CN108225295A - The three axis gyroscopes based on tuning fork driving effect - Google Patents
The three axis gyroscopes based on tuning fork driving effect Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
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Abstract
The invention discloses a kind of three axis gyroscopes based on tuning fork driving effect, including upper strata gyroscope arrangement and lower floor's glass substrate, upper strata gyroscope arrangement is made of left mechanical structure, right mechanical structure, intermediate mechanical structure, upper beam, bottom end rail, short beam and anchor point, the steering mechanism driven based on tuning fork is devised in intermediate mechanical structure, it is driven by the X-axis single direction to left and right mechanical structure, realize that the simple harmonic quantity driving of its X-axis and the simple harmonic quantity of intermediate mechanical structure sensitive quality Y-axis drive, ensure that it is not coaxial between driving frequency consistency.When there is turning rate input in the external world, sensitive-mass is generated displacement by Coriolis force.The present invention is using sensitive Quality Design and becomes space type capacitance Differential Detection, can inhibit the common mode interferences such as temperature, structural stress, acceleration；Symmetrical configuration arrangement of the present invention, stability is good, strong antijamming capability.
Description
Technical field
The present invention relates to MEMS and Mierotubule-associated proteins more particularly to a kind of three axis based on tuning fork driving effect are micro-
Gyroscope.
Background technology
It is different from traditional inertia device, MEMS (MicroElectroMechanical Systems, MEMS)
Mierotubule-associated proteins have that small, light-weight, at low cost, low energy consumption, reliability is high, are easy to digitlization, can meet adverse circumstances
Using etc. particular advantages, have wide civilian prospect and important Military value.
Tri- axis gyroscopes of MEMS are the important members in MEMS Mierotubule-associated proteins, equally have the advantages that above-mentioned, application
Range includes ordinary consumption product, stabilization of industry platform, and micro-nano satellite surely takes aim at image stabilization system and unmanned battle platform etc..
Traditional three single axis gyroscope integration modes need three road close-loop driven resonant tank controls, and control circuit is complicated,
Signal cross-talk easily occurs between multichannel driving circuit.Three uniaxial gyro integration modes will cause sensor bulk to increase, unfavorable
In micromation.
In addition, precision, integrated level of domestic monolithic integrated tri-axial gyroscope etc. still have compared with advanced foreign technology
Larger gap significantly limits the development and application of domestic Mierotubule-associated proteins.
Invention content
Goal of the invention：In view of the above problems, the present invention proposes that one kind is small, light-weight, integrated level is high, antijamming capability
The strong three axis gyroscopes based on tuning fork driving effect.
Technical solution：Purpose to realize the present invention, the technical solution adopted in the present invention are：One kind is driven based on tuning fork
Three axis gyroscopes of effect, including upper strata gyroscope arrangement and lower floor's glass substrate；The gyroscope arrangement includes left machinery
Structure, right mechanical structure, intermediate mechanical structure, upper beam, bottom end rail, short beam and anchor point；The left mechanical structure, intermediate mechanical
Structure and right mechanical structure are sequentially connected and connect, and symmetrical about gyroscope arrangement central axes；The upper beam respectively with left and right machine
The upper end of tool structure is connected, and lower end of the bottom end rail respectively with left and right mechanical structure is connected；The short beam respectively be located at it is upper,
Left and right ends, upper beam middle part upper end and the bottom end rail middle part lower end of bottom end rail, and be connected with the anchor point；The lower floor
Glass substrate is equipped with metal capacitance pole plate, signal lead and metal electrode；The anchor point of the upper strata gyroscope arrangement is bonded in
In lower floor's glass substrate.
Further, the left mechanical structure is identical with right mechanical structure.
Further, the left/right mechanical structure includes driver framework, and the first tie-beam, the first sensitive-mass, second connects
Connect beam, activity-driven broach, fixed driving comb, sensitive electrode, sensibility elasticity beam and fixed anchor point；First tie-beam has
Four, two of which is located at left and right sides of the outer upper ends of driver framework, is connect with upper beam, other two is located at driver framework
External lower end at left and right sides of, connect with bottom end rail；First sensitive-mass is located inside driver framework；Second connection
There are two beams, is located inside driver framework at left and right sides of middle-end, is connected with the first sensitive-mass；The activity-driven broach is total to
Four rows, respectively in driver framework outer left side, under left side, on right side, under right side, often arrange activity-driven broach there are two with
On, and be equidistantly vertically located on driver framework；The fixed driving comb is fixed on pedestal, totally four rows, is located at drives respectively
In dynamic frame outer left side, under left side, on right side, under right side, and with activity-driven broach to inserting；The sensitive electrode is fixed on
On pedestal, totally two pairs, respectively positioned at the first sensitive-mass inner upper end and interior lower end, each pair of sensitive electrode is mutually parallel；Institute
Totally four groups of sensibility elasticity beam is stated, respectively positioned at the first sensitive-mass upper left corner, the lower left corner, the upper right corner, the lower right corner, every group of sensitivity bullet
Property beam be made of two U-shaped beams, sensibility elasticity beam one end connect the first sensitive-mass, the other end connection fixed anchor point.
Further, the intermediate mechanical structure includes driving transfer beams, drives steering mechanism, and the second sensitive-mass drives
Dynamic coupling mechanism, drives spring beam and fixed anchor point；There are two the driving transfer beams, positioned at intermediate mechanical structure or so two
End, driving transfer beams one end are connected with left and right mechanical structure, and the other end is connected with the driving steering mechanism；The drive
There are four dynamic steering mechanism, respectively positioned at the upper left of intermediate mechanical structure, lower-left, upper right, bottom righthand side, driving steering mechanism one end
It is connected with driving transfer beams, the other end is connected with second sensitive-mass, and 90 degree of corners of middle-end are by being mutually 90 degree
U-shaped beam be connected with fixed anchor point；There are two second sensitive-mass, respectively positioned at intermediate mechanical structure top and bottom；
The driving coupling mechanism is located at the center of intermediate mechanical structure, and two the second sensitive-mass are by driving coupling mechanism to be connected
It connects；There are four the driving spring beams, respectively on the left of the second sensitive-mass upper end, on the right side of upper end, on the left of lower end and lower end
Right side；Spring beam one end is driven to connect the second sensitive-mass, other end connection fixed anchor point；The driving transfer beams, driving turn
To mechanism, coupling mechanism and driving spring beam is driven to be connected with the fixed anchor point.
Further, lower floor's glass substrate includes metal capacitance pole plate, anchor point bonding point, signal lead and signal electricity
Pole；The capacitor plate is included immediately below the first capacitor plate and the second sensitive-mass immediately below the first sensitive-mass
Second capacitor plate；The anchor point bonding point include public bonding point, bonding point, broach bonding point and sensitive electrode bonding
Point；One end of the signal lead is connected with anchor point bonding point, and the other end is connected with signal electrode；The signal electrode includes driving
Moving electrode, driving detecting electrode, x-axis sensitive electrode, y-axis sensitive electrode, z-axis sensitive electrode, common carrier electrode and ground electrode.
Further, external drive circuit applies the AC signal with direct current biasing in driving electrodes, is applied in public electrode
Add high-frequency carrier signal；The simple harmonic quantity for sensitive-mass being driven to realize X-axis by driver framework drives, by turning to frame by X-axis letter
It is humorous to drive the Y-axis simple harmonic quantity driving for being converted into sensitive-mass, so as to fulfill the actuating speed of different sensitive-mass X, Y both directions.
Further, x-axis sensitive electrode, y-axis sensitive electrode, z-axis sensitive electrode are connected to metal electricity by signal lead
Hold pole plate, when there is turning rate input in the external world, sensitive-mass is generated displacement by Coriolis force, so as to fulfill space type is become
Capacitance Differential Detection.
When there is Z axis turning rate input, the first sensitive-mass is acted on by Y direction coriolis force, will do letter along Y-axis
By left and right mechanical structure sensitive electrode, sensitive displacement signal is extracted for harmonic motion；When there is Y-axis turning rate input,
First sensitive-mass is acted on by Z-direction coriolis force, will do simple harmonic oscillation along Z axis, will be quick by the first capacitor plate
Sense displacement signal extracts；When there is X-axis turning rate input, the second sensitive-mass is acted on by Z-direction coriolis force, will
Simple harmonic oscillation is done along Z axis, by the second capacitor plate, sensitive displacement signal is extracted.
Advantageous effect：The three axis gyroscopes of the present invention have the advantage that：(1) steering mechanism is devised, is driven using tuning fork
Effect is driven by the X-axis single direction simple harmonic quantity to left and right mechanical structure, realizes the simple harmonic motion of its X-axis and intermediate mechanical knot
The simple harmonic motion of structure Y-axis, realizes the actuating speed of different sensitive-mass X, Y both directions, and ensure that it is not coaxial between drive
The consistency of dynamic frequency；(2) using sensitive Quality Design and change space type capacitance Differential Detection, sensitive-mass reverse phase drives,
Sensitive signal differential output, three angle detectings are all double quality differential detections, can inhibit temperature, stress, acceleration etc. altogether
Mould interferes, and enhances antijamming capability, increases output signal, improves output signal-noise ratio；(3) design driven broach and driving
Detection comb is conducive to external circuit extraction drive displacement, realizes closed-loop stabilization driving；(4) common carrier electrode is designed, favorably
Sensitive displacement signal is extracted using modulation-demodulation technique in external circuit, increases gyrostabilization and reliability.
Description of the drawings
Fig. 1 is the overall structure diagram of the present invention；
Fig. 2 is the left and right mechanical structure schematic diagram of the present invention；
Fig. 3 is the intermediate mechanical structure diagram of the present invention；
Fig. 4 is lower floor's glass substrate structure diagram of the present invention.
Specific embodiment
Technical scheme of the present invention is further described with reference to the accompanying drawings and examples.
As shown in Figure 1, the three axis gyroscopes based on tuning fork driving effect of the present invention, for measuring X, Y, Z axis direction
The angular speed of input, upper strata are the silicon micro-gyroscope structure made using monocrystalline silicon piece, and lower floor is glass substrate 6, upper strata gyro
The anchor point of instrument structure is bonded in lower floor's glass substrate.Lower floor's glass substrate is equipped with metal capacitance pole plate, signal lead and gold
Belong to electrode.Upper strata gyroscope arrangement includes left mechanical structure 1, right mechanical structure 2, intermediate mechanical structure 3, upper beam 4, bottom end rail
5, short beam 7-1a, 7-1b, 7-1c, 7-1d, 7-2a, 7-2b, 7-2c, 7-2d, fixed anchor point 8-1a, 8-1b, 8-1c, 8-1d, 8-
2a、8-2b、8-2c、8-2d.Left mechanical structure 1 is identical with right mechanical structure 2, respectively positioned at the left side of gyroscope arrangement and
Right side, and it is symmetrical about gyroscope arrangement central axes.Intermediate mechanical structure 3 is located at gyroscope arrangement center, left end and left machine
Tool structure is connected, and right end is connected with right mechanical structure, and symmetrical about gyroscope arrangement central axes.Upper beam 4 is distinguished
It is connected with the upper end of left and right mechanical structure, lower end of the bottom end rail 5 respectively with left and right mechanical structure is connected.Short beam 8-1a,
8-1b is located at the left and right ends of upper beam, and short beam 8-1d, 8-1c are located at the left and right ends of bottom end rail, and short beam 8-2a, 8-2b are located at
Upper end in the middle part of upper beam, short beam 8-2c, 8-2d are located at bottom end rail middle part lower end, and with fixed anchor point 8-1a, 8-1b, 8-1d, 8-
1c, 8-2a, 8-2b, 8-2c, 8-2d are connected.
As shown in Fig. 2, left mechanical structure 1 includes driver framework 1-1, first tie-beam 1-2a, 1-2b, 1-2c, 1-2d, the
One sensitive-mass 1-3, second tie-beam 1-4a, 1-4b, activity-driven broach 1-5a, 1-5b, 1-5c, 1-5d, fixed driving comb
Tooth 1-6a, 1-6b, 1-6c, 1-6d, sensitive electrode 1-7a, 1-7b, 1-8a, 1-8b, sensibility elasticity beam 1-9a, 1-9b, 1-9c, 1-
9d and fixed anchor point 1-10a, 1-10b, 1-10c, 1-10d.First tie-beam 1-2a, 1-2b is located at the outside of driver framework 1-1
At left and right sides of upper end, it is connect respectively with upper beam 4, first tie-beam 1-2c, 1-2d is located at external lower end of driver framework or so
Both sides are connect respectively with bottom end rail 5.First sensitive-mass 1-3 is located inside driver framework, and second tie-beam 1-4a, 1-4b is set
Inside the driver framework at left and right sides of middle-end, it is connected respectively with the first sensitive-mass.Activity-driven broach 1-5a, 1-5b, 1-
Respectively in driver framework outer left side, under left side, on right side, the lower end of right side, often arranging activity-driven broach has two by 5c, 1-5d
More than a, and equidistantly vertically it is located on driver framework.Fixed driving comb 1-6a, 1-6b, 1-6c, 1-6d are fixed on pedestal
On, respectively in driver framework outer left side, under left side, on right side, the lower end of right side, and with activity-driven broach to inserting.It is quick
Sense electrode 1-7a, 1-7b, 1-8a, 1-8b are fixed on pedestal, respectively positioned at the first sensitive-mass inner upper end and interior lower end.
Sensitive electrode is made of one piece of capacitor plate and a fixed anchor point, and capacitor plate is placed in parallel with sensitive-mass in Z axis, Gu
Determine anchor point with lower floor glass substrate to be connected.Sensibility elasticity beam 1-9a, 1-9b, 1-9c, 1-9d are located at the first sensitive-mass respectively
The upper left corner, the lower left corner, the upper right corner, the lower right corner, there are two U-shaped beam compositions for every group of sensibility elasticity beam；Sensibility elasticity beam one end connects
First sensitive-mass, the other end connection fixed anchor point 1-10a, 1-10b, 1-10c, 1-10d.
Right mechanical structure is identical with left mechanical structure.
As shown in figure 3, intermediate mechanical structure include driving transfer beams 3-1a, 3-1b, driving steering mechanism 3-2a, 3-2b,
3-2c, 3-2d, second sensitive-mass 3-3a, 3-3b drive coupling mechanism 3-4, driving spring beam 3-5a, 3-5b, 3-5c, 3-5d
With fixed anchor point 3-6a, 3-6b, 3-6c, 3-6d, 3-7a, 3-7b, 3-7c, 3-7d, 3-8a, 3-8b, 3-9a, 3-9b, 3-9c, 3-
9d.Driving transfer beams 3-1a one end is connected with left mechanical structure 1, the other end with steering mechanism 3-2a, 3-2b is driven to be connected,
Middle-end is connected by U-shaped beam with fixed anchor point 3-6a, 3-6b.Driving transfer beams 3-1b one end is connected with right mechanical structure 2,
With steering mechanism 3-2c, 3-2d is driven to be connected, middle-end is connected the other end by U-shaped beam with fixed anchor point 3-6c, 3-6d.It drives
Dynamic steering mechanism 3-2a, 3-2b, 3-2c, 3-2d are respectively positioned at the upper left of intermediate mechanical structure, lower-left, upper right, bottom righthand side, driving
Steering mechanism 3-2a one end is connected with driving transfer beams 3-1a, and the other end is connected with the second sensitive-mass 3-3a, and 90 degree turn
It is connected at angle by being mutually 90 degree of U-shaped beam with fixed anchor point 3-7a；Drive steering mechanism 3-2b one end and driving transfer beams 3-
1b is connected, and the other end is connected with the second sensitive-mass 3-3a；90 degree of corners pass through the U-shaped beam for being mutually 90 degree and fixed anchor
Point 3-7b is connected；Driving steering mechanism 3-2c one end is connected with driving transfer beams 3-1b, the other end sensitive matter with described second
Amount 3-3b is connected；90 degree of corners are connected by being mutually 90 degree of U-shaped beam with fixed anchor point 3-7c；Drive steering mechanism 3-2d
One end is connected with driving transfer beams 3-1a, and the other end is connected with the second sensitive-mass 3-3b；90 degree of corners pass through
90 degree of U-shaped beam is mutually with fixed anchor point 3-7d to be connected.Second sensitive-mass 3-3a, 3-3b is located in intermediate mechanical structure respectively
End and lower end, about horizontal X axial symmetry.Driving coupling mechanism 3-4 is located at the center of intermediate mechanical structure, U-shaped by being rolled over four more
Beam, two straight beams and center link block composition, center link block are connected by straight beam with fixed anchor point 3-8a, 3-8b.The
Two sensitive-mass 3-3a, 3-3b are by driving coupling mechanism to be connected with each other.Spring beam 3-5a, 3-5b is driven to be located at the second sensitive matter
It measures on the left of upper end and right side, driving spring beam 3-5d, 3-5c is located at the second sensitive-mass lower end left side and right side.Drive spring beam
One end connection sensitive-mass 3-3a of 3-5a, other end connection fixed anchor point 3-9a.One end connection for driving spring beam 3-5b is quick
Feel quality 3-3a, other end connection fixed anchor point 3-9b.Drive one end connection sensitive-mass 3-3b of spring beam 3-5c, the other end
Connect fixed anchor point 3-9c.Drive one end connection sensitive-mass 3-3b of spring beam 3-5d, other end connection fixed anchor point 3-9d.
As shown in figure 4, lower floor's glass substrate 6 includes capacitor plate, anchor point bonding point, signal lead and signal electrode.
Capacitor plate includes first capacitor plate 6-1a, 6-1b and second capacitor plate 6-2a, 6-2b.First capacitor plate is located at first
Immediately below sensitive-mass at projection；Second capacitor plate is located at immediately below the second sensitive-mass at projection.On anchor point bonding point is
Layer silicon structure anchor point and the region of lower floor's glass substrate bonding, including just driving movable comb alligator chalaza 6-3a, 6-3b, bear driving
Movable comb alligator chalaza 6-3c, 6-3d, positive driving detection movable comb alligator chalaza 6-4a, 6-4b, bears driving detection activity broach
Bonding point 6-4c, 6-4d, z-axis sensitivity positive electrode bonding point 6-5a, 6-5b, 6-5c, 6-5d, z-axis sensitivity negative electrode bonding point 6-
6a, 6-6b, 6-6c, 6-6d, public bonding point 6-7, ground bonding point 6-8.One end of signal lead is connected with anchor point bonding point, separately
One end is connected with signal electrode.Signal electrode includes driving positive electrode 6-9, drives negative electrode 6-10, driving detection positive electrode 6-
11, driving detection negative electrode 6-12, x-axis sensitivity positive electrode 6-13, x-axis sensitivity negative electrode 6-14, y-axis sensitivity positive electrode 6-15, y
Axis sensitivity negative electrode 6-16, z-axis sensitivity positive electrode 6-17, z-axis sensitivity negative electrode 6-18, common carrier electrode 6-19 and ground electrode
6-20。
The operation principle of the three axis gyroscopes based on tuning fork driving effect of the present invention：
Apply the positive AC drive voltage with direct current biasing in driving positive electrode 6-9, apply in driving negative electrode 6-10
Reverse phase AC drive voltage with direct current biasing generates the unilateral electrostatic drive power of alternation.Left mechanical structure driver framework and the right side
Mechanical structure driver framework realizes reverse phase simple harmonic oscillation in X-axis.Apply high-frequency carrier signal in common carrier electrode 6-19, on ground
Electrode 6-20 is grounded.The drive displacement of external drive circuit extraction driving detection positive electrode 6-11 and driving detection negative electrode 6-12
Signal can realize close-loop driven by external circuit and algorithm.
When gyroscope realizes close-loop driven, left the first sensitive-mass of mechanical structure and right the first sensitive-mass of mechanical structure
Realize X-axis reverse phase simple harmonic motion.Drive displacement turns to frame 3-2a, 3-2b, 3- by the way that transfer beams 3-1a, 3-1b is driven to act on
2c, 3-2d make its torsion, realize the Y-axis reverse phase simple harmonic motion of intermediate mechanical structure the second sensitive-mass 3-3a and 3-3b.Pass through
Single direction drives, and realizes the simple harmonic motion of the first sensitive-mass X-direction and the simple harmonic quantity of the second sensitive-mass Y direction
Movement.
When there is Z axis turning rate input, the first sensitive-mass is acted on by Y direction coriolis force, will do letter along Y-axis
Harmonic motion.Sensitive displacement signal is extracted by left and right mechanical structure sensitive electrode 1-7a, 1-7b, 1-8a, 1-8b.When
When having Y-axis turning rate input, the first sensitive-mass is acted on by Z-direction coriolis force, will do simple harmonic oscillation along Z axis.It is logical
First capacitor plate 6-2a, 6-2b is crossed to extract sensitive displacement signal.When there is X-axis turning rate input, the second sensitive matter
Amount is acted on by Z-direction coriolis force, will do simple harmonic oscillation along Z axis.It will be sensitive by second capacitor plate 6-1a, 6-1b
Displacement signal extracts.
As described above, although having described the present invention using particular instance, shall not be construed as to the present invention certainly
The limitation of body.It, can be to it in form and thin under the premise of the spirit and scope of the invention that the appended claims define is not departed from
It is made a variety of changes in section content, these variations also should be regarded as protection scope of the present invention.
Claims (7)
1. a kind of three axis gyroscopes based on tuning fork driving effect, it is characterised in that：Including upper strata gyroscope arrangement and lower floor
Glass substrate；
The gyroscope arrangement include left mechanical structure, right mechanical structure, intermediate mechanical structure, upper beam, bottom end rail, short beam and
Anchor point；The left mechanical structure, intermediate mechanical structure and right mechanical structure are sequentially connected and connect, and about gyroscope arrangement central axes
Symmetrically；Upper end of the upper beam respectively with left and right mechanical structure is connected, bottom end rail respectively under left and right mechanical structure
End is connected；The short beam is respectively under upper end in the middle part of the left and right ends of upper and lower crossbeam, upper beam and bottom end rail middle part
End, and be connected with the anchor point；
Lower floor's glass substrate is equipped with metal capacitance pole plate, signal lead and metal electrode；
The anchor point of the upper strata gyroscope arrangement is bonded in lower floor's glass substrate.
2. the three axis gyroscopes according to claim 1 based on tuning fork driving effect, it is characterised in that：The left machinery
Structure is identical with right mechanical structure.
3. the three axis gyroscopes according to claim 1 based on tuning fork driving effect, it is characterised in that：The left/right
Mechanical structure includes driver framework, the first tie-beam, the first sensitive-mass, the second tie-beam, activity-driven broach, fixed driving
Broach, sensitive electrode, sensibility elasticity beam and fixed anchor point；
There are four first tie-beams, and two of which is located at left and right sides of the outer upper ends of driver framework, is connect with upper beam,
Other two is located at left and right sides of the external lower end of driver framework, is connect with bottom end rail；
First sensitive-mass is located inside driver framework；
There are two second tie-beams, is located inside driver framework at left and right sides of middle-end, is connected with the first sensitive-mass；
The activity-driven broach totally four row, respectively in driver framework outer left side, under left side, on right side, under right side, often
Activity-driven broach is arranged there are two more than, and is equidistantly vertically located on driver framework；
The fixed driving comb is fixed on pedestal, totally four rows, respectively in driver framework outer left side, under left side, the right side
On side, under right side, and with activity-driven broach to inserting；
The sensitive electrode is fixed on pedestal, totally two pairs, respectively positioned at the first sensitive-mass inner upper end and interior lower end, often
It is mutually parallel to sensitive electrode；
Totally four groups of the sensibility elasticity beam, respectively positioned at the first sensitive-mass upper left corner, the lower left corner, the upper right corner, the lower right corner, every group
Sensibility elasticity beam is made of two U-shaped beams, and sensibility elasticity beam one end connects the first sensitive-mass, other end connection fixed anchor point.
4. the three axis gyroscopes according to claim 1 based on tuning fork driving effect, it is characterised in that：The intermediate machine
Tool structure includes driving transfer beams, drives steering mechanism, and the second sensitive-mass drives coupling mechanism, drives spring beam and fixation
Anchor point；
There are two the driving transfer beams, and positioned at intermediate mechanical structure left and right ends, driving transfer beams one end is tied with left and right machinery
Structure is connected, and the other end is connected with the driving steering mechanism；
There are four the driving steering mechanism, and respectively positioned at the upper left of intermediate mechanical structure, lower-left, upper right, bottom righthand side, driving turns
It is connected to mechanism one end with driving transfer beams, the other end is connected with second sensitive-mass, and 90 degree of corners of middle-end lead to
It crosses and is mutually 90 degree of U-shaped beam and is connected with fixed anchor point；
There are two second sensitive-mass, respectively positioned at intermediate mechanical structure top and bottom；
The driving coupling mechanism is located at the center of intermediate mechanical structure, and two the second sensitive-mass are by driving coupling mechanism phase
Connection；
There are four the driving spring beams, respectively on the left of the second sensitive-mass upper end, on the right side of upper end, on the left of lower end and lower end
Right side；Spring beam one end is driven to connect the second sensitive-mass, other end connection fixed anchor point；
The driving transfer beams drive steering mechanism, and coupling mechanism and driving spring beam is driven to be connected with the fixed anchor point
It connects.
5. the three axis gyroscopes according to claim 1 based on tuning fork driving effect, it is characterised in that：Lower floor's glass
Glass substrate includes metal capacitance pole plate, anchor point bonding point, signal lead and signal electrode；
The capacitor plate is included immediately below the first capacitor plate and the second sensitive-mass immediately below the first sensitive-mass
Second capacitor plate；
The anchor point bonding point include public bonding point, bonding point, broach bonding point and sensitive electrode bonding point；
One end of the signal lead is connected with anchor point bonding point, and the other end is connected with signal electrode；
The signal electrode includes driving electrodes, driving detecting electrode, x-axis sensitive electrode, y-axis sensitive electrode, z-axis sensitive electrical
Pole, common carrier electrode and ground electrode.
6. the three axis gyroscopes according to claim 1 based on tuning fork driving effect, it is characterised in that：External drive electricity
Road applies the AC signal with direct current biasing in driving electrodes, applies high-frequency carrier signal in public electrode；Pass through driver framework
Sensitive-mass is driven to realize the simple harmonic quantity driving of X-axis, drives the Y-axis for being converted into sensitive-mass simple X-axis simple harmonic quantity by turning to frame
Humorous driving, so as to fulfill the actuating speed of different sensitive-mass X, Y both directions.
7. the three axis gyroscopes according to claim 1 based on tuning fork driving effect, it is characterised in that：X-axis sensitive electrical
Pole, y-axis sensitive electrode, z-axis sensitive electrode are connected to metal capacitance pole plate by signal lead, when there is turning rate input in the external world
When, sensitive-mass is generated displacement by Coriolis force, so as to fulfill space type capacitance Differential Detection is become.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111024057A (en) * | 2019-12-30 | 2020-04-17 | 无锡莱斯能特科技有限公司 | Three-axis MEMS gyroscope |
| CN112284368A (en) * | 2020-09-21 | 2021-01-29 | 北京航天控制仪器研究所 | Fully-differential high-precision X-axis silicon micro-gyroscope |
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