CN204758629U - MEMS triaxial accelerometer - Google Patents
MEMS triaxial accelerometer Download PDFInfo
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- CN204758629U CN204758629U CN201520456294.9U CN201520456294U CN204758629U CN 204758629 U CN204758629 U CN 204758629U CN 201520456294 U CN201520456294 U CN 201520456294U CN 204758629 U CN204758629 U CN 204758629U
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Abstract
The utility model discloses a MEMS triaxial accelerometer, anchoring position in the structure center of quality piece, the central line that elasticity was turned round on the roof beam length direction is coincident with the central line of quality piece, the quality piece lies in the quality imbalance that the part of roof beam both sides was turned round to elasticity in Y axle orientation, still including the X shaft detection electric capacity structure that is used for detecting X axle acceleration signal for detect Y axle acceleration signal's Y shaft detection electric capacity structure, be used for detecting Z axle acceleration signal's Z shaft detection electric capacity structure. The utility model discloses a triaxial accelerometer, with the three axial acceleration of XYZ detect structure integrate single structural, the structure center be movable mass's anchor point, turns round the roof beam through elasticity and connects the quality piece on the anchor point, the displacement takes place for the input that makes the quality piece follow the acceleration in all directions to realize the acceleration signal's of all directions detection.
Description
Technical field
The utility model belongs to micro electronmechanical (MEMS) field, more precisely, relates to a kind of micro electronmechanical accelerometer, particularly relates to a kind of three axis accelerometer.
Background technology
At present, along with the development of consumer electronics and wearable device, propose more and more higher requirement to the performance of MEMS inertial sensor, numerous system manufacturer wishes that MEMS inertia device is on the basis keeping existing performance, reduces the size of chip further.So existing MEMS triaxial accelerometer all tends to the integrated design of three axles.But due to the restriction of its Z axis structural principle, most of MEMS triaxial accelerometer all adopts design eccentric in a certain direction, come to be detected while three axial accelerations by single structure.Such structural design, has special requirement to technique on the one hand, and on the other hand, asymmetric bias design makes to eliminate extraneous interference completely.
Utility model content
An object of the present utility model is to provide a kind of new solution of MEMS triaxial accelerometer.
According to first aspect of the present utility model, provide a kind of MEMS triaxial accelerometer, comprise the mass being positioned at types of flexure, and the anchor portion be fixed on substrate, described mass is turned round beam by its monosymmetric elasticity and is connected in anchor portion, and described anchor site is in the structure centre of mass, and elasticity is turned round the center line on beam length direction and overlapped with the center line of mass; Wherein, the length direction that elasticity turns round beam is designated as X-direction, vertical with X-direction and be positioned at mass direction be planar designated as Y direction, direction perpendicular to mass place plane is designated as Z-direction, wherein, described mass is positioned at elasticity in the Y-axis direction to turn round the quality of the part of beam both sides unequal;
Described substrate is provided with the first X-axis fixed electorde unit, the second X-axis fixed electorde unit, described mass is provided with the first X-axis movable electrode unit forming the first X-axis Detection capacitance with the first X-axis fixed electorde unit, forms the second X-axis movable electrode unit of the second X-axis Detection capacitance with the second X-axis fixed electorde unit; Wherein, described first X-axis Detection capacitance, the second X-axis Detection capacitance form differential capacitance structure;
Described substrate is provided with and is distributed in the first Z axis fixed electorde unit, the second Z axis fixed electorde unit that elasticity turns round beam both sides, described mass is provided with the first Z axis movable electrode unit forming the first Z axis Detection capacitance with the first Z axis fixed electorde unit, forms the second Z axis movable electrode unit of the second Z axis Detection capacitance with the second Z axis fixed electorde unit; Wherein, described first Z axis Detection capacitance, the second Z axis Detection capacitance form differential capacitance structure;
Described substrate is also respectively arranged with the first Y-axis fixed electorde unit, the second Y-axis fixed electorde unit that extend along X-direction, described first Y-axis fixed electorde unit, the second Y-axis fixed electorde unit are positioned on the center line of mass Y-axis, and are symmetrically distributed in the both sides of anchor portion; Described mass is provided with the first Y-axis movable electrode unit forming the first Y-axis Detection capacitance with the first Y-axis fixed electorde unit, forms the second Y-axis movable electrode unit of the second Y-axis Detection capacitance with the second Y-axis fixed electorde unit; Wherein, described first Y-axis Detection capacitance, the second Y-axis Detection capacitance form differential capacitance structure.
Preferably, described first X-axis fixed electorde unit, the second X-axis fixed electorde unit extend along Y direction, described first X-axis fixed electorde unit, the second X-axis fixed electorde unit are relative to the center line rotational symmetry of mass Y direction or relative to anchor portion Central Symmetry, and the first X-axis fixed electorde unit, the second X-axis fixed electorde unit be not on the center line of mass X-direction.
Preferably, described first X-axis fixed electorde unit comprises the first X-axis fixed electorde a, the first X-axis fixed electorde b that be arranged in parallel, and the first X-axis movable electrode a that described first X-axis fixed electorde a, the first X-axis fixed electorde b and mass are arranged, the first X-axis movable electrode b together constitute the differential capacitance structure that X-axis detects;
Described second X-axis fixed electorde unit comprises the second X-axis fixed electorde a, the second X-axis fixed electorde b that be arranged in parallel, and the second X-axis movable electrode a that described second X-axis fixed electorde a, the second X-axis fixed electorde b and mass are arranged, the second X-axis movable electrode b together constitute the differential capacitance structure that X-axis detects.
Preferably, described first X-axis fixed electorde unit, the second X-axis fixed electorde unit extend along X-direction, and described first X-axis fixed electorde unit, the second X-axis fixed electorde unit are symmetrically distributed in the both sides of mass Y-axis center line, or be distributed in mass Y-axis center line both sides and along anchor portion Central Symmetry.
Preferably, described first X-axis fixed electorde unit, the second X-axis fixed electorde unit are positioned on the center line of mass X-axis.
Preferably, described first X-axis fixed electorde unit comprises the first X-axis fixed electorde a, the first X-axis fixed electorde b that are arranged in parallel, and the first X-axis movable electrode a that described first X-axis fixed electorde a, the first X-axis fixed electorde b and mass are arranged, the first X-axis movable electrode b together constitute the differential capacitance structure that X-axis detects;
Described second X-axis fixed electorde unit comprises the second X-axis fixed electorde a, the second X-axis fixed electorde b that be arranged in parallel, and the second X-axis movable electrode a that described second X-axis fixed electorde a, the second X-axis fixed electorde b and mass are arranged, the second X-axis movable electrode b together constitute the differential capacitance structure that X-axis detects;
Wherein, in described first X-axis fixed electorde unit wherein in the first X-axis fixed electorde of side and the second X-axis fixed electorde unit the second X-axis fixed electorde of opposite side link together.
Preferably, first Z axis fixed electorde unit, the second Z axis fixed electorde unit are respectively the bottom electrode of the first Z axis Detection capacitance, the second Z axis Detection capacitance, and described first Z axis movable electrode unit, the second Z axis movable electrode unit are respectively the top electrode of the first Z axis Detection capacitance, the second Z axis Detection capacitance.
Preferably, described mass wherein side is provided with lightening hole, to make the quality of mass both sides unequal.
Preferably, described lightening hole is arranged on position mass being positioned at the first Z axis movable electrode unit.
Preferably, described second Z axis fixed electorde unit is provided with the fabrication hole corresponding with lightening hole on the first Z axis movable electrode unit.
Three axis accelerometer of the present utility model, by the acceleration detection structure assembly of XYZ tri-axis on single structure, structure centre is the anchor point of movable mass, turning round beam by elasticity is connected on anchor point by mass, make mass with the input of acceleration, be subjected to displacement in all directions, thus realize the detection of the acceleration signal of all directions.When X-direction has acceleration to input, mass can rotate in the Z-axis direction around anchor point, thus realizes the detection of X-direction acceleration; When Z-direction has acceleration to input, the torsion that mass can occur in the X-axis direction around elastic beam, thus realize the detection of Z-direction acceleration, when Y direction acceleration inputs, mass in Y direction generation translation motion, thus realizes the detection of Y direction acceleration.
Inventor of the present utility model finds, in the prior art, due to the restriction of its Z axis structural principle, most of MEMS triaxial accelerometer all adopts design eccentric in a certain direction, has come to be detected while three axial accelerations by single structure.Such structural design, has special requirement to technique on the one hand, and on the other hand, asymmetric bias design makes to eliminate extraneous interference completely.Therefore, the technical assignment that the utility model will realize or technical matters to be solved are that those skilled in the art never expect or do not anticipate, therefore the utility model is a kind of new technical scheme.
By referring to the detailed description of accompanying drawing to exemplary embodiment of the present utility model, further feature of the present utility model and advantage thereof will become clear.
Accompanying drawing explanation
In the description combined and the accompanying drawing forming a part for instructions shows embodiment of the present utility model, and illustrate that one is used from and explains principle of the present utility model together with it.
Fig. 1 is the structural representation of the utility model three axis accelerometer.
Fig. 2 is the structural representation of another embodiment of the utility model three axis accelerometer.
Fig. 3, Fig. 4 are the schematic diagram of movements of the utility model three axis accelerometer when being subject to Z-direction acceleration.
Embodiment
Various exemplary embodiment of the present utility model is described in detail now with reference to accompanying drawing.It should be noted that: unless specifically stated otherwise, otherwise positioned opposite, the numerical expression of the parts of setting forth in these embodiments and step and numerical value do not limit scope of the present utility model.
Illustrative to the description only actually of at least one exemplary embodiment below, never as any restriction to the utility model and application or use.
May not discuss in detail for the known technology of person of ordinary skill in the relevant, method and apparatus, but in the appropriate case, described technology, method and apparatus should be regarded as a part for instructions.
In all examples with discussing shown here, any occurrence should be construed as merely exemplary, instead of as restriction.Therefore, other example of exemplary embodiment can have different values.
It should be noted that: represent similar terms in similar label and letter accompanying drawing below, therefore, once be defined in an a certain Xiang Yi accompanying drawing, then do not need to be further discussed it in accompanying drawing subsequently.
Referring to figs. 1 to Fig. 4, the utility model provides a kind of MEMS triaxial accelerometer, and it comprises substrate 14 and is positioned at the mass 1 above substrate 14, wherein, described substrate 14 is provided with anchor portion 2, for by mass 1 resiliency supported above substrate 14.Particularly, described mass 1 is turned round beam 3 by its monosymmetric elasticity and is connected on the sidewall of anchor portion 2, that is, article two, elasticity turns round the both sides that beam 3 is distributed in anchor portion 2 symmetrically, wherein anchor portion 2 is positioned at the structure centre position of mass 1, and the center line that elasticity is turned round on beam 3 length direction overlaps with the center line of mass 1.Mass 1 belongs to the common practise of those skilled in the art with the connected mode of substrate 14, no longer illustrates at this.
The utility model for convenience of description, is turned round with elasticity the direction that beam 3 extends and is designated as X-direction, vertical with X-direction and be positioned at mass 1 direction be planar designated as Y direction, the direction perpendicular to mass 1 place plane is designated as Z-direction.
Turn round beam 3 for boundary with elasticity, the quality of mass 1 both sides is unequal, and that is, described mass 1 is positioned at elasticity in the Y-axis direction, and to turn round the quality of beam 3 two side portions unequal; Such as be as the criterion with the view direction of Fig. 1, turn round beam 3 for boundary with elasticity, the first half of mass 1 and the quality of its latter half unequal.
In a specific embodiment of the present utility model, in order to make the quality of mass both sides unequal, described mass 1 wherein side is provided with lightening hole 6.This lightening hole 6 can be multiple, in matrix distribution.This lightening hole 6 can be through hole, making in, by etching method formed; Can certainly be blind hole, etch by the mode increasing one deck mask.In another embodiment of utility model, can pass through to increase balancing weight, to make the quality of mass 1 both sides unequal.
Three axis accelerometer of the present utility model, anchor portion 2 is positioned at the structure centre position of mass 1, and the center line that elasticity turns round beam 3 length direction overlaps with the center line of mass 1, the quality of mass 1 both sides is unequal, that is, the moment unbalance of mass 1 both sides, when there being the acceleration input of extraneous Z-direction, make whole mass 1 with the motion of anchor portion 2 similar seesaw for fulcrum produces, thus make its acceleration signal to Z-direction responsive.
When there being the acceleration input of extraneous X-direction, because anchor portion 2 is positioned at the structure centre of mass 1, elasticity turns round the center line of beam 3 length direction and the axial center line of mass 1X coincides together, and the quality that mass 1 is positioned at its X-axis center line both sides is unequal, whole mass 1 is made with anchor portion 2 for fulcrum rotates, thus to make its acceleration signal to X-direction responsive.
When there being the acceleration input of extraneous Y direction, because anchor portion 2 is positioned at the structure centre of mass 1, elasticity turns round the center line of beam 3 length direction and the axial center line of mass 1X coincides together, make whole mass 1 in the Y-axis direction translation motion can occur, thus make its acceleration signal to Y direction responsive.
Three axis accelerometer of the present utility model, in order to detect the acceleration signal of Z-direction, described substrate 14 is provided with and is distributed in the first Z axis fixed electorde unit 13, second Z axis fixed electorde unit 12 that elasticity turns round beam 3 both sides, with reference to figure 3, Fig. 4, correspondingly, described mass 1 is provided with the first Z axis movable electrode unit 4 forming the first Z axis Detection capacitance with the first Z axis fixed electorde unit 13, forms the second Z axis movable electrode unit 5 of the second Z axis Detection capacitance with the second Z axis fixed electorde unit 12.Wherein, first Z axis fixed electorde unit 13, second Z axis fixed electorde unit 12 can adopt capacitor plate structure well-known to those skilled in the art, it can be fixed on substrate 14, first Z axis movable electrode unit 4, second Z axis movable electrode unit 5 also can adopt capacitor plate structure well-known to those skilled in the art, for accelerometer, first Z axis movable electrode unit 4, second Z axis movable electrode unit 5 is mass 1 itself, such as it is the sidewall of the relative both sides of mass 1, respectively with the first Z axis fixed electorde unit 13, second Z axis fixed electorde unit 12 forms side capacitive structure.
The utility model one preferred embodiment in, first Z axis fixed electorde unit 13, second Z axis fixed electorde unit 12 is respectively the bottom electrode of the first Z axis Detection capacitance, the second Z axis Detection capacitance, first Z axis movable electrode unit 4, second Z axis movable electrode unit 5 is positioned at the lower surface of mass 1 marginal position, as the top electrode of the first Z axis Detection capacitance, the second Z axis Detection capacitance.It is symmetrical that first Z axis fixed electorde unit 13, second Z axis fixed electorde unit 12 turns round beam 3 relative to elasticity in the Y-axis direction, makes the first Z axis Detection capacitance, the second Z axis Detection capacitance constitutes differential capacitance structure.
When there being the acceleration input of extraneous Z-direction, with reference to the view direction of figure 3, when there being downward Z axis acceleration input, because the quality of mass 1 both sides is unequal, the distance be provided with between the first Z axis movable electrode unit 4 of lightening hole 6 side and the first Z axis fixed electorde unit 13 is diminished, distance between second Z axis movable electrode unit 5 of heavier mass side and the second Z axis fixed electorde unit 12 is become greatly, thus make the first Z axis Detection capacitance, the second Z axis Detection capacitance constitutes differential capacitance structure.
Contrary, with reference to the view direction of figure 4, when there being Z axis acceleration upwards to input, because the quality of mass 1 both sides is unequal, the distance be provided with between the first Z axis movable electrode unit 4 of lightening hole 6 side and the first Z axis fixed electorde unit 13 is made to become large, distance between second Z axis movable electrode unit 5 of heavier mass side and the second Z axis fixed electorde unit 12 is diminished, thus make the first Z axis Detection capacitance, the second Z axis Detection capacitance constitutes differential capacitance structure.
The utility model one preferred embodiment in, with reference to figure 1, Fig. 3, Fig. 4, described lightening hole 6 is arranged on position mass 1 being positioned at the first Z axis movable electrode unit 4, to make the of poor quality comparatively large of mass 1 both sides, thus improves the sensitivity of mass 1 deflection.Because lightening hole 6 is arranged on the position of the first Z axis movable electrode unit 4, thus the right opposite decreasing the first Z axis movable electrode unit 4 and the first Z axis fixed electorde unit 13 amasss, in order to ensure the first Z axis Detection capacitance, the consistance of the second Z axis Detection capacitance, described second Z axis fixed electorde unit 12 is provided with the fabrication hole corresponding with lightening hole 6 on the first Z axis movable electrode unit 4, thus make the first Z axis movable electrode unit 4, the right opposite of the first Z axis fixed electorde unit 13 amasss and the second Z axis movable electrode unit 5, the right opposite of the second Z axis fixed electorde unit 12 is long-pending consistent, that is, ensure that the first Z axis Detection capacitance, the consistance of the second Z axis Detection capacitance.
Three axis accelerometer of the present utility model, in order to detect the acceleration signal of Y direction, described substrate 14 is also respectively arranged with the first Y-axis fixed electorde unit 8, second Y-axis fixed electorde unit 7, described first Y-axis fixed electorde unit 8, second Y-axis fixed electorde unit 7 is positioned in mass 1Y axis of spindle, and is symmetrically distributed in the both sides of anchor portion 2; Accordingly, described mass 1 is provided with the first Y-axis movable electrode unit forming the first Y-axis Detection capacitance with the first Y-axis fixed electorde unit 8, forms the second Y-axis movable electrode unit of the second Y-axis Detection capacitance with the second Y-axis fixed electorde unit 7.First Y-axis fixed electorde unit 8, second Y-axis fixed electorde unit 7 can adopt capacitor plate mechanism well-known to those skilled in the art, and it is fixed on substrate 14; First Y-axis movable electrode unit, the second Y-axis movable electrode unit can adopt capacitor plate mechanism well-known to those skilled in the art, for accelerometer, first Y-axis movable electrode unit, the second Y-axis movable electrode unit are mass 1 itself, such as, can be the sidewall of mass 1.In the embodiment that the utility model one is concrete, on described mass 1, corresponding position is provided with the mating holes 11 of hollow out, first Y-axis fixed electorde unit 8, second Y-axis fixed electorde unit 7 to be fixed on substrate 14, and be located in mating holes 11, now, the sidewall of mating holes 11 can as the first Y-axis movable electrode unit, second Y-axis movable electrode unit, respectively with the first Y-axis fixed electorde unit 8, second Y-axis fixed electorde unit 7 forms the first Y-axis Detection capacitance, second Y-axis Detection capacitance, and, two Y-axis Detection capacitances can form differential capacitance structure, the temperature characterisitic of chip and the ability of anti-external interference can be improved thus.
First Y-axis fixed electorde unit 8 of the present utility model, second Y-axis fixed electorde unit 7 extends along X-direction, that is, first Y-axis fixed electorde unit 8, second Y-axis fixed electorde unit 7 turns round beam 3 respectively with elasticity parallel, when there is the acceleration input of Y direction in the external world, mass 1 translation in the Y-axis direction, thus, the distance between the first Y-axis movable electrode unit and the first Y-axis fixed electorde unit 8 is made to become large or reduce, distance between second Y-axis movable electrode unit and the second Y-axis fixed electorde unit 7 reduces or becomes large, thus make the first Y-axis Detection capacitance, second Y-axis Detection capacitance can form differential capacitance structure.
First Y-axis fixed electorde unit 8 of the present utility model, second Y-axis fixed electorde unit 7 is positioned on the Y-axis center line of mass 1, when there is the acceleration input of X-direction in the external world, mass 1 with anchor portion 2 for fulcrum clockwise or rotate counterclockwise, thus, make the first Y-axis fixed electorde unit 8, distance between first Y-axis movable electrode unit and the second Y-axis fixed electorde unit 7, distance between second Y-axis movable electrode unit becomes large simultaneously or reduces, and variable quantity is consistent, by the first Y-axis Detection capacitance, the signal differential now changed can fall by the differential configuration of the second Y-axis Detection capacitance, that is, first Y-axis Detection capacitance, the differential capacitance structure that second Y-axis Detection capacitance is formed can not the capacitance signal of exporting change, X-axis acceleration signal is exported to prevent Y-axis Detection capacitance.
Three axis accelerometer of the present utility model, as described above, first Y-axis fixed electorde unit 8, second Y-axis fixed electorde unit 7 can be single capacitor plate structure well-known to those skilled in the art, the utility model one preferred embodiment in, with reference to figure 1, Fig. 2, described first Y-axis fixed electorde unit 8 comprises the first Y-axis fixed electorde a8a be arranged in parallel, first Y-axis fixed electorde b8b, first Y-axis fixed electorde a8a, first Y-axis fixed electorde b8b is fixed on substrate 14, and be arranged in the mating holes 11 that mass 1 is formed, relative two sidewalls of mating holes 11 are as the first Y-axis movable electrode a, first Y-axis movable electrode b, respectively with the first Y-axis fixed electorde a8a, first Y-axis fixed electorde b8b constitutes a pair differential capacitance structure, thus improve the accuracy of detection of Y-axis acceleration signal further.Based on same principle, described second Y-axis fixed electorde unit 7 comprises the second Y-axis fixed electorde a7a be arranged in parallel, second Y-axis fixed electorde b7b, second Y-axis fixed electorde a7a, second Y-axis fixed electorde b7b is fixed on substrate 14, and be arranged in the mating holes 11 that mass 1 is formed, relative two sidewalls of mating holes 11 are as the second Y-axis movable electrode a, second Y-axis movable electrode b, respectively with the second Y-axis fixed electorde a7a, second Y-axis fixed electorde b7b constitutes a pair differential capacitance structure, thus further increase the accuracy of detection of Y-axis acceleration signal.
Three axis accelerometer of the present utility model, in order to detect the acceleration signal of X-direction, described substrate 14 is provided with the first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10; Accordingly, described mass 1 is provided with the first X-axis movable electrode unit forming the first X-axis Detection capacitance with the first X-axis fixed electorde unit 9, forms the second X-axis movable electrode unit of the second X-axis Detection capacitance with the second X-axis fixed electorde unit 10; Wherein, described first X-axis Detection capacitance, the second X-axis Detection capacitance form differential capacitance structure.
Particularly, the capacitor plate structure that first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10 can be well known to those skilled in the art, it is fixed on substrate 14 by anchor point, wherein, first X-axis fixed electorde unit 9 and the first X-axis movable electrode unit can form the first X-axis Detection capacitance of side capacitive formula, and the second X-axis fixed electorde unit 10 and the second X-axis movable electrode unit can form the second X-axis Detection capacitance of side capacitive formula; Certainly, for a person skilled in the art, when the capacitance structure that can adopt upper and lower polar-plate-type.In utility model, the first X-axis movable electrode unit, the second X-axis movable electrode unit are the sidewall of mass 1.On described mass 1, corresponding position is provided with the mating holes 11 of hollow out, wherein, first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10 is fixed on substrate 14, and make the first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10 is positioned at corresponding mating holes 11, now, the hole wall of mating holes 11 can be used as the first X-axis movable electrode unit, second X-axis movable electrode unit, respectively with the first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10 constitutes the first X-axis Detection capacitance, second X-axis Detection capacitance, and these two Detection capacitances form differential capacitance structure, the temperature characterisitic of chip and the ability of anti-external interference can be improved thus.
In the embodiment that utility model one is concrete, with reference to figure 2, described first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10 extends along Y direction, that is, first X-axis fixed electorde unit 9, the length direction of the second X-axis fixed electorde unit 10 is positioned in Y direction, adopt this structure, when there being the acceleration input of extraneous Y direction, the translation in the Y-axis direction of mass 1 entirety, this just makes between the first X-axis fixed electorde unit 9 and the first X-axis movable electrode unit, distance between second X-axis fixed electorde unit 10 and the second X-axis movable electrode unit, relative area can not change, that is, first X-axis Detection capacitance, second X-axis Detection capacitance can not the variable signal of output capacitance, Y-axis acceleration signal is exported to prevent X-axis Detection capacitance.
Wherein, described first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10 is relative to the axial center line rotational symmetry of mass 1Y or relative to anchor portion 2 Central Symmetry.When there being the acceleration input of extraneous X-direction, mass 1 with anchor portion 2 for fulcrum clockwise or rotate counterclockwise, the distance between the first X-axis fixed electorde unit 9 and the first X-axis movable electrode unit is made to become large or diminish, distance between second X-axis fixed electorde unit 10 and the second X-axis movable electrode unit diminishes or becomes large, thus make the first X-axis Detection capacitance that the first X-axis fixed electorde unit 9 and the first X-axis movable electrode unit are formed, the second X-axis Detection capacitance that second X-axis fixed electorde unit 10 and the second X-axis movable electrode unit are formed can form a pair jointly for detecting the differential capacitance structure of X-direction.Wherein, first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10 can not be located on the axial center line of mass 1X, because when two X-axis fixed electorde unit 9,10 are positioned on the axial center line of mass 1X, first X-axis Detection capacitance, the second X-axis Detection capacitance of corresponding formation increase simultaneously or reduce, and the two can not form the differential capacitance structure that can export X-direction acceleration change signal.
Three axis accelerometer of the present utility model, as described above, first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10 can be single capacitor plate structure well-known to those skilled in the art, the utility model one preferred embodiment in, with reference to figure 2, described first X-axis fixed electorde unit 9 comprises the first X-axis fixed electorde a9a be arranged in parallel, first X-axis fixed electorde b9b, first X-axis fixed electorde a9a, first X-axis fixed electorde b9b is fixed on substrate, and be arranged in the mating holes 11 that mass 1 is formed, relative two sidewalls of mating holes 11 are as the first X-axis movable electrode a, first X-axis movable electrode b, respectively with the first X-axis fixed electorde a9a, first X-axis fixed electorde b9b constitutes a pair differential capacitance structure, thus further increase the accuracy of detection of X-axis acceleration signal.
Based on same principle, described second X-axis fixed electorde unit 10 comprises the second X-axis fixed electorde a10a be arranged in parallel, second X-axis fixed electorde b10b, second X-axis fixed electorde a10a, second X-axis fixed electorde b10b is fixed on substrate 14, and be arranged in another mating holes 11 that mass 1 is formed, relative two sidewalls of mating holes 11 are as the second X-axis movable electrode a, second X-axis movable electrode b, respectively with the second X-axis fixed electorde a10a, second X-axis fixed electorde b10b constitutes a pair differential capacitance structure, thus further increase the accuracy of detection of X-axis acceleration signal.
In another concrete embodiment of the utility model, with reference to figure 1, described first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10 extends along X-direction, and described first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10 is symmetrically distributed in the both sides of mass 1Y axis of spindle, or be distributed in the both sides of mass 1Y axis of spindle, and along anchor portion 2 Central Symmetry.When mass 1 with anchor portion 2 for fulcrum clockwise or rotate counterclockwise, the change of the first X-axis Detection capacitance, the second X-axis Detection capacitance is completely contrary, together constitutes differential capacitance structure.Further preferably, described first X-axis fixed electorde unit 9, second X-axis fixed electorde unit 10 is positioned in mass 1X axis of spindle, and relative to anchor portion 2 Central Symmetry, this structure, make when being subject to the acceleration of X-direction, the first X-axis Detection capacitance is identical with the amount that the second X-axis Detection capacitance changes.
In the present embodiment, first X-axis fixed electorde unit 9 can adopt above-mentioned first X-axis fixed electorde a9a, the first X-axis fixed electorde b9b structure, second X-axis fixed electorde unit 10 also can adopt the second above-mentioned X-axis fixed electorde a10a, the second X-axis fixed electorde b10b structure, meanwhile, in described first X-axis fixed electorde unit 9 wherein in first X-axis fixed electorde 9a, 9b of side and the second X-axis fixed electorde unit 10 second X-axis fixed electorde 10a, 10b of opposite side link together.
Particularly, with reference to the view direction of figure 1, the first X-axis fixed electorde a9a, the first X-axis fixed electorde b9b extend along X-direction, and wherein, the first X-axis fixed electorde a9a is positioned at downside, and the first X-axis fixed electorde b9b is positioned at upside; Second X-axis fixed electorde a10a, the second X-axis fixed electorde b10b extend along X-direction, and wherein, the second X-axis fixed electorde a10a is positioned at downside, and the second X-axis fixed electorde b10b is positioned at upside; Now, need the first X-axis fixed electorde b9b and the second X-axis fixed electorde a10a to link together, the first X-axis fixed electorde a9a and the second X-axis fixed electorde b10b is linked together; Thus make the first X-axis fixed electorde b9b, the first X-axis movable electrode b, the second X-axis fixed electorde a10a, the second X-axis movable electrode a together constitute differential capacitance structure; The first X-axis fixed electorde a9a, the first X-axis movable electrode a, the second X-axis fixed electorde b10b, the second X-axis movable electrode b is made jointly to form differential capacitance structure; When there is the acceleration input of Y direction in the external world, there is translation in the Y-axis direction in mass 1, distance between first X-axis fixed electorde b9b, the first X-axis movable electrode b increases or reduces, distance between second X-axis fixed electorde a10a, the second X-axis movable electrode a increases or reduces, and variable quantity is consistent, the capacitance signal difference now changed can be fallen by differential capacitance structure; Based on same reason, the capacitance signal difference now changed also can be fallen by the differential capacitance that the first X-axis fixed electorde a9a, the first X-axis movable electrode a, the second X-axis fixed electorde b10b, the second X-axis movable electrode b are formed jointly, exports Y-axis acceleration signal to prevent X-axis Detection capacitance.
Three axis accelerometer of the present utility model, by the acceleration detection structure assembly of XYZ tri-axis on single structure, structure centre is the anchor point of movable mass, turning round beam by elasticity is connected on anchor point by mass, make mass with the input of acceleration, be subjected to displacement in all directions, thus realize the detection of the acceleration signal of all directions.When X-direction has acceleration to input, mass can rotate in the Z-axis direction around anchor point, thus realizes the detection of X-direction acceleration; When Z-direction has acceleration to input, the torsion that mass can occur in the X-axis direction around elastic beam, thus realize the detection of Z-direction acceleration, when Y direction acceleration inputs, mass in Y direction generation translation motion, thus realizes the detection of Y direction acceleration.
Although be described in detail specific embodiments more of the present utility model by example, it should be appreciated by those skilled in the art, above example is only to be described, instead of in order to limit scope of the present utility model.It should be appreciated by those skilled in the art, when not departing from scope and spirit of the present utility model, above embodiment can be modified.Scope of the present utility model is limited by claims.
Claims (10)
1. a MEMS triaxial accelerometer, it is characterized in that: comprise the mass (1) being positioned at substrate (14) top, and the anchor portion (2) be fixed on substrate (14), described mass (1) is turned round beam (3) by its monosymmetric elasticity and is connected in anchor portion (2), and, described anchor portion (2) is positioned at the structure centre of mass (1), and the center line that elasticity is turned round on beam (3) length direction overlaps with the center line of mass (1); Wherein, the length direction that elasticity turns round beam (3) is designated as X-direction, vertical with X-direction and be positioned at mass (1) direction be planar designated as Y direction, direction perpendicular to mass (1) place plane is designated as Z-direction, wherein, described mass (1) is positioned at elasticity in the Y-axis direction to turn round the quality of the part of beam (3) both sides unequal;
Described substrate (14) is provided with the first X-axis fixed electorde unit (9), the second X-axis fixed electorde unit (10), described mass (1) is provided with the first X-axis movable electrode unit forming the first X-axis Detection capacitance with the first X-axis fixed electorde unit (9), forms the second X-axis movable electrode unit of the second X-axis Detection capacitance with the second X-axis fixed electorde unit (10); Wherein, described first X-axis Detection capacitance, the second X-axis Detection capacitance form differential capacitance structure;
Described substrate (14) is provided with and is distributed in the first Z axis fixed electorde unit (13), the second Z axis fixed electorde unit (12) that elasticity turns round beam (3) both sides, described mass (1) is provided with the first Z axis movable electrode unit (4) forming the first Z axis Detection capacitance with the first Z axis fixed electorde unit (13), forms the second Z axis movable electrode unit (5) of the second Z axis Detection capacitance with the second Z axis fixed electorde unit (12); Wherein, described first Z axis Detection capacitance, the second Z axis Detection capacitance form differential capacitance structure;
Described substrate (14) is also respectively arranged with the first Y-axis fixed electorde unit (8), the second Y-axis fixed electorde unit (7) that extend along X-direction, described first Y-axis fixed electorde unit (8), the second Y-axis fixed electorde unit (7) are positioned on the center line of mass (1) Y-axis, and are symmetrically distributed in the both sides of anchor portion (2); Described mass (1) is provided with the first Y-axis movable electrode unit forming the first Y-axis Detection capacitance with the first Y-axis fixed electorde unit (8), forms the second Y-axis movable electrode unit of the second Y-axis Detection capacitance with the second Y-axis fixed electorde unit (7); Wherein, described first Y-axis Detection capacitance, the second Y-axis Detection capacitance form differential capacitance structure.
2. three axis accelerometer according to claim 1, it is characterized in that: described first X-axis fixed electorde unit (9), the second X-axis fixed electorde unit (10) extend along Y direction, described first X-axis fixed electorde unit (9), the second X-axis fixed electorde unit (10) are relative to the center line rotational symmetry of mass (1) Y direction or relative to anchor portion (2) Central Symmetry, and the first X-axis fixed electorde unit (9), the second X-axis fixed electorde unit (10) be not on the center line of mass (1) X-direction.
3. three axis accelerometer according to claim 2, is characterized in that:
Described first X-axis fixed electorde unit (9) comprises the first X-axis fixed electorde a (9a), the first X-axis fixed electorde b (9b) that be arranged in parallel, and described first X-axis fixed electorde a (9a), the first X-axis fixed electorde b (9b) together constitute with upper the first X-axis movable electrode a, the first X-axis movable electrode b arranged of mass (1) differential capacitance structure that X-axis detects;
Described second X-axis fixed electorde unit (10) comprises the second X-axis fixed electorde a (10a), the second X-axis fixed electorde b (10b) that be arranged in parallel, and described second X-axis fixed electorde a (10a), the second X-axis fixed electorde b (10b) together constitute with upper the second X-axis movable electrode a, the second X-axis movable electrode b arranged of mass (1) differential capacitance structure that X-axis detects.
4. three axis accelerometer according to claim 1, it is characterized in that: described first X-axis fixed electorde unit (9), the second X-axis fixed electorde unit (10) extend along X-direction, and described first X-axis fixed electorde unit (9), the second X-axis fixed electorde unit (10) are symmetrically distributed in the both sides of mass (1) Y-axis center line, or be distributed in mass (1) Y-axis center line both sides and along anchor portion (2) Central Symmetry.
5. three axis accelerometer according to claim 4, is characterized in that: described first X-axis fixed electorde unit (9), the second X-axis fixed electorde unit (10) are positioned on the center line of mass (1) X-axis.
6. three axis accelerometer according to claim 5, is characterized in that:
Described first X-axis fixed electorde unit (9) comprises the first X-axis fixed electorde a (9a), the first X-axis fixed electorde b (9b) that are arranged in parallel, and, described first X-axis fixed electorde a (9a), the first X-axis fixed electorde b9b) together constitute with upper the first X-axis movable electrode a, the first X-axis movable electrode b arranged of mass (1) differential capacitance structure that X-axis detects;
Described second X-axis fixed electorde unit (10) comprises the second X-axis fixed electorde a (10a), the second X-axis fixed electorde b (10b) that be arranged in parallel, and described second X-axis fixed electorde a (10a), the second X-axis fixed electorde b (10b) together constitute with upper the second X-axis movable electrode a, the second X-axis movable electrode b arranged of mass (1) differential capacitance structure that X-axis detects;
Wherein, in described first X-axis fixed electorde unit (9), wherein the first X-axis fixed electorde (9a, 9b) of side links together with the second X-axis fixed electorde (10a, 10b) of opposite side in the second X-axis fixed electorde unit (10).
7. three axis accelerometer according to claim 1, it is characterized in that: the first Z axis fixed electorde unit (13), the second Z axis fixed electorde unit (12) are respectively the bottom electrode of the first Z axis Detection capacitance, the second Z axis Detection capacitance, described first Z axis movable electrode unit (4), the second Z axis movable electrode unit (5) are respectively the top electrode of the first Z axis Detection capacitance, the second Z axis Detection capacitance.
8. three axis accelerometer according to claim 7, is characterized in that: described mass (1) wherein side is provided with lightening hole (6), to make the quality of mass (1) both sides unequal.
9. three axis accelerometer according to claim 8, is characterized in that: described lightening hole (6) is arranged on position mass (1) being positioned at the first Z axis movable electrode unit (4).
10. three axis accelerometer according to claim 9, is characterized in that: on described second Z axis fixed electorde unit (12), be provided with the fabrication hole that lightening hole (6) upper with the first Z axis movable electrode unit (4) is corresponding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520456294.9U CN204758629U (en) | 2015-06-29 | 2015-06-29 | MEMS triaxial accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520456294.9U CN204758629U (en) | 2015-06-29 | 2015-06-29 | MEMS triaxial accelerometer |
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| CN204758629U true CN204758629U (en) | 2015-11-11 |
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| CN201520456294.9U Withdrawn - After Issue CN204758629U (en) | 2015-06-29 | 2015-06-29 | MEMS triaxial accelerometer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105158511A (en) * | 2015-06-29 | 2015-12-16 | 歌尔声学股份有限公司 | MEMS triaxial accelerometer |
| CN107782913A (en) * | 2016-08-26 | 2018-03-09 | 深迪半导体(上海)有限公司 | A kind of three axle capacitive accelerometers |
-
2015
- 2015-06-29 CN CN201520456294.9U patent/CN204758629U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105158511A (en) * | 2015-06-29 | 2015-12-16 | 歌尔声学股份有限公司 | MEMS triaxial accelerometer |
| CN107782913A (en) * | 2016-08-26 | 2018-03-09 | 深迪半导体(上海)有限公司 | A kind of three axle capacitive accelerometers |
| CN107782913B (en) * | 2016-08-26 | 2022-02-22 | 深迪半导体(绍兴)有限公司 | Triaxial capacitive accelerometer |
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Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
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Granted publication date: 20151111 Effective date of abandoning: 20181130 |
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