CN102101635B - Mass body applicable to micro-electromechanical sensor and three-axis micro-electromechanical sensor using same - Google Patents
Mass body applicable to micro-electromechanical sensor and three-axis micro-electromechanical sensor using same Download PDFInfo
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- CN102101635B CN102101635B CN 200910253761 CN200910253761A CN102101635B CN 102101635 B CN102101635 B CN 102101635B CN 200910253761 CN200910253761 CN 200910253761 CN 200910253761 A CN200910253761 A CN 200910253761A CN 102101635 B CN102101635 B CN 102101635B
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Abstract
The invention relates to a three-axis micro-electromechanical sensor. The three-axis micro-electromechanical sensor comprises a first-axis fixed electrode, a second-axis fixed electrode, a third-axis fixed electrode, a movable electrode frame, a spring and a fixed column, wherein the movable electrode frame comprises a first-axis movable electrode, a second-axis movable electrode, a third-axis movable electrode and a connecting element for connecting the first-axis movable electrode, the second-axis movable electrode and the third-axis movable electrode together; the first-axis movable electrode and the first-axis fixed electrode form a first capacitor on a first axis; the second-axis movable electrode and the second-axis fixed electrode form a second capacitor on a second axis; the third-axis movable electrode and the third-axis fixed electrode form a third capacitor on a third axis; the connecting element comprises a central mass body which is connected with the first-axis movable electrode, the second-axis movable electrode or the third-axis movable electrode and is provided with an outer ring and a first connecting section connected with the adjacent edge of the outer ring; the spring is connected with the movable electrode frame; the fixed column is connected with the spring; and the first axis, the second axis and the third axis are not parallel to one another to define a three-dimensional coordinate system.
Description
Technical field
The present invention relates to a kind of mass body that is applicable to micro-electro-mechanical sensors, with the three axis microelectromechanicdevice sensors that use this mass body.
Background technology
Microcomputer electric component has various application, and a kind of making capacitance type sensor that is applied as wherein is as accelerometer, microphone etc.The capacitance type sensor of prior art has isoplanar (in-plane sensor) and out-of-plane (out-of-plane) sensor two classes, capacitance variations on the former sensing horizontal direction (x-y plane), the capacitance variations on latter's sensing vertical direction (z axle).The prior art of relevant same plane sensor or its preparation method for example can be consulted United States Patent (USP) the 5th, 326, and No. 726, the 5th, 847, No. 280, the 5th, 880, No. 369, the 6th, 877, No. 374, the 6th, 892, No. 576, No. 2007/0180912.The prior art of relevant out-of-plane sensor or its preparation method for example can be consulted United States Patent (USP) the 6th, 402, and No. 968, the 6th, 792, No. 804, the 6th, 845, No. 670, the 7th, 138, No. 694, the 7th, 258, No. 011.But there is no up to now, the sensor of capacitance variations on sensing three direction of principal axis simultaneously.
Summary of the invention
One of the object of the invention is to overcome the deficiencies in the prior art and defective, proposes a kind of three axis microelectromechanicdevice sensors, and it is the capacitance variations on sensing three direction of principal axis simultaneously.
Another object of the present invention is to, propose a kind of mass body that is applicable to micro-electro-mechanical sensors.
for reaching above-mentioned purpose, with regard to one of them viewpoint of the present invention, provide a kind of three axis microelectromechanicdevice sensors, comprise: the first axle fixed electrode, the second axle fixed electrode, the 3rd axle fixed electrode, the movable electrode framework, it comprises the first axle movable electrode, the second axle movable electrode, the 3rd axle movable electrode, reach the Connection Element that above three axle movable electrodes are linked together, wherein the first axle movable electrode consists of the first electric capacity with the first axle fixed electrode on the first axle, the second axle movable electrode consists of the second electric capacity with the second axle fixed electrode on the second axle, the 3rd axle movable electrode consists of the 3rd electric capacity with the 3rd axle fixed electrode on the 3rd axle, and this Connection Element comprises a center mass body, this center mass body and this first axle, the second axle, or the 3rd the axle movable electrode connect, this center mass body has outer shroud and connects the first linkage section of outer shroud adjacent side, the spring that is connected with the movable electrode framework, and the fixed leg that is connected with spring, wherein this first, second, third axle is not parallel to each other and define three-dimensional coordinate system each other, and wherein first, second axle fixed electrode is arranged on the regional Inner section of movable electrode framework.
In above-mentioned three axis microelectromechanicdevice sensors, this movable electrode framework can be symmetry or dissymmetrical structure.
In above-mentioned three axis microelectromechanicdevice sensors, this Connection Element can comprise a center mass body, and this first axle movable electrode and this second axle movable electrode can be positioned at four limit bearing of trends or four jiaos of bearing of trends of this center mass body, are connected with this center mass body.The 3rd axle movable electrode also can be positioned at four jiaos of bearing of trends or the four limit bearing of trends of this center mass body, is connected with this center mass body, or extends connector by one and connect.This center mass body can have one or more perforate.
In above-mentioned three axis microelectromechanicdevice sensors, this Connection Element can comprise at least one peripheral masses, is connected with this first axle movable electrode or this second axle movable electrode.This peripheral masses can have one or more perforate.
In above-mentioned three axis microelectromechanicdevice sensors, this first axle fixed electrode or this second axle fixed electrode or both can respectively have a fixed leg, and this fixed leg is located at the direction near this movable electrode framework mass centre.
For reaching above-mentioned purpose, with regard to one of them viewpoint of the present invention, a kind of mass body that is applicable to micro-electro-mechanical sensors is provided, wherein this micro-electro-mechanical sensors comprises fixed electrode and movable electrode, this movable electrode can move with respect to fixed electrode, described mass body is connected with this movable electrode, and this mass body comprises: outer shroud, and the first linkage section of connection outer shroud adjacent side.
Above-mentioned mass body can comprise again: the second linkage section that connects this first linkage section.
Described micro-electro-mechanical sensors can be single shaft, twin shaft or three axis microelectromechanicdevice sensors.
Illustrate in detail below by specific embodiment, when the effect that is easier to understand purpose of the present invention, technology contents, characteristics and reaches.
Description of drawings
Figure 1A-1B marks one embodiment of the present of invention;
How Fig. 2 A-2B explanation detects movement;
Fig. 3 A-3G illustrates the multiple cross-section structure of fixed electrode for example;
Fig. 4 marks an alternative embodiment of the invention;
Fig. 5-6 mark another embodiment more of the present invention;
Fig. 7 A-7D illustrates the various structures of center mass body 141 for example;
Fig. 8 A-8B illustrates the multiple cross-section structure of peripheral masses 142 for example.
Symbol description in figure
10 movable electrode frameworks
11 x axle movable electrodes
12 y axle movable electrodes
13 z axle movable electrodes
14 Connection Elements
21 x axle fixed electrodes
22 y axle fixed electrodes
23 z axle fixed electrodes
30 springs
40 fixed legs
141 center mass bodies
The 141a outer shroud
141b the first linkage section
141c the second linkage section
The 141d linkage section
141e, the 141f perforate
142 peripheral masses
The 142a outer shroud
142b, 142c, 142d perforate
The 142e breach
143 extend connector
The specific embodiment
Graphic in the present invention all belongs to signal, mainly is intended to represent the relativeness between each structure part, as for shape, thickness and width not according to scale.
At first one of them embodiment of the present invention is described.See also the top view of Figure 1A, three axis microelectromechanicdevice sensors of the present invention comprise movable electrode framework 10, x axle fixed electrode 21, y axle fixed electrode 22, z axle fixed electrode 23, spring 30, reach fixed leg (anchor) 40.10 of z axle fixed electrode 23 and movable electrode frameworks are on different level, therefore be represented by dotted lines.Fixed leg 40 is fixed on the substrate (not shown) with each fixed electrode 21-23, and movable electrode framework 10 for suspending, is connected to fixed leg 40 through spring 30.
See also the top view of Figure 1B, dissect the structure of movable electrode framework 10, can be considered and comprise x axle movable electrode 11, y axle movable electrode 12, z axle movable electrode 13 and the Connection Element 14 that above three axle movable electrodes are linked together.X axle movable electrode 11 parallel with x axle fixed electrode 21 on the x axle, y axle movable electrode 12 parallel with y axle fixed electrode 22 on the y axle, z axle movable electrode 13 is parallel with z axle fixed electrode 23 on the z axle; So, just respectively at x, y consists of three groups of electric capacity on the z axle.When sensor moves, produce between movable electrode framework 10 and fixed electrode 21-23 (one or many persons) and relatively move, so just can be according to capacitance variations therebetween, the movement of detection sensor.
Fig. 2 A is the cutaway view from the A of Figure 1B hatching line gained.The initial range that Fig. 2 A top demonstration x axle movable electrode 11 and x axle fixed electrode are 21 is d, but when moving, sensor cause x axle movable electrode 11 right-hand when mobile in the figure, as shown in below Fig. 2 A, the distance of left becomes d1, right-hand distance becomes d2, distance changes will cause the corresponding change of capacitance, so just can detect the movement of x axle.The axial detecting of y is also similar.
Fig. 2 B is asked for an interview in the axial detecting of z, and it is the cutaway view from the B of Figure 1B hatching line gained.The initial range that shows 23 of z axle movable electrode 13 and z axle fixed electrodes in figure is d; Similarly, when sensor moves when causing z axle movable electrode 13 to move up and down, distance will change, and causes the corresponding change of capacitance, so just can detect the movement of x axle.
X, the section of y axle fixed electrode 21,22 can be arbitrary structures, only need be fixed on substrate to get final product.For example, when its top view such as Fig. 3 A, its section can be Fig. 3 A-3G or other any structure.Z axle fixed electrode 23 is as the same.If but the structure of fixed electrode 21-23 is when being the structure (only monolateral have fixed leg) of similar Fig. 3 D, this fixed leg should be located at the direction near movable electrode framework 10 mass centres.
Be only one of them embodiment of the present invention shown in above; Fit system and its entire combination mode between three axle movable electrode 11-13 and three axle fixed electrode 21-23 can be done various conversion.For example, although movable electrode framework 10 take symmetrical structure as good, is not necessary for symmetry; Z axle movable electrode 13 also must not be arranged on the outer shroud of movable electrode framework 10.As shown in the top view of Fig. 4, z axle movable electrode 13 and z axle fixed electrode 23 only are arranged on that on one of them direction on x-y plane, (icon is upper and lower, but certainly also can be arranged on right and left), and z axle movable electrode 13 is arranged on extension periphery and center (be the z axle fixed electrode 23 of below, display centre place, the z axle movable electrode 13 at this place does not indicate) of movable electrode framework 10.Certainly, movable electrode framework 10 can be the structure of absolutely wrong title, such as upper and lower a, left side of only getting the present embodiment or right-hand part etc.
Above embodiment is arranged on the central area of movable electrode framework 10 with all or part of of three axle movable electrode 11-13 and three axle fixed electrode 21-23.The top view of Fig. 5 shows an alternative embodiment of the invention, in the present embodiment, three axle movable electrode 11-13 and three axle fixed electrode 21-23 is arranged on the periphery of movable electrode framework 10 and non-central.As shown in the figure, the three axis microelectromechanicdevice sensors of the present embodiment also comprise movable electrode framework 10, x axle fixed electrode 21, y axle fixed electrode 22, z axle fixed electrode 23, spring 30, reach fixed leg (anchor) 40.Same when sensor moves, produce between movable electrode framework 10 and fixed electrode 21-23 (one or many persons) and relatively move, can be according to capacitance variations therebetween, the movement of detection sensor.Z axle fixed electrode 23 is not positioned at same plane with movable electrode framework 10.X axle fixed electrode 21 and y axle fixed electrode 22 as adopt the structure (only monolateral have fixed leg) of similar Fig. 3 D, this fixed leg should be located at the direction near movable electrode framework 10 centers.
See also the top view of Fig. 6, dissect the structure of movable electrode framework 10, can be considered and comprise x axle movable electrode 11, y axle movable electrode 12, z axle movable electrode 13 and the Connection Element that above three axle movable electrodes are linked together; In the present embodiment, Connection Element comprises center mass body 141, peripheral masses 142, reaches and extend connector 143.X axle movable electrode 11 and y axle movable electrode 12 are positioned at four limit bearing of trends of center mass body 141, and z axle movable electrode 13 is positioned at four jiaos of bearing of trends of center mass body 141.(four limit bearing of trends refer to the four directions, upper and lower, left and right of drawing, and four jiaos of bearing of trends refer to upper left, lower-left, upper right, the four directions, bottom right of drawing, and the word of " four limits " " four jiaos " is the description direction, and unrestricted center mass body is necessary for quadrangle.For example, the center mass body can be circle, hexagon, octagonal or other arbitrary shape.) center mass body 141 except the effect that overall connection is provided, the effect of the quality of providing is also arranged, make movable electrode framework 10 be difficult for cause generation prying because of processing procedure.In like manner, peripheral masses 142 also has the effect of the quality of providing except connecting x axle movable electrode 11 or y axle movable electrode 12, make x axle movable electrode 11 or y axle movable electrode 12 away from a unlikely prying of end of center mass body 141.The effect of extending connector 143 is to connect z axle movable electrode 13.From another angle speech, also extension connector 143 can be considered as the part of z axle movable electrode 13, depending on whether extension connector 143 consists of electric capacity with fixed electrode 23.
All be provided with perforate in center mass body 141 and peripheral masses 142, one of its purpose is the material layer below convenient etching quality body on processing procedure.In addition, perforate also can reduce the continuous length of mass body, to avoid prying.
See also the top view of Fig. 7 A, dissect the structure of center mass body 141, can be considered the first linkage section 141b that comprises outer shroud 141a, connects outer shroud 141a adjacent side, the second linkage section 141c that connects the first linkage section 141b.The advantage of above structure is the vibration that can fully transmit movable electrode framework 10 arbitrary parts.But the structure of center mass body 141 is not limited to shown in Fig. 7 A, and can be arbitrary structures, for example shown in Fig. 7 B-7D.In Fig. 7 B, only be provided with the first linkage section 141b that connects outer shroud 141a adjacent side except outer shroud 141a.In Fig. 7 C, the linkage section 141d that connects outer shroud 141a opposite side is set except outer shroud 141a.In Fig. 7 D, the structure of non-" outer shroud-linkage section ", but a plurality of perforates are set in center mass body 141, and same row perforate (141e) and a time row perforate (141f) are staggered mutually (certainly, also not staggering can).The purpose that staggers is to reduce the physical length of center mass body 141 on single direction, and for example in Fig. 7 D, except periphery, the length of center mass body 141 on the y direction is no more than set critical value.
The structure of above center mass body 141 is not limited to be applied in three axis microelectromechanicdevice sensors, also can be applicable in single shaft or twin shaft micro-electro-mechanical sensors.For example, in Fig. 5,6 embodiment, do not comprise arbitrary movable electrode in x axle movable electrode 11, y axle movable electrode 12, z axle movable electrode 13 (corresponding fixed electrode also can omit) as movable electrode framework 10, overall structure namely becomes the twin shaft micro-electro-mechanical sensors; If movable electrode framework 10 does not comprise wantonly two movable electrodes (corresponding fixed electrode also can omit) in x axle movable electrode 11, y axle movable electrode 12, z axle movable electrode 13, namely become the single shaft micro-electro-mechanical sensors.
Below for preferred embodiment, the present invention is described, just the above, for making those skilled in the art be easy to understand content of the present invention, be not only to limit interest field of the present invention.For those skilled in the art, when can in spirit of the present invention, thinking immediately and various equivalence variation.For example, in Fig. 6 embodiment, x axle movable electrode 11 and y axle movable electrode 12 can be changed four jiaos of bearing of trends being located at center mass body 141, and z axle movable electrode 13 be changed the four limit bearing of trends (fixed electrode 21-23 is corresponding the change also) of being located at center mass body 141; Figure 1A, 4 embodiment can change four jiaos of bearing of trends spring 30 and fixed leg 40 being located at movable electrode framework 10; Fig. 6 embodiment can change the four limit bearing of trends of spring 30 and fixed leg 40 being located at movable electrode framework 10, etc.Again, although x of the present invention, y, z three axles are take the normal axis coordinate system as example, and uneven three axles all can move in order to the three-dimensional that calculates sensor arbitrarily, and are not limited to be necessary for the normal axis coordinate system.Therefore all according to concept of the present invention and spirit impartial for it a variation or modification, all should be included in the scope of the present patent application patent.
Claims (16)
1. axis microelectromechanicdevice sensor comprises:
The first axle fixed electrode;
The second axle fixed electrode;
The 3rd axle fixed electrode;
the movable electrode framework, it comprises the first axle movable electrode, the second axle movable electrode, the 3rd axle movable electrode, reach the Connection Element that above three axle movable electrodes are linked together, wherein the first axle movable electrode consists of the first electric capacity with the first axle fixed electrode on the first axle, the second axle movable electrode consists of the second electric capacity with the second axle fixed electrode on the second axle, the 3rd axle movable electrode consists of the 3rd electric capacity with the 3rd axle fixed electrode on the 3rd axle, and this Connection Element comprises a center mass body, this center mass body and this first axle, the second axle, or the 3rd the axle movable electrode connect, it is characterized in that, this center mass body has outer shroud and connects the first linkage section of outer shroud adjacent side,
The spring that is connected with the movable electrode framework; And
The fixed leg that is connected with spring,
Wherein this first, second, third axle is not parallel to each other and define three-dimensional coordinate system each other.
2. three axis microelectromechanicdevice sensors as claimed in claim 1, wherein, the 3rd axle fixed electrode and this movable electrode framework are positioned at different level.
3. three axis microelectromechanicdevice sensors as claimed in claim 1, wherein, this first axle is that x axle, the second axle are that y axle, the 3rd axle are the z axle, three axles are mutually orthogonal, and this movable electrode framework is along the x axial symmetry, along y axial symmetry or all symmetrical along x and y axle.
4. three axis microelectromechanicdevice sensors as claimed in claim 1, wherein, this Connection Element comprises at least one and extends connector, and one of this first axle, the second axle or the 3rd axle movable electrode extend connector and are connected with this center mass body through this.
5. three axis microelectromechanicdevice sensors as claimed in claim 1, wherein, this first axle movable electrode, this second axle movable electrode or the 3rd axle movable electrode are positioned at four limit bearing of trends of this center mass body.
6. three axis microelectromechanicdevice sensors as claimed in claim 1, wherein, this first axle movable electrode, this second axle movable electrode or the 3rd axle movable electrode are positioned at four jiaos of bearing of trends of this center mass body.
7. three axis microelectromechanicdevice sensors as claimed in claim 1, wherein, this center mass body separately comprises the second linkage section that connects the first linkage section.
8. three axis microelectromechanicdevice sensors as claimed in claim 1, wherein, this center mass body separately comprises the linkage section that connects opposite side.
9. three axis microelectromechanicdevice sensors as claimed in claim 1, wherein, this Connection Element comprises at least one peripheral masses, is connected with this first axle movable electrode or this second axle movable electrode.
10. three axis microelectromechanicdevice sensors as claimed in claim 1, wherein, this first axle fixed electrode or this second axle fixed electrode or both respectively have a fixed leg, and this fixed leg is located at the direction near this movable electrode framework mass centre.
11. a mass body that is applicable to micro-electro-mechanical sensors, this micro-electro-mechanical sensors comprises fixed electrode and movable electrode, and this movable electrode can move with respect to fixed electrode, and described mass body is connected with this movable electrode, it is characterized in that, described mass body comprises:
Outer shroud, and the first linkage section of connection outer shroud adjacent side.
12. the mass body that is applicable to micro-electro-mechanical sensors as claimed in claim 11 wherein, also comprises the second linkage section that connects this first linkage section.
13. the mass body that is applicable to micro-electro-mechanical sensors as claimed in claim 11 wherein, also comprises the linkage section that connects opposite side.
14. the mass body that is applicable to micro-electro-mechanical sensors as claimed in claim 11, wherein, this micro-electro-mechanical sensors is single-axis sensors, and this movable electrode and this fixed electrode upwards relatively move at one-dimensional square.
15. the mass body that is applicable to micro-electro-mechanical sensors as claimed in claim 11, wherein, this micro-electro-mechanical sensors is double-shaft sensor, this movable electrode comprises the first axle movable electrode and the second axle movable electrode, this fixed electrode comprises the first axle fixed electrode and the second axle fixed electrode, wherein this first axle movable electrode and the first axle fixed electrode relatively move on the first direction of principal axis, this the second axle movable electrode and the second axle fixed electrode relatively move on the second direction of principal axis, and this first axle and the second axle not parallel.
16. the mass body that is applicable to micro-electro-mechanical sensors as claimed in claim 11, wherein, this micro-electro-mechanical sensors is three-axis sensor, this movable electrode comprises the first axle movable electrode, the second axle movable electrode and the 3rd axle movable electrode, this fixed electrode comprises the first axle fixed electrode, the second axle fixed electrode and the 3rd axle fixed electrode, wherein this first axle movable electrode and the first axle fixed electrode relatively move on the first direction of principal axis, this the second axle movable electrode and the second axle fixed electrode relatively move on the second direction of principal axis, the 3rd axle movable electrode and the 3rd axle fixed electrode relatively move on the 3rd direction of principal axis, and this first axle, the second axle, and the 3rd axle is not parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910253761 CN102101635B (en) | 2009-12-17 | 2009-12-17 | Mass body applicable to micro-electromechanical sensor and three-axis micro-electromechanical sensor using same |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 200910253761 CN102101635B (en) | 2009-12-17 | 2009-12-17 | Mass body applicable to micro-electromechanical sensor and three-axis micro-electromechanical sensor using same |
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| CN102101635A CN102101635A (en) | 2011-06-22 |
| CN102101635B true CN102101635B (en) | 2013-06-05 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104459199B (en) * | 2013-09-18 | 2018-01-26 | 上海矽睿科技有限公司 | capacitive accelerometer |
| TWI510786B (en) * | 2014-09-18 | 2015-12-01 | Kuei Ann Wen | Three-axis accelerometer |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5487305A (en) * | 1991-12-19 | 1996-01-30 | Motorola, Inc. | Three axes accelerometer |
| US5992233A (en) * | 1996-05-31 | 1999-11-30 | The Regents Of The University Of California | Micromachined Z-axis vibratory rate gyroscope |
| US6082197A (en) * | 1994-12-20 | 2000-07-04 | Zexel Corporation | Acceleration sensor |
| CN1598597A (en) * | 2004-07-19 | 2005-03-23 | 西北工业大学 | Single mass plate triaxial micro-mechanical accelerometer |
| CN1648673A (en) * | 2005-03-25 | 2005-08-03 | 中北大学 | Single chip double inertia parameter accelerometer gyroscope |
-
2009
- 2009-12-17 CN CN 200910253761 patent/CN102101635B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5487305A (en) * | 1991-12-19 | 1996-01-30 | Motorola, Inc. | Three axes accelerometer |
| US6082197A (en) * | 1994-12-20 | 2000-07-04 | Zexel Corporation | Acceleration sensor |
| US5992233A (en) * | 1996-05-31 | 1999-11-30 | The Regents Of The University Of California | Micromachined Z-axis vibratory rate gyroscope |
| CN1598597A (en) * | 2004-07-19 | 2005-03-23 | 西北工业大学 | Single mass plate triaxial micro-mechanical accelerometer |
| CN1648673A (en) * | 2005-03-25 | 2005-08-03 | 中北大学 | Single chip double inertia parameter accelerometer gyroscope |
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