CN106153241B - A kind of MEMS capacitive pressure sensor - Google Patents
A kind of MEMS capacitive pressure sensor Download PDFInfo
- Publication number
- CN106153241B CN106153241B CN201610715473.9A CN201610715473A CN106153241B CN 106153241 B CN106153241 B CN 106153241B CN 201610715473 A CN201610715473 A CN 201610715473A CN 106153241 B CN106153241 B CN 106153241B
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- China
- Prior art keywords
- comb electrodes
- movable comb
- fixed broach
- axis
- pressure
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
Abstract
The present invention discloses a kind of MEMS capacitive pressure sensor, including substrate and pressure-strain diaphragm, and pressure-strain diaphragm is fixed on above substrate by anchor body；Pressure-strain diaphragm bottom center is bonded with mass block, and mass block surrounding is respectively equipped with movable comb electrodes along X-axis and Y-axis；Substrate top surrounding is respectively equipped with fixed broach electrode along X-axis and Y-axis, and movable comb electrodes and fixed broach electrode correspond to form cooperation；Every a pair of movable comb electrodes for corresponding to each other cooperation and fixed broach electrode are in Z-direction formation zero difference；The pressure of pressure-strain diaphragm induction passes to mass block, and mass block drives movable comb electrodes to move along Z axis, and the variation of movable comb electrodes and fixed broach electrode positive area brings the variation of capacitor, realizes the measurement of pressure；Relative movement between comb electrodes is to move in parallel completely in globality, and the variation of positive area is entirely linear, so that the variation of capacitor has the good linearity, raising device performance.
Description
Technical field
The present invention relates to micromechanics electronic technology field, specifically a kind of MEMS capacitive pressure sensor.
Background technique
Micro mechanical pressure sensor because its size is small, performance is good, high reliablity, it is at low cost due to be developed, be widely applied
In multiple fields such as industry, manufacture, medicine and automobiles.Micro mechanical pressure sensor is divided into two kinds: condenser type and pressure resistance type.It compares
In piezoresistive pressure sensor, capacitance pressure transducer, has highly sensitive, good temperature characterisitic, low-power consumption, Yi Yuwei
The advantages of machine interface etc.；But since the deformation of its diaphragm is not parallel motion, lead to the line of capacitance pressure transducer,
Property degree is poor.
Summary of the invention
The purpose of the present invention is to provide a kind of MEMS capacitive pressure sensor, which has good linear
Degree, and structure is simple, is easily achieved.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of MEMS capacitive pressure sensor, including substrate and pressure-strain diaphragm, pressure-strain diaphragm pass through anchor body
It is fixed on above substrate, which is characterized in that pressure-strain diaphragm bottom center is bonded with mass block, and mass block surrounding is along X
Axis and Y-axis are respectively equipped with movable comb electrodes；Substrate top surrounding is respectively equipped with fixed broach electrode along X-axis and Y-axis, movable to comb
Tooth electrode and fixed broach electrode correspond to form cooperation；Every a pair of movable comb electrodes for corresponding to each other cooperation are combed with fixed
Tooth electrode forms zero difference in Z-direction.
Further, the zero difference of a pair of of movable comb electrodes of the X-direction and fixed broach electrode in Z-direction
Greater than zero, another pair movable comb electrodes and fixed broach electrode Z-direction zero difference less than zero.
Further, the zero difference of a pair of of movable comb electrodes of the Y direction and fixed broach electrode in Z-direction
Greater than zero, another pair movable comb electrodes and fixed broach electrode Z-direction zero difference less than zero.
The invention has the advantages that the pressure of pressure-strain diaphragm induction passes to mass block, mass block drives movable
Comb electrodes are moved along Z axis, are formed and are cooperated with fixed broach electrode, movable comb electrodes and fixed broach electrode positive area
Variation brings the variation of capacitor, realizes the measurement of pressure；Relative movement between movable comb electrodes and fixed broach electrode is
Moving in parallel in globality completely, the variation of positive area is entirely linear, so that the variation of capacitor has good line
Property degree, the case where being not in traveling electrode irregular deformation in traditional structure improves device performance；And by X-direction or
Two pairs of movable comb electrodes of person's Y direction are inconsistent in direction in the zero difference setting of Z-direction with fixed broach electrode, can
To realize differential capacitance, improves sensitivity, reduces error.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples:
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is top view of the invention；
Fig. 3 is stereoscopic schematic diagram of the invention；
Fig. 4 is the enlarged diagram of X axis a pair of movable comb electrodes and fixed broach electrode in the present invention；
Fig. 5 is the top view of Fig. 4；
Fig. 6 is the enlarged diagram of X axis another pair movable comb electrodes and fixed broach electrode in the present invention.
Specific embodiment
As shown in Figure 1, the present invention provides a kind of MEMS capacitive pressure sensor, substrate 1 and pressure including being in rectangle
Strain diaphragm 2, the edge at 1 top of substrate are equipped with anchor body 3, and the top of anchor body 3 is fixed in the edge of pressure-strain diaphragm 2
Portion forms cavity between pressure-strain diaphragm 2 and substrate 1；In conjunction with shown in Fig. 2 and Fig. 3,2 bottom center of pressure-strain diaphragm is logical
It crosses Si-Si bonding and is connected with mass block 4 in cuboid, the surrounding of mass block 4 is respectively equipped with movable comb electrodes along X-axis and Y-axis
5；Four anchor points 6 are surrounded by the top of substrate 1, four anchor points 6 are located at 3 inside of anchor body, are located at the center of corresponding anchor body
Position, and it is corresponding with four sides of mass block 4 difference；Four anchor points 6 are respectively equipped with fixed broach electrode 7 along X-axis and Y-axis,
Movable comb electrodes 5 and fixed broach electrode 7, which correspond, forms cooperation；In conjunction with shown in Fig. 4~6, every a pair of correspond to each other is matched
The movable comb electrodes and fixed broach electrode of conjunction form zero difference in Z-direction；Preferably, the one of the X-direction
Zero is greater than in the zero difference of Z-direction to movable comb electrodes and fixed broach electrode, it is solid to that is to say that movable comb electrodes are higher than
Comb electrodes, another pair movable comb electrodes and fixed broach electrode are determined in the zero difference of Z-direction less than zero, that is to say movable
Comb electrodes are lower than fixed broach electrode；Likewise, a pair of of movable comb electrodes of the Y direction and fixed broach electrode exist
The zero difference of Z-direction is greater than zero, and zero difference of another pair movable comb electrodes with fixed broach electrode in Z-direction is less than
Zero.
The pressure that pressure-strain diaphragm 2 incudes passes to mass block 4, and mass block 4 drives movable comb electrodes 5 to move along Z axis
It is dynamic, it is formed and is cooperated with fixed broach electrode 7, the variation of movable comb electrodes 5 and 7 positive area of fixed broach electrode brings capacitor
Variation, realize the measurement of pressure；Relative movement between movable comb electrodes 5 and fixed broach electrode 7 is completely in whole
Property move in parallel, the variation of positive area is entirely linear so that the variation of capacitor have the good linearity, will not go out
In existing traditional structure the case where traveling electrode irregular deformation, device performance is improved；And by X-direction or Y direction
Two pairs of movable comb electrodes are inconsistent in direction in the zero difference setting of Z-direction with fixed broach electrode, and difference may be implemented
Capacitor improves sensitivity, reduces error.
The above described is only a preferred embodiment of the present invention, being not intended to limit the present invention in any form；Appoint
What those skilled in the art, without departing from the scope of the technical proposal of the invention, all using the side of the disclosure above
Method and technology contents make many possible changes and modifications to technical solution of the present invention, or are revised as the equivalent reality of equivalent variations
Apply example.Therefore, anything that does not depart from the technical scheme of the invention according to the technical essence of the invention do above embodiments
Any simple modification, equivalent replacement, equivalence changes and modification, all of which are still within the scope of protection of the technical scheme of the invention.
Claims (1)
1. a kind of MEMS capacitive pressure sensor, including substrate and pressure-strain diaphragm, pressure-strain diaphragm are solid by anchor body
Above substrate, which is characterized in that pressure-strain diaphragm bottom center is bonded with mass block, and mass block surrounding is along X-axis
Movable comb electrodes are respectively equipped with Y-axis；Substrate top surrounding is respectively equipped with fixed broach electrode, movable comb along X-axis and Y-axis
Electrode and fixed broach electrode correspond to form cooperation；Every a pair of movable comb electrodes and fixed broach for corresponding to each other cooperation
Electrode forms zero difference in Z-direction；
A pair of of movable comb electrodes of the X-direction and fixed broach electrode are greater than zero in the zero difference of Z-direction, another
To movable comb electrodes and fixed broach electrode Z-direction zero difference less than zero；
A pair of of the movable comb electrodes and fixed broach electrode of the Y direction are greater than zero in the zero difference of Z-direction, another pair
Movable comb electrodes and fixed broach electrode Z-direction zero difference less than zero；
The substrate is surrounded by four anchor points, and four anchor points are located at side in anchor body, are located at the center of corresponding anchor body,
And it is corresponding with four sides of mass block difference；Four anchor points are respectively equipped with fixed broach electrode along X-axis and Y-axis；
The pressure of pressure-strain diaphragm induction passes to mass block, and the mass block drives movable comb electrodes to move along Z axis, with
Fixed broach electrode forms cooperation, and the variation of movable comb electrodes and fixed broach electrode positive area brings the variation of capacitor；
Relative movement between the movable comb electrodes and fixed broach is moving in parallel in globality, and the variation of positive area is
Linear；
Also, by two pairs of movable comb electrodes of X-direction and Y direction and fixed broach electrode Z-direction zero difference
Setting is inconsistent in direction, realizes differential capacitance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610715473.9A CN106153241B (en) | 2016-08-25 | 2016-08-25 | A kind of MEMS capacitive pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610715473.9A CN106153241B (en) | 2016-08-25 | 2016-08-25 | A kind of MEMS capacitive pressure sensor |
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| Publication Number | Publication Date |
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| CN106153241A CN106153241A (en) | 2016-11-23 |
| CN106153241B true CN106153241B (en) | 2019-04-05 |
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| CN201610715473.9A Active CN106153241B (en) | 2016-08-25 | 2016-08-25 | A kind of MEMS capacitive pressure sensor |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108513241B (en) * | 2018-06-29 | 2024-04-19 | 潍坊歌尔微电子有限公司 | Vibration sensor and audio device |
| CN111208317B (en) * | 2020-02-26 | 2021-07-02 | 深迪半导体(绍兴)有限公司 | MEMS inertial sensor, application method and electronic equipment |
| CN112362199B (en) * | 2020-10-30 | 2022-07-19 | 华中科技大学 | Medium insertion type capacitive pressure sensor and preparation method thereof |
| CN114323396B (en) * | 2021-12-23 | 2022-11-11 | 西安交通大学 | MEMS capacitive six-axis force sensor chip and preparation process thereof |
| CN114383762B (en) * | 2022-01-11 | 2022-12-27 | 西安交通大学 | MEMS capacitive micro-force sensor based on multi-comb array and decoupling test method |
| CN114459670B (en) * | 2022-04-12 | 2022-06-17 | 季华实验室 | Capacitance film vacuum gauge |
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| CN102384984A (en) * | 2010-09-02 | 2012-03-21 | 孙博华 | Capacitive single-mass block full comb electrode sensor for triaxial acceleration and manufacturing method thereof |
| CN102589762A (en) * | 2012-03-08 | 2012-07-18 | 西安交通大学 | Micro-voltage high-overload sensor chip of beam membrane single island structure |
| CN204439662U (en) * | 2015-01-30 | 2015-07-01 | 歌尔声学股份有限公司 | Z axis structure in a kind of accelerometer |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4907181B2 (en) * | 2006-01-30 | 2012-03-28 | アルプス電気株式会社 | Capacitive pressure sensor |
| US8966990B2 (en) * | 2011-02-11 | 2015-03-03 | Purdue Research Foundation | MEMS devices exhibiting linear characteristics |
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2016
- 2016-08-25 CN CN201610715473.9A patent/CN106153241B/en active Active
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| CN102384984A (en) * | 2010-09-02 | 2012-03-21 | 孙博华 | Capacitive single-mass block full comb electrode sensor for triaxial acceleration and manufacturing method thereof |
| CN102589762A (en) * | 2012-03-08 | 2012-07-18 | 西安交通大学 | Micro-voltage high-overload sensor chip of beam membrane single island structure |
| CN204439662U (en) * | 2015-01-30 | 2015-07-01 | 歌尔声学股份有限公司 | Z axis structure in a kind of accelerometer |
Non-Patent Citations (2)
| Title |
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| 不等高梳齿电容式三轴MEMS加速度传感器;许高斌等;《电子测量与仪器学报》;20110830;第25卷(第8期);全文 |
| 倾斜梳齿的MEMS电容式传感器惯性脉冲响应特性研究;董林玺等;《电子学报》;20080531;第36卷(第5期);全文 |
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Inventor after: Wang Wenjing Inventor after: Guo Qunying Inventor after: Huang Bin Inventor after: Chen Bo Inventor after: Chen Pu Inventor before: Wang Wenjing Inventor before: Guo Qunying Inventor before: Huang Bin Inventor before: Chen Bo Inventor before: Chen Pu |
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