JP2009222475A5 - - Google Patents

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Publication number
JP2009222475A5
JP2009222475A5 JP2008065383A JP2008065383A JP2009222475A5 JP 2009222475 A5 JP2009222475 A5 JP 2009222475A5 JP 2008065383 A JP2008065383 A JP 2008065383A JP 2008065383 A JP2008065383 A JP 2008065383A JP 2009222475 A5 JP2009222475 A5 JP 2009222475A5
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JP
Japan
Prior art keywords
arm
facing
composite sensor
sensor according
thickness
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Pending
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JP2008065383A
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Japanese (ja)
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JP2009222475A (en
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Priority to JP2008065383A priority Critical patent/JP2009222475A/en
Priority claimed from JP2008065383A external-priority patent/JP2009222475A/en
Publication of JP2009222475A publication Critical patent/JP2009222475A/en
Publication of JP2009222475A5 publication Critical patent/JP2009222475A5/ja
Pending legal-status Critical Current

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Claims (6)

加速度検出部と角速度検出部を有する検出素子を備え、
前記検出素子は、第１アームと第２アームとを直交方向に連結して形成した直交アームと、前記第１アームの一端を支持する支持部とを有し、
互いに直交するＸ、Ｙ、Ｚ軸において、前記第１アームをＸ軸方向に配置し、前記第２アームをＹ軸方向に配置し、
前記角速度検出部は、前記第２アームをＸ軸方向に振動させ、角速度に起因した前記検出素子の状態変化に基づき角速度を検出しており、
前記加速度検出部は、加速度に起因した前記検出素子の状態変化に基づき加速度を検出しており、
前記第１アームの厚みを前記第２アームの厚みよりも薄くした複合センサ。 A detection element having an acceleration detection unit and an angular velocity detection unit;
The detection element includes an orthogonal arm formed by connecting a first arm and a second arm in an orthogonal direction, and a support portion that supports one end of the first arm,
In the X, Y, and Z axes orthogonal to each other, the first arm is disposed in the X-axis direction, the second arm is disposed in the Y-axis direction,
The angular velocity detection unit vibrates the second arm in the X-axis direction and detects an angular velocity based on a state change of the detection element caused by the angular velocity,
The acceleration detection unit detects acceleration based on a state change of the detection element caused by acceleration,
A composite sensor in which the thickness of the first arm is smaller than the thickness of the second arm . 複数の直交アームを設け、前記検出素子は対称形状とした請求項１記載の複合センサ。 The composite sensor according to claim 1, wherein a plurality of orthogonal arms are provided, and the detection element is symmetrical. 前記第１アームの厚みを前記支持部の厚みよりも薄くした請求項１記載の複合センサ。 The composite sensor according to claim 1 , wherein a thickness of the first arm is smaller than a thickness of the support portion . 前記第２アームの先端部は錘部とし、前記第２アームは一方の先端部の錘部から他方の先端部の錘部まで同等の厚みとした請求項３記載の複合センサ。 4. The composite sensor according to claim 3, wherein the tip of the second arm is a weight, and the second arm has an equivalent thickness from the weight of one tip to the weight of the other tip. 前記第２アームに対向する対向部を設け、前記第２アームと前記対向部の各々の対向面に対向電極を配置し、前記加速度検出部は、加速度に起因した前記第２アームと前記対向部の対向電極間の静電容量変化に基づき、加速度を検出する請求項１記載の複合センサ。 A facing portion facing the second arm is provided, and a facing electrode is disposed on each facing surface of the second arm and the facing portion. The composite sensor according to claim 1, wherein acceleration is detected based on a change in capacitance between the opposing electrodes. 前記対向部は、Ｚ軸の方向に配置した対向基板であって、前記対向基板と前記第２アームとの対向面に前記対向電極を設けた請求項５記載の複合センサ。 The composite sensor according to claim 5, wherein the facing portion is a facing substrate disposed in the Z-axis direction, and the facing electrode is provided on a facing surface between the facing substrate and the second arm.
JP2008065383A 2008-03-14 2008-03-14 Compound sensor Pending JP2009222475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008065383A JP2009222475A (en) 2008-03-14 2008-03-14 Compound sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008065383A JP2009222475A (en) 2008-03-14 2008-03-14 Compound sensor

Publications (2)

Publication Number Publication Date
JP2009222475A JP2009222475A (en) 2009-10-01
JP2009222475A5 true JP2009222475A5 (en) 2011-03-31

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JP2008065383A Pending JP2009222475A (en) 2008-03-14 2008-03-14 Compound sensor

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5655501B2 (en) * 2010-01-05 2015-01-21 セイコーエプソン株式会社 Vibration element, vibrator, and electronic device
JP5772286B2 (en) 2011-06-24 2015-09-02 セイコーエプソン株式会社 Bending vibration piece and electronic device
JP2013024721A (en) 2011-07-21 2013-02-04 Seiko Epson Corp Vibration gyro element, gyro sensor and electronic apparatus
US9840409B2 (en) * 2015-01-28 2017-12-12 Invensense, Inc. Translating Z axis accelerometer
JP6780467B2 (en) * 2016-11-24 2020-11-04 セイコーエプソン株式会社 Physical quantity sensors, electronic devices and mobile objects

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2869514B2 (en) * 1993-10-29 1999-03-10 日本航空電子工業株式会社 1-axis angular velocity / acceleration sensor
JP2002243450A (en) * 2001-02-16 2002-08-28 Victor Co Of Japan Ltd Angular velocity sensor, acceleration sensor and angular velocity/acceleration sensor
JP4774733B2 (en) * 2004-12-03 2011-09-14 パナソニック株式会社 Compound sensor
JP2007256234A (en) * 2006-03-27 2007-10-04 Matsushita Electric Ind Co Ltd Inertia force sensor
JP2007256235A (en) * 2006-03-27 2007-10-04 Matsushita Electric Ind Co Ltd Inertia force sensor

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