CN103900548B - Silicon micro full-decoupling dual-mass dual-line vibratory gyroscope - Google Patents
Silicon micro full-decoupling dual-mass dual-line vibratory gyroscope Download PDFInfo
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- CN103900548B CN103900548B CN201410164249.6A CN201410164249A CN103900548B CN 103900548 B CN103900548 B CN 103900548B CN 201410164249 A CN201410164249 A CN 201410164249A CN 103900548 B CN103900548 B CN 103900548B
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- fixed pedestal
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
Abstract
The invention discloses a silicon micro full-decoupling dual-mass dual-line vibratory gyroscope which comprises a base, a first substructure, a second substructure and a substructure connecting device, wherein the first substructure and the second substructure are connected through the substructure connecting device; the first substructure and the second substructure are angular velocity measurement structures; each angular velocity measurement structure comprises a mass block, a first fixing base fixed on the base, a second fixing base fixed on the base, a third fixing base fixed on the base, a fourth fixing base fixed on the base, a first driving mechanism, a second driving mechanism, a first detection mechanism, a second detection mechanism, a first driving parallel beam, a second driving parallel beam, a first detection parallel beam, a second detection parallel beam and multiple U-shaped folded beams.
Description
Technical field
The invention belongs to microelectromechanical systems and micro-inertia measuring technology, particularly a kind of silicon micro- full decoupling pair quality pair
Linearly coupled formula gyroscope.
Background technology
Silicon micromechanical gyroscope is a kind of inertial sensor of measurement rotational angular velocity, using oscillating mass block by pedestal
The Coriolis effect producing when being rotated to measure pedestal rotation angular velocity, with traditional electrical category gyro and photoelectricity class gyro
Compare, there is small volume, low cost, lightweight, high reliability, have important use value in dual-use field
With wide application prospect.
From last century end, domestic and international Duo Jia research institution has begun to the research of silicon micro-gyroscope, and most of mechanism grinds
The silicon micro-gyroscope sent out using the version of simple substance amount and do not decouple or half decoupling design.Micro- for simple substance amount silicon
For gyroscope, in the presence of axial acceleration interference, easily lead to electronic circuit saturation as common mode disturbances and lose
Effect, finally makes the work of silicon micro-gyroscope be severely impacted.In recent years, minority mechanism is carried out to double quality silicon micro-gyroscopes
Preliminary theory and Test Study, also mostly using the design not decoupled or partly decouple, due to the presence of various mismachining tolerances, silicon
In the case of no Coriolis effect, the vibrational energy of its driven-mode also can be coupled to sensed-mode to micro-mechanical gyroscope, produces
Orthogonal coupling error signal and skew coupling error signal, and do not decouple the impact root that design produces to both signals
Originally cannot reduce, the design of half decoupling is also only capable of part and reduces the shadow to silicon micromechanical gyroscope performance for both signals
Ring.
Content of the invention
Goal of the invention: it is an object of the invention to provide a kind of low in energy consumption, strong antijamming capability, sensitivity height, height collection
One-tenthization, motion full decoupling double mass doublet vibrating micromechanical gyroscope.
Technical scheme: a kind of double mass doublet vibration gyroscope of the micro- full decoupling of silicon of the present invention, including pedestal, the
One minor structure, the second minor structure and minor structure attachment means, are connected by minor structure between the first minor structure and the second minor structure
Device connects, and the first described minor structure and the second minor structure are angular velocity measurement minor structure, and described angular velocity measurement is sub
Structure includes mass, the first fixed pedestal being fixed on pedestal, the second fixed pedestal being fixed on pedestal, is fixed on base
The 3rd fixed pedestal on seat, the 4th fixed pedestal being fixed on pedestal, the first drive mechanism, the second drive mechanism, first
Testing agency, the second testing agency, the first driving parallel girder, the second driving parallel girder, the first detection parallel girder, the second detection are flat
Cross girders, the first affixed u-shaped folded beam, the second affixed u-shaped folded beam, the 3rd affixed u-shaped folded beam, the 4th affixed u-shaped folded beam,
5th affixed u-shaped folded beam, the 6th affixed u-shaped folded beam, the 7th affixed u-shaped folded beam, the 8th affixed u-shaped folded beam；First
Drive mechanism is connected by the first affixed u-shaped folded beam passes through the second affixed u-shaped folding to the first fixed pedestal, the first drive mechanism
Stoplog connects to the second fixed pedestal；Second testing agency by the 3rd affixed u-shaped folded beam connect to the second fixed pedestal,
Two testing agencies are connected to the 3rd fixed pedestal by the 4th affixed u-shaped folded beam；Second drive mechanism passes through the 5th affixed u-shaped
Folded beam is connected and is connected to the 4th fixed pedestal by the 6th affixed u-shaped folded beam to the 3rd fixed pedestal, the second drive mechanism；
First testing agency is connected to the 4th fixed pedestal, the first testing agency by the 8th affixed u by the 7th affixed u-shaped folded beam
Type folded beam connects to the first fixed pedestal；First drive mechanism is arranged on the side of mass, and the second drive mechanism is arranged on
The relative opposite side of mass, is connected by the first driving parallel girder between the first drive mechanism and mass, the second driving machine
It is connected by the second driving parallel girder between structure and mass, to drive this mass in left and right directions on a driving direction
Upper vibration；First testing agency is arranged on the side of mass, and the second testing agency is arranged on the relative opposite side of mass, the
It is connected by the first detection parallel girder between one testing agency and mass, between the second testing agency and mass, pass through second
Detection parallel girder connects, to detect the vibration in the mass on driving direction for the mass.Further, described son
Structural couplings connect and include the first u-shaped folded beam and the second u-shaped folded beam, and the first minor structure and the second minor structure are mutually supported
Lean on, be respectively arranged with the first u-shaped folded beam and the second u-shaped folded beam with even in the top and bottom of the drive mechanism of both next-door neighbours
Connect the first minor structure and the second minor structure.
Further, the first described fixed pedestal, the second fixed pedestal, the 3rd fixed pedestal, the 4th fixed pedestal divide
Be not arranged at a foursquare corner, mass is arranged at this foursquare central authorities, the first drive mechanism, the first testing agency,
Second drive mechanism, the second testing agency are respectively arranged at the outside on this square four side, the wherein first drive mechanism and second
Drive mechanism is arranged at the outside on both sides relatively, and the first testing agency is arranged at relative other both sides with the second testing agency
Outside.
Further, pass through the first framework respectively between the first drive mechanism and the second drive mechanism and the second framework connects
Connect, the first described drive mechanism and the second drive mechanism are micro drives capacitor mechanism, described micro drives capacitor mechanism
Including driving movable comb braces, drive feedback movable comb braces, the driving fixed pedestal being arranged on pedestal, it is arranged at driving admittedly
Determine the driving fixed fingers on pedestal, the drive feedback fixed pedestal being arranged on pedestal and be arranged at drive feedback fixed pedestal
On drive feedback fixed fingers.
Further, the first described testing agency and the second testing agency are miniature detection capacitor mechanism, and described is micro-
Type detection capacitor mechanism includes the first activity detection comb frame, the second activity detection comb frame, the first detection comb fixed pedestal
With the first fixed test comb being arranged on the first detection comb fixed pedestal, the second detection comb fixed pedestal and being arranged on
The second fixed test comb on second detection comb fixed pedestal, the wherein first activity detection comb frame and the first fixed test
Comb matches composition the first comb electric capacity, and the second activity detection comb frame is matched with the second fixed test comb composition second
Comb electric capacity, the first comb electric capacity is arranged in parallel with the second comb electric capacity, and the first comb electric capacity is located near mass one
Side.
Further, described angular velocity measurement minor structure is additionally provided with public electrode lead, drives input lead, driving
Feedback lead, detection signal lead positive pole, detection signal lead negative pole；Wherein public electrode lead is communicated to the first fixed base
Seat；Input lead is driven to be communicated to the driving fixed fingers of the first drive mechanism and the driving fixed fingers of the second drive mechanism；
The drive feedback of drive feedback fixed fingers and the second drive mechanism that drive feedback lead is communicated to the first drive mechanism is fixed
Comb；Detection signal lead positive pole is communicated to the first fixed test comb of the first testing agency and the second of the second testing agency
Fixed test comb；Detection signal lead negative pole is communicated to the second fixed test comb and second testing machine of the first testing agency
First fixed test comb of structure.
Compared with prior art, its advantage is the present invention: (1) two minor structure adopts identical frame-type knot
Structure, is symmetrically arranged it is achieved that gyroscope line motion planar, so that whole microthrust test is affected by temperature and stress
Almost identical；(2) adopt folded beam and parallel girder combination to separate drive part and detection part in each minor structure, realize
Drive part and detection part motion full decoupled, reduce cross-linked impact；(3) adopt about folded beam connection
Two minor structures, reduce interfering between left-right parts, so that two minor structures is being driven and detect that direction is during motion
Opposite line motion is it is ensured that the concordance of the sub- structure motion frequency in left and right two；(4) pass through suitable gage system, formed
Detection differential output, not only can eliminate pedestal along the acceleration noise signal of detection axial direction, due to the impact of the factors such as temperature
Also bottom line can be reduced to by differential output, thus improving the signal to noise ratio of whole gyro；(5) using the side becoming overlapping area
Formula drives and detects, can increase the vibration amplitude of gyroscope, can significantly improve the quality factor driving with sensed-mode,
And improve the sensitivity of gyroscope；(6) movable comb is arranged on comb frame, can be with effectively utilizes space, convenient arrangement comb
Tooth；(7) folded beam being connected with pedestal, all using the structure of u-beam, can effectively be reduced the residual stress that processing introduces, make micro-
Gyro is operated in the range of the linear elastic deformation of beam, and vibration steadily, increases motion amplitude, improves detection sensitivity.This invention
In design also there is no related, similar design at home.
Brief description
Fig. 1 is to be the double mass doublet vibration gyroscope schematic diagram of the micro- full decoupling of silicon of the present invention；
Fig. 2 is the drive mechanism schematic diagram of the double mass doublet vibration gyroscope of the micro- full decoupling of silicon of the present invention；
Fig. 3 is testing agency's schematic diagram of the double mass doublet vibration gyroscope of the micro- full decoupling of silicon of the present invention；
Fig. 4 is that the signal lead in the micro- full decoupling of silicon of the present invention double mass doublet vibration gyroscope lower floors glass pedestal shows
It is intended to.
Specific embodiment
Below technical solution of the present invention is described in detail, but protection scope of the present invention is not limited to described enforcement
Example.
Embodiment 1:
In conjunction with Fig. 1, silicon of the present invention micro- full decoupling pair mass doublet vibration gyroscope, for measurement perpendicular to microthrust test knot
The input angular velocity of structure plane.Gyroscope overall structure is made up of two parts, has the glass of signal of telecommunication lead-out wire including making
Glass pedestal and the microthrust test frame for movement layer being placed in glass pedestal.Gyroscope upper strata frame for movement is identical by a pair
First minor structure 1a, the second minor structure 1b composition, the first minor structure 1a, the symmetrical distribution of the second minor structure 1b, and by the
One u-shaped folded beam 2a, the second u-shaped folded beam 2b connect；Minor structure 1a passes through the first affixed u-shaped folded beam 6a1, the second affixed u
Type folded beam 6a2, the 3rd affixed u-shaped folded beam 7a2, the 4th affixed u-shaped folded beam 7a4, the 5th affixed u-shaped folded beam 6a4,
Six affixed u-shaped folded beam 6a3, the 7th affixed u-shaped folded beam 7a3, the 8th affixed u-shaped folded beam 7a1 are fixing with internal first
Pedestal 10a1, the second fixed pedestal 10a2, the 3rd fixed pedestal 10a3, the 4th fixed pedestal 10a4 are connected, simultaneously the second son knot
Structure 1b with the first minor structure 1a as illustrated, structure is identical, again by the first affixed u-shaped folded beam 6b1, the second affixed u-shaped
Folded beam 6b2, the 3rd affixed u-shaped folded beam 7b2, the 4th affixed u-shaped folded beam 7b4, the 5th affixed u-shaped folded beam 6b4, the 6th
Affixed u-shaped folded beam 6b3, the 7th affixed u-shaped folded beam 7b3, the 8th affixed u-shaped folded beam 7b1 and the first internal fixed base
Seat 10b1, the second fixed pedestal 10b2, the 3rd fixed pedestal 10b3, the 4th fixed pedestal 10b4 are connected, its annexation and the
One minor structure is identical.Used in the present embodiment, substrate is substrate of glass, it is possible to use other base material such as silicon, polymer,
All fixed pedestals are all installed on fixed pedestal bonding point on the glass substrate, make the mechanical structure portion on upper strata vacantly under
On the glass substrate part of layer.
Taking the first minor structure 1a as a example illustrate below.First minor structure 1a is by mass 3a, the first drive mechanism
11a1 and the second drive mechanism 11a2, the first testing agency 15a1 and the second testing agency 15a2, the first affixed u-shaped folded beam
6a1, the second affixed u-shaped folded beam 6a2, the 3rd affixed u-shaped folded beam 7a2, the 4th affixed u-shaped folded beam 7a4, the 5th affixed u
Type folded beam 6a4, the 6th affixed u-shaped folded beam 6a3, the 7th affixed u-shaped folded beam 7a3, the 8th affixed u-shaped folded beam 7a1,
One drives parallel girder 8a1, the second driving parallel girder 8a2, the first detection parallel girder 9a1, the second detection parallel girder 9a2 and first solid
Determine pedestal 10a1, the second fixed pedestal 10a2, the 3rd fixed pedestal 10a3, the 4th fixed pedestal 10a4 composition；First minor structure
The first drive area 4a1 of 1a, the second drive area 4a2 are arranged in the left and right sides of mass 3a, the first detection zone
5a1, the second detection zone 5a2 are arranged in the both sides up and down of mass 3a；First drive mechanism of the first drive area 4a1
Second drive mechanism 11a2 of 11a1 and the second drive area 4a2 drives parallel girder 8a1, the second driving parallel by first respectively
Beam 8a2 is connected with mass 3a；First testing agency 15a1 of the first detection zone 5a1 and the of the second detection zone 5a2
Two testing agency 15a2 are connected with mass 3a by the first detection parallel girder 9a1, the second detection parallel girder 9a2 respectively；The
One drive mechanism 11a1 is connected to the first fixed pedestal 10a1, the first drive mechanism 11a1 by the first affixed u-shaped folded beam 6a1
Connected to the second fixed pedestal 10a2 by the second affixed u-shaped folded beam 6a2；Second testing agency 15a2 passes through the 3rd affixed u
Type folded beam 7a2 connects to the second fixed pedestal 10a2, the second testing agency 15a2 by the 4th affixed u-shaped folded beam 7a4 even
It is connected to the 3rd fixed pedestal 10a3；Second drive mechanism 11a2 is connected to the 3rd fixed base by the 5th affixed u-shaped folded beam 6a4
Seat 10a3, the second drive mechanism are connected to the 4th fixed pedestal 10a4 by the 6th affixed u-shaped folded beam 6a3；First testing machine
Structure 15a1 by the 7th affixed u-shaped folded beam 7a3 connect to the 4th fixed pedestal 10a4, the first testing agency 15a1 pass through the 8th
Affixed u-shaped folded beam 7a1 connects to the first fixed pedestal 10a1.
Equally have similarly, for the second minor structure 1b, the first minor structure 1b is by mass 3b, the first drive mechanism 11b1
With the second drive mechanism 11b2, the first testing agency 15b1 and the second testing agency 15b2, the first affixed u-shaped folded beam 6b1,
Two affixed u-shaped folded beam 6b2, the 3rd affixed u-shaped folded beam 7b2, the 4th affixed u-shaped folded beam 7b4, the 5th affixed u-shaped fold
Beam 6b4, the 6th affixed u-shaped folded beam 6b3, the 7th affixed u-shaped folded beam 7b3, the 8th affixed u-shaped folded beam 7b1, the first driving
Parallel girder 8b1, the second driving parallel girder 8b2, the first detection parallel girder 9b1, the second detection parallel girder 9b2 and the first fixed pedestal
10b1, the second fixed pedestal 10b2, the 3rd fixed pedestal 10b3, the 4th fixed pedestal 10b4 composition；The of first minor structure 1b
One drive area 4b1, the second drive area 4b2 are arranged in the left and right sides of mass 3b, the first detection zone 5b1,
Two detection zones 5b2 are arranged in the both sides up and down of mass 3b；First drive mechanism 11b1 of the first drive area 4b1 and
Second drive mechanism 11b2 of the second drive area 4b2 drives parallel girder 8b1, the second driving parallel girder 8b2 by first respectively
It is connected with mass 3b；First testing agency 15b1 of the first detection zone 5b1 and the second detection of the second detection zone 5b2
Mechanism 15b2 is connected with mass 3b by the first detection parallel girder 9b1, the second detection parallel girder 9b2 respectively；First driving
Mechanism 11b1 is connected by the first affixed u-shaped folded beam 6b1 and passes through the to the first fixed pedestal 10b1, the first drive mechanism 11b1
Two affixed u-shaped folded beam 6b2 connect to the second fixed pedestal 10b2；Second testing agency 15b2 passes through the 3rd affixed u-shaped and folds
Beam 7b2 is connected and is connected to by the 4th affixed u-shaped folded beam 7b4 to the second fixed pedestal 10b2, the second testing agency 15b2
Three fixed pedestal 10b3；Second drive mechanism 11b2 is connected to the 3rd fixed pedestal by the 5th affixed u-shaped folded beam 6b4
10b3, the second drive mechanism are connected to the 4th fixed pedestal 10b4 by the 6th affixed u-shaped folded beam 6b3；First testing agency
15b1 is connected solid by the 8th to the 4th fixed pedestal 10b4, the first testing agency 15b1 by the 7th affixed u-shaped folded beam 7b3
Meet u-shaped folded beam 7b1 to connect to the first fixed pedestal 10b1.
The first driving parallel girder 8a1 in first minor structure 1a, second drive parallel girder 8a2 identical, one end and matter
Gauge block 3a connects, and the other end respectively with the first drive mechanism 11a1, the second driving structure 11a2 connect；Detection in minor structure is put down
Cross girders combination the first detection parallel girder 9a1, the second detection parallel girder 9a2 are identical, and one end is connected with mass 3a, the other end
Respectively with the first testing agency 15a1 and the second testing agency 15a2 connects.First drives parallel girder 8a1, the second driving parallel girder
8a2 combination with first detection parallel girder 9a1, second detect parallel girder 9a2 combine by mass 3a x-axis and y-axis direction fortune
Move and isolated.First drive mechanism 11a1, the second drive mechanism 11a2 are limited in the motion of x-axis direction, in minor structure
First testing agency 15a1, the second testing agency 15a2 are limited in the motion of y-axis direction.
When operating, the first drive mechanism 11a1, the second drive mechanism 11a2 are passed through in the presence of input drive signal
First driving parallel girder 8a1, the second driving parallel girder 8a2 drive mass 3a to vibrate back and forth in the direction of the x axis.Now, if
There is turning rate input in the z-axis direction, then mass 3a is subject to the Coriolis that x-axis produces when vibrating in the y-axis direction
Power and produce forced vibration in y-direction.When the vibration on x direction is constant, the Coriolis force of forced vibration on y direction
It is proportional to the input angular velocity on z-axis direction, such that it is able to by the first testing agency 15a1, the second testing agency 15a2 measurement
The amplitude of mass 3a forced vibration on the y axis learns the input angular velocity size on z-axis direction.
The drive mechanism of microthrust test is as shown in Fig. 2 by the first drive mechanism 11a1, the second drive mechanism 11a2, the first frame
Frame 14a1, the second framework 14a2；First drive mechanism 11a1, the second drive mechanism 11a2 are arranged in the mass 3a left and right sides and lead to
Cross the first framework 14a1, the second framework 14a2 connects.First drive mechanism is symmetrical arranged with the second drive mechanism, but due to two
Drive mechanism will produce driving force in the same direction to mass, therefore the first drive mechanism in setting as shown in Figure 2 and the second driving
In mechanism, as driving comb, the comb structure in left side feeds back signal as drive feedback comb to the comb structure being right side
Driving signal frequency is adjusted, so that whole device is in optimum Working in the circuit generating to drive signal.Below with
Illustrate as a example one drive mechanism 11a1, in the present embodiment, the first drive mechanism 11a1 includes upper and lower two identical comb framves
Structure, but a comb frame structure can also be only set without affecting the realization of the present invention.Below with the comb frame on top
As a example structure: as shown in Fig. 2 each comb frame is arranged in parallel and square that be located parallel to mass approaches, from away from
Draw near from mass and be followed successively by drive feedback movable comb braces 12a1, drive feedback fixed fingers 13a1, drive fixing comb
Tooth 13a2, driving movable comb braces 12a2, wherein, drive fixed fingers 13a2 to be arranged at 10a7 on driving fixed pedestal, drive
Feedback fixed fingers 13a1 are arranged on drive feedback fixed pedestal 10a5.By driving applying band in fixed fingers 13a2 straight
The alternating voltage of stream biasing, to drive mass 3a to do intermittent control shaking using electrostatic drive mode, by the fixing comb of drive feedback
Tooth 13a1 come to detect powered motion condition feedback adjust drive circuit.The drive feedback activity comb of its middle and lower part comb frame structure
Frame 13a5, drive feedback fixed fingers 12a5, driving fixed fingers 12a6, driving movable comb braces 13a6, driving fixed pedestal
10a8 and drive feedback fixed pedestal 10a6 is equally arranged.The drive feedback of the top comb frame in the second drive mechanism 11a2 is lived
Dynamic comb frame 12a3, drive feedback fixed fingers 13a3, driving fixed fingers 13a4, driving movable comb braces 12a4, driving are solid
Determine the drive feedback movable comb braces 12a7 of 10a11 on pedestal, drive feedback fixed pedestal 10a9 and bottom comb frame, drive instead
Feedback fixed fingers 13a7, driving fixed fingers 13a8, driving movable comb braces 12a8, driving fixed pedestal 10a12 and driving are anti-
Feedback fixed pedestal 10a10 is similarly arranged.
Second minor structure 1b is by the first drive mechanism 11b1, the second drive mechanism 11b2, the first framework 14b1, the second framework
14b2；First drive mechanism 11b1, the second drive mechanism 11b2 be arranged in the mass 3b left and right sides pass through the first framework 14b1,
Second framework 14b2 connects.First drive mechanism is symmetrical arranged with the second drive mechanism, but because two drive mechanisms will be confronted
Gauge block produces driving force in the same direction, therefore in first drive mechanism and the second drive mechanism of setting as shown in Figure 2, is right side
Comb structure as driving comb, the comb structure in left side feeds back what signal to drive signal generated as drive feedback comb
Driving signal frequency is adjusted, so that whole device is in optimum Working in circuit.With the first drive mechanism 11b1 it is below
Example illustrates, and in the present embodiment, the first drive mechanism 11b1 includes upper and lower two identical comb frame structures, but can also
Only one comb frame structure of setting is without affecting the realization of the present invention.Below taking the comb frame structure on top as a example: as Fig. 2 institute
Show, each comb frame is arranged in parallel and square that be located parallel to mass approaches, from drawing near apart from mass
It is followed successively by drive feedback movable comb braces 12b1, drive feedback fixed fingers 13b1, drive fixed fingers 13b2, drive movable comb
Braces 12b2, wherein, drives fixed fingers 13b2 to be arranged at 10b7 on driving fixed pedestal, drive feedback fixed fingers 13b1 set
It is placed on drive feedback fixed pedestal 10b5.By applying the alternating voltage with direct current biasing in driving fixed fingers 13b2,
To drive mass 3b to do intermittent control shaking using electrostatic drive mode, to detect driving fortune by drive feedback fixed fingers 13b1
Dynamic condition feedback adjusts drive circuit.In order to realize the anti-phase driving of two mass 3a, 3b, drive fixed fingers 13a2 and 13b2
The anti-phase AC signal of upper applying.The drive feedback movable comb braces 13b5 of its middle and lower part comb frame structure, drive feedback are fixed
On comb 12b5, driving fixed fingers 12b6, driving movable comb braces 13b6, driving fixed pedestal, 10b8 and drive feedback are fixed
Pedestal 10b6 is equally arranged.The drive feedback movable comb braces 12b3 of the top comb frame in the second drive mechanism 11b2, driving
Feedback fixed fingers 13b3, driving fixed fingers 13b4, driving movable comb braces 12b4, driving fixed pedestal 10b11, driving are anti-
The drive feedback movable comb braces 12b7 of feedback fixed pedestal 10b9 and bottom comb frame, drive feedback fixed fingers 13b7, driving
Fixed fingers 13b8, driving movable comb braces 12b8, driving fixed pedestal 10b12 and drive feedback fixed pedestal 10b10 are also same
Sample is arranged.
The testing agency of microthrust test as shown in figure 3, the testing agency of the first minor structure 1a be located at the first detection zone 5a1 and
Second detection zone 5a2, is respectively located at the first testing agency 15a1 of the first detection zone 5a1 and is located at the second detection zone
The second testing agency 15a2 of 5a2；First testing agency 15a1 and the second testing agency 15a2 is arranged in mass 3a upper and lower two
Side.First testing agency 15a1 is equally arranged with the second testing agency 15a2, the first testing agency in the present embodiment as shown in Figure 3
15a1 is arranged to left and right identical comb frame structure.Only one this kind comb frame structure can also be set in the middle of actual and not affect
The realization of the present invention.The comb frame structure of wherein left part includes four parallel comb framves, the pros being located parallel to mass
One side that shape approaches, is from the close-by examples to those far off followed successively by the first activity detection comb frame 16a2, the first fixed test comb apart from mass
17a2, the second fixed test comb 17a1, the second activity detection comb frame 16a1, the wherein first fixed test comb 17a2 setting
On the first detection comb fixed pedestal 10a15, the second fixed test comb 17a1 be arranged on the second detection comb fixed pedestal
On 10a13, the wherein first activity detection comb frame 16a2 is matched with the first fixed test comb 17a2 and constitutes the first comb electricity
Hold, the second activity detection comb frame 16a1 is matched with the second fixed test comb 17a1 and constitutes the second comb electric capacity, the first comb
Tooth electric capacity is located at the second comb electric capacity near the side of mass.The comb frame symmetrical configuration setting on right side, and be again provided with
First detection comb fixed pedestal 10a16 and the second detection comb fixed pedestal 10a14.Same for the second testing agency 15a2
First activity detection comb frame 16a3 of comb frame structure, the first fixed test comb 17a3, the second fixing inspection on the left of being provided with
Survey comb 17a4, the second activity detection comb frame 16a4, the first detection comb fixed pedestal 10a17 and the second detection comb to fix
Pedestal 10a19, the comb frame symmetrical configuration setting on right side, and it is again provided with the first detection comb fixed pedestal 10a18 and the
Two detection comb fixed pedestal 10a20.
Testing agency for the second minor structure 1b is located at the first detection zone 5b1 and the second detection zone 5b2, respectively
Positioned at the first testing agency 15b1 and the second testing agency 15b2 being located at the second detection zone 5b2 of the first detection zone 5b1,
First testing agency 15b1 and the second testing agency 15b2 is arranged in the upper and lower both sides of mass 3b.First testing agency 15b1 and
Two testing agency 15b2 are equally arranged, and in the present embodiment as shown in Figure 3, the first testing agency 15b1 is arranged to left and right identical comb
Braces structure.Only one this kind comb frame structure can also be set in the middle of actual and not affect the realization of the present invention.Wherein left part
Comb frame structure include four parallel comb framves, the square being located parallel to mass approaches, apart from quality
Block is from the close-by examples to those far off followed successively by the first activity detection comb frame 16b2, the first fixed test comb 17b2, the second fixed test comb
17b1, the second activity detection comb frame 16b1, the wherein first fixed test comb 17b2 is arranged on the first detection comb fixed base
Seat 10b15 is upper, the second fixed test comb 17b1 is arranged on the second detection comb fixed pedestal 10b13, and wherein first is movable
Detection comb frame 16b2 is matched with the first fixed test comb 17b2 and constitutes the first comb electric capacity, the second activity detection comb frame
16b1 is matched with the second fixed test comb 17b1 and constitutes the second comb electric capacity, and it is close that the first comb portion is located at the second comb portion
The side of mass.Right side comb frame symmetrical configuration setting, and be again provided with the first detection comb fixed pedestal 10b16 and
Second detection comb fixed pedestal 10b14.Second testing agency 15b2 is again provided with to the first of left side comb frame structure
Activity detection comb frame 16b3, the first fixed test comb 17b3, the second fixed test comb 17b4, the second activity detection comb
Frame 16b4, the first detection comb fixed pedestal 10b17 and the second detection comb fixed pedestal 10b19, the comb frame structure on right side
It is symmetrical arranged, and be again provided with the first detection comb fixed pedestal 10b18 and the second detection comb fixed pedestal 10b20.
Glass pedestal is as shown in figure 4, include signal lead and metal silicon/glass bonding point.Wherein first minor structure 1a
Signal lead includes public electrode lead 19a, is just driving input lead 20a1, drive feedback lead 21a1, detection signal lead
Pole 22a1, detection signal lead negative pole 22a2, each lead links as shown in the figure, and public electrode lead is communicated to the first fixed base
Seat 18a1；Input lead 20a1 is driven to be communicated to driving fixed fingers 13a2 and the 12a6 of the first drive mechanism；Drive feedback is drawn
Line 21a1 is communicated to drive feedback fixed fingers 13a1 and the 12a5 of the first drive mechanism；Detection signal lead positive pole 22a1 connects
To the first fixed test comb 17a2 of the first testing agency and the second fixed test comb 17a4 of the second testing agency；Detection
Signal lead negative pole 22a2 is communicated to the second fixed test comb 17a1 of the first testing agency and the first of the second testing agency
Fixed test comb 17a3.Metal silicon/glass bonding point includes the first fixed pedestal bonding point 18a1, the second fixed pedestal bonding
Point 18a2, the 3rd fixed pedestal bonding point 18a3, the 4th fixed pedestal bonding point 18a4, driving fixed pedestal bonding point 18a7,
Drive fixed pedestal bonding point 18a8, drive fixed pedestal bonding point 18a11, drive fixed pedestal bonding point 18a12, drive anti-
Feedback fixed pedestal bonding point 18a5, drive feedback fixed pedestal bonding point 18a6, drive feedback fixed pedestal bonding point 18a9, drive
Dynamic feedback fixed pedestal bonding point 18a10, the second detection comb fixed pedestal bonding point 18a13, the second detection comb fixed base
Seat bonding point 18a14, the first detection comb fixed pedestal bonding point 18a15, the first detection comb fixed pedestal bonding point
18a16, the first detection comb fixed pedestal bonding point 18a17, the first detection comb fixed pedestal bonding point 18a18, the second inspection
Survey comb fixed pedestal bonding point 18a19, the second detection comb fixed pedestal bonding point 18a20.
The signal lead of the second minor structure 1b includes public electrode lead 19b, drives input lead 21b1, drive feedback to draw
Line 20b1, detection signal lead positive pole 22b1, detection signal lead negative pole 22b2, each lead links as shown in the figure, and common electrical
Pole lead is communicated to the 3rd fixed pedestal 18b3；Input lead 21b1 is driven to be communicated to the driving fixed fingers of the first drive mechanism
13b2 and 12b6；Drive feedback lead 20b1 is communicated to drive feedback fixed fingers 13b1 and the 12b5 of the first drive mechanism；Inspection
Survey that signal lead positive pole 22b1 is communicated to the second fixed test comb 17b1 of the first testing agency and the second testing agency the
One fixed test comb 17b3；Detection signal lead negative pole 22b2 is communicated to the first fixed test comb of the first testing agency
17b2 and the second fixed test comb 17b4 of the second testing agency.Metal silicon/glass bonding point includes the first fixed pedestal key
Chalaza 18b1, the second fixed pedestal bonding point 18b2, the 3rd fixed pedestal bonding point 18b3, the 4th fixed pedestal bonding point
18b4, drives fixed pedestal bonding point 18b7, drives fixed pedestal bonding point 18b8, drives fixed pedestal bonding point 18b11, drive
Dynamic fixed pedestal bonding point 18b12, drive feedback fixed pedestal bonding point 18b5, drive feedback fixed pedestal bonding point 18b6,
Drive feedback fixed pedestal bonding point 18b9, dynamic feedback fixed pedestal bonding point 18b10, the second detection comb fixed pedestal bonding
Point 18b13, the second detection comb fixed pedestal bonding point 18b14, the first detection comb fixed pedestal bonding point 18b15, first
Detection comb fixed pedestal bonding point 18b16, the first detection comb fixed pedestal bonding point 18b17, the first detection comb are fixed
Pedestal bonding point 18b18, the second detection comb fixed pedestal bonding point 18b19, the second detection comb fixed pedestal bonding point
18b20.
Each fixed pedestal: 10a1,10a2,10a3,10a4,10a5,10a6,10a7,10a8,10a9,10a10,
10a11、10a12、10a13、10a14、10a15、10a16、10a17、10a18、10a19、10a20、10b1、10b2、10b3、
10b4、10b5、10b6、10b7、10b8、10b9、10b10、10b11、10b12、10b13、10b14、10b15、10b16、
10b17,10b18,10b19,10b20 respectively correspond to bonding point 18a1,18a2,18a3,18a4,18a5,18a6,18a7,18a8,
18a9、18a10、18a11、18a12、18a13、18a14、18a15、18a16、18a17、18a18、18a19、18a20、18b1、
18b2、18b3、18b4、18b5、18b6、18b7、18b8、18b9、18b10、18b11、18b12、18b13、18b14、18b15、
18b16,18b17,18b18,18b19,18b20 are connected.
Silicon of the present invention micro- full decoupling pair mass doublet vibration gyroscope, using monolateral electrostatic drive, differential capacitor detects
Working method, on the fixed drive comb of drive mechanism apply the AC drive voltage with direct current biasing after, produce alternation
Driving force, in the presence of alternation driving force, drives the first drive mechanism 11a1, the 2nd 1 drive mechanism 11a2 to pass through first and drives
Dynamic parallel girder 8a1, the second driving parallel girder 8a2 drive mass 3a to do opposite simple harmonic quantity linearly coupled along x direction, drive first
Drive mechanism 11b1, the 2nd 1 drive mechanism 11b2 drive parallel girder 8b1, the second driving parallel girder 8b2 to carry kinoplaszm by first
Gauge block 3b does opposite simple harmonic quantity linearly coupled along x direction；And now the first testing agency 15a1 and the second testing agency 15a2 by
In the 8th affixed u-shaped folded beam 7a1, the 3rd affixed u-shaped folded beam 7a2, the 7th affixed u-shaped folded beam 7a3, the 4th affixed u-shaped
Folded beam 7a4 is strapped in driving direction remains stationary it is achieved that driving the decoupling to detection；When gyroscope has outside z-axis
Boundary's input angle speed ωzWhen, according to the right-hand rule, mass 3a is acted on by Corioli's acceleration in output shaft y-axis, in Ge Shi
In the presence of inertia force, mass 3a makees opposite simple harmonic quantity linearly coupled along sensitive axes y-axis, and mass 3b is along sensitive axes y-axis
Make contrary simple harmonic quantity linearly coupled with mass 3a.Drive first by the first detection parallel girder 9a1 and the second detection parallel girder 9a2
Testing agency 15a1 and the second testing agency 15a2 makees opposite simple harmonic quantity linearly coupled in the y-direction, and now the first drive part
4a1, the second drive part 4a2 are due to by the first affixed u-shaped folded beam 6a1, the second affixed u-shaped folded beam 6a2, the 6th affixed
U-shaped folded beam 6a3, the constraint of the 5th affixed u-shaped folded beam 6a4 and remains stationary are it is achieved that detection is to the decoupling driving；Pass through
Fixed test comb the second fixed test comb 17a1 of the first testing agency 15a1 and the second testing agency 15a2, the first fixation
Detection comb 17a2, the first fixed test comb 17a3, the second fixed test comb 17a4 are by this simple harmonic quantity linearly coupled through electronics
After circuit is processed, it is possible to obtain voltage signal.The principle of the second minor structure 1b is also identical.Output voltage signal be minor structure 3a and
The difference of 3b output voltage signal, and the size of output voltage signal is proportional to the size of input angle speed.By follow-up phase demodulation
Device compares the phase relation of output voltage signal and pumping signal, then can distinguish the direction of input angle speed.
Although as described above, having represented with reference to specific preferred embodiment and having described the present invention, it must not be explained
It is the restriction to the present invention itself.Under the premise of the spirit and scope of the present invention defining without departing from claims, can be right
Various changes can be made in the form and details for it.
Claims (6)
1. a kind of silicon micro- full decoupling pair mass doublet vibration gyroscope is it is characterised in that include pedestal, the first minor structure
(1a), the second minor structure (1b) and minor structure attachment means, pass through son between the first minor structure (1a) and the second minor structure (1b)
Structural couplings connect, and described the first minor structure (1a) and the second minor structure (1b) are angular velocity measurement minor structure, institute
The angular velocity measurement minor structure stated includes mass (3a), the first fixed pedestal (10a1) being fixed on pedestal, is fixed on base
The second fixed pedestal (10a2) on seat, the 3rd fixed pedestal (10a3) being fixed on pedestal, be fixed on pedestal the 4th
Fixed pedestal (10a4), the first drive mechanism (11a1), the second drive mechanism (11a2), the first testing agency (15a1), second
Testing agency (15a2), first drive parallel girder (8a1), second drive parallel girder (8a2), the first detection parallel girder (9a1), the
Two detections parallel girder (9a2), the first affixed u-shaped folded beam (6a1), the second affixed u-shaped folded beam (6a2), the 3rd affixed u-shaped folding
Stoplog (7a2), the 4th affixed u-shaped folded beam (7a4), the 5th affixed u-shaped folded beam (6a4), the 6th affixed u-shaped folded beam
(6a3), the 7th affixed u-shaped folded beam (7a3), the 8th affixed u-shaped folded beam (7a1)；First drive mechanism (11a1) passes through the
One affixed u-shaped folded beam (6a1) connects passes through the second affixed u to the first fixed pedestal (10a1), the first drive mechanism (11a1)
Type folded beam (6a2) connects to the second fixed pedestal (10a2)；Second testing agency (15a2) passes through the 3rd affixed u-shaped folded beam
(7a2) connect and pass through the 4th affixed u-shaped folded beam (7a4) even to the second fixed pedestal (10a2), the second testing agency (15a2)
It is connected to the 3rd fixed pedestal (10a3)；Second drive mechanism (11a2) is connected to the 3rd by the 5th affixed u-shaped folded beam (6a4)
Fixed pedestal (10a3), the second drive mechanism are connected to the 4th fixed pedestal by the 6th affixed u-shaped folded beam (6a3)
(10a4)；First testing agency (15a1) by the 7th affixed u-shaped folded beam (7a3) connect to the 4th fixed pedestal (10a4),
First testing agency (15a1) is connected to the first fixed pedestal (10a1) by the 8th affixed u-shaped folded beam (7a1)；First driving
Mechanism (11a1) is arranged on the side of mass (3a), and the second drive mechanism (11a2) is arranged on relative another of mass (3a)
Side, is connected by the first driving parallel girder (8a1) between the first drive mechanism (11a1) and mass (3a), the second drive mechanism
(11a2) it is connected by the second driving parallel girder (8a2), to drive this matter on a driving direction between mass (3a)
Gauge block (3a) vibrates；First testing agency (15a1) is arranged on the side of mass (3a), and the second testing agency (15a2) is arranged
In the relative opposite side of mass (3a), by the first detection parallel girder between the first testing agency (15a1) and mass (3a)
(9a1) connect, be connected by the second detection parallel girder (9a2) between the second testing agency (15a2) and mass (3a), to examine
Mass metering block (3a) is in the vibration of the mass (3a) on driving direction.
2. the double mass doublet vibration gyroscope of the micro- full decoupling of silicon according to claim 1 is it is characterised in that described son
Structural couplings connect and include the first u-shaped folded beam (2a) and the second u-shaped folded beam (2b), the first minor structure (1a) and second
Minor structure (1b) abuts, is respectively arranged with the first u-shaped folded beam in the top and bottom of the drive mechanism of both next-door neighbours
(2a) He the second u-shaped folded beam (2b) is to connect the first minor structure (1a) and the second minor structure (1b).
3. the double mass doublet vibration gyroscope of the micro- full decoupling of silicon according to claim 1 is it is characterised in that described the
One fixed pedestal (10a1), the second fixed pedestal (10a2), the 3rd fixed pedestal (10a3), the 4th fixed pedestal (10a4) are respectively
It is arranged at a foursquare corner, mass (3a) is arranged at this foursquare central authorities, the first drive mechanism (11a1), the first inspection
Survey mechanism (15a1), the second drive mechanism (11a2), the second testing agency (15a2) are respectively arranged at the outer of this square four side
Side, the wherein first drive mechanism (11a1) is arranged at the outside on relative both sides, the first testing machine with the second drive mechanism (11a2)
Structure (15a1) is arranged at the outside on relative other both sides with the second testing agency (15a2).
4. silicon micro- full decoupling pair mass doublet vibration gyroscope according to claim 1 is it is characterised in that first drives
Pass through the first framework (14a1) respectively between mechanism (11a1) and the second drive mechanism (11a2) and the second framework (14a2) connect,
Described the first drive mechanism (11a1) and the second drive mechanism (11a2) are micro drives capacitor mechanism, described micro drives
Capacitor mechanism includes driving movable comb braces (12a2), drive feedback movable comb braces (12a1), the driving being arranged on pedestal
Fixed pedestal (10a7), be arranged at drive fixed pedestal on (10a7) driving fixed fingers (13a2), be arranged on pedestal
Drive feedback fixed pedestal (10a5) and the drive feedback fixed fingers being arranged on drive feedback fixed pedestal (10a5)
(13a1).
5. the double mass doublet vibration gyroscope of the micro- full decoupling of silicon according to claim 4 is it is characterised in that described the
One testing agency (15a1) and the second testing agency (15a2) are miniature detection capacitor mechanism, described miniature detection capacitor mechanism
Including the first activity detection comb frame (16a2), the second activity detection comb frame (16a1), the first detection comb fixed pedestal
(10a15) with the first fixed test comb (17a2) being arranged on the first detection comb fixed pedestal (10a15), the second detection
Comb fixed pedestal (10a13) and the second fixed test comb being arranged on the second detection comb fixed pedestal (10a13)
(17a1), the wherein first activity detection comb frame (16a2) is matched with the first fixed test comb (17a2) and constitutes the first comb
Electric capacity, the second activity detection comb frame (16a1) is matched with the second fixed test comb (17a1) and constitutes the second comb electric capacity,
First comb electric capacity is located at the second comb electric capacity near the side of mass.
6. the double mass doublet vibration gyroscope of the micro- full decoupling of silicon according to claim 5 is it is characterised in that described angle
Tachometric survey minor structure is additionally provided with public electrode lead (19a), drives input lead (20a1), drive feedback lead
(21a1), detection signal lead positive pole (22a1), detection signal lead negative pole (22a2)；Wherein public electrode lead is communicated to
One fixed pedestal (18a1)；Input lead (20a1) is driven to be communicated to the first driving fixed fingers (13a2) of the first drive mechanism
Drive fixed fingers (12a6) with second；The first drive feedback that drive feedback lead (21a1) is communicated to the first drive mechanism is solid
Determine comb (13a1) and the second drive feedback fixed fingers (12a5)；Detection signal lead positive pole (22a1) is communicated to the first detection
First fixed test comb (17a2) of mechanism and the second fixed test comb (17a4) of the second testing agency；Detection signal draws
Line negative pole (22a2) is communicated to the second fixed test comb (17a1) of the first testing agency and the first of the second testing agency is consolidated
Determine detection comb (17a3).
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