CN109682364B - Piezoelectric MEMS decoupling structure and MEMS gyroscope - Google Patents
Piezoelectric MEMS decoupling structure and MEMS gyroscope Download PDFInfo
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- CN109682364B CN109682364B CN201811529259.XA CN201811529259A CN109682364B CN 109682364 B CN109682364 B CN 109682364B CN 201811529259 A CN201811529259 A CN 201811529259A CN 109682364 B CN109682364 B CN 109682364B
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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Abstract
The invention discloses a piezoelectric MEMS decoupling structure and an MEMS gyroscope, wherein the piezoelectric MEMS decoupling structure comprises: a T type beam structure, including crossbeam and the longeron of integration, this T type beam structure includes from bottom to top in proper order: a substrate, a lower electrode layer and a piezoelectric material layer; the second upper electrode is used as a detection electrode, is T-shaped, is positioned on the T-shaped beam structure, and is symmetrical about the central line of the longitudinal beam; and the first upper electrode and the third upper electrode are used as driving electrodes, are positioned on the longitudinal beam, are symmetrically distributed on two sides of the central line of the longitudinal beam, and are mutually independent from the part of the second upper electrode positioned on the longitudinal beam. The decoupling structure is provided with the T-shaped beam structure comprising the integrated cross beam and the integrated longitudinal beam in the whole shape, and the T-shaped detection electrodes which are symmetrical about the central line of the longitudinal beam and the two driving electrodes which are symmetrically distributed on the longitudinal beam are arranged on the T-shaped beam structure, so that complete decoupling is realized, and the detection precision of the gyroscope can be effectively improved.
Description
Technical Field
The disclosure belongs to the technical field of microelectronics, and relates to a piezoelectric MEMS decoupling structure and an MEMS gyroscope.
Background
Micro-electro Mechanical Systems (MEMS) devices are widely used in the consumer electronics field due to their advantages of small size, low power consumption, low cost, easy integration, etc. MEMS gyroscopes are the core devices in inertial navigation, which can detect the angular velocity of a rotating body according to the principle of the coriolis effect. According to the basic principle of a MEMS gyroscope, a MEMS gyroscope comprises two mutually orthogonal resonance modes, namely: a drive mode and a detection mode. Upon excitation by the drive signal, the gyroscope structure resonates. When there is an angular velocity, due to the coriolis effect, a detection signal is output at the detection electrode under the influence of coriolis force.
However, due to the structural coupling effect, when the gyroscope operates in a driving mode, the gyroscope structure also has displacement change in the detection direction without the action of external angular velocity, and the detection electrode still has signal output, which is the orthogonal coupling effect of the MEMS gyroscope. Since the orthogonal coupling phenomenon of the gyroscope seriously affects the characteristics such as detection accuracy of the gyroscope, it is necessary to suppress the orthogonal coupling in the structural design. Common methods for suppressing quadrature coupling are: electrostatic tuning, driving mode single degree of freedom design, detection mode single degree of freedom design and the like. However, complete decoupling is difficult to achieve because the coriolis-based gyroscope itself relies on coupling for angular velocity detection.
Disclosure of Invention
Technical problem to be solved
The present disclosure provides a piezoelectric MEMS decoupling structure and a MEMS gyroscope to at least partially solve the above-mentioned technical problems.
(II) technical scheme
According to an aspect of the present disclosure, there is provided a piezoelectric MEMS decoupling structure comprising: a T type beam structure 1, including crossbeam 11 and longeron 12 of integration, this T type beam structure 1 includes from bottom to top in proper order: a substrate 101, a lower electrode layer 102, and a piezoelectric material layer 103; the second upper electrode 142, as a detection electrode, is T-shaped, is located on the T-shaped beam structure 1, and is symmetrical with respect to the longitudinal beam center line 120; and a first upper electrode 141 and a third upper electrode 143, which are driving electrodes, disposed on the longitudinal beam 12, symmetrically disposed on both sides of the longitudinal beam center line 120, and independent from the second upper electrode 142 disposed on the longitudinal beam 12.
In some embodiments of the present disclosure, the longitudinal beams 12 serve as driving beams, and the transverse beams 11 serve as detecting beams.
In some embodiments of the present disclosure, in the driving mode, the first upper electrode 141 and the third upper electrode 143 are connected to a pair of differential driving signals to drive the T-shaped beam structure 1 to generate the in-plane vibration.
In some embodiments of the present disclosure, the first upper electrode 141 and the third upper electrode 143 have the same shape and size.
In some embodiments of the present disclosure, the portion of the second upper electrode 142 on the beam is elongated, serpentine, or a combination thereof.
In some embodiments of the present disclosure, the material of the substrate 101 includes one or a combination of the following materials: silicon, silicon dioxide, and SOI.
In some embodiments of the present disclosure, the material of the piezoelectric material layer 103 includes one or a combination of the following materials: piezoelectric single crystals, piezoelectric polycrystalline thin films, polycrystalline piezoelectric ceramics, high-molecular piezoelectric materials, and polymer-piezoelectric ceramic composite materials.
In some embodiments of the present disclosure, the piezoelectric MEMS decoupling structure further comprises: anchor points 15 are located at the end points of the stringers 12.
According to another aspect of the present disclosure, there is provided a MEMS gyroscope comprising a piezoelectric MEMS decoupling structure as set forth in any of the present disclosure.
In some embodiments of the present disclosure, a MEMS gyroscope, further comprising: the mass block 2 comprises a containing space, and the containing space is used for placing a cross beam 11 and a longitudinal beam 12 of the piezoelectric MEMS decoupling structure.
(III) advantageous effects
According to the technical scheme, the piezoelectric MEMS decoupling structure and the MEMS gyroscope provided by the disclosure have the following beneficial effects:
the decoupling structure is integrally shaped into a T-shaped beam structure comprising an integrated cross beam and a longitudinal beam, a first upper electrode and a third upper electrode are symmetrically distributed on two sides of the central line of the longitudinal beam and used as driving electrodes, and a second upper electrode is a T-shaped electrode which is bilaterally symmetrical about the central line of the longitudinal beam and used as a detection electrode; under the driving mode, based on the piezoelectric effect of a piezoelectric material, voltage is applied to the upper electrode and the lower electrode to drive the whole structure to generate in-plane resonance, the longitudinal beam serves as a driving beam, and the cross beam serves as a detection beam.
Drawings
Fig. 1 is a schematic diagram of a piezoelectric MEMS decoupling structure according to an embodiment of the present disclosure.
Fig. 2 is a schematic structural diagram of a MEMS gyroscope with two piezoelectric MEMS decoupling structures according to an embodiment of the present disclosure.
Fig. 3 is a schematic diagram of a piezoelectric MEMS decoupling structure for decoupling in a driving mode according to an embodiment of the disclosure, where (a) is a schematic diagram of a corresponding charge detection position A, B, F, C, D in a detection electrode, and (b) is a schematic diagram of positive and negative charge distribution on the detection electrode.
[ notation ] to show
1-T-beam construction;
11-a cross beam; 12-a stringer;
101-a substrate; 102-a lower electrode layer;
103-a layer of piezoelectric material;
141-a first upper electrode; 142-a second upper electrode;
143-a third upper electrode;
120-stringer centerline; 15-anchor point;
2-mass block.
Detailed Description
In order to solve the problems that the detection precision of a gyroscope is reduced and the conventional method for inhibiting orthogonal coupling cannot realize complete decoupling due to the orthogonal coupling phenomenon, the piezoelectric MEMS decoupling structure and the MEMS gyroscope are provided.
For the purpose of promoting a better understanding of the objects, aspects and advantages of the present disclosure, reference is made to the following detailed description taken in conjunction with the accompanying drawings. In the present disclosure, "T-shaped" means that the shape includes a transverse direction and a longitudinal direction that intersect.
In a first exemplary embodiment of the present disclosure, a piezoelectric MEMS decoupling structure is provided.
Fig. 1 is a schematic diagram of a piezoelectric MEMS decoupling structure according to an embodiment of the present disclosure.
Referring to fig. 1, a piezoelectric MEMS decoupling structure of the present disclosure includes:
a T type beam structure 1, including crossbeam 11 and longeron 12 of integration, this T type beam structure 1 includes from bottom to top in proper order: a substrate 101, a lower electrode layer 102, and a piezoelectric material layer 103;
the second upper electrode 142, as a detection electrode, is T-shaped, is located on the T-shaped beam structure 1, and is symmetrical with respect to the longitudinal beam center line 120; and
the first upper electrode 141 and the third upper electrode 143, which are driving electrodes, are located on the longitudinal beam 12, symmetrically distributed on both sides of the longitudinal beam center line 120, and are independent from the portion of the second upper electrode 142 located on the longitudinal beam 12.
In this embodiment, the piezoelectric MEMS decoupling structure further includes: anchor points 15 are located at the ends of the stringers 12 to effect fixation of the piezoelectric MEMS decoupling structure.
In this embodiment, the substrate 101, the lower electrode layer 102, and the piezoelectric material layer 103 are all T-shaped, and together form a T-shaped beam structure 1, the T-shaped beam structure 1 and 3 independent upper electrodes, namely the first upper electrode 141, the second upper electrode 142, and the third upper electrode 143, which are located above the T-shaped beam structure 1, form a piezoelectric MEMS decoupling structure, and in a driving mode, based on a piezoelectric effect of the piezoelectric material, by applying a voltage to the upper and lower electrodes, in-plane resonance of the entire structure can be driven.
The respective parts of the piezoelectric MEMS decoupling structure of the present embodiment will be described in detail below.
In this embodiment, the material of the substrate 101 includes one or more of the following materials: silicon, silicon dioxide, and SOI (silicon-on-insulator, also known as silicon-on-insulator, comprising a buried oxide layer between the top silicon and the insulating substrate silicon).
In this embodiment, the material of the piezoelectric material layer 103 includes one or more of the following materials: piezoelectric single crystals, piezoelectric polycrystalline thin films, polycrystalline piezoelectric ceramics, high molecular piezoelectric materials, and polymer-piezoelectric ceramic composite materials, such as: aluminum nitride, quartz, piezoelectric ceramics, and the like.
In this embodiment, the first upper electrode 141 and the third upper electrode 143, which are driving electrodes, are located on the longitudinal beam 12 and symmetrically distributed on two sides of the longitudinal beam center line 120. In the driving mode, the first upper electrode 141 and the third upper electrode 143 are connected to a pair of differential driving signals, and the T-shaped beam structure 1 can be driven to generate in-plane vibration.
In this embodiment, the corresponding longitudinal beam 12 serves as a driving beam, and the transverse beam 11 serves as a detection beam. The second upper electrode 142, which is a detection electrode, is T-shaped, is located on the T-shaped beam structure 1, and is symmetrical with respect to the longitudinal beam center line 120.
In some embodiments of the present disclosure, the first upper electrode 141 and the third upper electrode 143 have the same shape and size.
For example, in the present embodiment, the first upper electrode 141 and the third upper electrode 143 are rectangular, and the first upper electrode 141 and the third upper electrode 143 have the same length and the same width. Of course, in other embodiments, the first upper electrode 141 and the third upper electrode 143 may have other shapes.
In some embodiments of the present disclosure, the portion of the second upper electrode 142 on the beam is elongated, serpentine, or a combination thereof.
For example, in the present embodiment, the portion of the second upper electrode 142 on the beam has a serpentine shape.
In a second exemplary embodiment of the present disclosure, a MEMS gyroscope is provided comprising the piezoelectric MEMS decoupling structure described above.
Fig. 2 is a schematic structural diagram of a MEMS gyroscope with two piezoelectric MEMS decoupling structures according to an embodiment of the present disclosure.
Referring to fig. 2, the MEMS gyroscope of the present embodiment includes: the piezoelectric MEMS decoupling structure comprises two piezoelectric MEMS decoupling structures and a mass block 2, wherein the mass block 2 comprises an accommodating space which is used for accommodating a cross beam 11 and a longitudinal beam 12 of the two piezoelectric MEMS decoupling structures.
In this embodiment, as shown in fig. 2, the anchor points 15 of the two piezoelectric MEMS decoupling structures are located at the end points of the stringers 12.
For convenience of describing the decoupling principle and characteristics of the piezoelectric MEMS decoupling structure, the following description is made in conjunction with a specific gyroscope complete structure.
In this embodiment, the MEMS gyroscope in fig. 2 includes two piezoelectric MEMS decoupling structures and one mass block 2, and 2 anchor points 15 are respectively disposed at end points of the longitudinal beam 12 of the 2T-shaped beam structures 1. The first upper electrode 141 and the third upper electrode 143 serve as a pair of differential driving electrodes to drive the whole structure to generate in-plane vibration, which is a driving mode of the MEMS gyroscope, and the MEMS gyroscope (hereinafter, referred to as a gyroscope) is used to detect an angular velocity in a z-axis direction (i.e., a direction perpendicular to a plane of the gyroscope). When an angular velocity of the z-axis acts on the gyroscope, a coriolis force is generated, and the structure of the gyroscope vibrates in the x-axis direction under the action of the coriolis force, and this vibration mode is a detection mode, and a signal of the detection mode can be detected by the second upper electrode 142. The above is the basic principle of the gyroscope.
The quadrature coupling refers to the magnitude of the signal coupled to the sensing structure by the driving mode of the gyroscope in the absence of external angular velocity effects. In the MEMS gyroscope including the piezoelectric MEMS decoupling structure shown in the present disclosure, the sensitive component is a T-shaped beam structure 1, the longitudinal beam 12 of the T-shaped beam structure 1 serves as a driving beam, and the transverse beam 11 serves as a detection beam. When the gyroscope works in a driving mode, due to structural coupling, displacement deformation still exists on the cross beam 11 of the T-shaped beam structure 1, that is, vibration of the driving mode is coupled to the detection beam, so that the detection beam is subjected to displacement deformation. The second upper electrode 142 in the present disclosure is bilaterally symmetric with respect to the longitudinal beam center line 120, the deformation of the detection beam caused by orthogonal coupling polarizes equal amounts of opposite charges at the second upper electrode 142, and the equal amounts of opposite charges are neutralized on the second upper electrode 142, so that the arrangement of the T-shaped beam structure and the second upper electrode makes the structure as a whole show that there is no coupling signal output on the detection electrode-the second upper electrode 142, i.e., complete decoupling is achieved.
Fig. 3 is a schematic diagram of a piezoelectric MEMS decoupling structure implementing decoupling in a driving mode according to an embodiment of the disclosure, where (a) is a schematic diagram of a corresponding detected charge position A, B, F, C, D in a detection electrode, and (b) is a schematic diagram of positive and negative charge distribution on the detection electrode.
In one example, as shown in fig. 3 (a), in the driving mode, the portion of the detection electrode (the second upper electrode 142) on the beam 11 is provided with several symmetrically distributed charge detection positions A, B, F (located at the center), C (symmetric to a), and D (symmetric to B), and the charge distribution thereof corresponds to that shown in fig. 3 (B), the portion of the second upper electrode 142 on the beam is bilaterally symmetric with respect to the longitudinal beam center line 120, and points C (symmetric to a) and D (symmetric to B) corresponding to points A, B on the left side of the center point F present different amounts of positive charges, and points C (symmetric to a) and D (symmetric to B) corresponding to points A, B present negative charges respectively equal to points A, B, so that the same amounts of opposite charges are neutralized on the detection electrode.
In summary, the present disclosure provides a piezoelectric MEMS decoupling structure and an MEMS gyroscope, where the decoupling structure is configured as a T-shaped beam structure including an integrated beam and a longitudinal beam, and the T-shaped beam structure is provided with a T-shaped detection electrode symmetrical with respect to a central line of the longitudinal beam and two driving electrodes symmetrically distributed on the longitudinal beam, the first upper electrode and the third upper electrode are symmetrically distributed on two sides of the central line of the longitudinal beam to serve as driving electrodes, and the second upper electrode is a T-shaped electrode bilaterally symmetrical with respect to the central line of the longitudinal beam to serve as a detection electrode; under the driving mode, based on the piezoelectric effect of a piezoelectric material, voltage is applied to the upper electrode and the lower electrode to drive the whole structure to generate in-plane resonance, the longitudinal beam serves as a driving beam, and the cross beam serves as a detection beam.
It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. Also, in the specification and claims, when an element is described as being "connected" to another element, the element may be "directly connected" to the other element or "electrically connected" to the other element through a third element. And the shapes and sizes of the respective components in the drawings do not reflect actual sizes and proportions, but merely illustrate the contents of the embodiments of the present disclosure. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
Furthermore, the word "comprising" or "comprises" does not exclude the presence of elements or steps other than those listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
The use of ordinal numbers such as "first," "second," "third," etc., in the specification and claims to modify a corresponding element does not by itself connote any ordinal number of the element or any ordering of one element from another or the order of manufacture, and the use of the ordinal numbers is only used to distinguish one element having a certain name from another element having a same name.
The above-mentioned embodiments are intended to illustrate the objects, aspects and advantages of the present disclosure in further detail, and it should be understood that the above-mentioned embodiments are only illustrative of the present disclosure and are not intended to limit the present disclosure, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present disclosure should be included in the scope of the present disclosure.
Claims (10)
1. A piezoelectric MEMS decoupling structure, comprising:
a T type beam structure (1), including crossbeam (11) and longeron (12) of integration, this T type beam structure (1) includes from bottom to top in proper order: a substrate (101), a lower electrode layer (102), and a piezoelectric material layer (103);
the second upper electrode (142) is used as a detection electrode, is T-shaped, is positioned on the T-shaped beam structure (1), and is symmetrical about the longitudinal beam central line (120); and
the first upper electrode (141) and the third upper electrode (143) are used as driving electrodes, are positioned on the longitudinal beam (12), are symmetrically distributed on two sides of a central line (120) of the longitudinal beam, and are mutually independent from the part of the second upper electrode (142) positioned on the longitudinal beam (12).
2. Piezoelectric MEMS decoupling structure according to claim 1, wherein the longitudinal beam (12) acts as a drive beam and the transverse beam (11) acts as a detection beam.
3. The piezoelectric MEMS decoupling structure of claim 1, wherein in a drive mode, the first and third upper electrodes (141, 143) are connected to a pair of differential drive signals to drive the T-beam structure (1) into in-plane vibration.
4. The piezoelectric MEMS decoupling structure of claim 1, wherein the first and third upper electrodes (141, 143) are the same shape and size.
5. The piezoelectric MEMS decoupling structure of claim 1, wherein a portion of the second upper electrode (142) on the beam is elongated, serpentine, or a combination thereof.
6. The piezoelectric MEMS decoupling structure of claim 1, wherein the material of the substrate (101) comprises one or a combination of the following materials: silicon, silicon dioxide, or SOI.
7. The piezoelectric MEMS decoupling structure of claim 1, wherein the material of the layer of piezoelectric material (103) comprises one or a combination of the following materials: piezoelectric single crystals, piezoelectric polycrystalline thin films, polycrystalline piezoelectric ceramics, high-molecular piezoelectric materials, and polymer-piezoelectric ceramic composite materials.
8. The piezoelectric MEMS decoupling structure of claim 1, further comprising:
anchor points (15) located at the end points of the stringers (12).
9. A MEMS gyroscope comprising a piezoelectric MEMS decoupling structure as claimed in any one of claims 1 to 8.
10. The MEMS gyroscope of claim 9, further comprising: the mass block (2) comprises an accommodating space, and the accommodating space is used for accommodating the cross beam (11) and the longitudinal beam (12) of the piezoelectric MEMS decoupling structure.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH10288525A (en) * | 1997-04-14 | 1998-10-27 | Denso Corp | Angular velocity sensor |
| JP4396725B2 (en) * | 2006-05-12 | 2010-01-13 | セイコーエプソン株式会社 | Detection device, gyro sensor, and electronic device |
| CN102062604A (en) * | 2009-11-17 | 2011-05-18 | 北京大学 | Capacitive micromachined tuning fork gyroscope |
| CN101759136B (en) * | 2009-12-25 | 2011-08-31 | 紫光股份有限公司 | Fully-decoupled vibrating micromechanical gyroscope |
| US8516886B2 (en) * | 2010-04-30 | 2013-08-27 | Qualcomm Mems Technologies, Inc. | Micromachined piezoelectric X-Axis gyroscope |
| CN102175236B (en) * | 2011-02-14 | 2012-12-12 | 厦门大学 | Micro gyroscope capable of regulating and reducing quadrature errors |
| JP5887502B2 (en) * | 2014-02-26 | 2016-03-16 | パナソニックＩｐマネジメント株式会社 | NBT-BT crystal piezoelectric film and piezoelectric laminated structure having the same |
| CN104089612B (en) * | 2014-07-28 | 2017-02-15 | 东南大学 | Dual-tuning fork effect-based symmetric full-decoupling dual-mass block silicon micro-gyroscope |
| CN104807452B (en) * | 2015-04-29 | 2017-07-18 | 东南大学 | Honeycomb fashion MEMS resonant silicon micro-gyroscope and its processing method |
| CN107702704B (en) * | 2017-09-28 | 2021-02-02 | 中国电子科技集团公司第二十六研究所 | Quartz micro-vibration gyro |
| CN108507555B (en) * | 2018-04-16 | 2024-04-05 | 四川知微传感技术有限公司 | MEMS micromechanical full decoupling closed-loop gyroscope |
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