CN105157726B - The mechanical coupling error restraining device and method of double quality silicon micro-gyroscopes - Google Patents
The mechanical coupling error restraining device and method of double quality silicon micro-gyroscopes Download PDFInfo
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- CN105157726B CN105157726B CN201510479060.0A CN201510479060A CN105157726B CN 105157726 B CN105157726 B CN 105157726B CN 201510479060 A CN201510479060 A CN 201510479060A CN 105157726 B CN105157726 B CN 105157726B
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
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Abstract
The present invention discloses a kind of the mechanical coupling error restraining device and method of double quality silicon micro-gyroscopes.The device includes upper and lower two layers, upper strata is the mechanical structure of silicon micro-gyroscope, lower floor is the glass substrate for being stained with signal lead, the mechanical structure of gyroscope is made up of two identical minor structures of symmetrical placement, respectively by driving coupling folded beam to be connected with crossbeam between two minor structures so that two minor structures are all interrelated in driven-mode and sensed-mode.Driving decoupling beam uses the form of single-beam, and ratio of rigidity of the regulation crossbeam underbeam with detecting folded beam in the present invention, and the turning effect and mechanical coupling error of testing agency are eliminated in structure design.The length of pedestal crossbeam and the position of anchor point are adjusted, the motion for making testing agency under sensed-mode is linear.The use of fixing beam is balanced, and sets the ratio of rigidity that folded beam is coupled with driving, is consistent the motion state of the drive mechanism of the left and right of mass.
Description
Technical field
The invention belongs to MEMS (MEMS) and micro-inertia measuring technology, more particularly to a kind of double quality silicon micro-gyroscopes
The mechanical coupling error restraining device and method of instrument.
Background technology
The 1980s mid-term, with the progress of semiconductor processing technology, the miniaturization of mechanical structure and electronic system
With integrating --- the appearance of MEMS (MEMS) technology, a revolution is brought to inertial sensor field.It is real from De Leipo
Since testing the room silicon micro-gyroscope that it was developed in rollout in 1991, mixed based on Surface Machining, silicon bulk fabrication or both
The silicon micro-gyroscope of process technology continues to bring out.Micro-mechanical gyroscope with its miniaturization with it is integrated, reliability is high, it is low in energy consumption,
It is easy to digitlization and the intelligent, excellent properties such as response is fast, determines that it has broad application prospects and application value in army.
Silicon micro-gyroscope can be divided into speed level, Tactics-level and inertial navigation level according to different performance rates.The silicon micro-gyroscope of speed machine can
Used in fields such as automobile, robot, Industry Control, toys.The silicon micro-gyroscope of Tactics-level is mainly used in aerial, ground, sea
Navigation and the military field such as baseline system, tactical missile, intelligent projectile, new concept weapon in posture course.The silicon of inertial navigation level is micro-
Gyroscope, which is used for field, the inert stage silicon micro-gyroscopes such as strategic missile, spacecraft, autonomous type Submarine Navigation, also turns into each hair
Up to the focus of country's research.
Research of the China for silicon micro-gyroscope is started late, and the research for silicon micro-gyroscope at present remains in experiment
The room stage, and property indices much lag, and seriously limit Military Application and the commercialization of the silicon micro-gyroscope of independent development
Change process.Based on double quality silicon micro-gyroscopes of simple substance amount silicon micro-gyroscope theoretical foundation, by the same width of driven-mode with frequency
Reverse drive, the Differential Detection of sense mode Corioli's acceleration is realized, it can effectively eliminate the common modes such as axial acceleration and do
The influence disturbed, environmental suitability is stronger, is the preferred structure of engineer applied.But due to the presence of the factors such as manufacturing deficiency, driving
The vibrational energy of mode can also be coupled to sensed-mode, produce larger output error.For this case, silicon micro-gyroscope
Structure design experienced never decoupling and be decoupled to half, then the evolution to full decoupling.The structure of full decoupling formally sees solution
Coupling is most thorough, but due to the defects of some structure designs are present so that certain coupling effect between the two still be present, and
It is also possible to produce the effect such as part-structure torsion, servo-actuated, thus makes the performance of silicon micro-gyroscope reduce.Therefore, designing
It should be noted that the form of structure and the layout of dependency structure, inherently reduce error, improve the performance of silicon micro-gyroscope in journey.
The content of the invention
Goal of the invention：In order to overcome the deficiencies in the prior art, the present invention provides a kind of driven-mode and detection mould
The full decoupling of state, detection sensitivity height, strong antijamming capability, double quality silicon micro-gyroscopes that temperature performance is superior, quadrature error is small
The mechanical coupling error restraining device and method of instrument.
Technical scheme：To achieve the above object, the mechanical coupling error of double quality silicon micro-gyroscopes of the invention suppresses dress
Put including upper and lower two layers, upper strata is vibrating machine structure, and lower floor is glass substrate；
The glass substrate includes some contact conductors and some bonding points, and the contact conductor includes public electrode, driven
Three kinds of moving electrode and detecting electrode；
The vibrating machine structure includes the identical simple substance angulation velocity measuring unit of two symmetrical placements
Minor structure；Driving coupling folded beam, and two simple substance angulations are connected between two simple substance angulation velocity measuring unit minor structures
Velocity measuring unit minor structure respectively has a crossbeam up and down, and two simple substance angulation velocity measuring unit minor structure the same sides
Crossbeam is connected；The crossbeam is connected by pedestal straight beam with four overall fixed anchor points at vibrating machine structure corner；
Each simple substance angulation velocity measuring unit minor structure is steady including sensitive-mass, drive mechanism, testing agency, structure
Gu equalizer bar, driving folded beam, detection folded beam, driving decoupling beam, detection decoupling beam and minor structure fixed anchor point；The driving
Mechanism is symmetrically disposed at the left and right sides of sensitive-mass, and beam and sensitivity are decoupled by being distributed in the detection at left and right sides of sensitive-mass
Quality is connected, and forms the type of drive recommended to sensitive-mass；The testing agency is symmetrically disposed at up and down the two of sensitive-mass
Side, the driving by being distributed in both sides above and below sensitive-mass decouple beam and are connected with sensitive-mass, and brother's formula is detected in a manner of recommending
The size of power；The drive mechanism surrounds a hollow with testing agency, and the minor structure fixed anchor point has four, divided respectively
At the inside corner for the hollow that cloth surrounds in drive mechanism and testing agency；Drive mechanism is by being distributed in its upper and lower both sides
Driving folded beam is connected with from each nearest minor structure fixed anchor point, and by being distributed in the stabilized structure equalizer bar of its both sides
It is connected with overall fixed anchor point；Testing agency is by the detection folded beam at left and right sides of it with being fixed from each nearest minor structure
Anchor point is connected, while is connected by crossbeam underbeam with crossbeam；
Each overall fixed anchor point is respectively and fixedly connected with the different bonding points in glass substrate from minor structure fixed anchor point, is made
Vibrating machine structure suspends on a glass substrate；Two sensitive-mass respectively have a public electrode to be attached thereto.
Further, the drive mechanism includes two groups of driving combs, and two groups of driving combs are symmetrically arranged, every group of drive
Dynamic broach includes activity-driven broach and fixed drive broach, and activity-driven broach is connected on the frame of drive mechanism, fixed
Driving comb is connected with fixed drive broach anchor point, and with the inserted arrangement of activity-driven broach, fixed drive comb anchor solid point
On the bonding point for the correspondence position being connected in the glass substrate；All fixed drive broach and the driving in glass substrate simultaneously
Electrode connects.
Further, the testing agency includes two groups of detection combs, two groups of detection comb arrangements symmetrical above and below, every group of inspection
Surveying broach includes activity detection broach and fixed test broach, and activity detection broach is connected on the frame of testing agency, fixed
Detection comb is connected with the fixed test broach anchor point on a glass substrate of being connected, and with the inserted arrangement of activity detection broach,
Fixed test comb anchor point is connected on the bonding point of the correspondence position in the glass substrate；All fixed test broach simultaneously
It is connected with the detecting electrode in glass substrate.
Further, the driving decoupling beam uses the form of single-beam.
Further, the crossbeam underbeam uses the form of single-beam, and is connected with crossbeam single-point.
Utilize the machine of double quality silicon micro-gyroscopes of the mechanical coupling error restraining device of above-mentioned double quality silicon micro-gyroscopes
Tool coupling error suppressing method, the mechanical coupling error suppressing method are：The crossbeam underbeam is adjusted with detecting folded beam
Ratio of rigidity makes the equalization point of the motion of testing agency just drive at the tie point for decoupling beam and testing agency；It is straight to adjust pedestal
The position of the length of beam and overall fixed anchor point, make company of deformation limit of the crossbeam under sensed-mode for crossbeam underbeam and crossbeam
Contact；Adjustment structure consolidates equalizer bar with driving the ratio of rigidity of coupled beams to make the motion of the drive mechanism at left and right sides of sensitive-mass
State is consistent.
Beneficial effect：(1) driving decoupling beam is reduced using the longer single-beam of length, the rigidity of beam, is reduced testing agency and is existed
The servo-actuated effect of driving direction, the space-consuming of single-beam diminish, and are more easy to place, and match somebody with somebody with crossbeam underbeam and the rigidity for detecting folded beam
Close, turning effect of the testing agency under driven-mode can be eliminated.The use of single-beam can increase the quality of sensitive-mass,
The turning effect of sensitive-mass reduces, and increases the stability of system, and the use of single-beam, and the turning effect of sensitive-mass is to detection
The transmission of mechanism can greatly reduce；(2) crossbeam underbeam uses the form of single-beam, and is connected with crossbeam single-point, can reduce and examine
Influence of the nonlinear deformation of mode sill to testing agency is surveyed, the turning effect of testing agency is reduced, with detecting folded beam
Common limitation testing agency, makes it in the linear movement of detection side；(3) length of pedestal straight beam and the position of fixed anchor point are adjusted
The limit for making the tie point of crossbeam underbeam and crossbeam be crossbeam nonlinear deformation, reduce in sensed-mode sill nonlinear deformation
Transmission to testing agency；(4) use of stabilized structure equalizer bar, and equalizer bar and driving coupled beams are consolidated by adjustment structure
Ratio of rigidity, drive the presence of coupled beams to cause the phenomenon of minor structure or so drive mechanism discontinuity equalization, make left and right driving machine
Structure motion state is consistent, and stabilized structure equalizer bar can reduce the turning effect of the drive mechanism under sensed-mode.
Brief description of the drawings
Accompanying drawing 1 is the mechanical coupling error restraining device structural representation of double quality silicon micro-gyroscopes of the invention；
Accompanying drawing 2 is mechanical coupling error dampening mechanism structural representation of the present invention；
Accompanying drawing 3 is the drive mechanism and drive feedback structural scheme of mechanism of double quality silicon micro-gyroscopes of the invention；
Accompanying drawing 4 is testing agency's schematic diagram of double quality silicon micro-gyroscopes of the invention；
Accompanying drawing 5 is the glass substrate schematic diagram of double quality silicon micro-gyroscopes of the invention.
Embodiment
The present invention is further described below in conjunction with the accompanying drawings.
With reference to accompanying drawing 1, the mechanical coupling error suppressing method and device of the double quality silicon micro-gyroscopes of the present invention are realized to hanging down
Directly in x-y horizontal planes input angular velocity measurement.Structure is divided into two layers up and down, and upper strata is the vibrating machine knot of silicon micro-gyroscope
Structure, lower floor are the glass substrate for being stained with signal lead.The mechanical structure of gyro is by two symmetrically placed identical lists
Quality angular velocity measurement unit minor structure 1a, 1b is formed；Under driven-mode, two simple substance angulation velocity measuring unit minor structures
Between by driving coupling folded beam 3a, 3b to establish association, under sensed-mode, pass through crossbeam 4a1,4b1,4a2,4b2 and establish
Association, crossbeam 4a1,4b1,4a2,4b2 by pedestal straight beam 10a1,10a2,10b1,10b2 and vibrating machine structure corner at
Four overall fixed anchor point 9a2,9a4,9b2,9b4 connections, the structure after association are all operated in driven-mode and sensed-mode
Under the situation of with same frequency and reversed-phase, two simple substance angulation velocity measuring unit Substructure Vibration characteristics reach unanimity.Simple substance angulation speed
Measuring unit minor structure 1a, 1b is by driving folded beam 13a1,13a2,13a3,13a4,13b1,13b2,13b3,13b4 and inspection
Survey folded beam 6a1,6a2,6a3,6a4,6b1,6b2,6b3,6b4 and minor structure fixed anchor point 9a1,9a3,9a5,9a6,9b1,
9b3,9b5,9b6 are connected, overall fixed anchor point 9a2,9a4,9b2,9b4 and minor structure fixed anchor point 9a1,9a3,9a5,9a6,
9b1,9b2,9b3,9b4 be respectively and fixedly connected with bonding point 23a1,23a6 in glass substrate, 23b1,23b2,21a3,23a2,
On 21a5,21a4,21b3,23b6,21b5,21b4, vibrating machine structure is set to suspend on a glass substrate；
Above-mentioned simple substance angulation velocity measuring unit minor structure 1a, 1b include sensitive-mass 2a, 2b, drive mechanism 14a1,
14b1,14a2,14b2, testing agency 8a1,8b1,8a2,8b2, stabilized structure equalizer bar 11a1,11b1,11a2,11b2, driving
Folded beam 13a1,13a2,13a3,13a4,13b1,13b2,13b3,13b4, detection folded beam 6a1,6a2,6a3,6a4,6b1,
6b2,6b3,6b4, detection decoupling beam 12a1,12b1,12a2,12b2, driving decouple beam 7a1,7b1,7a2,7b2 and minor structure
Fixed anchor point 9a1,9a2,9a3,9a4,9b1,9b2,9b3,9b4；Drive mechanism 14a1,14b1,14a2,14b2 it is symmetrically placed in
Sensitive-mass 2a, 2b left and right sides, drive mechanism 14a1,14b1,14a2,14b2 are by being distributed in sensitive-mass 2a, 2b left side
Detection decoupling beam 12a1,12b1,12a2,12b2 of right both sides form the type of drive recommended to sensitive-mass 2a, 2b.Driving machine
Structure 14a1,14b1,14a2,14b2 by be distributed in each up and down driving folded beam 13a1,13a2 of both sides, 13a3,13a4,
13b1,13b2,13b3,13b4 and stabilized structure equalizer bar 11a1,11b1,11a2,11b2 respectively with minor structure fixed anchor point
9a1,9a2,9a3,9a4,9a5,9a6,9b1,9b2,9b3,9b4,9b5,9b6 are connected, the folded beam 13a1 of setting driving here,
13a2,13a3,13a4,13b1,13b2,13b3,13b4 and stabilized structure equalizer bar 11a1,11b1,11a2,11b2 rigidity
Than making drive mechanism 14a1,14b1,14a2,14b2 be limited in the direction of motion along x-axis, turning effect is suppressed, and quick
The drive mechanism 14a1 and 14a2,14b1 and 14b2 that feel the left and right sides of quality 2a, 2b motion state keep relatively uniform.
As shown in Figure 2, testing agency 8a1,8b1,8a2,8b2 is by being distributed in both sides above and below sensitive-mass 2a, 2b
Driving decoupling beam 7a1,7b1,7a2,7b2 are connected with sensitive-mass 2a, 2b, are equally coriolis force is detected in a manner of recommending big
It is small.Passed through using driving decoupling beam 7a1,7b1,7a2,7b2 of single-beam form and driven in testing agency 8a1,8b1,8a2,8b2
Because driving decoupling beam 7a1,7b1,7a2,7b2 coupling produce the moving equilibrium of the center of rotation of turning effect under mode
Point place is connected with testing agency, so drives and decouples beam 7a1,7b1,7a2,7b2 to 8a1,8b1,8a2,8b2 of testing agency
Active force is reduced to zero.The thickness of design driven decoupling beam is h, length l, width w, and design driven decouples beam rigidity k
For：
E is the modulus of elasticity of structural material.
The position of testing agency 8a1,8b1,8a2,8b2 motion balance point by adjust tie-beam 5a1,5b1 under crossbeam,
5a2,5b2 are adjusted with detecting folded beam 6a1,6a2,6a3,6a4,6b1,6b2,6b3,6b4 rigidity.Adjust pedestal straight beam
10a1,10b1,10a2,10b2 length and overall fixed anchor point 9a2,9a4,9b2,9b4 position cause crossbeam underbeam 5a1,
5b1,5a2,5b2 and crossbeam 4a1,4b1,4a2,4b2 tie point are that crossbeam 4a1,4b1,4a2,4b2 are deformed under sensed-mode
Limit, with reference to detection folded beam 6a1,6a2,6a3,6a4,6b1,6b2,6b3,6b4 and minor structure fixed anchor point 9a1,9a3,
9a5,9a6,9b1,9b3,9b5,9b6 connection, testing agency 8a1,8b1,8a2,8b2 are limited in above-below direction vibration, turned
Dynamic effect is suppressed, therefore testing agency can only move up and down in sensitive direction；Testing agency and the drive of structure can be obtained more than
Complete decoupling is realized between motivation structure；Drive mechanism and testing agency move under driven-mode and under sensed-mode respectively
State is linear, the presence of no turning effect, inhibits mechanical coupling error well.
As shown in Figure 3, drive mechanism 14a1,14b1,14a2,14b2 use variable area to the drive mechanism of silicon micro-gyroscope
Formula broach electric capacity electrostatic drive form, it is arranged in sensitive-mass 2a, 2b left and right sides；Drive mechanism 14a1,14b1,14a2,
14b2 respectively includes two groups of driving combs, and two groups of driving combs are symmetrically arranged, and one group of driving comb includes activity-driven broach
15a1,15b1,15a2,15b2 and fixed drive broach 16a1,16b1,16a2,16b2.Now with the left part in drive mechanism 14a1
Exemplified by one group of driving comb structure：Activity-driven broach 15a1 is connected on drive mechanism 14a1 frame, fixed drive broach
16a1 and the inserted arrangements of activity-driven broach 15a1, and be connected with fixed drive broach anchor point 17a1, meanwhile, fixed drive
On the affixed bonding point 21a14 on a glass substrate of broach anchor point 17a1,21a14 is connected with driving electrodes 24a1, when driving
Electrode 24a1 applies alternating voltage UdsinωdT, and it is superimposed identical DC offset voltage Uo, and sensitive-mass 2a will be connected to
Public electrode 22a ground connection, therefore in the case that the level on activity-driven broach 14a1 is zero, activity-driven broach 14a1 by
To driving force be：
In formula, n0For activity-driven broach 15a1 single side comb teeth number, h is the thickness of broach, and ε is dielectric constant, and d is
Broach gap.In driving force FdIn the presence of, drive mechanism 14a1 promotes sensitive-mass 2a to vibrate by detecting decoupling beam 12a1.
When the shape that with same frequency and reversed-phase are under the driving of sensitive-mass 2a, 2b in drive mechanism 14a1,14b1,14a2,14b2
Vibrated under state, when having turning rate input perpendicular to plane of oscillation direction, the coriolis force that sensitive-mass 2a, 2b are subject to also is with frequency
Anti-phase, the size of coriolis force is：
Fg=-2m ωi×Vd
In formula, m be sensitive-mass 2a, 2b quality, ωiFor the angular speed inputted perpendicular to plane of oscillation direction, Vd is
The movement velocity of sensitive-mass 2a, 2b along driving direction；Coriolis force FgDirection by right-hand screw rule determine along detection direction,
Sensitive-mass 2a, 2b are in coriolis force FgIn the presence of moved along detection direction, and pass through and drive decoupling beam 7a1,7b1,7a2,7b2
Promote testing agency's 8a1,8b1,8a2,8b2 motion.
As shown in Figure 4, testing agency 8a1,8b1,8a2,8b2 are combed using variable area formula for the testing agency of silicon micro-gyroscope
Tooth capacitance detecting form, it is arranged in sensitive-mass 2a, 4b upper and lower；Testing agency 8a1,8b1,8a2,8b2 respectively include two groups
Detection comb, two groups of detection comb arrangements symmetrical above and below.Now by taking the upside detection comb structure in testing agency 8a1 as an example：It is living
Dynamic detection comb 18a1 is connected on testing agency 8a1 frame, and fixed test broach 19a1 and movable broach 18a1 are inserted
Arrangement, is connected with fixed test broach anchor point 20a1, the affixed bondings on a glass substrate of fixed test broach anchor point 20a1
Point 21a8, and be connected with detecting electrode 23a2, when sensitive-mass 2a is in coriolis force FgWhen acting on lower edge detection direction motion, detection
The capacitance change of broach is in mechanism 8a1：
In formula, n is activity detection broach 18a1 single side comb teeth number, and l is activity detection broach and fixed test broach
Overlap length, h is the thickness of broach, and ε is dielectric constant, d0For the primary clearance of broach, Δ y is detection displacement；Because inspection
Displacement Δ y is proportional to coriolis force Fg, so as to be proportional to input angular velocity ωi, thus can be measured by testing agency 8a1
Capacitance change Δ C deduces input angular velocity ωiSize.
The glass substrate of silicon micro-gyroscope as shown in Figure 5, including two parts of contact conductor and bonding point.For electrode
Lead portion：Public electrode 22a, 22b are connected with sensitive-mass 2a, 2b respectively；Driving electrodes 24a1 and fixed drive broach
16a1 and 16a3 is connected, driving electrodes 24a2 is connected with fixed drive broach 16a2 and 16a4, driving electrodes 24b1 drives with fixed
Dynamic broach 16b1 and 16b3 are connected, driving electrodes 24b2 is connected with fixed drive broach 16b2 and 16b4；Detecting electrode 23a1 with
Fixed test broach 18a1,18a3 are connected, detecting electrode 23a2 is connected with fixed test broach 18a2,18a4, detecting electrode
23a3 is connected with fixed test broach 18a6,18a8, detecting electrode 23a4 is connected with fixed test broach 18a5,18a7, detected
Electrode 23b1 is connected with fixed test broach 18b1,18b3, detecting electrode 23b2 is connected with fixed test broach 18b2,18b4,
Detecting electrode 23b3 is connected with fixed test broach 18b6,18b8, detecting electrode 23b4 and fixed test broach 18b5,18b7 phase
Even.For bonding point part：Fixed anchor point 9a1,9a2,9a3,9a4,9a5,9a6,17a1,17a2,17a3,17a4,20a1,
20a2、20a3、20a4、20a5、20a6、20a7、20a8、9b1、9b2、9b3、9b4、9b5、9b6、17b1、17b2、17b3、
17b4,20b1,20b2,20b3,20b4,20b5,20b6,20b7,20b8 respectively with bonding point 21a3,21a1,21a6,21a2,
21a5、21a4、21a15、21a16、21a18、21a17、21a8、21a9、21a7、21a10、21a12、21a13、21a11、
21a14、21b3、21b1、21b6、21b2、21b5、21b4、21b15、21b16、21b18、21b17、21b8、21b9、21b7、
21b10,21b12,21b13,21b11,21b14 are affixed.
To sum up, the mechanical coupling error restraining device of double quality silicon micro-gyroscopes of the invention has following effect with method
Fruit：(1) driving decoupling beam is reduced using the longer single-beam of length, the rigidity of beam, reduces testing agency in the servo-actuated of driving direction
Effect, the space-consuming of single-beam diminish, and are more easy to place, and coordinate with crossbeam underbeam and the rigidity for detecting folded beam, can eliminate inspection
Survey turning effect of the mechanism under driven-mode.The use of single-beam can increase the quality of sensitive-mass, and sensitive-mass turns
Dynamic effect reduces, and increases the stability of system, and the use of single-beam, the transmission meeting of the turning effect of sensitive-mass to testing agency
Greatly reduce；(2) crossbeam underbeam uses the form of single-beam, and is connected with crossbeam single-point, can reduce in sensed-mode sill
Influence of the nonlinear deformation to testing agency, reduce the turning effect of testing agency, detection limited jointly with detection folded beam
Mechanism, make it in the linear movement of detection side；(3) adjust pedestal straight beam length and fixed anchor point position make crossbeam underbeam with
The tie point of crossbeam is the limit of crossbeam nonlinear deformation, is reduced in sensed-mode sill nonlinear deformation to testing agency
Transmit；(4) use of stabilized structure equalizer bar, and equalizer bar is consolidated by adjustment structure and drives the ratio of rigidity of coupled beams, drive
The presence of dynamic coupled beams causes the phenomenon of minor structure or so drive mechanism discontinuity equalization, protects left and right drive mechanism motion state
Hold unanimously, and stabilized structure equalizer bar can reduce the turning effect of the drive mechanism under sensed-mode.
Described above is only the preferred embodiment of the present invention, it should be pointed out that：For the ordinary skill people of the art
For member, under the premise without departing from the principles of the invention, some improvements and modifications can also be made, these improvements and modifications also should
It is considered as protection scope of the present invention.
Claims (4)
1. the mechanical coupling error restraining device of pair quality silicon micro-gyroscope, it is characterised in that：Including upper and lower two layers, upper strata is to shake
Dynamic mechanical structure, lower floor is glass substrate；
The glass substrate includes some contact conductors and some bonding points, and the contact conductor includes public electrode, driving electricity
Three kinds of pole and detecting electrode；
The vibrating machine structure includes the identical simple substance angulation velocity measuring unit knot of two symmetrical placements
Structure；Driving coupling folded beam, and two simple substance angulation speed are connected between two simple substance angulation velocity measuring unit minor structures
Measuring unit minor structure respectively has a crossbeam, and the crossbeam of two simple substance angulation velocity measuring unit minor structure the same sides up and down
It is connected；The crossbeam is connected by pedestal straight beam with four overall fixed anchor points at vibrating machine structure corner；
Each simple substance angulation velocity measuring unit minor structure is put down including sensitive-mass, drive mechanism, testing agency, stabilized structure
Heng Liang, driving folded beam, detection folded beam, driving decoupling beam, detection decoupling beam and minor structure fixed anchor point；The drive mechanism
The left and right sides of sensitive-mass is symmetrically disposed at, beam and sensitive-mass are decoupled by being distributed in the detection at left and right sides of sensitive-mass
It is connected, forms the type of drive recommended to sensitive-mass；The testing agency is symmetrically disposed at the both sides up and down of sensitive-mass, leads to
Cross be distributed in sensitive-mass up and down both sides driving decoupling beam be connected with sensitive-mass, the big of Ge Shili is detected in a manner of recommending
It is small；The drive mechanism surrounds a hollow with testing agency, and the minor structure fixed anchor point has four, is respectively distributed to drive
At the inside corner for the hollow that motivation structure surrounds with testing agency；Driving of the drive mechanism by being distributed in its upper and lower both sides is rolled over
Stoplog is connected with from each nearest minor structure fixed anchor point, and by being distributed in the stabilized structure equalizer bar and entirety of its both sides
Fixed anchor point is connected；Testing agency by the detection folded beam at left and right sides of it with from respective nearest minor structure fixed anchor point phase
Even, while it is connected by crossbeam underbeam with crossbeam；
Each overall fixed anchor point is respectively and fixedly connected with the different bonding points in glass substrate from minor structure fixed anchor point, makes vibration
Mechanical structure suspends on a glass substrate；Two sensitive-mass respectively have a public electrode to be attached thereto；
The driving decoupling beam uses the form of single-beam；
The crossbeam underbeam uses the form of single-beam, and is connected with crossbeam single-point.
2. the mechanical coupling error restraining device of double quality silicon micro-gyroscopes according to claim 1, it is characterised in that：Institute
State drive mechanism and include two groups of driving combs, two groups of driving combs are symmetrically arranged, and every group of driving comb includes activity and driven
Dynamic broach is connected on the frame of drive mechanism with fixed drive broach, activity-driven broach, fixed drive broach and fixed drive
Broach anchor point connects, and is connected in the inserted arrangement of activity-driven broach, fixed drive comb anchor point in the glass substrate
Correspondence position bonding point on；All fixed drive broach are connected with the driving electrodes in glass substrate simultaneously.
3. the mechanical coupling error restraining device of double quality silicon micro-gyroscopes according to claim 1, it is characterised in that：Institute
State testing agency and include two groups of detection combs, two groups of detection comb arrangements symmetrical above and below, every group of detection comb includes activity inspection
Broach and fixed test broach are surveyed, activity detection broach is connected on the frame of testing agency, and fixed test broach is with being connected in glass
On glass substrate fixed test broach anchor point connection, and with the inserted arrangement of activity detection broach, fixed test comb anchor solid point
On the bonding point for the correspondence position being connected in the glass substrate；All fixed test broach and the detection in glass substrate simultaneously
Electrode connects.
4. double micro- tops of quality silicon of the mechanical coupling error restraining device based on double quality silicon micro-gyroscopes described in claim 1
The mechanical coupling error suppressing method of spiral shell instrument, it is characterised in that：The mechanical coupling error suppressing method is：Adjust the crossbeam
The ratio of rigidity of underbeam and detection folded beam makes the equalization point of the motion of testing agency just in driving decoupling beam and testing agency
At tie point；The length of pedestal straight beam and the position of overall fixed anchor point are adjusted, makes deformation limit of the crossbeam under sensed-mode
For crossbeam underbeam and the tie point of crossbeam；Adjustment structure consolidates equalizer bar with driving the ratio of rigidity of coupled beams to make sensitive-mass or so
The motion state of the drive mechanism of both sides is consistent.
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