CN105157726A - Device and method for inhibiting mechanical coupling error of dual-mass silicon microgyroscope - Google Patents
Device and method for inhibiting mechanical coupling error of dual-mass silicon microgyroscope Download PDFInfo
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Abstract
The invention discloses a device and method for inhibiting a mechanical coupling error of a dual-mass silicon microgyroscope. The device comprises an upper layer and a lower layer, wherein the upper layer is a mechanical structure of the microgyroscope and the lower layer is a glass substrate adhered to a signal leading wire. The mechanical structure of the microgyroscope is composed of two identical sub-structures, which are symmetrically arranged on the left side and the right side separately. The two sub-structures are connected through a driven coupling folded beam and cross beam, so that the two sub-structures are related to each other at both of a driven mode and a detection mode. Through adopting a single beam in a driven decoupling beam, and adjusting the stiffness ratio of an under beam of the cross beam to a detected folded beam, a rotational effect and a mechanical coupling error of a detection mechanism are eliminated in structural design. The length of the cross beam of a pedestal and a position of an anchor point are adjusted to enable the detection mechanism to linearly move in the detection mode. A balancing stabilizing beam is adopted, and the stiffness ratio of the balancing stabilizing beam to the driven coupling folded beam is set, so that movement status of left and right driving mechanisms of a mass block is kept consistent.
Description
Technical field
The invention belongs to MEMS (MEMS (micro electro mechanical system)) and micro-inertia measuring technology, particularly the mechanical coupling error restraining device of a kind of pair of quality silicon micro-gyroscope and method.
Background technology
20th century the mid-80, along with the progress of semiconductor processing technology, the microminiaturization of physical construction and electronic system and integrated---the appearance of MEMS (micro electro mechanical system) (MEMS) technology, brings a revolution to inertial sensor field.From De Leipo laboratory since the silicon micro-gyroscope of its development of rollout in 1991, continue to bring out based on surface working, silicon bulk fabrication or both silicon micro-gyroscopes of hybrid process technology.Micro-mechanical gyroscope is microminiaturized and integrated with it, reliability is high, low in energy consumption, be easy to the excellent properties such as digitizing and intellectuality, response be fast, determine it and have broad application prospects and application value in army.Silicon micro-gyroscope can be divided into speed level, Tactics-level and inertial navigation level according to different performance rates.The silicon micro-gyroscope of speed machine can be used on the fields such as automobile, robot, Industry Control, toy.The silicon micro-gyroscope of Tactics-level is mainly used in the air, ground, marine navigation and attitude course baseline system, the military fields such as tactical missile, intelligent projectile, new concept weapon.The silicon micro-gyroscope of inertial navigation level is used for the fields such as strategic missile, spacecraft, autonomous type Submarine Navigation, and inert stage silicon micro-gyroscope also becomes the focus of each developed country research.
China starts late for the research of silicon micro-gyroscope, and the research at present for silicon micro-gyroscope still rests on laboratory stage, and property indices is delayed far away, seriously limits Military Application and the commercialization of the silicon micro-gyroscope of independent development.Based on two quality silicon micro-gyroscopes of simple substance amount silicon micro-gyroscope theoretical foundation, by the same reverse drive frequently of the same width of driven-mode, realize the Differential Detection of sense mode Corioli's acceleration, it can eliminate the impact of the common mode interference such as axial acceleration effectively, environmental suitability is comparatively strong, is the first-selected structure of engineer applied.But due to the existence of the factors such as manufacturing deficiency, the vibrational energy of driven-mode also can be coupled to sensed-mode, produces larger output error.For this situation, the structural design of silicon micro-gyroscope experienced by never decoupling zero to half decoupling zero, then arrives the evolution of full decoupling.The structure of full decoupling formally sees that decoupling zero is the most thorough, but due to the defect that some structural design exists, make still there is certain coupling effect between the two, but also may generating portion construction torsion, the effect such as servo-actuated, so just make the performance of silicon micro-gyroscope reduce.Therefore, the form of structure and the layout of dependency structure should be noted in the design process, inherently reduce error, improve the performance of silicon micro-gyroscope.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the invention provides mechanical coupling error restraining device and the method for two quality silicon micro-gyroscopes that full decoupling, detection sensitivity are high, antijamming capability is strong, temperature performance is superior, quadrature error is little of a kind of driven-mode and sensed-mode.
Technical scheme: for achieving the above object, the mechanical coupling error restraining device of of the present invention pair of quality silicon micro-gyroscope comprises two-layer up and down, and upper strata is vibrating machine structure, and lower floor is glass substrate;
Described glass substrate comprises some contact conductors and some bonding points, and described contact conductor comprises public electrode, drive electrode and detecting electrode three kinds;
Described vibrating machine structure comprises the identical simple substance angulation velocity measuring unit minor structure of two symmetrical placements; Be connected with between two simple substance angulation velocity measuring unit minor structures and drive coupling folded beam, and two simple substance angulation velocity measuring unit minor structures respectively has a crossbeam up and down, and the crossbeam of two simple substance angulation velocity measuring unit minor structure the same sides is connected; Described crossbeam is connected with four overall fixed anchor points at vibrating machine structure corner place by pedestal straight beam;
Each simple substance angulation velocity measuring unit minor structure includes sensitive-mass, driving mechanism, testing agency, stabilized structure balance beam, drives folded beam, detects folded beam, drives decoupling zero beam, detects decoupling zero beam and minor structure fixed anchor point; Described driving mechanism symmetry is placed on the left and right sides of sensitive-mass, is connected, forms the type of drive of recommending sensitive-mass by the detection decoupling zero beam being distributed in the upper and lower both sides of sensitive-mass with sensitive-mass; Described testing agency symmetry is placed on the both sides up and down of sensitive-mass, is connected, detects the size of Ge Shili in the mode of recommending by the driving decoupling zero beam being distributed in the sensitive-mass left and right sides with sensitive-mass; Described driving mechanism and testing agency surround a hollow, and described minor structure fixed anchor point has four, are distributed in corner, the inside place of the hollow that driving mechanism and testing agency surround respectively; Driving mechanism is connected with from minor structure fixed anchor point nearest separately by the driving folded beam being distributed in its upper and lower both sides, and is connected with overall fixed anchor point by the stabilized structure balance beam being distributed in its both sides; Testing agency is connected with from minor structure fixed anchor point nearest separately by the detection folded beam of its left and right sides, is connected by crossbeam underbeam with crossbeam simultaneously;
Each overall fixed anchor point and minor structure fixed anchor point are fixed in the different bonding point in glass substrate respectively, and vibrating machine structure is suspended on a glass substrate; Two sensitive-mass respectively have a public electrode to be attached thereto.
Further, described driving mechanism comprises two groups of driving combs, two groups of driving combs are symmetrically arranged, often organize driving comb and include activity-driven comb and fixed drive comb, activity-driven comb is connected on the frame of driving mechanism, fixed drive comb is connected with fixed drive comb anchor point, and layout inserted with activity-driven comb, fixed drive comb anchor point is connected on the bonding point of the correspondence position in described glass substrate; All fixed drive comb are connected with the drive electrode in glass substrate simultaneously.
Further, described testing agency comprises two groups of detection combs, two groups of detection combs are arranged symmetrically with up and down, often organize detection comb and include motion detection comb and fixed test comb, motion detection comb is connected on the frame of testing agency, fixed test comb is connected with the fixed test comb anchor point be connected on a glass substrate, and layout inserted with motion detection comb, fixed test comb anchor point is connected on the bonding point of the correspondence position in described glass substrate; All fixed test comb are connected with the detecting electrode in glass substrate simultaneously.
Further, described driving decoupling zero beam adopts the form of single-beam.
Further, described crossbeam underbeam adopts the form of single-beam, and is connected with crossbeam single-point.
Utilize the mechanical coupling error suppressing method of two quality silicon micro-gyroscopes of the mechanical coupling error restraining device of above-mentioned pair of quality silicon micro-gyroscope, described mechanical coupling error suppressing method is: adjust described crossbeam underbeam and make the equilibrium point of the motion of testing agency just in time at the tie point place driving decoupling zero beam and testing agency with the ratio of rigidity detecting folded beam; The length of adjusting base straight beam and the position of overall fixed anchor point, make the distortion limit of crossbeam under sensed-mode be the tie point of crossbeam underbeam and crossbeam; The firm balance beam of adjustment structure makes the motion state of the driving mechanism of the sensitive-mass left and right sides be consistent with driving the ratio of rigidity of coupled beams.
Beneficial effect: (1) drives decoupling zero beam to adopt the single-beam that length is longer, the rigidity of beam reduces, reduce the servo-actuated effect of testing agency at driving direction, taking up room of single-beam diminishes, more easily place, coordinate with crossbeam underbeam and the rigidity detecting folded beam, the turning effect of testing agency under driven-mode can be eliminated.The use of single-beam can make the quality of sensitive-mass increase, and the turning effect of sensitive-mass reduces, and increases the stability of system, and the use of single-beam, and the turning effect of sensitive-mass can reduce greatly to the transmission of testing agency; (2) crossbeam underbeam adopts the form of single-beam, and be connected with crossbeam single-point, nonlinear deformation at sensed-mode sill can be reduced on the impact of testing agency, reduce the turning effect of testing agency, jointly limit testing agency with detection folded beam, make it in detection side's linear movement; (3) length of adjusting base straight beam and the position of fixed anchor point make the tie point of crossbeam underbeam and crossbeam be the limit of crossbeam nonlinear deformation, reduce in the transmission of sensed-mode sill nonlinear deformation to testing agency; (4) employing of stabilized structure balance beam, and by the firm balance beam of adjustment structure and the ratio of rigidity driving coupled beams, the existence of coupled beams is driven to cause the phenomenon of minor structure left and right driving mechanism discontinuity equalization, left and right driving mechanism motion state is consistent, and stabilized structure balance beam can make the turning effect of the driving mechanism under sensed-mode reduce.
Accompanying drawing explanation
Accompanying drawing 1 is the mechanical coupling error restraining device structural representation of the two quality silicon micro-gyroscope of the present invention;
Accompanying drawing 2 is mechanical coupling error dampening mechanism structural representations of the present invention;
Accompanying drawing 3 is driving mechanism and the drive feedback structural scheme of mechanism of the two quality silicon micro-gyroscope of the present invention;
Accompanying drawing 4 is testing agency's schematic diagram of the two quality silicon micro-gyroscope of the present invention;
Accompanying drawing 5 is glass substrate schematic diagram of the two quality silicon micro-gyroscope of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further described.
By reference to the accompanying drawings 1, the mechanical coupling error suppressing method of the two quality silicon micro-gyroscope of the present invention and device realize the measurement to the input angular velocity perpendicular to x-y surface level.Structure is divided into two-layer up and down, and upper strata is the vibrating machine structure of silicon micro-gyroscope, and lower floor is the glass substrate being stained with signal lead.The physical construction of gyro is made up of two symmetrical identical simple substance angulation velocity measuring unit minor structure 1a, 1b placed, under driven-mode, by driving coupling folded beam 3a between two simple substance angulation velocity measuring unit minor structures, 3b is associated, under sensed-mode, by crossbeam 4a1, 4b1, 4a2, 4b2 is associated, crossbeam 4a1, 4b1, 4a2, 4b2 is by pedestal straight beam 10a1, 10a2, 10b1, four overall fixed anchor point 9a2 at 10b2 and vibrating machine structure corner place, 9a4, 9b2, 9b4 connects, structure after association is under driven-mode and sensed-mode are all operated in the situation of with same frequency and reversed-phase, two simple substance angulation velocity measuring unit Substructure Vibration characteristics reach unanimity.Simple substance angulation velocity measuring unit minor structure 1a, 1b is by driving folded beam 13a1, 13a2, 13a3, 13a4, 13b1, 13b2, 13b3, 13b4 and detection folded beam 6a1, 6a2, 6a3, 6a4, 6b1, 6b2, 6b3, 6b4 and minor structure fixed anchor point 9a1, 9a3, 9a5, 9a6, 9b1, 9b3, 9b5, 9b6 is connected, overall fixed anchor point 9a2, 9a4, 9b2, 9b4 and minor structure fixed anchor point 9a1, 9a3, 9a5, 9a6, 9b1, 9b2, 9b3, 9b4 is fixed in the bonding point 23a1 in glass substrate respectively, 23a6, 23b1, 23b2, 21a3, 23a2, 21a5, 21a4, 21b3, 23b6, 21b5, on 21b4, vibrating machine structure is suspended on a glass substrate,
Above-mentioned simple substance angulation velocity measuring unit minor structure 1a, 1b comprises sensitive-mass 2a, 2b, driving mechanism 14a1, 14b1, 14a2, 14b2, testing agency 8a1, 8b1, 8a2, 8b2, stabilized structure balance beam 11a1, 11b1, 11a2, 11b2, drive folded beam 13a1, 13a2, 13a3, 13a4, 13b1, 13b2, 13b3, 13b4, detect folded beam 6a1, 6a2, 6a3, 6a4, 6b1, 6b2, 6b3, 6b4, detect decoupling zero beam 12a1, 12b1, 12a2, 12b2, drive decoupling zero beam 7a1, 7b1, 7a2, 7b2 and minor structure fixed anchor point 9a1, 9a2, 9a3, 9a4, 9b1, 9b2, 9b3, 9b4, driving mechanism 14a1,14b1,14a2,14b2 symmetry is positioned over the left and right sides of sensitive-mass 2a, 2b, and driving mechanism 14a1,14b1,14a2,14b2 form the type of drive of recommending sensitive-mass 2a, 2b by detection decoupling zero beam 12a1,12b1,12a2, the 12b2 being distributed in the upper and lower both sides of sensitive-mass 2a, 2b.Driving mechanism 14a1, 14b1, 14a2, 14b2 is by being distributed in the driving folded beam 13a1 of both sides up and down separately, 13a2, 13a3, 13a4, 13b1, 13b2, 13b3, 13b4 and stabilized structure balance beam 11a1, 11b1, 11a2, 11b2 respectively with minor structure fixed anchor point 9a1, 9a2, 9a3, 9a4, 9a5, 9a6, 9b1, 9b2, 9b3, 9b4, 9b5, 9b6 is connected, here setting drives folded beam 13a1, 13a2, 13a3, 13a4, 13b1, 13b2, 13b3, 13b4 and stabilized structure balance beam 11a1, 11b1, 11a2, the ratio of rigidity of 11b2, make driving mechanism 14a1, 14b1, 14a2, 14b2 is limited in the direction of motion along x-axis, turning effect is suppressed, and sensitive-mass 2a, driving mechanism 14a1 and the 14a2 of the left and right sides of 2b, the motion state of 14b1 and 14b2 keeps relatively consistent.
As shown in Figure 2, testing agency 8a1,8b1,8a2,8b2 are connected with sensitive-mass 2a, 2b by driving decoupling zero beam 7a1,7b1,7a2, the 7b2 being distributed in sensitive-mass 2a, 2b left and right sides, are the size that the mode of recommending detects coriolis force equally.Adopt driving decoupling zero beam 7a1,7b1,7a2,7b2 of single-beam form to be passed in testing agency 8a1,8b1,8a2,8b2 because the motion balance point place driving the coupling of decoupling zero beam 7a1,7b1,7a2,7b2 to produce the center of rotation of turning effect is connected with testing agency under driven-mode, the acting force of driving decoupling zero beam 7a1,7b1,7a2,7b2 to 8a1,8b1,8a2,8b2 of testing agency is reduced to zero like this.The thickness of design driven decoupling zero beam is h, and length is l, and width is w, and design driven decoupling zero beam rigidity k is:
E is the elastic modulus of structured material.
The position of the motion balance point of testing agency 8a1,8b1,8a2,8b2 is regulated by the rigidity of tie-beam 5a1,5b1,5a2,5b2 and detection folded beam 6a1,6a2,6a3,6a4,6b1,6b2,6b3,6b4 under adjustment crossbeam.Adjustment pedestal straight beam 10a1, 10b1, 10a2, the length of 10b2 and overall fixed anchor point 9a2, 9a4, 9b2, the position of 9b4 makes crossbeam underbeam 5a1, 5b1, 5a2, 5b2 and crossbeam 4a1, 4b1, 4a2, the tie point of 4b2 is crossbeam 4a1, 4b1, 4a2, the limit that 4b2 is out of shape under sensed-mode, in conjunction with detection folded beam 6a1, 6a2, 6a3, 6a4, 6b1, 6b2, 6b3, 6b4 and minor structure fixed anchor point 9a1, 9a3, 9a5, 9a6, 9b1, 9b3, 9b5, the connection of 9b6, testing agency 8a1, 8b1, 8a2, 8b2 is limited in above-below direction vibration, turning effect is suppressed, therefore testing agency can only move up and down at sensitive direction, decoupling zero is completely achieved by obtaining above between the testing agency of structure and driving mechanism, driving mechanism and testing agency respectively under driven-mode and sensed-mode under motion state be linear, without the existence of turning effect, well inhibit mechanical coupling error.
As shown in Figure 3, driving mechanism 14a1,14b1,14a2,14b2 adopt variable area formula comb electric capacity electrostatic drive form to the driving mechanism of silicon micro-gyroscope, are arranged in the left and right sides of sensitive-mass 2a, 2b; Driving mechanism 14a1,14b1,14a2,14b2 respectively comprise two groups of driving combs, two groups of driving combs are symmetrically arranged, and one group of driving comb comprises activity-driven comb 15a1,15b1,15a2,15b2 and fixed drive comb 16a1,16b1,16a2,16b2.Now for the one group of driving comb structure of the left part in driving mechanism 14a1: activity-driven comb 15a1 is connected on the frame of driving mechanism 14a1, fixed drive comb 16a1 and the inserted layout of activity-driven comb 15a1, and be connected with fixed drive comb anchor point 17a1, simultaneously, on the affixed bonding point 21a14 on a glass substrate of fixed drive comb anchor point 17a1,21a14 is connected with drive electrode 24a1, when applying alternating voltage U at drive electrode 24a1
dsin ω
dt, and superpose identical DC offset voltage U
o, and will the public electrode 22a ground connection of sensitive-mass 2a be connected to, when the level therefore on activity-driven comb 14a1 is zero, the driving force that activity-driven comb 14a1 is subject to is:
In formula, n
0for the single side comb teeth number of activity-driven comb 15a1, h is the thickness of comb, and ε is specific inductive capacity, and d is comb gap.At driving force F
deffect under, driving mechanism 14a1 promotes sensitive-mass 2a vibration by detecting decoupling zero beam 12a1.
When vibrating under the state that sensitive-mass 2a, 2b are in same frequency and reversed-phase under the driving of driving mechanism 14a1,14b1,14a2,14b2, when there being turning rate input perpendicular to plane of oscillation direction, the coriolis force that sensitive-mass 2a, 2b are subject to is also with same frequency and reversed-phase, and the size of coriolis force is:
F
g＝-2mω
i×V
d
In formula, m is the quality of sensitive-mass 2a, 2b, ω
ifor the angular velocity inputted perpendicular to plane of oscillation direction, Vd is sensitive-mass 2a, 2b movement velocity along driving direction; Coriolis force F
gdirection by right-hand screw rule determine along detection side to, sensitive-mass 2a, 2b are at coriolis force F
geffect under along detection side to moving, and by driving decoupling zero beam 7a1,7b1,7a2,7b2 to promote testing agency 8a1,8b1,8a2,8b2 motion.
As shown in Figure 4, testing agency 8a1,8b1,8a2,8b2 adopt variable area formula comb capacitance detecting form, are arranged in the upper and lower of sensitive-mass 2a, 4b in the testing agency of silicon micro-gyroscope; Testing agency 8a1,8b1,8a2,8b2 respectively comprise two groups of detection combs, and two groups of detection combs are arranged symmetrically with up and down.Now for the upside detection comb structure in testing agency 8a1: motion detection comb 18a1 is connected on the frame of testing agency 8a1, fixed test comb 19a1 and the inserted layout of movable comb 18a1, be connected with fixed test comb anchor point 20a1, the affixed bonding point 21a8 on a glass substrate of fixed test comb anchor point 20a1, and be connected with detecting electrode 23a2, when sensitive-mass 2a is at coriolis force F
galong detection side to when moving under effect, in testing agency 8a1, the capacitance change of comb is:
In formula, n is the single side comb teeth number of motion detection comb 18a1, and l is the overlap length of motion detection comb and fixed test comb, and h is the thickness of comb, and ε is specific inductive capacity, d
0for the primary clearance of comb, Δ y is for detecting displacement; Because detect displacement y to be proportional to coriolis force F
g, thus be proportional to input angular velocity ω
i, the capacitance change Δ C that thus can be recorded by testing agency 8a1 knows input angular velocity ω by inference
isize.
The glass substrate of silicon micro-gyroscope as shown in Figure 5, comprises contact conductor and bonding point two parts.For electrode lead portion: public electrode 22a, 22b are connected with sensitive-mass 2a, 2b respectively, drive electrode 24a1 is connected with fixed drive comb 16a1 with 16a3, drive electrode 24a2 is connected with fixed drive comb 16a2 with 16a4, drive electrode 24b1 is connected with fixed drive comb 16b1 with 16b3, drive electrode 24b2 is connected with fixed drive comb 16b2 with 16b4, detecting electrode 23a1 and fixed test comb 18a1, 18a3 is connected, detecting electrode 23a2 and fixed test comb 18a2, 18a4 is connected, detecting electrode 23a3 and fixed test comb 18a6, 18a8 is connected, detecting electrode 23a4 and fixed test comb 18a5, 18a7 is connected, detecting electrode 23b1 and fixed test comb 18b1, 18b3 is connected, detecting electrode 23b2 and fixed test comb 18b2, 18b4 is connected, detecting electrode 23b3 and fixed test comb 18b6, 18b8 is connected, detecting electrode 23b4 and fixed test comb 18b5, 18b7 is connected.For bonding point part: fixed anchor point 9a1, 9a2, 9a3, 9a4, 9a5, 9a6, 17a1, 17a2, 17a3, 17a4, 20a1, 20a2, 20a3, 20a4, 20a5, 20a6, 20a7, 20a8, 9b1, 9b2, 9b3, 9b4, 9b5, 9b6, 17b1, 17b2, 17b3, 17b4, 20b1, 20b2, 20b3, 20b4, 20b5, 20b6, 20b7, 20b8 respectively with bonding point 21a3, 21a1, 21a6, 21a2, 21a5, 21a4, 21a15, 21a16, 21a18, 21a17, 21a8, 21a9, 21a7, 21a10, 21a12, 21a13, 21a11, 21a14, 21b3, 21b1, 21b6, 21b2, 21b5, 21b4, 21b15, 21b16, 21b18, 21b17, 21b8, 21b9, 21b7, 21b10, 21b12, 21b13, 21b11, 21b14 is affixed.
To sum up, the mechanical coupling error restraining device of of the present invention pair of quality silicon micro-gyroscope and method have following effect: (1) drives decoupling zero beam to adopt the single-beam that length is longer, the rigidity of beam reduces, reduce the servo-actuated effect of testing agency at driving direction, taking up room of single-beam diminishes, more easily place, coordinate with crossbeam underbeam and the rigidity detecting folded beam, the turning effect of testing agency under driven-mode can be eliminated.The use of single-beam can make the quality of sensitive-mass increase, and the turning effect of sensitive-mass reduces, and increases the stability of system, and the use of single-beam, and the turning effect of sensitive-mass can reduce greatly to the transmission of testing agency; (2) crossbeam underbeam adopts the form of single-beam, and be connected with crossbeam single-point, nonlinear deformation at sensed-mode sill can be reduced on the impact of testing agency, reduce the turning effect of testing agency, jointly limit testing agency with detection folded beam, make it in detection side's linear movement; (3) length of adjusting base straight beam and the position of fixed anchor point make the tie point of crossbeam underbeam and crossbeam be the limit of crossbeam nonlinear deformation, reduce in the transmission of sensed-mode sill nonlinear deformation to testing agency; (4) employing of stabilized structure balance beam, and by the firm balance beam of adjustment structure and the ratio of rigidity driving coupled beams, the existence of coupled beams is driven to cause the phenomenon of minor structure left and right driving mechanism discontinuity equalization, left and right driving mechanism motion state is consistent, and stabilized structure balance beam can make the turning effect of the driving mechanism under sensed-mode reduce.
The above is only the preferred embodiment of the present invention; be noted that for those skilled in the art; under the premise without departing from the principles of the invention, can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (6)
1. the mechanical coupling error restraining device of pair quality silicon micro-gyroscope, is characterized in that: comprise two-layer up and down, and upper strata is vibrating machine structure, and lower floor is glass substrate;
Described glass substrate comprises some contact conductors and some bonding points, and described contact conductor comprises public electrode, drive electrode and detecting electrode three kinds;
Described vibrating machine structure comprises the identical simple substance angulation velocity measuring unit minor structure of two symmetrical placements; Be connected with between two simple substance angulation velocity measuring unit minor structures and drive coupling folded beam, and two simple substance angulation velocity measuring unit minor structures respectively has a crossbeam up and down, and the crossbeam of two simple substance angulation velocity measuring unit minor structure the same sides is connected; Described crossbeam is connected with four overall fixed anchor points at vibrating machine structure corner place by pedestal straight beam;
Each simple substance angulation velocity measuring unit minor structure includes sensitive-mass, driving mechanism, testing agency, stabilized structure balance beam, drives folded beam, detects folded beam, drives decoupling zero beam, detects decoupling zero beam and minor structure fixed anchor point; Described driving mechanism symmetry is placed on the left and right sides of sensitive-mass, is connected, forms the type of drive of recommending sensitive-mass by the detection decoupling zero beam being distributed in the upper and lower both sides of sensitive-mass with sensitive-mass; Described testing agency symmetry is placed on the both sides up and down of sensitive-mass, is connected, detects the size of Ge Shili in the mode of recommending by the driving decoupling zero beam being distributed in the sensitive-mass left and right sides with sensitive-mass; Described driving mechanism and testing agency surround a hollow, and described minor structure fixed anchor point has four, are distributed in corner, the inside place of the hollow that driving mechanism and testing agency surround respectively; Driving mechanism is connected with from minor structure fixed anchor point nearest separately by the driving folded beam being distributed in its upper and lower both sides, and is connected with overall fixed anchor point by the stabilized structure balance beam being distributed in its both sides; Testing agency is connected with from minor structure fixed anchor point nearest separately by the detection folded beam of its left and right sides, is connected by crossbeam underbeam with crossbeam simultaneously;
Each overall fixed anchor point and minor structure fixed anchor point are fixed in the different bonding point in glass substrate respectively, and vibrating machine structure is suspended on a glass substrate; Two sensitive-mass respectively have a public electrode to be attached thereto.
2. the mechanical coupling error restraining device of according to claim 1 pair of quality silicon micro-gyroscope, it is characterized in that: described driving mechanism comprises two groups of driving combs, two groups of driving combs are symmetrically arranged, often organize driving comb and include activity-driven comb and fixed drive comb, activity-driven comb is connected on the frame of driving mechanism, fixed drive comb is connected with fixed drive comb anchor point, and layout inserted with activity-driven comb, fixed drive comb anchor point is connected on the bonding point of the correspondence position in described glass substrate; All fixed drive comb are connected with the drive electrode in glass substrate simultaneously.
3. the mechanical coupling error restraining device of according to claim 1 pair of quality silicon micro-gyroscope, it is characterized in that: described testing agency comprises two groups of detection combs, two groups of detection combs are arranged symmetrically with up and down, often organize detection comb and include motion detection comb and fixed test comb, motion detection comb is connected on the frame of testing agency, fixed test comb is connected with the fixed test comb anchor point be connected on a glass substrate, and layout inserted with motion detection comb, fixed test comb anchor point is connected on the bonding point of the correspondence position in described glass substrate; All fixed test comb are connected with the detecting electrode in glass substrate simultaneously.
4. the mechanical coupling error restraining device of the two quality silicon micro-gyroscopes according to the arbitrary claim of claim 1-3, is characterized in that: described driving decoupling zero beam adopts the form of single-beam.
5. the mechanical coupling error restraining device of the two quality silicon micro-gyroscopes according to the arbitrary claim of claim 1-3, is characterized in that: described crossbeam underbeam adopts the form of single-beam, and is connected with crossbeam single-point.
6. based on the mechanical coupling error suppressing method of two quality silicon micro-gyroscopes of the mechanical coupling error restraining device of according to claim 1 pair of quality silicon micro-gyroscope, it is characterized in that: described mechanical coupling error suppressing method is: adjust described crossbeam underbeam and make the equilibrium point of the motion of testing agency just in time at the tie point place driving decoupling zero beam and testing agency with the ratio of rigidity detecting folded beam; The length of adjusting base straight beam and the position of overall fixed anchor point, make the distortion limit of crossbeam under sensed-mode be the tie point of crossbeam underbeam and crossbeam; The firm balance beam of adjustment structure makes the motion state of the driving mechanism of the sensitive-mass left and right sides be consistent with driving the ratio of rigidity of coupled beams.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201510479060.0A CN105157726B (en) | 2015-08-06 | 2015-08-06 | The mechanical coupling error restraining device and method of double quality silicon micro-gyroscopes |
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