JP2007256234A - Inertia force sensor - Google Patents

Inertia force sensor Download PDF

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JP2007256234A
JP2007256234A JP2006084578A JP2006084578A JP2007256234A JP 2007256234 A JP2007256234 A JP 2007256234A JP 2006084578 A JP2006084578 A JP 2006084578A JP 2006084578 A JP2006084578 A JP 2006084578A JP 2007256234 A JP2007256234 A JP 2007256234A
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arm
sensing electrode
axis
inertial force
force sensor
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Satoshi Ouchi
智 大内
Hiroyuki Aizawa
宏幸 相澤
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Matsushita Electric Ind Co Ltd
松下電器産業株式会社
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<P>PROBLEM TO BE SOLVED: To provide an inertia force sensor capable of detecting a plurality of inertia forces different from each other in angular velocities, accelerations or the like, capable of detecting the inertia forces in a plurality of detection axes, and capable of miniaturizing various kinds of electronic devices. <P>SOLUTION: This inertia force sensor is provided with a detecting element 1 for detecting the inertia force and a processing circuit, the detecting element 1 has two orthogonal arms formed by connecting the first arms 2 along a substantially orthogonal direction to the second arm, and has a support part 6 for supporting the two first arms 2, a sensing electrode 30 is provided in the each first arm 2 to sense a strain of the first arm 2, the fifth and sixth sensing electrodes 32, 34 are arranged opposedly along a direction orthogonal to the first arm 2, in the one first arm 2, and the seventh and eighth sensing electrodes 36, 38 are arranged opposedly along a direction orthogonal to the first arm 2, in the other first arm 2. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、航空機、自動車、ロボット、船舶、車両等の移動体の姿勢制御やナビゲーション等、各種電子機器に用いる慣性力を検出する慣性力センサに関するものである。   The present invention relates to an inertial force sensor that detects an inertial force used in various electronic devices such as attitude control and navigation of a moving body such as an aircraft, an automobile, a robot, a ship, and a vehicle.
以下、従来の慣性力センサについて説明する。   Hereinafter, a conventional inertial force sensor will be described.
従来、角速度や加速度等の慣性力を検出する慣性力センサを用いる場合は、角速度を検出するには専用の角速度センサを用い、加速度を検出するには専用の加速度センサを用いていた。また、互いに直交するX軸、Y軸、Z軸に対して、複数の検出軸の角速度や加速度を検出する場合には、検出軸の数に対応するように、複数の角速度センサや加速度センサを用いていた。   Conventionally, when an inertial force sensor that detects an inertial force such as an angular velocity or acceleration is used, a dedicated angular velocity sensor is used to detect the angular velocity, and a dedicated acceleration sensor is used to detect the acceleration. In addition, when detecting angular velocities and accelerations of a plurality of detection axes with respect to the X, Y, and Z axes orthogonal to each other, a plurality of angular velocity sensors and acceleration sensors are provided so as to correspond to the number of detection axes. I used it.
したがって、各種電子機器において、角速度と加速度とを複合して検出したり、複数の検出軸に対して角速度や加速度を検出したりする場合は、複数の角速度センサと加速度センサを各種電子機器の実装基板に各々実装していた。   Therefore, when various angular velocity and acceleration are detected in combination with various electronic devices, or when angular velocity and acceleration are detected for multiple detection axes, multiple angular velocity sensors and acceleration sensors are mounted on various electronic devices. Each was mounted on a board.
一般に、角速度センサは、音さ形状やH形状やT形状等、各種の形状の検出素子を振動させて、コリオリ力の発生に伴う検出素子の歪を電気的に検知して角速度を検出するものであり、加速度センサは、錘部を有し、加速度に伴う錘部の可動を、可動前と比較検知して加速度を検出するものである。   In general, an angular velocity sensor detects an angular velocity by electrically detecting a distortion of a detection element caused by the generation of Coriolis force by vibrating a detection element having various shapes such as a sound shape, an H shape, and a T shape. The acceleration sensor has a weight part, and detects acceleration by comparing and detecting the movement of the weight part accompanying the acceleration with that before the movement.
このような角速度センサや加速度センサ等の複数の慣性力センサを、検出したい慣性力や検出軸に対応させて、車両等の移動体の姿勢制御装置やナビゲーション装置等に用いている。   A plurality of inertial force sensors such as an angular velocity sensor and an acceleration sensor are used in an attitude control device, a navigation device, and the like of a moving body such as a vehicle, corresponding to the inertial force and detection axis to be detected.
なお、この出願の発明に関連する先行技術文献情報としては、例えば、特許文献1および特許文献2が知られている。
特開2001−208546号公報 特開2001−74767号公報
For example, Patent Document 1 and Patent Document 2 are known as prior art document information related to the invention of this application.
JP 2001-208546 A JP 2001-74767 A
上記構成では、各種電子機器の慣性力を検出するにあたって、検出したい慣性力や検出軸に対応させて、角速度センサや加速度センサ等の複数の慣性力センサを各種電子機器の実装基板に実装するので、複数の慣性力センサを実装するための実装面積を確保する必要があり、各種電子機器の小型化を図れないという問題点を有していた。   In the above configuration, when detecting the inertial force of various electronic devices, a plurality of inertial force sensors such as an angular velocity sensor and an acceleration sensor are mounted on the mounting board of the various electronic devices corresponding to the inertial force and detection axis to be detected. Therefore, it is necessary to secure a mounting area for mounting a plurality of inertial force sensors, and there is a problem that various electronic devices cannot be reduced in size.
本発明は上記問題点を解決し、複数の慣性力センサを実装するための実装面積を確保する必要がなく、角速度や加速度等の互いに異なる複数の慣性力を検出したり、複数の検出軸の慣性力を検出したりでき、各種電子機器の小型化を図れる慣性力センサを提供することを目的としている。   The present invention solves the above problems and does not require a mounting area for mounting a plurality of inertial force sensors, detects a plurality of different inertial forces such as angular velocity and acceleration, or detects a plurality of detection axes. An object of the present invention is to provide an inertial force sensor that can detect inertial force and can reduce the size of various electronic devices.
上記目的を達成するために本発明は、特に、前記検出素子は、第1アームを第2アームに略直交方向に連結して形成した2つの直交アームと、2つの前記第1アームを支持した支持部と、前記支持部に連結するとともに実装基板に固定した固定用アームと、前記第2アームの先端部に配置した錘部とを備え、前記固定用アームは少なくとも一部が前記第1アームを兼ねており、前記第1アームには前記第1アームの歪を感知する感知電極を設けた構成である。   In order to achieve the above object, the present invention particularly supports the detection element that supports two orthogonal arms formed by connecting the first arm to the second arm in a substantially orthogonal direction and the two first arms. A supporting portion; a fixing arm connected to the supporting portion and fixed to the mounting substrate; and a weight portion disposed at a tip portion of the second arm. At least a part of the fixing arm is the first arm. And the first arm is provided with a sensing electrode for sensing distortion of the first arm.
上記構成により、互いに直交するX軸、Y軸、Z軸に対して、第1アームをX軸方向に配置し、第2アームをY軸方向に配置した場合、角速度については、例えば、第2アームをX軸方向に駆動振動させれば、Z軸回りの角速度に起因した歪は第1アームのX軸方向に発生させることができ、Y軸回りの角速度に起因した歪は第1アームまたは第2アームのZ軸方向に発生させることができ、この歪を検知すれば検出できる。   With the above configuration, when the first arm is arranged in the X-axis direction and the second arm is arranged in the Y-axis direction with respect to the X-axis, Y-axis, and Z-axis that are orthogonal to each other, If the arm is driven and oscillated in the X-axis direction, the distortion caused by the angular velocity around the Z-axis can be generated in the X-axis direction of the first arm, and the distortion caused by the angular velocity around the Y-axis is the first arm or It can be generated in the Z-axis direction of the second arm, and can be detected by detecting this distortion.
加速度については、例えば、Y軸方向の加速度に起因した歪は第1アームに発生させることができ、この歪を検知すれば検出できる。   As for the acceleration, for example, distortion caused by acceleration in the Y-axis direction can be generated in the first arm, and can be detected by detecting this distortion.
よって、互いに異なる複数の慣性力を検出したり、複数の検出軸の慣性力を検出したりできるので、実装面積を低減して小型化を図ることができる。   Therefore, a plurality of different inertia forces can be detected, or the inertia forces of a plurality of detection shafts can be detected, so that the mounting area can be reduced and the size can be reduced.
図1は本発明の一実施の形態における慣性力センサの検出素子の斜視図、図2は図1のA部の拡大図、図3は図2のA−A断面図、図4は同検出素子の動作状態図である。   1 is a perspective view of a detection element of an inertial force sensor according to an embodiment of the present invention, FIG. 2 is an enlarged view of a portion A in FIG. 1, FIG. 3 is a cross-sectional view taken along line AA in FIG. It is an operation state figure of an element.
図1〜図3において、本発明の一実施の形態における慣性力センサは、慣性力を検出する検出素子1と処理回路(図示せず)とを備えている。この検出素子1は、第1アーム2を第2アーム4に略直交方向に連結して形成した2つの直交アームを有し、2つの第1アーム2を支持する支持部6と、支持部6に一端を連結するとともに他端を実装基板(図示せず)に固定する2つの固定用アーム8とを有する。固定用アーム8は第1アーム2に第3アーム10を略直交方向に連結して形成した直交アームとするとともに、第3アーム10の両端に形成した固定部12にて実装基板に固定している。また、第2アーム4は折曲して第2アーム4自身と対向する対向部16を設け、その先端には錘部14を連結している。   1 to 3, an inertial force sensor according to an embodiment of the present invention includes a detection element 1 that detects inertial force and a processing circuit (not shown). This detection element 1 has two orthogonal arms formed by connecting the first arm 2 to the second arm 4 in a substantially orthogonal direction, a support portion 6 that supports the two first arms 2, and a support portion 6. And two fixing arms 8 for fixing the other end to a mounting substrate (not shown). The fixing arm 8 is an orthogonal arm formed by connecting the third arm 10 to the first arm 2 in a substantially orthogonal direction, and is fixed to the mounting substrate by fixing portions 12 formed at both ends of the third arm 10. Yes. Further, the second arm 4 is bent and provided with a facing portion 16 facing the second arm 4 itself, and a weight portion 14 is connected to the tip thereof.
この検出素子1は、固定用アーム8の第1アーム2と支持部6とを略同一直線上に配置しており、互いに直交したX軸、Y軸、Z軸において、第1アーム2をX軸方向に配置して、第2アーム4をY軸方向に配置している。   In this detection element 1, the first arm 2 of the fixing arm 8 and the support portion 6 are arranged on substantially the same straight line, and the first arm 2 is placed on the X axis, Y axis, and Z axis orthogonal to each other. Arranged in the axial direction, the second arm 4 is arranged in the Y-axis direction.
また、4つの第2アーム4において、互いに対向する一方の2つの対向部16には対向方向に対向部16を駆動振動させる駆動電極18を設けるとともに、互いに対向する他方の2つの対向部16には対向方向に対向部16の歪を感知する感知電極20を設けている。この感知電極20は角速度検知用の電極であって、第1〜第4感知電極22,24,26,28からなり、他方の2つの対向部16の内、一方の対向部16には第1、第2感知電極22,24を対向配置させ、他方の対向部16には第3、第4感知電極26,28を対向配置させている。   In the four second arms 4, one of the two opposing portions 16 that face each other is provided with a drive electrode 18 that drives and vibrates the facing portion 16 in the opposing direction, and the other two opposing portions 16 that face each other. Is provided with a sensing electrode 20 for sensing the distortion of the facing portion 16 in the facing direction. The sensing electrode 20 is an electrode for detecting angular velocity, and includes first to fourth sensing electrodes 22, 24, 26, and 28. Of the other two opposing parts 16, one opposing part 16 has a first one. The second sensing electrodes 22 and 24 are opposed to each other, and the third and fourth sensing electrodes 26 and 28 are opposed to the other facing portion 16.
上記の駆動電極18、感知電極20は、シリコン基板上にPtの下部電極を高周波スパッタにて形成し、この下部電極の上部に高周波スパッタにてPZT圧電体を形成し、さらに、上部にAu蒸着で上部電極を形成することによって形成すればよい。   The drive electrode 18 and the sensing electrode 20 are formed by forming a Pt lower electrode on a silicon substrate by high frequency sputtering, forming a PZT piezoelectric body on the lower electrode by high frequency sputtering, and depositing Au on the upper portion. In this case, the upper electrode may be formed.
下部電極と上部電極にシリコン基板が共振する共振周波数の交流電圧を印加すると駆動電極18が配置された対向部16は駆動振動し、それに伴い、4つの第2アーム4および4つの対向部16の全てが同調して駆動振動する。また、角速度に起因してアームが歪めば、感知電極20から歪に応じた電圧が出力され、この出力電圧に基づき、処理回路で角速度を検出できる。   When an alternating voltage having a resonance frequency at which the silicon substrate resonates is applied to the lower electrode and the upper electrode, the facing portion 16 in which the driving electrode 18 is disposed is driven to vibrate, and accordingly, the four second arms 4 and the four facing portions 16 Everything is driven and oscillated. If the arm is distorted due to the angular velocity, a voltage corresponding to the strain is output from the sensing electrode 20, and the angular velocity can be detected by the processing circuit based on the output voltage.
さらに、図2に示すように、第1アーム2には、第1アーム2の歪を感知する感知電極30を設けており、この感知電極30は加速度検知用の電極であって、第5〜第8感知電極からなり、一方の第1アーム2には第1アーム2に対して直交方向に第5、第6感知電極32,34を対向配置させ、他方の第1アーム2に対して直交方向に第7、第8感知電極36,38を対向配置させている。図3において、シリコン基板40上に、薄膜抵抗42を積層し、さらに、感知電極30を積層して形成している。加速度に起因してアームが歪めば、感知電極30から歪に応じた電圧が出力され、この出力電圧に基づき処理回路で加速度を検出できる。   Further, as shown in FIG. 2, the first arm 2 is provided with a sensing electrode 30 for sensing the strain of the first arm 2, and this sensing electrode 30 is an acceleration sensing electrode, It consists of an eighth sensing electrode, and one first arm 2 has fifth and sixth sensing electrodes 32, 34 arranged in a direction orthogonal to the first arm 2 and orthogonal to the other first arm 2. The seventh and eighth sensing electrodes 36 and 38 are arranged to face each other in the direction. In FIG. 3, a thin film resistor 42 is laminated on a silicon substrate 40, and a sensing electrode 30 is further laminated. If the arm is distorted due to the acceleration, a voltage corresponding to the strain is output from the sensing electrode 30, and the processing circuit can detect the acceleration based on this output voltage.
上記構成により、角速度については、例えば、図4に示すように、第2アーム4の対向部16をX軸方向に駆動振動(実線の矢印と点線の矢印を交互に繰り返す)させれば、Z軸回りの角速度に起因した歪は第2アーム4の対向部16のX軸方向に発生させることができ(コリオリ力が駆動振動に対応して第2アーム4のY軸方向に発生するため)、Y軸回りの角速度に起因した歪は第2アーム4の対向部16のZ軸方向に発生させることができ(コリオリ力が駆動振動に対応して第2アーム4のZ軸方向に発生するため)、この歪を検知することにより検出が可能である。特に、一方の2つの対向部に駆動振動させる駆動電極18を設けるとともに、他方の2つの対向部16に歪を感知する感知電極20を設けているので、共振周波数(駆動振動数)を低くすることができ、回路設計が容易になり検出精度を向上できる(支持部6の近傍の第2アーム4に駆動電極18を配置した場合は、共振周波数(駆動振動数)が高くなって、上記効果が得られない)。また、駆動電極18に結線された信号線と感知電極20に結線された信号線との信号干渉も起こりにくく、より検出精度を向上できる。   With the above configuration, for example, as shown in FIG. 4, the angular velocity can be obtained by driving the facing portion 16 of the second arm 4 in the X-axis direction by driving vibration (alternating solid arrows and dotted arrows alternately). Distortion due to the angular velocity around the axis can be generated in the X-axis direction of the facing portion 16 of the second arm 4 (because Coriolis force is generated in the Y-axis direction of the second arm 4 in response to the drive vibration). The distortion caused by the angular velocity around the Y-axis can be generated in the Z-axis direction of the facing portion 16 of the second arm 4 (Coriolis force is generated in the Z-axis direction of the second arm 4 corresponding to the drive vibration). Therefore, detection is possible by detecting this distortion. In particular, the drive electrode 18 for driving vibration is provided in one of the two opposing portions, and the sensing electrode 20 for detecting strain is provided in the other two opposing portions 16, so that the resonance frequency (drive frequency) is lowered. Thus, the circuit design is facilitated and the detection accuracy can be improved (when the drive electrode 18 is arranged on the second arm 4 in the vicinity of the support portion 6), the resonance frequency (drive frequency) is increased, and the above effect is achieved. Cannot be obtained). Further, signal interference between the signal line connected to the drive electrode 18 and the signal line connected to the sensing electrode 20 hardly occurs, and the detection accuracy can be further improved.
具体的には、Z軸回り(左回り)に角速度が生じた場合、図4において、コリオリ力(実線の矢印と点線の矢印)は駆動振動の方向であるX軸方向に対して直交方向に発生し、駆動振動(実線の矢印と点線の矢印)と同調する。このZ軸の左回りの場合、第1〜第4感知電極22,24,26,28が設けられた第2アーム4の対向部16において、第1感知電極28が対向部16の縮みを感知する。また、Z軸の右回りの場合、第1感知電極22と第3感知電極26が対向部16の縮みを感知し、第2感知電極24と第4感知電極28が対向部16の伸びを感知する。一方、駆動電極18が設けられた第2アーム4は、第1〜第4感知電極22,24,26,28が設けられた第2アーム4の動きに同調して対称な動きをする。   Specifically, when an angular velocity occurs around the Z axis (counterclockwise), the Coriolis force (solid arrow and dotted arrow) in FIG. 4 is orthogonal to the X axis direction, which is the direction of drive vibration. Occurs and synchronizes with the drive vibration (solid arrow and dotted arrow). In the counterclockwise direction of the Z axis, the first sensing electrode 28 senses the contraction of the facing portion 16 in the facing portion 16 of the second arm 4 provided with the first to fourth sensing electrodes 22, 24, 26, 28. To do. Further, in the clockwise direction on the Z axis, the first sensing electrode 22 and the third sensing electrode 26 sense the contraction of the facing portion 16, and the second sensing electrode 24 and the fourth sensing electrode 28 sense the extension of the facing portion 16. To do. On the other hand, the second arm 4 provided with the drive electrode 18 moves symmetrically with the movement of the second arm 4 provided with the first to fourth sensing electrodes 22, 24, 26, and 28.
加速度については、例えば、Y軸方向の加速度に起因した歪は第1アーム2に発生させることができ(第2アーム4の自重が第1アーム2に加わるため)、X軸方向の加速度に起因した歪は第3アーム14に発生させることができ(第1アーム2、第2アーム4の自重が第3アーム14に加わるため)、この歪を検知すれば検出できる。特に、図3に示すように、第1アーム2の厚みは第2アーム4や第3アーム10の厚みよりも薄く形成し、この第1アーム2の上に薄膜抵抗42を積層し、この薄膜抵抗42の上に加速度検知用の感知電極30を形成している。   As for acceleration, for example, distortion caused by acceleration in the Y-axis direction can be generated in the first arm 2 (because the weight of the second arm 4 is applied to the first arm 2), and is caused by acceleration in the X-axis direction. The strain generated can be generated in the third arm 14 (because the weights of the first arm 2 and the second arm 4 are applied to the third arm 14), and can be detected by detecting this strain. In particular, as shown in FIG. 3, the thickness of the first arm 2 is made thinner than the thickness of the second arm 4 or the third arm 10, and a thin film resistor 42 is laminated on the first arm 2, and this thin film is formed. A sensing electrode 30 for detecting acceleration is formed on the resistor 42.
具体的には、Y軸方向に加速度が生じた場合、図2において、第5感知電極32と第7感知電極36とが第1アーム2の伸びを感知し、第6感知電極34と第8感知電極38とが第1アーム2の縮みを感知するか、第5感知電極32と第7感知電極36とが第1アーム2の縮みを感知し、第6感知電極34と第8感知電極38とが第1アーム2の伸びを感知する。   Specifically, when acceleration occurs in the Y-axis direction, in FIG. 2, the fifth sensing electrode 32 and the seventh sensing electrode 36 sense the extension of the first arm 2, and the sixth sensing electrode 34 and the eighth sensing electrode 8. The sensing electrode 38 senses the contraction of the first arm 2, or the fifth sensing electrode 32 and the seventh sensing electrode 36 sense the contraction of the first arm 2, and the sixth sensing electrode 34 and the eighth sensing electrode 38. Detects the extension of the first arm 2.
X軸方向に加速度が生じた場合、第5感知電極32と第6感知電極34とがZ軸の(正)方向に第1アーム2の伸びを感知し、第7感知電極36と第8感知電極38とがZ軸の(負)方向に第1アーム2の伸びを感知するか、第5感知電極32と第6感知電極34とがY軸の(負)方向に第1アーム2の伸びを感知し、第7感知電極36と第8感知電極38とがY軸の(正)方向に第1アーム2の伸びを感知する。   When acceleration occurs in the X axis direction, the fifth sensing electrode 32 and the sixth sensing electrode 34 sense the extension of the first arm 2 in the (positive) direction of the Z axis, and the seventh sensing electrode 36 and the eighth sensing electrode. The electrode 38 senses the extension of the first arm 2 in the (negative) direction of the Z axis, or the fifth sensing electrode 32 and the sixth sensing electrode 34 extend in the (negative) direction of the Y axis. The seventh sensing electrode 36 and the eighth sensing electrode 38 sense the extension of the first arm 2 in the (positive) direction of the Y axis.
Z軸方向に加速度が生じた場合、第5〜第8感知電極32、34、36、38がZ軸の(正)方向または(負)方向に第1アーム2の伸びを感知する。このとき、図1において、固定部12の上に薄膜抵抗42と同一の抵抗を積層して、基準用の感知電極44を形成しておき、第5〜第8の感知電極32,34,36,38と感知電極44とを比較して検出する。基準用の感知電極44が配置された固定部12はZ軸方向の加速度に対して伸び縮みがほとんどないので検出が可能であり、薄膜抵抗42と同一の抵抗を用いることにより、温度特性等の材料特性も等しくなり検出精度も向上できる。   When acceleration occurs in the Z-axis direction, the fifth to eighth sensing electrodes 32, 34, 36, 38 sense the extension of the first arm 2 in the (positive) direction or (negative) direction of the Z-axis. At this time, in FIG. 1, the same resistance as the thin film resistor 42 is laminated on the fixed portion 12 to form the reference sensing electrode 44, and the fifth to eighth sensing electrodes 32, 34, 36 are formed. 38 and the sensing electrode 44 are detected by comparison. The fixed portion 12 on which the reference sensing electrode 44 is arranged can be detected because there is almost no expansion / contraction with respect to the acceleration in the Z-axis direction. By using the same resistance as the thin film resistor 42, the temperature characteristics and the like can be detected. The material characteristics are also equal, and the detection accuracy can be improved.
図3において、第1アーム2はY軸方向(実線の矢印と点線の矢印)に伸び縮みする。第1アーム2の厚みは第2アーム4や第3アーム10の厚みよりも薄く形成し、この第1アーム2の上に薄膜抵抗42を積層し、この薄膜抵抗42の上に加速度検知用の感知電極30を形成しているので、第1アーム2が歪みやすく、X軸方向、Y軸方向の加速度に対する歪を受けやすくなって感度が向上する。   In FIG. 3, the first arm 2 extends and contracts in the Y-axis direction (solid arrow and dotted arrow). The first arm 2 is formed to be thinner than the second arm 4 and the third arm 10, and a thin film resistor 42 is stacked on the first arm 2, and acceleration detection is performed on the thin film resistor 42. Since the sensing electrode 30 is formed, the first arm 2 is easily distorted, and is susceptible to distortion with respect to acceleration in the X-axis direction and the Y-axis direction, thereby improving sensitivity.
よって、互いに異なる複数の慣性力を検出したり、複数の検出軸の慣性力を検出したりでき、実装面積を低減して小型化を図ることができる。   Therefore, a plurality of different inertia forces can be detected, or the inertia forces of a plurality of detection shafts can be detected, and the mounting area can be reduced and the size can be reduced.
また、本発明では、第2アーム4の両端部は折曲して第2アーム4と対向させているので、駆動振動における振幅を大きくして角速度の検知速度を向上させることができる。特に、第2アーム4の先端には錘部14を連結しているので、駆動振動における振幅をより大きくして角速度の検知感度を向上させることができる。また、錘部16の連結により、加速度の検知角度も向上させることができる。さらに、第2アーム4の両端部はメアンダー状に折曲して第2アーム4と対向させてもよい。   In the present invention, since both ends of the second arm 4 are bent and face the second arm 4, the amplitude in the drive vibration can be increased to improve the angular velocity detection speed. In particular, since the weight portion 14 is connected to the tip of the second arm 4, the amplitude in the drive vibration can be increased to improve the angular velocity detection sensitivity. Further, the detection angle of acceleration can be improved by the connection of the weight portion 16. Further, both end portions of the second arm 4 may be bent in a meander shape so as to face the second arm 4.
さらに、支持部6は、図1に示すように、支持部6の幅が第1アーム2や第2アーム4の幅よりも大きくなっているが、図5に示すように、支持部6の幅(W1)が第1アーム2や第2アーム4の幅(W2)と同等なものでもよい。   Furthermore, as shown in FIG. 1, the width of the support portion 6 is larger than the width of the first arm 2 or the second arm 4 as shown in FIG. The width (W1) may be equivalent to the width (W2) of the first arm 2 or the second arm 4.
本発明に係る慣性力センサは、複数の慣性力を検出したり、複数の検出軸の慣性力を検出したりでき、各種電子機器に適用できるものである。   The inertial force sensor according to the present invention can detect a plurality of inertial forces or detect inertial forces of a plurality of detection shafts, and can be applied to various electronic devices.
本発明の一実施の形態における慣性力センサの検出素子の斜視図The perspective view of the detection element of the inertial force sensor in one embodiment of this invention 図1のA部の拡大図Enlarged view of part A in FIG. 図2のA−A断面図AA sectional view of FIG. 同慣性力センサの検出素子の動作状態図Operation state diagram of detection element of the same inertial force sensor 同慣性力センサの他の検出素子の斜視図A perspective view of another detection element of the inertial force sensor
符号の説明Explanation of symbols
1 検出素子
2 第1アーム
4 第2アーム
6 支持部
8 固定用アーム
10 第3アーム
12 固定部
14 錘部
16 対向部
18 駆動電極
20 感知電極
22 第1感知電極
24 第2感知電極
26 第3感知電極
28 第4感知電極
30 感知電極
32 第5感知電極
34 第6感知電極
36 第7感知電極
38 第8感知電極
40 シリコン基板
42 薄膜抵抗
44 感知電極
DESCRIPTION OF SYMBOLS 1 Detection element 2 1st arm 4 2nd arm 6 Support part 8 Fixing arm 10 3rd arm 12 Fixed part 14 Weight part 16 Opposing part 18 Drive electrode 20 Sensing electrode 22 1st sensing electrode 24 2nd sensing electrode 26 3rd Sensing electrode 28 fourth sensing electrode 30 sensing electrode 32 fifth sensing electrode 34 sixth sensing electrode 36 seventh sensing electrode 38 eighth sensing electrode 40 silicon substrate 42 thin film resistor 44 sensing electrode

Claims (5)

  1. 慣性力を検出する検出素子を備え、
    前記検出素子は、第1アームを第2アームに略直交方向に連結して形成した2つの直交アームと、2つの前記第1アームを支持した支持部と、前記支持部に連結するとともに実装基板に固定した固定用アームと、前記第2アームの先端部に配置した錘部とを備え、前記固定用アームは少なくとも一部が前記第1アームを兼ねており、前記第1アームには前記第1アームの歪を感知する感知電極を設けた慣性力センサ。
    It has a detection element that detects inertial force,
    The detection element includes two orthogonal arms formed by connecting the first arm to the second arm in a substantially orthogonal direction, a support portion supporting the two first arms, and a mounting substrate connected to the support portion. And a weight portion disposed at the tip of the second arm, at least a part of the fixing arm also serves as the first arm, and the first arm includes the first arm. An inertial force sensor provided with a sensing electrode for sensing the strain of one arm.
  2. 2つの前記第1アームと前記支持部とを略同一直線上に配置した請求項1記載の慣性力センサ。 The inertial force sensor according to claim 1, wherein the two first arms and the support portion are arranged on substantially the same straight line.
  3. 前記感知電極は第1〜第4感知電極からなり、2つの前記第1アームの内、一方の前記第1アームには前記第1アームに対して直交方向に前記第1、第2感知電極を対向配置させ、他方の前記第1アームには前記第1アームに対して直交方向に前記第3、第4感知電極を対向配置させた請求項1記載の慣性力センサ。 The sensing electrode includes first to fourth sensing electrodes, and one of the two first arms has the first and second sensing electrodes in a direction perpendicular to the first arm. 2. The inertial force sensor according to claim 1, wherein the inertial force sensor is arranged to face each other, and the third and fourth sensing electrodes are arranged to face the other first arm in a direction orthogonal to the first arm.
  4. 前記第2アームを駆動振動させ、前記第1アームまたは前記第2アームの歪を検知して角速度を検出する請求項1記載の慣性力センサ。 The inertial force sensor according to claim 1, wherein the second arm is driven to vibrate to detect an angular velocity by detecting distortion of the first arm or the second arm.
  5. 前記第1アーム、前記第2アーム、前記固定用アームの内、前記第1アームの厚みを薄くした請求項1記載の慣性力センサ。 2. The inertial force sensor according to claim 1, wherein a thickness of the first arm among the first arm, the second arm, and the fixing arm is reduced.
JP2006084578A 2006-03-27 2006-03-27 Inertia force sensor Pending JP2007256234A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009222475A (en) * 2008-03-14 2009-10-01 Panasonic Corp Compound sensor
JP2012052961A (en) * 2010-09-02 2012-03-15 Seiko Epson Corp Drive circuit and physical quantity measuring apparatus
JP2014157162A (en) * 2014-04-25 2014-08-28 Panasonic Corp Inertial force sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009222475A (en) * 2008-03-14 2009-10-01 Panasonic Corp Compound sensor
JP2012052961A (en) * 2010-09-02 2012-03-15 Seiko Epson Corp Drive circuit and physical quantity measuring apparatus
JP2014157162A (en) * 2014-04-25 2014-08-28 Panasonic Corp Inertial force sensor

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