201118032 六、發明說明： ' 【發明所屬之技術領域】 本發明有關於一種適用於微機電感測器之質量體、與使用 該質量體之三轴微機電感測器。 【先前技術】 微機電元件有各種應用，其中一種應用為製作電容式感 測器，如加速度計、麥克風等等。先前技術之電容式感測器 • 有同平面(in-Plane sensor)與出平面(out-〇f_plane)感測器兩 類，剛者係感測水平方向(χ-y平面)上的電容變化，後者係 感測垂直方向(Z軸)上的電容變化。有關同平面感測器或其製 作方法之先前技術，例如可參閱美國專利第5,326,726號、第 5,847,280 號、第 5,880,369 號、第 6,877,374 號、第 6,892,576 號二第2007/0180912號。有關出平面感測器或其製作方法之 先前技術，例如可參閱美國專利第6,4〇2,968號、第6,792,8〇4 $、第 6,845,670 號、第 7，138,694 號、第 7,258,011 號。但迄 • 7為止，尚無可以同時感測三軸方向上電容變化的感測器。 【發明内容】 本發明目的之—在提供-種三軸微機電感測器，其可以 同時感測二軸方向上的電容變化。 本發明之另-目的在提供—種翻於微機電感測器 1體。 、 —為述之目的，就本發明的其中—個觀點而.言，提供 I —種二轴微機電感測器，包含：第-軸蚊電極；.第二轴 疋電極’第二_定電極；可動電極框架，其包括第一轴 201118032 可動電極、第二_動電極、第三軸可動電極、及將以上三 轴可動電極連接在一起的連接元件，其中第-軸可動電極在 第-軸上與第-軸固定電極構成第—電容、第二轴可動電極 在第二軸上與第二軸固定電極構成第二電容、第三軸可動電 極在第三軸上與第三_定電極構成第三電容，且該連接元 件包含一中心質量體’此中心質量體與該第—軸、第二轴、 或第一軸可動電極連接，該中心質量體具有外環及連接外環 鄰邊之第-連接段；與可動電極框架連接之彈簧；以及與< 簧連接之固定柱，其+該第…第二、第三軸彼此不互相 行而定義出三維座標系統。 稱或 上述三轴微機電感測器中，該可動電極框架可為對 不對稱結構。 旦上述三軸微機電感測器中，該連接元件可包含一中心質 量^而該第-轴可動電極與該第二軸可動電極可位於該中 :貝置體之四邊延伸方向或四角延伸方向，與該中心質量體 該第三轴可動電極亦可位於該t心質量體之四角延伸 =四邊延伸方向’與該中心質量體連接，或透過一延伸 連接體而連接。辦心質量體可具有-或多個開孔。 周邊⑽機電躺器中，該連接元件可包含至少一個 接。該第—軸可動電極或該第二軸可動電極連 接該周邊質量體可具有一或多個開孔。 二軸微機電感測11中，該第—軸_電極、或該第 於靠近、或兩者’可各具有一固定柱，且該固定柱設 ;罪近该可動電極框架質量中心的方向。 電感ίίΓΓ其中一個觀點而言，提供了一種適用於微機 、、$體’其中該微機電感測器包括固定電極與可動 201118032 電極，該可動電極可相對於固定電極而移動，所述質量體與 該可動電極連接且包含:外環，及連揍外環鄰邊之第一連接 段。 上述質量體可再包含：連接該第一連接段之第二連接 段。 所述微機電感測器可為單轴、雙轴或三軸微機電感測器。 底下藉由具體實施例詳加說明，當更容易暸解本發明之 目的、技術内容、特點及其所達成之功效。 【實施方式】 本發明中賴式均屬示意，主要意在表示各結構部份之 間之相對襲、’至於形狀、厚度與寬度職未依照比例繪製。 、首先說明本發明的其中—個實施例。請參閱第 1A圖之 視圖，本發明之二轴微機電感測器包括可動電極框架ι〇、χ 軸固定電極2卜y軸固定電極22、z軸岭電極23、彈簧30、 =固定柱(anchor) 40。z軸固定電極23與可動電極框架位 水平面上’故以虛線表示。固定柱40與各固定電極 /係固/在基板（未示出）上，而可動電極框架H)則為懸 子，經彈簧30而連接至固定柱4卜 0 :參閱第1B圖之頂視圖，剖析可極 p為包㈣彻極„、贿純極12 =。構極 可動電極11在X軸上與χ軸固 ^ 4 X軸 12在y軸上與y.軸固定電極22平行、ζ轴可:電:J:電極 電極！平行;如此，就分別‘ χ，% z軸 —錢令。虽感測益移動時，可動電極框燊、與自定電極 201118032 如此便可根據其間 21-23 (其一或多者）之間產生相對移動， 之電容變化，偵測感測器的移動。 第从圖為自第1B圖之A剖線所得之剖視圖。第2八圖 上方顯示X軸可動電極11與< 軸岭電極21間之原始距 d，但當感測器移動造成x軸可動電極…主圖中右方移動時、， 如第2A圖下方所示’左方之距離變為&，右方之距離 d2距離改變將造成電容值相應改變，如此便可偵測出X轴二 移動。y軸方向的偵測也類似。 ^軸方向的偵測請見第2B圖，其為自第1B圖之B剖線 所仔之剖視圖。圖中顯示2軸可動電極13與2軸固定電極^ 間之原始距離為d ;類似地’當感測鄕動造成z軸可動電極 13上下移動時，距離將會改變，並造成電容值相應改變，如 此便可偵測出X軸的移動。 x，y軸固定電極21, 22的剖面可為任意結構，僅需固定於 基板上即可。例如，當其頂視圖如第3A圖時，其剖面可為第 3A_3G圖或其他任何結構。z軸固定電極23亦然。但若固定 電極21 -23之結構為類似第3D圖的結構（僅單邊具有固定柱） 時’則该固定柱宜設於靠近可動電極框架10質量中心的方向。 以上所示僅為本發明的其中一個實施例；三軸可動電極 U·13與二軸固定電極21-23間的配合方式與其整體組合方式 可作各種變換。例如，可動電極框架10雖然以對稱結構為佳， 但並不必須為對稱；z軸可動電極13也不必須設置在可動電 極框架10的外環。如第4圖之頂視圖所示，z軸可動電極13 二Z軸固疋電極23僅設置在x-y平面的其中一個方向上（圖 不^上下方’但當然也可設置在左右方），且z軸可動電極13 ; 係°又置在可動電極框架10的延伸外圍與中心（為顯示中心處 201118032 施例的上、下、靖雜構意僅取本實 ⑽紅_定電極 第5圖^、1 在可動電極框架10的十心區域。 中在收？圖顯不本發明的另一個實施例，在本實施命ί 軸可動電·13與 =:! 動_框架10的外圍^ 科^又置在可 感测器的移動。z_定電極變化，摘測 —平面。酬找極21與咖定1G不位於同 圖的結構（僅單邊具有_柱）H如採用類似第3D 電極框架10中心的方向。 固疋柱且設於靠近可動 請參閱第6圖之頂視圖，剖 可視為包括X轴可動電極u、y射1’ 1G的結構， 13、以及將以上三軸可動電 軸可動電極 例中，連接元件包含中心質量體 =起的連接元件；本實施 伸連接體！43。X軸可動電極1 量體M2、及延 質量體⑷的四邊延伸方向，^動電㈣位於中心 左、右四方’四角延伸方向係指圖面的左上f面的上、下、 下四方，「四邊」「四角」之用詞係為插述方；J :右上、右 質量體必縣咖m、㈣201118032 VI. Description of the invention: 'Technical field to which the invention pertains>> The present invention relates to a mass body suitable for a microcomputer inductance detector and a three-axis microcomputer inductance detector using the same. [Prior Art] Microelectromechanical components have various applications, one of which is to fabricate capacitive sensors such as accelerometers, microphones, and the like. Prior art capacitive sensors • There are two types of in-plane sensors and out-〇f_plane sensors, which sense the change in capacitance in the horizontal direction (χ-y plane). The latter senses the change in capacitance in the vertical direction (Z-axis). For the prior art of the same plane sensor or its method of manufacture, for example, U.S. Patent Nos. 5,326,726, 5,847,280, 5,880,369, 6,877,374, 6,892,576, No. 2007/0180912. For the prior art of the out-of-plane sensor or its manufacturing method, for example, see U.S. Patent Nos. 6,4,2,968, 6,792,8,4, 6,845,670, 7,138,694, 7,258,011. However, as of until 7, there is no sensor that can sense the change in capacitance in the three-axis direction at the same time. SUMMARY OF THE INVENTION It is an object of the present invention to provide a three-axis microcomputer inductance detector that can simultaneously sense a change in capacitance in a biaxial direction. Another object of the present invention is to provide a type of body that is turned over to the body of the microcomputer. For the purpose of the present invention, in view of the present invention, a two-axis microcomputer-inductive detector is provided, comprising: a first-axis mosquito electrode; a second-axis 疋 electrode 'second _ An electrode; a movable electrode frame comprising a first axis 201118032 movable electrode, a second_moving electrode, a third axis movable electrode, and a connecting element connecting the above three-axis movable electrodes, wherein the first-axis movable electrode is at - The on-axis and the first-axis fixed electrode constitute a first capacitor, the second-axis movable electrode forms a second capacitor on the second axis and the second-axis fixed electrode, and the third-axis movable electrode is on the third axis and the third-fixed electrode Forming a third capacitor, and the connecting element includes a central mass body. The center mass body is coupled to the first axis, the second axis, or the first axis movable electrode, and the center mass body has an outer ring and an outer ring connecting the outer ring a first connecting portion; a spring connected to the movable electrode frame; and a fixed column connected to the < spring, wherein the second and third axes do not mutually interact with each other to define a three-dimensional coordinate system. In the above three-axis microcomputer inductance detector, the movable electrode frame may be a pair of asymmetric structures. In the above three-axis microcomputer-inductance detector, the connecting element may include a central mass, and the first-axis movable electrode and the second-axis movable electrode may be located therein: four sides extending direction or four-corner extending direction of the shell And the central axis mass body, the third axis movable electrode may also be located at the four corner extension of the t core mass body=four-side extension direction′′ connected to the central mass body or through an extension connector. The core mass body can have - or multiple openings. In the peripheral (10) electromechanical device, the connecting element may comprise at least one connection. The first-axis movable electrode or the second-axis movable electrode may have one or more openings for connecting the peripheral mass. In the two-axis microcomputer inductance measurement 11, the first-axis_electrode, or the first proximity, or both, may each have a fixed post, and the fixed post is disposed in a direction close to the center of mass of the movable electrode frame. Inductively, in one aspect, a microcomputer is provided, wherein the microcomputer inductive detector includes a fixed electrode and a movable 201118032 electrode, and the movable electrode is movable relative to the fixed electrode, the mass body and The movable electrode is connected and includes: an outer ring, and a first connecting segment adjacent to an outer side of the outer ring. The mass body may further include: a second connecting segment connecting the first connecting segment. The microcomputer inductance detector can be a single-axis, dual-axis or three-axis microcomputer inductance detector. The purpose, technical contents, features and effects achieved by the present invention will be more readily understood by the detailed description of the embodiments. [Embodiment] The Lai type in the present invention is intended to be illustrative, and is mainly intended to indicate the relative attack between the structural portions, and the shapes, thicknesses, and widths are not drawn to scale. First, one of the embodiments of the present invention will be described. Referring to the view of FIG. 1A, the two-axis microcomputer inductance detector of the present invention comprises a movable electrode frame ι, a 固定-axis fixed electrode 2, a y-axis fixed electrode 22, a z-axis ridge electrode 23, a spring 30, and a fixed column ( Anchor) 40. The z-axis fixed electrode 23 and the movable electrode frame are horizontally shown, and are indicated by broken lines. The fixed post 40 and each fixed electrode / securing / on the substrate (not shown), and the movable electrode frame H) is a suspension, connected to the fixed post 4 via the spring 30 0: see the top view of Figure 1B, Analyze the pole p as the package (4) the 极 pole, the bribe pure pole 12 =. The structure of the movable electrode 11 on the X axis and the χ axis solid ^ 4 X axis 12 on the y axis and y. axis fixed electrode 22 parallel, ζ axis Can be: electricity: J: electrode electrode! Parallel; so, respectively, 'χ, % z axis - money order. Although the sense of moving, the movable electrode frame 与, and the custom electrode 201118032 can be based on this 21-23 A relative movement occurs between one or more of them, and the capacitance changes to detect the movement of the sensor. The first figure is a cross-sectional view taken from line A of Figure 1B. The X-axis is movable above the second figure. The original distance d between the electrode 11 and the <axis axis electrode 21, but when the sensor moves to cause the x-axis movable electrode to move to the right in the main image, as shown in the lower part of FIG. 2A, the distance to the left becomes &, the right distance d2 distance change will cause the capacitance value to change accordingly, so that the X-axis two movement can be detected. The y-axis direction detection is similar. For the detection of the axial direction, see Fig. 2B, which is a cross-sectional view taken along line B of Fig. 1B. The figure shows that the original distance between the 2-axis movable electrode 13 and the 2-axis fixed electrode is d; similarly 'When the sense of turbulence causes the z-axis movable electrode 13 to move up and down, the distance will change and the capacitance value will change accordingly, so that the X-axis movement can be detected. x, y-axis fixed electrode 21, 22 profile It can be any structure, and it only needs to be fixed on the substrate. For example, when its top view is as shown in Fig. 3A, its cross section can be 3A_3G or any other structure. The z-axis fixed electrode 23 is also the same. When the structure of 21-23 is a structure similar to that of FIG. 3D (only one side has a fixed column), then the fixed column is preferably disposed in a direction close to the center of mass of the movable electrode frame 10. The above is only one of the implementations of the present invention. For example, the manner of cooperation between the three-axis movable electrode U·13 and the two-axis fixed electrode 21-23 can be variously changed. For example, although the movable electrode frame 10 is preferably a symmetrical structure, it does not have to be symmetrical; The z-axis movable electrode 13 does not have to be set The outer ring of the movable electrode frame 10. As shown in the top view of Fig. 4, the z-axis movable electrode 13 and the two Z-axis solid-state electrodes 23 are disposed only in one direction of the xy plane (the figure is not upper and lower) but of course It can be set on the left and right sides, and the z-axis movable electrode 13; is also placed on the extended periphery and center of the movable electrode frame 10 (for the upper and lower parts of the display center at the display center 201118032, only the real thing (10) Red_fixed electrode Fig. 5 and Fig. 1 are in the ten-center region of the movable electrode frame 10. In the figure, another embodiment of the present invention is shown, and in this embodiment, the movable shaft of the movable shaft is 13 and =:! The periphery of the frame 10 is placed on the movement of the sensor. Z_ fixed electrode change, pick-up - plane. The structure of the reward pole 21 and the coffee 1G are not located in the same figure (only one side has a column) H as in the direction similar to the center of the 3D electrode frame 10. The solid column is placed close to the movable view. See the top view of Fig. 6. The cross-section can be seen as the structure including the X-axis movable electrode u, the y-ray 1' 1G, and the above three-axis movable electric axis movable electrode. The connecting element comprises a central mass body = the connecting element; this embodiment extends the connector! 43. The X-axis movable electrode 1 is in the direction of the extension of the body M2 and the extension body (4), and the electrokinetic (4) is located at the left and right sides of the center. The direction of the extension of the four corners refers to the upper, lower and lower sides of the upper left f-plane of the drawing. The words "four corners" and "four corners" are used as interpreters; J: right upper and right quality bodies must be m, (4)
^ Γ C T 7 201118032^ Γ C T 7 201118032
Uti其他任意形狀。）中心質量體141除了提供孕 续亦有提供質量的作用，使可動電極框架二 m電極…軸可動細外’亦有提供質量= 141的X可動電極11或y轴可動電極12遠離中心質量體 輪細_是連接z轴可動 動電極也可將延伸連接體143視為2軸可 成電容而定。部分韻伸連碰143與固定電極23是否構 一1^質里體141與周邊質量體142中皆設有開孔，其目的 程上便利侧f量體下方的材料層。此外，開孔亦 °減夕質$體的連續長度，以避免彎趣。 α明參閱第7A圖之頂視圖，剖析中心質量體141的結構， 可視為包括外環141a、連接外環141a鄰邊的第一連。接段 141b:連接第—連接段觸的第二連接段仙。以上結構的 ，，疋可充分傳遞可動電極框架1〇任一部份的振動。但中心 質量體141的結構並不限於第7A圖所示，而可為任意結構， 例如第7B-7D圖所示。帛7B圖中，除外環141a外僅設有連 接外環141a鄰邊的第一連接段1411^第7C圖中，則除外環 141a外設置連接外環141a對邊的連接段Mld。第7d圖中， 則非「外環一連接段」的結構，而係在中心質量體141中設 置多個開孔，且使同一列開孔(14ie)與次一列開孔(141f)互相錯 開（g然，不錯開亦可）。錯開的目的是降低中心質量體141 在單一方向上的實體長度，例如第7D圖中，除了周邊外，中 心質量體141在y方向上的長度不超過既定的臨界值。 以上中心質量體141之結構不限於應用在三軸微機電感 201118032 測器中，亦可應用於單軸或雙轴微機 由 5:_，如 y軸可動電極12、:雄可動魅13中 軸τ動電極u、 的_極_略），_結構即 和2、z軸可動電極13中之任兩可動 亦可省略），即成為單佩機電感測器。1對應的固4極 3質量體_樣可為⑽結構’除第从 2 H2a與開孔142b的結構外，亦可為第 他任何形狀與開孔分配方式。第8B圖中’次八Uti any other shape. The central mass body 141 provides a quality function in addition to providing the gestational electrode frame, so that the movable electrode frame 2 m electrodes ... the axis is movable finely. 'The X movable electrode 11 or the y-axis movable electrode 12 providing the mass = 141 is away from the central mass body. The wheel _ is connected to the z-axis movable electrode, and the extension connector 143 can be regarded as a 2-axis capacitor. Whether the partial rhythm bump 143 and the fixed electrode 23 are configured or not are provided with a hole in the inner body 141 and the peripheral mass body 142, and the purpose is to facilitate the side material layer under the body. In addition, the opening is also reduced by the continuous length of the body to avoid bending. Referring to the top view of Fig. 7A, the structure of the central mass body 141 can be dissected, and can be regarded as including the outer ring 141a and the first joint connecting the adjacent sides of the outer ring 141a. The connecting portion 141b is connected to the second connecting segment of the first connecting segment. In the above structure, the 疋 can sufficiently transmit the vibration of any part of the movable electrode frame 1 . However, the structure of the central mass body 141 is not limited to that shown in Fig. 7A, but may be any structure, for example, as shown in Figs. 7B-7D. In Fig. 7B, except for the first connecting portion 1411 which is adjacent to the adjacent side of the outer ring 141a, the outer connecting ring 141a is provided with a connecting portion M1 which is connected to the opposite side of the outer ring 141a. In Fig. 7d, the structure of the "outer ring-connecting section" is not provided, and a plurality of openings are provided in the center mass body 141, and the same row of holes (14ie) and the next row of holes (141f) are shifted from each other. (g, it’s good to open). The purpose of the staggering is to reduce the physical length of the central mass body 141 in a single direction. For example, in Fig. 7D, the length of the center mass body 141 in the y direction does not exceed a predetermined critical value except for the periphery. The structure of the above central mass body 141 is not limited to the application in the three-axis microcomputer inductance 201118032 detector, and can also be applied to the single-axis or two-axis microcomputer by 5:_, such as the y-axis movable electrode 12, the male movable charm 13 axis τ The _ pole _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The corresponding solid quadrupole 3 mass body can be (10) structure. In addition to the structure of the second H 2a and the opening 142b, it can also be any other shape and opening distribution mode. Figure 8B
ιΓ#;ΐ^Γι(142φ^ J 142e，以使周邊質量體142在單一方向（圖中χ方向）上的長 度=超過既定的臨界值。如此可減少質量體的連續長度，以避 免、着。 /以上已針對較佳實施例來說明本發明，唯以上所述者， 僅係為使熟悉本技術者易於了解本發明的内容而已，並非用 • 來限定本發明之權利範圍。對於熟悉本技術者，當可在本發 明精神内，立即思及各種等效變化。舉例而言，帛6施 例中’可將X轴可動電極U與y轴可動電極12改設於中心 質量體141的四角延伸方向’而將2軸可動電極13改設於 中心質量體141的四邊延伸方向（固定電極21_23也對應更 動）；第1A、4圖實施例可改將彈簧3〇與固定柱4〇設於可 動電極框架m的初肖延伸方向；$ 6圖實施例可改將彈簀 30與固定柱4〇設於可動電極框架1〇的四邊延伸方向，等等。 .又，雖然本發明之X，y，z三軸以正交軸座標系統為例，但任 意不平行之三轴皆可用以計算出感測器的三維移動，而不降 201118032 。故凡依本發明之概念與精神所 包括於本發明之申請專利範圍内 於必須為正交轴座標系统 之均等變化或修飾，均^ 【圖式簡單說明】 第ια·ιβ圖示出本發明的—個實施例。 第2Α-2Β圖說明如何侧移動。 ^ 3A3G圖舉例Μ固定電極的多種剖面結構。 弟4圖示出本發明㈣—個實施例。 第5-6圖示出本發明的再另—個實施例。 第7A-7D圖舉例示出中心質量體141的多種結構。 第8Α-8Β圖舉例示出周邊質量體⑷的多種剖面結構 【主要元件符號說明】 10可動電極框架 11 X轴可動電極 12 y軸可動電極 13 z軸可動電極 14連接元件 21 X軸固定電極 22 y軸固定電極 23 z軸固定電極 30彈簧 40固定柱 141中心質量體 141a外環 141b第一連接段 141c第二連接段 141d連接段 141e, 141f 開孔 142周邊質量體 142a外環 142b，142c，142d 開孔 142e 缺口 143延伸連接體ιΓ#;ΐ^Γι(142φ^ J 142e, so that the length of the peripheral mass 142 in a single direction (χ direction in the figure) = exceeds a predetermined critical value. This can reduce the continuous length of the mass body to avoid The above description of the present invention has been made for the preferred embodiments, and the above description is only intended to facilitate the understanding of the present invention by those skilled in the art, and is not intended to limit the scope of the present invention. The skilled person, when within the spirit of the present invention, immediately considers various equivalent changes. For example, in the embodiment of FIG. 6, the X-axis movable electrode U and the y-axis movable electrode 12 can be reconfigured to the central mass body 141. The four-axis movable electrode 13 is relocated to the four-side extending direction of the central mass body 141 (the fixed electrode 21_23 also corresponds to the movement); the first embodiment of FIGS. 1A and 4 can be modified to set the spring 3〇 and the fixed post 4 In the direction of the initial direction of the movable electrode frame m; the embodiment of the figure 6 can change the direction in which the magazine 30 and the fixing post 4 are disposed on the four sides of the movable electrode frame 1〇, etc. Further, although the X of the present invention , y, z three-axis orthogonal axis coordinate system For example, any three axes that are not parallel can be used to calculate the three-dimensional movement of the sensor without falling to 201118032. Therefore, the concept and spirit of the present invention must be positive in the scope of the patent application of the present invention. Equivalent change or modification of the coordinate system of the cross-axis. [Simplified description of the drawing] The first embodiment of the present invention is shown by the ια·ιβ. The second Α-2Β diagram illustrates how to move sideways. ^ 3A3G diagram Μ fixed electrode A plurality of cross-sectional structures of the present invention are shown in Figure 4 - Figure 5 - Figure 7 - Figure 7 - Figure 7 - 7 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - The eighth to eighth diagrams illustrate various cross-sectional structures of the peripheral mass body (4) [Major component symbol description] 10 movable electrode frame 11 X-axis movable electrode 12 y-axis movable electrode 13 z-axis movable electrode 14 connection element 21 X-axis fixed electrode 22 y-axis fixed electrode 23 z-axis fixed electrode 30 spring 40 fixed post 141 central mass body 141a outer ring 141b first connecting section 141c second connecting section 141d connecting section 141e, 141f opening 142 peripheral mass 142a outer ring 142b, 142c 142d opening 143 extending notches 142e linker