TWI398400B - Mass for use in a micro-electro-mechanical-system sensor and 3-dimensional micro-electro-mechanical-system sensor using same - Google Patents

Description

The mass body suitable for the microcomputer inductance detector and the three-axis microcomputer inductance detector using the mass body

The invention relates to a mass body suitable for a microcomputer inductance detector and a three-axis microcomputer inductance detector using the same.

Microelectromechanical components have a variety of applications, one of which is the fabrication of capacitive sensors such as accelerometers, microphones, and the like. Prior art capacitive sensors have two types of in-plane sensors and out-of-plane sensors. The former senses the change in capacitance in the horizontal direction (xy plane), the latter Sensing the change in capacitance in the vertical direction (z-axis). For the prior art of the same plane sensor or its manufacturing method, for example, see U.S. Patent Nos. 5,326,726, 5,847,280, 5,880,369, 6,877,374, 6,892,576, and 2007/0180912. For a prior art of the out-of-plane sensor or its method of manufacture, for example, see U.S. Patent Nos. 6,402,968, 6,792,804, 6,845,670, 7,138,694, 7,258,011. But so far, there is no sensor that can sense the change in capacitance in the three-axis direction at the same time.

One of the objects of the present invention is to provide a three-axis microcomputer inductance detector that can simultaneously sense a change in capacitance in a three-axis direction.

Another object of the present invention is to provide a mass body suitable for use in a microcomputer inductive detector.

In order to achieve the above object, in one aspect of the present invention, a three-axis microcomputer inductance detector is provided, comprising: a first shaft fixed electrode; a second shaft fixed electrode; a third shaft fixed electrode; a movable electrode frame The first axis movable electrode, the second axis movable electrode, the third axis movable electrode, and the connecting element connecting the above three axis movable electrodes, wherein the first axis movable electrode is on the first axis and the first axis The fixed electrode constitutes a first capacitor, the second axis movable electrode forms a second capacitor on the second axis and the second axis fixed electrode, and the third axis movable electrode forms a third capacitor on the third axis and the third axis fixed electrode, and The connecting element includes a central mass body connected to the first shaft, the second shaft, or the third shaft movable electrode, the central mass body having an outer ring and a first connecting portion connecting adjacent edges of the outer ring; a spring coupled to the movable electrode frame; and a fixed post coupled to the spring, wherein the first, second, and third axes are not parallel to each other to define a three-dimensional coordinate system.

In the above three-axis microcomputer inductance detector, the movable electrode frame may have a symmetrical or asymmetrical structure.

In the above three-axis microcomputer-inductance detector, the connecting element may include a central mass body, and the first-axis movable electrode and the second-axis movable electrode may be located in a direction in which the four sides of the central mass extend or four corners extend, and The center mass is connected. The third axis movable electrode may also be located in the extending direction of the four corners of the central mass body or in the direction in which the four sides extend, and is connected to the central mass body or connected through an extension connector. The central mass can have one or more openings.

In the above three-axis microcomputer inductance detector, the connecting element may include at least one peripheral mass body connected to the first shaft movable electrode or the second shaft movable electrode. The peripheral mass body can have one or more openings.

In the above three-axis microcomputer-inductance detector, the first-axis fixed electrode, the second-axis fixed electrode, or both may each have a fixed post, and the fixed post is disposed near the center of the movable electrode frame direction.

In one aspect of the present invention, a mass body suitable for a microcomputer inductive detector is provided, wherein the microcomputer inductive detector includes a fixed electrode and a movable electrode, and the movable electrode is movable relative to the fixed electrode. The mass body is connected to the movable electrode and includes: an outer ring, and a first connecting segment connecting the adjacent sides of the outer ring.

The mass body may further include: a second connecting segment connecting the first connecting segment.

The microcomputer inductance detector can be a single-axis, dual-axis or three-axis microcomputer inductance detector.

The purpose, technical content, features and effects achieved by the present invention will be more readily understood by the detailed description of the embodiments.

The drawings in the present invention are schematic and are mainly intended to indicate the relative relationship between the various structural parts, and the shapes, thicknesses, and widths are not drawn to scale.

First, one embodiment of the present invention will be described. Referring to the top view of FIG. 1A, the triaxial microcomputer inductance detector of the present invention comprises a movable electrode frame 10, an x-axis fixed electrode 21, a y-axis fixed electrode 22, a z-axis fixed electrode 23, a spring 30, and a fixed column ( Anchor)40. The z-axis fixed electrode 23 and the movable electrode frame 10 are located on different horizontal planes, and thus are indicated by broken lines. The fixed post 40 and each of the fixed electrodes 21-23 are fixed to a substrate (not shown), and the movable electrode frame 10 is suspended and connected to the fixed post 40 via the spring 30.

Referring to the top view of FIG. 1B, the structure of the movable electrode frame 10 can be analyzed, and can be regarded as including an x-axis movable electrode 11, a y-axis movable electrode 12, a z-axis movable electrode 13, and a connection connecting the above three-axis movable electrodes. Element 14. The x-axis movable electrode 11 is parallel to the x-axis fixed electrode 21 on the x-axis, the y-axis movable electrode 12 is parallel to the y-axis fixed electrode 22 on the y-axis, and the z-axis movable electrode 13 is parallel to the z-axis fixed electrode 23 on the z-axis. Thus, three sets of capacitors are formed on the x, y, and z axes, respectively. When the sensor moves, a relative movement between the movable electrode frame 10 and the fixed electrode 21-23 (one or more of them) is generated, so that the movement of the sensor can be detected according to the change in capacitance therebetween.

Fig. 2A is a cross-sectional view taken along line A of Fig. 1B. The upper distance between the x-axis movable electrode 11 and the x-axis fixed electrode 21 is shown in the upper part of FIG. 2A, but when the sensor moves to cause the x-axis movable electrode 11 to move to the right in the figure, as shown in FIG. 2A below The distance from the left becomes d1, and the distance on the right becomes d2. The change in distance will cause the capacitance value to change accordingly, so that the movement of the x-axis can be detected. The detection in the y-axis direction is similar.

For the detection of the z-axis direction, see Fig. 2B, which is a cross-sectional view taken from line B of Fig. 1B. The figure shows that the original distance between the z-axis movable electrode 13 and the z-axis fixed electrode 23 is d; similarly, when the sensor moves to cause the z-axis movable electrode 13 to move up and down, the distance will change, and the capacitance value changes accordingly. This will detect the movement of the x-axis.

The cross-section of the x, y-axis fixed electrodes 21, 22 may be any structure and only needs to be fixed on the substrate. For example, when its top view is as shown in Fig. 3A, its cross section may be the 3A-3G map or any other structure. The z-axis fixed electrode 23 is also the same. However, if the structure of the fixed electrode 21-23 is a structure similar to that of the 3D drawing (only a single side has a fixed post), the fixed post is preferably disposed in a direction close to the center of mass of the movable electrode frame 10.

The above description is only one of the embodiments of the present invention; the manner of cooperation between the three-axis movable electrodes 11-13 and the three-axis fixed electrodes 21-23 and their overall combination can be variously changed. For example, although the movable electrode frame 10 is preferably a symmetrical structure, it is not necessarily symmetrical; the z-axis movable electrode 13 is not necessarily provided in the outer ring of the movable electrode frame 10. As shown in the top view of FIG. 4, the z-axis movable electrode 13 and the z-axis fixed electrode 23 are disposed only in one direction of the xy plane (the upper and lower sides are illustrated, but may of course be disposed on the left and right sides), and z The shaft movable electrode 13 is disposed at the extended periphery and center of the movable electrode frame 10 (the z-axis fixed electrode 23 below the display center where the z-axis movable electrode 13 is not labeled). Of course, the movable electrode frame 10 may be a more asymmetrical structure, for example, only the upper, lower, left or right half of the embodiment, and the like.

In the above embodiment, all or a part of the triaxial movable electrode 11-13 and the triaxial fixed electrode 21-23 are disposed in the central region of the movable electrode frame 10. The top view of Fig. 5 shows another embodiment of the present invention. In the present embodiment, the three-axis movable electrode 11-13 and the three-axis fixed electrode 21-23 are disposed on the periphery of the movable electrode frame 10 instead of the center. As shown in the figure, the three-axis microcomputer inductor of the present embodiment also includes a movable electrode frame 10, an x-axis fixed electrode 21, a y-axis fixed electrode 22, a z-axis fixed electrode 23, a spring 30, and an anchor. 40. Similarly, when the sensor moves, a relative movement between the movable electrode frame 10 and the fixed electrode 21-23 (one or more of them) is generated, and the movement of the sensor can be detected according to the change in capacitance therebetween. The z-axis fixed electrode 23 and the movable electrode frame 10 are not in the same plane. The x-axis fixed electrode 21 and the y-axis fixed electrode 22 are preferably disposed in a direction close to the center of the movable electrode frame 10 as in a structure similar to that of the 3D drawing (only one side has a fixed post).

Referring to the top view of FIG. 6, the structure of the movable electrode frame 10 can be analyzed, and can be regarded as including an x-axis movable electrode 11, a y-axis movable electrode 12, a z-axis movable electrode 13, and a connection connecting the above three-axis movable electrodes. In the present embodiment, the connecting element includes a central mass body 141, a peripheral mass body 142, and an extension connector 143. The x-axis movable electrode 11 and the y-axis movable electrode 12 are located in the four-direction extending direction of the center mass body 141, and the z-axis movable electrode 13 is located in the four-corner extending direction of the center mass body 141. (The direction of extension of the four sides refers to the upper, lower, left and right sides of the drawing. The direction of the four corners refers to the upper left, lower left, upper right and lower right sides of the drawing. The words "four sides" and "four corners" are used to describe the direction. It is not intended that the central mass body must be quadrilateral. For example, the central mass body may be circular, hexagonal, octagonal or any other shape.) The central mass body 141 provides a mass connection in addition to providing an overall connection. The movable electrode frame 10 is less likely to be bent due to the process. Similarly, the peripheral mass body 142 not only connects the x-axis movable electrode 11 or the y-axis movable electrode 12, but also provides a mass function, so that the x-axis movable electrode 11 or the y-axis movable electrode 12 is not bent away from the end of the central mass body 141. Awkward. The function of the extension connector 143 is to connect the z-axis movable electrode 13. From another point of view, the extension connector 143 can also be regarded as a part of the z-axis movable electrode 13, depending on whether the extension connector 143 and the fixed electrode 23 constitute a capacitance.

The central mass body 141 and the peripheral mass body 142 are each provided with an opening, one of the purposes of which is to facilitate etching the material layer under the mass body in the process. In addition, the opening can also reduce the continuous length of the mass to avoid bending.

Referring to the top view of FIG. 7A, the structure of the central mass body 141 is dissected, and can be regarded as including an outer ring 141a, a first connecting segment 141b connecting the adjacent sides of the outer ring 141a, and a second connecting segment 141c connecting the first connecting segment 141b. The above structure has an advantage in that the vibration of any part of the movable electrode frame 10 can be sufficiently transmitted. However, the structure of the center mass body 141 is not limited to that shown in Fig. 7A, but may be any structure, for example, as shown in Figs. 7B-7D. In Fig. 7B, only the first connecting portion 141b connecting the adjacent side of the outer ring 141a is provided outside the outer ring 141a. In Fig. 7C, a connecting portion 141d connecting the opposite side of the outer ring 141a is provided outside the outer ring 141a. In Fig. 7D, the structure of the "outer ring-connecting section" is not provided, and a plurality of openings are provided in the center mass body 141, and the same row of openings (141e) and the next row of openings (141f) are shifted from each other. (Of course, it’s good to open). The purpose of the staggering is to reduce the physical length of the central mass body 141 in a single direction. For example, in the 7Dth view, the length of the central mass body 141 in the y direction does not exceed a predetermined critical value except for the periphery.

The structure of the above central mass body 141 is not limited to application in a three-axis microcomputer inductance detector, and can also be applied to a single-axis or two-axis microcomputer inductance detector. For example, in the fifth and sixth embodiments, the movable electrode frame 10 does not include any one of the x-axis movable electrode 11, the y-axis movable electrode 12, and the z-axis movable electrode 13 (the corresponding fixed electrode may be omitted) The overall structure is a two-axis microcomputer inductance detector; if the movable electrode frame 10 does not include any two of the x-axis movable electrode 11, the y-axis movable electrode 12, and the z-axis movable electrode 13 (corresponding fixed electrode) Can also be omitted), that is, become a single-axis microcomputer inductance detector.

The peripheral mass body 142 can also have any configuration. In addition to the structure including the outer ring 142a and the opening 142b as shown in FIG. 8A, it can also be the pattern shown in FIG. 8B or any other shape and opening. In Fig. 8B, in addition to making the same row of openings (142c) and the next row of openings (142d) offset from each other, a notch 142e is provided at the periphery so that the peripheral mass 142 is in a single direction (x direction in the figure). The length does not exceed the established threshold. This reduces the continuous length of the mass to avoid bending.

The present invention has been described with reference to the preferred embodiments thereof, and the present invention is not intended to limit the scope of the present invention. For those skilled in the art, various equivalent changes can be immediately considered within the spirit of the invention. For example, in the embodiment of FIG. 6, the x-axis movable electrode 11 and the y-axis movable electrode 12 may be relocated to the four-corner extending direction of the central mass body 141, and the z-axis movable electrode 13 may be modified to the central mass body 141. The extending direction of the four sides (the fixed electrodes 21-23 also correspond to the movement); the first embodiment of FIGS. 1A and 4 can change the spring 30 and the fixing post 40 to the four-corner extending direction of the movable electrode frame 10; The spring 30 and the fixing post 40 are provided in the direction in which the four sides of the movable electrode frame 10 extend, and the like. Moreover, although the x, y, and z axes of the present invention are exemplified by an orthogonal axis coordinate system, any three axes that are not parallel may be used to calculate the three-dimensional movement of the sensor, and is not limited to having to be an orthogonal axis coordinate. system. Equivalent changes or modifications of the concept and spirit of the invention are intended to be included within the scope of the invention.

10. . . Movable electrode frame

11. . . X-axis movable electrode

12. . . Y-axis movable electrode

13. . . Z-axis movable electrode

14. . . Connecting element

twenty one. . . X-axis fixed electrode

twenty two. . . Y-axis fixed electrode

twenty three. . . Z-axis fixed electrode

30. . . spring

40. . . Fixed column

141. . . Central mass body

141a. . . Outer ring

141b. . . First connection segment

141c. . . Second connection segment

141d. . . Connection segment

141e, 141f. . . Opening

142. . . Peripheral mass

142a. . . Outer ring

142b, 142c, 142d. . . Opening

142e. . . gap

143. . . Extended connector

1A-1B illustrates an embodiment of the present invention.

Figure 2A-2B illustrates how to detect movement.

The 3A-3G diagram exemplifies various cross-sectional structures of the fixed electrode.

Fig. 4 shows another embodiment of the present invention.

Figures 5-6 illustrate yet another embodiment of the present invention.

The 7A-7D diagram exemplifies various structures of the center mass body 141.

Figures 8A-8B illustrate various cross-sectional structures of the perimeter mass 142.

10. . . Movable electrode frame

twenty one. . . X-axis fixed electrode

twenty two. . . Y-axis fixed electrode

twenty three. . . Z-axis fixed electrode

30. . . spring

40. . . Fixed column

Claims (20)

A three-axis microcomputer-inductance detector comprising: a first-axis fixed electrode; a second-axis fixed electrode; a third-axis fixed electrode; a movable electrode frame including a first-axis movable electrode, a second-axis movable electrode, and a third axis a movable electrode, and a connecting element connecting the above three-axis movable electrodes, wherein the first axis movable electrode forms a first capacitance on the first axis with the first axis fixed electrode, and the second axis movable electrode on the second axis The second axis fixed electrode constitutes a second capacitor, and the third axis movable electrode forms a third capacitance on the third axis and the third axis fixed electrode, and the connecting element comprises a central mass body, the central mass body and the first axis a second shaft or a third shaft movable electrode, the central mass having an outer ring and a first connecting portion connecting the adjacent sides of the outer ring; a spring connected to the movable electrode frame; and a fixing post connected to the spring, wherein the The first, second, and third axes are not parallel to each other to define a three-dimensional coordinate system. The three-axis microcomputer-inductance detector according to claim 1, wherein the third-axis fixed electrode and the movable electrode frame are located at different horizontal planes. The three-axis microcomputer-inductance detector according to claim 1, wherein the first axis is an x-axis, the second axis is a y-axis, and the third axis is a z-axis, the three axes are orthogonal to each other, and the movable The electrode frame is symmetrical along the x-axis, symmetrical along the y-axis, or symmetric along the x-y-axis. The three-axis microcomputer-inductance detector of claim 1, wherein the connecting element comprises at least one extension connector, and one of the first axis, the second axis, or the third axis movable electrode is connected via the extension Body and body quality Pick up. The three-axis microcomputer-inductance detector according to claim 1, wherein the first-axis movable electrode and the second-axis movable electrode are located in a direction in which four sides of the central mass body extend. The three-axis microcomputer-inductance detector according to claim 1, wherein the first-axis movable electrode and the second-axis movable electrode are located in a direction in which the four corners of the central mass body extend. The three-axis microcomputer-inductance detector according to claim 1, wherein the third-axis movable electrode is located in a direction in which four sides of the central mass body extend. The three-axis microcomputer-inductance detector according to claim 1, wherein the third-axis movable electrode is located at a direction in which four corners of the central mass body extend. The three-axis microcomputer-inductance detector of claim 1, wherein the central mass further comprises a second connecting section connecting the first connecting section. The three-axis microcomputer-inductance detector according to claim 1, wherein the central mass further comprises a connecting section connecting the opposite sides. The three-axis microcomputer-inductance detector according to claim 1, wherein the connecting element comprises at least one peripheral mass body connected to the first shaft movable electrode or the second shaft movable electrode. The three-axis microcomputer-inductance detector of claim 11, wherein the peripheral mass body has an opening. The three-axis microcomputer-inductance detector according to claim 11, wherein the peripheral mass body has a plurality of staggered openings. The three-axis microcomputer-inductance detector of claim 1, wherein the first-axis fixed electrode or the second-axis fixed electrode or both have a fixed post, and the fixed post is disposed adjacent to the movable The direction of the center of the electrode frame. A mass body suitable for a microcomputer inductance detector, wherein the microcomputer inductance detector The fixed electrode and the movable electrode are movable, and the movable electrode is movable relative to the fixed electrode, and the mass body is connected to the movable electrode and includes: an outer ring, and a first connecting segment connecting the adjacent sides of the outer ring. The mass body applicable to the microcomputer inductor as described in claim 15 of the patent application further includes a second connecting segment connected to the first connecting segment. For the mass body applicable to the microcomputer inductance detector as described in claim 15 of the patent application, the connection section connecting the opposite sides is also included. The mass body applicable to the microcomputer inductive detector according to the fifteenth aspect of the patent application, wherein the microcomputer inductive detector is a single-axis sensor, and the movable electrode and the fixed electrode system are relatively moved in a one-dimensional direction. . The mass body applicable to the microcomputer inductive detector according to claim 15, wherein the microcomputer inductive detector is a biaxial sensor, and the movable electrode comprises a first axis movable electrode and a second axis movable electrode. The fixed electrode includes a first shaft fixed electrode and a second shaft fixed electrode, wherein the first shaft movable electrode and the first shaft fixed electrode move relative to each other in a first axial direction, and the second shaft movable electrode is fixed to the second shaft The electrodes are relatively moved in the second axial direction, and the first axis is not parallel to the second axis. The mass body applicable to the microcomputer inductive detector according to the fifteenth aspect of the patent application, wherein the microcomputer inductive detector is a dual-axis sensor, the movable electrode comprises a first axis movable electrode and a second axis movable electrode And the third axis movable electrode, the fixed electrode includes a first shaft fixed electrode, a second shaft fixed electrode and a third shaft fixed electrode, wherein the first axis movable electrode and the first shaft fixed electrode move relative to each other in the first axis direction The second axis movable electrode and the second axis fixed electrode move relative to each other in the second axis direction, and the third axis movable electrode and the third axis fixed electrode relatively move in the third axis direction, and the first axis, the first axis The two axes and the third axis are not parallel.