-vibration gyro |
| CN108507555A (en) * | 2018-04-16 | 2018-09-07 | 四川知微传感技术有限公司 | A kind of MEMS micromechanics full decoupling closed loop gyroscope |
-
2018
- 2018-12-13 CN CN201811529259.XA patent/CN109682364B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10288525A (en) * | 1997-04-14 | 1998-10-27 | Denso Corp | Angular velocity sensor |
| US20100107760A1 (en) * | 2006-05-12 | 2010-05-06 | Seiko Epson Corporation | Detection device, gyrosensor, and electronic instrument |
| CN102062604A (en) * | 2009-11-17 | 2011-05-18 | 北京大学 | Capacitive micromachined tuning fork gyroscope |
| CN101759136A (en) * | 2009-12-25 | 2010-06-30 | 紫光股份有限公司 | Fully-decoupled vibrating micromechanical gyroscope |
| CN102947675A (en) * | 2010-04-30 | 2013-02-27 | 高通Mems科技公司 | Micromachined piezoelectric X-axis gyroscope |
| CN102175236A (en) * | 2011-02-14 | 2011-09-07 | 厦门大学 | Micro gyroscope capable of regulating and reducing quadrature errors |
| US20150243878A1 (en) * | 2014-02-26 | 2015-08-27 | Panasonic Corporation | Nbt-bt crystal piezoelectric film and piezoelectric stacking structure comprising the same |
| CN104089612A (en) * | 2014-07-28 | 2014-10-08 | 东南大学 | Dual-tuning fork effect-based symmetric full-decoupling dual-mass block silicon micro-gyroscope |
| CN104807452A (en) * | 2015-04-29 | 2015-07-29 | 东南大学 | Honeycomb MEMS (Micro-electromechanical System) resonance silicon micromachined gyroscope and machining method thereof |
| CN107702704A (en) * | 2017-09-28 | 2018-02-16 | 中国电子科技集团公司第二十六研究所 | A kind of quartzy micro-vibration gyro |
| CN108507555A (en) * | 2018-04-16 | 2018-09-07 | 四川知微传感技术有限公司 | A kind of MEMS micromechanics full decoupling closed loop gyroscope |
Non-Patent Citations (5)
| Title |
|---|
| BO DAI等: "Structural Design and Simulation of a Fully Decoupled Dual-Mass Micro-Gyroscope", 《APPLIED MECHANICS AND MATERIALS》 * |
| 刘梅等: "对称解耦硅微陀螺仪结构设计研究", 《传感技术学报》 * |
| 吝海锋等: "全解耦硅MEMS陀螺仪正交耦合分析", 《微纳电子技术》 * |
| 戴波: "新型对称全解耦的双质量硅微陀螺仪结构设计与优化", 《中国优秀硕士学位论文全文数据库 信息科技辑》 * |
| 陈宏: "全对称双级解耦微机械振动式陀螺研究", 《中国博士学位论文全文数据库 工程科技II辑》 * |
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