JP2008209388A5 - - Google Patents

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Publication number
JP2008209388A5
JP2008209388A5 JP2007159831A JP2007159831A JP2008209388A5 JP 2008209388 A5 JP2008209388 A5 JP 2008209388A5 JP 2007159831 A JP2007159831 A JP 2007159831A JP 2007159831 A JP2007159831 A JP 2007159831A JP 2008209388 A5 JP2008209388 A5 JP 2008209388A5
Authority
JP
Japan
Prior art keywords
vibrating arm
acceleration sensor
sensor according
base
arm portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007159831A
Other languages
Japanese (ja)
Other versions
JP2008209388A (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2007159831A priority Critical patent/JP2008209388A/en
Priority claimed from JP2007159831A external-priority patent/JP2008209388A/en
Priority to US11/860,946 priority patent/US7802475B2/en
Priority to CN2007101524273A priority patent/CN101162237B/en
Publication of JP2008209388A publication Critical patent/JP2008209388A/en
Publication of JP2008209388A5 publication Critical patent/JP2008209388A5/ja
Withdrawn legal-status Critical Current

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Claims (3)

基部と、前記基部から第１方向に延出された振動腕と、を備えた振動体であって、
前記振動腕は、貫通孔によって複数の振動腕部に分割され、
前記振動腕部の先端部は連結部により連結され、
前記振動腕部の各々は、湾曲して形成され、且つ、前記第１方向に対して互いに線対称に形成されたことを特徴とする加速度センサ。 A vibrating body comprising a base and a vibrating arm extending from the base in a first direction,
The vibrating arm is divided into a plurality of vibrating arm portions by a through hole,
The tip of the vibrating arm is connected by a connecting part,
Each of the vibrating arm portions is formed in a curved shape, and is formed symmetrically with respect to the first direction . 請求項１に記載の加速度センサにおいて、
前記連結部は、前記基部と同等の質量か、前記基部よりも大きい質量を備えたことを特徴とする加速度センサ。 The acceleration sensor according to claim 1,
The acceleration sensor according to claim 1, wherein the connecting portion has a mass equal to or larger than that of the base portion . 請求項１または２に記載の加速度センサにおいて、
各々の前記振動腕部の側面には励振電極が形成されたことを特徴とする加速度センサ。 The acceleration sensor according to claim 1 or 2,
An acceleration sensor , wherein an excitation electrode is formed on a side surface of each of the vibrating arm portions .
JP2007159831A 2006-10-13 2007-06-18 Acceleration sensor Withdrawn JP2008209388A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007159831A JP2008209388A (en) 2006-10-13 2007-06-18 Acceleration sensor
US11/860,946 US7802475B2 (en) 2006-10-13 2007-09-25 Acceleration sensor
CN2007101524273A CN101162237B (en) 2006-10-13 2007-10-11 Acceleration sensor

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006279508 2006-10-13
JP2007017439 2007-01-29
JP2007159831A JP2008209388A (en) 2006-10-13 2007-06-18 Acceleration sensor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008253519A Division JP2009042239A (en) 2006-10-13 2008-09-30 Acceleration sensor

Publications (2)

Publication Number Publication Date
JP2008209388A JP2008209388A (en) 2008-09-11
JP2008209388A5 true JP2008209388A5 (en) 2010-07-22

Family

ID=39785793

Family Applications (4)

Application Number Title Priority Date Filing Date
JP2007159832A Withdrawn JP2008209389A (en) 2006-10-13 2007-06-18 Acceleration sensor
JP2007159831A Withdrawn JP2008209388A (en) 2006-10-13 2007-06-18 Acceleration sensor
JP2008253519A Withdrawn JP2009042239A (en) 2006-10-13 2008-09-30 Acceleration sensor
JP2008253520A Withdrawn JP2009042240A (en) 2006-10-13 2008-09-30 Acceleration sensor

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2007159832A Withdrawn JP2008209389A (en) 2006-10-13 2007-06-18 Acceleration sensor

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2008253519A Withdrawn JP2009042239A (en) 2006-10-13 2008-09-30 Acceleration sensor
JP2008253520A Withdrawn JP2009042240A (en) 2006-10-13 2008-09-30 Acceleration sensor

Country Status (2)

Country Link
JP (4) JP2008209389A (en)
CN (1) CN101162237B (en)

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Publication number Priority date Publication date Assignee Title
JP5446187B2 (en) * 2008-09-17 2014-03-19 セイコーエプソン株式会社 Vibrating piece and vibration type sensor
JP5375624B2 (en) * 2010-01-18 2013-12-25 セイコーエプソン株式会社 Acceleration sensor and acceleration detection device
JP5703731B2 (en) * 2010-12-14 2015-04-22 セイコーエプソン株式会社 Electronics
JP5560805B2 (en) * 2010-03-19 2014-07-30 セイコーエプソン株式会社 Gyro element, gyro sensor, and electronic device
JP5341807B2 (en) * 2010-03-26 2013-11-13 株式会社東芝 Acceleration sensor
DE102010030878B4 (en) * 2010-07-02 2023-08-17 Robert Bosch Gmbh Micromechanical sensor device for measuring an acceleration, a pressure and the like
US9759739B2 (en) * 2011-02-02 2017-09-12 Honeywell International Inc. MEMS vibrating-beam accelerometer with piezoelectric drive
JP2014052263A (en) * 2012-09-06 2014-03-20 Nippon Dempa Kogyo Co Ltd External force detection device and external force detection sensor
CN103197101A (en) * 2013-04-18 2013-07-10 厦门乃尔电子有限公司 Non-uniform section cantilever beam piezoelectricity accelerating speed sensor
JP2015179933A (en) * 2014-03-19 2015-10-08 セイコーエプソン株式会社 Vibration element, gyro sensor element, electronic device, electronic apparatus and moving body
JP6044607B2 (en) * 2014-08-28 2016-12-14 横河電機株式会社 Vibration sensor device
CN105429607B (en) * 2014-09-16 2020-12-29 精工爱普生株式会社 Vibration device, electronic apparatus, and moving object
CN105865666B (en) * 2016-05-03 2018-11-20 成都皆为科技有限公司 A kind of integral type biquartz tuning fork resonant sensitive element and force-measuring module
GB2561887B (en) 2017-04-27 2022-10-05 Cambridge Entpr Ltd High performance micro-electro-mechanical systems accelerometer with suspended sensor arrangement
DE102017217975A1 (en) * 2017-10-10 2019-04-11 Robert Bosch Gmbh Micromechanical spring structure
JP7331881B2 (en) * 2021-04-20 2023-08-23 株式会社豊田中央研究所 Acceleration sensor and acceleration sensor device
CN114280329A (en) * 2021-12-27 2022-04-05 西安交通大学 Quartz acceleration sensor with tuning fork fixedly supported at two ends
CN113985067A (en) * 2021-12-29 2022-01-28 山东利恩斯智能科技有限公司 Plane deflection type high-sensitivity acceleration sensor and manufacturing method thereof
US20230314464A1 (en) * 2022-04-02 2023-10-05 Emcore Corporation Self-compensating resonantly vibrating accelerometer driven in multiple vibrational modes
CN114814334B (en) * 2022-04-14 2023-05-16 南京高华科技股份有限公司 Current sensor

Family Cites Families (8)

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Publication number Priority date Publication date Assignee Title
US3238789A (en) * 1961-07-14 1966-03-08 Litton Systems Inc Vibrating bar transducer
JPS61165624A (en) * 1977-06-07 1986-07-26 マイクロ・モ−シヨン・インコ−ポレ−テツド Flowmeter
GB8418914D0 (en) * 1984-07-25 1984-08-30 Standard Telephones Cables Ltd Transducer
FR2574209B1 (en) * 1984-12-04 1987-01-30 Onera (Off Nat Aerospatiale) RESONATOR WITH VIBRATING BLADE
US5331242A (en) * 1992-11-18 1994-07-19 Alliedsignal Inc. Vibrating tine resonators and methods for torsional and normal dynamic vibrating mode
JP3368744B2 (en) * 1996-03-27 2003-01-20 株式会社豊田中央研究所 Vibration acceleration sensor
JP4806850B2 (en) * 2001-01-24 2011-11-02 パナソニック株式会社 Actuator
JP2003149261A (en) * 2001-11-16 2003-05-21 Matsushita Electric Ind Co Ltd Acceleration sensor and automobile using the same

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