CN107702704B - Quartz micro-vibration gyro - Google Patents
Quartz micro-vibration gyro Download PDFInfo
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- CN107702704B CN107702704B CN201710897941.3A CN201710897941A CN107702704B CN 107702704 B CN107702704 B CN 107702704B CN 201710897941 A CN201710897941 A CN 201710897941A CN 107702704 B CN107702704 B CN 107702704B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
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Abstract
The invention discloses a quartz micro-vibration gyro which comprises driving beams and corresponding detection beams, wherein the driving beams and the detection beams are four identical beams, one ends of the four detection beams are fixedly connected to four directions of a fixed block at intervals of 90 degrees in an equally-divided manner, and the middle parts of the four driving beams are respectively fixed to the other ends of the detection beams and are vertical to the corresponding detection beams; the four driving beams, the four detection beams and the fixed block are positioned on the same plane; the first detection beam and the second detection beam are positioned on the same straight line, and the third detection beam and the fourth detection beam are positioned on the same straight line. The gyroscope structure has high sensitivity and small volume, the force and the moment of the detection mode and the vibration mode on the fixed block are mutually offset, and when the chip is installed on the shell, a special vibration isolation structure is not required to be arranged, so that the complexity of the packaging process is reduced, and the cost is lower.
Description
Technical Field
The invention relates to an angular velocity detection technology, in particular to a quartz micro-vibration gyro, and belongs to the technical field of inertial sensing.
Background
The gyro is one of inertial sensors and has military and civil dual-purpose. The micro-mechanical gyroscope manufactured based on the MEMS (micro-electro-mechanical system) process is mostly a vibrating gyroscope, has the unique advantages of small volume, low cost, high reliability, suitability for mass production and the like, and is particularly suitable for the field with low precision requirement but strict requirements on price, volume and power consumption. The silicon micromechanical gyroscope and the quartz micromechanical gyroscope are two types of micro gyroscopes which are the most common and the most hot international research, have respective characteristics and are developed in the military and civil fields.
The tuning fork structure is a quartz micromechanical gyroscope chip structure which is commonly used, and comprises a single-ended tuning fork and a double-ended tuning fork. The single-ended tuning fork chip is simple in structure and easy to miniaturize, but the sensitivity is low due to the fact that the areas of the driving electrodes and the detection electrodes are small. The driving electrode and the detection electrode of the double-end tuning fork chip have large areas and high sensitivity, but the driving tuning fork and the detection tuning fork are relatively arranged separately, so the size is large, and the miniaturization of the chip is not facilitated.
In view of the above, patent document US 20080314145a1 by EPSON corporation of japan proposes a double-T-shaped gyro chip structure having the dual advantages of high chip sensitivity and volume miniaturization. However, the detection mode of the chip generates a moment to a fixed position, and when the chip is mounted on the shell, a special micro-support metal beam needs to be arranged to isolate the vibration of the detection mode, so that the complexity and the cost of the packaging process are increased.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, the present invention provides a quartz micro-vibration gyroscope which is miniature, has high sensitivity and does not generate moment to a fixed position in a detection mode.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
a quartz micro-vibration gyro comprises driving beams and corresponding detecting beams, wherein the driving beams and the detecting beams are four identical beams which are respectively a first driving beam, a second driving beam, a third driving beam, a fourth driving beam, a first detecting beam, a second detecting beam, a third detecting beam and a fourth detecting beam, one ends of the four detecting beams are fixedly connected to four directions of a fixed block at intervals of 90 degrees in an equally-divided manner, and the middle parts of the four driving beams are respectively fixed to the other ends of the detecting beams and are perpendicular to the corresponding detecting beams; the four driving beams, the four detection beams and the fixed block are positioned on the same plane; the first driving beam corresponds to the first detection beam, the second driving beam corresponds to the second detection beam, the third driving beam corresponds to the third detection beam, and the fourth driving beam corresponds to the fourth detection beam; the first detection beam and the second detection beam are positioned on the same straight line, and the third detection beam and the fourth detection beam are positioned on the same straight line.
The first driving beam, the second driving beam, the third driving beam and the fourth driving beam are driven by counter-pressure electricity to perform bending vibration, the first driving beam and the second driving beam form a pair of driving beams to perform opposite vibration along the Y direction, the third driving beam and the fourth driving beam serve as a second pair of driving beams to perform opposite vibration along the X direction, and one pair of driving beams vibrate towards the fixed block while the other pair of driving beams vibrate back to the fixed block.
When a Z-axis angular velocity is input, the first driving beam and the second driving beam generate an X-axis coriolis force and excite the two driving beams to do X-axis in-plane vibration, so that the first detection beam and the second detection beam are driven to do X-axis in-plane bending vibration; the third driving beam and the fourth driving beam generate Y-axis coriolis force and excite the two driving beams to vibrate in a Y-axis plane, so as to drive the third detecting beam and the fourth detecting beam to perform bending vibration in the Y-axis plane, and electrodes are arranged on the surfaces of the first detecting beam, the second detecting beam, the third detecting beam and the fourth detecting beam and used for collecting piezoelectric charges on the surfaces of the four detecting beams caused by the vibration in the plane.
Furthermore, the quartz micro-vibration gyroscope is processed and formed on the same base material, namely a first driving beam, a second driving beam, a third driving beam and a fourth driving beam which form the micro-vibration gyroscope, and a first detection beam, a second detection beam, a third detection beam, a fourth detection beam and a fixed block are integrally manufactured on the same base material, so that the quartz micro-vibration gyroscope is integral. The quartz micro-vibration gyroscope is characterized in that the quartz micro-vibration gyroscope manufacturing base material is a quartz crystal with a piezoelectric effect.
Compared with the prior art, the invention has the following beneficial effects:
compare two drive roof beams and two detection roof beam structures among the prior art, through setting up four drive roof beams and four detection roof beams, the sensitivity of top chip has not been increased under the condition of sacrifice volume, and the moment that two pairs of detection roof beams acted on the fixed block under the detection mode equals opposite direction and has realized offsetting each other, theoretical vibration coupling between chip and the shell is zero, the stability of detection mode is better, the Q value is higher, when the shell is installed to the chip, need not to set up dedicated isolation vibration structure, packaging process's complexity has been reduced, the cost is lower.
Drawings
Fig. 1-structural schematic diagram of the quartz micro-vibration gyroscope of the invention.
Fig. 2-driving mode schematic diagram of the quartz micro-vibration gyro of the invention.
FIG. 3 is a schematic diagram of the detection mode of the quartz micro-vibration gyro of the present invention.
Wherein: 1-quartz micro-vibration gyro; 2-a first drive beam; 3-a second drive beam; 4-a third drive beam; 5-a fourth drive beam; 6-a first detection beam; 7-a second detection beam; 8-a third detection beam; 9-a fourth detection beam; and 10, fixing blocks.
Detailed Description
The invention is described in detail below with reference to the figures and the detailed description.
As shown in fig. 1, the quartz micro-vibration gyro 1 provided by the present invention includes four identical driving beams and four corresponding detecting beams, namely, a first driving beam 2, a second driving beam 3, a third driving beam 4, a fourth driving beam 5, a first detecting beam 6, a second detecting beam 7, a third detecting beam 8, and a fourth detecting beam 9. One ends of the four detection beams are fixedly connected to the four directions of the fixed block 10 at intervals of 90 degrees, and the middle parts of the four driving beams are respectively fixed to the other ends of the detection beams and are perpendicular to the corresponding detection beams; the four driving beams, the four detection beams and the fixing block are positioned on the same plane. Specifically, first drive beam 2 is through first detection roof beam 6 rigid coupling in fixed block 10, second drive beam 3 is through second detection roof beam 7 rigid coupling in fixed block 10, third drive beam 4 is through third detection roof beam 8 rigid coupling in fixed block 10, fourth drive beam 5 is through fourth detection roof beam 9 rigid coupling in fixed block 10. The first detecting beam 6 and the second detecting beam 7 are positioned on the same straight line, and the third detecting beam 8 and the fourth detecting beam 9 are positioned on another straight line perpendicular to the same straight line.
The first driving beam 2, the second driving beam 3, the third driving beam 4 and the fourth driving beam 5 are identical in structure and symmetrically distributed in four directions of the fixing block 10.
The first detection beam 6, the second detection beam 7, the third detection beam 8 and the fourth detection beam 9 are identical in structure and symmetrically distributed in four directions of the fixed block 10.
As shown in fig. 2, the first driving beam 2, the second driving beam 3, the third driving beam 4, and the fourth driving beam 5 are driven by the back pressure power to perform bending vibration, that is, to operate in a driving mode, the first driving beam 2 and the second driving beam 3 form a pair of driving beams and perform opposite vibration along the Y direction, the third driving beam 4 and the fourth driving beam 5 form another pair of driving beams and perform opposite vibration along the X direction, wherein one pair of driving beams vibrates towards the fixed block 10 while the other pair vibrates away from the fixed block 10, and the back pressure power is set reasonably so that the vibration rates of the four driving beams are the same.
As shown in fig. 3, when a Z-axis angular velocity is input, the first driving beam 2 and the second driving beam 3 generate an X-direction coriolis force and excite the first driving beam 2 and the second driving beam 3 to vibrate in an X-axis plane, so as to drive the first detecting beam 6 and the second detecting beam 7 to perform bending vibration in the X-axis plane, and the forces acting on the fixed block 10 by the first detecting beam 6 and the second detecting beam 7 are the same in magnitude and opposite in direction, while the moments acting on the fixed block 10 are the same in magnitude and direction; the third detection beam 8 and the fourth detection beam 9 generate a Y-direction coriolis force and excite the third detection beam 8 and the fourth detection beam 9 to vibrate in a Y-axis plane, so as to drive the third detection beam 8 and the fourth detection beam 9 to perform bending vibration in the Y-axis plane, and the third detection beam 8 and the fourth detection beam 9 have the same force and opposite direction on the fixed block 10, while the moment acting on the fixed block 10 has the same magnitude and opposite direction, but has the same magnitude and opposite direction as the moments acting on the fixed block 10 by the first detection beam 6 and the second detection beam 7, so that the resultant force and the total moment acting on the fixed block by the four detection beams are zero. The deformation generated by the in-plane vibration of the four detection beams induces piezoelectric charges on the surfaces of the detection beams due to the piezoelectric effect, the charge quantity and the input angular velocity are in a linear relation, the piezoelectric charges are collected by electrodes covering the surfaces of the detection beams (the shape of the protruding structure is shown, and the surface electrode pattern is not shown in the figure), and the Z-axis input angular velocity can be obtained after the deformation is measured by an external processing circuit. The structure and the vibration rate of four drive beams are the same, and the size of the generated Coriolis force is the same, so that under the Z-axis detection mode, the force and the moment of the four detection beams acting on the fixed block 10 are mutually offset, the resonance Q value is high, and when the vibration isolation structure is installed on a shell, a special isolation vibration structure is not required to be arranged.
Further, the quartz micro-vibration gyro 1 is processed and formed on the same base material, namely a first driving beam 2, a second driving beam 3, a third driving beam 4 and a fourth driving beam 5 which form the micro-vibration gyro, and a first detection beam 6, a second detection beam 7, a third detection beam 8, a fourth detection beam 9 and a fixed block 10 are integrally manufactured on the same base material, and the quartz micro-vibration gyro is integral. The quartz micro-vibration gyroscope 1 is made of quartz crystals with piezoelectric effect as a base material.
Therefore, compared with a double-T-shaped micro-vibration gyro structure, the quartz micro-vibration gyro provided by the invention has the characteristics of high structural sensitivity and small volume by adding the pair of driving beams, and meanwhile, the force and the moment of the detection vibration mode on the fixed block are mutually offset, so that a special isolation vibration structure is not required to be arranged when the chip is installed on a shell, the complexity of a packaging process is reduced, and the cost is lower.
The above examples of the present invention are merely illustrative of the present invention and are not intended to limit the embodiments of the present invention. Variations and modifications in other variations will occur to those skilled in the art upon reading the foregoing description. Not all embodiments are exhaustive. All obvious changes and modifications of the present invention are within the scope of the present invention.
Claims (3)
1. The utility model provides a quartzy micro-vibration top, includes drive roof beam and the detection roof beam that corresponds, its characterized in that: the driving beams and the detecting beams are four identical beams which are respectively a first driving beam, a second driving beam, a third driving beam, a fourth driving beam, a first detecting beam, a second detecting beam, a third detecting beam and a fourth detecting beam, one ends of the four detecting beams are fixedly connected to the four directions of the fixed block at intervals of 90 degrees in an equally-divided manner, and the middle parts of the four driving beams are respectively fixed to the other ends of the detecting beams and are perpendicular to the corresponding detecting beams; the four driving beams, the four detection beams and the fixed block are positioned on the same plane; the first driving beam corresponds to the first detection beam, the second driving beam corresponds to the second detection beam, the third driving beam corresponds to the third detection beam, and the fourth driving beam corresponds to the fourth detection beam; the first detection beam and the second detection beam are positioned on the same straight line, and the third detection beam and the fourth detection beam are positioned on the same straight line;
the first driving beam, the second driving beam, the third driving beam and the fourth driving beam are driven by counter-pressure electricity to perform bending vibration, the first driving beam and the second driving beam form a pair of driving beams to perform opposite vibration along the Y direction, the third driving beam and the fourth driving beam serve as a second pair of driving beams to perform opposite vibration along the X direction, and one pair of driving beams vibrate towards the fixed block while the other pair of driving beams vibrate back to the fixed block;
when Z axial angular velocity is input, the first driving beam and the second driving beam generate X-direction coriolis force and excite the first driving beam and the second driving beam to vibrate in an X axial plane, so that the first detection beam and the second detection beam are driven to perform bending vibration in the X axial plane, the forces acting on the fixed block by the first detection beam and the second detection beam are the same in magnitude and opposite in direction, and the moments acting on the fixed block are the same in magnitude and direction; the third detection beam and the fourth detection beam generate Y-direction Ge-type force and excite the third detection beam and the fourth detection beam to vibrate in a Y-axis plane, so that the third detection beam and the fourth detection beam are driven to bend and vibrate in the Y-axis plane, the force acting on the fixed block by the third detection beam and the force acting on the fixed block by the fourth detection beam are the same in magnitude and opposite in direction, the force acting on the fixed block by the third detection beam and the fourth detection beam is the same in magnitude and direction, but the force acting on the fixed block by the first detection beam and the force acting on the fixed block by the second detection beam are the same in magnitude and opposite in direction, the resultant force and the total moment acting on the fixed block by the four detection beams are zero, and the force and the moment acting on the fixed block by.
2. The quartz micro-vibration gyro of claim 1, wherein: the first driving beam, the second driving beam, the third driving beam, the fourth driving beam, the first detection beam, the second detection beam, the third detection beam, the fourth detection beam and the fixed block are integrally manufactured on the same base material with the piezoelectric effect.
3. The quartz micro-vibratory gyroscope of claim 2, wherein: the substrate is a quartz crystal substrate.
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| CN109682364B (en) * | 2018-12-13 | 2020-10-20 | 中国科学院半导体研究所 | Piezoelectric MEMS decoupling structure and MEMS gyroscope |
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| US5998911A (en) * | 1996-11-26 | 1999-12-07 | Ngk Insulators, Ltd. | Vibrator, vibratory gyroscope, and vibration adjusting method |
| JP3999377B2 (en) * | 1997-11-04 | 2007-10-31 | 日本碍子株式会社 | Vibrator, vibratory gyroscope, linear accelerometer and measuring method of rotational angular velocity |
| JP4107768B2 (en) * | 1999-07-01 | 2008-06-25 | 日本碍子株式会社 | Oscillator and vibratory gyroscope |
| JP4415382B2 (en) * | 2005-01-20 | 2010-02-17 | セイコーエプソン株式会社 | Vibration gyro element, support structure of vibration gyro element, and gyro sensor |
| CN101738184B (en) * | 2009-12-29 | 2011-08-31 | 中国人民解放军国防科学技术大学 | Shearing stress detection-based quartz micromechanical gyro with criss-cross structure |
| CN106441260B (en) * | 2016-08-23 | 2020-12-01 | 上海交通大学 | Silicon-on-silicon piezoelectric film multi-supporting-beam MEMS gyroscope and preparation method thereof |
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