CN203705471U - Z-axis accelerometer - Google Patents
Z-axis accelerometer Download PDFInfo
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- CN203705471U CN203705471U CN201420050235.7U CN201420050235U CN203705471U CN 203705471 U CN203705471 U CN 203705471U CN 201420050235 U CN201420050235 U CN 201420050235U CN 203705471 U CN203705471 U CN 203705471U
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- movable electrode
- axis accelerometer
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- 230000033001 locomotion Effects 0.000 claims abstract description 43
- 230000001133 acceleration Effects 0.000 claims description 32
- 230000003068 static effect Effects 0.000 claims description 28
- 239000003990 capacitor Substances 0.000 abstract description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 7
- 230000008859 change Effects 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- 206010070834 Sensitisation Diseases 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000008313 sensitization Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Abstract
The embodiments of the utility model disclose a Z-axis accelerometer. The Z-axis accelerometer comprises: a mass block, wherein the mass block can be subjected to linear motion in the Z-axis direction when a Z-axis accelerated speed is inputted; an electrostatic comb driver, wherein the electrostatic comb driver comprises a plurality of first pole plates and second pole plates which are parallel to the Z axis, and the first pole plates and the second pole plates are distributed in a separated manner, and the first pole plates are fixed on the mass block; and a gap capacitor matched with the electrostatic comb driver, wherein the gap capacitor comprises a fixed electrode and a movable electrode which can be subjected to linear motion in the working plane. All of the second pole plates are connected with the movable electrode. The second pole plates are used to drive the linear motion of the movable electrode on the working plane when the mass block is moved. The Z axis is vertical to the working plane. The Z-axis accelerometer is easy to fabricate.
Description
Technical field
The utility model relates to capacitive accelerometer technical field, more particularly, relates to a kind of Z axis accelerometer.
Background technology
The minisize condenser type accelerometer that adopts micro-electronic mechanical system technique to realize, because volume is little, lightweight, precision is high and low cost and other advantages, makes it have a wide range of applications scene in fields such as military affairs, auto industry, consumer electronics products.
The ultimate principle of capacitive accelerometer is, treat that the inertia gravitation of measuring acceleration generation causes pole plate gap or the overlapping area change of pole plate of sensitization capacitance, make the proportional relation of capacitance variations and acceleration change, the variation of obtaining the capacitance of sensitization capacitance by signal processing circuit can obtain the size of acceleration.For the accelerometer of measuring Z axis (perpendicular to working face) acceleration signal, owing to being subject to the restriction of MEMS (Micro-Electro-Mechanical Systems, MEMS (micro electro mechanical system)) processing features, adopt clearance-changed type electric capacity more.
With reference to figure 1, existing Z axis capacitive accelerometer adopts conventionally with respect to the asymmetric electric capacity top crown 2 of rotation axis 1, in the time that existence is the input of Z axis acceleration perpendicular to the acceleration of described top crown 2 directions, because driving described top crown 2 moving axis 1 that rotates, the rotation of mass 3 rotates, make one of two differential capacitor between two fixing bottom crowns 4 and the top crown 2 below top crown increase one and reduce, the capacitance of measuring described differential capacitor by metering circuit can obtain the size of the acceleration of Z axis input.
Existing Z axis accelerometer is realized the measurement of vertical acceleration by the parallel plate capacitor (two substrates are all perpendicular to Z axis) of Z-direction, need to prepare separately respectively step by step upper bottom crown and the mass rotating mechanism of electric capacity, complex manufacturing technology.
Utility model content
For solving the problems of the technologies described above, the utility model provides a kind of Z axis accelerometer, and described Z axis accelerometer is made simple.
For achieving the above object, the utility model provides following technical scheme:
A kind of Z axis accelerometer, this Z axis accelerometer comprises:
Mass, in the time that Z axis acceleration is inputted described in mass can do rectilinear motion in Z-direction;
Static broach driver, comprising: multiple first pole plates parallel with Z axis and the second pole plate, and described the first pole plate and the second polar plate interval distribute, and described the first pole plate is fixed on described mass;
Clearance type electric capacity with described static broach driver matches, comprising: fixed electorde and can be at straight-line movable electrode in working face;
Wherein, described the second pole plate is all connected with described movable electrode, and described the second pole plate is used for driving described movable electrode motion rectilinear motion on described working face in the time of described mass motion; Z axis is perpendicular to described working face.
Preferably, in above-mentioned Z axis accelerometer, the both sides that described mass does not arrange described the first pole plate are provided with the first elastic device, and described the first elastic device has Z axis degree of freedom, can make described mass do rectilinear motion in Z-direction.
Preferably, in above-mentioned Z axis accelerometer, described the first elastic device is elastic rod or spring.
Preferably, in above-mentioned Z axis accelerometer, also comprise:
The second elastic device being connected with described movable electrode, described the second elastic device has the degree of freedom that is parallel to described movable electrode direction of motion, do not adding under work voltage condition, described the second elastic device is for controlling the initial position of described movable electrode in setting.
Preferably, in above-mentioned Z axis accelerometer, described the second elastic device is the spring being arranged on described working face, and the direction of vibration of described spring is parallel with described direction of motion.
Preferably, in above-mentioned Z axis accelerometer, described Z axis accelerometer comprises:
Be symmetricly set on two identical static broach drivers of described mass both sides;
Be symmetricly set on two identical clearance type electric capacity of described mass both sides;
Wherein, described static broach driver is corresponding one by one with described clearance type electric capacity.
Can find out from technique scheme, Z axis accelerometer provided by the utility model comprises: mass, in the time that Z axis acceleration is inputted described in mass can do rectilinear motion in Z-direction; Static broach driver, comprising: multiple first pole plates parallel with Z axis and the second pole plate, and described the first pole plate and the second polar plate interval distribute, and described the first pole plate is fixed on described mass; Clearance type electric capacity with described static broach driver matches, comprising: fixed electorde and can be at straight-line movable electrode in working face; Wherein, described the second pole plate is all connected with described movable electrode, and described the second pole plate is used for driving described movable electrode motion rectilinear motion on described working face in the time of described mass motion; Z axis is perpendicular to described working face.Described Z axis accelerometer is directly converted to the vertical motion of mass the tangential movement that is parallel to working face by static broach driver, without rotational structure, described mass, static broach driver and clearance type electric capacity can be prepared from described working face simultaneously, make comparatively simply, reduced production cost.
Brief description of the drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, apparently, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skill in the art, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of a kind of Z axis capacitive accelerometer common in prior art;
The structural representation of a kind of Z axis accelerometer that Fig. 2 provides for the utility model embodiment;
The employing static broach driver that Fig. 3 and Fig. 4 provide for the utility model embodiment is converted to vertical motion the principle schematic of tangential movement.
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is only the utility model part embodiment, instead of whole embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making the every other embodiment obtaining under creative work prerequisite, all belong to the scope of the utility model protection.
As described in background, existing Z axis accelerometer is that the acceleration of vertical direction is converted to and is swayed, and the electric capacity causing by rotation changes the measurement of carrying out acceleration.Therefore, existing Z axis accelerometer is realized the measurement of vertical acceleration by the parallel plate capacitor of Z-direction, need to prepare separately respectively step by step upper bottom crown and the mass rotating mechanism of electric capacity, complex manufacturing technology.
For addressing the above problem, the embodiment of the present application provides a kind of Z axis accelerometer, comprising:
Mass, in the time that Z axis acceleration is inputted described in mass can do rectilinear motion in Z-direction;
Static broach driver, comprising: multiple first pole plates parallel with Z axis and the second pole plate, and described the first pole plate and the second polar plate interval distribute, and described the first pole plate is fixed on described mass;
Clearance type electric capacity with described static broach driver matches, comprising: fixed electorde and can be at straight-line movable electrode in working face;
Wherein, described the second pole plate is all connected with described movable electrode, and described the second pole plate is used for driving described movable electrode motion rectilinear motion on described working face in the time of described mass motion; Z axis is perpendicular to described working face.
Visible, described Z axis accelerometer is without rotational structure, and then without the parallel plate capacitor that Z-direction is set, so, described mass, static broach driver and clearance type electric capacity can be prepared from described working face simultaneously, make comparatively simply, have reduced production cost.
With reference to figure 2, the structural representation of a kind of Z axis accelerometer that Fig. 2 provides for the utility model embodiment, in order further to improve measurement sensitivity, described Z axis accelerometer is all provided with static broach driver and the clearance type electric capacity of a pair of mutual coupling in the left and right sides of mass 5.Be that described Z axis accelerometer comprises: two identical static broach drivers that are symmetricly set on described mass both sides; Be symmetricly set on two identical clearance type electric capacity of described mass both sides.Described static broach driver is corresponding one by one with described clearance type electric capacity.
Meanwhile, the setting of above-mentioned symmetrical structure has overcome the poor problem of temperature characterisitic that traditional Z axis accelerometer causes because structure is asymmetric.And because the design of symmetrical structure makes the stressed balance more of described Z axis accelerometer, and then make measuring stability better.
Described clearance type capacitance gap electric capacity comprises: fixed electorde 6 and movable electrode 7.Wherein, described fixed electorde connects reference voltage V3, and described movable electrode connects reference voltage V2.
Described static broach driver comprises: the first battery lead plate 8 that is fixed on described mass 5 sides; The second battery lead plate 9 being connected with described movable electrode.Described static broach driver comprises multiple the first battery lead plates 8 and the second battery lead plate 9.Described the first battery lead plate 8 and the second battery lead plate 9 are spaced apart, and parallel with Z axis.The first battery lead plate 8 connects reference voltage V1, and the second battery lead plate 9 is connected reference voltage V2 with movable electrode.
For make described mass on Z axis along with acceleration input can move up and down, and in the time inputting without acceleration, can return to initial position, two sides that the first pole plate 8 is not set at described mass 5 are provided with the first elastic device 10.Described the first elastic device 10 has Z axis degree of freedom, can make described mass 5 do rectilinear motion in Z-direction, can along with acceleration on vertical operation in-plane upwards or move downward.Described the first elastic device 10 can be elastic rod or spring.
Described the first elastic device 10 can also have the degree of freedom of other directions, as when as described in the first elastic device 10 while thering is the degree of freedom as shown in X-direction in Fig. 2, the first elastic device 10 can be controlled mass 5 rectilinear motion in X-axis under the acceleration that is parallel to X-axis, can change the capacitance of clearance type electric capacity, realize the acceleration analysis that is parallel to X-axis.In the time that described the first elastic device 10 has the degree of freedom as shown in Y direction in Fig. 2, the first elastic device 10 can be controlled mass 5 rectilinear motion in Y-axis under the acceleration that is parallel to Y-axis, can change the capacitance of clearance type electric capacity, realize the acceleration analysis that is parallel to Y-axis.
Visible, by adopting the first different elastic devices 10, described Z axis accelerometer can also be used for measuring the acceleration that is parallel to X-axis and the acceleration that is parallel to Y-axis.
For make described movable electrode 7 do not add operating voltage be described Z axis accelerometer while not working in initial position, described Z axis accelerometer also comprises: the second elastic device 11 being connected with described movable electrode 7, described the second elastic device 11 has the degree of freedom that is parallel to described movable electrode direction of motion, do not adding under work voltage condition, described the second elastic device 11 is for controlling the initial position of described movable electrode in setting.Described the second elastic device 11 is for being arranged on the spring on described working face, and the direction of vibration of described spring is parallel with described direction of motion.
Below the principle of work of the Z axis accelerometer described in the present embodiment is described, adopt described static broach driver, vertical motion degree of switching can be moved, in the time not having the input of Z axis acceleration, the initial position of the first battery lead plate 8 and the second battery lead plate 9 as shown in Figure 3, in the time of input Z axis acceleration, when mass 5 vertical direction occurs moves, due to static driving effect, have:
x=(t0-y)×εNV
2/k
2g
In above formula, x is the displacement of movable electrode 7 in working face, y is the displacement of mass 5 in the vertical directions, ε is the specific inductive capacity (being generally air or the specific inductive capacity of vacuum) of material between the first battery lead plate 8 and the second battery lead plate 9, N is the quantity of the slotting finger electric capacity of all the first battery lead plates 8 of static broach driver and the second battery lead plate 9 strokes, voltage difference between adjacent a pair of V the first battery lead plate 8 and the second battery lead plate 9, t0 is the height (the first battery lead plate 8 is highly identical with the second battery lead plate 9) of the second battery lead plate 9, g is acceleration of gravity, k
2be the elasticity coefficient of the second elastic device 11 in movable electrode 7 direction of motion.
The size of mass 5 determines y, so the range ability of the design consideration vertical displacement of mass 5, Z axis accelerometer size and axis accelerometer manufacture craft are set.Adopt MEMS technique to prepare described Z axis accelerometer, so mass 5 adopts the semiconductor material that is applicable to MEMS technique, as silicon.Reference voltage V1, V2, V3 set according to the complexity of the size of tangential movement and drives.
When after movable electrode 7 occurred level motions, can cause the gap capacitance between movable electrode 7 and fixed electorde 6 to change, now have:
In above formula, A
0the relative area of two pole plates of the gap capacitance forming for movable electrode 7 and fixed electorde 6, d
0for the initial separation of described gap capacitance.Coefficient 2 refers to two pairs of the left and right clearance type electric capacity matching and static broach driver, and making the result of measuring is 2 times, and be more convenient for data acquisition and measurement are calculated, and sensitivity is higher.
The expression formula of vertical displacement y can be obtained by above-mentioned two formula, then the acceleration on vertical direction can be tried to achieve according to Newton second law, i.e. Z axis acceleration.
Apparent, the present embodiment Z axis acceleration is directly used in the rectilinear motion of realizing vertical direction, without adopting the indirect mode rotating to carry out the measurement of acceleration, without rotational structure, has reduced the manufacture difficulty of accelerometer, and then has reduced cost of manufacture.The conversion of vertical motion and tangential movement is the static driving effect that adopts static broach driver, under additional reference voltage, realizing horizontal static drives, drive larger capacitor plate motion without the acceleration of vertical direction, reduced motion and consumed, the sensitivity of measurement is higher.
It should be noted that, in this article, relational terms such as the first and second grades is only used for an entity or operation to separate with another entity or operational zone, and not necessarily requires or imply and between these entities or operation, have the relation of any this reality or sequentially.The verb of mentioning in application documents " comprises ", element those elements or the step of recording in application documents is not got rid of in " comprising " and paradigmatic use thereof or the existence of step.Article " one " before element or " one " do not get rid of the existence of multiple this elements.
Although described spirit of the present invention and principle with reference to some embodiments, but should be appreciated that, the present invention is not limited to disclosed embodiment, the division of each side is not meant that to the feature in these aspects can not combine to be benefited yet, and this division is only the convenience in order to explain.The present invention is intended to contain interior included various amendments and the equivalent arrangements of spirit and scope of claims.The scope of claims meets the most wide in range explanation, thereby comprises all such amendments and equivalent structure and function.
Claims (6)
1. a Z axis accelerometer, is characterized in that, comprising:
Mass, in the time that Z axis acceleration is inputted described in mass can do rectilinear motion in Z-direction;
Static broach driver, comprising: multiple first pole plates parallel with Z axis and the second pole plate, and described the first pole plate and the second polar plate interval distribute, and described the first pole plate is fixed on described mass;
Clearance type electric capacity with described static broach driver matches, comprising: fixed electorde and can be at straight-line movable electrode in working face;
Wherein, described the second pole plate is all connected with described movable electrode, and described the second pole plate is used for driving described movable electrode motion rectilinear motion on described working face in the time of described mass motion; Z axis is perpendicular to described working face.
2. Z axis accelerometer according to claim 1, it is characterized in that, the both sides that described mass does not arrange described the first pole plate are provided with the first elastic device, and described the first elastic device has Z axis degree of freedom, can make described mass do rectilinear motion in Z-direction.
3. Z axis accelerometer according to claim 2, is characterized in that, described the first elastic device is elastic rod or spring.
4. Z axis accelerometer according to claim 1, is characterized in that, also comprises:
The second elastic device being connected with described movable electrode, described the second elastic device has the degree of freedom that is parallel to described movable electrode direction of motion, do not adding under work voltage condition, described the second elastic device is for controlling the initial position of described movable electrode in setting.
5. Z axis accelerometer according to claim 4, is characterized in that, described the second elastic device is the spring being arranged on described working face, and the direction of vibration of described spring is parallel with described direction of motion.
6. according to the Z axis accelerometer described in claim 1-5 any one, it is characterized in that, described Z axis accelerometer comprises:
Be symmetricly set on two identical static broach drivers of described mass both sides;
Be symmetricly set on two identical clearance type electric capacity of described mass both sides;
Wherein, described static broach driver is corresponding one by one with described clearance type electric capacity.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201420050235.7U CN203705471U (en) | 2014-01-26 | 2014-01-26 | Z-axis accelerometer |
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| CN201420050235.7U CN203705471U (en) | 2014-01-26 | 2014-01-26 | Z-axis accelerometer |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104614553A (en) * | 2015-01-30 | 2015-05-13 | 歌尔声学股份有限公司 | Z axis structure of accelerometer |
| WO2016020716A1 (en) * | 2014-08-04 | 2016-02-11 | Ba-Tis Faez | 3-dof mems piston-tube electrostatic microactuator |
| CN105333889A (en) * | 2015-11-30 | 2016-02-17 | 歌尔声学股份有限公司 | Capacitive environment sensor and manufacturing method thereof |
| CN108152862A (en) * | 2017-12-08 | 2018-06-12 | 华中科技大学 | A kind of gravity accelerometer |
| CN109188021A (en) * | 2018-08-30 | 2019-01-11 | 太原理工大学 | The porous spring cantilever sensitive structure of low frequency micro-acceleration sensor |
| CN110062083A (en) * | 2019-05-27 | 2019-07-26 | 维沃移动通信有限公司 | A kind of method of canceling noise and mobile terminal |
| CN110376400A (en) * | 2019-06-27 | 2019-10-25 | 浙江大学 | A kind of liquid under the environment applied to ground survey floats electrostatic support accelerometer device |
| CN111637904A (en) * | 2020-04-22 | 2020-09-08 | 武汉船用机械有限责任公司 | Linear motion position detection device |
| CN111721970A (en) * | 2020-06-16 | 2020-09-29 | 维沃移动通信有限公司 | Capacitive acceleration sensor, control method and control device thereof, and electronic equipment |
-
2014
- 2014-01-26 CN CN201420050235.7U patent/CN203705471U/en not_active Expired - Lifetime
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016020716A1 (en) * | 2014-08-04 | 2016-02-11 | Ba-Tis Faez | 3-dof mems piston-tube electrostatic microactuator |
| CN106604887A (en) * | 2014-08-04 | 2017-04-26 | 费斯·巴-提斯 | Three-degrees-of-freedom MEMS piston-tube electrostatic microactuator |
| CN106604887B (en) * | 2014-08-04 | 2019-04-02 | 费斯·巴-提斯 | Three Degree Of Freedom MEMS piston tube electrostatic microactuator |
| CN104614553A (en) * | 2015-01-30 | 2015-05-13 | 歌尔声学股份有限公司 | Z axis structure of accelerometer |
| CN105333889A (en) * | 2015-11-30 | 2016-02-17 | 歌尔声学股份有限公司 | Capacitive environment sensor and manufacturing method thereof |
| CN105333889B (en) * | 2015-11-30 | 2017-12-05 | 歌尔股份有限公司 | A kind of capacitive environmental sensor and its manufacture method |
| CN108152862B (en) * | 2017-12-08 | 2019-07-23 | 华中科技大学 | A kind of gravity accelerometer |
| CN108152862A (en) * | 2017-12-08 | 2018-06-12 | 华中科技大学 | A kind of gravity accelerometer |
| CN109188021A (en) * | 2018-08-30 | 2019-01-11 | 太原理工大学 | The porous spring cantilever sensitive structure of low frequency micro-acceleration sensor |
| CN109188021B (en) * | 2018-08-30 | 2020-06-16 | 太原理工大学 | Porous spring cantilever sensitive structure of low-frequency micro-acceleration sensor |
| CN110062083A (en) * | 2019-05-27 | 2019-07-26 | 维沃移动通信有限公司 | A kind of method of canceling noise and mobile terminal |
| CN110376400A (en) * | 2019-06-27 | 2019-10-25 | 浙江大学 | A kind of liquid under the environment applied to ground survey floats electrostatic support accelerometer device |
| CN111637904A (en) * | 2020-04-22 | 2020-09-08 | 武汉船用机械有限责任公司 | Linear motion position detection device |
| CN111637904B (en) * | 2020-04-22 | 2022-11-22 | 武汉船用机械有限责任公司 | Linear motion position detection device |
| CN111721970A (en) * | 2020-06-16 | 2020-09-29 | 维沃移动通信有限公司 | Capacitive acceleration sensor, control method and control device thereof, and electronic equipment |
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Address after: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: Goertek Inc. |
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Effective date of registration: 20200615 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Industrial Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |
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